Device and method for measuring key parameters of sheet

Abstract

The invention discloses a measuring device and a measuring method for key parameters of a sheet. The device comprises a frame main body, a mounting bottom plate, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a clamp assembly, a mounting bracket, a dip angle adjusting structure assembly and a control system. Two pieces of parallel glass are respectively arranged between an upper measuring head and a lower measuring head of the confocal laser sensor, and a detected sheet on the clamp assembly is located between the two pieces of parallel glass. During measurement, the two pieces of parallel glass are adjusted to be at different beta small angles n times, distance data from the upper measuring head and the lower measuring head to the upper surface and the lower surface of the detected sheet are read respectively, vertical distances are converted, and key parameters such as thickness deviation and curvature of the detected sheet are calculated respectively. The invention provides the sheet key parameter measuring device which is high in precision, convenient and efficient to operate, automatic and capable of realizing batch detection and the measuring method thereof.

Description

Technical Field

[0001] The invention belongs to the technical field of thin slice measurement, and specifically refers to a device and a method for measuring key parameters of a thin slice. Background Art

[0002] In the field of length measurement, thin sheets such as feeler gauges with a thickness of less than 4mm, high-precision copper sheets, high-precision aluminum sheets, lithium battery sheets, and thin rubber sheets (hereinafter collectively referred to as thin sheets) have the characteristics of thin thickness, easy bending and deformation under microgravity, easy wrinkling, and high requirements for the verticality between the measuring axis and the surface of the thin sheet. GB / T 22523-2008 and JJG 62-2017 stipulate that the thickness deviation and curvature of the feeler gauge are two important technical parameters of the feeler gauge and their detection methods; GB / T 26303.3-2010 stipulates the detection method of the outer dimensions of copper and copper alloy processed materials, and GB / T 3194-1998 stipulates the allowable deviation of the dimensions of aluminum and aluminum alloy plates and strips. In addition, thickness and side curvature are also important geometric dimension parameters of high-precision copper sheets and high-precision aluminum sheets; in addition, lithium battery sheets and thin rubber sheets have corresponding requirements for thickness and curvature.

[0003] In the prior art, the contact thickness measurement method is generally used to measure the key parameters of the thin sheet, such as thickness deviation and curvature. Although the measurement accuracy and reliability can basically meet the requirements of the existing technical specifications, it has the following shortcomings: First, the measurement requires certain operating experience and skills, and the measurement speed is slow, the degree of automation is low, and batch measurement cannot be achieved; second, the measuring force of the contact measurement will cause indentation deformation, which can easily cause damage to the thin sheet. At the same time, the flatness of the measuring cap (anvil) of the measuring instrument and the deviation of the measurement position will affect the measurement result, which is an important source of measurement error; third, the measurement process is cumbersome, the measurement efficiency is low, the degree of automation is low, and online and batch measurement cannot be achieved.

[0004] Chinese invention patent CN 112033327 B discloses a thickness measuring device, which includes a four-degree-of-freedom workpiece table and a thickness measuring assembly. The portion to be measured of the measuring device protrudes from the edge of the first mounting seat and faces the thickness measuring assembly, and the thickness measuring assembly has a measuring portion and a two-degree-of-freedom moving part, which can be realized along the front-to-back direction and / or the left-to-right direction, and can also realize the vertical inclination along the left-to-right direction, making the measurement more flexible. However, it only measures the thickness dimension, and no special clamp is designed to clamp the unique characteristics of thin sheets that are easy to wrinkle and deform. The error of the thickness measurement of thin sheets is large, and the method of measuring the curvature of the thickness is not described. At the same time, it cannot measure the thickness in batches, and the measurement efficiency is low.

[0005] Chinese invention patent CN 109000571 B discloses a thickness consistency detection device, which includes: a spectral confocal displacement sensor, a sensor adjustment unit, a workpiece turntable, a cantilever turntable, a cantilever turntable adjustment unit, a workpiece table, a cantilever, a counterweight, and a main controller. The invention controls the workpiece turntable to perform uniform repetitive circular motion and the cantilever turntable to perform circular arc motion. The specific measurement mode is a spiral measurement mode or a circular measurement mode, so that the probe measurement track can cover the entire surface of the measured workpiece, and can be used for the measurement and analysis of the thickness consistency of large-caliber, high-precision materials. However, the device installs the spectral confocal displacement sensor through a cantilever structure and performs two movement modes, which easily leads to unstable movement of the confocal displacement sensor and inaccurate measurement data. At the same time, the device cannot realize batch measurement of curvature of thin sheets with small measurement apertures.

[0006] Chinese invention patent CN 111895924 B discloses an automatic lens thickness measurement device, the measurement object is various small round aspherical lenses, which are transparent glass. The center thickness is measured by a laser coaxial displacement sensor, and the edge thickness is measured by a contact sensor. This technical solution is generated based on the characteristics of the lens, such as the use of an automatic centering fixture to find the center position of the lens for a round lens, and the transportation of a suction cup is based on the adsorbable characteristics of the lens. Therefore, this technical solution is not suitable for thin, soft, easily deformed sheets that have high requirements for wrinkles and have requirements for thickness deviation in addition to curvature. In addition, its host computer software will compare the actual data with the measured data to obtain a scaling formula. According to different lens models (different curvatures), the host computer software uses different scaling formulas for data correction, which is also only for lenses and is not suitable for the measurement of thin sheets.

[0007] Therefore, it is urgent to study the fully automatic batch measurement method of the key parameters of thin slices to provide technical support for the fast, accurate and efficient measurement of thin slices. Summary of the invention

[0008] The technical problem to be solved by the present invention is to provide a device and method for measuring key parameters of a sheet with high precision, convenient and efficient operation, automation and batch detection.

[0009] The present invention is achieved in that: A device for measuring key parameters of a sheet, comprising: a frame body, a mounting base plate, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a fixture assembly, a mounting bracket, a tilt adjustment structural assembly, and a control system; The mounting base plate is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base plate; The two-dimensional hollow moving platform is a hollow electric-controlled x- and y-axis moving two-dimensional platform, wherein the fixture assembly is placed in the hollow part, and the motion control of the two-dimensional hollow moving platform drives the fixture assembly to be positioned; the thin sheet to be inspected is installed on the fixture assembly; The mounting bracket is a concave structure, the upper and lower parts of which are respectively fixed with an upper measuring head adjustment unit and a lower measuring head adjustment unit, and the middle part thereof is fixedly connected to the mounting base plate; The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, and the upper measuring head and the lower measuring head of the confocal laser displacement sensor are respectively fixedly mounted thereon; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The tilt adjustment structural component includes: a two-dimensional inclinometer, a rotating mounting plate, a first T-shaped mounting seat, a second T-shaped mounting seat, a first quick handle, a second quick handle, a first connecting plate, a second connecting plate, a first parallel glass, a second parallel glass, and a tilt sensor, which is fixed on one side of the mounting base plate as an integral component; the two-dimensional inclinometer is an electrically controlled dual-axis inclinometer, which is communicated with the lower computer of the control system, and the control signal of the lower computer realizes the dual-axis small-angle swing positioning of the two-dimensional inclinometer; the two-dimensional inclinometer is fixed on the mounting base plate, and the rotating mounting plate and the tilt sensor are fixedly connected above the two-dimensional inclinometer, and the tilt sensor monitors the inclination of the two-dimensional inclinometer in real time and transmits the data to the lower computer; the first T-shaped mounting seat and the first T-shaped mounting seat are fixed on the upper and lower positions of the rotating mounting plate, respectively. a second T-shaped mounting seat; the first quick handle fixes one end of the first connecting plate on the first T-shaped mounting seat, and the other end of the first connecting plate is fixedly connected to the first parallel glass; the second quick handle fixes one end of the second connecting plate on the second T-shaped mounting seat, and the other end of the second connecting plate is fixedly connected to the second parallel glass; the lasers of the upper measuring head and the lower measuring head are incident on the first parallel glass and the second parallel glass to realize an outgoing ray parallel to the incident ray, when the two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to be in a horizontal state, the laser axes of the upper measuring head and the lower measuring head are coaxial, and the lasers are incident on the first parallel glass and the second parallel glass vertically without changing the optical path and directly pass through, and the measuring spot of the measuring area at this place is the position of the center origin O of the measuring area; The control system includes: a lower computer and a motor controller, which are installed in the frame body; The measuring head controller, the first optical unit and the second optical unit of the confocal laser displacement sensor are all installed in the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit respectively; The lower computer is respectively connected to the upper computer, the motor controller and the measuring head controller for communication. The upper computer is installed with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower computer. The motor controller and the measuring head controller transmit feedback signals to the upper computer through the lower computer. The data collected by the upper measuring head and the lower measuring head are uploaded to the upper computer via the lower computer.

[0010] Furthermore, two high-precision dual-axis levels are fixedly installed on the two-dimensional hollow mobile platform to monitor and measure the levelness of the two-dimensional hollow mobile platform in real time and feed back to the lower computer for correction of the measurement result data.

[0011] Furthermore, the fixture assembly includes: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal material and has multiple grooves arranged in parallel thereon for placing the inspected thin sheet and the magnetic ring, and a through hole is provided at the measuring position so that the lasers of the upper measuring head and the lower measuring head can be projected onto the inspected thin sheet; the magnetic ring is a magnetic circular ring structure, which presses the inspected thin sheet tightly into the groove of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measurement area of ​​the thin sheet.

[0012] Furthermore, four mushroom-shaped handles are provided around the clamp bottom plate for easy lifting.

[0013] Furthermore, the confocal laser displacement sensor is one of KEYENCE's CL-L030 coaxial laser displacement meter, Germany's Mi-Iridium's IFS2406-10 spectral confocal sensor, or China's Haibosen's HPS-CFL030 spectral confocal displacement sensor.

[0014] A method for measuring key parameters of a sheet, using a device for measuring key parameters of a sheet as described above, the method comprising the following steps: Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1 mm between the upper measuring head and the lower measuring head, input the correction value of the standard gauge block, and read the distance D between the upper measuring head and the lower measuring head. The correction value of the 1 mm standard gauge block can be obtained through value traceability; Step 2: The two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to a horizontal state, and reads the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the inspected sheet respectively. and ; Step 3: The two-dimensional inclinometer is adjusted n times according to the measurement software control so that the first parallel glass and the second parallel glass are at different β small angles, and the measurement spots are evenly distributed in the measurement area ( Fig. 9 ), read the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the inspected sheet respectively and ; Knowing the thickness t and refractive index n of the first parallel glass and the second parallel glass, the vertical distance after conversion is , They are: ; ; Step 4: The upper and lower laser spots are respectively measured with coordinates , Indicates that x and y are fixed values ​​in the same measurement area; The coordinates , Multiple , Take the corresponding average values ​​as the average vertical distances after measurement by the upper measuring head and the lower measuring head respectively. , ; Step 5: Calculate the thickness deviation and curvature of the sheet: Thickness deviation ,or , different measurement points on the same slice , take the largest measurement point As the thickness deviation of the sheet, is the nominal value of the thin film under test; Curvature , different measurement points on the same thin film, take the largest As the curvature of the sheet.

[0015] The advantages of the present invention are: 1. Use confocal laser displacement sensor to realize non-contact measurement of thin sheets, which has high accuracy, will not cause depression deformation, and will not cause damage to the thin sheets; 2. Parallel glass is used to change the optical path of the outgoing light to achieve micro-displacement changes, which changes the micro-displacement positioning of traditional robots, further reduces the jitter effect caused by machine movement, and improves measurement accuracy; 3. Use exclusive fixture components to prevent the fixture from causing deformation and wrinkles on the sheet, ensuring that its shape does not change during the measurement process; 4. The two-dimensional hollow mobile platform is used to ensure the stability of force during movement, while reducing the installation space and making the structure more compact; 5. The fixture assembly can be quickly replaced for different types of sheets, and can detect sheets of different materials, types, and shapes, thereby realizing the diversity of the device of the present invention; 6. Realize batch and fully automatic detection of thin sheets, and improve detection efficiency; 7. The measurement software can automatically process data and generate original test records, thus realizing paperless and intelligent thin-sheet testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below in conjunction with embodiments with reference to the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of a device for measuring key parameters of a thin film according to the present invention.

[0018] Figure 2 yes Figure 1 Rear view of the vehicle (with the frame and control system removed).

[0019] Figure 3 The present invention is a block diagram of the system control principle of a device for measuring key parameters of a thin film.

[0020] Figure 4 It is a schematic structural diagram of the positional relationship between the inclination adjustment structural assembly and the upper and lower measuring heads in the present invention.

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the clamp assembly in the present invention.

[0022] Figure 6 It is a schematic diagram of the parallel glass in the present invention being in a horizontal position without changing the light path.

[0023] Figure 7 and Figure 8 They are schematic diagrams of light path changes after the parallel glass in the present invention changes two inclination angles.

[0024] Fig. 9 yes Figure 1 Schematic diagram of the measurement spot in the measurement area.

[0025] Fig.10 It is a schematic diagram of the optical path distance conversion after the parallel glass in the present invention changes its inclination angle.

[0026] Fig.11 It is a flowchart of the software execution installed in the host computer in the present invention.

[0027] Reference numerals: 1-mounting base plate, 2-two-dimensional hollow mobile platform, 31-first high-precision dual-axis level, 32-second high-precision dual-axis level, 4-fixture assembly, 41-fixture base plate, 42-tested thin sheet, 43-magnetic ring, 44-groove, 45 mushroom-shaped handle, 51-upper measuring head, 52-lower measuring head, 6-mounting bracket, 7-tilt adjustment structure assembly, 71-two-dimensional inclinometer, 72-rotating mounting plate, 731-first T-type mounting seat, 732-second T-type mounting seat, 741 -first quick handle, 742-second quick handle, 751-first connecting plate, 752-second connecting plate, 761-first parallel glass, 762-second parallel glass, 10-tilt sensor, 81-upper measuring head adjustment unit, 82-lower measuring head adjustment unit, 91-frame body, 92-lower computer, 93-micro display panel, 941-first optical unit, 942-second optical unit, 95-transformer, 96-motor controller, 97-measuring head controller. DETAILED DESCRIPTION

[0028] See also Figures 1 to 11 As shown, a device for measuring key parameters of a thin film mainly includes: a frame body 91, a mounting base plate 1, a two-dimensional hollow moving platform 2, a confocal laser displacement sensor, a fixture assembly 4, a mounting bracket 6, a tilt adjustment structure assembly 7, and a control system; The mounting base plate 1 is a planar structure, which is mounted on the frame body 91; a two-dimensional hollow moving platform 2 is mounted on the mounting base plate 1; The two-dimensional hollow mobile platform 2 is a hollow electric-controlled x- and y-axis motion two-dimensional platform. It can be positioned at any position within the x- and y-axis plane travel range through control signals. It is embedded with displacement sensors inside, which can directly measure the displacement values ​​of the x- and y-axis. Its motion travel is ≥100mm×100mm. The fixture assembly 4 is placed in the hollow part. The motion control of the two-dimensional hollow mobile platform 2 drives the fixture assembly 4 to position. Two high-precision dual-axis levels are also fixedly installed on the two-dimensional hollow mobile platform 2, namely the first high-precision dual-axis level 31 and the second high-precision dual-axis level 32, which can monitor and measure the horizontality of the two-dimensional hollow mobile platform 2 in real time and feed back to the lower computer for measurement result data correction.

[0029] The fixture assembly 4 includes: a fixture bottom plate 41 and a magnetic ring 43, wherein the fixture bottom plate 41 is made of metal material, and a plurality of specific grooves 44 are arranged in parallel on the fixture bottom plate 41 to place the thin slice 42 to be inspected and the magnetic ring 43, and a through hole is opened at the measuring position so that the lasers of the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor can be projected onto the thin slice 42 to be inspected; the magnetic ring 43 is a magnetic circular ring structure, which presses the thin slice 42 to be inspected tightly into the groove 44 of the fixture bottom plate 41, and the inner ring area of ​​the magnetic ring 43 is the circular measuring area. Four mushroom-shaped handles 45 for easy lifting are also arranged around the fixture bottom plate 41. A fixture assembly 4 can realize the installation and batch measurement of multiple thin slices, and at the same time, the magnetic circular ring is used to press the thin slice 42 to be inspected, which can ensure that the thin slice 42 to be inspected is not deformed or wrinkled, and further ensure the measurement accuracy. There can be multiple fixture assemblies 4, so that when one of the fixture assemblies 4 is measuring on the device, the remaining fixture assemblies 4 can be used to arrange the inspected thin sheets 42 to improve the measurement efficiency.

[0030] The mounting bracket 6 is a concave structure, and the upper and lower parts thereof are respectively fixed with the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, and the middle part thereof is fixedly connected to the mounting base plate 1; The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 are multi-dimensional adjustment structures, and the upper measuring head 51 and the lower measuring head 52 are fixedly installed respectively; by adjusting the displacement and angle of the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The tilt adjustment structural component 7 includes: a two-dimensional inclinometer 71, a rotating mounting plate 72, a first T-shaped mounting seat 731, a second T-shaped mounting seat 732, a first quick handle 741, a second quick handle 742, a first connecting plate 751, a second connecting plate 752, a first parallel glass 761, a second parallel glass 762, and a tilt sensor 10, which is fixed on one side of the mounting base plate 1 as an integral component; the two-dimensional inclinometer 71 is an electrically controlled two-axis inclinometer, which is connected to the lower computer of the control system for communication, and the control signal of the lower computer realizes the two-axis small-angle swing positioning of the two-dimensional inclinometer 71; the two-dimensional inclinometer 71 is fixed on the mounting base plate 1, and the rotating mounting plate 72 and the tilt sensor 10 are fixedly connected above the two-dimensional inclinometer 71, and the tilt sensor 10 monitors the inclination of the two-dimensional inclinometer 71 in real time, and transmits the data to the lower computer of the control system for converting the measurement result data into a vertical distance; the upper and lower positions of the rotating mounting plate 72 are respectively fixed with the first and second parallel glass 761, and the second parallel glass 762 are respectively fixed with the first ... A T-shaped mounting seat 731 and a second T-shaped mounting seat 732; a first quick handle 741 fixes one end of a first connecting plate 751 on the first T-shaped mounting seat 731, and the other end of the first connecting plate 751 is fixedly connected to a first parallel glass 761; a second quick handle 742 fixes one end of a second connecting plate 752 on the second T-shaped mounting seat 732, and the other end of the second connecting plate 752 is fixedly connected to a second parallel glass 762; lasers of the upper measuring head 51 and the lower measuring head 52 are incident on the first parallel glass 761 and the second parallel glass 762 to realize an outgoing ray parallel to the incident ray, when the two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to be in a horizontal state, the laser axes of the upper measuring head 51 and the lower measuring head 52 are coaxial, and the lasers are incident vertically on the first parallel glass 761 and the second parallel glass 762 without changing the optical path and directly pass through, and the measuring spot of the measuring area at this place is the position of the center origin O of the circular measuring area; Confocal laser displacement sensor is a mature technology and can be directly obtained on the market, such as KEYENCE's CL-L030 laser coaxial displacement meter, Germany's Mi-Iridium's IFS2406-10 spectral confocal sensor, or China's Haibosen's HPS-CFL030 spectral confocal displacement sensor. The upper measuring head 51 and the lower measuring head 52 respectively form a measuring unit with two first optical units 941, the second optical unit 942, and a measuring head controller 97. The measurement data is fed back to the lower computer. By adjusting the displacement and angle of the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, the upper measuring head 51 and the lower measuring head 52 can be coaxial, meeting the measurement requirements of the confocal laser displacement sensor. The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 can use the optional accessories provided by the confocal laser displacement sensor manufacturer, such as KEYENCE's adjustment fixture (model OP-88285), or they can be self-processed or use other related fixtures.

[0031] The two-dimensional hollow mobile platform is an existing mature technology and can be directly obtained on the market. For example, Zhuoli Hanguan’s two-dimensional hollow mobile platform model number is XY120120.

[0032] The control system includes: a lower computer 92 and a motor controller 96, which are installed in the frame body 91; The measuring head controller 97, the first optical unit 941 and the second optical unit 942 of the confocal laser displacement sensor are installed in the frame body 91; the measuring head controller 97 is connected to the upper measuring head 51 and the lower measuring head 52 through the first optical unit 941 and the second optical unit 942 respectively; The frame body 91 serves as the main supporting structure, with a mounting base plate 1 installed on the top, and the other five surfaces are enclosed by plates, wherein the control circuit board of the lower computer 92 and the micro display panel 93 are fixedly installed on the two side surfaces, and the first optical unit 941, the second optical unit 942, a transformer 95, two motor controllers 96, and a measuring head controller 97 are fixedly installed on the inner side of the bottom surface.

[0033] The transformer 95 provides various voltage power supplies for the device, and the two motor controllers 96 are respectively connected to the two motors of the two-dimensional hollow mobile platform 2 for communication.

[0034] The lower computer 92 is connected to the upper computer (not shown), the motor controller 96 and the measuring head controller 97 for communication. The upper computer is installed with automatic measurement software ( Fig.11 ), the control requirements of the automatic measurement software are transmitted to the motor controller 96 and the measuring head controller 97 through the lower computer 92, and the motor controller 96 and the measuring head controller 97 transmit the feedback signal to the upper computer through the lower computer 92; the data collected by the upper measuring head 51, the lower measuring head 52, the first high-precision dual-axis level 31, the second high-precision dual-axis level 32, and the inclination sensor 10 are uploaded to the upper computer via the lower computer 92, and the automatic measurement software generates the original calibration record after data processing and saves it in the form of a document.

[0035] The present invention also provides a measurement method using the above-mentioned device for measuring key parameters of a sheet, comprising the following steps: Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1 mm between the upper measuring head 51 and the lower measuring head 52, input the correction value of the standard gauge block, and read the distance D between the upper measuring head 51 and the lower measuring head 52. The correction value of the 1 mm standard gauge block can be obtained through value traceability; Step 2: The two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to be in a horizontal state, and reads the distance data from the upper measuring head 51 and the lower measuring head 52 to the upper and lower surfaces of the thin film 42 to be inspected respectively. and ; Step 3: The two-dimensional inclinometer 71 adjusts the first parallel glass 761 and the second parallel glass 762 to different β small angles n times according to the measurement software control, and the measurement spot is evenly distributed in the measurement area (such as Fig. 9 As shown), read the distance data from the upper measuring head 51 and the lower measuring head 52 to the upper and lower surfaces of the inspected sheet 42 respectively. and ; Knowing the thickness t and refractive index n of the first parallel glass 761 and the second parallel glass 762, the vertical distance after conversion is , They are: ; ; Step 4: The upper and lower laser spots of the inspected sheet 42 are respectively measured using coordinates , Indicates that x and y are fixed values ​​in the same measurement area; The coordinates , Multiple , Take the corresponding average values ​​as the average vertical distances after measurement by the upper measuring head 51 and the lower measuring head 52, respectively. , ; Step 5: Calculate the thickness deviation and curvature of the sheet as follows: Thickness deviation ,or , different measurement points on the same slice , take the largest measurement point As the thickness deviation of the sheet, t 标 is the nominal value of the inspected sheet 42; Curvature , different measurement points on the same thin film, take the largest As the curvature of the sheet.

[0036] The operation process is as follows: 1. Turn on the power of this standard device, open the automatic measurement software to warm up the device, clean the thin slice 42 to be tested and place it in the same room with the device for isothermal treatment. The isothermal treatment time is determined according to the requirements of different thin slices.

[0037] 2. Place the thin sheets 42 to be tested one by one in the corresponding grooves 44 of the fixture bottom plate 41, and use magnetic rings 43 to press the measuring area where necessary.

[0038] 3. Input the relevant information of the object to be inspected, set the coordinates of the measurement area, the number of measurement slices, the number of areas, and the number of measurement points in the same measurement area in the automatic measurement software, and save the measurement settings.

[0039] 4. Place the sheet fixture assembly 4 with the installed sheets on the two-dimensional hollow mobile platform 2, start the automatic measurement software, and measure the thickness deviation and curvature of each sheet according to the setting requirements. After the measurement of this group is completed, replace it with another group of sheet fixture assemblies with the installed sheets and repeat the above measurement.

[0040] 5. After the automatic measurement software completes the automatic measurement, click the "Save" button in the automatic measurement software to automatically save the measurement result data in the form of a document.

[0041] 6. Take out the sheet fixture assembly 4, take out the magnetic ring 43 and the inspected sheet 42 respectively, turn off the power, and the inspection is completed.

[0042] The present invention provides a device and a method for measuring key parameters of thin sheets which are high in precision, convenient and efficient in operation, automated and capable of batch detection.

[0043] The above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A device for measuring key parameters of a sheet, characterized in that: include: Frame body, mounting base plate, two-dimensional hollow mobile platform, confocal laser displacement sensor, fixture assembly, mounting bracket, tilt adjustment structure assembly, control system; The mounting base plate is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base plate; The two-dimensional hollow moving platform is a hollow electric-controlled x- and y-axis moving two-dimensional platform, wherein the fixture assembly is placed in the hollow part, and the motion control of the two-dimensional hollow moving platform drives the fixture assembly to be positioned; the thin sheet to be inspected is installed on the fixture assembly; The mounting bracket is a concave structure, the upper and lower parts of which are respectively fixed with an upper measuring head adjustment unit and a lower measuring head adjustment unit, and the middle part thereof is fixedly connected to the mounting base plate; The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, and the upper measuring head and the lower measuring head of the confocal laser displacement sensor are respectively fixedly mounted thereon; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The tilt adjustment structural component includes: a two-dimensional inclinometer, a rotating mounting plate, a first T-shaped mounting seat, a second T-shaped mounting seat, a first quick handle, a second quick handle, a first connecting plate, a second connecting plate, a first parallel glass, a second parallel glass, and a tilt sensor, which is fixed on one side of the mounting base plate as an integral component; the two-dimensional inclinometer is an electrically controlled dual-axis inclinometer, which is communicated with the lower computer of the control system, and the control signal of the lower computer realizes the dual-axis small-angle swing positioning of the two-dimensional inclinometer; the two-dimensional inclinometer is fixed on the mounting base plate, and the rotating mounting plate and the tilt sensor are fixedly connected above the two-dimensional inclinometer, and the tilt sensor monitors the inclination of the two-dimensional inclinometer in real time and transmits the data to the lower computer; the first T-shaped mounting seat and the first T-shaped mounting seat are fixed on the upper and lower positions of the rotating mounting plate, respectively. a second T-shaped mounting seat; the first quick handle fixes one end of the first connecting plate on the first T-shaped mounting seat, and the other end of the first connecting plate is fixedly connected to the first parallel glass; the second quick handle fixes one end of the second connecting plate on the second T-shaped mounting seat, and the other end of the second connecting plate is fixedly connected to the second parallel glass; the lasers of the upper measuring head and the lower measuring head are incident on the first parallel glass and the second parallel glass to realize an outgoing ray parallel to the incident ray, when the two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to be in a horizontal state, the laser axes of the upper measuring head and the lower measuring head are coaxial, and the lasers are incident on the first parallel glass and the second parallel glass vertically without changing the optical path and directly pass through, and the measuring spot of the measuring area at this place is the position of the center origin O of the measuring area; The control system includes: a lower computer and a motor controller, which are installed in the frame body; The measuring head controller, the first optical unit and the second optical unit of the confocal laser displacement sensor are all installed in the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit respectively; The lower computer is respectively connected to the upper computer, the motor controller and the measuring head controller for communication. The upper computer is installed with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower computer. The motor controller and the measuring head controller transmit feedback signals to the upper computer through the lower computer. The data collected by the upper measuring head and the lower measuring head are uploaded to the upper computer via the lower computer.

2. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The two-dimensional hollow mobile platform is also fixedly installed with two high-precision dual-axis levels for real-time monitoring and measuring the levelness of the two-dimensional hollow mobile platform and feeding back the measurement result data to the lower computer for correction.

3. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The fixture assembly includes: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal material, and a plurality of grooves are arranged in parallel on the fixture base plate so as to place the thin sheet to be inspected and the magnetic ring, and a through hole is arranged at the measuring position so that the lasers of the upper measuring head and the lower measuring head can be irradiated onto the thin sheet to be inspected; the magnetic ring is a magnetic circular ring structure, which tightly presses the thin sheet to be inspected into the groove of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measuring area of ​​the thin sheet.

4. A device for measuring key parameters of a sheet as claimed in claim 3, characterized in that: Four mushroom-shaped handles are also arranged around the clamp bottom plate for easy lifting.

5. A device for measuring key parameters of a sheet as claimed in claim 1, characterized in that: The confocal laser displacement sensor is one of the following: CL-L030 coaxial laser displacement meter from Keyence, IFS2406-10 spectral confocal sensor from Mi-Iridium of Germany, or HPS-CFL030 spectral confocal displacement sensor from Heberson of China.

6. A method for measuring key parameters of a sheet, characterized in that: Using a device for measuring key parameters of a sheet as claimed in any one of claims 1 to 5, the measuring method comprises the following steps: Step 1: Place a standard gauge block of grade 4 or above with a nominal value of 1 mm between the upper measuring head and the lower measuring head, input the correction value of the gauge block, and read the distance D between the upper measuring head and the lower measuring head. The correction value of the 1 mm standard gauge block can be obtained through value traceability; Step 2: The two-dimensional inclinometer adjusts the first parallel glass and the second parallel glass to a horizontal state, and reads the distance data from the upper measuring head and the lower measuring head to the upper and lower surfaces of the inspected sheet respectively. and ; Step 3: The two-dimensional inclinometer is controlled by the measurement software to adjust the first parallel glass and the second parallel glass at different β small angles n times, the measurement spot is evenly distributed in the measurement area, and the distance data from the upper measurement head and the lower measurement head to the upper and lower surfaces of the thin film to be tested are read respectively. and ; Knowing the thickness t and refractive index n of the first parallel glass and the second parallel glass, the vertical distance after conversion is , They are: ； ； Step 4: The upper and lower laser spots are respectively measured with coordinates , Indicates that x and y are fixed values ​​in the same measurement area; The coordinates , Multiple , Take the corresponding average values ​​as the average vertical distances after measurement by the upper measuring head and the lower measuring head respectively. , ; Step 5: Calculate the thickness deviation and curvature of the sheet: Thickness deviation ,or , different measurement points on the same slice , take the largest measurement point As the thickness deviation of the sheet, t 标 is the nominal value of the thin film under test; Curvature , different measurement points on the same thin film, take the largest As the curvature of the sheet.

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