Exhaust assembly and control method thereof

Abstract

The invention discloses an exhaust assembly and a control method thereof.The exhaust assembly comprises a waste discharge branch pipe and a waste discharge header pipe connected with the waste discharge branch pipe, the waste discharge branch pipe is connected with an exhaust channel of a rotating unit, and the waste discharge header pipe is connected with a factory affair exhaust channel; and an air pressure sensor and an electric air door are arranged in each exhaust branch pipe. The opening degree of the electric air door in each waste discharge branch pipe can be adjusted, and when the pressure difference between any two waste discharge branch pipes connected with the same waste discharge main pipe exceeds + / -20 Pa, the opening degree of the corresponding electric air door is adjusted. The exhaust assembly comprises the control method of the exhaust assembly. The control method comprises the steps of air door aligning, pressure detecting, pressure comparing, pressure adjusting and the like. According to the scheme, the electric air doors are arranged on the waste discharge branch pipes, the sizes of the air doors are adjusted in real time according to the measured air pressure based on an adjusting strategy, it is guaranteed that the pressure difference of the exhaust channels is uniform, and the situation that the pressure of some exhaust channels is too large or too small, and consequently airflow in the rotating unit is unstable is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of exhaust gas emission, and more particularly to an exhaust component and a control method thereof. Background Art

[0002] In the coating and developing equipment, the working process of the rotating unit is as follows: the wafer is placed on the stage and rotated by the driving device. The chemical liquid is coated on the wafer and diffused to the entire wafer under the action of centrifugal force. During the processing, a uniform downward airflow needs to be supplied from above the wafer to make the chemical liquid on the surface of the wafer uniform. By converging several exhaust channels of the rotating unit together and connecting them to the factory exhaust channel, the gas in the rotating unit can be discharged.

[0003] In order to ensure uniform pressure difference between the rotating chamber and the factory exhaust channel, a damper is set at the connection with the factory exhaust channel to control the air pressure in the rotating chamber to be stable. However, in the prior art, only the damper is used to control the air pressure of the rotating unit, and the uniformity of several exhaust channels of the rotating unit is not adjusted, which leads to uneven pressure in each exhaust channel inside the rotating chamber, resulting in turbulent airflow inside the rotating unit, which affects the uniformity of the wafer surface treatment liquid. Summary of the invention

[0004] The object of the present invention is to provide a control method for an exhaust assembly to solve the technical problems existing in the above-mentioned background technology.

[0005] The technical solution of the present invention provides an exhaust assembly, comprising an exhaust branch pipe and an exhaust main pipe connected to the exhaust branch pipe, wherein the exhaust branch pipe is connected to the exhaust channel of the rotating unit, and the exhaust main pipe is connected to the factory exhaust channel; each of the exhaust branch pipes is provided with an air pressure sensor and an electric damper;

[0006] The opening size of the electric damper in each exhaust branch pipe is adjustable. When the pressure difference in any two exhaust branch pipes connected to the same exhaust main pipe exceeds ±20Pa, the opening size of the corresponding electric damper is adjusted.

[0007] In a preferred embodiment, the air pressure sensor and the electric damper are arranged sequentially along the gas flow direction.

[0008] A method for controlling an exhaust assembly comprises the following steps:

[0009] S1, damper return: before the rotating unit starts working, each electric damper is set to the starting position;

[0010] S2, pressure detection: the air pressure value in each exhaust branch pipe is detected by an air pressure sensor, and the value of each air pressure sensor is recorded as X1, X2...Xn respectively;

[0011] S3, pressure comparison: calculate whether the difference in the air pressure sensor values ​​in each exhaust branch pipe connected to the same exhaust main pipe is within the range of ±20Pa; if so, continue to the second step; if not, determine the adjustment strategy according to the position of the electric damper with the larger pressure value and the smaller pressure value;

[0012] S4, pressure regulation: based on the adjustment strategy, control the size of the damper;

[0013] S5, starting the cycle from step S2;

[0014] S6, the rotation unit completes its work and the program stops.

[0015] In a preferred embodiment, the starting position is a position where the electric damper is fully opened.

[0016] In a preferred embodiment, the adjustment strategy includes a first strategy and a second strategy, the first strategy is to give priority to adjusting the electric damper with a larger pressure value, the second strategy is to give priority to adjusting the electric damper with a smaller pressure value, and the first strategy is executed preferentially.

[0017] In a preferred embodiment, in the first strategy,

[0018] (1) When the electric damper with a larger pressure value is in a non-starting position and the electric damper with a smaller pressure value is in a starting position, the electric damper with a larger pressure value is adjusted to the starting position first;

[0019] (2) When the electric damper with a larger pressure value and the electric damper with a smaller pressure value are both in non-starting positions, the electric damper with the larger pressure value shall be adjusted to the starting position first;

[0020] In a preferred embodiment, in the second strategy,

[0021] (1) When the electric damper with a larger pressure value is at the starting position and the electric damper with a smaller pressure value is at a non-starting position, the position of the electric damper with the smaller pressure value should be adjusted first;

[0022] (2) When the electric damper with a larger pressure value and the electric damper with a smaller pressure value are both at the starting position, adjust the position of the electric damper with the smaller pressure value.

[0023] The beneficial effects of the technical solution of the present invention are:

[0024] In this solution, electric dampers are installed on the exhaust branch pipe. According to the measured air pressure, the size of each damper is adjusted in real time based on the adjustment strategy to ensure uniform pressure difference in each exhaust channel and avoid excessive or insufficient pressure in some exhaust channels, which will cause unstable airflow in the rotating unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the overall structure of the exhaust assembly of the present invention.

[0026] Figure 2 It is a schematic diagram of the internal structure of the exhaust component of the present invention.

[0027] Explanation of the reference numerals: 1 waste discharge branch pipe, 2 waste discharge outlet, 3 waste discharge main pipe, 4 factory exhaust channel, 5 air pressure sensor, 6 electric damper. DETAILED DESCRIPTION

[0028] The present invention is further described in detail below. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific uses.

[0029] like Figure 1-2 As shown, the technical solution of the present invention provides an exhaust component, including a waste exhaust branch pipe 1 and a waste exhaust main pipe 3 connected to the waste exhaust branch pipe 1, the waste exhaust branch pipe 1 is connected to the exhaust channel of the rotating unit, and the waste exhaust main pipe 3 is connected to the factory exhaust channel 4; each of the exhaust branch pipes is provided with an air pressure sensor 5 and an electric damper 6, and the air pressure sensor 5 and the electric damper 6 are arranged in sequence along the gas flow direction.

[0030] The exhaust gas in the rotating unit enters the exhaust branch pipe 1 through the exhaust port 2, and then is collected in the exhaust main pipe 3 and enters the factory exhaust channel 4. The opening size of the electric damper 6 in each exhaust branch pipe is adjustable. When the pressure difference in any two exhaust branch pipes 1 connected to the same exhaust main pipe 3 exceeds ±20Pa, the opening size of the corresponding electric damper is adjusted.

[0031] The embodiment of this scheme shows a case where a waste exhaust main pipe 3 is connected to two waste exhaust branch pipes 1. The electric damper 6 can adjust the diameter of the waste exhaust branch pipe 1, thereby adjusting the pressure of the exhaust channel. When the pressure difference between the two 1 exceeds ±20Pa, the opening size of the electric damper 6 is adjusted. The adjustment relationship is as follows: the smaller the diameter of the waste exhaust pipeline, the greater the pressure of the exhaust channel. The starting position of the electric damper 6 is the position where the diameter of the waste exhaust branch pipe 1 is the largest.

[0032] A method for controlling an exhaust assembly comprises the following steps:

[0033] S1, damper return: before the rotating unit starts working, each electric damper 6 is set to the starting position, that is, the electric damper 6 is in the fully open position;

[0034] S2, pressure detection: the air pressure value in each exhaust branch pipe 1 is detected by the air pressure sensor 5, and the value of each air pressure sensor 5 is recorded as X1, X2...Xn respectively;

[0035] S3, pressure comparison: calculate whether the difference in the values ​​of the air pressure sensors 5 in the exhaust branch pipes connected to the same exhaust main pipe is within the range of ±20Pa; if so, continue to the second step; if not, determine the adjustment strategy according to the position of the electric damper 6 with the larger pressure value and the smaller pressure value;

[0036] S4, pressure regulation: based on the adjustment strategy, control the size of the damper;

[0037] S5, starting the cycle from step S2;

[0038] S6, the rotation unit completes its work and the program stops.

[0039] The following is a further explanation: the adjustment strategy includes a first strategy and a second strategy. The first strategy is to give priority to adjusting the electric damper with a larger pressure value, and the second strategy is to give priority to adjusting the electric damper with a smaller pressure value, and the first strategy is executed first. The basic principles of the first strategy and the second strategy are to control the pressure difference within ±20Pa.

[0040] For example: X1 and X2 represent the gas pressure values ​​measured in the two exhaust branch pipes 1 respectively. If the difference between X1 and X2 is a positive value, it means that X1 is greater than X2; if the difference between X1 and X2 is a negative value, it means that X1 is less than X2; the adjustment strategy gives priority to adjusting the position of the electric damper 6 with a larger value.

[0041] In the first strategy:

[0042] (1) When the electric damper 6 with a larger pressure value is at a non-starting position and the electric damper 6 with a smaller pressure value is at a starting position, the electric damper 6 with a larger pressure value is first adjusted to the starting position;

[0043] (2) When the electric damper 6 with a larger pressure value and the electric damper 6 with a smaller pressure value are both located at non-starting positions, the electric damper 6 with the larger pressure value is adjusted to the starting position first.

[0044] During adjustment, for the above situation, if the corresponding electric damper 6 cannot meet the pressure difference requirement after being adjusted to the starting position, adjust the damper on the other side to reduce the pressure difference so that the pressure difference is within ±20Pa.

[0045] In the second strategy:

[0046] (1) When the electric damper 6 with a larger pressure value is at the starting position and the electric damper 6 with a smaller pressure value is at a non-starting position, the position of the electric damper 6 with the smaller pressure value is adjusted first;

[0047] (2) When the electric damper 6 with a larger pressure value and the electric damper 6 with a smaller pressure value are both at the starting positions, the position of the electric damper 6 with the smaller pressure value is adjusted.

[0048] The second strategy is the opposite of the first strategy. If the position of the damper with a larger value is adjusted first, the pipe diameter can only be reduced, which will result in a smaller pipe diameter, resulting in a larger waste outlet with a higher pressure. Therefore, the position of the electric damper 6 with a smaller value is adjusted first. In the second adjustment strategy, the pipe diameter of the damper with a smaller value is reduced, and the pressure difference is also within ±20Pa.

[0049] In this solution, an electric damper 6 is arranged on the exhaust branch pipe 1. According to the measured air pressure, the size of each damper is adjusted in real time based on the adjustment strategy to ensure that the pressure difference of each exhaust channel is uniform, thereby avoiding excessive or insufficient pressure in some exhaust channels, resulting in unstable airflow in the rotating unit.

[0050] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. An exhaust assembly, characterized in that: It includes a waste exhaust branch pipe and a waste exhaust main pipe connected to the waste exhaust branch pipe, the waste exhaust branch pipe is connected to the exhaust channel of the rotating unit, and the waste exhaust main pipe is connected to the factory exhaust channel; each of the exhaust branch pipes is provided with an air pressure sensor and an electric damper; The opening size of the electric damper in each exhaust branch pipe is adjustable. When the pressure difference in any two exhaust branch pipes connected to the same exhaust main pipe exceeds ±20Pa, the opening size of the corresponding electric damper is adjusted.

2. An exhaust assembly according to claim 1, characterized in that: The air pressure sensor and the electric damper are arranged in sequence along the gas flow direction.

3. A method for controlling an exhaust component according to any one of claims 1 to 2, characterized in that: The steps include: S1, damper return: before the rotating unit starts working, each electric damper is set to the starting position; S2, pressure detection: the air pressure value in each exhaust branch pipe is detected by an air pressure sensor, and the value of each air pressure sensor is recorded as X1, X2...Xn respectively; S3, pressure comparison: calculate whether the difference in the pressure sensor values ​​in each waste discharge branch pipe connected to the same waste discharge main pipe is within the range of ±20Pa; if so, proceed to the second step; If not, determine the adjustment strategy based on the position of the electric damper with the larger pressure value and the smaller pressure value; S4, pressure regulation: based on the adjustment strategy, control the size of the damper; S5, starting the cycle from step S2; S6, the rotation unit completes its work and the program stops.

4. A method for controlling an exhaust component according to claim 3, characterized in that: The starting position is a position where the electric damper is fully opened.

5. The control method of an exhaust component according to claim 3, characterized in that: The adjustment strategy includes a first strategy and a second strategy, wherein the first strategy is to give priority to adjusting the electric damper with a larger pressure value, and the second strategy is to give priority to adjusting the electric damper with a smaller pressure value, and the first strategy is executed first.

6. A method for controlling an exhaust component according to claim 5, characterized in that: In the first strategy, (1) When the electric damper with a larger pressure value is in a non-starting position and the electric damper with a smaller pressure value is in a starting position, the electric damper with a larger pressure value is adjusted to the starting position first; (2) When the electric damper with a larger pressure value and the electric damper with a smaller pressure value are both in non-starting positions, the electric damper with the larger pressure value shall be adjusted to the starting position first.

7. A method for controlling an exhaust component according to claim 5, characterized in that: In the second strategy, (1) When the electric damper with a larger pressure value is at the starting position and the electric damper with a smaller pressure value is at a non-starting position, the position of the electric damper with the smaller pressure value is adjusted first; (2) When the electric damper with a larger pressure value and the electric damper with a smaller pressure value are both at the starting position, adjust the position of the electric damper with the smaller pressure value.

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