Sensor device

By using sensor components and inferred components connected in parallel in the sensor device, the problem of degradation of sensitivity of the rotary sensor device in the prior art is solved, and high-precision load or torque detection is achieved, wiring problems are avoided, and the device is improved Sensitivity and reliability.

CN119178538APending Publication Date: 2024-12-24THE UNIV OF TOKYO +1
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Patent Information

Application Number
CN202410776132.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-06-23
Filing Date
2024-06-17
Publication Date
2024-12-24

AI Technical Summary

Technical Problem

The existing sensor devices are difficult to deal with when rotating or continuously rotated more than 360 degrees, and the sensitivity decreases when installed in a fixed position, so it is impossible to detect loads or torques with high accuracy.

Method used

Design a sensor device in which a plurality of sensor components are connected in parallel, installed on the object of detection, and calculate load or torque-related information based on the detection value of the sensor components through the inference unit, thereby avoiding the decrease in sensitivity caused by the series connection of the sensor components. and wiring issues.

Benefits of technology

It realizes the detection of load or torque-related information with high accuracy when the setting position is limited, avoids wiring problems, and improves the sensitivity and reliability of the sensor device.

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Abstract

The invention provides a sensor device which has few restrictions on installation positions and can detect information related to a load or torque acting on a detection object with high accuracy. A sensor device (100) detects information relating to a load or torque acting on an object to be detected. A sensor device (100) is provided with: a plurality of sensor members (102) attached to an object to be detected and connected in parallel with each other; and an estimation unit (104) that estimates information relating to a load or torque acting on the object to be detected on the basis of the detection values of the plurality of sensor members (102).
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Description

[0001] This application claims priority based on Japanese Patent Application No. 2023-103637 filed on June 23, 2023. The entire contents of the Japanese Patent Application are incorporated herein by reference. Technical Field

[0002] The invention relates to a sensor device. Background Art

[0003] Patent document 1 discloses a sensor device for detecting torque applied to a circular body. The sensor device has a resistance wire pattern arranged throughout the entire circumference of a circular body such as a flex gear, and has a structure in which a plurality of sensor components are connected in series. Thus, the torque applied to the circular body can be detected (calculated) with high accuracy.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2020-201046

[0005] The sensor device of Patent Document 1 is suitable for being set on the output component of the speed reducer to detect the torque, but since the output component rotates, it is limited by wiring, etc. and has difficult operation modes (for example, rotation exceeding 360 degrees and continuous rotation). In addition, the sensor device of Patent Document 1 has the following problem: if it is set on the fixed part, it will cause a decrease in sensitivity. Summary of the invention

[0006] The present invention has been made in view of such circumstances, and an exemplary object of one embodiment thereof is to provide a sensor device that has few restrictions on installation locations and can accurately estimate information related to a load or torque acting on a detection object.

[0007] In order to solve the above-mentioned problems, a sensor device according to one embodiment of the present invention detects information related to a load or torque acting on a detection object, and the sensor device comprises: a plurality of sensor components installed on the detection object and connected in parallel with each other; and an inference unit, which infers information related to the load or torque acting on the detection object based on the detection values ​​of the plurality of sensor components.

[0008] In addition, any combination of the above-mentioned constituent elements or contents in which constituent elements or expressions of the present invention are replaced with each other in methods, apparatuses, systems, etc. may also be practiced as embodiments of the present invention.

[0009] According to the present invention, it is possible to provide a sensor device which has few restrictions on the installation location and can detect information related to the load or torque acting on the detection object with high accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a cross-sectional view of a gear device to which the sensor device according to the embodiment is applied.

[0011] Figure 2 It is viewed from the axial direction. Figure 1 FIG. 1 is a diagram of the first meshing gear and its surroundings.

[0012] Figure 3 is along Figure 2 Sectional view taken along line AA.

[0013] Figure 4 It is a perspective view of a handle device to which a sensor device is applied.

[0014] In the figure: 10- gear device, 100- sensor device, 102- sensor component, 104- inference unit. DETAILED DESCRIPTION

[0015] In the following, the same or equivalent components, parts and processes in each figure are marked with the same symbols, and repeated descriptions are appropriately omitted. In addition, in order to facilitate understanding, the size of the components is appropriately enlarged or reduced in each figure. In addition, in each figure, a part of the components that are not important for the description of the embodiment is omitted.

[0016] In the embodiment, an example is given in which the sensor device detects information related to the torque acting on the first meshing gear when a certain component of the gear device is set as the first meshing gear. The detection object of the sensor device is not limited to the first meshing gear, and the device in which the detection object is assembled is not limited to the gear device.

[0017] First, a gear device to which the sensor device according to the embodiment is applied will be described.

[0018] refer to Figure 1 The flexure meshing gear device 10 (hereinafter referred to as the gear device 10) is assembled on a driven machine as a part of the driven machine. The driven machine is, for example, various machines such as industrial machines (machine tools, construction machines, etc.), robots (industrial robots, service robots, etc.), and handling equipment (conveyors, vehicles, etc.).

[0019] In the present embodiment, a cylindrical flexural meshing gear device 10 is described. The gear device 10 includes a vibrator 30, a flexural gear 26 that is flexibly deformed by the vibrator 30, meshing gears 28A and 28B that mesh with the flexural gear 26, and a vibrator bearing 32 disposed between the vibrator 30 and the flexural gear 26. In addition, the gear device 10 includes a vibrator shaft 20 having a vibrator 30, bearings 24A and 24B that support the vibrator shaft 20, bearing housings 22A and 22B that support the bearings 24A and 24B, and a housing 18. Hereinafter, the direction along the rotation center line C20 of the vibrator 30 will be referred to as the axial direction, and the radial direction and the circumferential direction with the rotation center line C20 as the center of the circle will be referred to as the radial direction and the circumferential direction, respectively. Furthermore, for ease of description, one side in the axial direction ( Figure 1 The right side of the paper is called the input side, and the other side in the axial direction is called the opposite input side.

[0020] The gear device 10 includes an input component for inputting rotation of an external driving source, an output component for outputting rotation to an external driven component, and a fixed component fixed to an external fixed component. Here, an example is described in which the vibrator shaft 20 (vibrator 30) is an input component, the second bearing housing 22B (described later) is an output component, and the housing 18 is a fixed component. The driving source is, for example, a motor, but in addition, it can also be a gear motor, an engine, etc. The driven component and the fixed component are, for example, part of a driven machine.

[0021] The vibrator 30 has a rigidity that allows the flexure gear 26 to bend and deform by its own rotation. The cross-sectional shape of the opposing peripheral portion (here, the outer peripheral portion) of the vibrator 30 that is radially opposed to the flexure gear 26 is elliptical. The cross-sectional shape here refers to the shape of the cross section of the vibrator 30 that is orthogonal to the axial direction. The "ellipse" here is not limited to an ellipse in the strict geometric sense, but also includes a rough ellipse.

[0022] The flex gear 26 is a flexible cylindrical member and is flexibly deformed into an elliptical shape corresponding to the shape of the vibrator 30 , and meshes with the meshing gears 28A and 28B at two locations in the long axis direction.

[0023] The meshing gears 28A and 28B have rigidity to such an extent that they do not bend and deform following the rotation of the vibrator 30. The meshing gears 28A and 28B include a first meshing gear 28A meshed with teeth on the input side of the flex gear 26 and a second meshing gear 28B meshed with teeth (internal teeth) on the opposite side of the input of the flex gear 26. The first meshing gear 28A has a number of teeth (for example, 102) different from the number of teeth (for example, 100) of the flex gear 26, and the second meshing gear 28B has the same number of teeth as the number of teeth of the flex gear 26.

[0024] One of the flex gear 26 and the meshing gears 28A, 28B is an external gear, and the other is an internal gear. Here, an example in which the flex gear 26 is an external gear and the meshing gears 28A, 28B are internal gears will be described.

[0025] The housing 18 of this embodiment includes a first housing member 18A that also serves as a first meshing gear 28A, a second housing member 18B that is disposed radially outward of the second meshing gear 28B, and a third housing member 18C that is disposed on the side of the first housing member 18A opposite to the second housing member 18B so as to sandwich the first housing member 18A between the third housing member 18C and the second housing member 18B. The housing members 18A, 18B, and 18C are connected together by a connecting member B such as a bolt. The housing 18 is a fixed member that is fixed to the outside of the gear device 10. A main bearing 36 is disposed between the housing 18 and the second meshing gear 28B.

[0026] The bearings 24A and 24B include a first bearing 24A disposed on the input side and a second bearing 24B disposed on the opposite side of the input. Although ball bearings are exemplified as the bearings 24A and 24B, the specific examples are not particularly limited, and various bearings such as roller bearings may be used.

[0027] The bearing housings 22A and 22B include a first bearing housing 22A supporting a first bearing 24A and a second bearing housing 22B supporting a second bearing 24B. The first bearing housing 22A is arranged on the input side in the axial direction relative to the flexure gear 26. The first bearing housing 22A is connected to the third housing member 18C by bolts or press-fitting. The second bearing housing 22B is arranged on the opposite side of the input in the axial direction relative to the flexure gear 26. The second bearing housing 22B is connected to the second meshing gear 28B by bolts or press-fitting.

[0028] Figure 2 It is viewed from the axial direction. Figure 1 FIG. 1 is a diagram of the first meshing gear and its surroundings. Figure 3 is along Figure 2 Sectional view taken along line AA.

[0029] The first meshing gear 28A (first housing member 18A) includes an internally-toothed annular portion 40 , an outer annular portion 42 provided radially outside the internally-toothed annular portion 40 , and an easily deformable portion 44 provided between the internally-toothed annular portion 40 and the outer annular portion 42 .

[0030] The internally-toothed annular portion 40 has an annular shape, and internal teeth 46 that mesh with the flex gear 26 are provided on the inner periphery thereof.

[0031] The outer annular portion 42 is annular and fixed to a fixed component outside the gear device 10. The outer annular portion 42 of this embodiment is connected to other housing components 18B and 18C constituting the housing 18 by bolts B, and is fixed to the fixed component via the housing components 18B and 18C (see Figure 1 ). In addition, the outer annular portion 42 may be fixed directly to the fixed component, or may be fixed to the fixed component via other components (for example, the first bearing housing 22A). In the outer annular portion 42 of the present embodiment, through holes 48 are formed at intervals along the circumferential direction for the connection components B connected to the housing components 18B and 18C to pass through.

[0032] The easily deformable portion 44 is connected to the outer periphery of the inner tooth annular portion 40 and to the inner periphery of the outer annular portion 42. The easily deformable portion 44 is configured so that when the outer annular portion 42 is fixed to the fixed member, if the inner tooth annular portion 40 is subjected to torque due to meshing with the flex gear 26, it is easier to deform than the inner tooth annular portion 40. In this case, it can also be said that the deformation amount of the easily deformable portion 44 is larger than that of the inner tooth annular portion 40. The easily deformable portion 44 of the present embodiment is set to have an axial thickness smaller than the axial thickness of the outer annular portion 42, but it can also be set to be greater than the axial thickness of the outer annular portion 42. In addition, the easily deformable portion 44 of the present embodiment is set to have an axial thickness smaller than the axial thickness of the inner tooth annular portion 40, but it can also be set to be greater than the axial thickness of the inner tooth annular portion 40. The easily deformable portion 44 of the present embodiment is annular. The easily deformable portion 44 of the present embodiment is annular and continuous over the entire circumference. The easily deformable portion 44 of the present embodiment does not have a hole portion penetrating in the axial direction.

[0033] The operation of the above gear device 10 is described. The flex gear 26 is flexed and deformed into an elliptical shape corresponding to the shape of the vibrator 30 of the vibrator shaft 20, and meshes with the meshing gears 28A and 28B at two locations in the long axis direction. If the vibrator shaft 20 rotates, the meshing position of the flex gear 26 and the meshing gears 28A and 28B moves along the rotation direction of the vibrator 30. At this time, the meshing position of the flex gear 26 with different numbers of teeth and the first meshing gear 28A rotates one circle, and these meshing teeth are gradually staggered in the circumferential direction. As a result, one of the parties (the flex gear 26 in this embodiment) rotates, and its rotation component is output from the output component as an output rotation. In this embodiment, the flex gear 26 and the second meshing gear 28B have the same number of teeth as each other and are therefore synchronized, and the rotation component of the flex gear 26 is output from the second bearing housing 22B as the output component after passing through the second meshing gear 28B synchronized with the flex gear 26. At this time, the output member outputs the input rotation input to the vibrator 30 after the speed is changed (here, reduced) by a speed ratio corresponding to the difference in the number of teeth between the flex gear 26 and the first meshing gear 28A.

[0034] Next, a sensor device according to an embodiment will be described.

[0035] refer to Figures 1 to 3 The sensor device 100 includes a plurality of sensor members 102 mounted on a detection target (ie, the first meshing gear 28A), and an estimation unit 104 that estimates information on the torque acting on the first meshing gear 28A based on detection values ​​of the plurality of sensor members 102 .

[0036] The plurality of sensor components 102 are sensors for detecting the deformation amount of the easily deformable portion 44 (in this embodiment, the deformation amount synthesized by the deformation in the circumferential direction and the deformation in the radial direction). The sensor component 102 in this embodiment is a strain gauge. In addition, the sensor component 102 may also be a piezoelectric element, for example. As described above, when the easily deformable portion 44 is deformed in the circumferential direction and strain is generated, the plurality of sensor components 102 can detect the deformation amount thereof. The plurality of sensor components 102 outputs a detection value (i.e., a detection signal indicating the deformation amount).

[0037] It is preferable that the plurality of sensor components 102 have the same structure. In other words, the plurality of sensor components 102 are configured to have the same structure, characteristics, and performance.

[0038] A plurality of sensor components 102 are mounted on the first housing component 18A which also serves as the first meshing gear 28A. That is, a plurality of sensor components 102 are mounted on a fixed component fixed to a fixed component on the outside of the gear device 10. Thus, it is possible to avoid problems with the power supply of the sensor component 102 or the routing of the sensor output. Furthermore, the sensor component 102 is mounted on the first meshing gear 28A having rigidity. For example, when the sensor component 102 is mounted on a component that is flexible and thus deforms greatly, a large load will be applied to the wiring of the sensor component 102, which may cause the wiring to break, but by mounting the sensor component 102 on the first meshing gear 28A having rigidity, such a problem can be avoided.

[0039] The plurality of sensor components 102 are mounted on the side surface 44a on the input side of the easily deformable portion 44 of the first meshing gear 28A. In addition, the plurality of sensor components 102 may also be mounted on the side surface 44a on the output side of the easily deformable portion 44. The plurality of sensor components 102 are arranged in a row along the circumferential direction, preferably at equal intervals along the circumferential direction.

[0040] The plurality of sensor components 102 are wired in parallel and connected to the estimation unit 104. In other words, the plurality of sensor components 102 are connected in parallel. Specifically, the plurality of sensor components 102 are connected to the estimation unit 104, respectively, to detect the deformation amount of the easily deformable portion 44 at each position, and output each detection value to the estimation unit 104. Figure 3 In order to avoid making the drawing complicated, only one sensor component 102 is shown, and the marking of the connection line between the sensor component 102 and the estimation unit 104 is omitted.

[0041] The first meshing gear 28A meshes with (i.e., contacts) the flexure gear 26 at two locations, so during the operation of the gear device 10, stress (i.e., deformation) is locally generated in the first meshing gear 28A with its meshing location as the center. That is, the distribution of the stress (i.e., deformation) acting on the first meshing gear 28A is uneven. In order to more accurately calculate the torque acting on the first meshing gear 28A, it is necessary to grasp the distribution of the stress (i.e., deformation) with high precision. For this purpose, it is preferred that the plurality of sensor components 102 are arranged without gaps in the circumferential direction. That is, the plurality of sensor components 102 are preferably arranged to cover the entire circumference of the easily deformable portion 44.

[0042] The inference unit 104 can be implemented by a combination of a processor (hardware) such as a CPU (Central Processing Unit) or an MPU (MicroProcessing Unit), a microcomputer, and a software program executed by the processor (hardware). The inference unit 104 can also be a combination of multiple processors. Alternatively, the inference unit 1040 can also be composed of hardware only.

[0043] The estimation unit 104 may be provided inside the gear device 10 or outside the gear device 10 .

[0044] The estimation unit 104 estimates the torque acting on the detection object (that is, the first meshing gear 28A) from the detection values ​​of the plurality of sensor members 102 by using any of the following estimation methods.

[0045] (Calculation based on total value)

[0046] The greater the torque acting on the first meshing gear 28A, the greater the deformation of the easily deformable portion 44, and thus the deformation amount of the easily deformable portion 44 increases. In this estimation method, it is considered that a proportional relationship is established between the total value of the deformation amounts detected by the plurality of (n) sensor components 102 and the torque acting on the first meshing gear 28A. At this time, the estimation unit 104 can detect the torque (T) acting on the first meshing gear 28A according to the following formula (1).

[0047] T=k1×(ε1+ε2+…+εn )……(1)

[0048] in,

[0049] k1 is the coefficient;

[0050] ε1~ε n is the deformation amount detected by the plurality of sensor components 102 .

[0051] The coefficient k1 can be determined, for example, using the deformation amounts detected by the plurality of sensor members 102 when a known torque is applied to the first meshing gear 28A.

[0052] (Calculated based on standard deviation)

[0053] As described above, the greater the torque acting on the first meshing gear 28A, the greater the deformation of the easily deformable portion 44. In this estimation method, it is considered that a proportional relationship is established between the standard deviation of the deformations detected by the plurality of sensor components 102 and the torque acting on the first meshing gear 28A. At this time, the estimation unit 104 can detect the torque (T) acting on the first meshing gear 28A according to the following formula (2).

[0054] [Formula 1]

[0055]

[0056] in,

[0057] k2 is the coefficient;

[0058] ε with a bar is an average value of the deformation amounts detected by the plurality of sensor components 102 .

[0059] The coefficient k2 can be determined, for example, using the deformation amounts detected by the plurality of sensor members 102 when a known torque is applied to the first meshing gear 28A.

[0060] (Calculation based on maximum and minimum values)

[0061] As described above, the greater the torque acting on the first meshing gear 28A, the greater the deformation of the easily deformable portion 44. In this estimation method, it is considered that a proportional relationship is established between the difference between the maximum value and the minimum value of the deformation detected by the plurality of sensor components 102 (i.e., the range of the deformation) and the torque acting on the first meshing gear 28A. At this time, the estimation unit 104 can detect the torque (T) acting on the first meshing gear 28A according to the following formula (3).

[0062] T=k3×{max(ε1,ε2,…,ε n )-min(ε1, ε2, …, ε n )}……(3)

[0063] in,

[0064] k3 is the coefficient;

[0065] max() represents the maximum value function in select();

[0066] min() is a function that represents the minimum value among the selected() functions.

[0067] The coefficient k3 can be determined, for example, using the deformation amounts detected by the plurality of sensor members 102 when a known torque is applied to the first meshing gear 28A.

[0068] (Based on machine learning calculations)

[0069] The inference unit 104 may include an identifier that has learned the correlation between the detection values ​​of the plurality of sensor components 102 and the torque acting on the first meshing gear 28A. In the machine learning of the identifier, a combination of the torque acting on the first meshing gear 28A and the detection values ​​detected by the plurality of sensor components 102 when the torque is applied to the first meshing gear 28A may be used as learning data. In this case, the inference unit 104 may use the identifier to infer the torque acting on the first meshing gear 28A. That is, the inference unit 104 may obtain the detection values ​​from the plurality of sensor components 102 and input them into the identifier, and obtain an output from the identifier (that is, an inferred value of the torque acting on the first meshing gear 28A).

[0070] Alternatively, the inference unit 104 may have an identifier that has learned the correlation between the rotation phase of the oscillator shaft 20 that rotates relative to the first meshing gear 28A, the detection values ​​of the multiple sensor components 102, and the torque acting on the first meshing gear 28A. In the machine learning of the identifier, the rotation phase of the oscillator shaft 20, the torque acting on the first meshing gear 28A, and the combination of the detection values ​​detected by the multiple sensor components 102 when the torque acts on the first meshing gear 28A can be used as learning data. At this time, the inference unit 104 can use the identifier to infer the rotation phase of the oscillator shaft 20 and the torque acting on the first meshing gear 28A. That is, the inference unit 104 can obtain the detection values ​​from the multiple sensor components 102 and input them into the identifier, and obtain the output from the identifier (that is, the rotation phase of the oscillator shaft 20 and the estimated value of the torque acting on the first meshing gear 28A).

[0071] In any case, the recognizer can be constructed using a known or future available machine learning method. For example, the recognizer can be constructed using a DNN (deep neural network), a CNN (convolutional neural network), or a RNN (recurrent neural network).

[0072] The identifier can use the existing identifier, but the existing identifier may be an identifier optimized for other gear devices. In this case, additional learning (i.e., tuning) is required for the identifier to be used. Therefore, the inference unit 104 can execute a learning mode for performing additional learning on the identifier. For example, after the multiple sensor components 102 are installed on the first meshing gear 28A, the inference unit 104 can control the drive source so that a known torque acts on the first meshing gear 28A, and use the detection values ​​of the multiple sensor components 102 at this time to make the identifier perform additional learning.

[0073] (Calculation based on fitting)

[0074] The inference unit 104 can fit a trigonometric function to the detection values ​​of multiple sensor components 102, and infer the torque based on the amplitude of the trigonometric function obtained by fitting. For example, the inference unit 104 can fit the following formula (4) to the detection values ​​of multiple sensor components 102. The inference unit 104 can use a well-known method such as the least squares method in the fitting. The form of formula (4) can be determined based on a graph plotting the detection values ​​of multiple sensor components 102 when a known torque is applied to the first meshing gear 28A. According to formula (4), the amplitude a is estimated as the torque acting on the first meshing gear 28A, the phase b is estimated as the rotation phase of the oscillator shaft 20, and c is estimated as the temperature of the first meshing gear 28A. The inference unit 104 can infer any one of the rotation phase and temperature, or the torque.

[0075] y=a(sin(θ+b)) 2+c ……(4)

[0076] In the above description, the case where the inference unit 104 infers the torque acting on the detection object (i.e., the first meshing gear 28A) is described, but the present invention is not limited to this, and the torque acting on the component related to the detection object (i.e., the first meshing gear 28A) (for example, the oscillator shaft 20 that rotates relative to the detection object (i.e., the first meshing gear 28A)) may be inferred. That is, the inference unit 104 may infer the torque acting on the component related to the first meshing gear 28A (i.e., the oscillator shaft 20) based on the deformation amount of the detection object (i.e., the easily deformable portion 44 of the first meshing gear 28A).

[0077] There is no particular limitation on what kind of control is performed based on the torque estimated by the estimation unit 104. For example, control may be performed to detect contact with an obstacle (eg, a person) and stop the drive source based on the estimated torque.

[0078] Next, the effect of the embodiment is described. According to the present embodiment, a plurality of sensor components 102 of the sensor device 100 are mounted on the detection object (i.e., the first meshing gear 28A) and connected in parallel. Since they are not connected in series but in parallel, the detection values ​​of the plurality of sensor components 102 are not averaged but directly output to the inference unit 104. Therefore, for example, the detection value (i.e., peak value) corresponding to the meshing position can be obtained. Therefore, information related to the torque acting on the detection object can be calculated with higher accuracy.

[0079] Furthermore, according to this embodiment, the inference unit 104 may include an identifier that has learned the relationship between the detection value of the sensor component and the torque, and infer the torque through the identifier. Although it depends on the performance of the identifier, the torque acting on the detection object can be inferred with high accuracy according to the identifier. Furthermore, the rotation phase of the rotating component that rotates relative to the detection object can also be inferred according to the identifier.

[0080] Furthermore, according to this embodiment, the inference unit 104 can fit a trigonometric function to the detection value of the sensor component and infer the torque based on the amplitude of the fitted trigonometric function. In this case, although it depends on the form of the fitted trigonometric function, the torque acting on the detection object can be inferred with high accuracy with a small amount of calculation. In addition, the rotation phase of the rotating component that rotates relative to the detection object can also be inferred.

[0081] The present invention has been described above based on the embodiments. Those skilled in the art should understand that the embodiments are examples, and that the combinations of the constituent elements and the processing procedures may have various modifications, and such modifications are also within the scope of the present invention.

[0082] (Variant 1)

[0083] The detection value of the sensor component 102 may be affected by temperature. For example, when the sensor component 102 is a strain gauge, if the ambient temperature rises, the detection value will also rise. The estimation unit 104 may perform temperature compensation.

[0084] Among the detection values ​​of the multiple sensor components 102 at a certain moment, the highest detection value is considered to be the detection value of the sensor component 102 located on the long axis side of the oscillator 30 (i.e., the detection value of the sensor component 102 corresponding to the meshing position), and the lowest detection value is considered to be the detection value of the sensor component 102 located on the short axis side of the oscillator 30 (i.e., the detection value of the sensor component 102 corresponding to the non-meshing position). Here, the detection values ​​of each of the multiple sensor components 102 may include a value corresponding to the deformation amount and a change value caused by the ambient temperature at that time, but since there is almost no deformation on the short axis side of the oscillator 30, it can be considered that the lowest detection value detected by the sensor component 102 on the short axis side of the oscillator 30 only includes the change value caused by the ambient temperature at that time. Therefore, as shown in the following formula (5), the inference unit 104 can use the value minus the lowest detection value as the detection value of the sensor component 102. In this case, the influence of the ambient temperature can be reduced.

[0085] ε i =ε i -min(ε1,ε2,…,ε n )……(5)

[0086] (Variant 2)

[0087] In the embodiment and the above-mentioned modification, the sensor device 100 is applied to a cylindrical flexure meshing gear device, but the specific example of the flexure meshing gear device is not particularly limited, and for example, it can also be a cup type or a top hat type. Moreover, in the case of a flexure meshing gear device, the meshing gears 28A and 28B can also be flexure gears. In addition to being applied to a flexure meshing gear device, the sensor device 100 can also be applied to an eccentric swing type gear device, a simple planetary gear device, and the like. Moreover, in the case of an eccentric swing type gear device, in addition to the center crank type in which a crankshaft is arranged on the axis of the gear meshing with the swing gear, a distribution type in which a crankshaft is arranged at a position offset from the axis of the meshing gear can also be adopted. Moreover, in various gear devices, the components (i.e., the detection object) to which multiple sensor components 102 are installed are not particularly limited. That is, the sensor device 100 can be applied to various gear devices, and its constituent components can be used as detection objects.

[0088] (Variant 3)

[0089] In the embodiment and the above-mentioned modification, the sensor device 100 is described as being applied to a gear device, but the sensor device 100 can also be applied to various mechanical devices other than the gear device. The mechanical device can be a device with a rotating motion. For example, the mechanical device can be a motor, a ball screw device, etc. The detection object to which the multiple sensor components 102 are configured can also be a component around a component that performs a rotating motion.

[0090] (Variant 4)

[0091] In the embodiment and the above-mentioned modification, the sensor device 100 has been described as estimating the torque acting on the detection object, but the present invention is not limited thereto, and information related to the load acting on the detection object may be estimated instead of the information related to the torque acting on the detection object. Similar to the torque, the load acting on the detection object may be estimated based on the detection values ​​of the plurality of sensor components 102 installed on the detection object, wired in parallel, and connected to the estimation unit 104.

[0092] refer to Figure 4 In this example, the sensor device 100 is applied to a handle device 50. The handle device 50 includes a disk-shaped handle portion 52 and a rotation shaft 54 ​​fixed vertically to the handle portion 52. The handle device 50 can rotate around a rotation center line C54 of the rotation shaft 54. A load can act on the handle device 50 in a direction along the rotation center line C54 of the rotation shaft 54 ​​(i.e., an axial direction) and in a radial direction around the rotation center line C54.

[0093] The plurality of sensor components 102 of the sensor device 100 are arranged on the detection object (i.e., the disk surface 52a of the handle portion 52) and arranged in a row along the circumferential direction. The plurality of sensor components 102 are wired in parallel and connected to the estimation unit 104. When a torque around the rotation axis 54 acts on the handle portion 52 or a load in the axial or radial direction acts on the handle portion 52, causing the handle portion 52 to deform, the plurality of sensor components 102 can detect the amount of deformation.

[0094] The inference unit 104 infers the torque and load acting on the detection object (i.e., the handle 52) based on the detection values ​​of the multiple sensor components 102. For example, the inference unit 104 may have an identifier that has learned the relationship between the detection values ​​of the multiple sensor components 102 and the torque and load acting on the handle 52. In learning the identifier, a combination of the torque and load acting on the handle 52 and the detection values ​​detected by the multiple sensor components 102 when the torque and load are applied to the handle 52 can be used as learning data. The inference unit 104 can obtain the detection values ​​from the multiple sensor components 102 and input them to the identifier, and obtain an output from the identifier (i.e., the estimated value of the torque and load acting on the handle 52).

[0095] The above embodiments and variations are only examples. These abstracted technical ideas should not be interpreted restrictively by the contents of the embodiments and variations. The contents of the embodiments and variations allow for many design changes such as changes, additions, and deletions of constituent elements. In the above embodiments, the content that can undergo such design changes is emphasized by annotating the mark "implementation method". However, it does not mean that design changes are not allowed for content without such a mark. The hatched lines marked on the cross-section of the accompanying drawings are not used to limit the material of the objects marked with hatched lines. The structures mentioned in the embodiments and variations certainly also include structures that can be considered the same if manufacturing errors, etc. are taken into account.

[0096] Any combination of the above-mentioned constituent elements is also effective. For example, any description items of the embodiment and other modified examples can be combined with the modified example.

Claims

1. A sensor device that detects information related to a load or torque acting on a detection object, the sensor device comprising: A plurality of sensor components are mounted on the detection object and connected in parallel with each other; and The estimation unit estimates information related to the load or torque acting on the detection object based on the detection values ​​of the plurality of sensor components.

2. The sensor device according to claim 1, characterized in that In the detection object, stress distribution is non-uniform during operation of a device in which the detection object is incorporated.

3. The sensor device according to claim 1, characterized in that The estimation unit includes an identifier that has learned the relationship between the detection values ​​of the plurality of sensor components and the load or torque, and estimates the load or torque using the identifier.

4. The sensor device according to claim 3, characterized in that The identifier is an identifier that learns the relationship between the rotation phase of a rotating member that rotates relative to a detection target object, the detection values ​​of the plurality of sensor members, and the load or torque.

5. The sensor device according to claim 3 or 4, characterized in that The estimation unit has a learning mode in which, after a plurality of sensor components are mounted on a detection object, a device in which the detection object is assembled is operated to cause the identifier to perform learning.

6. The sensor device according to claim 1, characterized in that The estimation unit fits a predetermined trigonometric function to the detection values ​​of the plurality of sensor components, and estimates the load or torque based on the amplitude of the fitted trigonometric function.

7. The sensor device according to claim 1, characterized in that The estimating unit estimates at least one of a phase and a temperature of a portion where the information related to the load or torque is estimated.