Efficient single-machine double-side exposure equipment

Abstract

The invention discloses efficient single-machine double-side exposure equipment which comprises a base, an exposure assembly, a substrate carrying table and two plate turning assemblies. The exposure assembly is arranged above the base. The substrate carrying table is arranged between the base and the exposure assembly, is used for adsorbing a to-be-exposed part, and can move along the length direction of the base; the two plate overturning assemblies are arranged between the substrate carrying table and the exposure assembly, each plate overturning assembly comprises a suction cup part and a connecting rod, the suction cup parts are rotationally connected with the connecting rods, and the connecting rods can move in the width direction of the base. The rotation directions of the two suction cup pieces of the two turning plate assemblies are opposite. According to the high-efficiency single-machine double-sided exposure equipment disclosed by the invention, through the cooperation of the two plate turnover assemblies, high-efficiency single-machine double-sided exposure of the to-be-exposed part is realized, additional equipment such as a transplanter and a plate turnover machine is not needed, the cost of the exposure equipment is reduced, meanwhile, the number of exposure assembly lines is reduced, the productivity of the exposure equipment is improved, and the production efficiency of the exposure equipment is improved. And the occupied area of the exposure equipment is also reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure equipment, and in particular to a high-efficiency single-machine double-sided exposure equipment. Background Art

[0002] Double-sided exposure automatic lines usually use two exposure machines plus a transplanter, a flipper, a dust collector, and other equipment such as loading and unloading. One exposure machine exposes the front side, and the other exposes the back side to complete double-sided exposure. In related technologies, in order to achieve fast double-sided exposure on a single-table exposure machine, additional equipment such as a transplanter and a flipper is often added to or near the single-table exposure machine. However, additional equipment such as a transplanter and a flipper increases the cost of double-sided exposure. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a high-efficiency single-machine double-sided exposure device, which is conducive to reducing the cost of the exposure device, while reducing the exposure line group, improving the production capacity of the exposure device, and reducing the floor space of the exposure device.

[0004] According to an embodiment of the present invention, a high-efficiency single-machine double-sided exposure device includes: a base; an exposure component, which is arranged above the base; a substrate carrier, which is arranged between the base and the exposure component and is used to absorb the workpiece to be exposed, and the substrate carrier is movable along the length direction of the base; two flip plate assemblies, both of which are arranged between the substrate carrier and the exposure component, each of which includes a suction cup member and a connecting rod, the suction cup member is rotatably connected to the connecting rod, and the connecting rod is movable along the width direction of the base; wherein the rotation directions of the two suction cup members of the two flip plate assemblies are opposite.

[0005] According to the high-efficiency single-machine double-sided exposure equipment of the embodiment of the present invention, through the cooperation of two flip-plate assemblies, high-efficiency single-machine double-sided exposure of the workpiece to be exposed is achieved, and no additional equipment such as transplanters and flip-plate machines is required, which is beneficial to reducing the cost of the exposure equipment, while reducing the exposure line group, improving the production capacity of the exposure equipment, and reducing the floor space occupied by the exposure equipment.

[0006] According to some embodiments of the present invention, the two side surfaces of the piece to be exposed in the thickness direction of the base are respectively the front and the back, and the two suction cup members are respectively the first suction cup member and the second suction cup member; during the front exposure process, the substrate carrier adsorbs the back and moves to the bottom of the exposure component for front exposure; during the process of switching from the front exposure to the back exposure, after the first suction cup member rotates to be parallel to the substrate carrier and adsorbs the front, the first suction cup member rotates to be parallel to the second suction cup member, the second suction cup member adsorbs the back and rotates to be parallel to the substrate carrier, and the substrate carrier adsorbs the front and moves to the bottom of the exposure component for the back exposure.

[0007] According to some embodiments of the present invention, the suction cup component includes a main body, which is rotatably connected to the connecting rod; a plurality of suction rods, which are arranged on the main body at intervals, each of the suction rods is a hollow structure, and one end of each of the suction rods is suitable for connecting with a vacuum device; wherein, when the plurality of suction rods are vacuumed, the plurality of suction rods adsorb the workpiece to be exposed.

[0008] According to some embodiments of the present invention, a plurality of through holes are formed on the body, and the plurality of through holes are arranged in an array.

[0009] According to some embodiments of the present invention, the high-efficiency single-machine double-sided exposure equipment also includes a plurality of support members, wherein the plurality of support members are respectively arranged on both sides of the width direction of the base, and each of the support members extends along the thickness direction of the base; a first guide member, wherein the first guide member is connected to the plurality of support members, a first slide groove is formed on one of the first guide member and the connecting rod, and a first slide rail is provided on the other of the first guide member and the connecting rod, and the first slide rail is slidably matched with the first slide groove.

[0010] According to some embodiments of the present invention, one end of the plurality of support members away from the base is connected to a connecting plate, and the first guide member is connected to the connecting plate.

[0011] According to some embodiments of the present invention, the connecting plate is located below the exposure assembly, a plurality of exposure holes are formed on the connecting plate, and the exposure assembly includes a plurality of exposure heads, and the plurality of exposure heads correspond one-to-one to the plurality of exposure holes.

[0012] According to some embodiments of the present invention, a second slide groove is formed on one of the base and the substrate carrier, and a second slide rail is provided on the other of the base and the substrate carrier, and the second slide rail is slidably matched with the second slide groove.

[0013] According to some embodiments of the present invention, a conveyor belt is provided on a side of the base adjacent to the substrate stage, the conveyor belt extends along the length direction of the base, and the conveyor belt is connected to the substrate stage.

[0014] According to some embodiments of the present invention, a gas channel is formed on the substrate carrier, and one end of the gas channel is suitable for being connected to a vacuum pumping device; wherein when the gas channel is evacuated, the substrate carrier absorbs the workpiece to be exposed.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 is a schematic diagram of an exposure device according to an embodiment of the present invention; Figure 2 is a schematic diagram of an exposure device according to an embodiment of the present invention, wherein a first suction cup member absorbs a workpiece to be exposed; Figure 3 is a schematic diagram of an exposure device according to an embodiment of the present invention, wherein the first suction cup member is parallel to the second suction cup member; Figure 4 is a schematic diagram of an exposure apparatus according to an embodiment of the present invention, wherein the second suction cup member is parallel to the substrate stage.

[0017] Reference numerals: 100: exposure equipment; 1: base; 11: second slide rail; 12: conveyor belt; 2: exposure assembly; 21: exposure head; 3: substrate stage; 31: gas channel; 4: flip plate assembly; 41: suction cup member; 411: first suction cup member; 412: second suction cup member; 413: body; 4131: through hole; 414: suction rod; 42: connecting rod; 5: support member; 6: first guide member; 61: first slide rail; 7: connecting plate; 200: piece to be exposed; 201: front side; 202: back side. DETAILED DESCRIPTION

[0018] Reference below Figure 1-Figure 4 A high-efficiency single-machine double-sided exposure apparatus 100 according to an embodiment of the present invention is described.

[0019] like Figure 1-Figure 4 As shown, a high-efficiency single-machine double-sided exposure device 100 according to an embodiment of the present invention includes a base 1, an exposure component 2, a substrate carrier 3 and two flip plate components 4.

[0020] Specifically, the exposure assembly 2 is disposed above the base 1 (for example, Figure 1 The substrate carrier 3 is disposed between the base 1 and the exposure assembly 2 and is used to absorb the exposed object 200. The substrate carrier 3 extends along the length direction of the base 1 (for example, Figure 1 The two flip plate assemblies 4 are arranged between the substrate stage 3 and the exposure assembly 2, and each flip plate assembly 4 includes a suction cup member 41 and a connecting rod 42, the suction cup member 41 is rotatably connected to the connecting rod 42, and the connecting rod 42 is along the width direction of the base 1 (for example, Figure 1 The two suction cup members 41 of the two flap assemblies 4 rotate in opposite directions.

[0021] For example, in Figure 1-Figure 4 In the example, a substrate stage 3 and an exposure assembly 2 are arranged on the base 1 from bottom to top. The side of the substrate stage 3 facing the exposure assembly 2 can adsorb the object to be exposed 200, which increases the stability of the arrangement of the object to be exposed 200 on the substrate stage 3, and facilitates the relative position of the object to be exposed 200 and the exposure assembly 2 to complete the exposure process.

[0022] The substrate carrier 3 can be moved along the length direction of the base 1 toward the exposure component 2 until the exposure component 2 is opposite to the object 200 to be exposed to complete the exposure; or the substrate carrier 3 can be moved along the length direction of the base 1 to be away from the exposure component 2 to facilitate operations such as flipping the object 200 to be exposed on the substrate carrier 3.

[0023] The two flip plate assemblies 4 are both arranged between the substrate carrier 3 and the exposure assembly 2, so that after the two flip plate assemblies 4 perform the flip operation on the exposure piece 200, the exposure piece 200 can still fall on the side of the substrate carrier 3 facing the exposure assembly 2, so as to facilitate the exposure assembly 2 to perform the exposure operation on the other side of the exposure piece 200.

[0024] One end of the connecting rod 42 of each flap assembly 4 is connected to the suction cup component 41, and the suction cup component 41 can absorb the to-be-exposed piece 200, and the suction cup component 41 can be moved along the width direction of the base 1 under the drive of the connecting rod 42, so as to realize the suction cup or the suction cup and the to-be-exposed piece 200 to move along the width direction of the base 1 as a whole, that is, the suction cup or the suction cup and the to-be-exposed piece 200 to move as a whole in a direction away from the center of the base 1 or towards the center of the base 1.

[0025] At the same time, the suction cup member 41 is rotatably connected to the connecting rod 42, and the rotation directions of the two suction cup members 41 of the two flip plate assemblies 4 are opposite. For example, when the suction cup member 41 of one flip plate assembly 4 can be rotated 90 degrees forward, the suction cup member 41 of the other flip plate assembly 4 can be reversed 90 degrees. No specific limitation is made here. Therefore, it is convenient to exchange the workpiece 200 to be exposed between the suction cup members 41 of the two flip plate assemblies 4.

[0026] When the object 200 to be exposed is sucked on the suction cup member 41, the two suction cup members 41 of the two flip plate assemblies 4 can be rotated to be parallel to complete the handover of the object 200 to be exposed, and then the flipped surface of the object 200 to be exposed is placed on the substrate stage 3 by rotating the suction cup member 41. When the exposure assembly 2 is performing exposure, the suction cup member 41 can be driven by the connecting rod 42 to move away from the substrate stage 3, and the suction cup member 41 can be rotated to be perpendicular to the plane on which the object 200 to be exposed is placed on the substrate stage 3, thereby preventing the flip plate assembly 4 from interfering with the exposure operation.

[0027] Therefore, through the cooperation of the two flip-plate assemblies 4, the exposure equipment 100 can realize efficient single-machine double-sided exposure of the exposure piece 200, without the need for additional equipment such as transplanters and flip-plate machines, which is beneficial to reducing the cost of the exposure equipment 100, while reducing the exposure line, improving the production capacity of the exposure equipment 100, and reducing the floor space occupied by the exposure equipment 100.

[0028] According to the embodiment of the present invention, the efficient single-machine double-sided exposure equipment 100 realizes the efficient single-machine double-sided exposure of the to-be-exposed workpiece 200 through the cooperation of the two flip plate assemblies 4, and does not require additional equipment such as transplanters and flip plate machines, which is beneficial to reducing the cost of the exposure equipment 100, while reducing the exposure line, improving the production capacity of the exposure equipment 100, and also reducing the floor space occupied by the exposure equipment 100.

[0029] According to some embodiments of the present invention, referring to Figure 1-Figure 4 , the two side surfaces of the exposed member 200 in the thickness direction of the base 1 are respectively the front side 201 and the back side 202, and the two suction cup members 41 are respectively the first suction cup member 411 and the second suction cup member 412. During the front exposure process, the substrate stage 3 absorbs the back side 202 and moves to the bottom of the exposure assembly 2 for front exposure. During the process of switching from the front exposure to the back exposure, after the first suction cup member 411 rotates to be parallel to the substrate stage 3 and absorbs the front side 201, the first suction cup member 411 rotates to be parallel to the second suction cup member 412, the second suction cup member 412 absorbs the back side 202 and rotates to be parallel to the substrate stage 3, the substrate stage 3 absorbs the front side 201 and moves to the bottom of the exposure assembly 2 for back exposure.

[0030] That is to say, referring to Figure 1 The substrate stage 3 moves along the width direction of the base 1 until the object 200 to be exposed adsorbed on the substrate stage 3 and the exposure assembly 2 are opposite to each other and the front exposure of the object 200 to be exposed is completed. Figure 2 When the substrate carrier 3 moves away from the exposure assembly 2 with the object to be exposed 200, the first suction cup member 411 rotates to face the front surface 201 to be adsorbed on the front surface 201 of the object to be exposed 200. Figure 3The first suction cup member 411 moves along the width direction of the base 1 to approach the second suction cup member 412, the first suction cup member 411 rotates to be parallel to the second suction cup member 412, the second suction cup member 412 is adsorbed on the back side 202 of the object to be exposed 200, and the first suction cup member 411 releases the object to be exposed 200. Figure 4 , and then the second suction cup member 412 rotates to be parallel to the substrate stage 3, and the member to be exposed 200 corresponds to the substrate stage 3. The member to be exposed 200 is exchanged from the second suction cup member 412 to the substrate stage 3, and the substrate stage 3 is adsorbed on the front side 201 of the member to be exposed 200, so that the back side 202 of the member to be exposed 200 faces the exposure assembly 2. The substrate stage 3 moves along the width direction of the base 1 until the member to be exposed 200 adsorbed on the substrate stage 3 is opposite to the exposure assembly 2 to complete the back exposure of the member to be exposed 200. As a result, the exposure device 100 realizes efficient single-machine double-sided exposure of the member to be exposed 200.

[0031] Furthermore, the suction cup member 41 includes a main body 413 and a plurality of suction rods 414. The main body 413 is rotatably connected to the connecting rod 42. In the description of the present invention, "plurality" means two or more. The plurality of suction rods 414 are arranged on the main body 413 at intervals, each suction rod 414 is a hollow structure, and one end of each suction rod 414 is suitable for connecting with a vacuum device. When the plurality of suction rods 414 are vacuumed, the plurality of suction rods 414 absorb the to-be-exposed object 200. For example, Figure 1-Figure 4 In the example, nine suction rods 414 are arranged at intervals on the main body 413, and all of the nine suction rods 414 can adsorb the object to be exposed 200. As a result, the adsorption stability of the object to be exposed 200 on the suction cup member 41 is increased, the force stability of the object to be exposed 200 is ensured, and the object to be exposed 200 is prevented from moving, which is beneficial to improving the accuracy of exposure, thereby facilitating the exposure quality of the object to be exposed 200. The suction rod 414 can realize the adsorption and release of the object to be exposed 200 by connecting and disconnecting with the vacuum pumping device. When the vacuum pumping device is turned on to vacuum the suction rod 414, the suction cup member 41 can stably and reliably adsorb the object to be exposed 200; when the vacuum pumping device is disconnected and the suction rod 414 is not vacuumed, the suction rod 414 has no force on the object to be exposed 200, so the suction cup member 41 can release the force on the object to be exposed 200, which is beneficial for the object to be exposed 200 to move to the substrate carrier 3 or the suction cup member 41 of another flip plate assembly 4.

[0032] Furthermore, refer to Figure 1-Figure 4The body 413 is provided with a plurality of through holes 4131, which is conducive to reducing the weight of the body 413 and increasing the connection between the suction rod 414 and the outside atmosphere when the suction rod 414 is evacuated and restored to normal pressure, greatly reducing the influence of the suction rod 414 on the exposed object 200. The plurality of through holes 4131 are arranged in an array, which is conducive to increasing the uniformity of the force of the plurality of suction rods 414 when evacuating and restoring normal pressure, thereby improving the stability and reliability of the suction cup member 41 in adsorbing and releasing the exposed object 200. For example, Figure 1-Figure 4 In the example, four through holes 4131 are formed on the body 413, and the four through holes 4131 are arranged in an array.

[0033] According to some embodiments of the present invention, the high-efficiency single-machine double-sided exposure device 100 also includes a plurality of support members 5 and a first guide member 6. The plurality of support members 5 are respectively arranged on both sides of the width direction of the base 1, and each support member 5 extends along the thickness direction of the base 1. The first guide member 6 is connected to the plurality of support members 5, and a first slide groove is formed on one of the first guide member 6 and the connecting rod 42, and a first slide rail 61 is provided on the other of the first guide member 6 and the connecting rod 42, and the first slide rail 61 is slidably matched with the first slide groove. In other words, a first slide groove may be formed on the first guide member 6, and a first slide rail 61 may be provided on the connecting rod 42 (not shown in the figure); or, a first slide groove may be formed on the connecting rod 42, and a first slide rail 61 may be provided on the first guide 6 (as shown in the figure); Figure 1-Figure 4 as shown).

[0034] For example, in Figure 1-Figure 4 In the example, the exposure device 100 includes two support members 5, and the two support members 5 are respectively arranged on both sides of the width of the base 1. Along the thickness direction of the base 1, the two support members 5 are connected by the first guide member 6 on the side away from the base 1. The first guide member 6 is formed with a first slide rail 61 extending along the width direction of the base 1, and the connecting rod 42 is formed with a first slide groove. The first slide groove cooperates with the first slide rail 61, thereby realizing the sliding connection between the connecting rod 42 and the first guide member 6, and realizing the reliable movement of the connecting rod 42 along the width direction of the base 1.

[0035] Further, refer to Figure 1-Figure 4 The ends of the multiple support members 5 away from the base 1 are connected with a connecting plate 7, and the first guide member 6 is connected to the connecting plate 7. Therefore, the connection and setting stability of the multiple support members 5 are increased by using the connecting plate 7, and the setting stability of the first guide member 6 is also increased, so that the first guide member 6 is prevented from being deformed during the movement of the connecting rod 42, and the operational stability and reliability of the flap assembly 4 are improved.

[0036] Furthermore, the connecting plate 7 is located below the exposure assembly 2, and a plurality of exposure holes are formed on the connecting plate 7. The exposure assembly 2 includes a plurality of exposure heads 21, and the plurality of exposure heads 21 correspond to the plurality of exposure holes one by one. Figure 1-Figure 4 As shown, twelve exposure holes are formed on the connecting plate 7, and the exposure assembly 2 includes twelve exposure heads 21, and the twelve exposure heads 21 correspond to the twelve exposure holes one by one. Thus, the light of the twelve exposure assemblies 2 can pass through the corresponding exposure holes to achieve the exposure needs, and at the same time, the connecting plate 7 can increase the setting stability of the exposure assembly 2.

[0037] According to some embodiments of the present invention, a second slide groove is formed on one of the base 1 and the substrate stage 3, and a second slide rail 11 is provided on the other of the base 1 and the substrate stage 3, and the second slide rail 11 slides with the second slide groove. That is, when the second slide groove is formed on the base 1, the second slide rail 11 is provided on the substrate stage 3 (not shown); or, when the second slide groove is formed on the substrate stage 3, the second slide rail 11 is provided on the base 1 (as shown in the figure); Figure 1-Figure 4 As shown). Thus, the cooperation between the second slide groove and the second slide rail 11 is conducive to the reliable movement of the substrate carrier 3 along the length direction of the base.

[0038] Further, refer to Figure 1-Figure 4 A conveyor belt 12 is provided on one side of the base 1 adjacent to the substrate stage 3. The conveyor belt 12 extends along the length direction of the base 1 and is connected to the substrate stage 3. In this way, the conveyor belt 12 increases the force bearing area of ​​the substrate stage 3, further increasing the stability of the movement of the substrate stage 3.

[0039] According to some other embodiments of the present invention, a gas channel 31 is formed on the substrate carrier 3, and one end of the gas channel 31 is suitable for being connected to a vacuum pump. When the gas channel 31 is evacuated, the substrate carrier 3 can absorb the object to be exposed 200. Alternatively, when the gas channel 31 is not evacuated, it is beneficial to restore the normal air pressure of the substrate carrier 3 to release the absorption of the object to be exposed 200. Figure 1-Figure 4 Six gas channels 31 are formed on the substrate carrier 3, and the gas channels 31 are suitable for communicating with the vacuum pumping device. Such an arrangement increases the gas flow path, thereby facilitating vacuum pumping of the substrate carrier 3 to absorb the exposed object 200.

[0040] Other structures and operations of the high-efficiency single-machine double-sided exposure device 100 according to the embodiment of the present invention are known to ordinary technicians in the field and will not be described in detail here.

[0041] In the description of the present invention, it is to be understood that the terms “center”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “horizontal”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0042] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0044] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A high-efficiency single-machine double-sided exposure device, characterized in that: include: Pedestal; An exposure assembly, the exposure assembly being arranged above the base; A substrate carrier, which is disposed between the base and the exposure assembly and is used to absorb the workpiece to be exposed, and is movable along the length direction of the base; Two flip plate assemblies, both of which are arranged between the substrate stage and the exposure assembly, each of which comprises a suction cup and a connecting rod, the suction cup is rotatably connected to the connecting rod, and the connecting rod is movable along the width direction of the base; Wherein, the rotation directions of the two suction cup members of the two flap assemblies are opposite.

2. The high-efficiency single-machine double-sided exposure equipment according to claim 1, characterized in that: The two side surfaces of the object to be exposed in the thickness direction of the base are respectively the front side and the back side, and the two suction cup members are respectively the first suction cup member and the second suction cup member; During the front exposure process, the substrate stage absorbs the back surface and moves to the bottom of the exposure assembly to perform front exposure; During the process of switching from front exposure to back exposure, after the first suction cup component rotates to be parallel to the substrate carrier and adsorbs the front side, the first suction cup component rotates to be parallel to the second suction cup component, the second suction cup component adsorbs the back side and rotates to be parallel to the substrate carrier, and the substrate carrier adsorbs the front side and moves to the bottom of the exposure component for back exposure.

3. The high-efficiency single-machine double-sided exposure equipment according to claim 2, characterized in that: The suction cup member comprises: A body, the body being rotatably connected to the connecting rod; A plurality of suction rods, wherein the plurality of suction rods are arranged on the body at intervals, each of the suction rods is a hollow structure, and one end of each of the suction rods is suitable for being connected to a vacuum device; Wherein, when the plurality of suction rods are vacuuming, the plurality of suction rods absorb the workpiece to be exposed.

4. The high-efficiency single-machine double-sided exposure equipment according to claim 3, characterized in that: A plurality of through holes are formed on the body, and the plurality of through holes are arranged in an array.

5. The high-efficiency single-machine double-sided exposure device according to any one of claims 1 to 4, characterized in that: Also includes: A plurality of support members, each of which is disposed on both sides of the base in a width direction, and each of which extends along a thickness direction of the base; A first guide member, the first guide member is connected to the plurality of support members, a first slide groove is formed on one of the first guide member and the connecting rod, a first slide rail is provided on the other of the first guide member and the connecting rod, and the first slide rail is slidably matched with the first slide groove.

6. The high-efficiency single-machine double-sided exposure equipment according to claim 5, characterized in that: One end of the plurality of support members away from the base is connected with a connecting plate, and the first guide member is connected to the connecting plate.

7. The high-efficiency single-machine double-sided exposure equipment according to claim 6, characterized in that: The connecting plate is located below the exposure assembly. A plurality of exposure holes are formed on the connecting plate. The exposure assembly includes a plurality of exposure heads. The plurality of exposure heads correspond to the plurality of exposure holes one by one.

8. The high-efficiency single-machine double-sided exposure device according to any one of claims 1 to 4, characterized in that: A second slide groove is formed on one of the base and the substrate stage, and a second slide rail is provided on the other of the base and the substrate stage, and the second slide rail is slidably matched with the second slide groove.

9. The high-efficiency single-machine double-sided exposure device according to claim 8, characterized in that: A conveyor belt is provided on one side of the base adjacent to the substrate carrier. The conveyor belt extends along the length direction of the base and is connected to the substrate carrier.

10. The high-efficiency single-machine double-sided exposure equipment according to claim 1, characterized in that: A gas channel is formed on the substrate carrier, and one end of the gas channel is suitable for communicating with a vacuum pump; Wherein, when the gas channel is evacuated, the substrate carrier absorbs the object to be exposed.

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