Lamp tube detection structure of lamp annealing machine

Abstract

The invention discloses a lamp tube detection structure of a lamp annealing machine, which comprises a lamp module and a power supply end electrically connected with the lamp module, the lamp module comprises a mounting plate and an end cover matched with the mounting plate, at least one lamp group is mounted on the mounting plate, and a detection module is arranged on a loop of the lamp group and the power supply end. By means of the mode, the aging degree of the lamp tube filament can be detected, the lower the current is, the lamp tube can be replaced when the lamp tube is seriously aged, the state of the lamp tube is detected in real time, and the problem point of the process uniformity problem can be found out through the current of the lamp tube.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a lamp tube detection structure of a lamp annealing machine. Background Art

[0002] In recent years, lamp annealing devices that can achieve rapid heating and cooling have been used to form oxide films or nitride films on semiconductor wafers. AMAT centura fast lamp annealing machines are widely used due to their fast temperature rise / fall, good uniformity, and short time. However, its characteristic problems include high heating temperature, fast heating rate, and a large number of wafers. Repeated pressure on the filament will cause the lamp to age and damage quickly, and the replacement frequency is high.

[0003] When the filament of a lamp is damaged, the machine will give a prompt. For example, if the lamps in the important inner zone are damaged (1-2 groups), the machine will not be able to operate directly. The outer zone will display red. When a certain number (3 groups) are damaged, an alarm will be generated and the machine will not be able to operate. Every time a damaged lamp is replaced, another lamp will be damaged. Although the filaments of those lamps are not broken, they have aged severely and cannot be used for a long time, which affects their heating speed. The aging problem cannot be confirmed by the naked eye, which will increase the number of equipment maintenance and machine stability, and reduce machine uptime. Summary of the invention

[0004] The main technical problem solved by the present invention is to provide a lamp tube detection structure for a lamp annealing machine, which can improve the real-time detection of the lamp tube status, and the process uniformity problem can also be detected through the current to find out the problem point.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a lamp tube detection structure of a lamp annealing machine, including a lamp module and a power supply end electrically connected thereto, the lamp module including a mounting plate and an end cover mounted therewith, at least one lamp group mounted on the mounting plate, and a detection module is arranged on the circuit between the lamp group and the power supply end. The present application detects the aging degree of the filament of the lamp tube in the lamp group through the detection module, and the lower the current, the more serious the aging of the filament of the lamp tube, so as to realize real-time detection of the status of the lamp tube in the lamp group, reduce the number of equipment maintenance, and improve the machine operation time.

[0006] The device further comprises a warning module, to which the detection module transmits a signal. When the detection module detects that the current of the lamp is abnormal, the signal is transmitted to the warning module, and the warning module prompts the operator to replace the lamp.

[0007] The lamp assembly is covered with a lampshade, and a sealing module is installed on the outer port of the lampshade.

[0008] The sealing module comprises a clamping ring and a window, and the window is fixed to the outer port of the lampshade through the clamping ring.

[0009] A sealing member is installed between the lampshade and the clamping ring.

[0010] It also includes a working module matched with the lamp module, the working module includes a chamber bottom plate, a downwardly concave reflection chamber is arranged on the chamber bottom plate, and the shape of the reflection chamber is the same as that of the lampshade.

[0011] A plurality of lamp tubes are installed on the installation plate, and the lamp tubes are arranged in a honeycomb shape.

[0012] At least one circle of the lamp tubes is a lamp group, and each lamp group is connected to a detection module. Since the detection module is connected to each lamp group, the current change of each lamp group can be monitored separately, and all the lamp tubes do not need to be replaced.

[0013] The detection module includes a lamp current meter. It can detect the aging degree of the lamp filament. The lower the current, the more serious the aging of the lamp, and the lamp can be replaced. The lamp status can be detected in real time, and the process uniformity problem can also be found out through the current.

[0014] The detection module further comprises a lamp current display, and the lamp current display is electrically connected to the lamp current meter.

[0015] The beneficial effects of the present invention are as follows: the lamp tube detection structure of the lamp annealing machine of the present invention can detect the status of the lamp tube in real time, and the problem of process uniformity can also be found out through the current. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a lamp tube detection structure of a lamp annealing machine of the present invention;

[0017] Figure 2 It is an exploded view of a lamp module of a lamp tube detection structure of a lamp annealing machine of the present invention;

[0018] Figure 3 It is a structural diagram of a lamp group of a lamp tube detection structure of a lamp annealing machine of the present invention;

[0019] Figure 4 It is a distribution diagram of a lamp group of a lamp tube detection structure of a lamp annealing machine of the present invention;

[0020] Figure 5 It is a structural schematic diagram of a lamp annealing machine of the present invention. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the present invention clearer, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the present invention shown in the accompanying drawings and described according to the accompanying drawings are merely exemplary, and the present invention is not limited to these embodiments.

[0022] It should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the solutions according to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0023] Also, in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0024] See also Figures 1 to 5 The embodiment of the present invention includes: a lamp tube detection structure of a lamp annealing machine, including a lamp module 1 and a power supply terminal 2 electrically connected thereto, the lamp module 1 including a mounting plate 11 and an end cover 12 mounted thereto, at least one lamp group 13 is mounted on the mounting plate 11, and a detection module 3 is arranged on the circuit between the lamp group 13 and the power supply terminal 2. The present application detects the aging degree of the lamp filament in the lamp group through the detection module, and the lower the current, the more serious the aging of the lamp filament, so as to realize real-time detection of the lamp status in the lamp group, reduce the number of equipment maintenance, and improve the machine operation time.

[0025] The device further comprises a warning module, to which the detection module transmits a signal. When the detection module detects that the current of the lamp is abnormal, the signal is transmitted to the warning module, and the warning module prompts the operator to replace the lamp.

[0026] The lamp assembly 13 is covered with a lampshade 14 , and a sealing module is installed at an outer port of the lampshade.

[0027] The sealing module includes a clamping ring 15 and a window 16 , and the window 16 is fixed to the outer port of the lampshade 14 through the clamping ring 15 .

[0028] A sealing member 17 is installed between the lampshade 14 and the clamping ring 15 .

[0029] Specifically, a seal 17 is installed between the window and the clamping ring.

[0030] More specifically, the seal is an O-ring. Since the O-rings are arranged between the lampshade, the clamping ring and the window, the sealing of the lamp module is ensured. The window is a quartz window, which has high temperature resistance, low expansion coefficient, thermal shock resistance, chemical stability, good electrical insulation performance, and good light transmittance.

[0031] It also includes a working module matched with the lamp module, the working module includes a chamber bottom plate 4, a downwardly concave reflection chamber 5 is arranged on the chamber bottom plate 4, and the shape of the reflection chamber is the same as that of the lampshade.

[0032] See also Figure 3 , Figure 4 , the mounting plate is a circular plate, and a plurality of lamp tubes 131 are mounted on the mounting plate 11, and the lamp tubes are arranged in a honeycomb shape. When the present application is implemented, the arrangement of the lamp tubes can be in a variety of forms, and the final form presented is a honeycomb shape. Embodiment 1: Specifically, the first lamp tube is installed at the center of the mounting plate 11, and the external lamp tubes are sequentially diffused around multiple circles of lamp tubes. For example: the second circle is 6 lamp tubes surrounding the outer periphery of the first lamp tube, the third circle is 12 lamp tubes surrounding the outer periphery of the second circle of lamp tubes, and so on. The plurality of lamp tubes are distributed on the mounting plate in a honeycomb shape. In another embodiment 2, the first lamp tube is installed in the outermost circle, 3 lamp tubes are installed in the first row, 8 lamp tubes are installed in the second row, and 9 lamp tubes are installed in the third row. They are arranged in a row on the mounting plate, and so on. The plurality of lamp tubes are distributed on the mounting plate in a honeycomb shape.

[0033] The lamp tube arrangement method of the present application adopts the embodiment 1, at least one circle of the lamp tubes is a group of lamps, and each group of lamps is connected to a detection module. Since the detection module is connected to each group of lamps, the current change of each group of lamps can be monitored separately, and there is no need to replace all the lamp tubes. Specifically, all the lamp tubes are divided into 12 zones, the first zone is the first lamp tube located at the center of the mounting plate; the second zone is the 6 lamp tubes of the second circle; the third zone is the 12 lamp tubes of the third circle; the fourth zone is the 18 lamp tubes of the fourth circle; the fifth circle has 24 lamp tubes, of which 18 lamp tubes are in the fifth zone, and 6 lamp tubes are in the sixth zone. The lamp tubes in the sixth zone are arranged in the fifth zone at intervals, and the specific spacing method is that every 3 lamp tubes in the fifth zone are separated by 1 lamp tube in the sixth zone; the sixth circle has 36 lamp tubes, of which 24 lamp tubes are in the 7th zone, 12 lamp tubes are in the 8th zone, and the lamp tubes in the 8th zone are spaced in the 7th zone. The specific spacing is that there is one lamp tube in the 8th zone between every 4 lamp tubes in the 7th zone. The 7th circle has 42 lamp tubes, of which 12 lamp tubes are in the 9th zone and 30 lamp tubes are in the 10th zone. The lamp tubes in the 10th zone are distributed in a regular pattern of 3, 2, 3... intervals. The lamp tubes in the 9th zone are set at the intervals in the 10th zone. The 8th circle is the 11th zone, and the 9th circle is the 12th zone.

[0034] More specifically, two lamps in each zone form a group, and each group is connected to a detection module. Since the detection module is connected to each lamp group, the current change of each lamp group can be monitored separately, and all lamps do not need to be replaced.

[0035] The detection module includes a lamp current meter. It can detect the aging degree of the lamp filament. The lower the current, the more serious the aging of the lamp, and the lamp can be replaced. The lamp status can be detected in real time, and the process uniformity problem can also be found out through the current.

[0036] The detection module also includes a lamp current display, which is electrically connected to the lamp current meter, and can detect the current value of each lamp in each group of each zone at any time, and determine the aging degree of the lamp according to the change of the current value.

[0037] According to the process requirements of the annealing lamp, when the filament of the lamp tube is damaged, the machine equipment will have a prompt. For example, when the lamp tubes in the important area of ​​the inner circle are damaged (1-2 groups), they will not be able to operate directly. The outer circle will display red. When a certain number (3 groups) are reached, an alarm will be generated and the operation will not be possible. Every time the damaged lamp tubes are replaced, other lamp tubes will be damaged again. Although the filaments of those lamp tubes are not broken, they have aged severely and cannot be used for a long time, which affects their heating speed. The aging problem cannot be confirmed by the naked eye, which will increase the number of equipment maintenance and machine stability and reduce the machine operation time. When the temperature of the present application is raised to the set temperature by applying different voltages, it is only necessary to observe the current comparison of each group in each zone. When the current value of one or more groups of lamp tubes changes, the specific location of the one or more groups of lamp tubes can be determined. It is only necessary to replace the problematic and aged lamp tubes without replacing all the lamp tubes.

[0038] The lamp tube detection structure of the lamp annealing machine of the present invention is provided with a lamp tube current meter at the power supply end of the SCR lamp to detect the aging degree of the lamp tube filament. The lower the current, the more serious the aging of the lamp tube, and the more serious the aging of the lamp tube, the more likely it is that the lamp tube will be replaced. The lamp tube status can be detected in real time, and the process uniformity problem can also be found out through the current.

[0039] In addition, it should be noted that in this specification, "includes", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0040] It should be understood that although this specification is described according to implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A lamp tube detection structure for a lamp annealing machine, characterized in that: It includes a lamp module and a power supply end electrically connected thereto, the lamp module includes a mounting plate and an end cover mounted therewith, at least one lamp group is mounted on the mounting plate, and a detection module is arranged on the loop between the lamp group and the power supply end.

2. The lamp tube detection structure of the lamp annealing machine according to claim 1, characterized in that: It also includes a warning module, and the detection module transmits a signal to the warning module.

3. The lamp tube detection structure of the lamp annealing machine according to claim 1, characterized in that: The lamp assembly is covered with a lampshade, and a sealing module is installed on the outer port of the lampshade.

4. The lamp tube detection structure of the lamp annealing machine according to claim 3, characterized in that: The sealing module comprises a clamping ring and a window, and the window is fixed to the outer port of the lampshade through the clamping ring.

5. The lamp tube detection structure of the lamp annealing machine according to claim 4, characterized in that: A sealing member is installed between the lampshade and the clamping ring.

6. The lamp tube detection structure of the lamp annealing machine according to claim 3, characterized in that: It also includes a working module matched with the lamp module, the working module includes a chamber bottom plate, a downwardly concave reflection chamber is arranged on the chamber bottom plate, and the shape of the reflection chamber is the same as that of the lampshade.

7. The lamp tube detection structure of the lamp annealing machine according to claim 1, characterized in that: A plurality of lamp tubes are installed on the installation plate, and the lamp tubes are arranged in a honeycomb shape.

8. The lamp tube detection structure of the lamp annealing machine according to claim 7, characterized in that: At least one circle of the lamp tubes constitutes a zone, two lamp tubes in a zone constitute a group, and each zone lamp group is respectively connected to one of the detection modules.

9. The lamp tube detection mechanism of the lamp annealing machine according to claim 8, characterized in that: The detection module includes a lamp current meter.

10. The lamp tube detection mechanism of the lamp annealing machine according to claim 9, characterized in that: The detection module further comprises a lamp current display, and the lamp current display is electrically connected to the lamp current meter.

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