A multi-level packaging structure for pressure sensor processing

Abstract

The present invention discloses a multi-level packaging structure for pressure sensor processing, which relates to the technical field of packaging structures. With respect to the straight travel mode in the packaging process of the pressure sensor, a gear plate is used as an auxiliary structure, and the gear rotational power is converted into the straight travel power of a straight gear rod through a worm meshing mode. The difference from the conventional straight travel mode is that it will not directly affect the overall straight travel process, but instead utilizes the gear transmission mode to compensate for the subsequent travel. Specifically, it is explained that the transmission ratio difference caused by the gear straight travel difference is utilized to convert the large-stroke rotation mode into the small-stroke straight travel mode. The purpose is that it will not directly reduce the overall equipment operation efficiency, but also avoid the abnormal state caused by insufficient or excessive travel. It should also be explained that based on the conventional gear transmission mode, the gear transmission mode is further improved so that the straight travel / rotation switching process has the dual effects of idling retention and graded speed change.

Description

Technical Field

[0001] The present invention relates to the technical field of packaging structures, and in particular to a multi-level packaging structure for pressure sensor processing. Background Art

[0002] The following explains the assembly process of highly sensitive devices such as pressure sensors. It is mainly based on internal high-sensitivity chips or high-sensitivity devices, based on physical properties such as air pressure, hydraulic pressure, temperature or flow. Taking MEMS sensors as an example, the internal MEMS chip is the core. In order to improve production efficiency during the production process, automated equipment is currently mainly used, and related structures (robotic arms, etc.) on the automated equipment are relied upon to achieve automatic packaging. Please refer to the relevant content in Publication No. CN103958393A.

[0003] The overall structure of the pressure sensor is relatively small. During its packaging process, it is necessary to ensure that the electrodes or connectors between the chip (MEMS chip) and the device are fully connected. However, it is also necessary to avoid the problem of packaging stroke being too large or too small. Specifically, when the stroke is too large, the electrodes or connectors may break due to stress; when the stroke is too small, poor contact between the electrodes or connectors may occur, which will ultimately affect the subsequent use of the pressure sensor. To overcome this problem, the PLC program is mainly used to control the moving speed of the overall structure, but this will also indirectly reduce the overall production efficiency. Specifically, the number of pressure sensors that are packaged within the cycle time is reduced. This application proposes a solution. Summary of the invention

[0004] The purpose of the present invention is to provide a multi-level packaging structure for pressure sensor processing. The packaging process of the pressure sensor mainly relies on automatic equipment to realize the automatic packaging process. However, the moving stroke needs to be strictly controlled during the automatic packaging process, which indirectly reduces the overall production efficiency.

[0005] The object of the present invention can be achieved by the following technical solutions: a multi-stage packaging structure for processing a pressure sensor, which is applied to an automatic assembly line, and includes an assembly head, wherein the assembly head includes a straight-moving drive assembly, an assembly housing, and a mounting seat rod, wherein the assembly housing is composed of a rod set and a gear housing, wherein a straight-moving gear rod is slidably installed in the rod set along its length direction, and a gear set is arranged inside the gear housing;

[0006] The gear set includes a kinetic energy gear plate, a first gear and a second gear. The kinetic energy gear plate is provided with an external gear and an internal gear on the outside and inside. The kinetic energy gear plate is meshed with the straight gear rod through the external gear. The kinetic energy gear plate is provided as a kinetic energy output part, and the first gear or the second gear is provided as a kinetic energy input part.

[0007] The mounting seat rod is arranged at the lower end of the straight gear rod, and the mounting seat rod and the rod assembly are slidingly connected along the length direction of the rod assembly. A liquid tank is arranged between the lower end of the straight gear rod and the inside of the mounting seat rod. The mounting seat rod is arranged as a tooling part, and a hydraulic sensor corresponding to the liquid tank is installed on the outside of the mounting seat rod.

[0008] It is further configured that: the kinetic energy gear plate and the second gear are rotationally connected inside the gear housing, and the second gear and the center point of the gear housing are on the same axis, and a first servo motor corresponding to the second gear is installed outside the gear housing.

[0009] It is further configured as follows: the first gear is arranged in a ring array along the second gear, and the first gear is externally meshed with the second gear, and the first gear is internally meshed with the internal gear in the kinetic energy gear plate.

[0010] It is further configured as follows: the diameter of the second gear is smaller than the diameter of the first gear, and the diameter of the kinetic energy gear plate is larger than the diameter of the first gear.

[0011] It is further configured as follows: a transmission shaft is installed at the center point of the first gear, and an arc-shaped movable groove corresponding to the transmission shaft is opened on the outer wall of one side of the gear housing.

[0012] It is further configured as follows: the number of first gears is N, the center point of the arc-shaped movable groove and the center point of the gear housing are on the same axis, and the arc of the arc-shaped movable groove is less than or equal to 360° / N.

[0013] It is further configured as follows: a planetary gear sleeve corresponding to the first gear is arranged on the outer wall of one side of the gear housing, and a second servo motor is installed at the center point of the outer wall of one side of the gear housing, the output shaft of the second servo motor is fixedly connected to the center point of the planetary gear sleeve, and the transmission shaft on the first gear and the planetary gear sleeve are rotationally connected.

[0014] It is further configured as follows: a connecting spring is fixedly installed between the lower end of the straight gear rod and the upper end of the mounting seat rod.

[0015] The present invention has the following beneficial effects:

[0016] 1. The present invention is aimed at the straight travel mode in the automatic packaging process of the pressure sensor. The difference from the conventional straight travel mode is that an auxiliary travel structure based on the gear meshing principle is added, which is manifested as: a kinetic energy gear plate is used as a kinetic energy output structure, and cooperates with a straight gear rod, so that the gear rotation power can be converted into the straight driving force of the straight gear rod. Based on this basic principle, it is also necessary to explain that the gear set in the overall structure utilizes the transmission difference caused by the gear diameter difference, so as to further improve the diameter difference between the first gear, the second gear and the kinetic energy gear plate, so that the overall straight process is not directly affected in the overall solution, but the gear transmission method is used to compensate the subsequent stroke, and the transmission ratio difference caused by the gear straight difference is used to convert the large stroke rotation method into a small stroke straight mode;

[0017] 2. Based on the above content, there is a kinetic energy input structure of the second gear or the first gear in the overall gear structure, and the two do not interfere with each other in the kinetic energy input structure, thereby avoiding the problem of gear interference affecting the transmission, and by limiting the transmission ratio of the kinetic energy gear plates corresponding to the first gear and the second gear, the stroke change of the straight gear rod is further changed, so that the overall purpose is: it will not directly reduce the operating efficiency of the overall equipment, but also avoid abnormal conditions caused by insufficient or excessive stroke. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of a multi-level packaging structure for a pressure sensor according to the present invention;

[0020] Figure 2 A schematic cross-sectional view of an assembly housing in a multi-level packaging structure for a pressure sensor according to the present invention;

[0021] Figure 3 A cross-sectional view of an assembly housing in a multi-level packaging structure for a pressure sensor according to the present invention;

[0022] Figure 4 A schematic diagram of the structure of a gear set in a multi-level packaging structure for processing a pressure sensor proposed by the present invention;

[0023] Figure 5A partial cross-sectional view of a straight-moving gear rod in a multi-level packaging structure for a pressure sensor according to the present invention;

[0024] Figure 6 This is a transverse cross-sectional view of an assembly shell in a multi-level packaging structure for processing a pressure sensor proposed by the present invention.

[0025] In the figure: 1. straight drive assembly; 2. rod set; 3. gear housing; 4. straight gear rod; 5. first servo motor; 6. mounting seat rod; 7. hydraulic sensor; 8. planetary gear sleeve; 9. kinetic gear plate; 10. first gear; 11. second gear; 12. connecting spring; 13. arc movable groove; 14. second servo motor. DETAILED DESCRIPTION

[0026] The technical scheme of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Embodiment 1: The packaging process of the pressure sensor mainly relies on automatic packaging equipment to realize the automatic packaging process. However, the moving stroke needs to be strictly controlled during the automatic packaging process, such as welding the MEMS chip at a specified position, which indirectly reduces the overall production efficiency. The following technical solutions are proposed:

[0028] Reference Figures 1 to 6 In this embodiment, a multi-stage packaging structure of a pressure sensor processing is applied to an automatic assembly line, including an assembly head, the assembly head includes a straight drive assembly 1, an assembly housing and a mounting seat rod 6, the assembly housing is composed of a rod set 2 and a gear housing 3, a straight gear rod 4 is slidably installed in the rod set 2 along its length direction, and a gear set is arranged inside the gear housing 3;

[0029] The gear set includes a kinetic energy gear plate 9, a first gear 10 and a second gear 11. The kinetic energy gear plate 9 is provided with an external gear and an internal gear on the outside and inside. The kinetic energy gear plate 9 is meshed with the straight gear rod 4 through the external gear. The kinetic energy gear plate is provided as a kinetic energy output part, and the first gear 10 or the second gear 11 is provided as a kinetic energy input part.

[0030] The mounting seat rod 6 is arranged at the lower end position of the straight gear rod 4, and the mounting seat rod 6 and the rod set 2 are slidably connected along the length direction of the rod set 2, a liquid tank is arranged between the lower end of the straight gear rod 4 and the inside of the mounting seat rod 6, the mounting seat rod 6 is arranged as a tooling part, and a hydraulic sensor 7 corresponding to the liquid tank is installed on the outside of the mounting seat rod 6, the kinetic energy gear plate 9 and the second gear 11 are rotationally connected inside the gear housing 3, and the second gear 11 and the center point of the gear housing 3 are on the same axis, a first servo motor 5 corresponding to the second gear 11 is installed on the outside of the gear housing 3, the first gear 10 is arranged in a ring array along the second gear 11, and the first gear 10 and the second gear 11 are externally meshed, and the first gear 10 and the internal gear in the kinetic energy gear plate 9 are internally meshed.

[0031] Working principle: A brief description of the packaging process of the pressure sensor is given. Its essence is to install a certain component or chip in a specified area through an automated structure. The automated structure can achieve a straight stroke through a structure such as a straight motor. However, for the packaging requirements of a small stroke, conventional structures such as straight motors are not applicable. In this regard, the structural form of the present invention is proposed. Figure 3 and Figure 1 For example, the straight driving assembly 1 as the main motion structure can also drive the straight gear rod 4 and the mounting seat rod 6 to move downward, wherein the mounting seat rod 6 is used to install the corresponding tooling head, and the tooling head is used to absorb the corresponding components, such as the MEMS chip through the tooling head, which will not be explained in detail; it should be noted that the straight gear rod 4 can perform a second independent movement corresponding to the straight driving assembly 1, combined with Figure 3 The kinetic energy gear plate 9 and the straight gear rod 4, when the kinetic energy gear plate 9 rotates clockwise, the straight gear rod 4 moves downward, and vice versa when the kinetic energy gear plate 9 rotates counterclockwise, the straight gear rod 4 moves upward, so that it can be understood that: during the operation of the straight drive assembly 1, the straight gear rod 4 can move synchronously or asynchronously;

[0032] Still need reference Figure 4Explanation: Referring to the planetary gear transmission mode, when the second gear 11 rotates, the first gear 10 thereof will also rotate synchronously. The meshing relationship between the inner gear of the kinetic energy gear plate 9 and the first gear 10 can drive the kinetic energy gear plate 9 to rotate. It should be further explained that the diameter difference between the first gear 10, the second gear 11 and the kinetic energy gear plate 9 can be further limited. The transmission ratio caused by the gear diameter difference is briefly explained as follows: the transmission ratio between gears refers to the ratio of the rotational speeds of two mutually meshing gears. The transmission ratio can be calculated by the ratio of the number of teeth of the two gears, or by the ratio of the pitch circle diameters of the two gears. The transmission ratio is defined as the ratio of the input shaft speed to the output shaft speed, which determines the deceleration or acceleration effect of the gear transmission. Therefore, the diameters of the first gear 10, the second gear 11 and the kinetic energy gear plate 9 can be limited according to the process parameters, so as to obtain the transmission ratio between the three. Therefore, the rotational speeds of the first gear 10 and the second gear 10 can be obtained in reverse according to the output rotational speed of the kinetic energy gear plate 9.

[0033] Embodiment 2:

[0034] Explanation is given in conjunction with the gear set in Example 1: the diameter of the second gear 11 is smaller than the diameter of the first gear 10, the diameter of the kinetic energy gear plate 9 is larger than the diameter of the first gear 10, a transmission shaft is installed at the center point of the first gear 10, an arc-shaped movable groove 13 corresponding to the transmission shaft is opened on the outer wall of one side of the gear housing 3, the number of first gears 10 is N, the center point of the arc-shaped movable groove 13 and the center point of the gear housing 3 are on the same axis, and the arc of the arc-shaped movable groove 13 is less than or equal to 360° / N, a planetary gear sleeve 8 corresponding to the first gear 10 is provided on the outer wall of one side of the gear housing 3, and a second servo motor 14 is installed at the center point of the outer wall of one side of the gear housing 3, the output shaft of the second servo motor 14 is fixedly connected to the center point of the planetary gear sleeve 8, the transmission shaft on the first gear 10 and the planetary gear sleeve 8 are rotationally connected, and a connecting spring 12 is fixedly installed between the lower end of the straight gear rod 4 and the upper end of the mounting seat rod 6.

[0035] Solution Description: Refer again Figure 4 In combination with the first embodiment, it is explained that the gear set consisting of the first gear 10, the second gear 11 and the kinetic energy gear plate 9 is essentially a planetary reduction mechanism, wherein the second gear 11 serves as a sun gear, and the kinetic energy gear plate 9 serves as a kinetic energy output structure and needs to keep rotating at all times, and the first gear 10 can be used as a control structure for this. There are two overall transmission modes:

[0036] S1: When the first servo motor 5 is used as an auxiliary kinetic energy output source, the second gear 11 thereof is used as a kinetic energy source. In order to ensure the rotation of the kinetic energy gear plate 9, the first gear 10 thereof keeps rotating but does not revolve around the second gear 11. Therefore, the second servo motor 5 is in an idling state. It can be understood that the second servo motor 5 does not interfere with the rotation of the kinetic energy gear plate 9 and thus does not provide any power. It only cooperates with the output power of the first servo motor 5 to provide "follow-up power".

[0037] S2: In conjunction with the relevant contents in S1, the following explanation is given: when the second servo motor 14 is used as an auxiliary kinetic energy output source, the first gear 10 not only revolves around the second gear 11, but also rotates synchronously, so the first servo motor 5 needs to cooperate with the output power of the second servo motor 14 to provide "following force";

[0038] In combination with the above S1 and S2, since the overall gear set is only used as an auxiliary structure during the overall straight travel process, the kinetic energy gear plate 9 does not need to complete a 360° rotation, but only needs to meet a small travel;

[0039] It is also necessary to explain that: the diameter difference between the first gear 10 and the second gear 11 needs to be further limited. The purpose is to: cooperate with the above-mentioned S1 and S2 methods to perform two sets of transmission methods. Its essence is: when cooperating with the output power of the first servo motor 5 and the second servo motor 14, the speed conversion method can be further changed. The diameters between the first gear 10, the second gear 11 and the kinetic energy gear plate 9 are determined according to the process parameters and are not limited in this embodiment.

[0040] Embodiment 3: The following description is made in combination with Embodiment 1 and Embodiment 2:

[0041] It can be understood that the basic content of the present invention is that it will not directly affect the overall straight-moving process, but will use the gear transmission method to compensate for the subsequent stroke, and convert the gear rotation power into the straight-moving force of the straight-moving gear rod. What needs to be explained is that the total stroke in the overall packaging process is L, and the straight-moving drive assembly 1 therein completes the stroke of L1. When the straight-moving drive assembly 1 drives the assembly housing to move down by L1, the remaining straight-moving stroke is L-L1, and is completed by the gear set in cooperation with S1 or S2.

[0042] But refer to Figure 5 and Figure 4It is explained that: the mounting seat rod 6 is used to install the corresponding tooling head, but in actual circumstances, when the straight gear rod 4 is driven downward by the gear set, because a liquid tank is provided inside the mounting seat rod 6, and liquid is more difficult to compress than gas, the liquid tank is filled with liquid medium, and the liquid medium is used as the "connection structure" between the straight gear rod 4 and the mounting seat rod 6. Compared with the conventional connection method, the liquid medium is used as the "flexible connection structure", so that when the tooling head on the mounting seat rod 6 contacts the designated area during the operation of S1 or S2, the mounting seat rod 6 is in a relatively In the stationary state, the straight gear rod 4 will continue to move relative to the mounting seat rod 6, causing the connecting spring 12 therein to be compressed. In this state, the liquid medium in the liquid tank is compressed, so it can be understood that the volume of the liquid tank is reduced and the internal hydraulic pressure is increased, so that the relevant value can be directly obtained through the hydraulic sensor 7. It should be further explained that the maximum value of the hydraulic sensor 7 is limited by the process parameters again, which can be understood as: during the operation of S1 or S2, when the value in the hydraulic sensor 7 reaches the relevant value, it can directly indicate that a single packaging action is completed.

[0043] In summary: for the straight travel mode in the pressure sensor packaging process, the gear plate is used as an auxiliary structure, and the gear rotation power is converted into the straight travel power of the straight gear rod through the worm meshing method. The difference from the conventional straight travel mode is that it will not directly affect the overall straight travel process, but uses the gear transmission method to compensate for the subsequent travel. Specifically, the transmission ratio difference caused by the straight travel difference of the gear is used to convert the large stroke rotation mode into the small stroke straight travel mode. The purpose is: it will not directly reduce the overall equipment operation efficiency, but also avoid the abnormal state caused by insufficient or excessive stroke. It should also be noted that based on the conventional gear transmission method, the gear transmission method is further improved so that the straight / rotation switching process has the dual effects of idling holding and graded speed changing.

[0044] The above contents are merely examples and explanations of the structure of the present invention. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they should all fall within the protection scope of the present invention.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A multi-level packaging structure for pressure sensor processing, used in an automatic assembly line, characterized in that: The machine head assembly comprises a linear drive assembly (1), an assembly housing and a mounting seat rod (6); the assembly housing comprises a rod assembly sleeve (2) and a gear housing (3); a linear gear rod (4) is slidably mounted in the rod assembly sleeve (2) along its length direction; and a gear assembly is arranged inside the gear housing (3); The gear set comprises a kinetic energy gear plate (9), a first gear (10) and a second gear (11); the kinetic energy gear plate (9) is provided with an external gear and an internal gear on the outside and inside; the kinetic energy gear plate (9) is meshed with the straight-moving gear rod (4) via the external gear; the kinetic energy gear plate is provided as a kinetic energy output part, and the first gear (10) or the second gear (11) is provided as a kinetic energy input part; The mounting seat rod (6) is arranged at the lower end of the straight gear rod (4), and the mounting seat rod (6) and the rod assembly sleeve (2) are slidably connected along the length direction of the rod assembly sleeve (2); a liquid tank is arranged between the lower end of the straight gear rod (4) and the inside of the mounting seat rod (6); the mounting seat rod (6) is arranged as a tooling part, and a hydraulic pressure sensor (7) corresponding to the liquid tank is installed outside the mounting seat rod (6); The diameter of the second gear (11) is smaller than the diameter of the first gear (10), the diameter of the kinetic energy gear plate (9) is larger than the diameter of the first gear (10), a transmission shaft is installed at the center point of the first gear (10), an arc-shaped movable groove (13) corresponding to the transmission shaft is opened on the outer wall of one side of the gear housing (3), the number of the first gears (10) is N, the center point of the arc-shaped movable groove (13) and the center point of the gear housing (3) are on the same axis, and the arc of the arc-shaped movable groove (13) is less than or equal to 360° / N, a planetary gear sleeve (8) corresponding to the first gear (10) is arranged on the outer wall of one side of the gear housing (3), and a second servo motor (14) is installed at the center point of the outer wall of one side of the gear housing (3), the output shaft of the second servo motor (14) is fixedly connected to the center point of the planetary gear sleeve (8), and the transmission shaft on the first gear (10) and the planetary gear sleeve (8) are rotatably connected; A liquid tank is provided inside the mounting seat rod (6), and the liquid tank is filled with a liquid medium. The liquid medium is used as a flexible connection structure between the straight gear rod (4) and the mounting seat rod (6). The total stroke during the packaging process is L. The straight drive assembly (1) drives the assembly housing to move down L1 and completes the stroke of L1, and the gear group completes the remaining straight stroke of L-L1, which is specifically expressed as follows: When the first servo motor (5) serves as an auxiliary kinetic energy output source and the second gear (11) serves as a kinetic energy source, the first gear (10) maintains its own rotation and does not revolve around the second gear (11), the kinetic energy gear plate (9) maintains rotation, and the second servo motor (14) is in an idling state; When the second servo motor (14) serves as an auxiliary kinetic energy output source, the first gear (10) revolves around the second gear (11) and rotates on its own axis, and the first servo motor (5) cooperates with the output power of the second servo motor (14) to provide a follower force.

2. The multi-level packaging structure for pressure sensor processing according to claim 1, characterized in that: The kinetic energy gear plate (9) and the second gear (11) are rotatably connected inside the gear housing (3), and the center points of the second gear (11) and the gear housing (3) are located on the same axis. A first servo motor (5) corresponding to the second gear (11) is installed outside the gear housing (3).

3. The multi-level packaging structure for pressure sensor processing according to claim 2, characterized in that: The first gears (10) are arranged in a ring array along the second gears (11), and the first gears (10) and the second gears (11) are externally meshed, and the first gears (10) and the internal gears in the kinetic energy gear plate (9) are internally meshed.

4. The multi-level packaging structure for pressure sensor processing according to claim 1, characterized in that: A connecting spring (12) is fixedly mounted between the lower end of the straight-moving gear rod (4) and the upper end of the mounting seat rod (6).

Images