Transfer device for multi-process treatment of quartz glass

Abstract

The invention relates to the technical field of quartz glass transfer devices, in particular to a quartz glass multi-process treatment transfer device which comprises an intelligent transfer vehicle, a storage box is arranged on the upper side of the intelligent transfer vehicle, storage mechanisms are arranged on the two sides of the storage box at equal intervals in a mirroring mode, and auxiliary mechanisms are arranged on the other two sides of the storage box at equal intervals in a mirroring mode. A heating mechanism is arranged on the side face of the storage box corresponding to the auxiliary mechanism, a driving mechanism is arranged on the inner side of the storage box, and a clamping mechanism is arranged on the side face of the driving mechanism. According to the invention, clamping blocks at corresponding positions are close to each other, a second electric push rod pushes the clamping blocks, so that rod-type quartz glass is restrained in a matching groove, the rod-type quartz glass can be clamped, then a main electric sliding table can drive a sliding table group to carry out up-and-down loading operation, and two groups of sliding plates can independently and stably move; in this way, clamping operation on different quartz glass is completed, and suction of the side surfaces of the quartz glass is avoided, so that gluing process operation is not interfered.

Description

Technical Field

[0001] The invention relates to the technical field of quartz glass transfer devices, and in particular to a transfer device for multi-step processing of quartz glass. Background Art

[0002] Quartz glass is made by melting various pure natural quartz (such as crystal, quartz sand, etc.). Its linear expansion coefficient is extremely small, which is 1 / 10~1 / 20 of ordinary glass, and it has good thermal shock resistance. During the production of quartz glass, positive photoresist needs to be applied to its side, and the surface of quartz glass is hydrophobic, so HMDS adhesive is generally required, which is highly toxic and pollutes both the human body and the environment. Therefore, different processes are used to prevent the photoresist from falling off. Oxygen is introduced into the quartz glass at high temperature to form a very thin film on the surface of the quartz glass, which is convenient for subsequent gluing operations. However, this method generally makes the quartz glass have a higher temperature after each process is completed. When transferring quartz glass, the storage material is generally sucked by a suction cup transfer car. In this way, the suction cup will affect the side of the glass, which is not convenient for gluing the glass surface. Moreover, the suction cup can only load and unload plate glass but not rod glass. In addition, the glass needs to be processed before and after gluing, which requires a long processing time. Summary of the invention

[0003] In order to overcome the problem that the photoresist does not fall off by different processes in the prior art, oxygen is introduced into the quartz glass at high temperature to form a very thin film on the surface of the quartz glass, which is convenient for subsequent glue coating operations. However, this method generally makes the quartz glass have a higher temperature after each process is completed, and the existing quartz glass is generally transferred by a suction cup transfer vehicle to suck the stored material, so the suction cup will affect the side of the glass, which is not convenient for glue coating operations on the glass surface, and the suction cup can only load and unload plate glass but not rod glass, and the glass needs to be processed before and after glue coating, which requires a long processing time. The present invention provides a quartz glass multi-process processing transfer device.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions: comprising an intelligent transfer vehicle, a material storage box is arranged on the upper side of the intelligent transfer vehicle, material storage mechanisms are arranged equidistantly on both sides of the material storage box, auxiliary mechanisms are arranged equidistantly on the other two sides of the material storage box, a heating mechanism is arranged on the side of the material storage box corresponding to the position of the auxiliary mechanism, a driving mechanism is arranged on the inner side of the material storage box, and a clamping mechanism is arranged on the side of the driving mechanism; The material storage mechanism comprises an active cavity, a support rod is arranged inside the active cavity, and a blocking plate is arranged on the side of the support rod; The auxiliary mechanism comprises a matching cavity, an auxiliary plate is arranged inside the matching cavity, a groove and a connecting groove are arranged on the side of the auxiliary plate, a movable plate is arranged inside the groove, and a linkage rod is arranged on the side of the movable plate; The heating mechanism comprises a connecting pipe, and a hot air blower is arranged on the side of the connecting pipe; The driving mechanism comprises an electric slide, a slide group is arranged on the side of the electric slide, and a slide plate is arranged on the side of the slide group; The clamping mechanism includes a clamping block, a matching groove is arranged on the side of the clamping block, a movable anti-falling plate is arranged on the side of the clamping block, a mechanically triggerable matching plate is arranged on the side of the anti-falling plate, and a third electric push rod that can be electrically triggered is arranged on the side of the anti-falling plate.

[0005] Furthermore, the material storage mechanism includes an active cavity opened on the side of the material storage box, the support rod is movably installed inside the active cavity, the blocking plate is arranged on the side of the material storage box, the first electric push rod is symmetrically fixedly installed on the side of the material storage box, and the traction rope is fixedly installed on the side of the blocking plate.

[0006] Furthermore, the auxiliary mechanism includes a matching cavity opened on the inner side of the storage box, an auxiliary plate movably installed inside the matching cavity, a slot is opened inside the storage box, a movable plate movably installed inside the slot, connecting rods are equidistantly fixedly installed on the side of the movable plate, and a first support tube is fixedly installed between the side of the movable plate and the inner wall of the slot.

[0007] Furthermore, the auxiliary mechanism also includes a connecting groove provided on the inner wall of the groove, a trigger block is movably installed inside the connecting groove, a linkage rod is fixedly installed on a side of the trigger block, and a fixing rod is provided on the side of the linkage rod.

[0008] Furthermore, the heating mechanism includes a connecting pipe fixedly installed on the side of the storage box, a hot air blower is arranged on the side of the connecting pipe and the hot air blower is fixedly installed on the side of the intelligent transfer vehicle.

[0009] Furthermore, the driving mechanism includes a main electric slide symmetrically arranged on both sides of the storage box, a slide group is fixedly installed on the side of each corresponding main electric slide slider, the side of the slide group is mirror-staggered with drive shafts, the slide plates are mirror-staggered on the sides of the two groups of drive shafts, and a second electric push rod is fixedly installed on the side of the slide plate.

[0010] Furthermore, the clamping mechanism includes a clamping block fixedly mounted on the side of the second electric push rod, a matching groove is opened on the side of the clamping block that is close to the clamping block, a movable groove is opened on the side of the clamping block, the anti-fall plate is movably mounted inside the movable groove, and a support spring is equidistantly fixedly connected between the side of the anti-fall plate and the inner wall of the movable groove.

[0011] Furthermore, the clamping mechanism also includes an installation cavity opened on the inner wall of the movable groove, a movable rod is movably installed inside the installation cavity, a linkage block is movably installed inside the installation cavity, a matching plate is fixedly installed on the side of the linkage block, a detection block is provided on the inner wall of the installation cavity, and a third electric push rod is fixedly installed on the side of the clamping block.

[0012] Compared with the prior art, the present invention can achieve the following beneficial effects: 1. The present invention is provided with a driving mechanism and a clamping mechanism. The second electric push rod pushes the clamping block to squeeze and clamp the plate-type quartz glass at the side position of the quartz glass. The slide plates are driven close together, so that the clamping blocks at corresponding positions are close together. The second electric push rod pushes the clamping block so that the rod-type quartz glass is constrained at the inner position of the matching groove to clamp the rod-type quartz glass. Then the main electric slide can drive the slide group to move up and down, and the two groups of slides can move independently and stably, so as to complete the clamping operation of different quartz glasses and avoid the suction of the side surface of the quartz glass without interfering with the glue coating process operation.

[0013] 2. The present invention sets a clamping mechanism. When the plate-type quartz glass is squeezed, the anti-falling plate can be mechanically triggered to slide out of the movable groove to ensure that the glass does not fall. The detection block obtains a signal and can electrically trigger the third electric push rod to push the anti-falling plate to act as an insurance electric trigger. When the rod-type quartz glass is clamped, the third electric push rod pushes the anti-falling plate to slide out of the movable groove by default to prevent it from falling. In this way, the anti-falling operation can be guaranteed when clamping different quartz glasses, thereby ensuring the safe and stable clamping of the quartz glass.

[0014] 3. The present invention sets a material storage mechanism and an auxiliary mechanism. For plate-type quartz glass of a relatively hard material, the first electric push rod pushes the support rod to slightly slide out of the internal position of the active cavity to support the quartz glass. Repeated operations one by one can support and store multiple groups of glass. For plate-type quartz glass of a relatively soft material, the first electric push rod continues to push the support rod to slide, and the support rod squeezes the linkage rod to mechanically trigger the auxiliary plate to slightly slide out of the internal position of the matching cavity, so that the support rod and the auxiliary plate support the glass and strengthen the supporting effect on the glass. For rod-type quartz glass, the traction rope continuously pushes the support rod to squeeze the linkage rod to mechanically trigger the auxiliary plate to completely slide out of the matching cavity, and the rod-type quartz glass is placed in the rectangular groove on the side of the auxiliary plate through the driving mechanism. In this way, different quartz glasses can be supported and stored in multiple groups, and the contact with the surface of the quartz glass is effectively reduced, thereby ensuring the effect of the glue coating process.

[0015] 4. The present invention is provided with a material storage mechanism, an auxiliary mechanism and a heating mechanism. The hot air blower is heated to a fixed temperature to spray hot air. The connecting pipe guides the hot air to the inside of the slot, so that the hot air is discharged from the connecting slot and blown to the side of the quartz glass for drying. In this way, the quartz glass can be dried according to needs, and the moisture on the glass surface is reduced before glue coating, and the adhesion of the glue coating is improved. After glue coating, the excess solvent moisture of the photoresist on the side of the quartz glass is dried for exposure, and the solidification degree of the photoresist is improved through the exposure intensity. In this way, the glue coating before and after can be processed during rotation, which reduces the processing time and improves the efficiency of glass glue coating; In addition, the hot air blower performs a non-heating operation to blow air. The first electric push rod corresponding to the non-material storage position pulls the support rod to make the blocking plate rotate downward to open the active cavity. The wind flow is blown to the side of the quartz glass in the same way as above and discharged from the inside of the active cavity to complete the cooling operation, which is convenient for subsequent unloading and can be operated with a manual suction cup for unloading and storage.

[0016] 5. Through the set driving mechanism, the main electric slide can drive the slide group to move up and down, and a set of driving shafts can drive the corresponding slide to move. The slide is constrained to slide on the side of another set of driving shafts, so that the two sets of slides can move independently and stably. The slide can drive the second electric push rod at the corresponding position to move freely, so that the slide can adapt to different quartz glasses for different movements, and cooperate with the set clamping mechanism to clamp different quartz glasses. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a partial structural schematic diagram of the material storage box of the present invention; Figure 3 It is a schematic diagram of the partial structure of the intelligent transfer vehicle of the present invention; Figure 4 For the present invention Figure 2 A schematic diagram of the enlarged structure at point A; Figure 5 For the present invention Figure 3 A schematic diagram of the enlarged structure at B; Figure 6 It is a partial structural schematic diagram of the material storage mechanism and the auxiliary mechanism of the present invention; Figure 7 It is a partial structural schematic diagram of the material storage mechanism of the present invention; Figure 8 It is a partial structural schematic diagram of the auxiliary mechanism of the present invention; Fig. 9 It is a partial structural schematic diagram of the driving mechanism of the present invention; Fig.10 It is a schematic diagram of the partial explosion structure of the driving mechanism of the present invention; Fig.11 It is a partial structural schematic diagram of the clamping mechanism of the present invention; Fig.12 For the present invention Fig.11 Enlarged structural diagram at C.

[0018] Among them: 1. Intelligent transfer vehicle; 2. Storage box; 3. Storage mechanism; 31. Active cavity; 32. Support rod; 33. Blocking plate; 34. First electric push rod; 35. Traction rope; 4. Auxiliary mechanism; 41. Matching cavity; 42. Auxiliary plate; 43. Slot; 44. Active plate; 45. Connecting rod; 46. First supporting cylinder; 47. Connecting groove; 48. Trigger block; 49. Linkage rod; 491. Fixed rod; 5. Heating mechanism; 51 , connecting pipe; 52, hot air blower; 6, driving mechanism; 61, main electric slide; 62, slide group; 621, driving shaft; 622, slide plate; 63, second electric push rod; 7, clamping mechanism; 71, clamping block; 72, matching groove; 73, movable groove; 74, anti-fall plate; 75, supporting spring; 76, installation cavity; 761, movable rod; 762, linkage block; 763, matching plate; 77, detection block; 78, third electric push rod. DETAILED DESCRIPTION

[0019] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work all belong to the protection scope of the present invention. The experimental methods in the following embodiments, unless otherwise specified, are conventional methods, and the materials, reagents, etc. used in the following embodiments, unless otherwise specified, can all be obtained from commercial channels.

[0020] Example: Figure 1 As shown, a quartz glass multi-process processing transfer device comprises an intelligent transfer vehicle 1, which is an intelligent AGV vehicle, a storage box 2 is arranged on the upper side of the intelligent transfer vehicle 1, and the storage box 2 is a rectangular box with a hollow interior, storage mechanisms 3 are arranged equidistantly on both sides of the storage box 2, and auxiliary mechanisms 4 are arranged equidistantly on the other two sides of the storage box 2, a heating mechanism 5 is arranged on the side of the storage box 2 corresponding to the auxiliary mechanism 4, a driving mechanism 6 is arranged on the inner side of the storage box 2, and a clamping mechanism 7 is arranged on the side of the driving mechanism 6; The storage mechanism 3 can support the plate-type quartz glass and assist in heat dissipation of the quartz glass; like Figures 2 to 4 and Figure 6 , Figure 7As shown, the storage mechanism 3 includes an active cavity 31 that runs through the side of the storage box 2, the active cavity 31 is a rectangular cavity with a convex cross-section, a support rod 32 is movably installed inside the active cavity 31, and the support rod 32 is a rectangular rod with a cross-section in the shape of a "J". A blocking plate 33 is arranged on the side of the storage box 2 corresponding to the position of the active cavity 31, and the blocking plate 33 is rotatably connected to the side position of the storage box 2 through a circular axis. The blocking plate 33 is a rectangular plate, and a first electric push rod 34 is symmetrically fixedly installed on the side of the storage box 2 corresponding to the position of the support rod 32, and the output end of the first electric push rod 34 runs through the storage box 2 and is fixedly connected to the side position of the support rod 32 A traction rope 35 is fixedly installed on the side of the blocking plate 33, and the traction rope 35 passes through the storage box 2 and is fixedly connected to the side position of the support rod 32. The traction rope 35 is a threaded elastic round rope; specifically, the first electric push rod 34 can push and pull the support rod 32 to slide inside the active cavity 31. In the default state: the first electric push rod 34 pushes the support rod 32 to one side of the active cavity 31. At this time, the traction rope 35 deforms and pulls the blocking plate 33 to fit the side of the storage box 2 to block the active cavity 31. The traction rope 35 continues to push the support rod 32 to slide out of the active cavity 31 to support the plate quartz glass. The auxiliary mechanism 4 can provide further support for the plate-type quartz glass and can provide restraint support for the rod-type quartz glass. The auxiliary mechanism 4 can also assist in heat dissipation of the quartz glass. like Figures 2 to 6 and Figure 8As shown, the auxiliary mechanism 4 includes a matching cavity 41 opened inside the storage box 2, and the matching cavity 41 is arranged at a position different from the movable cavity 31. The matching cavity 41 is a rectangular cavity, and an auxiliary plate 42 is movably installed inside the matching cavity 41. The auxiliary plate 42 is a rectangular plate with rectangular grooves equidistantly opened on the side. A slot 43 is opened at a position corresponding to the matching cavity 41 inside the storage box 2, and the slot 43 is a rectangular slot. A movable plate 44 is movably installed inside the slot 43. The movable plate 44 is a convex plate with round holes equidistantly opened on the side. The movable plate 44 is fixed equidistantly on the side of the auxiliary plate 42. A connecting rod 45 is installed and the connecting rod 45 passes through the storage box 2 and is fixedly connected to the side position of the auxiliary plate 42. The connecting rod 45 is a cylindrical rod. A first support tube 46 is fixedly installed between the side of the movable plate 44 and the inner wall of the slot 43 and the first support tube 46 is movably sleeved on the side position of the connecting rod 45. The first support tube 46 is a spring steel cylinder with a continuous "W"-shaped cross-section. A connecting groove 47 that passes through the storage box 2 is opened on the inner wall of the slot 43 and the connecting groove 47 is arranged at the position corresponding to the support rod 32. The connecting groove 47 is an "L"-shaped groove, and a contact is movably installed inside the connecting groove 47. The trigger block 48 is a trapezoidal block, a linkage rod 49 is fixedly installed on the side of the trigger block 48, and the linkage rod 49 extends out of the connection groove 47 to correspond to the position of the support rod 32, the linkage rod 49 is a rectangular rod, a fixing rod 491 is arranged on the side of the linkage rod 49, and the fixing rod 491 penetrates the linkage rod 49 and is fixedly installed on the inner wall of the connection groove 47, and the fixing rod 491 is a cylindrical rod; specifically, when the support rod 32 slides out of the active cavity 31, the first electric push rod 34 continues to push the support rod 32 to squeeze at the side position of the linkage rod 49, and the fixing rod 491 is on the linkage rod 49 Play a guiding and restraining role, the linkage rod 49 makes the trigger block 48 push and squeeze the side position of the movable plate 44, so that the movable plate 44 drives the connecting rod 45 to push the auxiliary plate 42 to slide out of the internal position of the matching cavity 41, so that the support rod 32 and the auxiliary plate 42 can support the plate-type quartz glass and enhance the support performance, and the set auxiliary plate 42 can play a storage and restraint role for the rod-type quartz glass, and the rod-type quartz glass is placed in the rectangular groove on the side of the auxiliary plate 42. On the contrary, when the support rod 32 is reset to the default state, the movable plate 44 and the linkage rod 49 are reset under the elastic support of the first support tube 46; The heating mechanism 5 can dry the stored quartz glass, and cooperate with the auxiliary mechanism 4 and the material storage mechanism 3 to dissipate heat for the quartz glass; like Figure 5 , Figure 6 and Figure 8As shown, the heating mechanism 5 includes a connecting pipe 51 fixedly mounted on the side of the storage box 2, and the connecting pipe 51 penetrates to the internal position of the slot 43. The connecting pipe 51 is a circular hollow tube with a continuous "U"-shaped cross section. A hot air blower 52 is arranged on the side of the connecting pipe 51, and the hot air blower 52 is fixedly mounted on the side position of the intelligent transfer vehicle 1. The output air duct of the hot air blower 52 penetrates to the internal position of the connecting pipe 51; specifically, when the hot air blower 52 is set to perform a heating operation, the hot air is guided to the inside of the slot 43 through the connecting pipe 51, so that the hot air is discharged from the connecting groove 47 and blown to the side of the quartz glass to perform a drying operation. When the hot air blower 52 is set to perform a non-heating operation, the first electric push rod 34 pulls the support rod 32 to slide to the other side position inside the active cavity 31, so that the traction rope 35 does not pull the blocking plate 33. At this time, the blocking plate 33 rotates downward by itself to open the active cavity 31, and the wind blows to the side of the quartz glass as above, and is discharged from the inside of the active cavity 31 to complete the cooling operation; The driving mechanism 6 can perform three-axis transfer operation, which is convenient for the subsequent movement operation after clamping the quartz glass; like Figure 3 , Fig. 9 and Fig.10 As shown, the driving mechanism 6 includes main electric slides 61 symmetrically arranged on both sides of the storage box 2, and slide groups 62 are fixedly installed on the sides of the sliders of the two corresponding main electric slides 61. The slide groups 62 are two groups of rectangular rod groups with hollow sides. Drive shafts 621 are staggeredly arranged on the sides of the slide groups 62 in a mirror-like manner, and the drive shafts 621 are respectively arranged inside the rectangular rods at corresponding positions. The drive shafts 621 are composed of a circular threaded rod and a motor. Slide plates 622 are staggeredly arranged on the sides of the two groups of drive shafts 621 in a mirror-like manner, and the slide plates 622 are respectively threadedly sleeved on one group of drive shafts 621. On the side of the circular threaded rod, the slide plate 622 is a concave plate with a circular groove and a circular threaded groove on the side, and a second electric push rod 63 is fixedly installed on the side of the slide plate 622; specifically, the main electric slide 61 can drive the slide group 62 to move up and down, and a set of drive shafts 621 can drive the corresponding slide plate 622 to move, and the slide plate 622 is constrained to slide on the side of the other set of drive shafts 621, so that the two sets of slide plates 622 can move independently and stably, and the slide plate 622 can drive the second electric push rod 63 at the corresponding position to move at will; The clamping mechanism 7 can clamp the plate-type quartz glass and the rod-type quartz glass, and has a certain anti-falling function during clamping; like Figures 10 to 12As shown, the clamping mechanism 7 includes a clamping block 71 fixedly mounted on the side of the second electric push rod 63, the clamping block 71 is a rectangular block made of a stone mill material, a matching groove 72 is provided on the side of the clamping block 71 close to the matching groove 72, and a movable groove 73 is provided on the side of the clamping block 71 corresponding to the lower side of the matching groove 72, and the movable groove 73 is a rectangular groove with a convex cross-section, and an anti-falling plate 74 is movably installed inside the movable groove 73, and the anti-falling plate 74 is a rectangular plate. Support springs 75 are fixedly connected equidistantly between the inner walls of the grooves 73. A mounting cavity 76 penetrating the clamping block 71 is provided on the inner wall of the movable groove 73 corresponding to the position of the anti-falling plate 74. The mounting cavity 76 is a "T"-shaped groove. A movable rod 761 is movably installed inside the mounting cavity 76 and the movable rod 761 is attached to the side position of the anti-falling plate 74. The movable rod 761 is a rectangular rod with inclined surfaces on both sides. A linkage block 762 is movably installed inside the mounting cavity 76 and the linkage block 762 is attached to the side of the movable rod 761. The linkage block 762 is a rectangular block with one side being inclined. A matching plate 763 is fixedly installed on the side of the linkage block 762. The matching plate 763 is a rectangular plate. A detection block 77 is arranged on the inner wall of the installation cavity 76 at a position corresponding to the linkage block 762. The detection block 77 is a photoelectric sensor (E3FA-DN21). A third electric push rod 78 is fixedly installed on the side of the clamping block 71 at a position corresponding to the anti-falling plate 74. The output end of the third electric push rod 78 passes through the clamping block 71 and is fixedly connected to the anti-falling plate 74. Side position; specifically, the second electric push rod 63 pushes the clamping block 71 close to the glass, and the glass is squeezed on the side of the matching plate 763. The matching plate 763 pushes the linkage block 762 to push the extrusion movable rod 761 to constrain the anti-fall plate 74 to slide out of the movable groove 73. The anti-fall plate 74 serves as an anti-fall limit for the glass. The detection block 77 provided in addition will sense and obtain a signal when the linkage block 762 is close to it, so that the third electric push rod 78 pushes the anti-fall plate 74 to slide out of the movable groove 73 to realize electric triggering.

[0021] Working principle: Quartz glass processing steps: 1. First, the quartz glass is cleaned with alkaline ultrasonic cleaning to remove sticky foreign matter and dust particles on the surface; 2. Move the quartz glass to a high temperature oxidation furnace for surface oxidation treatment (temperature 770 degrees for 30 minutes); 3. Move the quartz glass to the photoresist device for spin coating photoresist operation, where (before coating positive photoresist, it needs to be baked at 150 degrees for 30 to 60 minutes, and after coating positive photoresist, it needs to be pre-baked and exposed at 95 to 100 degrees for 30 to 90 seconds); 4. Move the quartz glass coated with positive resist to the subsequent process for storage.

[0022] When receiving materials: the intelligent transfer vehicle 1 is moved to the discharge end of the output line of each device. When it is plate-type quartz glass, the main electric slide 61 moves the slide group 62 to the corresponding height position, and the clamping block 71 away from the quartz glass moves to the side position of the quartz glass with the slide plate 622. At the same time, the second electric push rod 63 corresponding to the side position of the quartz glass pushes the clamping block 71 to squeeze it at the side position of the quartz glass, and then slides with the slide plate 622 to pull the quartz glass, guiding the quartz glass to slide out of the discharge end of the output line, and then the clamping block 71 close to the quartz glass is pushed by the second electric push rod 63 to the side of the quartz glass for clamping operation, so as to complete the clamping of the side of the quartz glass, wherein: the matching plate 763 is squeezed to mechanically trigger the anti-falling plate 74 to slide out of the movable groove 73 to ensure that the glass does not fall, and the detection block 77 receives a signal to electrically trigger the third electric push rod 78 to push the anti-falling plate 74 to play the role of insurance electric triggering, otherwise when the clamping displacement is completed, each component is reset; When the rod-type quartz glass is clamped, first, the two sets of slide plates 622 are driven close together, so that the corresponding position clamping blocks 71 are close together, and the second electric push rod 63 pushes the clamping block 71 so that the rod-type quartz glass is constrained in the internal position of the matching groove 72. Different from the rod-type quartz glass clamping, the third electric push rod 78 defaults to push the anti-falling plate 74 to slide out of the movable groove 73 to prevent it from falling.

[0023] During material storage: for plate-type quartz glass, the clamping mechanism 7 clamps the glass and is driven by the driving mechanism 6 to move to the internal position of the material storage box 2. For the harder quartz glass, the first electric push rod 34 pushes the support rod 32 to slightly slide out of the internal position of the active cavity 31 to support the quartz glass. Repeated operations can support the storage of multiple groups of glass. For the softer quartz glass, the first electric push rod 34 continues to push the support rod 32 to slide, and the support rod 32 squeezes the linkage rod 49 to mechanically trigger the auxiliary plate 42 to slightly slide out of the internal position of the matching cavity 41, so that the support rod 32 and the auxiliary plate 42 support the glass, thereby strengthening the support for the glass. Similarly, the rod-type quartz glass is clamped by the clamping mechanism 7 and is driven by the driving mechanism 6 to move to the internal position of the storage box 2. The traction rope 35 continues to push the support rod 32 to squeeze the linkage rod 49 to mechanically trigger the auxiliary plate 42 to completely slide out of the matching cavity 41. The rod-type quartz glass is placed in the rectangular groove on the side of the auxiliary plate 42 through the driving mechanism 6 to complete the multi-layer storage of the rods one by one.

[0024] When transferring after receiving the materials: before coating the positive glue in the high-temperature oxidation furnace, the glass is stored in the inner position of the storage box 2, and the hot air blower 52 is heated to a fixed temperature to spray hot air, and the connecting pipe 51 guides the hot air to the inside of the slot 43, so that the hot air is discharged from the connecting slot 47 and blown to the side of the quartz glass to perform a drying operation, thereby improving the adhesion of the glue coating; After coating, it is stored. At this time, the glass is also stored in the internal position of the storage box 2. As above, the hot air blower 52 is heated to a fixed temperature to spray hot air, so that the excess solvent moisture of the photoresist on the side of the quartz glass is dried for exposure to increase the curing degree of the photoresist through the exposure intensity. Then, when it is almost to the storage bin, the hot air blower 52 performs a non-heating operation to blow air, and the first electric push rod 34 corresponding to the non-storage position pulls the support rod 32 to slide to the other side position inside the active cavity 31, so that the traction rope 35 does not pull the blocking plate 33. At this time, the blocking plate 33 rotates downward by itself to make the active cavity 31 open. The wind flow is blown to the side of the quartz glass as above, and is discharged from the inside of the active cavity 31 to complete the cooling operation. After the glass is moved to the upper side of the storage box 2 one by one through the arranged driving mechanism 6 and clamping mechanism 7, it is convenient for manual use of the suction cup rack to unload the material.

[0025] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge scope of technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A quartz glass multi-process processing transfer device, comprising an intelligent transfer vehicle (1), a material storage box (2) is arranged on the upper side of the intelligent transfer vehicle (1), material storage mechanisms (3) are arranged on both sides of the material storage box (2) in an equidistant mirror image, auxiliary mechanisms (4) are arranged on the other two sides of the material storage box (2) in an equidistant mirror image, a heating mechanism (5) is arranged on the side of the material storage box (2) at a position corresponding to the auxiliary mechanism (4), a driving mechanism (6) is arranged on the inner side of the material storage box (2), and a clamping mechanism (7) is arranged on the upper side of the material storage box (2); Features: The material storage mechanism (3) comprises an active cavity (31), a support rod (32) is arranged inside the active cavity (31), and a blocking plate (33) is arranged on the side of the support rod (32); The auxiliary mechanism (4) comprises a matching cavity (41), an auxiliary plate (42) is arranged inside the matching cavity (41), a groove (43) and a connecting groove (47) are arranged on the side of the auxiliary plate (42), a movable plate (44) is arranged inside the groove (43), and a linkage rod (49) is arranged on the side of the movable plate (44); The heating mechanism (5) comprises a connecting pipe (51), and a hot air blower (52) is arranged on the side of the connecting pipe (51); The driving mechanism (6) comprises a main electric slide (61) symmetrically arranged on both sides of the inside of the material storage box (2); a slide group (62) is fixedly installed on the side of the slider of the main electric slide (61); a drive shaft (621) is staggeredly arranged on the side of the slide group (62); slide plates (622) are staggeredly arranged on the side of the two groups of drive shafts (621); and a second electric push rod (63) is fixedly installed on the side of the slide plate (622); The clamping mechanism (7) comprises a clamping block (71), a matching groove (72) is provided on a side of the clamping block (71), a movable anti-falling plate (74) is provided on a side of the clamping block (71), a mechanically triggerable matching plate (763) is provided on a side of the anti-falling plate (74), and a third electric push rod (78) that can be electrically triggered is provided on a side of the anti-falling plate (74).

2. A quartz glass multi-process processing transfer device according to claim 1, characterized in that: The material storage mechanism (3) comprises an active cavity (31) opened on the side of the material storage box (2), a support rod (32) movably mounted inside the active cavity (31), a blocking plate (33) arranged on the side of the material storage box (2), two groups of first electric push rods (34) symmetrically fixedly mounted on both sides of the material storage box (2), and a traction rope (35) fixedly mounted on the side of the blocking plate (33).

3. The quartz glass multi-process processing transfer device according to claim 1, characterized in that: The auxiliary mechanism (4) comprises a matching cavity (41) provided inside the material storage box (2), an auxiliary plate (42) movably mounted inside the matching cavity (41), a slot (43) provided inside the material storage box (2), a movable plate (44) movably mounted inside the slot (43), connecting rods (45) being fixedly mounted at equal intervals on the side of the movable plate (44), and a first support cylinder (46) being fixedly mounted between the side of the movable plate (44) and the inner wall of the slot (43).

4. A quartz glass multi-processing transfer device according to claim 3, characterized in that: The auxiliary mechanism (4) further comprises a connecting groove (47) formed on the inner wall of the slot (43), a trigger block (48) being movably mounted inside the connecting groove (47), a linkage rod (49) being fixedly mounted on a side of the trigger block (48), and a fixing rod (491) being provided on the side of the linkage rod (49).

5. The quartz glass multi-processing transfer device according to claim 1, characterized in that: The heating mechanism (5) comprises a connecting pipe (51) fixedly mounted on the side of the material storage box (2); a hot air blower (52) is arranged on the side of the connecting pipe (51) and the hot air blower (52) is fixedly mounted on the side of the intelligent transfer vehicle (1).

6. The quartz glass multi-processing transfer device according to claim 1, characterized in that: The clamping mechanism (7) comprises a clamping block (71) fixedly mounted on a side surface of the second electric push rod (63); a matching groove (72) is provided on a side surface of the clamping block (71) adjacent to the clamping block; a movable groove (73) is provided on the side surface of the clamping block (71); an anti-falling plate (74) is movably mounted inside the movable groove (73); and a support spring (75) is fixedly connected equidistantly between the side surface of the anti-falling plate (74) and the inner wall of the movable groove (73).

7. A quartz glass multi-step processing transfer device according to claim 6, characterized in that: The clamping mechanism (7) further comprises a mounting cavity (76) formed on the inner wall of the movable groove (73); a movable rod (761) is movably mounted inside the mounting cavity (76); a linkage block (762) is movably mounted inside the mounting cavity (76); a matching plate (763) is fixedly mounted on a side of the linkage block (762); a detection block (77) is provided on the inner wall of the mounting cavity (76); and a third electric push rod (78) is fixedly mounted on a side of the clamping block (71).

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