An integral matrix force transducer

Abstract

The application discloses a whole matrix type force sensor, which is mainly composed of a lower plate, eight middle elastic body structures at the top end of the lower plate and an upper plate above the middle elastic body structures. The eight middle elastic body structures are evenly distributed and arranged in a matrix type to serve as support legs as sensitive bodies. When the upper plate directly bears impact force, the upper plate will extrude the middle elastic body structures, so that the middle elastic body structures are forced to deform, and the sensor can measure the force size according to the deformation of the middle elastic body. The whole matrix type force sensor has the advantages of small elastic body structure coupling error, simple structure, impact resistance and easy manufacturing, and can not only work in a complex environment in the nuclear power field for a long time, but also can be replaced by different types of sensors according to different application scenes.

Description

Technical Field

[0001] This application relates to the field of force sensor technology, and in particular to an integrated matrix force sensor. Background Technology

[0002] Impact force is a crucial physical quantity describing the motion of an object, reflecting the magnitude of the force generated during an impact. In the sensor field, impact force is a dynamic force, meaning it changes over time. Accurate measurement of impact force is essential for improving product design. Existing force sensors for measuring impact force are single sensors, which are small in size and cannot measure the impact force of larger equipment. Meanwhile, current matrix force sensors are predominantly static or quasi-static, with low response frequencies, making them unsuitable for measuring the impact force of large equipment in the nuclear power industry.

[0003] Based on their measurement principles, integrated matrix force sensors can be categorized into resistance strain gauge, piezoelectric, capacitive, and optical types. Different types of sensors can be installed on the elastic body structure to obtain mechanical signals. Resistance sensors utilize the strain-resistance effect; piezoelectric sensors utilize the piezoelectric effect of piezoelectric materials; capacitive sensors achieve measurement by setting multiple pairs of capacitors and measuring changes in the relative gap between electrode plates; and optical sensors utilize fiber optic sensing technology.

[0004] Therefore, the core of the overall matrix force sensor is the elastic body structure. An ideal elastic body structure requires small coupling error, simple structure, impact resistance and easy manufacturing, so that different types of sensors can be installed according to different application scenarios, such as fiber optic Fabry-Perot strain sensors, resistance strain gauges, fiber optic grating strain sensors, etc. Summary of the Invention

[0005] This application proposes an integrated matrix force sensor, which features a matrix-distributed intermediate elastic body structure that receives impact force and deforms. The integrated intermediate elastic body structure has advantages such as small coupling error, simple structure, impact resistance and easy manufacturing. It also employs an overload protection device to prevent overload damage to the intermediate elastic body structure, thereby solving the problem of poor impact resistance of existing force sensors.

[0006] To achieve the above objectives, this application adopts the following technical solution: an integrated matrix force sensor, comprising a lower plate, wherein evenly distributed support holes are provided on both sides of the long side of the top of the lower plate, and eight intermediate elastic body structures are provided at the top of the lower plate for receiving impact force and undergoing deformation. A rectangular upper plate is provided at the top of each intermediate elastic body structure for directly receiving impact. The eight intermediate elastic body structures are combined into an integrated elastic body, and four spaced slits distributed at 90 degrees are provided on the side wall of the integrated elastic body. Separation slits are provided at the corners of the side of the integrated elastic body. Sensors are provided in the spaced slits and separation slits for receiving signals of deformation of the intermediate elastic body structures.

[0007] Furthermore, a positioning post is provided inside the support hole, a support ring is provided at the bottom end of the lower plate, and an overload protection device is provided below the lower plate. The overload protection device includes a transformer base, a bottom sealing plate provided at the bottom end of the transformer base for sealing the bottom end of the transformer base, and a sliding device for receiving overload force.

[0008] Furthermore, the sliding device includes a cross-shaped limiting frame at the top, a sliding rod connected to the bottom end of the four long sides of the cross-shaped limiting frame away from the center, a connecting plate connected to the bottom end of the sliding rod, and a plunger connected to the end of the connecting plate away from the sliding rod, for receiving overload force and adjusting the position of the overall matrix force sensor.

[0009] Furthermore, the four long sides of the cross-shaped limiting frame are respectively inserted into the four gaps. The cross-shaped limiting frame is located below the upper plate, and there is a gap between the cross-shaped limiting frame and the upper plate for direct contact when the upper plate moves excessively downward.

[0010] Furthermore, both the transformer base and the bottom sealing plate are provided with evenly distributed positioning holes. The bottom of the positioning column is inserted into the positioning hole. The top of the transformer base is provided with an annular hydraulic ring groove. The bottom of the support ring is inserted into the hydraulic ring groove. The side wall of the support ring is in contact with the side wall of the hydraulic ring groove. The bottom of the hydraulic ring groove is filled with hydraulic oil. The bottom end of the support ring is in contact with the surface of the hydraulic oil in the hydraulic ring groove to limit the position of the lower plate. There is a gap between the bottom end of the lower plate and the top end of the transformer base to provide space for the lower plate to move downwards and buffer.

[0011] Furthermore, the transformer base has four circumferentially distributed sliding holes and four circumferentially distributed adjusting holes. The slide rod is movably sleeved in the sliding hole to limit the movement direction of the slide rod. The plunger is movably sleeved in the adjusting hole to limit the movement direction of the plunger. A connecting hole I is provided on the bottom side wall of the sliding hole, which communicates with the adjusting hole. The connecting plate is movably sleeved in the connecting hole I to limit the movement distance of the connecting plate.

[0012] Furthermore, a spring I is provided between the bottom end of the slide rod and the bottom sealing plate, and a spring II is provided between the bottom end of the plunger and the bottom sealing plate, for driving the sliding device to reset.

[0013] Furthermore, a connecting hole II is provided on the top side wall of the adjusting hole, which is connected to the bottom of the hydraulic ring groove for bidirectional flow of hydraulic oil in the hydraulic ring groove. The side wall of the plunger is in contact with the side wall of the adjusting hole, and the plunger closes the connecting hole II through the top side wall to restrict the flow state of hydraulic oil in the hydraulic ring groove.

[0014] Furthermore, a central rod is provided at the top of the adjusting hole, and an annular necking groove is provided at the bottom of the central rod. A liquid bladder I is provided at the opening of the necking groove, and a liquid bladder II is provided at the top of the central rod, for changing the size of the space at the top of the adjusting hole. An infusion chamber is provided inside the central rod, and a drain hole I is provided at the bottom of the infusion chamber, which is connected to the necking groove. A drain hole II is provided at the top of the infusion chamber, which is connected to the liquid bladder II, for conveying hydraulic oil in the necking groove, the infusion chamber, and the liquid bladder II.

[0015] Furthermore, the plunger has a through-hole at its center, and the bottom end of the central rod passes through the through-hole. The diameter of the central rod is the same as the inner diameter of the through-hole, which is used to squeeze and release the liquid bladder I.

[0016] This application provides an integrated matrix force sensor, which uses a matrix distribution to set eight uniformly distributed intermediate elastic body structures as support legs and sensing elements. When the upper plate directly bears the impact force, the upper plate will squeeze the intermediate elastic body structures, causing them to deform under force. This allows the sensor to measure the magnitude of the force based on the deformation of the intermediate elastic bodies. The integrated design features small coupling error in the intermediate elastic body structures, simple structure, impact resistance, and ease of manufacturing. It can not only work for a long time in the complex environment of nuclear power, but also allows for the replacement of different types of sensors according to different application scenarios.

[0017] Meanwhile, by setting a cross-shaped limiting frame between the evenly distributed intermediate elastomer structures, when the impact force is overloaded, the pressure of the upper plate increases, and the deformation of the intermediate elastomer structure increases. At this time, the bottom end of the upper plate will be pressed against the cross-shaped limiting frame, pushing the slide rod to drive the plunger to move down, so that the connecting hole II opens. At this time, the entire integrated matrix force sensor will move down due to the impact force and the deformation and reset effect of the intermediate elastomer structure, so that the support ring pushes the hydraulic oil in the hydraulic ring groove through the connecting hole II into the adjusting hole. The downward movement of the entire integrated matrix force sensor buffers the overload impact force and avoids damage to the intermediate elastomer structure due to overload.

[0018] Simultaneously, the downward movement of the plunger causes the inner wall of the enclosing hole within the plunger to compress the liquid bladder I, forcing the hydraulic oil in liquid bladder I into liquid bladder II, causing liquid bladder II to expand. Only when the plunger moves downward and the enclosing hole completely surrounds liquid bladder I will the connecting hole II open. At this point, the hydraulic oil in the hydraulic ring groove can enter the adjusting hole for buffering and adjustment. When the impact force is removed, the compressed springs I and II will push the slide rod and plunger upward, and the plunger will then push the hydraulic oil in the adjusting hole back into the hydraulic ring groove through the connecting hole II, pushing the entire integrated matrix force sensor upward to reset and complete self-adjustment. It should be noted that when the plunger moves upward to close the connecting hole II, liquid bladder I will gradually be exposed. If the plunger continues to move upward, the hydraulic oil remaining in the adjusting hole will compress the hydraulic oil in liquid bladder II and flow back into the gradually unrestricted liquid bladder I, ensuring that the plunger can move upward sufficiently to close the connecting hole II. Attached Figure Description

[0019] The accompanying drawings, which form part of this specification, illustrate embodiments disclosed in this application and, together with the specification, serve to explain the principles disclosed in this application.

[0020] This disclosure will become clearer with reference to the accompanying drawings and the following detailed description, wherein:

[0021] Figure 1 This is a schematic diagram of the structure in Embodiment 1 of the present invention;

[0022] Figure 2 This is a three-dimensional schematic diagram of the structure in Embodiment 2 of the present invention;

[0023] Figure 3 This is a schematic diagram showing the position of the cross-shaped limiting frame structure of the present invention;

[0024] Figure 4 This is a schematic diagram of the transformer base of the present invention;

[0025] Figure 5 This is a schematic diagram of the internal structure of the transformer base of the present invention;

[0026] Figure 6 This is a schematic diagram of the internal structure distribution of the transformer base of the present invention;

[0027] Figure 7 This is a schematic diagram of the sliding device structure of the present invention;

[0028] Figure 8 This is a schematic diagram of the central rod structure of the present invention;

[0029] Figure 9 For the present invention Figure 8 A magnified view of the structure at point A in the middle.

[0030] The components are as follows: 1. Lower plate; 2. Support hole; 3. Intermediate elastic body structure; 31. Spacing joint; 32. Separation joint; 4. Upper plate; 5. Positioning post; 6. Support ring; 7. Transformer seat; 71. Bottom sealing plate; 8. Positioning hole; 9. Hydraulic ring groove; 10. Sliding hole; 11. Adjustment hole; 12. Connecting hole I; 13. Connecting hole II; 14. Cross limit frame; 15. Sliding rod; 16. Connecting plate; 17. Plunger; 171. Wrapping hole; 18. Spring I; 19. Spring II; 20. Center rod; 21. Neck groove; 22. Infusion chamber; 23. Fluid bladder I; 24. Fluid bladder II; 25. Drain hole I; 26. Drain hole II. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0032] Example 1

[0033] Please see Figure 1 An integrated matrix force sensor includes a rectangular lower plate 1. The lower plate 1 has evenly distributed support holes 2 on both sides of the long side at the top. The lower plate 1 provides support for the entire integrated matrix force sensor, so that the impact force can be directly applied to the upper plate 4. At this time, the upper plate 4 will squeeze the intermediate elastic body structure 3 under the action of the impact force, so that the intermediate elastic body structure 3 will undergo corresponding deformation under the force, and cooperate with the sensor to complete the force measurement.

[0034] See Figures 1 to 3 The eight intermediate elastic body structures 3 are combined into a whole elastic body. The outer side of the whole elastic body is rectangular and the inner side is circular. Four spaced slits 31 distributed at 90 degrees are opened on the side wall of the whole elastic body. Separation slits 32 are opened at the four side corners of the whole elastic body. This allows the eight intermediate elastic body structures 3 to have enough space to deform when subjected to force. Existing sensors can be fixedly installed in the spaced slits 31 or separation slits 32 as needed. This allows the intermediate elastic body structures to transmit the changes caused by deformation to the sensors when they deform, so that the sensors can obtain signals to measure force.

[0035] A protective outer shell can be fixed to the outside of the overall elastomer, and wire holes are opened on the outer shell for the sensor wires to be led out.

[0036] Example 2

[0037] Please see Figure 3Based on Embodiment 1, a positioning post 5 is fixedly sleeved inside the support hole 2, a support ring 6 is fixedly welded to the bottom end of the lower plate 1, and an overload protection device is provided below the lower plate 1.

[0038] See Figure 2 The overload protection device includes a transformer base 7, a bottom sealing plate 71 fixed to the bottom of the transformer base 7 for sealing the bottom of the transformer base 7, and a sliding device for receiving overload force. By disassembling and installing the bottom sealing plate 71, the installation and disassembly of the internal devices of the transformer base 7 can be facilitated.

[0039] See Figures 3 to 4 , Figures 6 to 7 The sliding device includes a cross-shaped limiting frame 14 located at the top, a slide rod 15 fixedly connected to the bottom of the four long sides of the cross-shaped limiting frame 14 away from the center, a connecting plate 16 fixedly connected to the bottom of the slide rod 15, and a plunger 17 fixedly connected to the end of the connecting plate 16 away from the slide rod 15, so that when the overload device moves up and down, the cross-shaped limiting frame 14, the slide rod 15, the connecting plate 16 and the plunger 17 can always move synchronously.

[0040] See Figure 3 The four long sides of the cross-shaped limiting frame 14 are inserted into the four gaps 31 respectively. The cross-shaped limiting frame 14 is located below the upper plate 4, so that the upper plate 4 can contact the cross-shaped limiting frame 14 during the downward movement of the upper plate 4 under impact force, and the overload protection device moves downward. There is a gap between the cross-shaped limiting frame 14 and the upper plate 4, so that the upper plate 4 will not directly contact the cross-shaped limiting frame 14 after being impacted, providing sufficient deformation time and deformation degree for the intermediate elastic body structure 3, and providing the necessary conditions for the deformation of the intermediate elastic body structure 3 for the sensor to measure force. The size of the gap is adjusted according to actual needs. It should be noted that if the gap size is smaller than the compression value of the intermediate elastic body structure 3 that will cause overload deformation, and the impact force is too large and there is a possibility of damaging the intermediate elastic body structure 3, when the upper plate 4 moves to squeeze the cross-shaped limiting frame 14, the deformation of the intermediate elastic body structure 3 has not yet reached the deformation of overload failure. At this time, when the cross-shaped limiting frame 14 is subjected to force and moves downward to complete the subsequent buffering action of the overall matrix force sensor, the intermediate elastic body structure 3 can still deform safely.

[0041] See Figures 3 to 6Both the transformer base 7 and the bottom sealing plate 71 have evenly distributed positioning holes 8. The bottom of the positioning pin 5 is inserted into the positioning hole 8. The diameter of the positioning pin 5 is the same as the inner diameter of the positioning hole 8, so that the positioning hole 8 limits the position of the positioning pin 5, thereby restricting the lower plate 1 to only move up and down. The top of the transformer base 7 has an annular hydraulic groove 9. The bottom of the hydraulic groove 9 is filled with hydraulic oil. The bottom of the support ring 6 is inserted into the hydraulic groove 9. The side wall of the support ring 6 fits against the side wall of the hydraulic groove 9. A sealing ring is provided on the side wall of the support ring 6 to prevent hydraulic oil leakage. The bottom end of the support ring 6 is in contact with the hydraulic oil surface in the hydraulic ring groove 9, so that after the support ring 6 is inserted into the hydraulic ring groove 9, the hydraulic oil is sealed in the space between the bottom end of the support ring 6 and the bottom of the hydraulic ring groove 9, forming a "solid" state with the support ring 6, which hinders the downward movement of the support ring 6 and keeps the position of the lower plate 1 unchanged. There is a gap between the bottom end of the lower plate 1 and the top end of the transformer seat 7, so that when the upper plate 4 receives excessive impact force and the lower plate 1 needs to drive the intermediate elastic body structure 3 and the upper plate 4 to move downward for buffering, the gap between the bottom end of the lower plate 1 and the top end of the transformer seat 7 can ensure that there is enough space for buffering movement.

[0042] See Figures 5 to 6 The transformer base 7 has four circumferentially distributed sliding holes 10 and four circumferentially distributed adjusting holes 11. The adjusting holes 11 are located between the sliding holes 10 and the hydraulic ring groove 9. The bottom side wall of the sliding hole 10 has a connecting hole I 12 that connects to the adjusting hole 11. The top side wall of the adjusting hole 11 has a connecting hole II 13 that connects to the bottom of the hydraulic ring groove 9. This allows the lower plate 1 to move downwards, and the hydraulic oil in the hydraulic ring groove 9 can be squeezed by the support ring 6 and enter the adjusting hole 11 through the open connecting hole II 13. At this time, the hydraulic oil in the hydraulic ring groove 9 can move, providing the possibility for the lower plate 1 to move downwards. When the overload impact force is removed, the piston 17 moves upwards and resets, which can send the excess hydraulic oil in the adjusting hole 11 back into the hydraulic ring groove 9 through the open connecting hole II 13, pushing the lower plate 1 to rise and reset.

[0043] See Figure 6The slide rod 15 is movably sleeved within the sliding hole 10, allowing the sliding hole 10 to restrict the position of the slide rod 15. This allows the cross-shaped limit frame 14 to move vertically downward within the sliding hole 10 when subjected to downward pressure from the upper plate 4. When the cross-shaped limit frame 14 needs to move upward to reset, the sliding hole 10 also restricts the vertical upward movement of the slide rod 15. The connecting plate 16 is movably sleeved within the connecting hole I 12, the height of which is greater than the thickness of the connecting plate 16. This allows the slide rod 15 to move downward, causing the connecting plate 16 to move synchronously. The extra space in the connecting hole I 12 provides sufficient space for the connecting plate 16 to move, and limits the upward or downward movement of the connecting plate 16, preventing the cross-shaped limit frame 14 and the plunger 17 from moving beyond a set distance, thus avoiding premature contact between the cross-shaped limit frame 14 and the upper plate 4 or the plunger 17. To address issues such as the inability to properly close the connecting hole II13, a spring I18 is fixedly connected to the bottom end of the slide rod 15. The bottom end of the spring I18 is fixedly connected to the top end of the bottom sealing plate 71, allowing the slide rod 15 to compress the spring I18 during downward movement. When the cross limit frame 14 loses the pressure from above, the compressed spring I18 can push the slide rod 15 and the cross limit frame 14 upward. The plunger 17 is movably sleeved in the adjusting hole 11, with its side wall fitting against the side wall of the adjusting hole 11. A sealing ring is provided on the side wall of the plunger 17. Under normal conditions, the plunger 17 closes the connecting hole II13 through its side wall, ensuring that the plunger 17 can close the connecting hole II13 before the upper plate 4 receives an overload impact force. This prevents the hydraulic oil in the hydraulic ring groove 9 from flowing, forming a "solid" state with the support ring 6, thus limiting the position of the entire matrix force sensor.

[0044] See Figure 6 A spring II 19 is fixedly connected to the bottom end of the plunger 17. The bottom end of the spring II 19 is fixedly connected to the top end of the bottom sealing plate 71, so that the plunger 17 can compress the spring II 19 during the downward movement. At this time, the plunger 17 opens the connecting hole II 13, so that the hydraulic oil in the hydraulic ring groove 9 enters the space above the adjusting hole 11 through the connecting hole II 13. The hydraulic oil entering at this time exerts a downward squeezing force on the plunger 17. When the plunger 17 needs to move upward, the compressed spring II 19 will cooperate with the compressed spring I 18 to push the plunger 17 upward, so that the plunger 17 will push the hydraulic oil above back into the hydraulic ring groove 9 through the connecting hole II 13.

[0045] Example 3

[0046] Please see Figures 6 to 9Based on Embodiment 2, a central rod 20 is fixedly connected to the top of the adjusting hole 11. A through-hole 171 is opened in the center of the plunger 17. The bottom end of the central rod 20 passes through the through-hole 171 and contacts the top of the bottom sealing plate 71. The diameter of the central rod 20 is the same as the inner diameter of the through-hole 171. A sealing ring is provided on the inner wall of the through-hole 171 so that hydraulic oil will not leak when the plunger 17 moves up and down on the central rod 20.

[0047] See Figures 6 to 9 The bottom of the central rod 20 has an annular constriction groove 21, and a liquid bladder I 23 is fixedly connected to the opening of the constriction groove 21. A liquid bladder II 24 is fixedly sleeved on the top of the central rod 20. An infusion chamber 22 is formed inside the central rod 20. A drain hole I 25 is formed at the bottom of the infusion chamber 22, which communicates with the constriction groove 21. A drain hole II 26 is formed at the top of the infusion chamber 22, which communicates with the liquid bladder II 24. The constriction groove 21, the infusion chamber 22, and the liquid bladder II 24 are filled with hydraulic oil. The liquid bladder I 23 is located below the plunger 17 and covers the hole 17. The bottom opening of 1 has an arc surface, so that when the plunger 17 moves downward, increasing the space between the plunger 17 and the top of the adjusting hole 11, it can squeeze the liquid bladder I 23 through the wrapping hole 171, and force the hydraulic oil in the liquid bladder I 23 into the infusion chamber 22 through the drain hole I 25, and then into the liquid bladder II 24 through the drain hole II 26. At this time, the liquid bladder II 24 expands, and the liquid bladder I 23 is forced into the wrapping hole 171. When the liquid bladder II 24 is completely pressed into the wrapping hole 171, the downward movement of the plunger 17 will open the connecting hole II 13. At this time, the hydraulic oil in the hydraulic ring groove 9 will be forced into the space between the plunger 17 and the top of the adjusting hole 11. The input hydraulic oil exerts downward pressure on the plunger 17 and compressive pressure on the liquid bladder II 24. Since the liquid bladder I 23 is completely wrapped by the wrapping hole 171, the ability of the liquid bladder II 24 to be compressed by the external hydraulic oil is weakened. This will only cause the hydraulic oil inside the liquid bladder II 24 to transmit pressure to the liquid bladder I 23, increasing the pressure of the liquid bladder I 23 on the inner wall of the wrapping hole 171 and increasing the friction. When the plunger 17... When the plunger moves upward, it will push the hydraulic oil above back into the hydraulic ring groove 9. After the plunger 17 closes the connecting hole II 13, the plunger 17 still needs to move upward to prevent the hydraulic oil in the hydraulic ring groove 9 from communicating with the hydraulic oil in the adjusting hole 11. At this time, when the plunger 17 moves upward, the hydraulic oil in the adjusting hole 11 will squeeze the liquid bladder II 24, while the liquid bladder I 23 has been gradually released by the plunger 17, which compresses the liquid bladder II 24 and pushes the hydraulic oil in the liquid bladder II 24 back into the liquid bladder I 23, providing enough space for the plunger 17 to continue moving upward.

Claims

1. An integrated matrix force sensor, characterized in that, Includes a lower plate (1), on both sides of the long side of the top of the lower plate (1) are evenly distributed support holes (2), and the top of the lower plate (1) is provided with eight intermediate elastic body structures (3) for receiving impact force and deforming. The top of the intermediate elastic body structure (3) is provided with a rectangular upper plate (4) for directly receiving impact. The eight intermediate elastomer structures (3) are combined into an integral elastomer. Four spacer slits (31) distributed at ninety degrees are provided on the side wall of the integral elastomer. Separation slits (32) are provided at the corners of the side of the integral elastomer. Sensors are provided in the spacer slits (31) and separation slits (32) to receive the deformation signal of the intermediate elastomer structure (3). A positioning post (5) is provided in the support hole (2), a support ring (6) is provided at the bottom end of the lower plate (1), and an overload protection device is provided below the lower plate (1). The overload protection device includes a transformer seat (7), a bottom sealing plate (71) provided at the bottom end of the transformer seat (7) for sealing the bottom end of the transformer seat (7), and a sliding device for receiving overload force. The sliding device includes a cross-shaped limiting frame (14) at the top, a slide rod (15) connected to the bottom of the four long sides of the cross-shaped limiting frame (14) away from the center, a connecting plate (16) connected to the bottom of the slide rod (15), and a plunger (17) connected to the end of the connecting plate (16) away from the slide rod (15), for receiving overload force and adjusting the position of the overall matrix force sensor. The four long sides of the cross-shaped limiting frame (14) are respectively inserted into the four gaps (31). The cross-shaped limiting frame (14) is located below the upper plate (4). There is a gap between the cross-shaped limiting frame (14) and the upper plate (4) for direct contact when the upper plate (4) moves too far downward. The transformer base (7) and the bottom sealing plate (71) are both provided with evenly distributed positioning holes (8). The bottom of the positioning column (5) is inserted into the positioning hole (8). The top of the transformer base (7) is provided with an annular hydraulic ring groove (9). The bottom of the support ring (6) is inserted into the hydraulic ring groove (9). The side wall of the support ring (6) is in contact with the side wall of the hydraulic ring groove (9). The bottom of the hydraulic ring groove (9) is filled with hydraulic oil. The bottom end of the support ring (6) is in contact with the liquid surface of the hydraulic oil in the hydraulic ring groove (9) to limit the position of the lower plate (1). There is a gap between the bottom end of the lower plate (1) and the top end of the transformer base (7) to provide space for the lower plate (1) to move down and buffer. The transformer base (7) has four circumferentially distributed sliding holes (10) and four circumferentially distributed adjusting holes (11). The slide rod (15) is movably sleeved in the sliding hole (10) to limit the movement direction of the slide rod (15). The plunger (17) is movably sleeved in the adjusting hole (11) to limit the movement direction of the plunger (17). A connecting hole I (12) is provided on the bottom side wall of the sliding hole (10) to connect with the adjusting hole (11). The connecting plate (16) is movably sleeved in the connecting hole I (12) to limit the movement distance of the connecting plate (16). The top sidewall of the regulating hole (11) is provided with a connecting hole II (13) which is connected to the bottom of the hydraulic ring groove (9) for bidirectional flow of hydraulic oil in the hydraulic ring groove (9). The sidewall of the plunger (17) is in contact with the sidewall of the regulating hole (11). The plunger (17) closes the connecting hole II (13) through the top sidewall to restrict the flow state of hydraulic oil in the hydraulic ring groove (9).

2. The integrated matrix force sensor according to claim 1, characterized in that, A spring I (18) is provided between the bottom end of the slide rod (15) and the bottom sealing plate (71), and a spring II (19) is provided between the bottom end of the plunger (17) and the bottom sealing plate (71) to drive the sliding device to reset.

3. The integrated matrix force sensor according to claim 1, characterized in that, The top of the adjustment hole (11) is provided with a central rod (20), and the bottom of the central rod (20) is provided with an annular constriction groove (21). The opening of the constriction groove (21) is provided with a liquid bladder I (23), and the top of the central rod (20) is provided with a liquid bladder II (24) to change the size of the space at the top of the adjustment hole (11). The central rod (20) is provided with a delivery chamber (22), and the bottom of the delivery chamber (22) is provided with a drain hole I (25) connected to the constriction groove (21). The top of the delivery chamber (22) is provided with a drain hole II (26) connected to the liquid bladder II (24) to transport hydraulic oil in the constriction groove (21), delivery chamber (22) and liquid bladder II (24).

4. The integrated matrix force sensor according to claim 3, characterized in that, The plunger (17) has a through-hole (171) at its center, and the bottom end of the central rod (20) passes through the through-hole (171). The diameter of the central rod (20) is the same as the inner diameter of the through-hole (171), and it is used to squeeze and release the liquid bladder I (23).

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