On-site wireless measurement device and method based on spectral confocal principle

Abstract

The present invention discloses an in-situ wireless measurement device and method based on the spectral confocal principle. The present invention comprises a spectral confocal probe, an optomechanical control module, a wireless receiver, a numerical control interface module, a tool holder adapter interface and a tool holder. The spectral confocal probe is used to disperse white light along the axial direction, realize non-contact distance measurement through the spectral analysis unit of the optomechanical control module, and trigger events according to predetermined rules. The optomechanical control module contains a frequency hopping communication unit to transmit the distance measurement result or event of the spectral analysis unit to the wireless receiver in the form of frequency hopping wireless communication. The wireless receiver realizes communication with the numerical control system through the numerical control interface module, and controls the operation of the in-situ wireless probe through numerical control instructions. The present invention realizes matching with tool holders of different standards through the tool holder adapter interface, allowing the device to be placed in the tool magazine of the numerical control machining system in the form of a machining tool. The present invention is assembled to the machining spindle through the tool change instruction to realize in-situ measurement in the same coordinate system.

Description

Technical Field

[0001] The present invention relates to precision detection technology, and in particular to an in-situ wireless measurement device and method based on the principle of spectral confocality. The present invention provides multiple working modes such as axial measurement, lateral measurement, simultaneous axial and lateral measurement, and simultaneous bilateral measurement. The device can be matched with tool holders of different standards through a tool holder adapter interface, thereby allowing the device to be placed in the tool magazine of a CNC machining system in the form of a machining tool. The present invention also discloses an in-situ measurement method based on the device, which is assembled on a machining spindle through a tool change instruction to achieve in-situ measurement in the same coordinate system. Background Art

[0002] In modern industrial production and scientific research, in-situ measurement technology is a significant technological advancement in the manufacturing industry. It refers to real-time measurement and monitoring during the production process without removing the workpiece from the production line. This technology can capture data from the processing process in real time, thereby achieving instant feedback and adjustment of processing quality, significantly improving production efficiency and product quality. In-situ measurement technology is widely used in many fields, such as aviation, automobile manufacturing, precision engineering and other industries. In recent years, spectral confocal technology has received widespread attention as a high-precision non-contact measurement method. This technology uses the principle of spectral analysis to achieve distance measurement of the object being measured by axial dispersion of white light. This method not only avoids the risk of damage caused by contact measurement, but also provides measurement accuracy up to sub-micron level, which is very suitable for the needs of high-end manufacturing industry.

[0003] At present, spectral confocal displacement measurement sensors have mature commercial products. The main foreign manufacturers include STIL, Precitec, Micro-Epsilon, Keyence, etc., and the main domestic manufacturers include ThinkFocus, Liyi, Haibosen, Chuangshi Intelligence, etc. A wide variety of sensors have been developed according to different measurement requirements, among which the highest resolution can reach nanometer level, the highest measurement speed can reach 70kHz, and there are axial and radial probes with a minimum outer diameter of 4mm to meet the measurement requirements in small holes and slits.

[0004] When it comes to specific measurement applications, the above technologies and products still rely on offline measurement, which limits their application efficiency in dynamic production environments. Offline measurement often requires interrupting the production process, resulting in reduced processing efficiency of the workpiece, while also affecting the ability to monitor and provide feedback in real time. In the rapidly developing field of intelligent manufacturing, solutions for measuring during the processing process are needed to adjust processing parameters in a timely manner to ensure product quality. Summary of the invention

[0005] Spectral confocal displacement measurement technology is a mature and high-precision non-contact measurement method, which is widely used in various industrial and scientific research fields. Although it performs well in terms of accuracy and measurement efficiency, it traditionally relies on offline measurement, which limits its effectiveness in certain specific applications, especially when it is necessary to measure workpieces in situ. The purpose of this invention is to propose an in-situ wireless measurement technology based on the principle of spectral confocal.

[0006] In order to achieve the above object, the present invention adopts the following technical solution:

[0007] An on-site wireless measuring device based on the spectral confocal principle comprises a spectral confocal probe, an optical-mechanical-electrical control module, a wireless receiver, a numerical control interface module, a tool handle adapter interface and a tool handle.

[0008] The spectral confocal probe is composed of a dispersion mirror group, a beam splitter element and a shell, and is used to disperse white light along the axial direction so that the distance value corresponds to a specific spectrum.

[0009] The optomechanical and electrical control module includes a white light source, a light source drive control unit, an optical path coupling unit, a spectrum analysis unit, an optical pulse external trigger unit and a frequency hopping communication unit; the light source drive control unit drives the white light source to generate stable wide-spectrum light; the optical path coupling unit couples the wide-spectrum light into the spectrum confocal probe after beamforming; the spectrum analysis unit performs spectrum analysis and information processing on the return light collected by the spectrum confocal probe and obtains the distance value, realizes non-contact distance measurement, and triggers events according to predetermined rules; the optical pulse external trigger unit receives an external trigger optical pulse signal from a wireless transceiver, controls the spectrum analysis unit to complete data acquisition, and sends an acquisition completion optical pulse signal to the wireless receiver; the frequency hopping communication unit transmits the distance value or event of the spectrum analysis unit to the wireless receiver in the form of frequency hopping wireless communication.

[0010] The wireless receiver receives information from the optomechanical and electronic control module, and communicates with the CNC numerical control system of the machine tool through the numerical control interface module to achieve in-situ wireless measurement.

[0011] The tool handle adapter interface comprises a screw with a fixed aperture thread and a positioning reference surface, and is adapted to tool handles of different standards.

[0012] The tool holder is an interchangeable standard part, comprising an internal thread and a positioning reference surface that match the tool holder adapter interface, and its specifications are related to the requirements of the machine tool.

[0013] The dispersion mirror group of the spectral confocal probe adopts a multi-lens design, and realizes multiple working modes such as bilateral simultaneous measurement, axial simultaneous measurement, lateral measurement, and axial measurement by selecting different beam splitters at the light output; the bilateral simultaneous measurement mode is to split the output light into two in a deflected manner by two reflectors at a certain angle, and simultaneously measure objects on both sides, the angle is 90 degrees, and the angle between the two reflecting surfaces and the optical axis of the dispersion mirror group is 45 degrees; the axial simultaneous measurement mode is to use a semi-transparent and semi-reflective mirror at a certain angle to the optical axis of the dispersion mirror group as a beam splitter, a part of the axial light is measured in a deflected manner for lateral objects, and the other part of the axial light is measured in the original path for the axis object, and the angle between the semi-transparent and semi-reflective mirror and the optical axis of the dispersion mirror group is 45 degrees; the lateral measurement mode is to use a 45-degree reflector as a beam splitter, and measure the lateral object by deflecting the axial light by 90 degrees; the axial measurement mode has no beam splitter, and measures objects in the optical axis direction of the dispersion mirror group.

[0014] The optomechanical electronic control module includes a frame structure, a battery module and a waterproof shell; the center of the frame structure is a columnar structure, which is connected to the tool handle adapter interface at the top; the white light source, the light source drive control unit, the spectrum analysis unit, the light pulse external trigger unit, the frequency hopping communication unit and the optical path coupling unit are distributed and fixed on the frame structure and distributed around the columnar structure; the battery module supplies power to the entire optomechanical electronic control module; the waterproof shell adopts a cylindrical structure, and the side column surface of the shell includes a communication window to allow electromagnetic waves in the radio band and infrared band to propagate freely; the optomechanical electronic control module also includes a power manager, which is responsible for the power supply of the spectrum analysis unit, the light pulse external trigger unit and the frequency hopping communication unit.

[0015] The light source driving unit is responsible for driving the white light source to produce white light, and has a light intensity modulation circuit so that the light intensity is modulated and output according to a specific curve of 5~10KHz within a specified range; the spectrum analysis unit has a digital filter, which only allows the reflected light signal modulated by the light source driving unit to enter the processing link, filtering out the influence of ambient light and stray light.

[0016] The frequency hopping communication unit operates in the 2.4 GHz frequency band and includes a protocol adapter; the optical path coupling unit includes a first optical fiber interface, a second optical fiber interface, a first Y-type coupler, a second Y-type coupler, a third optical fiber interface, and a fourth optical fiber interface; the wide-spectrum light emitted by the white light source enters the light inlets of the first Y-type coupler and the second Y-type coupler respectively through optical fiber transmission; the wide-spectrum light is emitted from the coupling port of the first Y-type coupler and enters the first optical fiber interface, and the first optical fiber interface can be regarded as a physical pinhole; the light enters the dispersion mirror group from the first optical fiber interface, and reaches an object on one side after being reflected and deflected by a reflective mirror on one side of the light splitting element; the light reflected by the object enters the coupling port of the first Y-type coupler after passing through the dispersion mirror group and the first optical fiber interface, and is emitted from the light outlet of the first Y-type coupler and reaches the third optical fiber interface; the spectrum analysis unit 203 performs spectrum analysis on the return light of the third optical fiber interface to determine the position of the object; the second optical fiber interface, the second Y-type coupler, and the fourth optical fiber interface constitute another group of coupling units for determining the position of the object on the other side.

[0017] The wireless receiver has the same frequency hopping communication unit and realizes wireless communication with the optomechanical control module; the wireless receiver includes an optical pulse transceiver module, which is used to transmit an external trigger optical pulse signal to the optomechanical control module and receive the acquisition completion optical pulse signal from the optomechanical control module; the emission wavelength of the optical pulse transceiver module matches the receiving wavelength of the optical pulse external trigger unit, and the receiving wavelength of the optical pulse transceiver module matches the emission wavelength of the optical pulse external trigger unit; the optical pulse transceiver module preferably has an emission light wavelength and a receiving light wavelength in the near-infrared band, and the difference between the emission light wavelength and the receiving light wavelength should be greater than 100nm; it also includes a metal shielding shell and a communication window is left in a specific direction; the wireless receiver is installed inside a machine tool or a machining center, and ensures that the machine tool spindle is within the fan-shaped area of ​​the communication window.

[0018] The CNC interface module includes a position signal sampler, a position trigger logic controller, an input and output module, an EtherCAT interface, other bus interfaces, a power manager and a central processing unit; the position signal sampler is responsible for collecting signals from the machine tool workpiece spindle encoder, the machine tool processing spindle encoder and the machine tool motion axis encoder, and the position trigger logic controller processes the signals into specific position information; according to the set trigger logic, the position trigger logic controller automatically generates an external trigger pulse signal, and directly controls the optical pulse transceiver module of the wireless receiver to transmit the external trigger optical pulse signal through the high-speed data line; the input and output module has multiple voltage-free solid-state The relay output interface outputs the probe status, battery status, error flag, and task completion information in the form of I / O quantity; the input and output module has multiple optical coupling isolation input terminals, which receive the machine tool start, spindle positioning, position trigger signals, and start measurement and end measurement instructions of the CNC numerical control system; the EtherCAT interface is used for high-speed communication with external devices of the CNC numerical control system; the other bus interfaces have low-voltage differential signal LVDS bus and 485 serial communication bus, which are used to communicate with other devices such as frequency hopping communication units; the power manager is used to generate the power required by each electronic system; the central processing unit is responsible for processing industrial control logic and communication tasks.

[0019] The numerical control interface module receives instructions or data from the wireless receiver, transmits them to the CNC numerical control system and writes them into corresponding registers; receives numerical control instructions from the CNC numerical control system, and parses them into action instructions that can be recognized by the wireless receiver.

[0020] Furthermore, an in-situ wireless measurement method of an in-situ wireless measurement device based on the spectral confocal principle, the method realizes self-calibration through a bilateral simultaneous measurement mode, comprises the following steps:

[0021] Step 1: Replace the in-situ wireless measuring device with a machine tool spindle, and adjust the measuring device so that the measuring device is located at the center of the standard cylindrical hole.

[0022] Step 2: Measure along one of the two sides Approach the standard cylindrical hole and record in real time The measured value of the distance measurement between the coordinate position and the measurement direction , forming the corresponding curve ,in .

[0023] Step 3: Perform the least squares method to fit the straight line, and use the slope The inverse tangent of the inclination angle is calculated , through the measurement direction center line of both sides of the in-situ wireless measuring device and The cosine relationship of , the distance measurement value I is obtained as .

[0024] Step 4: Slowly move the Z axis along the axis of the machine tool spindle and record the Z axis coordinate position in real time. The measured values ​​of the distance measurement in the bilateral measurement direction are respectively , , the corresponding curves are , .

[0025] Step 5: , Perform the least squares method to fit the straight line and calculate the inclination angle , , through the Z-axis direction and the measurement direction The sinusoidal relationship of the Z-axis tilt distance measurement compensation is calculated as follows: , , the distance measurement value II is obtained as - , - .

[0026] Furthermore, the self-calibration can realize self-centering of the inner cavity measurement, which specifically includes the following steps:

[0027] Step (1), performing self-calibration according to the self-calibration method;

[0028] Step (2), measure the inner cavity of the workpiece to be measured, and record the sum of the distance measurement values ​​II of the distance measurement on both sides. The corresponding angular position , forming the corresponding curve .

[0029] Step (3), for the curve Perform fast Fourier transform and calculate the maximum amplitude and Phase .

[0030] Step (4), the maximum amplitude value The eccentric distance , along the phase angle Direction of movement , achieving self-centering of inner cavity measurement.

[0031] Furthermore, an in-situ wireless measurement method of an in-situ wireless measurement device based on the spectral confocal principle, the method realizes workpiece positioning and alignment through a simultaneous axis-side measurement mode, comprising the following steps:

[0032] Step ①: The in-situ wireless measuring device is moved to the spindle of the machine tool. The lateral measuring direction of the measuring device is toward the side of the workpiece. Some points on the side of the workpiece are selected for measurement, and the current coordinate position is recorded. .

[0033] Step ②: The axial measuring direction of the measuring device is toward the upper surface of the workpiece, and some points on the upper surface of the workpiece are selected for measurement, and the current coordinate position is recorded. .

[0034] Step 3: According to the coordinate position , , establish the preliminary relationship between the workpiece surface and the machine tool coordinate system to achieve the positioning of the workpiece.

[0035] Step ④: Along the machine axis Measuring the workpiece positioning reference surface, Real-time recording The measured value of the distance measurement corresponding to the coordinate position , forming the corresponding curve .

[0036] Step ⑤: Perform the least squares straight line fitting and calculate the slope of the straight line. The included angle between the workpiece positioning reference plane and the machine tool axis is obtained by calculating the inverse tangent of .

[0037] Step ⑥, adjust the workpiece positioning reference surface, and repeat steps ④, ⑤, and ⑥.

[0038] The beneficial effects of the present invention compared to the prior art are:

[0039] First, the present invention realizes in-situ wireless measurement technology, and through the principle of spectral confocality, it significantly improves the real-time and flexibility of measurement, and is suitable for the scenario of in-situ measurement of workpieces; second, the wireless measurement device of the present invention supports multiple measurement modes, including axial, lateral and bilateral simultaneous measurement, which can meet different measurement needs and broaden the scope of application; third, the bilateral simultaneous measurement mode provided by the present invention has the function of self-calibration and self-centering of inner cavity measurement, which is beneficial to achieve high precision and reliability in in-situ measurement of workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic diagram of the composition of an on-site wireless measurement device according to an embodiment of the present invention;

[0041] Figure 2 It is a schematic diagram of the composition of an optomechanical and electrical control module according to an embodiment of the present invention;

[0042] Figure 3 It is an embodiment of an optical path coupling unit of a double-side simultaneous measurement mode of the present invention;

[0043] Figure 4 It is the first variation of the optical path coupling unit of the double-side simultaneous measurement mode of the present invention;

[0044] Figure 5 It is a second variation of the optical path coupling unit of the double-side simultaneous measurement mode of the present invention;

[0045] Figure 6 It is a third variation of the optical path coupling unit of the double-side simultaneous measurement mode of the present invention;

[0046] Figure 7 It is a schematic diagram of the specific composition of the local module of the present invention;

[0047] Figure 8 It is a schematic diagram of the composition of an in-situ wireless measurement device based on the spectral confocal principle according to a first variant of the present invention;

[0048] Fig. 9 It is a schematic diagram of the composition of an on-site wireless measurement device based on the spectral confocal principle according to a second variant of the present invention;

[0049] Fig.10 It is a schematic diagram of the composition of an on-site wireless measurement device based on the spectral confocal principle according to a third variant of the present invention. DETAILED DESCRIPTION

[0050] The present invention is described in detail below with reference to the accompanying drawings and embodiments.

[0051] The embodiments of the present invention relate to an on-site wireless measurement device and method based on the spectral confocal principle, which can be used for on-site measurement of workpieces.

[0052] The present invention discloses an on-site wireless measurement device and method based on the spectral confocal principle. Based on the basic principle of spectral confocal displacement measurement, multiple key components such as an optomechanical control module, a wireless receiver, a numerical control interface module, and a tool holder adapter interface are combined to form an efficient measurement system. The spectral confocal probe is responsible for non-contact distance measurement, and processes the measurement data through the spectral analysis unit in the optomechanical control module to trigger related events in a timely manner. The wireless receiver of the device can transmit the distance measurement results to the numerical control system through frequency hopping wireless communication, thereby realizing real-time feedback and control of the measurement data. In addition, the design of the present invention takes into account the adaptability to different standard tool holders, so that the device can be flexibly embedded in the tool magazine of the numerical control machining system, thereby realizing efficient integration of machining tools.

[0053] [1] First Embodiment

[0054] The first embodiment of the present invention is described below with reference to the accompanying drawings.

[0055] like Figure 1 As shown, an embodiment of the measuring device according to the present invention includes a spectral confocal probe 100, an optomechanical and electrical control module 200, a wireless receiver 300, a numerical control interface module 400, a tool handle adapter interface 500 and a tool handle 600.

[0056] In this embodiment, the spectral confocal probe 100 is composed of a dispersion mirror group 101, a beam splitter element 102 and a housing 103, and is used to disperse white light along the axial direction so that the distance value corresponds to a specific wavelength.

[0057] like Figure 2 As shown, the optomechanical and electrical control module 200 includes a white light source 201, a light source drive control unit 202, a spectrum analysis unit 203, an optical pulse external trigger unit 204, a frequency hopping communication unit 205, and an optical path coupling unit 206; the spectrum analysis unit 203 performs spectrum analysis and information processing on the return light collected by the spectral confocal probe 100 and obtains a distance value, thereby realizing non-contact distance measurement and triggering events according to predetermined rules; the optical pulse external trigger unit 204 receives an external trigger optical pulse signal from a wireless receiver 300, controls the spectrum analysis unit 203 to complete data acquisition, and sends an acquisition completion optical pulse signal to the wireless receiver 300; the frequency hopping communication unit 205 transmits the distance value or event of the spectrum analysis unit 203 to the wireless receiver 300 in a frequency hopping wireless communication manner.

[0058] The spectrum analysis unit 203 is integrated with a grayscale centroid algorithm for spectrum analysis and information processing to obtain a distance value;

[0059] The wireless receiver 300 receives information from the optomechanical control module 200, and communicates with the CNC numerical control system of the machine tool through the numerical control interface module 400 to realize on-site wireless measurement; the tool handle adapter interface 500 includes a screw with a fixed aperture thread and a positioning reference surface, which can adapt to tool handles 600 of different standards; the tool handle 600 is an interchangeable standard part, including an internal thread and a positioning reference surface that match the tool handle adapter interface 500, and its specifications are related to the requirements of the machine tool.

[0060] The optomechanical control module 200 has a frame structure, a battery module 207 and a waterproof shell 208; the center of the frame structure is a columnar structure, which is connected to the knife handle adapter interface at the top; the white light source 201, the light source drive control unit 202, the spectrum analysis unit 203, the light pulse external trigger unit 204, the frequency hopping communication unit 205 and the optical path coupling unit are fixed on the frame structure and distributed around the columnar structure; the battery module 207 supplies power to the entire optomechanical control module 200; the waterproof shell 208 adopts a cylindrical structure, and a communication window 209 is set on the side column of the waterproof shell 208, which allows electromagnetic waves in the radio band and infrared band to propagate freely. The optomechanical control module 200 also includes a power manager 210, which is responsible for the power supply of the spectrum analysis unit 203, the light pulse external trigger unit 204, and the frequency hopping communication unit 205.

[0061] The light source driving unit 202 is responsible for driving the white light source 201 to generate white light, and has a light intensity modulation circuit so that the light intensity is modulated and output according to a specific curve of 5~10KHz within a specified range; the spectrum analysis unit 203 has a digital filter, which only allows the reflected light signal modulated by the light source driving unit 202 to enter the processing link, thereby filtering out the influence of ambient light and stray light and improving the signal-to-noise ratio.

[0062] In this embodiment, the measuring device works in a bilateral simultaneous measurement mode. The dispersion mirror group 101 adopts a multi-lens design. The spectral confocal probe 100 includes a beam splitter 102, which is a reflector with two reflection surfaces, installed below the dispersion mirror group. There is a certain angle between the two reflection surfaces of the beam splitter 102, and the preferred angle is 90 degrees.

[0063] In order to enable this embodiment to achieve dual-side simultaneous measurement by only one dispersion mirror set 101, the optical path coupling unit 206 needs to have a control function for the return light area. In conjunction with the diagram, the present invention provides four embodiments of the optical path coupling unit for dual-side simultaneous measurement mode:

[0064] [1-1] Optical Path Coupling Unit Embodiment

[0065] like Figure 3As shown, in this embodiment, the optical path coupling unit 206 includes a first optical fiber interface 206-1, a second optical fiber interface 206-2, a first Y-type coupler 206-3, a second Y-type coupler 206-4, a third optical fiber interface 206-5, and a fourth optical fiber interface 206-6. The wide spectrum light emitted by the white light source 201 enters the light inlet of the first Y-type coupler 206-3 and the second Y-type coupler 206-4 respectively through optical fiber transmission. The wide spectrum light is emitted from the coupling port of the first Y-type coupler 206-3 and enters the first optical fiber interface 206-1, and the first optical fiber interface 206-1 can be regarded as a physical pinhole. The light enters the dispersion mirror group 101 from the first optical fiber interface 206-1, and reaches the object 206-7 on one side after being reflected and deflected by the reflective mirror on one side of the light splitting element 102. The light reflected by the object 206-7 passes through the dispersion mirror group 101 and the first optical fiber interface 206-1, enters the coupling port of the first Y-type coupler 206-3, and reaches the third optical fiber interface 206-5 after being emitted from the light outlet of the first Y-type coupler 206-3. The spectrum analysis unit 203 performs spectrum analysis on the return light of the third optical fiber interface 206-5 to determine the position of the object 206-7. The second optical fiber interface 206-2, the second Y-type coupler 206-4, and the fourth optical fiber interface 206-6 form another group of coupling units for determining the position of the object 206-8 on the other side. In this embodiment, two Y-type couplers are used to realize two groups of conjugate pinholes in the spectral confocal measurement, thereby forming independent measuring points on the left and right sides, which has the advantages of simple structure and synchronous measurement on both sides.

[0066] [1-2] Optical Path Coupling Unit First Modification

[0067] like Figure 4As shown, in this variation, the optical path coupling unit comprises a first optical fiber interface 206-1, a second optical fiber interface 206-2, a third optical fiber interface 206-5, a fourth optical fiber interface 206-6, a fifth optical fiber interface 206-9, a sixth optical fiber interface 206-10 and a beam splitter 206-11. The wide spectrum light emitted by the white light source 201 enters the first optical fiber interface 206-1 and the second optical fiber interface 206-2 respectively through optical fiber transmission. The light enters the beam splitter 206-11 from the first optical fiber interface 206-1, passes through the beam splitting surface of the beam splitter 206-11, and enters the dispersion mirror group 101. After being reflected and deflected by the reflective mirror on one side of the beam splitting element 102, it reaches the object 206-7 on one side. The light reflected by the object 206-7 reaches the beam splitter 206-11 through the dispersion mirror group 101, enters the fifth optical fiber interface 206-9 after being reflected by the beam splitting surface of the beam splitter 206-11, and reaches the third optical fiber interface 206-5 through optical fiber transmission. The spectrum analysis unit 203 performs spectrum analysis on the return light of the third optical fiber interface 206-5 to determine the position of the object 206-7. The second optical fiber interface 206-2, the fourth optical fiber interface 206-6, and the sixth optical fiber interface 206-10 form another group of coupling units for determining the position of the object 206-8 on the other side. In this embodiment, the first optical fiber interface 206-1 and the fifth optical fiber interface 206-9 form a group of conjugate small holes, and the second optical fiber interface 206-2 and the fourth optical fiber interface 206-6 form another group of conjugate small holes, thereby forming independent measuring points on the left and right sides. Compared with the optical path coupling unit embodiment, this modified example uses a beam splitter instead of a Y-type coupler, which can eliminate the inherent return light of the Y-type coupler and improve the signal-to-noise ratio.

[0068] [1-3] Second variation of optical path coupling unit

[0069] like Figure 5 As shown in part (a), in this variation, the optical path coupling unit includes a Y-type coupler 206-12, a first optical fiber interface 206-13, a second optical fiber interface 206-16, a left electrically controlled selection aperture 206-14, and a right electrically controlled selection aperture 206-15. The left electrically controlled selection aperture 206-14 and the right electrically controlled selection aperture 206-15 are integrated and installed between the first optical fiber interface 206-13 and the dispersion mirror assembly 101, responsible for selecting light on one side and blocking light on the other side at the same time. When the left electrically controlled selection aperture 206-14 allows light to pass through, the right electrically controlled selection aperture 206-15 does not allow light to pass through, and vice versa.

[0070] Figure 5Part (b) provides two implementation methods of an electrically controlled selection aperture based on a liquid crystal optical switch: 1) two liquid crystal screens are selected as the left electrically controlled selection aperture 206-14 and the right electrically controlled selection aperture 206-15 respectively; 2) a liquid crystal screen is divided into two areas as the left electrically controlled selection aperture 206-14 and the right electrically controlled selection aperture 206-15, and the area is controlled by an image array. When a high level is passed to one side of the left electrically controlled selection aperture 206-14, the liquid crystal molecules are arranged in an orderly manner, allowing light to pass through; at the same time, a low level is passed to the right electrically controlled selection aperture 206-15, and the liquid crystal molecules are arranged in a disordered manner, blocking the light from passing through.

[0071] Figure 5 Part (c) provides a mechanical electrically controlled selection aperture based on a rotating code disk. Time-sharing gating is achieved by arranging a series of slits at equal angles in the circumferential direction. The left electrically controlled selection aperture 206-14 and the right electrically controlled selection aperture 206-15 are at different positions in the radial direction of the code disk and are staggered at equal angles in the circumferential direction.

[0072] The wide spectrum light emitted by the white light source 201 enters the light inlet of the Y-type coupler 206 - 12 through optical fiber transmission, and is emitted from the coupling port of the Y-type coupler 206 - 12 to enter the first optical fiber interface 206 - 13 .

[0073] At the same time, a part of the light passes through the open left electrically controlled selection aperture 206-14, while the other part of the light is blocked by the closed right electrically controlled selection aperture 206-15. The light passing through the left electrically controlled selection aperture 206-14 enters the dispersion mirror assembly 101 from the first optical fiber interface 206-13, and reaches the object 206-7 on one side after being reflected and deflected by the reflection mirror on one side of the beam splitter 102. The light reflected by the object 206-7 passes through the dispersion mirror assembly 101, enters the coupling port of the Y-type coupler 206-12 through the open left electrically controlled selection aperture 206-14, and reaches the second optical fiber interface 206-16 after being emitted from the light outlet of the Y-type coupler 206-12. The spectrum analysis unit 203 performs spectrum analysis on the return light of the second optical fiber interface 206-16 to determine the position of the object 206-7.

[0074] Next time, part of the light is blocked by the closed left electrically controlled selective aperture 206-14, while the other part of the light passes through the opened right electrically controlled selective aperture 206-15. The light passing through the right electrically controlled selective aperture 206-15 enters the dispersion mirror assembly 101 from the first optical fiber interface 206-13, and reaches the object 206-8 on the other side after being reflected and deflected by the reflection mirror on the other side of the beam splitter 102. The light reflected by the object 206-8 passes through the dispersion mirror assembly 101, enters the coupling port of the Y-type coupler 206-12 through the opened right electrically controlled selective aperture 206-15, and reaches the second optical fiber interface 206-16 after being emitted from the light outlet of the Y-type coupler 206-12. The spectrum analysis unit 203 performs spectrum analysis on the return light of the second optical fiber interface 206-16 to determine the position of the object 206-8.

[0075] In this variation, one light-emitting aperture is used to realize time-sharing measurement on both sides, which reduces the difficulty of optical assembly compared with the first two embodiments.

[0076] [1-4] Optical Path Coupling Unit Third Modification

[0077] like Figure 6 As shown in part (a), in this variation, the optical path coupling unit includes a Y-type coupler 206-12, a first optical fiber interface 206-13, a left electrically controlled selection aperture 206-14, a right electrically controlled selection aperture 206-15, a second optical fiber interface 206-16, a third optical fiber interface 206-17, a fourth optical fiber interface 206-18 and a beam splitter 206-19. The left electrically controlled selection aperture 206-14 and the right electrically controlled selection aperture 206-15 are designed separately. The beam splitter 206-19 is installed between the first optical fiber interface 206-13 and the dispersion mirror group 101. The left electrically controlled selection aperture 206-14 is between the beam splitter 206-19 and the dispersion mirror group 101, and is responsible for the interval selection of one side of the light. The right electric-controlled selection aperture 206-15 is installed between the beam splitter 206-19 and the third optical fiber interface 206-17, and is always in a closed state, responsible for blocking the reflected light of the fixed object on one side. The first optical fiber interface 206-13 and the third optical fiber interface 206-17 are on both sides of the beam splitter surface of the beam splitter 206-19, forming a group of conjugate pinholes of the spectral confocal technology.

[0078] Figure 6 Part (b) provides an implementation method of an electrically controlled selective aperture based on a liquid crystal optical switch. When the left electrically controlled selective aperture 206-14 is high level, the liquid crystal molecules are arranged in order to allow light to pass through. The right electrically controlled selective aperture 206-15 is divided into two areas: one area is always closed, blocking the reflected light from the object 206-7 on one side; the other area is always open, allowing the return light from the object 206-8 on the other side to pass through.

[0079] Figure 6 Part (c) provides a mechanical electrically controlled selection aperture based on a rotating code disk. Interval gating is achieved by arranging a series of sectors at equal angles in the circumferential direction. The electrically controlled selection aperture 206-15 on the right is a mechanical baffle that blocks the return light from the object 206-8 on the other side.

[0080] In this variant, a group of conjugate pinholes are used to achieve continuous measurement on one side and interval measurement on the other side. Compared with the third variant of the optical path coupling unit, this method avoids the problem of fixed light noise of the Y-coupler during continuous measurement on one side and has a higher signal-to-noise ratio of the returned light.

[0081] like Figure 7 As shown, the frequency hopping communication unit 205 of the optomechanical control module 200 operates in the 2.4 GHz frequency band, and includes a protocol adapter; the protocol adapter can be adapted to a variety of communication modules, and the preferred communication modules include: one adopts frequency hopping spread spectrum (FHSS: Frequency hopping spread) technology, using 80 channels with a bandwidth of 1 MHz for pseudo-random switching; the other adopts NearLink SLEP2P technology, through adaptive frequency hopping encryption communication with a bandwidth of 2 MHz.

[0082] like Figure 7 As shown, the wireless receiver 300 has a frequency hopping communication unit 301 that is the same as the frequency hopping communication unit 205, and realizes wireless communication with the optomechanical control module 200; it also includes an optical pulse transceiver module 302, which is used to transmit an external trigger optical pulse signal to the optical pulse external trigger unit 204 of the optomechanical control module 200; the optical pulse transceiver module 302 receives the acquisition completion optical pulse signal from the optical pulse external trigger unit 204; the emission wavelength of the optical pulse transceiver module 302 matches the receiving wavelength of the optical pulse external trigger unit 204, and the receiving wavelength of the optical pulse transceiver module 302 matches the emission wavelength of the optical pulse external trigger unit 204; the optical pulse transceiver module 302 preferably has an emission wavelength and a receiving wavelength in the near-infrared band, and the difference between the emission wavelength and the receiving wavelength should be greater than 100nm; it also includes a metal shielding shell 303, and a communication window is left in a specific direction; the wireless receiver 300 is installed inside a machine tool or a machining center, and ensures that the machine tool spindle is within the fan-shaped area of ​​the communication window.

[0083] The frequency hopping communication unit 301 in the wireless receiver 300 includes a microprocessor 301-1, a protocol adapter 301-2, a wireless communication module 301-3 and an antenna 301-4. The protocol adapter 301-2 can be adapted to a variety of communication modules. The preferred communication module adopts the NearLink SLE P2P technology and communicates through adaptive frequency hopping encryption with a bandwidth of 2MHz. The microprocessor 301-1 is preferably an STM32 single-chip microcomputer.

[0084] like Figure 7 As shown, the numerical control interface module 400 includes a position signal sampler 401, a position trigger logic controller 402, an input-output module 403, an EtherCAT interface 404, other bus interfaces 405, a power manager 406 and a central processing unit 407. The position signal sampler 401 is responsible for collecting signals from the machine tool workpiece spindle encoder, the machine tool processing spindle encoder, and the machine tool motion axis encoder, and the position trigger logic controller 402 processes them into specific position information; according to the set trigger logic, the position trigger logic controller 402 automatically generates an external trigger pulse signal, and directly controls the optical pulse transceiver module 302 of the wireless receiver 300 to transmit an external trigger optical pulse signal through a high-speed data line; the input-output module 403 has a plurality of voltage-free solid-state relay output interfaces, which output the probe status, battery status, error flag, any The input and output module 403 has multiple optically coupled isolation input terminals, which receive signals such as machine tool start, spindle positioning, position triggering, etc. of the CNC numerical control system, as well as instructions such as start measurement and end measurement. The EtherCAT interface 404 is used for high-speed communication with external devices such as the CNC numerical control system. The other bus interface 405 has a low voltage differential signal LVDS bus, a 485 serial communication bus, etc., which are used to communicate with other devices such as the frequency hopping communication unit. The power manager 406 is used to generate the power required by each electronic system. The central processor 407 is responsible for processing industrial control logic and communication tasks. The central processor 407 is preferably an Intel Core i7-12700 processor.

[0085] The numerical control interface module 400 receives instructions or data from the wireless receiver 300, transmits them to the CNC numerical control system and writes them into corresponding registers; receives numerical control instructions from the CNC numerical control system, and parses them into action instructions that can be recognized by the wireless receiver 300; in order not to affect the electrical logic of the machine tool itself, an encoder pulse signal distributor can be used in actual applications to distribute the encoder signals of each axis in multiple ways; one path of the encoder signal of each axis is connected to the position signal sampler 401, and the other path is connected back to each axis driver or the CNC numerical control system.

[0086] Furthermore, the present embodiment provides an in-situ wireless measurement device based on the spectral confocal principle, and an in-situ wireless measurement method based on the spectral confocal principle, which realizes self-calibration through a dual-side simultaneous measurement mode, such as Figure 8 As shown, the following steps are included:

[0087] Step 1, the on-site wireless measuring device is replaced with a tool on a machine tool spindle, and the measuring device is adjusted so that the measuring device is located at the center of a standard cylindrical hole;

[0088] Step 2: Measure along one of the two sides Approach the standard cylindrical hole and record in real time The measured value of the distance measurement between the coordinate position and the measurement direction , forming the corresponding curve ;

[0089] Step 3: Perform the least squares method to fit the straight line and calculate the inclination , then the distance measurement value is ;

[0090] Step 4: Slowly move the Z axis along the axis of the machine tool spindle and record the Z axis coordinate position in real time. The measured value of the distance measurement with the two-sided measurement direction , , forming the corresponding curve , ;

[0091] Step 5: , Perform the least squares method to fit the straight line and calculate the inclination , , then the distance measurement value is - , - ;

[0092] In this embodiment, based on the self-calibration method, as Fig. 9 As shown, the self-centering method for measuring the inner cavity of the workpiece to be measured specifically includes the following steps:

[0093] Step 1: Perform self-calibration according to the self-calibration method;

[0094] Step 2: Measure the inner cavity to be tested around one circle and record the sum of the distance measurements on both sides. The corresponding angular position , forming the corresponding curve ;

[0095] Step 3: Perform fast Fourier transform and calculate the maximum amplitude and Phase ;

[0096] Step 4: According to the maximum amplitude value Calculate the eccentric distance , along the phase angle Direction of movement , achieving self-centering of inner cavity measurement.

[0097] [2] Second Embodiment

[0098] Regarding an on-site wireless measurement device based on the spectral confocal principle according to the second embodiment of the present invention, the differences from the first embodiment are described. Fig. 9 (a) is a schematic diagram showing the structure of an in-situ wireless measurement device based on the spectral confocal principle according to the second embodiment of the present invention. The second embodiment of the measurement device proposed by the present invention includes a spectral confocal probe 100, an optomechanical control module 200, a wireless receiver 300, a numerical control interface module 400, a tool handle adapter interface 500 and a tool handle 600. Figure 1 and Fig. 9 As shown in (a): the first embodiment and the second embodiment have the same structure in the five parts of the optomechanical control module 200, the wireless receiver 300, the numerical control interface module 400, the tool holder adapter interface 500 and the tool holder 600; the dispersion mirror group of the spectral confocal probe 100 in the second embodiment is the same, and the beam splitting element uses a 45-degree semi-transparent and semi-reflective mirror. A part of the axial light is deflected by 90 degrees to measure the lateral object, and the other part of the axial light is measured along the original path to the axis object, so as to achieve simultaneous measurement of the axis and the side;

[0099] Relying on an in-situ wireless measurement device based on the spectral confocal principle provided in this embodiment, an in-situ wireless measurement method based on the spectral confocal principle realizes workpiece positioning and alignment through an axis-side simultaneous measurement mode, including the following steps:

[0100] Step 1: The in-situ wireless measuring device is replaced with a tool on the machine tool spindle. The measuring device is oriented toward the side of the workpiece. Some points on the side of the workpiece are selected for measurement, and the current coordinate position is recorded. ,

[0101] Step 2: The axial measurement direction of the measuring device is toward the upper surface of the workpiece, and some points on the upper surface of the workpiece are selected for measurement, and the current coordinate position is recorded. ,

[0102] Step 3: According to the coordinate position , , establish the preliminary relationship between the workpiece surface and the machine tool coordinate system to achieve the positioning of the workpiece;

[0103] Step 4: Along the machine axis Measure the workpiece positioning reference surface and record it in real time The measured value of the distance measurement corresponding to the coordinate position , forming the corresponding curve ;

[0104] Step 5: Perform least squares fitting to calculate the angle between the positioning reference plane and the machine tool axis ;

[0105] Step 6: Adjust the workpiece positioning reference surface and repeat steps 4, 5 and 6.

[0106] Compared with the first embodiment, the second embodiment can perform measurement in the axial direction, and is suitable for working scenarios where simultaneous measurement on the axial side is required.

[0107] [3] Third embodiment

[0108] Regarding an on-site wireless measurement device based on the spectral confocal principle according to the third embodiment of the present invention, the differences from the first embodiment are described. Fig.10 Part (b) is a schematic diagram showing the structure of an in-situ wireless measurement device based on the spectral confocal principle according to the third embodiment of the present invention. The third embodiment of the measurement device proposed in the present invention includes a spectral confocal probe 100, an optomechanical control module 200, a wireless receiver 300, a numerical control interface module 400, a tool handle adapter interface 500 and a tool handle 600. Figure 1 and Fig.10 As shown in (b): the first embodiment and the third embodiment have the same structure in the five parts of the optomechanical control module 200, the wireless receiver 300, the numerical control interface module 400, the tool holder adapter interface 500 and the tool holder 600; the dispersion mirror group of the spectral confocal probe 100 in the third embodiment is the same, and the beam splitting element uses a 45-degree reflector to measure the lateral object by deflecting the axial light by 90 degrees, thereby realizing lateral measurement;

[0109] Compared with the first embodiment, the third embodiment can only perform single-lateral measurement, and is suitable for working scenarios where only single-lateral measurement is required.

[0110] [4] Fourth embodiment

[0111] Regarding an on-site wireless measurement device based on the spectral confocal principle according to a fourth embodiment of the present invention, the differences from the first embodiment are described. Fig.10(c) is a schematic diagram showing the structure of an in-situ wireless measurement device based on the spectral confocal principle according to the fourth embodiment of the present invention. The fourth embodiment of the measurement device proposed by the present invention includes a spectral confocal probe 100, an optomechanical control module 200, a wireless receiver 300, a numerical control interface module 400, a tool handle adapter interface 500 and a tool handle 600. Figure 1 and Fig.10 As shown in part (c), the first embodiment and the fourth embodiment have the same structure in the five parts of the optomechanical control module 200, the wireless receiver 300, the numerical control interface module 400, the tool handle adapter interface 500 and the tool handle 600; the dispersion mirror group of the spectral confocal probe 100 in the fourth embodiment is the same, and no spectroscopic element is installed to achieve axial measurement;

[0112] Compared with the first embodiment, the fourth embodiment can perform axial measurement, and is suitable for working scenarios where only axial measurement is required.

[0113] The above-described embodiment is only a preferred solution of the present invention, but it is not intended to limit the present invention. A person skilled in the relevant technical field may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, any technical solution obtained by equivalent replacement or equivalent transformation falls within the protection scope of the present invention.

Claims

1. An in-situ wireless measurement device based on the spectral confocal principle, comprising a spectral confocal probe, an optomechanical control module, a wireless receiver, a numerical control interface module, a tool handle adapter interface and a tool handle, characterized in that: The spectral confocal probe is composed of a dispersion mirror group, a beam splitter and a housing, and is used to disperse white light along the axial direction so that the distance value corresponds to a specific spectrum; The optomechanical and electrical control module comprises a white light source, a light source drive control unit, an optical path coupling unit, a spectrum analysis unit, an optical pulse external trigger unit and a frequency hopping communication unit; the light source drive control unit drives the white light source to generate stable wide-spectrum light; the optical path coupling unit couples the wide-spectrum light into the spectrum confocal probe after beamforming; the spectrum analysis unit performs spectrum analysis and information processing on the return light collected by the spectrum confocal probe and obtains the distance value, realizes non-contact distance measurement, and triggers events according to predetermined rules; the optical pulse external trigger unit receives an external trigger optical pulse signal from a wireless transceiver, controls the spectrum analysis unit to complete data collection, and sends a collection completion optical pulse signal to the wireless receiver; the frequency hopping communication unit transmits the distance value or event of the spectrum analysis unit to the wireless receiver in the form of frequency hopping wireless communication; The wireless receiver receives information from the optomechanical and electronic control module, and communicates with the CNC numerical control system of the machine tool through the numerical control interface module to achieve in-situ wireless measurement; The tool handle adapter interface includes a screw with a fixed aperture thread and a positioning reference surface, and is adapted to tool handles of different standards; The tool holder is an interchangeable standard part, comprising an internal thread and a positioning reference surface that match the tool holder adapter interface, and its specifications are related to the requirements of the machine tool.

2. The in-situ wireless measurement device based on the spectral confocal principle as claimed in claim 1, characterized in that: The structure of the spectral confocal probe is as follows: The dispersion mirror group adopts a multi-lens design, and realizes multiple working modes such as bilateral simultaneous measurement, axial simultaneous measurement, lateral measurement, and axial measurement by selecting different beam splitters at the light output; the bilateral simultaneous measurement mode is to split the output light into two in a deflected manner by two reflectors at a certain angle, and simultaneously measure objects on both sides, the angle is 90 degrees, and the angle between the two reflecting surfaces and the optical axis of the dispersion mirror group is 45 degrees; the axial simultaneous measurement mode is to use a semi-transparent and semi-reflective mirror at a certain angle to the optical axis of the dispersion mirror group as a beam splitter, a part of the axial light is measured in a deflected manner for lateral objects, and the other part of the axial light is measured in the original path for the axial object, and the angle between the semi-transparent and semi-reflective mirror and the optical axis of the dispersion mirror group is 45 degrees; the lateral measurement mode is to use a 45-degree reflector as a beam splitter, and the axial light is measured in a 90-degree deflected manner for lateral objects; the axial measurement mode has no beam splitter, and measures objects in the optical axis direction of the dispersion mirror group.

3. The in-situ wireless measuring device based on the spectral confocal principle as claimed in claim 1 or 2, characterized in that: The optomechanical and electronic control module includes a frame structure, a battery module and a waterproof housing; The center of the frame structure is a columnar structure, which is connected to the tool handle adapter interface at the top; the white light source, the light source drive control unit, the spectrum analysis unit, the light pulse external trigger unit, the frequency hopping communication unit and the optical path coupling unit are distributed and fixed on the frame structure and distributed around the columnar structure; the battery module supplies power to the entire optomechanical control module; the waterproof shell adopts a cylindrical structure, and the side column surface of the shell includes a communication window to allow electromagnetic waves in the radio band and infrared band to propagate freely; the optomechanical control module also includes a power manager, which is responsible for the power supply of the spectrum analysis unit, the light pulse external trigger unit and the frequency hopping communication unit.

4. The on-site wireless measurement device based on the spectral confocal principle as claimed in claim 3, characterized in that: The light source driving unit is responsible for driving the white light source to produce white light, and has a light intensity modulation circuit so that the light intensity is modulated and output according to a specific curve of 5 to 10 kHz within a specified range; the spectrum analysis unit has a digital filter, which only allows the reflected light signal modulated by the light source driving unit to enter the processing link, thereby filtering out the influence of ambient light and stray light.

5. The on-site wireless measurement device based on the spectral confocal principle as claimed in claim 3, characterized in that: The frequency hopping communication unit operates in the 2.4 GHz frequency band and includes a protocol adapter; the optical path coupling unit includes a first optical fiber interface, a second optical fiber interface, a first Y-type coupler, a second Y-type coupler, a third optical fiber interface, and a fourth optical fiber interface; the wide-spectrum light emitted by the white light source enters the light inlets of the first Y-type coupler and the second Y-type coupler respectively through optical fiber transmission; the wide-spectrum light is emitted from the coupling port of the first Y-type coupler and enters the first optical fiber interface, and the first optical fiber interface can be regarded as a physical pinhole; the light enters the dispersion mirror group from the first optical fiber interface, and reaches an object on one side after being reflected and deflected by a reflective mirror on one side of the light splitting element; the light reflected by the object enters the coupling port of the first Y-type coupler after passing through the dispersion mirror group and the first optical fiber interface, and is emitted from the light outlet of the first Y-type coupler and reaches the third optical fiber interface; the spectrum analysis unit 203 performs spectrum analysis on the return light of the third optical fiber interface to determine the position of the object; the second optical fiber interface, the second Y-type coupler, and the fourth optical fiber interface constitute another group of coupling units for determining the position of the object on the other side.

6. The in-situ wireless measurement device based on the spectral confocal principle as claimed in claim 5, characterized in that: The wireless receiver has the same frequency hopping communication unit as that in claim 5, and realizes wireless communication with the optomechanical control module; the wireless receiver includes an optical pulse transceiver module, which is used to transmit an external trigger optical pulse signal to the optomechanical control module and receive the acquisition completion optical pulse signal from the optomechanical control module; the emission wavelength of the optical pulse transceiver module matches the receiving wavelength of the optical pulse external trigger unit, and the receiving wavelength of the optical pulse transceiver module matches the emission wavelength of the optical pulse external trigger unit; the emission light wavelength and the receiving light wavelength of the optical pulse transceiver module are in the near-infrared band, and the difference between the emission light wavelength and the receiving light wavelength should be greater than 100nm; it also includes a metal shielding shell, and a communication window is left in a specific direction; the wireless receiver is installed inside a machine tool or a machining center, and ensures that the machine tool spindle is within the fan-shaped area of ​​the communication window.

7. The on-site wireless measurement device based on the spectral confocal principle according to claim 1 or 6, characterized in that: The numerical control interface module includes a position signal sampler, a position trigger logic controller, an input and output module, an EtherCAT interface, other bus interfaces, a power manager and a central processing unit; the position signal sampler is responsible for collecting signals from a machine tool workpiece spindle encoder, a machine tool processing spindle encoder and a machine tool motion axis encoder, and the position trigger logic controller processes the signals into specific position information; according to the set trigger logic, the position trigger logic controller automatically generates an external trigger pulse signal, and directly controls the optical pulse transceiver module of the wireless receiver to transmit the external trigger optical pulse signal through a high-speed data line; the input and output module has a plurality of voltage-free solid-state relay output interfaces, and outputs the probe status, battery status, error flag and task completion information in the form of I / O quantity; The input and output module has multiple optocoupler isolation input terminals, which receive the machine tool start, spindle position, position trigger signal and start measurement and end measurement instructions of the CNC numerical control system; the EtherCAT interface is used for high-speed communication with external devices of the CNC numerical control system; the other bus interface has a low voltage differential signal LVDS bus and a 485 serial communication bus, which are used to communicate with other devices such as a frequency hopping communication unit; The power manager is used to generate the power required by each electronic system; the central processing unit is responsible for processing industrial control logic and communication tasks; The numerical control interface module receives the instruction or data from the wireless receiver, transmits it to the CNC numerical control system and writes it into the corresponding register; Receive numerical control instructions from the CNC numerical control system and parse them into action instructions that can be recognized by the wireless receiver.

8. The in-situ wireless measurement method of the in-situ wireless measurement device based on the spectral confocal principle as claimed in claim 1, characterized in that: The method realizes self-calibration through a dual-side simultaneous measurement mode, and includes the following steps: Step 1, replace the in-situ wireless measuring device with the machine tool spindle, and adjust the measuring device so that the measuring device is located at the center of the standard cylindrical hole; Step 2: measure along one direction L of both sides i Approach the standard cylindrical hole and record L in real time. i The measured value p of the distance between the coordinate position and the measurement direction n1 , forming the corresponding curve S l-p1 , where i = x, y; Step 3: For the curve S l-p Perform the least squares method to fit the straight line, and use the slope K p The inverse tangent of the inclination angle θ is calculated p , through the measurement direction center line of both sides of the in-situ wireless measuring device and L i The cosine relationship of the distance measurement value I is p n1 *cosθ p ; Step 4: Slowly move the Z axis along the axis of the machine tool spindle and record the Z axis coordinate position z in real time. p The measured values ​​of the distance measurement in the bilateral measurement direction are p n1 *cosθ p 、p n2 *cosθ p , the corresponding curves are S l-θ-pn1 , S l-θ-pn2 ; Step 5: For the curve S l-θ-pn1 , S l-θ-pn2 The least squares method is used to fit the straight line and the inclination angle θ is calculated respectively. p-z1 ,θ p-z2 , through the Z-axis direction and the measuring direction L i The sinusoidal relationship of the Z axis is calculated to obtain the distance measurement compensation of the Z axis tilt as z p *sinθ p-z1 、z p *sinθ p-z2 , and the distance measurement value II is p n1 *cosθ p -z p *sinθ p-z1 、p n2 *cosθ p -z p *sinθ p-z2 .

9. The in-situ wireless measurement method of the in-situ wireless measurement device based on the spectral confocal principle as claimed in claim 8, characterized in that: The self-calibration can realize self-centering of the inner cavity measurement, and specifically includes the following steps: Step (1), performing self-calibration according to the self-calibration method of claim 8; Step (2), measure the inner cavity of the workpiece to be measured, and record the sum of the distance measurement values ​​II of the distance measurement on both sides p n and the corresponding angle position θ, forming the corresponding curve S p ; Step (3), for the curve S p Perform fast Fourier transform and calculate the maximum amplitude value A p and Phase Step (4), the maximum amplitude value A p The eccentric distance e p , along the phase angle Direction of movement p , achieving self-centering of inner cavity measurement.

10. The in-situ wireless measurement method of the in-situ wireless measurement device based on the spectral confocal principle as claimed in claim 7, characterized in that: The method realizes workpiece positioning and alignment through the simultaneous axis-side measurement mode, and includes the following steps: Step ①, the in-situ wireless measuring device is replaced with a tool to the machine tool spindle, the lateral measuring direction of the measuring device is toward the side of the workpiece, some points on the side of the workpiece are selected for measurement, and the current coordinate position l is recorded c-i , Step ②, the axial measuring direction of the measuring device is toward the upper surface of the workpiece, some points on the upper surface of the workpiece are selected for measurement, and the current coordinate position l is recorded u-i , Step ③, according to the coordinate position l c-i , l u-i , establish the preliminary relationship between the workpiece surface and the machine tool coordinate system to achieve the positioning of the workpiece; Step ④: Along the machine axis direction L i Measure the workpiece positioning reference surface, i = x, y, z; real-time record L i The measured value p of the distance measurement corresponding to the coordinate position n , forming the corresponding curve S p ; Step ⑤: For the curve S p Perform the least squares straight line fitting, and use the slope K of the fitted straight line p The included angle between the workpiece positioning reference plane and the machine tool axis is obtained by calculating the inverse tangent of Step ⑥, adjust the workpiece positioning reference surface, and repeat steps ④, ⑤, and ⑥.

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