Lifting device, heat treatment equipment and workpiece treatment method

Abstract

The invention provides a lifting device, heat treatment equipment and a workpiece treatment method, and relates to the technical field of semiconductor processing. The lifting device comprises a supporting table used for supporting a workpiece; an airflow channel is arranged in the supporting table; the multiple supporting pieces are distributed in the circumferential direction of the supporting table at intervals, and a preset distance is formed between each supporting piece and the supporting table; the plurality of supporting shifting pieces are movably connected with the corresponding supporting pieces respectively; the supporting shifting piece is used for moving from a first position to a second position under the action of thrust provided by the supporting table or the workpiece; the supporting shifting piece is further used for returning to the first position from the second position under the action of restoring force; when the supporting shifting pieces are located at the first position, the ends, away from the supporting piece, of the at least two supporting shifting pieces are used for limiting a first space. When the supporting shifting pieces are located at the second position, the ends, away from the supporting piece, of the at least two supporting shifting pieces are used for limiting a second space. The problem that lifting is not smooth can be solved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor processing technology, and in particular to a lifting device, a heat treatment equipment and a workpiece processing method. Background Art

[0002] In the wafer processing technology, a lifting device is usually used to complete the wafer placement operation. Therefore, it is very important to design the lifting device reasonably. Summary of the invention

[0003] The present invention provides a lifting device, a heat treatment device and a workpiece treatment method.

[0004] According to one aspect of the present disclosure, a lifting device is provided, comprising: a support platform for supporting a workpiece; an air flow channel is provided in the support platform; wherein, when the pressure of the gas discharged from the air flow channel reaches a preset pressure, the gas can lift the workpiece; a support member, wherein a plurality of the support members are spaced apart along the circumference of the support platform, and a preset spacing is provided between the support member and the support platform; a support paddle, wherein a plurality of the support paddles are movably connected to the corresponding support members respectively; the support paddle is used to move from a first position to a second position under the thrust provided by the support platform or the workpiece; the support paddle is also used to return to the first position from the second position under the action of a restoring force; wherein, when the support paddle is located at the first position, at least two ends of the support paddles away from the support member are used to define a first space, and the size of the first space in the horizontal direction is respectively smaller than the size of the support platform and the workpiece in the horizontal direction; the horizontal direction is perpendicular to the axial direction of the support platform; when the support paddle is located at the second position, at least two ends of the support paddles away from the support member are used to define a second space, and the second space is used for the support platform or the workpiece to pass through.

[0005] In some embodiments, a plurality of the support paddles are respectively hinged to the corresponding support members; wherein the support paddles are used to rotate from a first position to a second position under the thrust provided by the support platform or the workpiece; and the support paddles are also used to rotate from the second position to the first position under the action of gravity.

[0006] In some embodiments, the support member includes: a support rod, the support rod having a first end face facing the support paddle, the first end face having an installation area and a limit area; the limit area is located on the inner side of the installation area facing the central axis of the support platform; the part of the first end face located in the installation area is connected to a mounting boss, a hinge shaft is installed in the mounting boss, and the hinge shaft cooperates with the support paddle; the part of the first end face located in the limit area forms a first limit surface, and the first limit surface is used to contact the support paddle when the support paddle returns to the first position.

[0007] In some embodiments, the lifting device also includes: a limit member; the limit member is connected to the outer side of the support member away from the central axis of the support platform, the limit member has an inner side surface facing the central axis of the support platform, and part of the inner side surface forms a second limit surface, and the second limit surface is used to contact the support paddle when the support paddle moves to an extreme position in a direction away from the first position.

[0008] In some embodiments, the second limiting surface is arranged perpendicular to the horizontal direction.

[0009] In some embodiments, along a direction opposite to the direction of gravity, the second limiting surface gradually approaches the central axis of the support platform; the direction of gravity is parallel to the axial direction of the support platform.

[0010] In some embodiments, the supporting paddle is provided with a guide portion, and the guide portion is used to guide the supporting platform or the workpiece to move in a direction opposite to the direction of gravity.

[0011] In some embodiments, the air flow channel has an exhaust hole, and an outlet end of the exhaust hole is located on a surface of the support platform facing the workpiece.

[0012] In some embodiments, the surface of the support platform facing the workpiece has a central area and a peripheral area, and the peripheral area is located outside the central area away from the central axis of the support platform; the exhaust holes include first-type exhaust holes and second-type exhaust holes; the outlet end of the first-type exhaust holes is located in the central area; the outlet end of the second-type exhaust holes is located in the peripheral area.

[0013] In some embodiments, a distance between two adjacent exhaust holes of the first type is greater than a distance between two adjacent exhaust holes of the second type.

[0014] In some embodiments, a diameter of the first type of exhaust holes is greater than a diameter of the second type of exhaust holes.

[0015] In some embodiments, along a direction opposite to the direction of gravity, an axial direction of the second type of exhaust holes gradually tilts toward a central axis of the support platform.

[0016] In some embodiments, the lifting device further includes: a heating element; an installation space is provided in the support platform, and the heating element is located in the installation space.

[0017] In some embodiments, the air flow channel and the installation space are arranged independently of each other.

[0018] In some embodiments, the heating element comprises a heating wire; at least a portion of the heating wire is bent along the circumference of the support platform.

[0019] In some embodiments, the heating wire includes: a bending section and a connecting section; the bending sections have multiple sections, and at least two of the bending sections are spaced apart along the direction toward the central axis of the support platform; the connecting section extends along the direction toward the central axis of the support platform, and the connecting section is connected between two adjacent bending sections.

[0020] In some embodiments, along the direction toward the central axis of the support platform, at least three of the bending segments are distributed at intervals, and the distance between two adjacent bending segments gradually decreases.

[0021] According to one aspect of the present disclosure, there is provided a heat treatment device for a workpiece, comprising: a cavity, a driving mechanism and a lifting device as described in any one of the above; the lifting device is located in the cavity, and the driving mechanism is used to drive a support table in the lifting device to move along the axial direction of the support table.

[0022] According to one aspect of the present disclosure, a workpiece processing method is provided, based on any of the aforementioned lifting devices, comprising:

[0023] placing the workpiece on the supporting paddle, wherein the supporting paddle is located at a first position;

[0024] Controlling the support platform to move upward toward the support paddle, so that the support paddle moves from the first position toward the second position under the thrust of the support platform until the support platform carries the workpiece;

[0025] When the support table moves upward to the first target position, performing surface treatment on the workpiece;

[0026] After the surface treatment is completed, the support platform is controlled to move downward; wherein, when the support platform moves to be located below the support paddle, the support paddle gradually returns to the first position under the action of the restoring force;

[0027] When the support platform moves downward to the second target position, gas is introduced into the air flow channel of the support platform; wherein, when the pressure of the gas in the air flow channel reaches a preset pressure, the gas flowing out of the air flow channel lifts the workpiece; under the thrust of the workpiece, the support paddle moves from the first position toward the second position until the workpiece moves above the support paddle;

[0028] When the supporting paddle returns to the first position under the action of the restoring force, the gas is stopped from being introduced into the gas flow channel, so that the workpiece falls on the supporting paddle;

[0029] The workpiece is removed.

[0030] According to the technology disclosed in the present invention, the problem of uneven lifting and lowering can be improved.

[0031] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The accompanying drawings are used to better understand the present solution and do not constitute a limitation of the present disclosure.

[0033] Figure 1 is a structural schematic diagram of a lifting device according to an embodiment of the present disclosure;

[0034] Figure 2 is a structural schematic diagram of a lifting device according to an embodiment of the present disclosure;

[0035] Figure 3 is a structural schematic diagram of a lifting device according to an embodiment of the present disclosure;

[0036] Figure 4 is a schematic diagram of a lifting scene of a lifting device according to an embodiment of the present disclosure;

[0037] Figure 5 is a schematic structural diagram of a support rod and a support paddle according to an embodiment of the present disclosure;

[0038] Figure 6 is a schematic diagram of the distribution of exhaust holes in a support platform according to an embodiment of the present disclosure;

[0039] Figure 7 It is an enlarged schematic diagram of part A in 3;

[0040] Figure 8 is a schematic diagram of the distribution of heating wires according to an embodiment of the present disclosure;

[0041] Fig. 9is a schematic diagram of the distribution of heating wires and exhaust holes according to an embodiment of the present disclosure;

[0042] Fig.10 is a schematic structural diagram of a heat treatment device according to an embodiment of the present disclosure;

[0043] Fig.11 It is a flowchart of a workpiece processing method according to an embodiment of the present disclosure.

[0044] Explanation of the reference numerals: 100-support table; 100a-central area; 100b-peripheral area; 110-air flow channel; 111-air inlet; 112-exhaust hole; 112a-first type of exhaust hole; 112b-second type of exhaust hole; 200-support member; 210-support rod; 211-mounting boss; 212-first limiting surface; 213-rod-shaped body; 220-hinge shaft; 300-support paddle; 310-guide portion; 400-limiting member; 410-second limiting surface; 500-heating element; 510-heating wire; 511-bending section; 512-connecting section; 600-workpiece; 700-cavity; O-central axis of the support table. DETAILED DESCRIPTION

[0045] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0046] In the related art, lifting pins are usually installed in the wafer heating device so that the wafer can be lifted up by the lifting pins, thereby facilitating the wafer placement operation. However, since the temperature uniformity of the wafer is an important parameter that affects the process results, in order to reduce the cold spot area to ensure the temperature uniformity of the wafer, the gap between the lifting pin and the heating device is usually designed to be smaller, which will cause friction between the lifting pin and the heating device, thereby generating particles that contaminate the chamber, and the particles will cause the lifting pin to rise and fall unsmoothly or even break.

[0047] In order to overcome at least one of the above technical problems, the present disclosure provides a lifting device, comprising: a support platform, a support member and a support paddle; an air flow channel is provided in the support platform; a plurality of support members are spaced along the circumference of the support platform; a plurality of support paddles are respectively movably connected with a plurality of support members, and a preset spacing is provided between the support member and the support platform. When a workpiece needs to be placed, the support paddle is in a first position, and a manipulator places the workpiece on the support paddle; the support platform gradually rises and can apply a thrust to the support paddle, so that during the process of the support paddle moving from the first position to the second position, the support paddle is separated from the workpiece, and the workpiece falls onto the support platform. When the workpiece needs to be taken away, gas is introduced into the air flow channel of the support platform, and when the gas pressure reaches the preset pressure, the workpiece can be gradually lifted by the gas, and during the process of the workpiece gradually rising, a thrust can be applied to the support paddle, so that the support paddle moves from the first position to the second position; the workpiece continues to rise to be located above the support paddle, and the support paddle returns to the first position from the second position under the action of the restoring force; the air flow channel is stopped, the workpiece falls onto the support paddle, and the manipulator takes the workpiece away. In this way, during the above-mentioned process of picking up and placing the workpiece, there is no direct contact between the support member and the lifting support platform, and no friction occurs between the two, thereby improving the situation where particles are generated due to friction in the lifting device, and helping to solve the problem of unsmooth lifting due to the presence of particles, thereby facilitating the smooth completion of the workpiece picking and placing operation.

[0048] The structure and implementation process of the embodiment of the present disclosure are described in detail below in conjunction with the accompanying drawings. It can be understood that the lifting device provided in this embodiment can be applied to heat treatment equipment and other chambers that require lifting workpieces.

[0049] Figure 1 It is a schematic diagram of the structure of a lifting device (when a workpiece is placed on a support table) provided by an embodiment, specifically a schematic diagram after being cut with a cutting plane parallel to the central axis O of the support table.

[0050] Please refer to Figure 1 , the lifting device provided by the embodiment of the present disclosure includes: a support platform 100, a support member 200 and a support paddle 300. The support platform 100 is used to support a workpiece 600; wherein the workpiece 600 may include a wafer or other semiconductor devices. The shape of the support platform 100 may correspond to the shape of the workpiece 600. For example, when the workpiece 600 is circular, the support platform 100 may be cylindrical; when the workpiece 600 is polygonal, the support platform 100 may be prismatic.

[0051] For ease of description, the direction of the support platform 100 toward the workpiece 600 will be referred to as the upper side, the direction of the support platform 100 away from the workpiece 600 (ie, the direction of gravity) will be referred to as the lower side, and the direction opposite to the central axis O of the support platform will be referred to as the inner side.

[0052] The support platform 100 is provided with an air flow channel 110, and the air flow channel 110 has an air inlet hole 111 and an air outlet hole 112. The inlet end of the air inlet hole 111 may be located on the lower surface or side of the support platform 100. The air inlet hole 111 is connected to an air source outside the lifting device. The extension path of the air inlet hole 111 may be set according to actual needs. For example, a part of the air inlet hole 111 may extend along the axial direction of the support platform 100, and another part of the air inlet hole 111 may extend in the horizontal direction.

[0053] The exhaust hole 112 is connected to the air inlet 111. The exhaust hole 112 is extended along the axial direction of the support table 100. The outlet end of the exhaust hole 112 is located on the upper surface of the support table 100, so that the gas (such as nitrogen, hydrogen and other process gases) flowing out of the exhaust hole 112 can be blown toward the workpiece 600. The upper surface of the support table 100 has a plurality of outlet ends of the exhaust holes 112, for example, the outlet ends of the plurality of exhaust holes 112 are distributed in a lattice shape.

[0054] When the pressure of the gas flowing out of the exhaust hole 112 reaches a preset pressure, the workpiece 600 can be lifted. In this way, when the present embodiment is applied to a heat treatment process, the workpiece 600 can be lifted by the gas to avoid the cold spot area caused by the contact between the mechanical component and the workpiece 600, thereby ensuring the temperature uniformity of the workpiece 600.

[0055] A plurality of support members 200 are spaced apart along the circumference of the support platform 100. Figure 1 There is a preset distance between the support member 200 and the support table 100 to prevent particles from being generated due to friction between the support member 200 and the support table 100 during the lifting and lowering process of the support table 100. The horizontal direction is perpendicular to the axial direction of the support table 100, or in other words, the horizontal direction is perpendicular to the direction of gravity. In some examples, the preset distance d between the support member 200 and the support table 100 satisfies: 0.1mm≤d≤2mm, mm represents millimeters; for example, the preset distance between the support table 100 and the support member 200 is 0.1mm or 0.5mm or 1mm or 1.5mm or 2mm, or the distance between any two of the above.

[0056] The number of the support members 200 may be two, three, four, or more than four. The specific number of the support members 200 is set according to actual needs. Generally speaking, the larger the size of the workpiece 600, the more the number of the support members 200. The preset spacing between each support member 200 and the support table 100 may be the same or different.

[0057] In one possible implementation, the support member 200 includes a support rod 210. The preset spacing between the support member 200 and the support platform 100 refers to the minimum distance between the support rod 210 and the support platform 100 in the horizontal direction. The upper portion of the support rod 210 is connected to the hinge shaft 220, and the hinge shaft 220 cooperates with the support paddle 300, so that the support paddle 300 can rotate with the central axis of the hinge shaft 220 as the rotation center.

[0058] The hinge shaft 220 is rotatably connected to one of the support rod 210 and the support paddle 300 through a bearing, and the hinge shaft 220 is fixedly connected to the other of the support rod 210 and the support paddle 300. In some examples, the hinge shaft 220 is fixedly connected to the support rod 210, and the hinge shaft 220 is rotatably connected to the support paddle 300. In other examples, the hinge shaft 220 is rotatably connected to the support rod 210, and the hinge shaft 220 is fixedly connected to the support paddle 300.

[0059] In other embodiments, the support member 200 includes a support plate, which may be a flat plate or an arc-shaped plate, and the upper portion of the support plate is hinged to the support paddle 300 via a hinge shaft 220 .

[0060] The supporting paddle 300 is a plate-shaped structure. Exemplarily, the supporting paddle 300 includes a paddle body and a shaft sleeve, the paddle body is plate-shaped, the shaft sleeve is connected to the side of the paddle body away from the central axis O of the support platform, and the shaft sleeve is rotatably connected to the hinge shaft 220. In other examples, the supporting paddle 300 includes a paddle body and a hinge shaft, the hinge shaft is fixedly connected to the paddle plate body, and the hinge shaft is rotatably connected to the support member 200.

[0061] like Figure 1 As shown, when no external force is applied, the support paddle 300 is located at the first position. When located at the first position, the support paddle 300 is substantially parallel to the horizontal direction. For example, when located at the first position, the support paddle 300 is parallel to the horizontal direction, or the angle between the support paddle 300 and the horizontal direction is ≤15°.

[0062] When located at the first position, at least two support paddles 300 are away from the ends of the support member 200 to define a first space. The size of the first space in the horizontal direction is smaller than the size of the support platform 100 and the workpiece 600 in the horizontal direction; Figure 1 In the embodiment, the size of the first space in the horizontal direction is the minimum distance between the opposite ends of the two supporting paddles 300. In this way, the supporting paddles 300 can support the workpiece 600, and the rising support platform 100 or the workpiece 600 can provide a thrust to the supporting paddles 300, so that the supporting paddles 300 rotate from the first position to the second position.

[0063] In other words, taking the plane where the upper surface of the support table 100 is located as the projection surface, the orthographic projection of the support paddle 300 on the projection surface is the first orthographic projection, and the orthographic projection of the workpiece 600 on the projection surface is the second orthographic projection as an example, the first orthographic projection and the upper surface of the support table 100 have a first overlapping area, and the first orthographic projection and the second orthographic projection have a second overlapping area. Taking the support table 100 as a cylindrical shape as an example, the first space is a circular space, the diameter of the first space is smaller than the diameter of the support table 100, and the diameter of the first space is smaller than the diameter of the workpiece 600.

[0064] Among them, along the horizontal direction ( Figure 1 In the left-right direction, the ratio of the size of the support paddle 300 to the size of the support table 100 is less than or equal to 2 / 25; for example, the ratio of the size of the support paddle 300 to the size of the support table 100 is 2 / 25 or 1 / 25 or 1 / 50, or the ratio between any two of the above.

[0065] In the horizontal direction (for example, along Figure 1 In the left and right directions of the first overlapped area, the ratio of the size of the first overlapped area to the size of the first orthographic projection is less than or equal to 1 / 2; for example, the ratio of the size of the first overlapped area to the size of the first orthographic projection is 1 / 25, 1 / 3, or 1 / 6, or a ratio between any two of the above. In this way, by setting the portion of the support paddle 300 located in the second overlapped area relatively small, it is helpful to reduce the contact area between the support paddle 300 and the support table 100 or the workpiece 600, thereby reducing or even avoiding the generation of particles due to friction during the process of the support table 100 or the workpiece 600 pushing the support paddle 300 open.

[0066] The surface of the supporting paddle 300 that can contact the supporting platform 100 or the workpiece 600 has good smoothness. For example, the surface can be polished to obtain a smooth surface, thereby reducing or even avoiding the generation of particles due to friction.

[0067] Figure 2 1 is a schematic diagram of the structure of the lifting device according to an embodiment of the present disclosure, specifically a schematic diagram cut through a section plane parallel to the central axis O of the support platform. Figure 2 In the embodiment, the support platform 100 and the workpiece 600 supported by it are in an ascending state, and the support platform 100 pushes the support paddle 300 to the second position.

[0068] Please refer to Figure 2, when the support paddles 300 rotate to the second position, the ends of at least two support paddles 300 away from the support member 200 are used to define a second space, and the second space is used for the support table 100 or the workpiece 600 to pass through. Generally speaking, when the support table 100 rises, the size of the second space in the horizontal direction is equal to or slightly larger than the size of the support table 100 in the horizontal direction; when the gas lifts the workpiece 600, the size of the second space in the horizontal direction is equal to or slightly larger than the size of the workpiece 600 in the horizontal direction. It can be understood that: since the sizes of the workpiece 600 and the support table 100 may be different in the horizontal direction, and the sizes of different workpieces 600 are also different, the second position is not unique, and the second position is relative to the initial first position. The second position is that the support table 100 (or the workpiece 100) rises and pushes the support paddles 300 to a position where the support table 100 (or the workpiece 100) can pass through; accordingly, the size of the second space in the horizontal direction is not unique, and the size of the second space in the horizontal direction is larger than the size of the first space in the horizontal direction.

[0069] When the support platform 100 or the workpiece 600 drops to a position below the support paddle 300 in the second position, the support paddle 300 can be restored from the second position to the first position under the action of the restoring force. The restoring force can be provided by the gravity of the support paddle 300 itself, so as to further reduce the friction between the support paddle 300 and the support platform 100 or the workpiece 600. In other examples, the restoring force can also be provided by an elastic member such as a torsion spring.

[0070] Figure 3 is a schematic diagram of the structure of the lifting device according to an embodiment of the present disclosure (when the workpiece is placed on the supporting paddle), specifically a schematic diagram after being cut with a cutting plane parallel to the central axis O of the supporting platform; Figure 3 In the embodiment, the supporting paddle 300 is located at the second position.

[0071] Figure 4 is a schematic diagram of a lifting scene of a lifting device according to an embodiment of the present disclosure; Figure 4 In the bottom schematic diagram, dotted arrows are used to indicate the direction of gas flow.

[0072] When the lifting device of this embodiment is used to process the workpiece 600, Figure 3 or Figure 4 As shown in (the first schematic diagram from the top), when the workpiece 600 needs to be surface treated, the workpiece 600 can be placed on the upper surface of the supporting paddle 300 by a robot arm. At this time, the supporting paddle 300 is located at the first position.

[0073] As shown or Figure 4As shown in (the second schematic diagram from the top), the support table 100 is controlled to move upward so that the support paddle 300 rotates from the first position toward the second position under the thrust of the support table 100 until the support table 100 carries the workpiece 600; the support table 100 is continued to be controlled to move upward until the support table 100 moves upward to the first target position, and the workpiece 600 is surface treated.

[0074] After the surface treatment process is completed, the support table 100 is controlled to move downward; Figure 1 or Figure 4 As shown in (the third schematic diagram from the top), when the support platform 100 moves to a position below the support paddle 300, the support paddle 300 gradually returns to the first position under the action of the restoring force.

[0075] Continue to control the support platform 100 to move downward until the support platform 100 moves downward to the second target position, and then introduce gas into the air flow channel 110 of the support platform 100; Figure 4 As shown in (the fourth schematic diagram from the top), when the pressure in the exhaust hole 112 of the air flow channel 110 reaches a preset pressure, the gas flowing out of the exhaust hole 112 lifts the workpiece 600; under the thrust of the workpiece 600, the support paddle 300 rotates from the first position toward the second position until the workpiece 600 moves to the top of the support paddle 300; when the support paddle 300 gradually returns to the first position under the action of the restoring force, the gas is stopped from being introduced into the air flow channel 110 of the support table 100, as shown in FIG. Figure 3 or Figure 4 As shown in (the first schematic diagram from the top), the workpiece 600 falls on the upper surface of the supporting paddle 300. At this time, the workpiece 600 can be taken away by a robot.

[0076] Since the process of the robot arm picking up and placing the workpiece 600 is a dynamic process, the present embodiment provides a support member 200 and a support paddle 300. During the process of picking up and placing the workpiece 600, the workpiece 600 is supported by the support paddle 300. This can avoid the situation where the workpiece 600 loses balance due to interference with the flow field distribution caused by the operation of the robot arm picking up and placing the workpiece 600, thereby ensuring the stability of the workpiece 600.

[0077] In other possible implementations, the support paddle 300 may be slidably connected to the support member 200. For example, a slide groove (not shown in the figure) is provided at the upper end of the support member 200, and the support paddle 300 is slidably matched with the slide groove; an elastic member is connected to the end of the support paddle 300 away from the support platform 100. In this way, in the absence of external force, the support paddle 300 is located in the first position. Under the thrust provided by the support platform 100 or the workpiece 600, the support paddle 300 will overcome the force of the elastic member and slide to the second position. When the thrust provided by the support platform 100 or the workpiece 600 is cancelled, the support paddle 300 will return to the first position under the force of the elastic member.

[0078] In the lifting device provided in this embodiment, during the process of taking and placing the workpiece 600, there is no direct contact between the support member 200 and the support platform 100, and no friction occurs between the two, thereby reducing or even avoiding the generation of particles due to friction, and avoiding the problem of unsmooth lifting due to the presence of particles, thereby facilitating the smooth completion of the taking and placing operation of the workpiece 600.

[0079] In addition, in this embodiment, when the workpiece 600 is heat treated, the workpiece 600 can be lifted up by gas to avoid cold spots caused by contact between mechanical components and the workpiece 600, thereby ensuring the temperature uniformity of the workpiece 600.

[0080] Figure 5 is a schematic diagram of the structure of a support rod and a support paddle according to an embodiment of the present disclosure.

[0081] Please refer to Figure 5 , and continue to refer to Figures 1 to 3 As shown, in some embodiments, the support member 200 includes: a support rod 210. The support rod 210 has a rod-shaped body 213, which may be cylindrical or prismatic. The lower end of the rod-shaped body 213 is used to fix the support member 20 to a preset installation position (e.g., the inner wall of the cavity). The first end surface (i.e., the upper end surface) of the upper end of the rod-shaped body 213 has an installation area and a limit area; the limit area is located on the side of the installation area facing the central axis O of the support platform. The portion of the first end surface located in the installation area is connected to an upwardly protruding installation boss 211, and a hinge shaft 220 is passed through the installation boss 211. The axial direction of the hinge shaft 220 is perpendicular to the rotation direction of the support paddle 300. The hinge shaft 220 cooperates with the support paddle 300, so that the support paddle 300 is hinged to the support rod 210.

[0082] In this embodiment, due to the existence of the limiting area, the support paddle 300 is also in a tilted state when it rotates to the second position. When the thrust on the support paddle 300 is withdrawn, the support paddle 300 is facilitated to return to the first position under the action of its own gravity, and there is no need to set an elastic member for allowing the support paddle 300 to return, thereby helping to reduce the resistance encountered by the support paddle 300 during movement and reducing the friction between the support paddle 300 and the support platform 100 or the workpiece 600.

[0083] The upper surface of the mounting boss 211 may be an arc-shaped surface, and the side surface of the mounting boss 211 facing the limiting area may be an inclined surface, and the inclined surface gradually moves away from the central axis O of the support platform from bottom to top; the shape of the support paddle 300 can match the side surface of the mounting boss 211. In this way, when the support paddle 300 rotates to the second position, the mounting boss 211 will not provide a contact surface for the support paddle 300 to remain in the second position, which is conducive to the support paddle 300 returning to the first position under the action of gravity.

[0084] In some examples, the portion of the first end surface located in the limiting area serves as the first limiting surface 212 for contacting the support paddle 300 when the support paddle 300 returns to the first position, thereby limiting the support paddle 300 from continuing to move in a direction away from the second position.

[0085] The first limiting surface 212 is a plane parallel to the horizontal direction. Alternatively, the first limiting surface 212 is an inclined surface, and the angle between the first limiting surface 212 and the horizontal direction is ≤15°; for example, the angle between the first limiting surface 212 and the horizontal direction is 15°, 10°, 5°, or 1°, or any angle between any two of the above.

[0086] In some examples, the lifting device further includes: a limit member 400; the limit member 400 is connected to the outer side of the support member 200 away from the support platform 100, and the limit member 400 has an inner side facing the support platform 100, and the inner side extends upward from the support rod 210 to form a second limit surface 410, and the second limit surface 410 is used to limit the extreme position (such as Figure 5 The dotted line indicates the position of the support paddle), which is specifically used to contact the support paddle 300 when the support paddle 300 moves to the extreme position in the direction away from the first position.

[0087] The stopper 400 is a relatively small stopper block, or a relatively large stopper plate. The stopper 400 can be fixedly connected to the support rod 210 by welding, bonding, or fastening, or the stopper 400 can be integrally arranged with the support rod 210 by an integral molding process.

[0088] The second limiting surface 410 is arranged perpendicular to the horizontal direction, so that the supporting paddle 300 can rotate within a range of 90°, and has a relatively large rotation range. Alternatively, the second limiting surface 410 is an inclined surface, and along the direction from bottom to top, the second limiting surface 410 gradually approaches the central axis O of the supporting platform, which is more conducive to the supporting paddle 300 returning to the first position under the action of gravity.

[0089] In other examples, when in the first position, the paddle body of the support paddle 300 may extend in a direction away from the central axis O of the support platform and extend out of the support rod 210; the portion of the lower surface of the paddle body extending out of the support rod 210 may form a third limiting surface (not shown in the figure). The third limiting surface is used to contact the outer side surface of the support rod 210 when the support paddle 300 moves to the extreme position in the direction away from the first position.

[0090] In some examples, the support paddle 300 is provided with a guide portion 310, and the guide portion 310 is used to guide the support platform 100 or the workpiece 600 to move in a direction toward the support paddle 300. The guide portion 310 is a smooth inclined surface or an arc surface, and along the direction from bottom to top, the guide portion 310 gradually approaches the central axis O of the support platform, so that when the support platform 100 or the workpiece 600 moves upward and pushes the support paddle 300 away, it is helpful to reduce the friction between the support paddle 300 and the support platform 100 or the workpiece 600.

[0091] Figure 6 is a schematic diagram of the distribution of exhaust holes in a support platform according to an embodiment of the present disclosure; Figure 6 Specifically, it is a top view.

[0092] Please refer to Figure 6 In some embodiments, in the air flow channel 110, the outlet end of the exhaust hole 112 is located on the upper surface of the support platform 100. The upper surface of the support platform 100 has a central area 100a and a peripheral area 100b, and the peripheral area 100b is located outside the central area 100a. When the support platform 100 is a cylindrical structure, the central area 100a is a circular area, and the peripheral area 100b is a circular ring area.

[0093] The exhaust holes 112 include a first type of exhaust hole 112a and a second type of exhaust hole 112b; the outlet end of the first type of exhaust hole 112a is located in the central area 100a; the outlet end of the second type of exhaust hole 112b is located in the peripheral area 100b. The workpiece 600 has a middle area close to its center and an edge area close to its edge, and the edge area is located outside the middle area. The force exerted by the gas discharged from the first type of exhaust hole 112a on the workpiece 600 is greater than the force exerted by the gas discharged from the second type of exhaust hole 112b on the workpiece 600, so that the lifting force exerted on the middle area of ​​the workpiece 600 is greater than the lifting force exerted on the edge area of ​​the workpiece 600, thereby ensuring the stability of the workpiece 600.

[0094] like Figure 6 As shown, in some examples, the spacing between two adjacent first-type exhaust holes 112a is greater than the spacing between two adjacent second-type exhaust holes 112b. That is, the density of the first-type exhaust holes 112a provided in the portion of the support platform 100 located in the central area 100a is greater than the density of the second-type exhaust holes 112b provided in the portion of the support platform 100 located in the peripheral area 100b. With such a configuration, the force exerted by the gas exhausted from the central area 100a on the workpiece 600 is greater than the force exerted by the gas exhausted from the peripheral area 100b on the workpiece 600, thereby ensuring the stability of the workpiece 600.

[0095] like Figure 6 As shown, in some examples, the diameter of the first type of exhaust hole 112a is greater than the diameter of the second type of exhaust hole 112b. Exemplarily, the direct ratio of the diameter of the first type of exhaust hole 112a to the diameter of the second type of exhaust hole 112b is greater than 1, and the direct ratio of the diameter of the first type of exhaust hole 112a to the diameter of the second type of exhaust hole 112b is less than or equal to 3; for example, the direct ratio of the diameter of the first type of exhaust hole 112a to the diameter of the second type of exhaust hole 112b is 1.1 or 1.5 or 2 or 2.5 or 3, or a ratio between any two of the above. In this way, the lifting force on the middle area of ​​the workpiece 600 is greater than the lifting force on the edge area of ​​the workpiece 600, which is conducive to ensuring the stability of the workpiece 600.

[0096] like Figure 7As shown, in some examples, along the direction from bottom to top, the axial direction of the second type exhaust hole 112b gradually tilts toward the central axis O of the support table, so that the gas discharged from the second type exhaust hole 112b blows toward the middle area of ​​the workpiece 600, thereby facilitating the stability of the workpiece 600. Exemplarily, the angle between the central axis of the second type exhaust hole 112b and the central axis O of the support table can be greater than 0° and less than 30°. For example, the angle between the central axis of the second type exhaust hole 112b and the central axis O of the support table can be 1° or 5° or 10° or 15° or 20° or 25° or 30°, or any two of the above angles. The central axis of the first type exhaust hole 112a is parallel to the central axis O of the support table.

[0097] In other embodiments, the spacing between two adjacent first-type exhaust holes 112a is equal to the spacing between two adjacent second-type exhaust holes 112b. Alternatively, the diameter of the first-type exhaust hole 112a is equal to the diameter of the second-type exhaust hole 112b. Alternatively, the central axis of the first-type exhaust hole 112a and the second-type exhaust hole 112b are both parallel to the central axis O of the support platform.

[0098] Please continue to refer to Figures 1 to 3 In some embodiments, the lifting device further includes: a heating element 500; an installation space (not shown in the figure) is provided in the support platform 100, and the heating element 500 is located in the installation space.

[0099] Exemplarily, the support platform 100 includes a first main body and a second main body distributed at intervals along the axial direction, and the first main body and the second main body are sealed and matched. At least one of the first main body and the second main body is provided with a mounting groove, and the heating element 500 is installed in the mounting groove; wherein the space defined by the mounting groove is the mounting space; or, one of the first main body and the second main body is provided with an extension ring extending toward the other, and the space defined by the extension ring is the mounting space.

[0100] In some examples, when the heating element 500 is in operation, if no gas is introduced into the gas flow channel 110 , the heat generated by the heating element 500 can be transferred to the support table 100 , and the support table 100 transfers the heat to the workpiece 600 , thereby heating the workpiece 600 .

[0101] In other examples, when the heating element 500 is in the heating working process, the heat generated by the heating element 500 can be conducted to the support table 100; when the heating element 500 is heated to the target temperature, gas is introduced into the airflow channel 110, and the gas entering the airflow channel 110 can exchange heat with the support table 100, and the gas after heat exchange flows to the exhaust hole 112 of the airflow channel 110 and heats the workpiece 600, thereby heating the workpiece 600; at this time, the pressure at the exhaust hole 112 of the airflow channel 110 is less than the preset pressure that can lift the workpiece 600.

[0102] In this example, the air inlet 111 of the air flow channel 110 may be located on the lower surface of the support platform 100 to increase the length of the gas flow path, thereby improving the heat exchange effect between the gas and the support platform 100 .

[0103] In some other examples, during the operation of the heating element 500, gas is not introduced into the air flow channel 110, and the heat generated by the heating element 500 can be conducted to the support table 100, and the support table 100 conducts the heat to the workpiece 600, thereby heating the workpiece 600; if the requirements of the heating process are not met at this time, gas can be introduced into the air flow channel 110, and the gas entering the air flow channel 110 can exchange heat with the support table 100. The gas after heat exchange flows to the exhaust hole 112 of the air flow channel 110 and heats the workpiece 600, thereby continuing to heat the workpiece 600.

[0104] In some examples, the airflow channel 110 and the installation space are independently arranged to prevent the gas in the airflow channel 110 from being contaminated and affecting the workpiece 600. For example, the air inlet 111 of the airflow channel 110 is arranged close to the edge of the support table 100. The center of the installation space where the heating element 500 is located is located on the central axis O of the support table, which helps to ensure that the workpiece 600 is evenly heated.

[0105] In other examples, the air flow channel 110 may also be arranged in communication with the installation space, so as to improve the heat exchange effect between the gas entering the air flow channel 110 and the heating wire 510 in the installation space.

[0106] Please refer to Figure 8 In some examples, the heating element 500 includes a heating wire 510; at least a portion of the heating wire 510 is bent along the circumference of the support platform 100, so that the heating wire 510 has a longer layout path, which is beneficial to improving the heating effect.

[0107] Exemplarily, the heating wire 510 includes: a bending section 511 and a connecting section 512. There are multiple bending sections 511, and at least two bending sections 511 are spaced apart in the direction toward the central axis O of the support platform, that is, a part of the bending section 511 is located on the inner side of another part of the bending section 511 toward the central axis O of the support platform. The connecting section 512 extends in the direction toward the central axis O of the support platform, and the connecting section 512 is connected between two adjacent bending sections 511.

[0108] The following description will be made by taking the support platform 100 in a cylindrical shape as an example. The bending section 511 may be arc-shaped. At least two bending sections 511 are spaced apart along the radial direction of the support platform 100; the connecting section 512 extends along the radial direction of the support platform 100, and the connecting section 512 is connected between two adjacent bending sections 511. For example, along the radial direction of the support platform 100, two bending sections 511 are spaced apart, and the one close to the central axis O of the support platform is the inner circle bending section 511, and the one away from the central axis O of the support platform is the outer circle bending section 511. For example, the connecting section 512 is connected between the inner circle bending section 511 and the outer circle bending section 511, so as to connect the bending section 511 and the connecting section 512 into a whole, which is conducive to simplifying the electrical connection between the heating wire 510 and the external circuit board.

[0109] In some examples, at least three bending segments 511 are distributed at intervals along the direction toward the central axis O of the support platform, and the distance between two adjacent bending segments 511 gradually decreases. Taking the support platform 100 in a cylindrical shape as an example, at least three bending segments 511 are distributed at intervals along the radial direction of the support platform 100, and the closer to the central axis O of the support platform, the smaller the distance between two adjacent bending segments 511. In other examples, the distance between every two adjacent bending segments 511 can also be equal.

[0110] like Figure 8 As shown, for ease of description, three arcs are distributed along the radial direction of the support platform 100. Along the direction toward the central axis O of the support platform, the three bending segments 511 are respectively the first bending segment 511a, the second bending segment 511b and the third bending segment 511c. The first bending segment 511a and the second bending segment 511b are both roughly semicircular. The first bending segment 511a and the second bending segment 511b each have two, and the third bending segment 511c is roughly circular. The two first bending segments 511a and the second bending segment 511b each have two, and the third bending segment 511c is roughly circular. 1a are respectively arranged close to the edge of the support platform 100, and the ends of the two first bending sections 511a are arranged opposite to each other; the two second bending sections 511b are respectively located on the inner side of the first bending sections 511a, and the ends of the two second bending sections 511b are arranged opposite to each other; the third bending section 511c is located on the inner side of the second bending section 511b; the spacing between adjacent first bending sections 511a and second bending sections 511b is greater than the spacing between the second bending sections 511b and the third bending sections 511c.

[0111] For ease of description, along the counterclockwise direction, each connecting segment 512 has a head end and a tail end. Figure 8 The first end of the first bending section 511a located at the top is used to be electrically connected to the external circuit board. Figure 8 The tail end of the first bending section 511a) located at the top is connected to the adjacent second bending section 511b ( Figure 8 The second bending section 511b ( Figure 8 The first end of the second bending section 511b located at the top of the middle portion passes through the connecting section 512 and the first end of the third bending section 511c, and the tail end of the third bending section 511c passes through the connecting section 512 and another second bending section 511b ( Figure 8 The second bending section 511b ( Figure 8 The first end of the second bending section 511b located at the bottom is connected to the adjacent first bending section 511a ( Figure 8 The first bending section 511a ( Figure 8 The tail end of the first bent section 511a) located at the bottom is used for electrical connection with an external circuit board.

[0112] In other examples, each bending segment 511 is roughly circular. The head end and the tail end of each bending segment 511 are electrically connected to an external circuit board. Alternatively, the heating wire 510 includes a plurality of heating segments extending along a straight line, and the plurality of heating segments are spaced apart in a direction toward the central axis O of the support platform; wherein the specific number, length and density of the heating wire 510 are set as required.

[0113] In other examples, the heating element 500 may also include a radiation type heating device such as a heating lamp. Taking the example that the heating element 500 includes a plurality of heating lamps, when the support platform 100 is cylindrical, the plurality of heating lamps may be in an arc shape, and at least two heating lamps may be arranged along the radial direction of the support platform 100.

[0114] When the lifting device disclosed in this embodiment is used to process the workpiece 600, the workpiece 600 is placed on the support paddle 300, wherein the support paddle 300 is located at the first position; the support table 100 is controlled to move upward toward the support paddle 300, so that the support paddle 300 moves from the first position toward the second position under the thrust of the support table 100 until the support table 100 carries the workpiece 600.

[0115] When the support table 100 moves upward to the first target position, the heating element 500 is controlled to heat the workpiece 600; wherein the heat generated by the heating element 500 is conducted to the workpiece 600 through the support table 100. Alternatively, when the support table 100 moves upward to the first target position, the heating element 500 is controlled to heat to a target temperature; gas is introduced into the air flow channel 110 of the support table 100, and the pressure in the exhaust hole 112 is made less than a preset pressure; wherein the gas can exchange heat with the support table 100, and the heat-exchanged gas exchanges heat with the workpiece 600 at the outlet end of the exhaust hole 112.

[0116] After the heating is completed, the support table 100 is controlled to move downward; wherein, when the support table 100 moves to the bottom of the support paddle 300, the support paddle 300 gradually returns to the first position under the action of the restoring force; when the support table 100 moves downward to the second target position, gas is introduced into the air flow channel 110 of the support table 100; when the pressure in the exhaust hole 112 of the air flow channel 110 reaches the preset pressure, the gas flowing out of the exhaust hole 112 lifts the workpiece 600; under the thrust of the workpiece 600, the support paddle 300 moves from the first position to the second position until the workpiece 600 moves to the top of the support paddle 300; when the support paddle 300 gradually returns to the first position under the action of the restoring force, the gas is stopped from being introduced into the air flow channel 110 of the support table 100, so that the workpiece 600 falls on the support paddle 300; and the workpiece 600 is taken away.

[0117] Fig. 9 1 is a schematic diagram of the relative positions of the heating wire 510 and the outlet end of the exhaust hole 112 when the heating wire 510 is projected onto the upper surface of the support platform 100. The first type of exhaust hole 112a is located in the space defined by the second bending section 511b, and the second type of exhaust hole 112b is located in the annular space defined by the first bending section 511a and the second bending section 511b.

[0118] Please refer to Fig.10 The embodiment of the present disclosure also provides a heat treatment device for a workpiece, comprising: a cavity 700, a driving mechanism (not shown in the figure) and a lifting device; the lifting device is located in the cavity 700, and the driving mechanism is used to drive the support table 100 in the lifting device to move along the axial direction of the support table. The structure, function and implementation process of the lifting device are the same as those of the lifting device in any of the above embodiments, and will not be repeated in this embodiment.

[0119] Exemplarily, the drive mechanism is located in the cavity 700, or the drive mechanism is located outside the cavity 700. The drive mechanism may include a linear motor (or cylinder), which is connected to the support table 100 in the lifting device. Alternatively, the drive mechanism includes a motor and a screw nut assembly, the motor is used to output rotational motion, and the screw nut assembly is used to convert the rotational motion into linear motion. Alternatively, the drive mechanism includes a motor and a gear rack assembly, the motor is used to output rotational motion, and the gear rack is used to convert the rotational motion into linear motion.

[0120] In addition, other structures and functions of the heat treatment equipment of the embodiment of the present disclosure are known to those skilled in the art and will not be described in detail here to reduce redundancy.

[0121] The disclosed embodiment also provides a workpiece processing method based on the lifting device in any of the aforementioned embodiments, wherein the parts corresponding to the lifting device in the aforementioned embodiments are not repeated in this embodiment.

[0122] Please refer to Fig.11 The workpiece processing method comprises the following steps:

[0123] S111: placing the workpiece on the supporting paddle, wherein the supporting paddle is located at a first position;

[0124] S112: Control the support platform to move upward toward the support paddle, so that the support paddle moves from the first position toward the second position under the thrust of the support platform until the support platform carries the workpiece;

[0125] S113: When the support table moves upward to the first target position, performing surface treatment on the workpiece;

[0126] S114: After the surface treatment is completed, controlling the support platform to move downward; wherein, when the support platform moves to be located below the support paddle, the support paddle gradually returns to the first position under the action of the restoring force;

[0127] S115: When the support platform moves downward to the second target position, gas is introduced into the air flow channel of the support platform; wherein, when the pressure of the gas in the air flow channel reaches a preset pressure, the gas flowing out of the air flow channel lifts the workpiece; under the thrust of the workpiece, the support paddle moves from the first position toward the second position until the workpiece moves to above the support paddle;

[0128] S116: when the supporting paddle gradually returns to the first position under the action of the restoring force, stop introducing gas into the air flow channel, so that the workpiece falls on the supporting paddle;

[0129] S117: Take away the workpiece.

[0130] In some embodiments, performing surface treatment on a workpiece includes: controlling a heating element to heat the workpiece; wherein heat generated by the heating element is conducted to the workpiece through the support table.

[0131] In some embodiments, the workpiece is subjected to surface treatment, including:

[0132] Controlling the heating element to heat to a target temperature;

[0133] Gas is introduced into the air flow channel of the support table, and the pressure of the gas in the air flow channel is made lower than a preset pressure; wherein the gas can exchange heat with the support table, and the gas after heat exchange exchanges heat with the workpiece at the outlet end of the air flow channel.

[0134] It can be understood that the parts that are the same as or corresponding to the above-mentioned embodiments will not be described in detail in this embodiment.

[0135] In the description of the present disclosure, it is necessary to understand that the orientations or positional relationships indicated by “up”, “down”, “horizontal”, “inside”, “outside”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0136] In addition, the terms "first", "second", etc. used in the embodiments of the present disclosure are only used for descriptive purposes and should not be understood as indicating or implying relative importance, or implicitly indicating the number of technical features indicated in the embodiments. Therefore, the features defined by the terms "first", "second", etc. in the embodiments of the present disclosure may explicitly or implicitly indicate that at least one of the features is included in the embodiment. In the description of the present disclosure, the word "multiple" means at least two or two or more, such as two, three, four, etc., unless otherwise clearly and specifically defined in the embodiments.

[0137] In the present disclosure, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "connected" and "fixed" etc. appearing in the embodiments should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integrated connection. It can be understood that it can also be a mechanical connection, an electrical connection, etc.; of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements, or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific implementation situation.

[0138] In the present disclosure, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0139] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. A lifting device, comprising: A support platform for supporting a workpiece; an air flow channel is provided in the support platform; wherein, when the pressure of the gas discharged from the air flow channel reaches a preset pressure, the gas can lift the workpiece; Support members, a plurality of the support members are distributed at intervals along the circumference of the support platform, and a preset distance is provided between the support members and the support platform; A supporting paddle, wherein a plurality of the supporting paddles are respectively movably connected to the corresponding supporting member; the supporting paddle is used to move from a first position to a second position under the thrust provided by the supporting platform or the workpiece; the supporting paddle is also used to return from the second position to the first position under the action of a restoring force; Wherein, when the supporting paddles are located at the first position, at least two ends of the supporting paddles away from the supporting member are used to define a first space, and the size of the first space in the horizontal direction is respectively smaller than the size of the supporting platform and the workpiece in the horizontal direction; the horizontal direction is perpendicular to the axial direction of the supporting platform; When the supporting paddles are located at the second position, ends of at least two supporting paddles away from the supporting member are used to define a second space, and the second space is used for the supporting platform or the workpiece to pass through.

2. The lifting device according to claim 1, wherein: The plurality of support paddles are respectively hinged to the corresponding support members; wherein the support paddles are used to rotate from a first position to a second position under the thrust provided by the support platform or the workpiece; and the support paddles are also used to rotate from the second position to the first position under the action of gravity.

3. The lifting device according to claim 2, wherein: The support member comprises: a support rod, the support rod having a first end surface facing the support paddle, the first end surface having a mounting area and a limiting area; the limiting area is located on the inner side of the mounting area facing the central axis of the support platform; The portion of the first end surface located in the installation area is connected with a mounting boss, a hinge shaft is installed in the mounting boss, and the hinge shaft cooperates with the supporting paddle; The portion of the first end surface located in the limiting area forms a first limiting surface, and the first limiting surface is used to contact the supporting paddle when the supporting paddle returns to the first position.

4. The lifting device according to claim 2, further comprising: A limiting member; the limiting member is connected to the outer side of the supporting member away from the central axis of the supporting platform, and the limiting member has an inner side surface facing the central axis of the supporting platform, and part of the inner side surface forms a second limiting surface, and the second limiting surface is used to contact the supporting paddle when the supporting paddle moves to an extreme position in a direction away from the first position.

5. The lifting device according to claim 4, wherein: The second limiting surface is arranged perpendicular to the horizontal direction; Alternatively, along a direction opposite to the direction of gravity, the second limiting surface gradually approaches the central axis of the support platform; the direction of gravity is parallel to the axial direction of the support platform.

6. The lifting device according to claim 1, wherein: The supporting paddle is provided with a guiding portion, and the guiding portion is used to guide the supporting platform or the workpiece to move in a direction opposite to the direction of gravity.

7. The lifting device according to claim 1, wherein: The surface of the support platform facing the workpiece has a central area and a peripheral area, and the peripheral area is located outside the central area away from the central axis of the support platform; The airflow channel has a first type of exhaust holes and a second type of exhaust holes; the outlet end of the first type of exhaust holes is located in the central area; the outlet end of the second type of exhaust holes is located in the peripheral area.

8. The lifting device according to claim 7, wherein: The distance between two adjacent exhaust holes of the first type is greater than the distance between two adjacent exhaust holes of the second type.

9. The lifting device according to claim 7, wherein: The diameter of the first type of exhaust holes is greater than the diameter of the second type of exhaust holes.

10. The lifting device according to claim 7, wherein: Along the direction opposite to the direction of gravity, the axial direction of the second type exhaust hole gradually tilts toward the central axis of the support platform.

11. The lifting device according to claim 1, further comprising: Heating element; an installation space is provided in the support platform, and the heating element is located in the installation space.

12. The lifting device according to claim 11, wherein: The air flow channel and the installation space are arranged independently of each other.

13. The lifting device according to claim 11, wherein: The heating element comprises a heating wire; at least a portion of the heating wire is bent along the circumference of the support platform.

14. A heat treatment device for a workpiece, comprising: A cavity, a driving mechanism and a lifting device as claimed in any one of claims 1 to 13; The lifting device is located in the cavity, and the driving mechanism is used to drive the support platform in the lifting device to move along the axial direction of the support platform.

15. A workpiece processing method, based on the lifting device according to any one of claims 1 to 13, comprising: placing the workpiece on the supporting paddle, wherein the supporting paddle is located at a first position; Controlling the support platform to move upward toward the support paddle, so that the support paddle moves from the first position toward the second position under the thrust of the support platform until the support platform carries the workpiece; When the support table moves upward to the first target position, performing surface treatment on the workpiece; After the surface treatment is completed, the support platform is controlled to move downward; wherein, when the support platform moves to be located below the support paddle, the support paddle gradually returns to the first position under the action of the restoring force; When the support platform moves downward to the second target position, gas is introduced into the air flow channel of the support platform; wherein, when the pressure of the gas in the air flow channel reaches a preset pressure, the gas flowing out of the air flow channel lifts the workpiece; under the thrust of the workpiece, the support paddle moves from the first position toward the second position until the workpiece moves above the support paddle; When the supporting paddle returns to the first position under the action of the restoring force, the gas is stopped from being introduced into the gas flow channel, so that the workpiece falls on the supporting paddle; The workpiece is removed.

16. The workpiece processing method according to claim 15, wherein: The surface treatment of the workpiece comprises: Controlling the heating element to heat to a target temperature; Gas is introduced into the air flow channel of the support table, and the pressure of the gas in the air flow channel is made lower than the preset pressure; wherein the gas can exchange heat with the support table, and the gas after heat exchange exchanges heat with the workpiece at the outlet end of the air flow channel.

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