Bearing mechanism and testing device

Abstract

The invention provides a bearing mechanism and a testing device, and relates to the technical field of chip performance testing. As the to-be-tested chip needs to be frequently replaced, and the replacement frequency of the test tool plate is low, the to-be-tested chip does not need to be replaced under the condition of no fault. According to the bearing mechanism provided by the embodiment of the invention, different replacement modes are adopted according to different replacement frequencies of the chip and the test tool plate, so that the replacement process can be conveniently and quickly carried out, and the stability of the chip and the test tool plate, especially the stability of the test tool plate, can be ensured.

Description

Technical Field

[0001] The present application relates to the technical field of chip performance testing, and in particular to a supporting mechanism and a testing device. Background Art

[0002] With the development and progress of AI technology, AI chips are an important part of its technological development. When testing the performance of AI chips, high and low temperature tests are routine operations. In this process, the chip needs to be cooled to ensure that the chip is not damaged. In the existing technology, the test equipment generally uses a heat dissipation cold plate to dissipate heat. However, in a limited space, the hoisting problem of the heat dissipation cold plate and the placement of the chip module under test are restricted, which has become a technical difficulty that needs to be solved urgently. Summary of the invention

[0003] In view of this, the present application provides a bearing mechanism and a testing device, the purpose of which is to solve the above technical problems to a certain extent.

[0004] In a first aspect, the present application provides a carrying mechanism, the carrying mechanism is used to set a test fixture board and a chip, the chip is set on the test fixture board, and the carrying mechanism includes:

[0005] a first bearing member and a second bearing member, wherein the first bearing member has a bearing surface, the test fixture plate is arranged on the bearing surface, and the first bearing member and the second bearing member are movably connected to each other;

[0006] Wherein, the first bearing member is movable relative to the second bearing member, so that the area of ​​the bearing surface where the test fixture plate is arranged is away from the second bearing member in a first horizontal direction;

[0007] a horizontal driving assembly, the horizontal driving assembly being connected to the second bearing member, and the horizontal driving assembly driving the second bearing member and the first bearing member to move along the first horizontal direction;

[0008] A locking assembly is provided on at least one of the first bearing member and the second bearing member, and the locking assembly is detachably connected to the first bearing member and the second bearing member to fix the first bearing member to the second bearing member.

[0009] Preferably, the first bearing member and the second bearing member are arranged opposite to each other in the vertical direction, and the bearing mechanism includes a first transmission component, which is arranged between the first bearing member and the second bearing member, and the first transmission component transmission-connects the first bearing member and the second bearing member so that the first bearing member can move along the first horizontal direction relative to the second bearing member.

[0010] Preferably, the first bearing member and the second bearing member are arranged opposite to each other in a vertical direction, and the first transmission assembly is located between the first bearing member and the second bearing member.

[0011] Preferably, the first transmission assembly includes a first transmission member arranged on the first bearing member and a second transmission member arranged on the second bearing member, one of the first transmission member and the second transmission member extends along the first horizontal direction, and the first transmission member and the second transmission member are slidably matched.

[0012] Preferably, the bearing mechanism also includes a base plate and a second transmission assembly, the horizontal drive assembly is arranged on the upper side of the base plate, and the second transmission assembly transmission-connects the second bearing member and the base plate so that the second bearing member can move relative to the base plate along the first horizontal direction.

[0013] Preferably, the first bearing member and the second bearing member are arranged adjacent to each other in a horizontal plane.

[0014] Preferably, the carrying mechanism further comprises:

[0015] A hanging member and a cooling assembly, wherein the cooling assembly is arranged at the lower side of the hanging member, and the hanging member is arranged at the upper side of the first bearing member;

[0016] a first vertical driving assembly and a second vertical driving assembly, wherein the first vertical driving assembly and the second vertical driving assembly are arranged opposite to each other in a second horizontal direction perpendicular to the first horizontal direction;

[0017] Wherein, the first vertical driving assembly and the second vertical driving assembly are both connected to the hanging component, and the first vertical driving assembly and the second vertical driving assembly both synchronously lift and lower the hanging component.

[0018] Preferably, the carrying mechanism further comprises a control mechanism, and the control mechanism is communicatively connected with the first vertical drive assembly, the second vertical drive assembly and the horizontal drive assembly;

[0019] The control mechanism is configured to lock the horizontal drive assembly when the first vertical drive assembly and the second vertical drive assembly drive the lifting member, and is configured to lock the first vertical drive assembly and the second vertical drive assembly when the horizontal drive assembly drives the second load-bearing member.

[0020] Preferably, the carrying mechanism further comprises a sensing element and a control mechanism, the sensing element is communicatively connected to the control mechanism, and the control mechanism is communicatively connected to both the first vertical driving assembly and the second vertical driving assembly;

[0021] Wherein, the sensing element is arranged below the lifting component, and the sensing element is configured to have a sensing range located below the sensing element. The sensing element is also configured to transmit a sensing signal to the control mechanism when an external object enters the sensing range, and the control mechanism is configured to issue an alarm.

[0022] A second aspect of the present application provides a testing device, which includes the supporting mechanism as described above.

[0023] According to the bearing mechanism provided by the present application, the test fixture plate is arranged on the bearing surface of the first bearing member, and the chip is arranged on the test fixture plate. In this way, when the chip is tested, if the chip needs to be replaced, the first bearing member can be fixed to the second bearing member by a locking assembly to avoid relative movement between the first bearing member and the second bearing member. On the basis of locking the first bearing member and the second bearing member, the second bearing assembly is driven to move along the first horizontal direction by the horizontal driving assembly, so that the first bearing member, together with the test fixture plate and the chip, can move along the first horizontal direction, thereby moving the chip from the original test position to a replaceable position.

[0024] If the test fixture plate needs to be replaced, the first bearing member can be driven to move relative to the second bearing member by utilizing the movable connection relationship between the first bearing member and the second bearing member when the locking assembly is not connected to the first bearing member and the second bearing member, so that the area of ​​the bearing surface where the test fixture plate is set is away from the second bearing member in a first horizontal direction, thereby transferring the test fixture plate to a position where it can be replaced.

[0025] Since the chip to be tested needs to be replaced frequently, and the test fixture board is replaced less frequently, it does not need to be replaced if there is no fault. According to the supporting mechanism provided in the embodiment of the present application, different replacement methods are adopted for the different replacement frequencies of the chip and the test fixture board, which not only ensures the convenience and speed of the replacement process, but also ensures the stability of the chip and the test fixture board, especially the test fixture board.

[0026] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A schematic diagram showing a plan view of a carrying mechanism provided according to an embodiment of the present application;

[0029] Figure 2 A schematic diagram showing a three-dimensional diagram of a carrying mechanism provided according to an embodiment of the present application;

[0030] Figure 3 A schematic diagram showing a three-dimensional diagram of a partial structure of a carrying mechanism provided according to an embodiment of the present application;

[0031] Figure 4 A schematic diagram showing a three-dimensional diagram of a first bearing member pulled out by a bearing mechanism provided in an embodiment of the present application;

[0032] Figure 5 A schematic diagram showing a three-dimensional view of the first load-bearing member in a pulled-out state;

[0033] Figure 6 A schematic diagram showing a three-dimensional diagram of a first load-bearing member and a second load-bearing member being pulled out together;

[0034] Figure 7 A schematic diagram showing a three-dimensional diagram of the second load-bearing member being pulled out;

[0035] Figure 8 A schematic diagram showing another three-dimensional diagram of the second load-bearing member being pulled out;

[0036] Fig. 9 A schematic diagram showing another three-dimensional diagram of the first load-bearing member and the second load-bearing member being pulled out together;

[0037] Fig.10 A schematic diagram showing a three-dimensional view of a first load bearing member and a first transmission assembly;

[0038] Fig.11 A schematic diagram of a three-dimensional diagram of a first load-bearing member, a second load-bearing member, a reinforcing plate, a test fixture plate and a chip being pulled out together is shown.

[0039] Reference numerals:

[0040] 10-first load-bearing member; 20-second load-bearing member; 30-first transmission assembly; 31-block; 40-second transmission assembly; 50-horizontal drive assembly; 60-locking assembly; 70-base plate; 81-lifting member; 82-cooling assembly; 83-first vertical drive assembly; 84-second vertical drive assembly; 85-linear bearing; 86-column; 91-reinforcement plate; 92-test tooling plate; 93-chip; F1-first horizontal direction; F2-second horizontal direction. DETAILED DESCRIPTION

[0041] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0042] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0043] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0045] According to the first aspect of the embodiment of the present application, a bearing mechanism is provided. Figures 1 to 11 The structure and working principle of the bearing mechanism are described in detail.

[0046] According to the bearing mechanism of the embodiment of the present application, the bearing mechanism is used to set the test fixture plate 92 and the chip 93, the chip 93 is set on the test fixture plate 92, and the bearing mechanism includes a first bearing member 10, a second bearing member 20, a horizontal driving assembly 50 and a locking assembly 60.

[0047] In the embodiment, the first bearing member 10 has a bearing surface, the test fixture plate 92 is arranged on the bearing surface, and the first bearing member 10 and the second bearing member 20 are movably connected to each other. In the embodiment, the first bearing member 10 can move relative to the second bearing member 20, so that the area of ​​the bearing surface where the test fixture plate 92 is arranged is away from the second bearing member 20 in the first horizontal direction F1. The horizontal driving assembly 50 is connected to the second bearing member 20, and the horizontal driving assembly 50 drives the second bearing member 20 and the first bearing member 10 to move along the first horizontal direction F1.

[0048] In an embodiment, the locking assembly 60 is disposed on at least one of the first bearing member 10 and the second bearing member 20 , and the locking assembly 60 detachably connects the first bearing member 10 and the second bearing member 20 to fix the first bearing member 10 to the second bearing member 20 .

[0049] Thus, according to the bearing mechanism provided in the embodiment of the present application, the test fixture plate 92 is arranged on the bearing surface of the first bearing member 10, and the chip 93 is arranged on the test fixture plate 92. In this way, when the chip 93 is tested, if the chip 93 needs to be replaced, the first bearing member 10 can be fixed to the second bearing member 20 by the locking assembly 60 to avoid relative movement between the first bearing member 10 and the second bearing member 20. On the basis of locking the first bearing member 10 and the second bearing member 20, the second bearing assembly is driven to move along the first horizontal direction F1 by the horizontal driving assembly 50, so that the first bearing member 10, the test fixture plate 92 and the chip 93 can move together along the first horizontal direction F1, thereby moving the chip 93 from the original test position to a replaceable position.

[0050] If the test fixture plate 92 needs to be replaced, the first bearing member 10 can be driven to move relative to the second bearing member 20 by utilizing the movable connection relationship between the first bearing member 10 and the second bearing member 20 when the locking assembly 60 is not connected to the first bearing member 10 and the second bearing member 20, so that the area of ​​the bearing surface where the test fixture plate 92 is set is away from the second bearing member 20 in the first horizontal direction F1, so that the test fixture plate 92 is transferred to a position where it can be replaced.

[0051] Since the chip 93 to be tested needs to be replaced frequently, while the test fixture board 92 has a low replacement frequency and does not need to be replaced in the absence of a fault, the carrier mechanism provided in the embodiment of the present application adopts different replacement methods for the different replacement frequencies of the chip 93 and the test fixture board 92, which ensures that the replacement process is carried out conveniently and quickly, and at the same time can ensure the stability of the chip 93 and the test fixture board 92, especially the test fixture board 92.

[0052] In the embodiment, as an example, the first supporting member 10 can move along the first horizontal direction F1 in a translational manner, which enables the area on the supporting surface for setting the test fixture plate 92 to also move along the first horizontal direction F1, thereby realizing the test fixture plate 92 from the test position to the replaceable position.

[0053] In an embodiment, as an example, the first bearing member 10 can also move relative to the second bearing member 20, for example, by rotating around an axis extending in the vertical direction, which can also make a portion of the bearing surface of the first bearing member 10, such as the installation area of ​​the test tooling plate 92, move away from the second bearing member 20 in the first horizontal direction F1.

[0054] That is to say, the installation area of ​​the test fixture plate 92 on the bearing surface of the first bearing member 10 mentioned in the above description moves from the test position to the replaceable position, and the installation area is further away from the test position in the first horizontal direction F1, and its specific movement trajectory to reach the test position is not particularly limited.

[0055] In the embodiment, as an example, the first bearing member 10 and the second bearing member 20 may both be plates.

[0056] According to the bearing mechanism provided in the embodiment of the present application, the first bearing member 10 and the second bearing member 20 can be arranged opposite to each other in the vertical direction, and the bearing mechanism may include a first transmission assembly 30, which can be arranged between the first bearing member 10 and the second bearing member 20. The first transmission assembly 30 can transmit and connect the first bearing member 10 and the second bearing member 20, so that the first bearing member 10 can move relative to the second bearing member 20 along the first horizontal direction F1.

[0057] According to the bearing mechanism provided in the embodiment of the present application, the first bearing member 10 and the second bearing member 20 can be, for example, two plates arranged in layers. For example, in the embodiment, the first bearing member 10 and the second bearing member 20 are arranged opposite to each other in the vertical direction. For example, the first bearing member 10 can be located above the second bearing member 20.

[0058] In an embodiment, the first transmission assembly 30 includes a first transmission member disposed on the first bearing member 10 and a second transmission member disposed on the second bearing member 20, one of the first transmission member and the second transmission member extends along the first horizontal direction F1, and the first transmission member and the second transmission member are slidably matched. As an example, the first transmission member can be, for example, a guide rail, and the second transmission member can be, for example, a slider, and the slider can be provided with a guide groove that matches the corresponding guide rail. As an example, the number of guide rails can be, for example, two, and two sliders can be provided corresponding to each guide rail, and the two sliders can be spaced apart in the first horizontal direction F1.

[0059] According to the supporting mechanism provided in the embodiment of the present application, the supporting mechanism may also include a base plate 70 and a second transmission assembly 40. The horizontal driving assembly 50 may be arranged on the upper side of the base plate 70. The second transmission assembly 40 may transmit and connect the second supporting member 20 and the base plate 70 so that the second supporting member 20 can move relative to the base plate 70 along the first horizontal direction F1.

[0060] In the embodiment, the first transmission assembly 30 and the second transmission assembly 40 can promote the relative movement of the two parts of the structure connected to each other, thereby improving the overall stability of the bearing mechanism. The first transmission assembly 30 and the second transmission assembly 40 may include the same structure. As an example, four guide rails may be provided below the second bearing member 20, and four groups of sliders may be provided corresponding to the four guide rails. Each group of sliders may include two sliders spaced apart in the first horizontal direction F1, and each slider has a guide groove matched with the corresponding guide rail.

[0061] Furthermore, in an embodiment, one end of the guide rail, for example, the rear end of the guide rail may be provided with a stopper 31 having a cross-sectional area larger than that of the guide rail, and the stopper 31 may abut against the end of the corresponding slider to prevent the guide rail from being separated from the slider.

[0062] The bearing mechanism provided by the embodiment of the present application is different from the stacking arrangement of the first bearing member 10 and the second bearing member 20 as described above. Although not shown in the figure, the first bearing member and the second bearing member can be arranged adjacent to each other in the horizontal plane. Here, the arrangement adjacent to each other in the horizontal plane can be understood as that the first bearing member and the second bearing member are flush in the horizontal plane, and the two can be spliced ​​together to form a whole, and the joint between the two can be connected by the locking assembly mentioned in the above description.

[0063] For example, a flange structure protruding in the vertical direction is provided at the joint position of the first load-bearing member and the second load-bearing member, and then fasteners such as bolts are used to penetrate the flange structures respectively located on the first load-bearing member and the second load-bearing member, and then nuts are screwed on the bolts to lock the first load-bearing member and the second load-bearing member into a whole that can move synchronously.

[0064] In an embodiment, as an example, similar to the second transmission assembly in the above example, the second transmission assembly of the example not shown may include a slider and a guide rail, the slider may be arranged on the bottom plate (for example, the slider may be arranged in four groups on the bottom plate, each group of sliders may have two sliders, and each slider has a guide groove that cooperates with the corresponding guide rail), and the guide rail may be arranged below the second bearing member. As an example, on the basis that the first bearing member and the second bearing member are arranged adjacent to each other in the horizontal plane, a guide rail that cooperates with the slider may be further arranged below the first bearing member, and the slider fixed on the bottom plate corresponds to the guide rails on the first bearing member and the second bearing member, and a plurality of sliders may be arranged at intervals along the first horizontal direction F1. In this example, the guide rails on the first bearing member and the second bearing member may be aligned with each other, and the first bearing member may be located on the outside of the second bearing member in the first horizontal direction F1.

[0065] However, without being limited thereto, the first bearing member may be arranged with the second bearing member in a second horizontal direction F2 perpendicular to the first horizontal direction F1 and have a slider having a guide rail independently supported thereon.

[0066] According to the bearing mechanism provided by the embodiment of the present application, the bearing mechanism may further include a hanging component 81, a cooling component 82, a first vertical driving component 83 and a second vertical driving component 84. The cooling component 82 may be disposed on the lower side of the hanging component 81, and the hanging component 81 may be disposed on the upper side of the first bearing member 10. The first vertical driving component 83 and the second vertical driving component 84 are disposed opposite to each other in a second horizontal direction F2 perpendicular to the first horizontal direction F1.

[0067] In the embodiment, the first vertical driving assembly 83 and the second vertical driving assembly 84 are both connected to the hanging component 81 , and the first vertical driving assembly 83 and the second vertical driving assembly 84 both raise and lower the hanging component 81 synchronously.

[0068] According to the bearing mechanism provided in the embodiment of the present application, the first vertical driving assembly 83 and the second vertical driving assembly 84 of the bearing mechanism both synchronously lift and lower the hanging member 81, which makes the movement of the hanging member 81 on both sides in the second horizontal direction F2 the same. Furthermore, when the cooling assembly 82 is arranged horizontally, the movement of the hanging member 81 on both sides in the second horizontal direction F2 is the same, which can at least ensure that the cooling assembly 82 always remains horizontal in the second horizontal direction F2, so that when the cooling assembly 82 contacts the chip 93 to cool the chip 93, the contact between the cooling assembly 82 and the chip 93 in the second horizontal direction F2 is uniform, thereby promoting the cooling effect provided by the cooling assembly 82 in the second horizontal direction F2 to be uniform.

[0069] In the embodiment, the hoisting member 81 may be, for example, a hoisting plate, which may be, for example, a rectangular plate-shaped structure. In the embodiment, four through-hole structures may be respectively provided at the four corners of the hoisting plane, and on this basis, the bearing mechanism may further be provided with columns 86 corresponding to the four through-holes. In the embodiment, the column 86 may be a cylindrical column structure, and the column 86 may be, for example, provided along the vertical direction.

[0070] In the embodiment, the lower end of the column 86 can be connected to the upper surface of the bottom plate 70. In the embodiment, the bearing mechanism can also be provided with four linear bearings 85 corresponding to the four columns 86, respectively. In the embodiment, the linear bearings 85 are inserted into the corresponding through holes, so as to be fixed together with the hoisting plate. The linear bearings 85 can be further sleeved on the outer side of the column 86, and through the linear bearings 85, the hoisting plate is driven by the first vertical driving assembly 83 and the second vertical driving assembly 84 to rise and fall along the column 86.

[0071] In an embodiment, the supporting mechanism may further include a control mechanism, which may be communicatively connected with the first vertical driving assembly 83 , the second vertical driving assembly 84 , and the horizontal driving assembly 50 .

[0072] In an embodiment, the control mechanism can be configured to lock the horizontal drive assembly 50 when both the first vertical drive assembly 83 and the second vertical drive assembly 84 drive the lifting member 81, and can be configured to lock both the first vertical drive assembly 83 and the second vertical drive assembly 84 when the horizontal drive assembly 50 drives the second supporting member 20.

[0073] Thus, according to the supporting mechanism provided in the embodiment of the present application, the above setting method is used to interlock the first vertical drive assembly 83 and the second vertical drive assembly 84 with the horizontal drive assembly 50, so that when the first vertical drive assembly 83 and the second vertical drive assembly 84 drive the cold plate assembly to descend to press the chip 93 to be tested, the horizontal drive assembly 50 is locked to prevent the chip 93 from shifting, thereby ensuring the precise fit between the cold plate assembly and the chip 93. In an embodiment, the control mechanism can be, for example, a PLC (Programmable Logic Controller) or a PC (Personal Computer).

[0074] According to the bearing mechanism provided in the embodiment of the present application, the bearing mechanism may further include a sensing element and a control mechanism, and the sensing element is in communication connection with the control mechanism. In the embodiment, the sensing element may be disposed on the lower side of the hanging member 81, and the sensing element may be configured to have a sensing range located below the sensing element, and the sensing element may also be configured to transmit a sensing signal to the control mechanism when an external object enters the sensing range, and the control mechanism is configured to issue an alarm.

[0075] In this way, according to the supporting mechanism provided in the embodiment of the present application, the sensing element can prompt the control mechanism by identifying obstacles within the sensing range below the sensing element, such as the operator's fingers, so that the control mechanism issues an alarm, thereby reminding the operator to deal with it in time to avoid the operator's fingers being crushed.

[0076] According to the above description, the bearing mechanism will be described in more detail below. In the embodiment, the first vertical drive assembly 83 and the second vertical drive assembly 84 can both be servo-driven. Specifically, taking the first vertical drive assembly 83 as an example, the first vertical drive assembly 83 can include a servo motor and an electric cylinder, which are used in combination. The cylinder rod of the electric cylinder can be connected to the bottom of the hoisting plate, and the servo motor and the electric cylinder can be installed above the bottom plate 70.

[0077] Similarly, the second vertical drive assembly 84 can also be configured in this way. In the embodiment, the first vertical drive assembly 83 and the second vertical drive assembly 84 essentially form a process of "retracting" and "extending" pressure by the dual servo motors, and the action of pulling the lifting plate is realized by retracting and extending the electric cylinder, thereby driving the lifting plate equipped with the cold plate kit to perform lifting and lowering movements. This lifting and lowering movement enables the chip 93 module to be fitted with pressure when the lifting plate is lowered. Here, the same pulse drive signal is used to enable the two servo motors to be synchronously controlled, thereby exerting force evenly. In addition, the two servo motors are manually controlled to facilitate the placement and removal of the test chip 93.

[0078] In an embodiment, the locking assembly 60 can be fixed on the front side of the upper plate (i.e., the first load-bearing member 10). For example, the locking assembly 60 may include a mounting plate connected to the front side. A hole with an internal thread is provided at a corresponding position of the middle plate (i.e., the second load-bearing member 20). The locking assembly 60 may also include a bolt with a knob. The bolt is rotatably mounted on the mounting plate. When the screw is screwed into the hole with the internal thread, the bolt can fix the middle plate and the upper plate. During the testing of the chip 93, the upper plate and the middle plate locked together are driven by the horizontal driving assembly 50 to move along the first horizontal direction F1, so that the test chip 93 can be taken in and placed.

[0079] In an embodiment, when the connection between the locking assembly 60 and the upper and middle plates is released, the upper plate can be pulled and pulled manually and mechanically (an extremely low frequency operation), and can be pushed in or pulled out horizontally in one go, so as to realize the installation and placement of the test tooling plate 92.

[0080] In the embodiment, as mentioned in the above description, a chip to be tested 93 module is placed above the upper plate, and the chip to be tested 93 module includes a reinforcing plate 91, a test fixture plate 92 and a test chip 93. The reinforcing plate 91 covers the upper plate and is used to fix the test fixture plate 92. The test fixture plate 92 is a program running mainboard to ensure the normal operation of the chip to be tested 93. It does not need to be replaced when there is no fault, and only needs to be replaced when a fault occurs. Therefore, under normal circumstances, only a motor is required to automatically drive the middle plate and the upper plate to move together to replace the chip to be tested 93. In the embodiment, the pull-out structure of the double-layer plate adopts a combination of automatic and manual methods to pull out the frequently replaced chips to be tested 93 and the low-frequency replaced test fixture plate 92 in layers, which not only ensures the convenience and speed of the entire operation process, but also ensures the stability of the heat dissipation equipment.

[0081] In an embodiment, the supporting mechanism provided according to the embodiment of the present application is mainly used to realize heat dissipation of the AI ​​chip 93 in a limited space. The implementation background of the heat dissipation device is that the limited distance between the base plate 70 and the lifting plate is 300 mm, and the heat dissipation cold plate kit and the AI ​​chip 93 module to be dissipated are arranged in a limited space. The heat dissipation cold plate kit needs to be pulled up and lowered by the electric cylinder drive as described above to fit the AI ​​chip 93 module for heat dissipation, and the AI ​​chip 93 to be dissipated needs to be replaced regularly.

[0082] In an embodiment, the heat dissipation cold plate kit can be installed in the middle position of the hoisting plate by means of screws or the like. On the left and right sides of the front view direction of the bearing mechanism provided according to the embodiment of the present application, in the middle position of the two columns 86, as mentioned in the above description, two motors and servo electric cylinders are fixed in the vertical direction to jointly drive the cold plate kit to vertically transmit, and the electric cylinder retracts to finally complete the bonding pressure application to the chip 93 module through the pulling action. The two servo electric cylinders can achieve synchronous control through the same driving pulse signal, and the stroke accuracy is plus or minus 0.02mm. The two servo electric cylinders can synchronously retract to provide a pressure of 50kg. The servo electric cylinder can be, for example, an existing standard part, and the servo electric cylinder stroke parameter can be, for example, 50mm. The cold plate kit can make the electric cylinder retract to the lower limit when it is bonded with the chip 93. The vertical height of the electric cylinder can be 250mm, and when the cold plate kit is separated and returned to its original position from the chip 93, the vertical height of the electric cylinder is 285mm. According to the second aspect of the embodiment of the present application, a test device is provided, the test device includes the above bearing mechanism, and also has the above beneficial effects, which will not be repeated here.

[0083] The above are only preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. All equivalent structural changes made by using the contents of the present application specification and drawings under the innovative concept of the present application, or directly / indirectly applied in other related technical fields are included in the protection scope of the present application.

Claims

1. A bearing mechanism, characterized in that: The bearing mechanism is used to set the test fixture board and the chip, the chip is set on the test fixture board, and the bearing mechanism includes: a first bearing member and a second bearing member, wherein the first bearing member has a bearing surface, the test fixture plate is arranged on the bearing surface, and the first bearing member and the second bearing member are movably connected to each other; Wherein, the first bearing member is movable relative to the second bearing member, so that the area of ​​the bearing surface where the test fixture plate is arranged is away from the second bearing member in a first horizontal direction; a horizontal driving assembly, the horizontal driving assembly being connected to the second bearing member, and the horizontal driving assembly driving the second bearing member and the first bearing member to move along the first horizontal direction; A locking assembly is provided on at least one of the first bearing member and the second bearing member, and the locking assembly is detachably connected to the first bearing member and the second bearing member to fix the first bearing member to the second bearing member.

2. The supporting mechanism according to claim 1, characterized in that: The first bearing member and the second bearing member are arranged opposite to each other in the vertical direction, and the bearing mechanism includes a first transmission component, which is arranged between the first bearing member and the second bearing member, and the first transmission component transmission connects the first bearing member and the second bearing member so that the first bearing member can move along the first horizontal direction relative to the second bearing member.

3. The supporting mechanism according to claim 2, characterized in that: The first bearing member and the second bearing member are arranged opposite to each other in a vertical direction, and the first transmission assembly is located between the first bearing member and the second bearing member.

4. The supporting mechanism according to claim 2, characterized in that: The first transmission assembly includes a first transmission member arranged on the first bearing member and a second transmission member arranged on the second bearing member, one of the first transmission member and the second transmission member extends along the first horizontal direction, and the first transmission member and the second transmission member are slidably matched.

5. The supporting mechanism according to claim 1, characterized in that: The bearing mechanism also includes a base plate and a second transmission assembly, the horizontal drive assembly is arranged on the upper side of the base plate, and the second transmission assembly transmission-connects the second bearing member and the base plate so that the second bearing member can move relative to the base plate along the first horizontal direction.

6. The supporting mechanism according to claim 1, characterized in that: The first bearing member and the second bearing member are disposed adjacent to each other in a horizontal plane.

7. The supporting mechanism according to claim 1, characterized in that: The carrying mechanism also includes: A hanging member and a cooling assembly, wherein the cooling assembly is arranged at the lower side of the hanging member, and the hanging member is arranged at the upper side of the first bearing member; a first vertical driving assembly and a second vertical driving assembly, wherein the first vertical driving assembly and the second vertical driving assembly are arranged opposite to each other in a second horizontal direction perpendicular to the first horizontal direction; Wherein, the first vertical driving assembly and the second vertical driving assembly are both connected to the hanging component, and the first vertical driving assembly and the second vertical driving assembly both synchronously lift and lower the hanging component.

8. The supporting mechanism according to claim 7, characterized in that: The carrying mechanism further comprises a control mechanism, wherein the control mechanism is communicatively connected with the first vertical drive assembly, the second vertical drive assembly and the horizontal drive assembly; The control mechanism is configured to lock the horizontal drive assembly when the first vertical drive assembly and the second vertical drive assembly drive the lifting member, and is configured to lock the first vertical drive assembly and the second vertical drive assembly when the horizontal drive assembly drives the second load-bearing member.

9. The supporting mechanism according to claim 7, characterized in that: The bearing mechanism further includes a sensing element and a control mechanism, wherein the sensing element is in communication connection with the control mechanism, and the control mechanism is in communication connection with both the first vertical driving assembly and the second vertical driving assembly; Wherein, the sensing element is arranged below the lifting component, and the sensing element is configured to have a sensing range located below the sensing element. The sensing element is also configured to transmit a sensing signal to the control mechanism when an external object enters the sensing range, and the control mechanism is configured to issue an alarm.

10. A testing device, characterized in that: The testing device comprises the supporting mechanism according to any one of claims 1 to 9.

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