High-rigidity macro-micro two-stage lifting platform

Abstract

The application discloses a high-rigidity macro-micro two-stage lifting platform, and relates to the fields of precision machining and precision detection.The lower moving table is located at the lower part and is fixedly connected with the lower sliding plate and the first set of cross roller guide rail modules; the upper moving table is located at the upper part and is fixedly connected with the upper sliding plate and the first set of cross roller guide rail modules; the linear motor module comprises a linear motor magnetic track and a linear motor coil; the linear motor magnetic track is fixedly connected with the base; the linear motor coil is fixedly connected with the lower sliding plate; the linear motor module drives the lower moving table to realize lifting with millimeter-level stroke; the piezoelectric ceramic module is fixedly installed on the side surface of the lower sliding plate, the elongated end is in contact with the side surface of the upper sliding plate, and the piezoelectric ceramic module drives the upper moving table to realize lifting with micron-level stroke.The macro-micro two-stage lifting mechanism has nanometer-level lifting precision, millimeter-level movement stroke and large carrying capacity, and provides a high-performance, low-cost lifting solution.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision machining and precision detection, and in particular to a high-rigidity macro-micro two-stage lifting platform. BACKGROUND

[0002] In the 21st century, the field of civil optics has experienced unprecedented development. With the continuous upgrading of smartphone cameras, the popularization of virtual reality technology, and the innovation of medical imaging equipment, not only has the performance of optical products been improved, but also higher requirements have been placed on precision machining and detection technology in the manufacturing process.

[0003] In the process of precision machining and precision detection, a high-precision lifting platform plays a crucial role. This lifting platform is a device used to achieve the precise movement of workpieces or tools in the vertical direction. It not only needs to be able to perform small displacements, but also needs to ensure the accuracy and repeatability of these displacements to ensure the precision of the machining or detection process. Today, the precision requirements for such lifting platforms have gradually increased from microns to nanometers.

[0004] In order to achieve nanometer-level lifting precision, researchers have developed micro-nano lifting platforms driven by piezoelectric ceramics, which can achieve very fine displacement control using the piezoelectric effect. However, this technology also has obvious limitations: the stroke and load capacity of piezoelectric ceramics are very limited, and they are easily damaged when subjected to tangential forces. In summary, there is currently no lifting platform that can maintain nanometer-level precision while having a millimeter-level movement range and the ability to withstand external loads in all directions. Therefore, there is an urgent need to develop a new type of high-performance lifting platform that has micro-nano lifting precision, a mechanical lifting range, and the ability to withstand external loads.

[0005] Therefore, the skilled person in the art is committed to developing a high-rigidity macro-micro two-stage lifting platform. SUMMARY

[0006] In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present application is that the existing lifting platform cannot meet both the requirements of large stroke and micro-feeding.

[0007] To achieve the above-mentioned purpose, the present application provides a high-rigidity macro-micro two-stage lifting platform, which comprises a lower moving table, an upper moving table, a linear motor module, a piezoelectric ceramic module, and a first set of cross-roller guide rail modules, wherein,

[0008] The lower moving table is located at the lower part of the lifting platform and comprises a base and a lower sliding plate, and the lower sliding plate is fixedly connected with the first set of cross-roller guide rail modules.

[0009] The upper layer mobile station is located on the upper part of the lifting platform, comprising an upper layer sliding plate, which is fixedly connected with the first group of cross roller guide rail modules;

[0010] The linear motor module comprises a linear motor magnetic track and a linear motor coil, the linear motor magnetic track is fixedly connected with the base, the linear motor coil is fixedly connected with the lower layer sliding plate, and the linear motor module drives the lower layer mobile station to realize millimeter-level travel lifting;

[0011] The piezoelectric ceramic module comprises a piezoelectric ceramic and a piezoelectric ceramic sleeve, the piezoelectric ceramic sleeve is fixedly installed on the side surface of the lower layer sliding plate, the piezoelectric ceramic is installed inside the piezoelectric ceramic sleeve, the elongated end of the piezoelectric ceramic is in contact with the side surface of the upper layer sliding plate, and the piezoelectric ceramic module drives the upper layer mobile station to realize micron-level travel lifting.

[0012] Further, the lower layer mobile station further comprises a second group of cross roller guide rail modules and a pneumatic holding brake module, wherein,

[0013] The second group of cross roller guide rail modules comprises a fifth cross roller guide rail, a sixth cross roller guide rail, a seventh cross roller guide rail, an eighth cross roller guide rail, a third guide rail retainer and a fourth guide rail retainer, the fifth cross roller guide rail and the seventh cross roller guide rail are fixedly connected with the surface of the base by screws respectively, the sixth cross roller guide rail and the eighth cross roller guide rail are fixedly connected with the lower layer sliding plate by screws respectively, the fifth cross roller guide rail, the sixth cross roller guide rail and the third guide rail retainer are in sliding connection, and the seventh cross roller guide rail, the eighth cross roller guide rail and the fourth guide rail retainer are in sliding connection;

[0014] The pneumatic holding brake module comprises a pneumatic holding brake and a holding brake seat, the pneumatic holding brake is fixedly installed on both sides of the upper surface of the base through the holding brake seat, the groove of the pneumatic holding brake is opposite to the protrusions on both sides of the lower layer sliding plate, and the number of the pneumatic holding brake and the holding brake seat is set to two pairs.

[0015] Further, the fifth cross roller guide rail and the seventh cross roller guide rail, the sixth cross roller guide rail and the eighth cross roller guide rail are symmetrically distributed relative to the center of symmetry of the lifting platform, and the bottom surfaces of the fifth cross roller guide rail, the sixth cross roller guide rail, the seventh cross roller guide rail and the eighth cross roller guide rail are in the same plane;

[0016] The third guide rail retainer and the fourth guide rail retainer are symmetrically distributed relative to the center of symmetry of the lifting platform, and are respectively slid in the rectangular space formed by the overlapping parts of the inner surfaces of the second group of cross roller guide rail modules.

[0017] Furthermore, the upper moving stage also includes: a third set of cross roller guide rail modules, a worktable base, and a worktable surface, wherein,

[0018] The third set of cross roller guide rail modules includes a ninth cross roller guide rail, a tenth cross roller guide rail, an eleventh cross roller guide rail, a twelfth cross roller guide rail, a fifth guide rail retainer, and a sixth guide rail retainer. The ninth and eleventh cross roller guide rails are respectively fixedly connected to the surface of the upper sliding plate with screws. The tenth and twelfth cross roller guide rails are respectively fixedly connected to the worktable base with screws. The ninth, tenth, and fifth cross roller guide rails are slidably connected to the fifth guide rail retainer, and the eleventh, twelfth, and sixth guide rail retainers are slidably connected.

[0019] The workbench surface is fixedly connected to the upper surface of the workbench base by screws.

[0020] Furthermore, the ninth cross roller guide rail, the eleventh cross roller guide rail, the tenth cross roller guide rail, and the twelfth cross roller guide rail are symmetrically distributed with respect to the symmetrical center plane of the lifting platform, and the bottom surfaces of the ninth cross roller guide rail, the tenth cross roller guide rail, the eleventh cross roller guide rail, and the twelfth cross roller guide rail are on the same plane.

[0021] The fifth guide rail holder and the sixth guide rail holder are symmetrically distributed with respect to the center of symmetry of the lifting platform, and slide within the rectangular space formed by the overlapping portion of the inner surface of the third set of cross roller guide rail modules.

[0022] Furthermore, the top surface of the upper sliding plate and the bottom surface of the worktable base are configured as a set of wedge-shaped surfaces. When the upper sliding plate and the worktable base move relative to each other in the horizontal direction, the worktable base will rise or fall.

[0023] Furthermore, the first set of crossed roller guide rail modules includes a first crossed roller guide rail, a second crossed roller guide rail, a third crossed roller guide rail, a fourth crossed roller guide rail, a first guide rail retainer, and a second guide rail retainer, wherein,

[0024] The first and second cross roller guides are fixedly connected to the upper surface of the lower sliding plate by screws, and the third and fourth cross roller guides are fixedly connected to the upper sliding plate by screws; the first and second cross roller guides are slidably connected by a first guide rail retainer, and the third and fourth cross roller guides are slidably connected by a second guide rail retainer;

[0025] The first and third cross roller guides, the second and fourth cross roller guides are symmetrically distributed with respect to the center of symmetry of the lifting platform; the bottom surfaces of the first, second, third and fourth cross roller guides are on the same plane; the first and second guide rail holders are symmetrically distributed with respect to the center of symmetry of the lifting platform and slide within the rectangular space formed by the overlapping portion of the inner surfaces of the first set of cross roller guide modules.

[0026] Furthermore, the piezoelectric ceramic sleeve includes a lower half and an upper half. The upper surface of the lower half and the lower surface of the upper half are both set as semi-cylindrical surfaces. The lower half is fixedly installed on the side of the lower sliding plate. The lower half and the upper half are fixed by screws. The lower half and the upper half together clamp the cylindrical outer surface of the piezoelectric ceramic.

[0027] Furthermore, a pair of tension springs are provided on both sides of the piezoelectric ceramic. The first end of the tension spring is fixed to the lower half of the piezoelectric ceramic sleeve by a spring tie, and the second end of the tension spring is fixed to the upper sliding plate by a spring rod. The tension spring is used to keep the extended end of the piezoelectric ceramic in contact with the side of the upper sliding plate at all times, so as to prevent the piezoelectric ceramic from colliding with the upper sliding plate after separation.

[0028] Furthermore, the lifting platform is provided with guide rod assemblies, and the guide rod assemblies are configured in two sets, which are symmetrically distributed with respect to the symmetrical center plane of the lifting platform;

[0029] The guide rod assembly includes a guide rod, a guide rod sleeve, and a sleeve base. The guide rod, the guide rod sleeve, and the sleeve base are coaxially mounted. The guide rod is fixedly connected to the bottom surface of the worktable by screws, and the guide rod sleeve is fixedly mounted on the upper surface of the base by the sleeve base.

[0030] In a preferred embodiment of the present invention, compared with the prior art, the present invention has the following beneficial effects:

[0031] 1. This invention adopts a macro-micro two-stage lifting mechanism. The lower moving stage is driven by a linear motor to achieve large-stroke lifting, while the upper moving stage is driven by a piezoelectric ceramic micro-drive to achieve nanoscale lifting. The two are used together to meet the requirements of both large stroke and micro-feed, solving the problem that the lifting platform cannot meet both large stroke and micro-feed, and providing a new solution for high-precision lifting in the processing and testing fields.

[0032] 2. This invention adopts a combination structure of wedge slider and linear guide rail, which transforms the external force on the worktable into positive pressure on the piezoelectric ceramic, improves the load-bearing capacity and rigidity of the mechanism, solves the problem that the lifting structure driven by piezoelectric ceramic cannot withstand tangential force, and provides a compact structural solution for the lifting platform.

[0033] 3. This invention uses a double pneumatic brake to fix the lower moving platform, which enables the lifting platform to withstand greater external forces and solves the problem that small-sized lifting platforms have limited external force resistance.

[0034] The following will further explain the concept, specific structure, and technical effects of the present invention in conjunction with the accompanying drawings, so as to fully understand the purpose, features, and effects of the present invention. Attached Figure Description

[0035] Figure 1 This is a schematic front view of the high-rigidity macro-micro two-stage lifting platform according to an embodiment of the present invention;

[0036] Figure 2 This is a schematic rear view of the high-rigidity macro-micro two-stage lifting platform according to an embodiment of the present invention;

[0037] Figure 3 This is a side view schematic diagram of a high-rigidity macro-micro two-stage lifting platform according to an embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of the isometric projection of the high-rigidity macro-micro two-stage lifting platform according to an embodiment of the present invention;

[0039] Figure 5 This is an exploded view of the relative positions of the crossed roller guides according to an embodiment of the present invention;

[0040] Figure 6 This is a diagram showing the installation position of the piezoelectric ceramic according to an embodiment of the present invention.

[0041] The labels in the diagram are explained as follows:

[0042] 1-Base, 2-1-Fifth Crossed Roller Guide, 2-2-Sixth Crossed Roller Guide, 2-3-Third Guide Rail Cage, 3-1-Seventh Crossed Roller Guide, 3-2-Eighth Crossed Roller Guide, 3-3-Fourth Guide Rail Cage, 4-Lower Sliding Plate, 5-1-Linear Motor Magnetic Rail, 5-2-Linear Motor Coil, 6-1-First Pneumatic Brake, 6-2-Second Pneumatic Brake, 7-1-First Brake Seat, 7-2-Second Brake Seat, 8-Upper Sliding Plate, 9-1-Ninth Crossed Roller Guide, 9-2-Tenth Crossed Roller Guide, 9-3-Fifth Guide Rail Cage, 10-1-Eleventh Crossed Roller Guide, 10-2-Twelfth Crossed Roller Guide, 10-3-Sixth Guide Rail Cage, 11-Workbench Base, 12-Workbench, 13- 1-First crossed roller guide rail, 13-2-Second crossed roller guide rail, 13-3-First guide rail retainer, 14-1-Third crossed roller guide rail, 14-2-Fourth crossed roller guide rail, 14-3-Second guide rail retainer, 15-1-Lower half of piezoelectric ceramic sleeve, 15-2-Upper half of piezoelectric ceramic sleeve, 16-Piezoelectric ceramic, 16-1-Extended end of piezoelectric ceramic, 17-1-First guide rod, 17-2-Second guide rod, 18-1-First guide rod sleeve, 18-2-Second guide rod sleeve, 19-1-First rod sleeve seat, 19-2-Second rod sleeve seat, 20-Linear grating ruler, 21-Gramming ruler reading head, 22-Reading head seat, 23-1-First tension spring, 24-1-First spring pull pin, 25-Spring pull rod, 26-Symmetrical center plane. Detailed Implementation

[0043] The following description, with reference to the accompanying drawings, illustrates several preferred embodiments of the present invention to make its technical content clearer and easier to understand. The present invention can be embodied in many different forms, and the scope of protection of the present invention is not limited to the embodiments mentioned herein.

[0044] In the accompanying drawings, components with the same structure are indicated by the same numerical designation, and components with similar structures or functions are indicated by similar numerical designations. The dimensions and thicknesses of each component shown in the drawings are arbitrary, and the present invention does not limit the dimensions and thicknesses of each component. To make the illustrations clearer, the thickness of some components has been appropriately exaggerated in the drawings.

[0045] like Figure 1 As shown, this embodiment of the invention provides a high-rigidity macro-micro two-stage lifting platform for the high-precision, long-stroke, and high-load lifting requirements in the fields of precision machining and precision testing. This lifting platform not only has nanometer-level lifting accuracy and millimeter-level motion stroke, but also has a large load-bearing capacity, providing a high-performance and low-cost lifting solution for the fields of precision machining and precision testing.

[0046] Specifically, the high-rigidity macro-micro two-stage lifting platform provided in this embodiment includes a lower moving platform, an upper moving platform, a linear motor module, a piezoelectric ceramic module, and a first set of cross roller guide rail modules, wherein...

[0047] The lower moving platform, located below the lifting platform, includes a base 1 and a lower sliding plate 4, which is fixedly connected to the first set of cross roller guide rail modules.

[0048] The upper moving platform is located above the lifting platform and is equipped with an upper sliding plate 8. The upper sliding plate 8 is fixedly connected to the first set of cross roller guide rail modules.

[0049] The linear motor module includes a linear motor magnetic track 5-1 and a linear motor coil 5-2. The linear motor magnetic track 5-1 is fixedly connected to the base 1, and the linear motor coil 5-2 is fixedly connected to the lower sliding plate 4. The linear motor module drives the lower moving stage to achieve millimeter-level lifting and lowering.

[0050] The piezoelectric ceramic module includes a piezoelectric ceramic 16 and a piezoelectric ceramic sleeve. The piezoelectric ceramic sleeve is fixedly installed on the side of the lower sliding plate 4, and the piezoelectric ceramic 16 is installed inside the piezoelectric ceramic sleeve. The extended end 16-1 of the piezoelectric ceramic contacts the side of the upper sliding plate 8. The piezoelectric ceramic module drives the upper moving stage to achieve micron-level lifting and lowering.

[0051] The first set of crossed roller guide modules includes a first crossed roller guide 13-1, a second crossed roller guide 13-2, a third crossed roller guide 14-1, a fourth crossed roller guide 14-2, a first guide rail cage 13-3, and a second guide rail cage 14-3, wherein...

[0052] The first cross roller guide rail 13-1 and the second cross roller guide rail 13-2 are fixedly connected to the upper surface of the lower sliding plate 4 by screws. The third cross roller guide rail 14-1 and the fourth cross roller guide rail 14-2 are fixedly connected to the upper sliding plate 8 by screws. The first cross roller guide rail 13-1 and the second cross roller guide rail 13-2 are slidably connected by the first guide rail retainer 13-3. The third cross roller guide rail 14-1 and the fourth cross roller guide rail 14-2 are slidably connected by the second guide rail retainer 14-3. The first cross roller guide rail 13-1, the third cross roller guide rail 14-1, the second cross roller guide rail 13-2, and the fourth cross roller guide rail 14-2 are symmetrically distributed with respect to the center plane 26 of the lifting platform. The bottom surfaces of the first cross roller guide rail 13-1, the second cross roller guide rail 13-2, the third cross roller guide rail 14-1, and the fourth cross roller guide rail 14-2 are on the same plane. The first guide rail retainer 13-3 and the second guide rail retainer 14-3 are symmetrically distributed with respect to the center plane of the lifting platform and slide within the rectangular space formed by the overlapping part of the inner surface of the first set of cross roller guide rail modules.

[0053] like Figure 1 and Figure 5 As shown, the lower moving platform also includes: a second set of cross roller guide rail modules and a pneumatic brake module, wherein,

[0054] The second set of cross roller guide modules includes a fifth cross roller guide 2-1, a sixth cross roller guide 2-2, a seventh cross roller guide 3-1, an eighth cross roller guide 3-2, a third guide retainer 2-3, and a fourth guide retainer 3-3. The fifth cross roller guide 2-1 and the seventh cross roller guide 3-1 are fixedly connected to the surface of the base 1 with screws. The sixth cross roller guide 2-2 and the eighth cross roller guide 3-2 are fixedly connected to the lower sliding plate 4 with screws. The fifth cross roller guide 2-1, the sixth cross roller guide 2-2, and the third guide retainer 2-3 are slidably connected. The seventh cross roller guide 3-1, the eighth cross roller guide 3-2, and the fourth guide retainer 3-3 are also slidably connected.

[0055] In this embodiment, the fifth cross roller guide rail 2-1, the seventh cross roller guide rail 3-1, the sixth cross roller guide rail 2-2, and the eighth cross roller guide rail 3-2 are symmetrically distributed with respect to the symmetry center plane 26 of the lifting platform, and the bottom surfaces of the fifth cross roller guide rail 2-1, the sixth cross roller guide rail 2-2, the seventh cross roller guide rail 3-1, and the eighth cross roller guide rail 3-2 are on the same plane. The third guide rail retainer 2-3 and the fourth guide rail retainer 3-3 are symmetrically distributed with respect to the symmetry center plane 26 of the lifting platform, and slide within the rectangular space formed by the overlapping portion of the inner surface of the second set of cross roller guide rail modules.

[0056] The pneumatic brake module includes a pneumatic brake and a brake seat. The pneumatic brake is fixedly installed on both sides of the upper surface of the base 1 through the brake seat. The groove of the pneumatic brake is opposite to the protrusions on both sides of the lower sliding plate 4.

[0057] In this embodiment, the number of pneumatic brakes and brake seats is set to two pairs. The first pneumatic brake 6-1 and the second pneumatic brake 6-2 are respectively fixedly installed on both sides of the upper surface of the base 1 by holding the first brake seat 7-1 and the second brake seat 7-2. At the same time, the grooves of the first pneumatic brake 6-1 and the second pneumatic brake 6-2 are opposite to the protrusions on both sides of the lower sliding plate 4.

[0058] like Figure 1 and Figure 5 As shown, the upper moving stage also includes: a third set of cross roller guide rail modules, a worktable base, and a worktable surface, wherein,

[0059] The worktable is fixedly connected to the upper surface of the worktable base with screws.

[0060] The third set of cross roller guide modules includes the ninth cross roller guide 9-1, the tenth cross roller guide 9-2, the eleventh cross roller guide 10-1, the twelfth cross roller guide 10-2, the fifth guide retainer 9-3, and the sixth guide retainer 10-3. The ninth cross roller guide 9-1 and the eleventh cross roller guide 10-1 are fixedly connected to the surface of the upper sliding plate 8 with screws. The tenth cross roller guide 9-2 and the twelfth cross roller guide 10-2 are fixedly connected to the worktable base 11 with screws. The ninth cross roller guide 9-1, the tenth cross roller guide 9-2, and the fifth guide retainer 9-3 are slidably connected. The eleventh cross roller guide 10-1, the twelfth cross roller guide 10-2, and the sixth guide retainer 10-3 are slidably connected.

[0061] The ninth cross roller guide rail 9-1, the eleventh cross roller guide rail 10-1, the tenth cross roller guide rail 9-2, and the twelfth cross roller guide rail 10-2 are symmetrically distributed with respect to the symmetry center plane 26 of the lifting platform. The bottom surfaces of the ninth cross roller guide rail 9-1, the tenth cross roller guide rail 9-2, the eleventh cross roller guide rail 10-1, and the twelfth cross roller guide rail 10-2 are on the same plane. The fifth guide rail cage 9-3 and the sixth guide rail cage 10-3 are also symmetrically distributed with respect to the symmetry center plane 26 of the lifting platform, and slide within the rectangular space formed by the overlapping portion of the inner surface of the third set of cross roller guide rail modules.

[0062] like Figure 6 As shown, in this embodiment, the piezoelectric ceramic 16 is cylindrical and installed in a piezoelectric ceramic sleeve. The piezoelectric ceramic sleeve includes a lower half 15-1 and an upper half 15-2. The upper surface of the lower half 15-1 and the lower surface of the upper half 15-2 are both semi-cylindrical. The lower half 15-1 is fixedly installed on the side of the lower sliding plate 4. The lower half 15-1 and the upper half 15-2 are fixed by screws. The lower half 15-1 and the upper half 15-2 together clamp the cylindrical outer surface of the piezoelectric ceramic 16.

[0063] To eliminate the tension transmitted by the piezoelectric ceramic during the vertical movement of the lifting platform, this invention provides a pair of tension springs on both sides of the piezoelectric ceramic 16. One end of the tension spring is fixed to the lower half 15-1 of the piezoelectric ceramic sleeve by a spring tie, and the other end is fixed to the upper sliding plate 8 by a spring rod 25. The tension springs are used to keep the extended end 16-1 of the piezoelectric ceramic in constant contact with the side of the upper sliding plate 8, preventing the piezoelectric ceramic 16 from colliding with the upper sliding plate 8 after separation. The pair of tension springs effectively eliminates the effect of the positive tension. Figure 6In the middle, one end of the first tension spring 23-1 is fixed to the lower half 15-1 of the piezoelectric ceramic sleeve by the first spring tie 24-1, and the other end of the tension spring is fixed to the upper sliding plate 8 by the spring rod 25. The tension spring is used to keep the elongated end 16-1 of the piezoelectric ceramic always in contact with the side of the upper sliding plate 8.

[0064] like Figure 3 As shown, the lifting platform provided in this embodiment is also equipped with a guide rod assembly. This guide rod assembly consists of two sets, symmetrically distributed with respect to the symmetry center plane 26 of the lifting platform. Each guide rod assembly includes a guide rod, a guide rod sleeve, and a sleeve seat. The guide rod, guide rod sleeve, and sleeve seat are coaxially mounted. The guide rod is fixedly connected to the bottom surface of the worktable 12 by screws, and the guide rod sleeve is fixedly mounted on the upper surface of the base 1 via the sleeve seat. In a preferred embodiment of the invention, the first guide rod 17-1, the first guide rod sleeve 18-1, and the first sleeve seat 19-1 are coaxially mounted, and the second guide rod 17-2, the second guide rod sleeve 18-2, and the second sleeve seat 19-2 are coaxially mounted. The first guide rod sleeve 18-1 and the second guide rod sleeve 18-2 are respectively fixedly mounted on the upper surface of the base 1 via the first sleeve seat 19-1 and the second sleeve seat 19-2.

[0065] like Figure 3 As shown, this embodiment also includes a linear grating ruler 20, which is fixed to the right side of the workbench base 11. The grating ruler reading head 21 is fixed to the upper surface of the base 1 via the reading head seat 22 and is installed opposite to the linear grating ruler 20.

[0066] Addressing the limitation of existing piezoelectric ceramic-driven nano-lifting platforms, which can only withstand positive pressure and a small amount of positive tension but cannot withstand tangential forces, this embodiment employs a combination structure of a wedge-shaped slider and a linear guide rail. This transforms external forces into positive pressure on the piezoelectric ceramic, thereby improving the mechanism's load-bearing capacity and rigidity. Figure 3 As shown, the top surface of the upper sliding plate 8 and the bottom surface of the worktable base 11 are set as a set of wedge-shaped surfaces. When the upper sliding plate 8 and the worktable base 11 move relative to each other in the horizontal direction, the worktable base 11 will rise or fall. Through the combination structure of the wedge slider, linear guide rail and guide rod assembly, the degree of freedom of the lifting platform can be restricted to only vertical movement, and the external force transmitted to the piezoelectric ceramic 16 is only positive pressure and tension. With the addition of a pair of tension springs, the effect of positive tension can be almost eliminated, thus solving the problem that the lifting structure driven by piezoelectric ceramics cannot withstand tangential force, and providing a compact structural solution for the lifting platform.

[0067] Taking the lifting of a lifting platform as an example, let's explain how each component moves. For example... Figure 3As shown, when the linear motor is energized and generates driving force, the linear motor coil 5-2 drives the lower sliding plate 4 to move to the right, and simultaneously drives the piezoelectric ceramic 16 to push the upper sliding plate 8 to move to the right. Finally, under the action of the wedge structure and the constraint of the guide rod assembly, the worktable base 11 moves vertically upward, realizing the large stroke rise of the lifting platform. When the lifting platform moves slightly upward, the pneumatic brake fixes the lower sliding plate 4 with clamping force. At this time, the piezoelectric ceramic 16 extends through the piezoelectric ceramic extension end 16-1, pushing the upper sliding plate 8 to move slightly to the right. Finally, under the action of the wedge structure, the worktable base 11 moves vertically upward slightly, realizing the slight rise of the lifting platform.

[0068] The following explains the external forces acting on the lifting platform: Since the worktable 12 and the worktable base 11 only have one degree of freedom—up and down—any external force not in this direction will ultimately be transmitted to the base 1 through the first guide rod 17-1, the second guide rod 17-2, the first guide rod sleeve 18-1, the second guide rod sleeve 18-2, and the first rod sleeve seat 19-1 and the second rod sleeve seat 19-2. When the worktable 12 is subjected to downward pressure, this pressure is converted into downward pressure and leftward thrust on the upper sliding plate 8 through the wedge structure. Similarly, when the worktable 12 is subjected to upward tension, it is converted into upward tension and rightward tension on the upper sliding plate 8 through the wedge structure. When this tension is less than the tension of the tension spring, the piezoelectric ceramic extension end 16-1 of the piezoelectric ceramic 16 remains in contact with the upper sliding plate 8 and bears the pressure of the upper sliding plate 8. Therefore, the piezoelectric ceramic 16 always bears positive pressure. When the pneumatic brake clamps and fixes itself to the lower sliding plate 4, the pressure on the piezoelectric ceramic 16 is transmitted to the base 1 through the piezoelectric ceramic sleeve, the lower sliding plate 4, the pneumatic brake, and the brake seat. At this time, no external force is transmitted to the linear motor. Furthermore, because the clamping force of the pneumatic brake is much greater than the driving force of the linear motor, the lifting platform of this invention can withstand a greater external load.

[0069] Therefore, in this embodiment, by using the combination structure of wedge slider, linear guide rail and guide rod assembly, the degree of freedom of the lifting platform can be restricted to only vertical movement, and the external force transmitted to the piezoelectric ceramic 16 is only positive pressure and tension. By setting a pair of tension springs, the effect of positive tension can be almost eliminated, solving the problem that the lifting structure driven by piezoelectric ceramic cannot withstand tangential force, and at the same time providing a compact structural solution for the lifting platform.

[0070] Compared with the prior art, the high-rigidity macro-micro two-stage lifting platform provided in this embodiment of the invention has the following beneficial effects:

[0071] 1. Addressing the limitation of existing lifting platforms in simultaneously handling both large stroke and micro-feed requirements, this invention employs a two-stage macro-micro lifting mechanism: a linear motor drives the lower moving stage for large stroke lifting; piezoelectric ceramic micro-drives the upper moving stage for nanometer-level lifting. The linear motor's stroke is typically in the millimeter range with micrometer-level precision, while the piezoelectric ceramic's stroke is typically in the micrometer range with nanometer-level precision. The combined use of these two mechanisms can accommodate both large stroke and micro-feed requirements, solving the problem of lifting platforms being unable to simultaneously handle both. This provides a new solution for high-precision lifting in processing and inspection fields.

[0072] 2. Addressing the issue that existing piezoelectric ceramic-driven nano-lifting platforms can only withstand positive pressure and a small amount of positive tension, but cannot withstand tangential forces, this invention employs a combination structure of a wedge-shaped slider and a linear guide rail. This transforms the external force on the worktable surface into positive pressure on the piezoelectric ceramic, improving the mechanism's load-bearing capacity and rigidity. Through this combination of a wedge-shaped slider, linear guide rail, and guide rod assembly, the lifting platform's degrees of freedom are restricted to vertical movement only, and the external forces transmitted to the piezoelectric ceramic are limited to positive pressure and tension. Combined with a pair of tension springs, the positive tension is almost eliminated, solving the problem of piezoelectric ceramic-driven lifting structures being unable to withstand tangential forces, while also providing a compact structural solution for the lifting platform.

[0073] 3. Addressing the limitation of existing small-sized lifting platforms in withstanding large external loads due to the driving force of the motor, this invention employs a dual pneumatic brake to secure the lower moving platform, enabling it to withstand greater external forces. Considering that in practical applications, when the lifting platform undergoes minor lifting movements, the linear motor is not in operation, and the guide rail is typically fed by piezoelectric ceramics, a dual brake structure is used to lock the lower moving platform in place during operation. This locking force is significantly greater than the motor's driving force, thus allowing the lifting platform to withstand greater external forces and solving the problem of limited external force resistance in small-sized lifting platforms.

[0074] This invention addresses the high-precision, long-stroke, and high-load lifting requirements in precision machining and precision testing fields by providing a high-rigidity macro-micro two-stage lifting platform, filling a technological gap in this area. This lifting platform not only boasts nanometer-level lifting accuracy and millimeter-level stroke but also significant load-bearing capacity, offering a high-performance, low-cost lifting solution for precision machining and precision testing. It can be widely applied to tool holder and workpiece height adjustment in precision machine tools and sample height adjustment in precision testing instruments, demonstrating broad application prospects.

[0075] The preferred embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make numerous modifications and variations based on the concept of the present invention without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning, or limited experimentation on the basis of existing technology should be within the scope of protection defined by the claims.

Claims

1. A high-rigidity macro-micro two-stage lifting platform, characterized in that, The lifting platform includes a lower moving platform, an upper moving platform, a linear motor module, a piezoelectric ceramic module, and a first set of cross roller guide rail modules. The lower moving platform is located below the lifting platform and includes a base and a lower sliding plate. The lower sliding plate is fixedly connected to the first set of cross roller guide rail modules. The upper moving platform is located above the lifting platform and includes an upper sliding plate. The upper sliding plate is fixedly connected to the first set of cross roller guide rail modules. The linear motor module includes a linear motor magnetic track and a linear motor coil. The linear motor magnetic track is fixedly connected to the base, and the linear motor coil is fixedly connected to the lower sliding plate. The linear motor module drives the lower moving platform to achieve millimeter-level lifting and lowering. The piezoelectric ceramic module includes a piezoelectric ceramic and a piezoelectric ceramic sleeve. The piezoelectric ceramic sleeve is fixedly installed on the side of the lower sliding plate. The piezoelectric ceramic is installed inside the piezoelectric ceramic sleeve. The extended end of the piezoelectric ceramic contacts the side of the upper sliding plate. The piezoelectric ceramic module drives the upper moving stage to achieve micron-level lifting and lowering. in, The lower moving platform also includes a pneumatic brake module, which includes a pneumatic brake and a brake seat. The pneumatic brake is fixedly installed on both sides of the upper surface of the base through the brake seat. The groove of the pneumatic brake is opposite to the protrusions on both sides of the lower sliding plate. The number of pneumatic brakes and brake seats is set to two pairs. The clamping force of the pneumatic brake is set to be much greater than the driving force of the linear motor module; When the lifting platform moves slightly upward, the pneumatic brake fixes the lower sliding plate with clamping force. The piezoelectric ceramic transmits the pressure it receives through the piezoelectric ceramic sleeve, the lower sliding plate, the pneumatic brake, and the brake seat to the base step by step. The external force is not transmitted to the linear motor module. The top surface of the upper sliding plate and the bottom surface of the worktable base are set as a set of wedge-shaped surfaces. When the upper sliding plate and the worktable base move relative to each other in the horizontal direction, the worktable base will rise or fall. The piezoelectric ceramic sleeve includes a lower half and an upper half. The upper surface of the lower half and the lower surface of the upper half are both set as semi-cylindrical surfaces. The lower half is fixedly installed on the side of the lower sliding plate. The lower half and the upper half are fixed by screws. The lower half and the upper half together clamp the cylindrical outer surface of the piezoelectric ceramic. A pair of tension springs are provided on both sides of the piezoelectric ceramic. The first end of the tension spring is fixed to the lower half of the piezoelectric ceramic sleeve by a spring tie, and the second end of the tension spring is fixed to the upper sliding plate by a spring rod. The tension spring is used to keep the extended end of the piezoelectric ceramic in contact with the side of the upper sliding plate at all times, so as to prevent the piezoelectric ceramic from colliding with the upper sliding plate after separation.

2. The lifting platform as described in claim 1, characterized in that, The lower moving platform also includes: a second set of cross roller guide rail modules, wherein... The second set of cross roller guide rail modules includes a fifth cross roller guide rail, a sixth cross roller guide rail, a seventh cross roller guide rail, an eighth cross roller guide rail, a third guide rail retainer, and a fourth guide rail retainer. The fifth and seventh cross roller guide rails are respectively fixedly connected to the base surface with screws. The sixth and eighth cross roller guide rails are respectively fixedly connected to the lower sliding plate with screws. The fifth, sixth, and third cross roller guide rails are slidably connected to the third guide rail retainer, and the seventh, eighth, and fourth guide rail retainers are slidably connected.

3. The lifting platform as described in claim 2, characterized in that, The fifth, seventh, sixth, and eighth cross roller guides are symmetrically distributed with respect to the center plane of the lifting platform, and the bottom surfaces of the fifth, sixth, seventh, and eighth cross roller guides are on the same plane. The third guide rail holder and the fourth guide rail holder are symmetrically distributed with respect to the symmetrical center plane of the lifting platform, and slide within the rectangular space formed by the overlapping portion of the inner surface of the second set of cross roller guide rail modules.

4. The lifting platform as described in claim 3, characterized in that, The upper moving platform also includes: a third set of cross roller guide rail modules, a worktable base, and a worktable surface, wherein... The third set of cross roller guide rail modules includes a ninth cross roller guide rail, a tenth cross roller guide rail, an eleventh cross roller guide rail, a twelfth cross roller guide rail, a fifth guide rail retainer, and a sixth guide rail retainer. The ninth and eleventh cross roller guide rails are respectively fixedly connected to the surface of the upper sliding plate with screws. The tenth and twelfth cross roller guide rails are respectively fixedly connected to the worktable base with screws. The ninth, tenth, and fifth cross roller guide rails are slidably connected to the fifth guide rail retainer, and the eleventh, twelfth, and sixth guide rail retainers are slidably connected. The workbench surface is fixedly connected to the upper surface of the workbench base by screws.

5. The lifting platform as described in claim 4, characterized in that, The ninth, eleventh, tenth, and twelfth cross roller guides are symmetrically distributed with respect to the center plane of the lifting platform, and the bottom surfaces of the ninth, tenth, eleventh, and twelfth cross roller guides are on the same plane. The fifth guide rail holder and the sixth guide rail holder are symmetrically distributed with respect to the center of symmetry of the lifting platform, and slide within the rectangular space formed by the overlapping portion of the inner surface of the third set of cross roller guide rail modules.

6. The lifting platform as described in claim 5, characterized in that, The first set of crossed roller guide modules includes a first crossed roller guide, a second crossed roller guide, a third crossed roller guide, a fourth crossed roller guide, a first guide rail retainer, and a second guide rail retainer, wherein, The first and second cross roller guides are fixedly connected to the upper surface of the lower sliding plate by screws, and the third and fourth cross roller guides are fixedly connected to the upper sliding plate by screws; the first and second cross roller guides are slidably connected by a first guide rail retainer, and the third and fourth cross roller guides are slidably connected by a second guide rail retainer; The first and third cross roller guides, the second and fourth cross roller guides are symmetrically distributed with respect to the center of symmetry of the lifting platform; the bottom surfaces of the first, second, third and fourth cross roller guides are on the same plane; the first and second guide rail holders are symmetrically distributed with respect to the center of symmetry of the lifting platform and slide within the rectangular space formed by the overlapping portion of the inner surfaces of the first set of cross roller guide modules.

7. The lifting platform as described in claim 6, characterized in that, The lifting platform is equipped with guide rod assemblies, and the guide rod assemblies are configured in two sets, which are symmetrically distributed with respect to the symmetrical center plane of the lifting platform. The guide rod assembly includes a guide rod, a guide rod sleeve, and a sleeve base. The guide rod, the guide rod sleeve, and the sleeve base are coaxially mounted. The guide rod is fixedly connected to the bottom surface of the worktable by screws, and the guide rod sleeve is fixedly mounted on the upper surface of the base by the sleeve base.

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