Auxiliary dismounting and mounting device for molecular pump

Abstract

The invention provides a molecular pump auxiliary dismounting device which comprises a moving trolley, a lifting mechanism and a bearing table, and the top of the moving trolley is provided with the bearing table with an opening; the lifting mechanism comprises a lifting driving device and a lifting table, and the lifting driving device is arranged on the moving trolley, located below the opening of the bearing table, connected with the lifting table and used for driving the lifting table to move up and down relative to the opening of the bearing table; a first convex surface and a second convex surface are arranged at the top of the lifting platform; the top of the bearing table is provided with a third convex surface and a fourth convex surface; when the lifting table is located at the opening of the bearing table, the first convex face and the second convex face are located between the third convex face and the fourth convex face respectively, and the first convex face, the second convex face, the third convex face and the fourth convex face define a positioning groove used for positioning the molecular pump. The efficiency of mounting and dismounting the molecular pump is improved, and a large amount of manpower is not needed; and meanwhile, the accuracy of mounting and positioning is improved, the molecular pump can be prevented from toppling over, and the risk of personnel injury is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of molecular pump disassembly and assembly, and in particular relates to a molecular pump auxiliary disassembly and assembly device. Background Art

[0002] The molecular pump used in high-density plasma (HDP) equipment weighs about 115kg. When the machine is assembled or the molecular pump is abnormal and needs to be replaced, the molecular pump needs to be disassembled. Because the molecular pump is heavy, the installation location is at a certain height from the ground, and the working space is limited, which makes it difficult to adjust the position and move the molecular pump during disassembly and assembly. At present, it is usually carried and moved by operators, and it is necessary to assist in disassembly and assembly by adding support blocks under the molecular pump. However, due to the weight of the molecular pump, at least 4-5 people are required to work during the disassembly and assembly process, which is not only manpower-consuming, but also has the risk of injury caused by the tipping of the molecular pump; in addition, after the molecular pump is raised, it is not convenient to adjust the working position, and it is difficult to locate it with the installation hole, which is not convenient for installation. Summary of the invention

[0003] Based on the technical problems existing in the prior art, the present invention provides a molecular pump auxiliary disassembly and assembly device, aiming to solve the technical problem in the prior art that the molecular pump is difficult to carry and move when being disassembled or installed from a machine.

[0004] To achieve the above-mentioned purpose, the present invention provides a molecular pump auxiliary disassembly and assembly device, which is used for auxiliary installation and disassembly of molecular pumps in semiconductor equipment. The molecular pump auxiliary disassembly and assembly device includes a moving trolley, a lifting mechanism and a carrying platform. The top of the moving trolley is provided with a carrying platform with an opening; the lifting mechanism includes a lifting drive device and a lifting platform. The lifting drive device is arranged on the moving trolley and is located below the opening of the carrying platform. It is connected to the lifting platform and is used to drive the lifting platform to move up and down relative to the opening of the carrying platform; the top of the lifting platform is provided with a first convex surface and a second convex surface, and the first convex surface and the second convex surface are spaced and arranged oppositely; the top of the carrying platform has a third convex surface and a fourth convex surface, and the third convex surface and the fourth convex surface are respectively located on both sides of the opening of the carrying platform; when the lifting platform is located at the opening of the carrying platform, the first convex surface and the second convex surface are respectively located between the third convex surface and the fourth convex surface, and the first convex surface, the second convex surface, the third convex surface and the fourth convex surface are enclosed to form a positioning groove for positioning the molecular pump.

[0005] Optionally, the third convex surface and the fourth convex surface are respectively provided with side baffles, and the inner walls of the side baffles are matched with the side walls of the molecular pump.

[0006] Optionally, the molecular pump auxiliary disassembly and assembly device also includes a horizontal monitoring platform, a first horizontal block and a second horizontal block. The horizontal monitoring platform is connected to one side of the lifting platform. A T-shaped receiving groove is arranged on the horizontal monitoring platform. The first horizontal block and the second horizontal block are placed in the T-shaped receiving groove for observing the horizontal condition of the molecular pump during the installation and positioning process.

[0007] Optionally, the lifting drive device is a scissors-type lifting mechanism.

[0008] Optionally, the scissors-type lifting mechanism includes an upper fixed seat, a lower fixed seat, a first connecting block, a second connecting block, a driving rod and two sets of lifting fork frames arranged opposite each other, the upper fixed seat is fixedly installed at the bottom of the lifting platform, the lower fixed seat is located below the upper fixed seat and fixedly installed on the moving trolley; each lifting fork frame includes two first fork arms and two second fork arms, the upper ends of the two first fork arms are respectively hinged to the upper fixed seat, the lower ends of the two second fork arms are respectively hinged to the lower fixed seat, the lower ends of the two first fork arms are respectively hinged to the first connecting block and the second connecting block, and the upper ends of the two second fork arms are respectively hinged to the first connecting block and the second connecting block; the driving rod is respectively connected to the first connecting block and the second connecting block, and is used to adjust the distance between the first connecting block and the second connecting block.

[0009] Optionally, the mobile trolley includes a bottom plate, a middle plate, side plates and universal casters, the universal casters are arranged below the bottom plate, the top of the bottom plate is connected to the bottom of the side plates, the top of the side plates is connected to the bearing platform, the middle plate is arranged between the bearing platform and the bottom plate, and one end of the middle plate is connected to the side plate, the middle plate, the side plate and the bottom plate form a U-shaped structure with an opening on one side, and the lifting drive device is arranged above the middle plate.

[0010] Optionally, reinforcing ribs are respectively provided between the bottom plate and the middle plate, and between the middle plate and the bearing platform, wherein the reinforcing ribs are also connected to the side plates.

[0011] Optionally, a height adjustment device is installed above the universal caster, and the universal caster is connected to the bottom of the base plate through the height adjustment device.

[0012] Optionally, the height adjustment device is a bolt.

[0013] Optionally, the bottom plate, the middle plate, the side plates and the bearing platform are all made of stainless steel.

[0014] Compared with the prior art, the molecular pump auxiliary disassembly and assembly device provided by the present invention has the following beneficial effects: The present invention provides a mobile trolley, and provides a lifting mechanism and a bearing platform on the mobile trolley. By providing an opening on the bearing platform, the lifting drive device of the lifting mechanism drives the lifting platform to move up and down relative to the opening of the bearing platform. By providing a first convex surface and a second convex surface on the top of the lifting platform, and providing a third convex surface and a fourth convex surface on the top of the bearing platform, when the lifting platform is located at the opening of the bearing platform, the first convex surface, the second convex surface, the third convex surface and the fourth convex surface enclose a positioning groove for positioning the molecular pump. The molecular pump auxiliary disassembly and assembly device of the present invention can carry the molecular pump by the mobile trolley when installing or disassembling the molecular pump, and adjust the lifting platform to make the molecular pump close to or away from the installation position, so that the installation and disassembly are more convenient and quick, the efficiency of installation and disassembly is improved, and a large amount of manpower is not required; at the same time, the molecular pump is positioned by the positioning groove, which can not only improve the accuracy of installation and positioning, but also prevent the molecular pump from tipping over, reducing the risk of injury to personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a structural schematic diagram of the molecular pump auxiliary disassembly and assembly device according to the present invention from a first perspective; Figure 2 It is a structural schematic diagram of the molecular pump auxiliary disassembly and assembly device according to the present invention from a second viewing angle; Figure 3 It is a structural schematic diagram of the molecular pump auxiliary disassembly and assembly device according to the present invention from a third perspective; Figure 4 A schematic diagram of the structure of disassembling and assembling a molecular pump according to the molecular pump auxiliary disassembling and assembling device of the present invention; Figure 5 is a schematic structural diagram of a carrier platform according to the present invention; Figure 6 It is a structural schematic diagram of a lifting platform located at an opening of a bearing platform according to the present invention; Figure 7 It is a structural schematic diagram of the lifting mechanism according to the present invention.

[0017] The reference numerals in the above drawings are as follows: 10. Mobile trolley; 101. Bottom plate; 102. Middle plate; 103. Side plate; 104. Universal casters; 105. Avoidance opening; 106. Handle; 11. lifting mechanism; 111. lifting platform; 112. first convex surface; 113. second convex surface; 114. upper fixing seat; 115. lower fixing seat; 116. first connecting block; 117. second connecting block; 118. driving rod; 1181. crank; 119. lifting fork frame; 1191. first fork arm; 1192. second fork arm; 12. Loading platform; 121. Opening; 122. Third convex surface; 123. Fourth convex surface; 124. Side baffle; 13. Positioning groove; 14. Molecular pump; 15. Horizontal monitoring platform; 151. T-shaped receiving slot; 16. First horizontal block; 17. Second horizontal block; 18. Circlip; 19. Crossbeam; 20. Reinforcing ribs. DETAILED DESCRIPTION

[0018] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0019] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0020] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0021] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0023] Please refer to Figures 1 to 7As shown, some embodiments of the present invention provide a molecular pump auxiliary disassembly and assembly device, which is applied to the auxiliary installation and disassembly of molecular pumps in semiconductor equipment. The molecular pump auxiliary disassembly and assembly device includes a moving cart 10, a lifting mechanism 11 and a carrying platform 12. The top of the moving cart 10 is provided with a carrying platform 12 with an opening 121; the lifting mechanism 11 includes a lifting drive device and a lifting platform 111. The lifting drive device is arranged on the moving cart 10 and is located below the opening 121 of the carrying platform 12. It is connected to the lifting platform 111 and is used to drive the lifting platform 111 to move up and down relative to the opening 121 of the carrying platform 12; the top of the lifting platform 111 is provided with The first convex surface 112 and the second convex surface 113 are spaced apart and arranged opposite to each other; the top of the carrier 12 has a third convex surface 122 and a fourth convex surface 123, and the third convex surface 122 and the fourth convex surface 123 are respectively located on both sides of the opening 121 of the carrier 12; when the lifting platform 111 is located at the opening 121 of the carrier 12, the first convex surface 112 and the second convex surface 113 are respectively located between the third convex surface 122 and the fourth convex surface 123, and the first convex surface 112, the second convex surface 113, the third convex surface 122 and the fourth convex surface 123 enclose a positioning groove 13 for positioning the molecular pump 14. It can be understood that the moving trolley 10 is used to drive the lifting mechanism 11 and the carrier 12 to move, and the lifting drive device is used to drive the lifting platform 111 to rise or fall in the vertical direction. In this embodiment, the size and shape of the opening 121 match the lifting platform 111 and do not affect the lifting of the lifting platform 111; the size and shape of the positioning groove 13 match the bottom of the molecular pump 14. For example, the bottom of the molecular pump 14 is circular, and the first convex surface 112, the second convex surface 113, the third convex surface 122 and the fourth convex surface 123 enclose a complete circular groove, which matches the circular size of the bottom of the molecular pump 14, and can effectively prevent the molecular pump 14 from sliding sideways. Specifically, when the molecular pump 14 is installed, the molecular pump 14 is placed in the positioning groove 13, and the lifting platform 111 is driven to rise by the lifting drive device to lift the molecular pump 14 to the installation position. After installation and fixation, the lifting platform 111 is lowered and the mobile cart 10 is moved away; when the molecular pump 14 is disassembled, the mobile cart 10 is moved to the bottom of the molecular pump 14, and the lifting platform 111 is driven to rise by the lifting drive device so that the molecular pump 14 is located on the lifting platform 111. At this time, the molecular pump 14 is removed from the machine platform of the semiconductor equipment, the lifting platform 111 is lowered, the molecular pump 14 is stuck in the positioning groove 13, and the molecular pump 14 is moved away by the mobile cart 10.

[0024] By applying the technical solution provided by the above-mentioned embodiment of the present invention, a moving cart 10 is provided, and a lifting mechanism 11 and a carrying platform 12 are provided on the moving cart 10. By providing an opening 121 on the carrying platform 12, the lifting drive device of the lifting mechanism 11 drives the lifting platform 111 to move up and down relative to the opening 121 of the carrying platform 12. By providing a first convex surface 112 and a second convex surface 113 on the top of the lifting platform 111, and providing a third convex surface 122 and a fourth convex surface 123 on the top of the carrying platform 12, when the lifting platform 111 is located at the opening 121 of the carrying platform 12, the first convex surface 112, the second convex surface 113, the third convex surface 122 and the fourth convex surface 123 enclose and form a positioning groove 13 for positioning the molecular pump 14. The molecular pump auxiliary disassembly and assembly device of the present invention can move the molecular pump 14 by the mobile cart 10 when installing or disassembling the molecular pump 14, and adjust the lifting platform 111 to make the molecular pump 14 close to or away from the installation position, so that installation and disassembly are more convenient and quick, and the efficiency of installation and disassembly is improved, and a large amount of manpower is not required; at the same time, the molecular pump 14 is positioned by the positioning groove 13, which can not only improve the accuracy of installation and positioning, but also prevent the molecular pump 14 from tipping over, thereby reducing the risk of personal injury.

[0025] See also Figures 1 to 3 As shown, in some embodiments, the third convex surface 122 and the fourth convex surface 123 are respectively provided with side baffles 124, and the inner wall of the side baffles 124 is adapted to the side wall of the molecular pump 14. The space enclosed by the side baffles 124 matches the side wall of the molecular pump 14, so as to fix the molecular pump 14 and prevent the molecular pump 14 from sliding sideways during movement.

[0026] See also Figure 1 , Figure 2 and Figure 6 As shown, in some embodiments, the molecular pump auxiliary disassembly and assembly device further includes a horizontal monitoring platform 15, a first horizontal block 16 and a second horizontal block 17. The horizontal monitoring platform 15 is connected to one side of the lifting platform 111. A T-shaped receiving groove 151 is provided on the horizontal monitoring platform 15. The first horizontal block 16 and the second horizontal block 17 are placed in the T-shaped receiving groove 151 to observe the horizontal condition of the molecular pump 14 during the installation and positioning process. The first horizontal block 16 and the second horizontal block 17 are perpendicular to each other and form a T-shaped structure. The T-shaped receiving groove 151 matches the size of the T-shaped structure. The horizontality of the molecular pump 14 in four directions (i.e., front, back, left, and right) during the installation and positioning process can be observed through the placement of the first horizontal block 16 and the second horizontal block 17, so that timely adjustments can be made to avoid deflection that affects the installation and positioning.

[0027] See also Figure 1 As shown, in some embodiments, the lifting drive device is a scissor-type lifting mechanism.

[0028] See also Figure 2 , Figure 3 , Figure 6 and Figure 7 As shown, in some embodiments, the scissor-type lifting mechanism includes an upper fixed seat 114, a lower fixed seat 115, a first connecting block 116, a second connecting block 117, a driving rod 118 and two sets of lifting fork frames 119 arranged opposite to each other, the upper fixed seat 114 is fixedly installed at the bottom of the lifting platform 111, and the lower fixed seat 115 is located below the upper fixed seat 114 and fixedly installed on the mobile vehicle 10; each lifting fork frame includes two first fork arms 1191 and two second fork arms 1192, and the two first fork arms 1191 The upper ends of the two second fork arms 1192 are respectively hinged to the upper fixed seat 114, the lower ends of the two second fork arms 1192 are respectively hinged to the lower fixed seat 115, the lower ends of the two first fork arms 1191 are respectively hinged to the first connecting block 116 and the second connecting block 117, and the upper ends of the two second fork arms 1192 are respectively hinged to the first connecting block 116 and the second connecting block 117; the driving rod 118 is respectively connected to the first connecting block 116 and the second connecting block 117, and is used to adjust the distance between the first connecting block 116 and the second connecting block 117. In this embodiment, the lifting fork frame 119 is a vertically arranged diamond structure, the two first fork arms 1191 are located above the two second fork arms 1192, the driving rod 118 is a screw rod, one end of the screw rod is threadedly connected to the first connecting block 116, and the other end of the screw rod is rotatably connected to the second connecting block 117 through a bearing. By rotating the screw rod, the first connecting block 116 can move along the screw rod, thereby changing the distance between the first connecting block 116 and the second connecting block 117, and then adjusting the height of the lifting platform 111 through the lifting fork frame 119. Among them, the screw rod is inserted into the second connecting block 117 and connected to the crank 1181; the screw rod and the bearing are fixedly connected by a retaining spring 18; the upper fixing seat 114 and the lower fixing seat 115 are both stainless steel plates with pin holes. In this embodiment, two sets of lifting fork frames 119 are used, and this symmetrical structural design makes the overall structure of the lifting mechanism 11 more stable, the movement more stable, and the reliability stronger. Of course, one set of lifting fork frames 119 can also be used.

[0029] In some other embodiments, the driving rod 118 may also be a forward and reverse screw rod, and the first connecting block 116 and the second connecting block 117 are respectively threadedly connected to the forward and reverse screw rods.

[0030] See also Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6As shown, in some embodiments, the mobile vehicle 10 includes a bottom plate 101, a middle plate 102, a side plate 103 and a universal caster 104, the universal caster 104 is arranged below the bottom plate 101, the top of the bottom plate 101 is connected to the bottom of the side plate 103, the top of the side plate 103 is connected to the load-bearing platform 12, the middle plate 102 is arranged between the load-bearing platform 12 and the bottom plate 101, and one end of the middle plate 102 is connected to the side plate 103, the middle plate 102, the side plate 103 and the bottom plate 101 form a U-shaped structure with an opening on one side, and the lifting drive device is arranged above the middle plate 102. Figure 3 and Figure 4 As shown, in this embodiment, the lower fixing seat 115 is fixed above the middle plate 102, and an avoidance opening 105 is formed between the middle plate 102 and the bottom plate 101 to avoid the crossbeam 19 at the bottom of the machine support. In this embodiment, two handles 106 are provided on the side plate 103, so as to adjust the position and direction of the molecular pump 14 by moving the moving trolley 10 during the positioning process of the molecular pump 14, wherein the handle 106 is located on the side opposite to the avoidance opening 105; the side plate 103 has an opening for the crank 1181 to extend, wherein the crank 1181 and the handle 106 are located on the same side.

[0031] See also Figure 5 and Figure 6 As shown, in some embodiments, reinforcing ribs 20 are respectively provided between the bottom plate 101 and the middle plate 102, and between the middle plate 102 and the load-bearing platform 12, wherein the reinforcing ribs 20 are also connected to the side plates 103. By providing the reinforcing ribs 20, the structure of the mobile vehicle 10 is made more stable.

[0032] In some embodiments, a height adjustment device is installed above the universal caster 104, and the universal caster 104 is connected to the bottom of the base plate 101 through the height adjustment device. A universal caster 104 is provided below the base plate 101 so that the molecular pump auxiliary disassembly and assembly device is movable. By adjusting the height of the universal caster 104, the horizontality of the molecular pump 14 is adjusted to avoid scratches caused by friction between the upper sealing surface of the molecular pump 14 and the mounting surface, which is convenient for disassembly and assembly; in addition, by adjusting the height of the universal caster 104, the device can adapt to different terrains and terrain changes. In this embodiment, four universal casters 104 are provided at the bottom of the base plate 101, and the four universal casters 104 are respectively located at the four corners of the base plate 101 to facilitate the movement and transportation of the molecular pump 14. During the installation of the molecular pump 14, the molecular pump 14 is raised to the installation position, and the height of the universal caster 104 at the corresponding position is adjusted by observing the first horizontal block 16 and the second horizontal block 17, thereby achieving horizontal adjustment of the molecular pump 14. The molecular pump 14 can be rotated and fine-tuned in the front, back, left and right positions by moving the trolley 10, thereby completing the positioning of the installation hole.

[0033] In some embodiments, the height adjustment device is a bolt. By screwing the bolt, the height of the universal caster 104 can be fine-tuned, thereby adjusting the level of the molecular pump 14.

[0034] In some embodiments, the bottom plate 101, the middle plate 102, the side plate 103 and the bearing platform 12 are all made of stainless steel. In this embodiment, the bottom plate 101, the middle plate 102, the side plate 103 and the bearing platform 12 of the mobile vehicle 10 are formed by welding of stainless steel.

[0035] In summary, the molecular pump auxiliary disassembly and assembly device provided in this embodiment has at least the following beneficial technical effects: (1) By providing a first convex surface 112 and a second convex surface 113 on the top of the lifting platform 111, and providing a third convex surface 122 and a fourth convex surface 123 on the top of the supporting platform 12, when the lifting platform 111 is located at the opening 121 of the supporting platform 12, the first convex surface 112, the second convex surface 113, the third convex surface 122 and the fourth convex surface 123 enclose and form a positioning groove 13 for positioning the molecular pump 14, which can effectively prevent the molecular pump 14 from sliding sideways in cooperation with the side baffle 124 extending upward, thereby playing the role of supporting, fixing and protecting the molecular pump 14; (2) By setting a horizontal monitoring platform 15, placing a first horizontal block 16 and a second horizontal block 17 in a T-shaped receiving groove 151 of the horizontal monitoring platform 15, and setting a height-adjustable universal caster 104 on the bottom plate 101 of the mobile trolley 10, it is convenient to fine-tune the level of the molecular pump 14 during installation and positioning, prevent the sealing surface from being scratched due to the deflection of the molecular pump 14 during the lifting process, and facilitate positioning and adjustment; at the same time, due to the addition of the universal caster 104, it is convenient to move the molecular pump 14 during assembly and disassembly, which greatly reduces the need for multiple people to carry and move the molecular pump 14, which consumes manpower and the risk of the molecular pump 14 being easily bumped and injured, thereby protecting the safety of personnel and the molecular pump 14 and extending the service life of the molecular pump 14; (3) By providing an avoidance opening 105 on the mobile trolley 10, the lower end cross beam 19 of the equipment support can be avoided; (4) The lifting platform 111 is connected to the lifting fork frame 119, and the lifting platform 111 is driven to move up and down by the driving rod 118. The lifting driving device itself is relatively small and flexible, easy to operate, and greatly improves work efficiency; (5) The present invention saves the time required by the existing method to add a support block underneath and carry and move the molecular pump 14 when disassembling and assembling it. After the molecular pump 14 is placed in the device, two people can complete the lifting, carrying and moving operations of the molecular pump 14, which saves manpower, improves work efficiency, saves time for disassembling and assembling the molecular pump 14, and shortens the time required for equipment maintenance; (6) The molecular pump auxiliary disassembly and assembly device of the present invention is not only applicable to the technical field of semiconductor equipment, but also to the technical field of other equipment that uses suspended molecular pumps and other heavy objects.

[0036] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for explaining the principles of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementations of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A molecular pump auxiliary disassembly and assembly device, characterized in that: The device is applied to assist installation and disassembly of a molecular pump in a semiconductor device. The molecular pump assisting disassembly and assembly device comprises a moving trolley, a lifting mechanism and a carrying platform. A carrying platform with an opening is provided on the top of the moving trolley. The lifting mechanism comprises a lifting drive device and a lifting platform. The lifting drive device is arranged on the moving trolley and is located below the opening of the carrying platform. The lifting drive device is connected to the lifting platform and is used to drive the lifting platform to move up and down relative to the opening of the carrying platform. The top of the lifting platform is provided with a first convex surface and a second convex surface, and the first convex surface and the second convex surface are spaced apart and arranged opposite to each other; The top of the carrying platform has a third convex surface and a fourth convex surface, and the third convex surface and the fourth convex surface are respectively located on both sides of the opening of the carrying platform; When the lifting platform is located at the opening of the supporting platform, the first convex surface and the second convex surface are respectively located between the third convex surface and the fourth convex surface, and the first convex surface, the second convex surface, the third convex surface and the fourth convex surface together form a positioning groove for positioning the molecular pump.

2. The molecular pump auxiliary disassembly and assembly device according to claim 1, characterized in that: The third convex surface and the fourth convex surface are respectively provided with side baffles, and the inner walls of the side baffles are matched with the side walls of the molecular pump.

3. The molecular pump auxiliary disassembly and assembly device according to claim 1, characterized in that: It also includes a horizontal monitoring platform, a first horizontal block and a second horizontal block. The horizontal monitoring platform is connected to one side of the lifting platform. A T-shaped receiving groove is arranged on the horizontal monitoring platform. The first horizontal block and the second horizontal block are placed in the T-shaped receiving groove to observe the horizontal condition of the molecular pump during the installation and positioning process.

4. The molecular pump auxiliary disassembly and assembly device according to claim 1, characterized in that: The lifting drive device is a scissor-type lifting mechanism.

5. The molecular pump auxiliary disassembly and assembly device according to claim 4, characterized in that: The scissor-type lifting mechanism comprises an upper fixed seat, a lower fixed seat, a first connecting block, a second connecting block, a driving rod and two sets of lifting fork frames arranged opposite to each other, wherein the upper fixed seat is fixedly installed at the bottom of the lifting platform, and the lower fixed seat is located below the upper fixed seat and fixedly installed on the moving trolley; Each of the lifting fork frames comprises two first fork arms and two second fork arms, the upper ends of the two first fork arms are respectively hinged to the upper fixing seat, the lower ends of the two second fork arms are respectively hinged to the lower fixing seat, the lower ends of the two first fork arms are respectively hinged to the first connecting block and the second connecting block, and the upper ends of the two second fork arms are respectively hinged to the first connecting block and the second connecting block; The driving rod is connected to the first connecting block and the second connecting block respectively, and is used to adjust the distance between the first connecting block and the second connecting block.

6. The molecular pump auxiliary disassembly and assembly device according to claim 1, characterized in that: The mobile trolley includes a bottom plate, a middle plate, side plates and universal casters, the universal casters are arranged below the bottom plate, the top of the bottom plate is connected to the bottom of the side plates, the top of the side plates is connected to the bearing platform, the middle plate is arranged between the bearing platform and the bottom plate, and one end of the middle plate is connected to the side plates, the middle plate, the side plates and the bottom plate form a U-shaped structure with an opening on one side, and the lifting drive device is arranged above the middle plate.

7. The molecular pump auxiliary disassembly and assembly device according to claim 6, characterized in that: Reinforcing ribs are respectively arranged between the bottom plate and the middle plate, and between the middle plate and the bearing platform, wherein the reinforcing ribs are also connected to the side plates.

8. The molecular pump auxiliary disassembly and assembly device according to claim 6, characterized in that: A height adjustment device is installed above the universal caster, and the universal caster is connected to the bottom of the base plate through the height adjustment device.

9. The molecular pump auxiliary disassembly and assembly device according to claim 8, characterized in that: The height adjustment device is a bolt.

10. The molecular pump auxiliary disassembly and assembly device according to claim 6, characterized in that: The bottom plate, middle plate, side plates and bearing platform are all made of stainless steel.

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