Parallel motion displacement platform

Abstract

The invention discloses a parallel motion displacement platform, and relates to the technical field of precision engineering and automation, the parallel motion displacement platform comprises a basic platform, an operation platform, execution mechanisms and a control system, and a plurality of groups of execution mechanisms are uniformly distributed between the basic platform and the operation platform along the circumferential direction; any actuating mechanism comprises a supporting leg, one end of the supporting leg is rotationally connected with the basic platform through a universal joint, and the other end of the supporting leg is rotationally connected with the operating platform through a universal joint; wherein the supporting leg comprises a supporting leg outer shell and a supporting leg inner shell, the supporting leg inner shell is arranged in the supporting leg outer shell, the supporting leg outer shell is connected with the supporting leg inner shell through a displacement mechanism, and the displacement mechanism can drive the supporting leg inner shell to slide in the length direction of the supporting leg outer shell; a position sensor is further arranged on the supporting leg inner shell, the displacement mechanism is further connected with an encoder, and the displacement mechanism, the position sensor and the encoder are all connected with a control system. According to the invention, the accuracy of operation is obviously improved, and tasks can be accurately completed, so that the quality and consistency of products are improved.

Description

Technical Field

[0001] The invention relates to the field of precision engineering and automation technology, and in particular to a parallel motion displacement platform. Background Art

[0002] In today's booming precision engineering and automation fields, traditional series and parallel systems have gradually exposed many limitations and deficiencies in response to the growing demand for high-precision, high-speed and high-load operations. Due to their inherent structural characteristics, series systems usually have obvious shortcomings in stiffness and load-bearing capacity, which makes them incapable of handling high-load operations and tasks requiring high-precision positioning; the ductility and flexibility of their structures lead to easy deformation and deviation when subjected to force, making it difficult to meet the stringent requirements of modern industry for high precision and high stability.

[0003] Although the parallel system has certain advantages over the series system in terms of stiffness and precision, it still faces a series of key problems that need to be solved in practical applications. First, in terms of dynamic performance, the response speed of the existing parallel system often cannot reach the ideal level. Faced with complex and rapidly changing operational requirements, such as fast positioning and grasping actions in high-speed automated production lines, its insufficient response speed will lead to reduced production efficiency and unstable production quality. This is due to the combined limitations of multiple factors such as the mechanical structure design of the system, the performance of the drive unit, and the efficiency of the control algorithm.

[0004] Secondly, in terms of precision improvement, the existing parallel system is restricted by many factors, making it difficult to achieve micron-level or even higher precision positioning and displacement control. This not only involves the rationality and precision of the structural design, but also includes the accuracy of the drive unit, the error of the transmission components, the resolution and accuracy of the measurement feedback system, and the influence of environmental factors. The deficiency of any link may lead to a decrease in overall accuracy, and it cannot meet the application scenarios with extremely high precision requirements such as semiconductor manufacturing and optical instrument assembly.

[0005] Furthermore, in terms of the compactness and efficiency of the system, some parallel systems have a large overall size and weight due to their complex structure and numerous components, and the energy utilization rate is not high. This not only increases the installation and use costs of the system, but also has high requirements for the working space, limiting its application in some environments with limited space. In addition, the complex structure and numerous components also increase the maintenance difficulty and failure risk of the system, reducing the reliability and maintainability of the system.

[0006] Therefore, how to effectively overcome these difficulties and further improve the operating accuracy, response speed, compactness and efficiency of the parallel system has become the core point and research hotspot of the current technological development in the field of precision engineering and automation. Summary of the invention

[0007] The purpose of the present invention is to provide a parallel motion displacement platform to solve at least one of the problems existing in the prior art, significantly improve the accuracy of operation, and be able to accurately complete tasks, thereby improving the quality and consistency of products.

[0008] To achieve the above object, the present invention provides the following solutions:

[0009] The present invention provides a parallel motion displacement platform, comprising a basic platform, an operating platform, an actuator and a control system, wherein the basic platform and the operating platform are arranged relative to each other, and a plurality of groups of the actuators are evenly distributed circumferentially between the basic platform and the operating platform; any group of the actuators comprises a leg, one end of the leg is rotatably connected to the basic platform through a universal joint, and the other end is rotatably connected to the operating platform through a universal joint; wherein the leg comprises a leg outer shell and a leg inner shell, the leg inner shell is arranged in the leg outer shell, and the leg outer shell is connected to the leg inner shell through a displacement mechanism, and the displacement mechanism can drive the leg inner shell to slide along the length direction of the leg outer shell; a position sensor is also arranged on the leg inner shell for detecting the position information of the leg inner shell, and the displacement mechanism is also connected to an encoder for measuring the motion data of the displacement mechanism; the displacement mechanism, the position sensor and the encoder are all connected to the control system signal through a signal line.

[0010] Preferably, three groups of the actuators are evenly distributed along the circumferential direction between the base platform and the operating platform, any group of the actuators includes two legs, the two legs in the same group are symmetrically arranged, and the three groups of the actuators are symmetrically arranged.

[0011] Preferably, the displacement mechanism comprises a driving motor, a screw and a nut, wherein the driving motor is arranged in the outer shell of the leg, the output shaft of the driving motor is connected to the screw, and the nut is fixed in the inner shell of the leg and is threadedly connected with the screw; the driving motor can drive the screw to rotate, thereby driving the nut and the inner shell of the leg to move along the length direction of the outer shell of the leg;

[0012] Wherein, the encoder is connected to the output shaft of the drive motor and is used to measure the rotation angle of the drive motor.

[0013] Preferably, the driving motor is a micro brushless DC motor, the encoder is a multi-turn absolute encoder, and the lead screw is an alloy steel lead screw with micron-level precision.

[0014] Preferably, the basic platform is further provided with wiring vias, and the wiring vias are used for allowing cables to pass through for power supply; wherein, two wiring vias are provided, and the two wiring vias are respectively provided on both sides of the basic platform.

[0015] Preferably, a plurality of first reserved holes are provided on the top of the base platform, and the first reserved holes are provided in one-to-one correspondence with the legs; wherein a universal joint is rotatably provided in any of the first reserved holes, and a connecting piece is provided at one end of the leg outer shell away from the leg inner shell, and the leg outer shell is rotatably connected to the universal joint in the corresponding first reserved hole through the connecting piece;

[0016] A plurality of second reserved holes are provided at the bottom of the operating platform, and the second reserved holes are provided in one-to-one correspondence with the legs; wherein a universal joint is rotatably provided in any of the second reserved holes, a connecting piece is provided at one end of the leg inner shell away from the leg outer shell, and the leg inner shell is rotatably connected to the universal joint in the corresponding second reserved hole through the connecting piece.

[0017] Preferably, the connecting member is a U-shaped clamp, and the universal joint includes a pre-tightening bolt, a rotating sleeve, a ball bearing and a thrust bearing which are arranged in sequence from left to right.

[0018] Preferably, the parallel motion displacement platform is made entirely of alloy material.

[0019] Preferably, the control system is connected to the displacement mechanism signal through an amplifier, and the control system is based on a 32-bit microprocessor architecture and integrates PID control technology to control the displacement mechanism.

[0020] Preferably, the circuit board of the control system is a multi-layer structure, and the signal line is shielded.

[0021] Compared with the prior art, the present invention has achieved the following technical effects:

[0022] In the present invention, multiple groups of actuators are evenly distributed along the circumferential direction between the basic platform and the operating platform to form a parallel structure. The legs can work together to share the load, so that the displacement platform has a stronger carrying capacity and higher stability, and the upper and lower ends of the legs can rely on universal joints to achieve angle and direction adjustment.

[0023] A position sensor is also provided on the inner shell of the leg of the present invention, which can provide real-time and accurate feedback of the position information of the inner shell of the leg, providing key data support for achieving precise control; the displacement mechanism is also connected to an encoder for measuring the motion data of the displacement mechanism, providing a strong guarantee for ensuring high-precision control; the displacement mechanism, the position sensor and the encoder are all connected to the control system signal through a signal line, and the control system controls the displacement mechanism according to the data detected by the position sensor and the encoder, realizing real-time closed-loop feedback, which significantly improves the accuracy of the operation, so that the displacement platform can accurately and correctly complete the task when performing operations with extremely high precision requirements such as semiconductor chip lithography and micro-nano processing, thereby greatly improving the quality and consistency of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 is a top view of the parallel motion displacement platform in an embodiment of the present invention;

[0026] Figure 2 A three-dimensional structural diagram of a parallel motion displacement platform in an embodiment of the present invention;

[0027] Figure 3 It is a three-dimensional structural diagram of the supporting legs in an embodiment of the present invention;

[0028] Figure 4 This is a diagram of the internal structure of the supporting legs in an embodiment of the present invention;

[0029] Figure 5 This is a working state diagram of the parallel motion displacement platform in an embodiment of the present invention;

[0030] Figure 6 2 is a diagram showing the working state of the supporting legs in an embodiment of the present invention.

[0031] Figure 7 Detailed view of the universal joint in an embodiment of the present invention.

[0032] In the figure: 100-parallel motion displacement platform, 1-basic platform, 2-operating platform, 3-leg, 4-first reserved hole, 5-second reserved hole, 6-U-clamp, 7-universal joint, 8-wiring hole, 9-leg inner shell, 10-leg outer shell, 11-nut, 12-position sensor, 13-screw, 14-drive motor, 15-encoder, 16-rotating shaft, 17-thrust bearing. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The purpose of the present invention is to provide a parallel motion displacement platform to solve the problems existing in the prior art, significantly improve the accuracy of operation, and be able to accurately complete tasks, thereby improving the quality and consistency of products.

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] Embodiment 1

[0037] like Figure 1-Figure 7 As shown, in this embodiment, a parallel motion displacement platform 100 is provided, which mainly includes a basic platform 1, an operating platform 2, an actuator and a control system; wherein, the basic platform 1 and the operating platform 2 are arranged relatively to each other, the basic platform 1 provides a solid and stable bottom support structure for the entire displacement platform, and the operating platform 2 is used to carry the actual operation object and perform related work tasks; further, there are multiple groups of the actuators evenly distributed along the circumferential direction between the basic platform 1 and the operating platform 2, and any group of the actuators includes a leg 3, one end of the leg 3 is rotatably connected to the basic platform 1 through a universal joint 7, and the other end is rotatably connected to the operating platform 2 through a universal joint 7; in this embodiment, the displacement platform adopts a parallel structure, and the legs 3 can work together to share the load, so that the displacement platform has a stronger carrying capacity and higher stability, and the upper and lower ends of the legs 3 can rely on the universal joint 7 to achieve angle and direction adjustment.

[0038] In this embodiment, the leg 3 bears the key responsibility of transmitting force and displacement, and mainly includes a leg outer shell 10 and a leg inner shell 9. The leg inner shell 9 is arranged in the leg outer shell 10, and the leg outer shell 10 is connected to the leg inner shell 9 through a displacement mechanism. The displacement mechanism can drive the leg inner shell 9 to slide along the length direction of the leg outer shell 10, thereby driving the operating platform 2 to displace relative to the basic platform 1. At the same time, the leg inner shell 9 and the leg outer shell 10 can protect the internal displacement mechanism, etc.; wherein, as a preferred embodiment, the end of the leg inner shell 9 away from the leg outer shell 10 is connected to the operating platform 2, and the end of the leg outer shell 10 away from the leg inner shell 9 is connected to the basic platform 1.

[0039] Furthermore, a position sensor 12 is also provided on the leg inner shell 9, which can provide real-time and accurate feedback of the position information of the leg inner shell 9, providing key data support for achieving precise control; the displacement mechanism is also connected to an encoder 15 for measuring the motion data of the displacement mechanism, providing a strong guarantee for ensuring high-precision control; the displacement mechanism, the position sensor 12 and the encoder 15 are all connected to the control system signal through a signal line, and the control system controls the displacement mechanism according to the data detected by the position sensor 12 and the encoder 15, realizing real-time closed-loop feedback, significantly improving the accuracy of the operation, so that the displacement platform can accurately and correctly complete the task when performing operations with extremely high precision requirements such as semiconductor chip lithography and micro-nano processing, greatly improving the quality and consistency of the product.

[0040] In this embodiment, the control system can be selected according to specific work needs, for example, it can be a PLC controller.

[0041] In this embodiment, as a preferred implementation, three groups of the actuators are evenly distributed along the circumferential direction between the base platform 1 and the operating platform 2, and any group of the actuators includes two legs 3 to form a six-legged structure, and the two legs 3 of the same group are symmetrically arranged, and the three groups of the actuators are symmetrically arranged. Further, it should be noted that other numbers of actuators can be arranged according to work needs, and are not limited to three groups.

[0042] In this embodiment, the displacement mechanism mainly includes a drive motor 14, a screw rod 13 and a nut 11. The drive motor 14 is arranged in the leg housing 10. The output shaft of the drive motor 14 is connected to the screw rod 13. The nut 11 is fixed in the leg inner housing 9 and is threadedly connected with the screw rod 13. The drive motor 14 can drive the screw rod 13 to rotate, thereby driving the nut 11 and the leg inner housing 9 to move along the length direction of the leg housing 10.

[0043] The encoder 15 is connected to the output shaft of the drive motor 14 and is used to measure the rotation angle of the drive motor 14 .

[0044] In this embodiment, the screw rod 13 adopts a high-precision screw rod with micron-level accuracy, and is equipped with a nut 11 and an adjustment mechanism. The nut 11 adopts a pre-tightening nut design to ensure tight fit and precise positioning on the screw rod 13, effectively avoiding mechanical looseness and errors that may occur during operation. In order to cope with the potential impact of the external magnetic field on the system, the nut 11 adopts a non-magnetic alloy material with low magnetic permeability, such as beryllium copper or austenitic stainless steel, etc. These materials have excellent anti-magnetic properties, which can reduce the impact of the magnetic field on the system and ensure the stability and reliability of the system in long-term operation; and the screw rod 13 is made of high-strength alloy steel, which has undergone precision processing technology and strict heat treatment process, significantly enhancing its wear resistance and fatigue resistance, so that the screw rod 13 can still maintain excellent performance under long-term high-load conditions, laying a solid foundation for the high-precision displacement of the displacement platform and providing strong support.

[0045] In this embodiment, the drive motor 14 is preferably a micro brushless DC motor, which exhibits significant advantages such as high efficiency, low noise, and stable and reliable performance, and provides a reliable power source for the entire system in a continuous and stable manner; the encoder 15 is preferably a multi-turn absolute encoder, which can measure the rotation angle of the drive motor 14 extremely accurately with its excellent measurement accuracy, and effectively ensure the high-precision requirements of the control process; in this embodiment, a high-precision micro brushless DC motor and a multi-turn absolute encoder with ultra-high resolution are matched with each other, so that high-precision position control of 24 bits for a single turn and 16 bits for multiple turns can be achieved, accurately ensuring that the angle measurement accuracy of the drive motor 14 during rotation reaches the top level.

[0046] In this embodiment, the output shaft of the drive motor 14 is connected to the screw rod 13 through a high-precision connector installed outside the motor; wherein the connector is an external coupling of the motor, and adopts a high-precision, low-eccentricity design to ensure that the power of the drive motor 14 can be efficiently and stably transmitted to the screw rod 13. The connector is manufactured through preload force matching and precision machining, which ensures stability and efficiency during the transmission process, effectively reduces energy loss and transmission error, and ensures that the power of the drive motor 14 can be accurately converted into the linear displacement of the screw rod 13.

[0047] In this embodiment, the assembly of the drive motor 14, the lead screw 13 and the encoder 15 achieves extremely high concentricity and precise alignment, and the components are firmly connected through specially designed high-precision couplings and fixing fixtures to ensure that there is no displacement and deviation during long-term operation. This rigorous connection method effectively reduces transmission errors and mechanical vibrations, and effectively guarantees the high precision and reliability of the platform.

[0048] In this embodiment, the basic platform 1 is further provided with a wiring through hole 8, and the wiring through hole 8 is used for allowing the cable to pass through for power supply; wherein, two wiring through holes 8 are provided, and the two wiring through holes 8 are respectively provided on both sides of the basic platform 1. In this embodiment, the wiring through holes 8 are provided to facilitate the reasonable layout and regularity of the lines, and the cable layout is carefully planned, and reasonable wiring methods and fixing measures are adopted to avoid loosening and interference of the cables during movement.

[0049] In this embodiment, a plurality of first reserved holes 4 are provided on the top of the base platform 1, and the first reserved holes 4 are provided in one-to-one correspondence with the legs 3; wherein a universal joint 7 is rotatably provided in any of the first reserved holes 4, and a connecting piece is provided at one end of the leg outer shell 10 away from the leg inner shell 9, and the leg outer shell 10 is rotatably connected to the universal joint 7 in the corresponding first reserved hole 4 through the connecting piece;

[0050] The bottom of the operating platform 2 is provided with a plurality of second reserved holes 5, and the second reserved holes 5 are arranged one by one corresponding to the legs 3; wherein, a universal joint 7 is rotatably arranged in any of the second reserved holes 5, and a connecting piece is provided at one end of the leg inner shell 9 away from the leg outer shell 10, and the leg inner shell 9 is rotatably connected to the universal joint 7 in the corresponding second reserved hole 5 through the connecting piece;

[0051] Among them, the design of the above-mentioned reserved holes can also reserve space for subsequent functional expansion and connection operations.

[0052] In this embodiment, the connecting member is preferably a U-shaped clamp 6. Through the cooperation of the U-shaped clamp 6 and the universal joint 7, the stability of the connecting part is significantly enhanced while ensuring the flexible steering characteristics during the movement.

[0053] In this embodiment, the universal joint 7 is mainly composed of a pre-tightening bolt, a rotating sleeve, a ball bearing and a thrust bearing assembled in sequence. The overall modular design is convenient for installation, maintenance and replacement, and significantly improves the maintainability and flexibility of the platform.

[0054] Specifically, the universal joint 7 is connected to the leg through a rotating shaft 16, which supports and transmits the rotational motion, so that the universal joint can maintain stable rotational capability under load. The ball bearing and thrust bearing 17 are used to provide radial and axial support respectively, ensuring that the universal joint maintains accuracy and stability when rotating and under force.

[0055] The universal joint 7 is fixedly connected to both ends of the leg through the U-shaped clamp 6. Specifically, the U-shaped clamp 6 clamps the outside of the universal joint so that the universal joint can rotate freely in all directions, thereby achieving the angle and direction adjustment between the leg and the base platform or the operating platform. One end of the universal joint is inserted into the reserved hole of the leg through the rotating shaft to ensure that the connection between the universal joint and the leg is tight and reliable, while maintaining flexible rotation ability to achieve precise movement of the displacement platform.

[0056] In this embodiment, the parallel motion displacement platform 100 is made of alloy material as a whole, and through optimized structural design, the weight is significantly reduced while the overall rigidity is greatly enhanced; this design not only reduces the system's movement inertia and improves the response speed, but also further enhances the system's anti-deformation ability under high load conditions, effectively ensuring the stability and reliability of the platform during long-term operation.

[0057] In this embodiment, based on the advanced 32-bit microprocessor architecture, the control system integrates PID control technology and real-time closed-loop feedback mechanism, and with the help of precise adjustment of high-resolution amplifiers, can accurately control the output of the drive motor 14 and achieve fast, stable and smooth action response. The software development of the control system follows the modular design concept, which not only facilitates subsequent function expansion and system maintenance, but also can flexibly configure and adjust control parameters according to different application scenarios and user needs, thereby achieving precise control and optimization of platform actions, so that the platform can adapt to various complex and changing working conditions and task requirements.

[0058] The developed software is highly configurable and user-friendly; its interface supports multiple operation modes, such as manual control, automatic programming control, etc., which can fully meet the operation preferences and needs of different users. At the same time, the software is equipped with real-time monitoring function, which can display the platform's position, speed, acceleration and other key parameters in real time, making it convenient for operators to perform fine adjustment and system maintenance. In addition, the software provides rich and diverse data analysis and processing functions, which can record, analyze and process the platform's operating data, provide strong support for system performance optimization and fault diagnosis, and greatly improve the user experience and operational convenience.

[0059] In this embodiment, the circuit board of the control system adopts a multi-layer design and shields the key signal lines, which significantly enhances the system's ability to resist electromagnetic interference, effectively guarantees the stability and accuracy of signal transmission, and ensures that the platform can still operate stably and reliably in complex electromagnetic environments.

[0060] The working principle of the parallel motion displacement platform 100 in this embodiment is as follows:

[0061] When the control system receives the instruction to perform the displacement operation, the driver sends a corresponding control signal, and the micro brushless DC motor starts and starts to operate, driving the screw 13 to rotate. Due to the exquisite cooperation between the screw 13 and the nut 11 and the synergistic effect of the pre-tightening force, the nut 11 drives the leg inner shell 9 to move, thereby realizing the telescopic adjustment of the leg 3.

[0062] During this process, the position sensor 12 monitors the position change of the inner shell 9 of the outrigger in real time, and the multi-turn absolute encoder accurately measures the rotation angle of the drive motor 14. These key information are fed back to the control system in a timely manner. Based on these precise data, the control system accurately adjusts and optimizes the operating state of the drive motor 14, and finally realizes high-precision displacement control.

[0063] At the same time, the synergistic effect of the universal joint 7 and the U-shaped clamp 6 effectively guarantees the stability and flexibility of the legs 3 during movement, thereby ensuring that the entire platform can operate stably and reliably.

[0064] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A parallel motion displacement platform, characterized in that: It includes a basic platform, an operating platform, an actuator and a control system, wherein the basic platform and the operating platform are arranged opposite to each other, and a plurality of groups of the actuators are evenly distributed circumferentially between the basic platform and the operating platform; any group of the actuators includes a leg, one end of the leg is rotatably connected to the basic platform through a universal joint, and the other end is rotatably connected to the operating platform through a universal joint; wherein the leg includes a leg outer shell and a leg inner shell, the leg inner shell is arranged in the leg outer shell, and the leg outer shell is connected to the leg inner shell through a displacement mechanism, and the displacement mechanism can drive the leg inner shell to slide along the length direction of the leg outer shell; a position sensor is also arranged on the leg inner shell for detecting the position information of the leg inner shell, and the displacement mechanism is also connected to an encoder for measuring the motion data of the displacement mechanism; the displacement mechanism, the position sensor and the encoder are all connected to the control system signal through a signal line.

2. The parallel motion displacement platform according to claim 1, characterized in that: Three groups of the actuators are evenly distributed along the circumferential direction between the basic platform and the operating platform. Any group of the actuators includes two legs. The two legs in the same group are symmetrically arranged, and the three groups of the actuators are symmetrically arranged.

3. The parallel motion displacement platform according to claim 1 or 2, characterized in that: The displacement mechanism comprises a driving motor, a screw rod and a nut, wherein the driving motor is arranged in the outer shell of the leg, the output shaft of the driving motor is connected to the screw rod, the nut is fixed in the inner shell of the leg and is threadedly connected with the screw rod; the driving motor can drive the screw rod to rotate, thereby driving the nut and the inner shell of the leg to move along the length direction of the outer shell of the leg; Wherein, the encoder is connected to the output shaft of the drive motor and is used to measure the rotation angle of the drive motor.

4. The parallel motion displacement platform according to claim 3, characterized in that: The driving motor is a micro brushless DC motor, the encoder is a multi-turn absolute encoder, and the lead screw is an alloy steel lead screw with micron-level precision.

5. The parallel motion displacement platform according to claim 3, characterized in that: The basic platform is also provided with wiring vias, and the wiring vias are used for cables to pass through for power supply; wherein, two wiring vias are provided, and the two wiring vias are respectively provided on both sides of the basic platform.

6. The parallel motion displacement platform according to claim 1 or 2, characterized in that: A plurality of first reserved holes are arranged on the top of the base platform, and the first reserved holes are arranged one by one corresponding to the legs; wherein a universal joint is rotatably arranged in any of the first reserved holes, and a connecting piece is arranged at one end of the leg shell away from the leg inner shell, and the leg shell is rotatably connected to the universal joint in the corresponding first reserved hole through the connecting piece; A plurality of second reserved holes are provided at the bottom of the operating platform, and the second reserved holes are provided in one-to-one correspondence with the legs; wherein a universal joint is rotatably provided in any of the second reserved holes, a connecting piece is provided at one end of the leg inner shell away from the leg outer shell, and the leg inner shell is rotatably connected to the universal joint in the corresponding second reserved hole through the connecting piece.

7. The parallel motion displacement platform according to claim 6, characterized in that: The connecting piece is a U-shaped clip, and the universal joint comprises a pre-tightening bolt, a rotating shaft sleeve, a ball bearing and a thrust bearing which are arranged in sequence from left to right.

8. The parallel kinematic displacement platform according to claim 1, characterized in that: The parallel motion displacement platform is made entirely of alloy material.

9. The parallel kinematic displacement platform according to claim 1, characterized in that: The control system is connected to the displacement mechanism signal through an amplifier, and the control system is based on a 32-bit microprocessor architecture and integrates PID control technology to control the displacement mechanism.

10. The parallel kinematic displacement platform according to claim 1 or 9, characterized in that: The circuit board of the control system is a multi-layer structure, and the signal lines are shielded.

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