Vacuum assembly device

Abstract

The present invention discloses a vacuum assembly device, which belongs to the technical field of semiconductor equipment. The vacuum assembly device includes a vacuum chamber, a first working module and a second working module. The vacuum chamber is provided with a working chamber, and the working chamber is used to assemble products; the first working module is arranged on the vacuum chamber, and the first working module is used to clamp the first component of the product and move along the first direction and the second direction; the second working module is arranged on the vacuum chamber, and the second working module is used to clamp the second component of the product and move along the third direction, and the first working module can make the first component close to and press the second component. The present invention facilitates the assembly of precision components in a vacuum environment and ensures the vacuum sealing state inside the precision components.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a vacuum assembly device. Background Art

[0002] In the field of semiconductor equipment repair, the interior of some precision components, such as energy spectrum probes, needs to remain vacuum-sealed in order to work properly.

[0003] Due to supply shortages, discontinued models, supplier mergers and acquisitions, and high prices, it is difficult to find replacements for the above-mentioned types of parts when they are damaged. They need to be repaired and disassembled, and the vacuum inside the parts needs to be restored after repair. Since the parts are sealed after assembly, it is impossible to create a vacuum to exhaust the gas from the outside, so they need to be assembled and sealed in a vacuum environment.

[0004] Therefore, it is urgent to provide a vacuum assembly device to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a vacuum assembly device for assembling precision parts in a vacuum environment to ensure the vacuum sealing state inside the precision parts.

[0006] In order to achieve the above objectives, the following technical solutions are provided:

[0007] Vacuum assembly device, comprising:

[0008] A vacuum chamber, wherein a working chamber is provided, wherein the working chamber is used for assembling products;

[0009] A first working module is disposed on the vacuum chamber, and the first working module is used to clamp the first component of the product and move along a first direction and a second direction;

[0010] The second working module is arranged on the vacuum chamber, and is used to clamp the second component of the product and move along the third direction. The first working module can make the first component approach and press the second component. The first direction, the second direction and the third direction are perpendicular to each other.

[0011] As an optional solution for the vacuum assembly device, the first working module includes an X moving unit, the X moving unit is arranged opposite to the second working module, the X moving unit includes a first driving unit, a first slide rail and a first moving table, the first slide rail is arranged in the vacuum chamber and extends along the first direction, the first moving table is slidably arranged on the first slide rail, one end of the first moving table is transmission-connected to the first driving unit, and the first driving unit is used to drive the first moving table to move along the first direction.

[0012] As an optional solution for the vacuum assembly device, the first driving unit includes a rotating handle, a sealing transmission and a screw, the sealing transmission is arranged on the side wall of the vacuum chamber, one end of the sealing transmission is coaxially connected to the rotating handle, the other end of the sealing transmission is coaxially connected to the screw, and the screw is threadedly connected to the first movable platform.

[0013] As an optional solution of the vacuum assembly device, a second slide rail extending along the second direction is provided on the first movable platform, a second movable platform is slidably provided on the second slide rail, and a slider capable of moving along the first direction is slidably provided on the side wall of the second movable platform;

[0014] The second working module also includes a Y moving unit, which includes a second driving unit, a third slide rail and a third moving table. The third slide rail is arranged in the vacuum chamber and extends along the second direction. The third moving table is slidably arranged on the third slide rail. One end of the third moving table is transmission-connected to the second driving unit, and the other end of the third moving table is fixedly connected to the slider. The second driving unit is used to drive the third moving table and the second moving table to move along the second direction.

[0015] As an optional solution for the vacuum assembly device, a first clamping mechanism and a ball head top column are provided on the third movable platform, the ball head top column is located at the center of the first clamping mechanism, the first clamping mechanism is used to clamp or release the first component, and the ball head top column can abut against the side wall of the first component.

[0016] As an optional scheme for the vacuum assembly device, the first clamping mechanism includes a mounting seat, a screw, a moving part, a first clamping jaw and a second clamping jaw, the opposite ends of the screw being rotatably arranged on the first boss and the second boss of the mounting seat respectively, the moving part being threadedly connected to the screw, one end of the first clamping jaw being passed through the moving part, a first tension spring being arranged between the first clamping jaw and the moving part, the second clamping jaw being passed through the second boss, and a second tension spring being arranged between the second clamping jaw and the second boss.

[0017] As an optional solution for the vacuum assembly device, the second working module includes a Z moving unit, and the Z moving unit includes a third driving unit, a fourth slide rail, a fourth moving table and a second clamping mechanism. The fourth slide rail is arranged in the vacuum chamber and extends along the third direction. The fourth moving table is slidably arranged on the fourth slide rail. One end of the fourth moving table is transmission-connected to the third driving unit. The second clamping mechanism is arranged on the fourth moving table. The second clamping mechanism is used to clamp or release the second component. The third driving unit is used to drive the fourth moving table to move along the third direction.

[0018] As an optional solution for the vacuum assembly device, a pipe connected to the working chamber is arranged on the vacuum chamber, and the vacuum assembly device also includes a vacuum pumping unit, which includes a first vacuum pump, a second vacuum pump, an inflation valve and a vacuum valve, and the first vacuum pump, the vacuum valve, the second vacuum pump and the inflation valve are arranged on the pipe in sequence.

[0019] As an optional solution of the vacuum assembly device, the vacuum unit further includes a first vacuum gauge and a second vacuum gauge, the first vacuum gauge is arranged on the vacuum chamber, and the second vacuum gauge is arranged on the pipeline.

[0020] As an optional solution of the vacuum assembly device, the side wall of the vacuum chamber is provided with an observation window, and / or the side wall of the vacuum chamber is provided with a cover, and the cover is used to open or close the working chamber.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The vacuum assembly device provided by the present invention has a vacuum state in the working chamber of the vacuum chamber when assembling products. For example, products such as energy spectrum probes include a sealing cover and a main body. The main body has a cavity. The sealing cover needs to be sealed and pressed at the cavity opening of the main body, and the sealing cover is fixedly connected to the main body by fasteners such as bolts. A first working module and a second working module are arranged on the vacuum chamber. The sealing cover can be clamped on the first working module and moved in the first direction and the second direction. The main body can be clamped on the second working module and moved in the third direction. Through the operation of the first working module and the second working module, the sealing cover of the product can be aligned with the cavity opening of the main body of the product and pressed tightly. When the sealing cover is buckled on the main body, it can be ensured that the cavity inside the main body is in a vacuum state, meeting the assembly requirements of products such as energy spectrum probes. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0024] Figure 1 A simplified schematic diagram of a vacuum assembly device according to an embodiment of the present invention;

[0025] Figure 2 It is a structural schematic diagram of a vacuum assembly device in an embodiment of the present invention from a first viewing angle;

[0026] Figure 3It is a structural schematic diagram of a first clamping mechanism with a ball head and a top column installed in an embodiment of the present invention;

[0027] Figure 4 is a structural schematic diagram of the vacuum assembly device in a second viewing angle in an embodiment of the present invention;

[0028] Figure 5 It is a structural schematic diagram of the vacuum assembly device from a third viewing angle in an embodiment of the present invention.

[0029] Reference numerals:

[0030] 1. Vacuum chamber; 2. X moving unit; 3. Y moving unit; 4. Z moving unit; 5. Vacuum pumping unit;

[0031] 11. Observation window;

[0032] 21. first drive unit; 211. rotating handle; 212. connecting rod; 213. first coaxial connector; 214. sealing transmission; 215. second coaxial connector; 216. lead screw; 217. locking member;

[0033] 22. first slide rail; 23. first moving platform;

[0034] 31. second driving unit; 32. third slide rail; 33. third moving platform; 34. push rod; 35. slider; 36. guide rail; 37. second moving platform; 38. second slide rail; 39. first clamping mechanism; 3901. mounting seat; 39011. first boss; 39012. second boss; 3902. screw rod; 3903. first clamping jaw; 3904. second clamping jaw; 3905. moving member; 3906. first tension spring; 3907. second tension spring; 391. ball head top column;

[0035] 41. third driving unit; 42. fourth slide rail; 43. fourth moving platform; 44. second clamping mechanism;

[0036] 51. Second vacuum pump; 52. First vacuum pump; 53. Inflating valve; 54. Vacuum valve; 55. Second vacuum gauge; 56. First vacuum gauge. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0038] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or are the positions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0039] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0041] In order to assemble precision parts in a vacuum environment and ensure the vacuum sealing state inside the precision parts, this embodiment provides a vacuum assembly device, which is combined with Figures 1 to 5 The specific contents of this embodiment are described in detail. It should be noted that the first direction mentioned in this embodiment is Figure 2 The second direction mentioned in this embodiment is Figure 2 The third direction mentioned in this embodiment is Figure 3 The Z direction in .

[0042] like Figures 1 to 4 As shown, the vacuum assembly device in this embodiment includes a vacuum chamber 1, a first working module and a second working module. A working chamber is provided in the vacuum chamber 1, and the working chamber is used to assemble products. The first working module is arranged on the vacuum chamber 1, and the first working module is used to clamp the first component of the product and move along the first direction and the second direction. The second working module is arranged on the vacuum chamber 1, and the second working module is used to clamp the second component of the product and move along the third direction. The first working module can make the first component approach and press the second component. The first direction, the second direction and the third direction are perpendicular to each other.

[0043] In short, in the vacuum assembly device provided in this embodiment, the working chamber of the vacuum chamber 1 is in a vacuum state when assembling products. For example, products such as energy spectrum probes include a sealing cover and a main body. The main body has a cavity. The sealing cover needs to be sealed and pressed at the cavity opening of the main body, and the sealing cover is fixedly connected to the main body by fasteners such as bolts. A first working module and a second working module are provided on the vacuum chamber 1. The sealing cover can be clamped on the first working module and moved along the first direction and the second direction. The main body can be clamped on the second working module and moved along the third direction. Through the operation of the first working module and the second working module, the sealing cover of the product can be aligned with the cavity opening of the main body of the product and pressed tightly. When the sealing cover is buckled on the main body, it can be ensured that the cavity inside the main body is in a vacuum state, meeting the assembly requirements of products such as energy spectrum probes.

[0044] Further, the first working module includes an X moving unit 2, which is arranged opposite to the second working module, and the X moving unit 2 includes a first driving unit 21, a first slide rail 22 and a first moving platform 23, the first slide rail 22 is arranged in the vacuum chamber 1 and extends along the first direction, the first moving platform 23 is slidably arranged on the first slide rail 22, one end of the first moving platform 23 is transmission-connected with the first driving unit 21, and the first driving unit 21 is used to drive the first moving platform 23 to move along the first direction. During the movement of the first moving platform 23, the first moving platform 23 can be reciprocated only along the first direction through the guiding effect of the first slide rail 22, thereby improving the movement accuracy of the first moving platform 23.

[0045] Exemplarily, the first driving unit 21 includes a rotating handle 211, a sealing transmission device 214 and a screw rod, wherein the sealing transmission device 214 is arranged on the side wall of the vacuum chamber 1, one end of the sealing transmission device 214 is coaxially connected to the rotating handle 211, and the other end of the sealing transmission device 214 is coaxially connected to the screw rod, and the screw rod is threadedly connected to the first moving platform 23. One end of the rotating handle 211 is coaxially connected to a connecting rod 212, and the connecting rod 212 is connected to the sealing transmission device 214 through a first coaxial connector 213, and the screw rod 216 is connected to the sealing transmission device 214 through a second coaxial connector 215. In this embodiment, a locking member 217 can be used to lock or unlock the connecting rod 212, thereby realizing the limitation of the moving position of the first moving platform 23. The rotating handle 211 can drive the screw rod to rotate synchronously, thereby driving the first moving platform 23 to move along the first direction. The sealing transmission device 214 can be a magnetic fluid, which is used to transmit motion while keeping the working chamber of the vacuum chamber 1 sealed from the outside. The locking member 217 is used to lock the first moving platform 23 after it is moved to a specified position to prevent it from sliding.

[0046] Furthermore, the first moving platform 23 is provided with a second slide rail 38 extending in the second direction, a second moving platform 37 is slidably provided on the second slide rail 38, and a slider 35 capable of moving in the first direction is slidably provided on the guide rail 36 of the side wall of the second moving platform 37; the second working module further comprises a Y moving unit 3, the Y moving unit 3 comprises a second driving unit 31, a third slide rail 32 and a third moving platform 33, the third slide rail 32 is provided in the vacuum chamber 1 and extends in the second direction, the third moving platform 33 is slidably provided on the third slide rail 32, one end of the third moving platform 33 is transmission-connected with the second driving unit 31, the other end of the third moving platform 33 is fixedly connected with the slider 35, and the second driving unit 31 is used to drive the third moving platform 33 and the second moving platform 37 to move in the second direction. The structure of the second driving unit 31 is similar to that of the first driving unit 21. A push rod 34 is fixed on the third moving platform 33, and the other end of the push rod 34 is fixed on the second moving platform 37 through a slider 35 and a guide rail 36. The push rod 34 and the second moving platform 37 can slide relative to each other in the X direction. The second moving platform 37 is fixed on the first moving platform 23 through a second slide rail 38. Thus, the second moving platform 37 moves along the Y direction under the drive of the second driving unit 31.

[0047] Furthermore, the third movable platform 33 is provided with a first clamping mechanism 39 and a ball head top column 391, the ball head top column 391 is located at the center of the first clamping mechanism 39, the first clamping mechanism 39 is used to clamp or release the first component, and the ball head top column 391 can abut against the side wall of the first component. The ball head top column 391 is located at the center of the first clamping mechanism 39. The first clamping mechanism 39 is used to clamp the sealing cover of the energy spectrum probe, and the ball head top column 391 abuts against the side wall of the sealing cover. When the sealing cover has an inclined angle, it can be slightly adjusted by pressure to facilitate the alignment of the sealing cover with the main body cavity and achieve sealing.

[0048] Furthermore, if Figure 4As shown, the first clamping mechanism 39 includes a mounting seat 3901, a screw rod 3902, a moving member 3905, a first clamping jaw 3903 and a second clamping jaw 3904. The opposite ends of the screw rod 3902 are respectively rotatably arranged on the first boss 39011 and the second boss 39012 of the mounting seat 3901. The moving member 3905 is threadedly connected with the screw rod 3902. One end of the first clamping jaw 3903 is penetrated on the moving member 3905. A first tension spring 3906 is arranged between the first clamping jaw 3903 and the moving member 3905. The second clamping jaw 3904 is penetrated on the second boss 39012, and a second tension spring 3907 is arranged between the second clamping jaw 3904 and the second boss 39012. By rotating the screw rod 3902, the first clamping jaw 3903 can be moved close to or away from the second clamping jaw 3904, so as to clamp or release the sealing cover of the product. Under the action of the first tension spring 3906 and the second tension spring 3907 , the sealing cover can be further confined in the space formed by the ball head top column 391 , the first clamping jaw 3903 and the second clamping jaw 3904 .

[0049] Further, the second working module includes a Z moving unit 4, which includes a third driving unit 41, a fourth slide rail 42, a fourth moving platform 43 and a second clamping mechanism 44. The fourth slide rail 42 is arranged in the vacuum chamber 1 and extends along the third direction. The fourth moving platform 43 is slidably arranged on the fourth slide rail 42. One end of the fourth moving platform 43 is transmission-connected to the third driving unit 41. The second clamping mechanism 44 is arranged on the fourth moving platform 43. The second clamping mechanism 44 is used to clamp or release the second component. The third driving unit 41 is used to drive the fourth moving platform 43 to move along the third direction. The second clamping mechanism 44 in this embodiment is similar in structure to the first clamping mechanism 39, and the third driving unit 41 is similar in structure to the first driving unit 21, which will not be described in detail here. After the second clamping mechanism 44 clamps the main body of the energy spectrum probe, it can be moved in the Z direction through the fourth moving platform 43.

[0050] Furthermore, if Figure 5 As shown, a pipeline connected to the working chamber is provided on the vacuum chamber 1, and the vacuum assembly device also includes a vacuum unit 5, which includes a first vacuum pump 52, a second vacuum pump 51, a gas charging valve 53 and a vacuum valve 54. The first vacuum pump 52, the vacuum valve 54, the second vacuum pump 51 and the gas charging valve 53 are sequentially arranged on the pipeline. The second vacuum pump 51 is used to establish a primary vacuum, and the second vacuum pump 51 can be but not limited to a dry pump or an oil pump, etc. The first vacuum pump 52 is used to establish a high-level vacuum, and the first vacuum pump 52 can be but not limited to a molecular pump. The gas charging valve 53 is used to inflate, so that the working chamber of the vacuum chamber 1 is filled with a specific gas, and the vacuum chamber 1 can be opened. The vacuum valve 54 is used to maintain the vacuum in the working chamber when the second vacuum pump 51 stops running.

[0051] Furthermore, the vacuum unit 5 further includes a first vacuum gauge 56 and a second vacuum gauge 55. The first vacuum gauge 56 is arranged on the vacuum chamber 1, and the second vacuum gauge 55 is arranged on the pipeline. The first vacuum gauge 56 is used to monitor the vacuum state in the working chamber, and the second vacuum gauge 55 is used to monitor the vacuum state in the pipeline.

[0052] Furthermore, the side wall of the vacuum chamber 1 is provided with an observation window 11, and / or the side wall of the vacuum chamber 1 is provided with a cover, and the cover is used to open or close the working chamber. By adding the observation window 11, when the X-moving unit 2, the Y-moving unit 3 and the Z-moving unit 4 are manually controlled to work, it is not only convenient for the operator to observe and operate manually, but also convenient to observe the assembly of the sealing cover and the main body in real time. By adding a cover on the vacuum chamber 1, it is convenient to put the product into the vacuum chamber 1 or take it out of the vacuum chamber 1.

[0053] In summary, the working principle of the vacuum assembly device in this embodiment is:

[0054] 1. The second vacuum pump 51 and the first vacuum pump 52 remain closed, and the inflation valve 53 and the vacuum valve 54 are opened to inflate. When the first vacuum gauge 55 and the second vacuum gauge 56 show that the atmospheric pressure has been reached, the inflation valve 53 is closed to stop inflation.

[0055] 2. Open the cover of the vacuum chamber 1 , fix the sealing cover of the assembly on the first clamping mechanism 39 , and fix the main body of the assembly on the second clamping mechanism 44 .

[0056] 3. Close the cover of the vacuum chamber 1, turn on the second vacuum pump 51, wait until the first vacuum gauge 55 and the second vacuum gauge 56 show that the air pressure is lower than the specified air pressure, such as below 5Pa, turn off the second vacuum pump 51, and open the inflation valve 53 to inflate a specific gas, such as helium. At this time, the vacuum chamber is filled with the specific gas.

[0057] 4. Close the inflation valve 53, start the second vacuum pump 51, and wait until the first vacuum gauge 55 and the second vacuum gauge 56 display an air pressure lower than the specified air pressure, such as below 5Pa, and then start the first vacuum pump 52 until the air pressure displayed by the first vacuum gauge 55 and the second vacuum gauge 56 reaches the vacuum degree requirement of the assembly.

[0058] 5. Rotate the rotating handles 211 of the X-moving unit 2, the Y-moving unit 3 and the Z-moving unit 4 to align the sealing cover of the assembly with the main body, apply pressure along the X-axis direction to make it sealed, and lock each axis through the locking member 217.

[0059] 6. Turn off the first vacuum pump 52. After the first vacuum pump 52 stops, turn off the second vacuum pump 51, open the inflation valve 53 and the vacuum valve 54 to inflate, and when the first vacuum gauge 55 and the second vacuum gauge 56 show that atmospheric pressure has been reached, close the inflation valve 53 and stop inflation.

[0060] 7. Open the cover of the vacuum chamber 1, install the sealing cover and the main body of the assembly with fastening screws, then loosen the first clamping mechanism 39 and the second clamping mechanism 44, take out the assembly, and complete the vacuum sealing assembly of the assembly.

[0061] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A vacuum assembly device, characterized in that: include: A vacuum chamber (1) is provided with a working chamber therein, wherein the working chamber is used for assembling products; A first working module is arranged on the vacuum chamber (1), the first working module is used to clamp the first component of the product and move along a first direction and a second direction; a second working module, arranged on the vacuum chamber (1), the second working module being used to clamp the second component of the product and move along a third direction, the first working module being able to make the first component approach and press the second component, the first direction, the second direction and the third direction being perpendicular to each other; The first working module comprises an X-moving unit (2), the X-moving unit (2) being arranged opposite to the second working module, the X-moving unit (2) comprising a first driving unit (21), a first slide rail (22) and a first moving platform (23), the first slide rail (22) being arranged in the vacuum chamber (1) and extending along the first direction, the first moving platform (23) being slidably arranged on the first slide rail (22), one end of the first moving platform (23) being transmission-connected to the first driving unit (21), the first driving unit (21) being used for driving the first moving platform (23) to move along the first direction; the first moving platform (23) is provided with a second slide rail (38) extending along the second direction, the second slide rail (38) is slidably provided with a second moving platform (37), and a side wall of the second moving platform (37) is slidably provided with a slider (35) capable of moving along the first direction; The second working module further comprises a Y moving unit (3), the Y moving unit (3) comprising a second driving unit (31), a third slide rail (32) and a third moving platform (33), the third slide rail (32) being arranged in the vacuum chamber (1) and extending along the second direction, the third moving platform (33) being slidably arranged on the third slide rail (32), one end of the third moving platform (33) being transmission-connected to the second driving unit (31), the other end of the third moving platform (33) being fixedly connected to the slider (35), and the second driving unit (31) being used for driving the third moving platform (33) and the second moving platform (37) to move along the second direction.

2. The vacuum assembly device according to claim 1, characterized in that: The first driving unit (21) comprises a rotating handle (211), a sealing transmission device (214) and a screw, wherein the sealing transmission device (214) is arranged on the side wall of the vacuum chamber (1), one end of the sealing transmission device (214) is coaxially connected to the rotating handle (211), and the other end of the sealing transmission device (214) is coaxially connected to the screw, and the screw is threadedly connected to the first movable platform (23).

3. The vacuum assembly device according to claim 1, characterized in that: The third movable platform (33) is provided with a first clamping mechanism (39) and a ball head top column (391), wherein the ball head top column (391) is located at the center of the first clamping mechanism (39), and the first clamping mechanism (39) is used to clamp or release the first component, and the ball head top column (391) can abut against the side wall of the first component.

4. The vacuum assembly device according to claim 3, characterized in that: The first clamping mechanism (39) includes a mounting seat (3901), a screw rod (3902), a moving member (3905), a first clamping jaw (3903) and a second clamping jaw (3904). The opposite ends of the screw rod (3902) are rotatably arranged on a first boss (39011) and a second boss (39012) of the mounting seat (3901), respectively. The moving member (3905) is threadedly connected to the screw rod (3902). One end of the first clamping jaw (3903) is passed through the moving member (3905). A first tension spring (3906) is arranged between the first clamping jaw (3903) and the moving member (3905). The second clamping jaw (3904) is passed through the second boss (39012), and a second tension spring (3907) is arranged between the second clamping jaw (3904) and the second boss (39012).

5. The vacuum assembly device according to claim 1, characterized in that: The second working module comprises a Z moving unit (4), the Z moving unit (4) comprises a third driving unit (41), a fourth slide rail (42), a fourth moving platform (43) and a second clamping mechanism (44), the fourth slide rail (42) is arranged in the vacuum chamber (1) and extends along the third direction, the fourth moving platform (43) is slidably arranged on the fourth slide rail (42), one end of the fourth moving platform (43) is transmission-connected to the third driving unit (41), the second clamping mechanism (44) is arranged on the fourth moving platform (43), the second clamping mechanism (44) is used for clamping or releasing the second component, and the third driving unit (41) is used for driving the fourth moving platform (43) to move along the third direction.

6. The vacuum assembly device according to claim 1, characterized in that: The vacuum chamber (1) is provided with a pipeline connected to the working chamber. The vacuum assembly device also includes a vacuum pumping unit (5). The vacuum pumping unit (5) includes a first vacuum pump (52), a second vacuum pump (51), an air charging valve (53) and a vacuum valve (54). The first vacuum pump (52), the vacuum valve (54), the second vacuum pump (51) and the air charging valve (53) are sequentially arranged on the pipeline.

7. The vacuum assembly device according to claim 6, characterized in that: The vacuum pumping unit (5) further comprises a first vacuum gauge (56) and a second vacuum gauge (55), wherein the first vacuum gauge (56) is arranged on the vacuum chamber (1), and the second vacuum gauge (55) is arranged on the pipeline.

8. The vacuum assembly device according to any one of claims 1 to 7, characterized in that: The side wall of the vacuum chamber (1) is provided with an observation window (11), and / or the side wall of the vacuum chamber (1) is provided with a cover body, and the cover body is used to open or close the working chamber.

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