Nitrogen recovery process suitable for silane rectification

Abstract

The invention discloses a nitrogen recovery process suitable for silane rectification, and relates to the technical field of silane, disilane and low-temperature rectification production, through the arrangement of a limiting assembly, the output of an air cylinder can relieve the limiting of the limiting assembly on a filter element, and the filter element is rapidly limited for next use when the filter element is reset; when the filter element is used and the filtering effect is reduced, the air cylinder is started to drive the filter element to go to the to-be-cleaned area for continuous cleaning, and the filter element is reset for reuse after cleaning, so that the filter element can be quickly cleaned, the purity of filtered nitrogen is ensured to meet the standard, and the cleaning assembly can be quickly reset for next use after being used. When the filtering effect is reduced again after the filter element is cleaned, the cleaning effect can be reduced if the filter element is cleaned again at the moment, the air cylinder is started to drive the filter element to go to the to-be-replaced area to replace a new filter element, then the new filter element is reset for use, and meanwhile the replacement assembly is reset for next-time use.

Description

Technical Field

[0001] The invention relates to the technical field of silane, disilane and cryogenic distillation production, in particular to a nitrogen recovery process suitable for silane distillation. Background Art

[0002] The production of silane gas using the Komatsu process (silicon-magnesium process) requires that the silicon-magnesium alloy be decomposed by inorganic acids and ammonium halides in aqueous solutions, alcohols, and liquid ammonia media to produce silane. When preparing the silicon-magnesium alloy as the reaction raw material, the crude silicon contains non-metallic impurities such as P, As, C, and B. These impurities will form magnesium compounds with magnesium. These compounds will form volatile hydrides such as PH3, As2H6, CH4, BH3, etc. when producing silane. Since existing adsorption and filtration processes cannot completely remove these small molecular impurities, they need to be combined with distillation operations to remove impurities. The boiling point of atmospheric pressure silane is relatively low (-112°C). When using atmospheric pressure distillation, a large amount of cooling capacity is required to condense the silane into the liquid phase for heat exchange and impurity removal. Therefore, liquid nitrogen is used as the refrigerant in the heat exchanger.

[0003] However, in reality, a large amount of liquid nitrogen is needed for cooling during the production process, resulting in a large amount of wasteful discharge of vaporized nitrogen. Due to the waste of nitrogen discharge, if you want to collect the nitrogen after it is discharged, you need to filter it to prevent waste of resources. However, after filtering for a period of time, the filter needs to be removed, cleaned and replaced. However, manual replacement is time-consuming and labor-intensive, which not only generates labor costs, but also affects the collection efficiency of nitrogen. Summary of the Invention

[0004] The purpose of the present invention is to provide a nitrogen recovery process suitable for silane distillation to solve the deficiencies in the above-mentioned prior art.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] S1, the respective discharge pipelines of the distillation tail nitrogen of the silane distillation tower are aggregated into a discharge main pipe;

[0007] S2. Use an air-temperature heat exchanger to heat the discharged nitrogen on the main pipe to room temperature (20-30°C) and pass it into two air inlet buffer tanks to ensure stable nitrogen discharge and protect the rear-end nitrogen compressor;

[0008] S3, pressurize the recovered nitrogen to 0.6-0.8 MPaG through a nitrogen compressor, and then pass it into a filter to remove moisture and particulate impurities in the recovered nitrogen;

[0009] S4, after the dew point and oxygen content are tested online, the recovered nitrogen reaches the set quality, enters the purge gas buffer tank, then enters the nitrogen tank, and is incorporated into the plant's process nitrogen network;

[0010] The filter is provided with a filtering structure, including a mounting frame, a cylinder is provided on the mounting frame, a sliding cavity is further provided on the mounting frame, the output end of the cylinder is slidably connected to the sliding cavity, the output end of the cylinder is provided with two limit blocks, a connecting piece is slidably connected to the output end of the cylinder, the connecting piece is located at a position where the two limit blocks are close to each other, and the bottom of the connecting piece is connected to a filter element through a clamping assembly;

[0011] The mounting frame is also provided with a cleaning assembly, and when the output end of the cylinder is extended, it can drive the filter element to move to the area to be cleaned by the cleaning assembly, and the cleaning assembly can clean the filter element;

[0012] The mounting frame is further provided with a limiting assembly, which can limit the filter element and release the limit on the filter element when the limiting block moves;

[0013] The mounting frame is also provided with a replacement assembly, and when the cylinder output end contracts, it can drive the filter element to move to the area to be replaced of the replacement assembly, and the replacement assembly can replace the filter element connected to the clamping assembly.

[0014] Furthermore, the clamping assembly includes a first fixed block, two first spring telescopic parts are arranged in the first fixed block, a clamping part is provided at each output end of the two first spring telescopic parts, a connecting rod is provided on each of the two clamping parts, and a section of the two connecting rods away from the clamping parts passes through the outside of the first fixed block, and a first inclined block is provided at one end of the two connecting rods located outside the first fixed block, a second fixed block is provided on the top of the filter element, two notches are provided on the second fixed block, and the two notches correspond to the positions of the two clamping parts respectively, and two clamping grooves are provided on the second fixed block.

[0015] Furthermore, the cleaning component includes an air pipe with one end passing through the interior of the mounting bracket, the air pipe output end is rotatably connected to a ring gear, the ring gear is connected to a disc member, the air pipe is connected to the interior of the disc member through the ring gear, the disc member is provided with a plurality of air outlet holes, and the plurality of air outlet holes are connected to the interior of the disc member, the disc member is provided with a plurality of brushes, a torsion spring is provided in the mounting bracket, and a first gear member is provided at the output end of the torsion spring, and the first gear member is meshed with the ring gear.

[0016] The transmission gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the first gear and the second gear is engaged with the

[0017] A placement cavity is provided on the mounting frame, and the cleaning assembly also includes a second wire fixedly connected to one of the limit blocks at one end, the other end of the second wire is wound around the output end of the torsion spring, the second wire passes through the placement cavity, the second wire passes between the two clamping blocks, the second wire corresponds to the position of the two semicircular holes, a conical block is fixed on the second wire, and the cleaning assembly also includes a limit ball located in the placement cavity, and the second wire passes through the limit ball.

[0018] Furthermore, the limit assembly includes four ninth spring telescopic parts arranged on the mounting frame, each of the four ninth spring telescopic parts output ends is provided with a pushing block, the four pushing block output ends are provided with an inclined surface, and the four pushing blocks are partially located in the sliding cavity, and each of the four pushing blocks is provided with a driven tooth condition, and the four driven tooth conditions are respectively engaged with four driven gear parts in a one-to-one correspondence, and the four driven gear parts are respectively fixedly connected to the two ends of the two driven shafts in a one-to-one correspondence, and the two driven shafts are respectively connected to one end of the two driven wires, and the other ends of the four driven wires are respectively connected to the two driven rings, and the two first driven rings are respectively provided with a number of driven rods, and the other ends of the several driven rods are respectively connected to the two second driven rings, and the two second driven rings are provided with a number of driven spring telescopic parts, and the several driven spring telescopic parts are respectively arranged on the two rings, and the two rings are both arranged on the mounting frame.

[0019] Furthermore, the replacement component includes two fourth spring telescopic parts arranged on the mounting frame, and an extrusion block is provided at the output end of the two fourth spring telescopic parts, and the extrusion block slides in the sliding cavity, and a second gear condition is provided on the extrusion block, and the second gear condition is engaged with a third gear part, and the third gear part is connected to a winding shaft, and a section of a third wire is connected to the winding shaft, and the other end of the third wire is connected to a second oblique block, and the second oblique block is provided at the output end of a fifth spring telescopic part, and the fifth spring telescopic part is provided on the mounting frame.

[0020] 4. The repairing kit for automotive dents, according to claim 1, wherein a bottom of the foot stand comprises a through-hole, and the two foot stands comprises a through-hole, and the two foot stands comprise two bosses, wherein the bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut.

[0021] Each of the two sliding rods is provided with a slot, and each of the two slots is provided with a second spring telescopic member, and each of the output ends of the two second spring telescopic members is provided with a fourth oblique block, and the two fourth oblique blocks respectively correspond to the positions of the two first oblique blocks one by one, and each of the two fourth oblique blocks is provided with a guide column, and the two guide columns are respectively slidably connected in the two guide rails one by one, and the two guide rails are respectively provided on the two guide rails one by one, and a tenth spring telescopic member is provided in each of the two guide rails, and a fifth oblique block is respectively provided at the output end of the two tenth spring telescopic members.

[0022] Furthermore, the replacement component also includes a fourth wire at one end of which is arranged on the third gear condition, the fourth wire passes through the telescopic rod and the telescopic sleeve, the other end of the fourth wire is connected to a seventh spring telescopic member, the seventh spring telescopic member is arranged at an eighth spring telescopic member output end, the eighth spring telescopic member is arranged on the mounting bracket, a limiting column is provided on the output end of the seventh spring telescopic member, the limiting column is slidably connected to a limiting slide rail, the limiting slide rail is arranged on the mounting bracket, and the output end of the seventh spring telescopic member slides in the sliding cavity.

[0023] Furthermore, it includes a distillation tower, in which a plurality of condensers are arranged. The plurality of condensers are collected into a main pipe through a plurality of pipes. The main pipe is connected to a heat exchanger, and the heat exchanger is connected to two air inlet buffer tanks.

[0024] Furthermore, the two air intake buffer tanks are connected to a nitrogen compressor, the output end of the nitrogen compressor is connected to a filter element, the filter element is located in a filter, and a purge gas buffer tank is provided at the output end of the filter, and the purge gas buffer tank is connected to a process nitrogen tank.

[0025] In the above technical solution, the present invention provides a method suitable for a silane distillation nitrogen recovery process, in which the filter element is driven to move by the cylinder, and the limit assembly is set so that the output of the cylinder can release the limit of the filter element by the limit assembly, and quickly limit the filter element when the filter element is reset for next use. When the filtering effect of the filter element is reduced during use, the cylinder is started to drive the filter element to the area to be cleaned for further cleaning, and the filter element is reset and used again after cleaning, so that the filter element can be quickly cleaned. At this time, the filtering effect of the filter element is improved, ensuring that the purity of the nitrogen after filtration meets the standard, and the cleaning component is in After use, it can be quickly reset for the next use. When the filtering effect of the filter element decreases again after cleaning, the cleaning effect may be reduced if it is cleaned again at this time. The cylinder is started to drive the filter element to the area to be replaced to replace the new filter element. The new filter element is then reset for use, and the replacement component is reset for the next use. Through the rapid cleaning and rapid replacement of the filter element, when there are too many impurities in the filter element affecting the nitrogen purity, the filter element can be quickly cleaned and replaced, avoiding the long time caused by manual cleaning and replacement of the filter element, thereby improving the nitrogen collection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments described in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0027] Figure 1 One of the overall structural diagrams provided by an embodiment of the present invention;

[0028] Figure 2 The second schematic diagram of the overall structure provided by the embodiment of the present invention;

[0029] Figure 3 One of the internal structure diagrams provided in an embodiment of the present invention;

[0030] Figure 4 The embodiment of the present invention provides Figure 3 A schematic diagram of the enlarged structure at point A;

[0031] Figure 5 The second internal structure diagram provided by the embodiment of the present invention;

[0032] Figure 6 The embodiment of the present invention provides Figure 5 A schematic diagram of the enlarged structure at point B;

[0033] Figure 7 The third internal structure diagram provided by the embodiment of the present invention;

[0034] Figure 8 The embodiment of the present invention provides Figure 7 Schematic diagram of the enlarged structure at C;

[0035] Figure 9 The embodiment of the present invention provides Figure 7 A schematic diagram of the enlarged structure at D;

[0036] Figure 10 The fourth internal structure diagram provided by the embodiment of the present invention;

[0037] Figure 11 The embodiment of the present invention provides Figure 10 A schematic diagram of the structure at E is enlarged;

[0038] Figure 12 The embodiment of the present invention provides Figure 10 The enlarged structural diagram of F;

[0039] Figure 13 The embodiment of the present invention provides Figure 10 Schematic diagram of the enlarged structure at G;

[0040] Figure 14 A schematic cross-sectional view of a portion of the structure provided by an embodiment of the present invention;

[0041] Figure 15 5 is a schematic diagram of the internal structure provided by an embodiment of the present invention;

[0042] Figure 16 This is a process flow diagram provided for an embodiment of the present invention.

[0043] Description of reference numerals:

[0044] 1. Mounting bracket; 2. Cylinder; 3. Stop block; 4. Connector; 5. Clamping assembly; 51. First fixed block; 52. First spring expansion member; 53. Clamping member; 54. Connecting rod; 55. First oblique block; 6. Filter element; 61. Second fixed block; 62. Notch; 7. Cleaning assembly; 71. Air pipe; 72. Ring gear; 73. Disc; 76. Torsion spring; 77. First gear member; 78. First gear condition; 79. Second gear member; 710. First helical gear member; 711. Second helical gear; 712, transmission shaft; 713, third helical gear; 714, fourth helical gear; 715, rotating shaft; 716, first wire; 717, clamping block; 718, semicircular hole; 719, third spring expansion member; 720, second wire; 721, conical block; 722, stop ball; 8, stop assembly; 81, ninth spring expansion member; 82, push block; 83, driven rack; 84, driven gear; 85, driven shaft; 86, driven wire; 87, first driven gear; Driven ring; 88, driven rod; 89, second driven ring; 810, driven spring expansion member; 811, sleeve; 9, replacement assembly; 91, fourth spring expansion member; 92, extrusion block; 93, second gear member; 94, third gear member; 95, winding shaft; 96, third wire; 97, second inclined block; 98, fifth spring expansion member; 99, guide rail; 910, sliding rod; 911, crossbar; 912, sixth spring expansion member; 913, third inclined block; 914, rotating rod; 91 5. Turntable component; 916. Rotating shaft; 917. Fourth gear component; 918. Third gear condition; 919. Telescopic rod; 920. Telescopic sleeve; 921. Spring component; 922. Fourth wire; 923. Seventh spring telescopic component; 924. Eighth spring telescopic component; 925. Limiting column; 926. Limiting slide rail; 928. Second spring telescopic component; 929. Fourth inclined block; 930. Guide column; 931. Guide rail; 932. Tenth spring telescopic component; 933. Fifth inclined block. DETAILED DESCRIPTION

[0045] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0046] See also Figure 1-16 , S1 provided in the embodiment of the present invention, the respective discharge pipelines of the distillation tail nitrogen of the silane distillation tower are aggregated into a discharge main pipe;

[0047] S2. Use an air-temperature heat exchanger to heat the discharged nitrogen on the main pipe to room temperature (20-30°C) and pass it into two air inlet buffer tanks to ensure stable nitrogen discharge and protect the rear-end nitrogen compressor;

[0048] S3, pressurize the recovered nitrogen to 0.6-0.8 MPaG through a nitrogen compressor, and then pass it into a filter to remove moisture and particulate impurities in the recovered nitrogen;

[0049] S4, after the dew point and oxygen content are tested online, the recovered nitrogen reaches the set quality, enters the purge gas buffer tank, then enters the nitrogen tank, and is incorporated into the plant's process nitrogen network;

[0050] The filter is provided with a filtering structure, including a mounting frame 1, a cylinder 2 is provided on the mounting frame 1, and a sliding cavity is further provided on the mounting frame 1. The output end of the cylinder 2 is slidably connected to the sliding cavity, and two limit blocks 3 are provided at the output end of the cylinder 2. A connecting member 4 is slidably connected to the output end of the cylinder 2, and the connecting member 4 is located at a position where the two limit blocks 3 are close to each other. The lower part of the connecting member 4 is connected to a filter element 6 through a clamping assembly 5;

[0051] The mounting frame 1 is further provided with a cleaning assembly 7. When the output end of the cylinder 2 is extended, it can drive the filter element 6 to move to the area to be cleaned by the cleaning assembly 7. The cleaning assembly 7 can clean the filter element 6.

[0052] The mounting frame 1 is further provided with a limiting assembly 8, which can limit the filter element 6, and the limiting assembly 8 can release the limit on the filter element 6 when the limiting block 3 moves;

[0053] A replacement component 9 is also provided on the mounting frame 1. When the output end of the cylinder 2 contracts, it can drive the filter element 6 to move to the area to be replaced of the replacement component 9. The replacement component 9 can replace the filter element 6 connected to the clamping component 5.

[0054] Preferably, the clamping assembly 5 includes a first fixed block 51, two first spring telescopic members 52 are arranged in the first fixed block 51, and a clamping member 53 is provided at each output end of the two first spring telescopic members 52, and a connecting rod 54 is provided on each of the two clamping members 53. A section of the two connecting rods 54 away from the clamping member 53 passes through the outside of the first fixed block 51, and a first inclined block 55 is provided on one end of the two connecting rods 54 located outside the first fixed block 51. A second fixed block 61 is provided on the top of the filter element 6, and two notches 62 are provided on the second fixed block 61. The two notches 62 correspond to the positions of the two clamping members 53 respectively, and two clamping grooves are provided on the second fixed block 61. Through the arrangement of the clamping assembly 5, the filter element 6 to be replaced can be quickly removed after entering the area to be replaced, and can be quickly connected to the new filter element 6, which reduces the time required for replacing the filter element 6, improves work efficiency, ensures the continuous output of nitrogen, and prevents the problem of decreased work efficiency caused by insufficient nitrogen supplied to the entire nitrogen system.

[0055] Preferably, the cleaning assembly 7 includes an air pipe 71 having one end passing through the interior of the mounting bracket 1, and the output end of the air pipe 71 is rotatably connected to a ring gear 72, and the ring gear 72 is connected to a disc member 73. The air pipe 71 is communicated with the interior of the disc member 73 through the ring gear 72, and the disc member 73 is provided with a plurality of air outlet holes, and the plurality of air outlet holes are all communicated with the interior of the disc member 73. The disc member 73 is provided with a plurality of brushes, and a torsion spring 76 is provided in the mounting bracket 1, and a first gear member 77 is provided at the output end of the torsion spring 76, and the first gear member 77 is meshed with the ring gear 72. The setting of the torsion spring 76 enables the brush to quickly clean the filtered particulate matter on the filter element 6, and rotate and supply air to the plurality of air outlet holes, further improving the cleaning effect and shortening the time required for cleaning.

[0056] Preferably, the cleaning assembly 7 further comprises a first gear condition 78 slidably connected to the mounting frame 1, the first gear condition 78 meshing with a second gear member 79, the second gear member 79 being rotatably connected to the mounting frame 1, a first helical gear member 710 being provided on the second gear member 79, the first helical gear member 710 being meshed with a second helical gear, the second helical gear being provided at one end of a transmission shaft 712, the transmission shaft 712 being rotatably connected to the mounting frame 1, a third helical gear member 713 being provided at the other end of the transmission shaft 712, the third helical gear member 713 being meshed with a fourth helical gear member 713. The helical gear member 714 is engaged, and the fourth helical gear is set on a rotating shaft 715. The rotating shaft 715 is rotatably connected to the mounting frame 1. One end of two first wires 716 is connected to the rotating shaft 715. The other ends of the two first wires 716 are respectively connected to two clamping blocks 717 in a one-to-one correspondence. A semicircular hole 718 is respectively opened on the side close to each other of the two clamping blocks 717. The two semicircular holes 718 correspond to each other. The two clamping blocks 717 are respectively connected to the output ends of four third spring expansion members 719. The four third spring expansion members 719 are all fixed to the mounting frame 1;

[0057] A placement cavity is provided on the mounting frame 1, and the cleaning component 7 also includes a second wire 720 at one end fixedly connected to a limit block 3, and the other end of the second wire 720 is wound around the output end of the torsion spring 76, and the second wire 720 passes through the placement cavity, and the second wire 720 passes between the two clamping blocks 717, and the second wire 720 corresponds to the position of the two semicircular holes 718. A conical block 721 is fixedly provided on the second wire 720, and the cleaning component 7 also includes a limit ball 722 located in the placement cavity, and the second wire 720 passes through the limit ball 722. Through the setting of the cleaning component 7, when the filter element 6 to be cleaned enters the position to be cleaned, it can be cleaned immediately, avoiding waste of time, and can be reset when the filter element 6 is replaced for use in the next cleaning, without the need for manual cleaning.

[0058] Preferably, the limit assembly 8 includes four ninth spring telescopic members 81 arranged on the mounting frame 1, and each of the output ends of the four ninth spring telescopic members 81 is provided with a push block 82, and the output ends of the four push blocks 82 are provided with an inclined surface, and each of the four push blocks 82 is partially located in the sliding cavity, and each of the four push blocks 82 is provided with a driven rack 83, and the four driven racks 83 are respectively meshed with four driven gears 84 in a one-to-one correspondence, and the four driven gears 84 are respectively fixedly connected to both ends of the two driven shafts 85 in a one-to-one correspondence, and the two driven shafts 85 are respectively connected to one end of the two driven wires 86, and the other ends of the four driven wires 86 are respectively connected to the two driven rings, and the two first driven rings 87 are respectively provided with a plurality of driven rods 88, and the plurality of driven rods 88 are respectively provided. 8 The other end is connected to two second driven rings 89 respectively, and a number of driven spring telescopic members 810 are provided on the two second driven rings 89, and the number of driven spring telescopic members 810 are respectively provided on two collars 811, and the two collars 811 are both provided on the mounting frame 1. The setting of the limit assembly 8 enables the filter element 6 to be quickly limited when entering its use position, and the limit of the filter element 6 can be quickly released when it needs to be cleaned and replaced, that is, the filter element 6 is prevented from falling off or loosening during use, and the stroke of the filter element 6 will not be affected during cleaning and replacement. At the same time, a rubber ring is provided on the second driven ring 89 near the filter element 6. The fit between the rubber ring and the filter element 6 prevents the two ends of the filter element 6 from being sealed, thereby preventing air leakage.

[0059] Preferably, the replacement component 9 includes two fourth spring telescopic members 91 arranged on the mounting frame 1, and an extrusion block 92 is provided at the output end of the two fourth spring telescopic members 91, which slides in the sliding cavity, and a second gear condition 93 is provided on the extrusion block 92, which is engaged with a third gear member 94, and the third gear member 94 is connected to a winding shaft 95, and a section of a third wire 96 is connected to the winding shaft 95, and the other end of the third wire 96 is connected to a second inclined block 97, and the second inclined block 97 is provided at the output end of a fifth spring telescopic member 98, and the fifth spring telescopic member 98 is provided on the mounting frame 1. Through the setting of the replacement component 9, when the filter element 6 to be replaced enters the replacement area, it will be quickly disassembled, and at the same time, a buffer pad is prepared at the position where the filter element 6 falls off to prevent the filter element 6 from being damaged by impact.

[0060] Preferably, the replacement component 9 also includes two guide rails 99, and two sliding rods 910 are respectively connected in a one-to-one sliding manner in the two guide rails 99. The two sliding rods 910 are respectively fixedly connected to the two ends of a cross bar 911 in a one-to-one corresponding manner. Two sixth spring telescopic members 912 are provided on the cross bar 911, and a third inclined block 913 is respectively provided on the output end of the two sixth spring telescopic members 912. The two third inclined blocks 913 respectively correspond to the positions of the two clamping grooves. The two sliding rods 910 are respectively rotatably connected to one end of the two rotating rods 914, and the other ends of the two rotating rods 914 are respectively rotatably connected to two turntable members 915, and the two turntable members 915 are respectively connected to a rotating shaft 91 6 are connected at both ends, the rotating shaft 916 is rotatably connected to the mounting frame 1, a fourth gear member 917 is sleeved on the rotating shaft 916, the fourth gear member 917 is meshed with a third gear member 918, the third gear member 918 is slidably connected to the mounting frame 1, the third gear member 918 is provided with a card interface, the card interface corresponds to the position of the second inclined block 97, one end of the third gear member 918 is provided with a telescopic rod 919, the telescopic rod 919 is slidably connected to a telescopic sleeve 920, the telescopic sleeve 920 is fixedly connected to the mounting frame 1, and one end of a spring member 921 is fixedly connected to the telescopic sleeve 920, and the other end of the spring member 921 is fixedly connected to the telescopic rod 919;

[0061] A slot is provided on each of the two sliding rods 910, and a second spring telescopic member 928 is provided in each of the two slots. A fourth oblique block 929 is provided at the output end of each of the two second spring telescopic members 928. The two fourth oblique blocks 929 correspond one-to-one to the positions of the two first oblique blocks 55 respectively. A guide column 930 is provided on each of the two fourth oblique blocks 929. The two guide columns 930 are slidably connected in two guide rails 931 respectively and one-to-one. The two guide rails 931 are respectively provided on the two guide rails 99 respectively. A tenth spring telescopic member 932 is provided in each of the two guide rails 931, and a fifth oblique block 933 is provided at the output end of each of the two tenth spring telescopic members 932. Through the setting of the replacement component 9, the new filter element 6 can be quickly connected and installed with the clamping component 5 after the old filter element 6 falls off, thereby reducing the time required for replacing the filter element 6 and improving the nitrogen production efficiency.

[0062] Preferably, the replacement component 9 also includes a fourth wire 922 at one end of which is arranged on the third gear condition 918, and the fourth wire 922 passes through the telescopic rod 919 and the telescopic sleeve 920. The other end of the fourth wire 922 is connected to a seventh spring telescopic member 923, and the seventh spring telescopic member 923 is arranged at the output end of an eighth spring telescopic member 924. The eighth spring telescopic member 924 is arranged on the mounting frame 1, and a limiting column 925 is provided on the output end of the seventh spring telescopic member 923. The limiting column 925 is slidably connected to a limiting slide rail 926, and the limiting slide rail 926 is arranged on the mounting frame 1. The output end of the seventh spring telescopic member 923 slides in the sliding cavity, and the seventh spring telescopic member 923 is driven to move on the stroke when the filter element 6 returns to the use position, so that the replacement component 9 is reset for the next use.

[0063] Preferably, a distillation tower is included, in which a plurality of condensers are arranged. The plurality of condensers are collected into a main pipe through a plurality of pipes. The main pipe is connected to a heat exchanger, and the heat exchanger is communicated with two air inlet buffer tanks.

[0064] Preferably, the two air inlet buffer tanks are connected to a nitrogen compressor, the output end of the nitrogen compressor is connected to a filter element 6, the filter element 6 is located in a filter, and a purge gas buffer tank is provided at the output end of the filter, and the purge gas buffer tank is connected to a process nitrogen tank.

[0065] Working principle: Liquid nitrogen is introduced into the distillation tower condenser as a refrigerant, and participates in cooling through the gasification process. The tail gas generated after the liquid nitrogen is gasified is referred to as distillation tail nitrogen. When the recovered distillation tail nitrogen is heated by the E-101 air-conditioning chamber heat exchanger, it must first undergo online oxygen concentration monitoring by OT IA-V101. After passing the test, it enters the V-101A / B air inlet buffer tank. If the oxygen content detection concentration is ≥1ppm, the interlock automatically opens the XV-101A / B switch valve to discharge the unqualified nitrogen to prevent it from polluting the subsequent system; when the recovered nitrogen quality meets the requirements again, the XV-102 switch valve is automatically closed with a delay, which facilitates the replacement of the pipeline and the air inlet buffer tank and continues to be recycled;

[0066] To ensure the heat exchange effect of liquid nitrogen vaporization in the distillation section, it is necessary to ensure that the pressure of the V-101A / B inlet buffer tank at the front end of the distillation tail nitrogen recovery system is ≤0.1MpaG. The inlet buffer tank is equipped with a pressure interlock device. When the pressure of the inlet buffer tank is too high, the interlock automatically opens the XV-101 / XV-102 switch valve to reduce the pressure at the front end of the distillation tail nitrogen recovery system. The inlet buffer tank is equipped with a self-supporting regulating valve for pressure relief, and a redundant design is implemented to further enhance the safety and reliability of the system.

[0067] At the same time, the C-101 nitrogen compressor is equipped with variable frequency regulation control. When the pressure of the V-102 purge gas buffer tank at the rear end of the compressor is ≥0.8MpaG, the frequency of the C-101 nitrogen compressor is immediately reduced to reduce the amount of pressurized nitrogen. Subsequently, the pressure of V-101A / B begins to increase, and the recovered distillation tail nitrogen is then discharged through the top self-supporting regulating valve to cope with the sudden decrease in actual nitrogen, which causes the pressure of the V-102 purge gas buffer tank to fluctuate.

[0068] When the detection value of any of the online monitoring points for MT IA-C102 dew point or OT IA-C102 oxygen content exceeds the interlock set value, the interlock mechanism will be triggered, automatically opening the XV-105 and closing the XV-104 on-off valves, and discharging the unqualified nitrogen to prevent it from contaminating subsequent systems. When the recovered nitrogen quality meets the requirements again, XV-105 will automatically close and the XV-104 on-off valve will open to continue recycling. The qualified nitrogen will be injected into the purge gas buffer tank and then into the process nitrogen tank. At this time, the nitrogen purity reaches the 5N standard and is incorporated into the nitrogen pipeline system of the entire plant for use in process purge and other operations.

[0069] When the nitrogen recovery system recovers less than the nitrogen usage of the entire plant, the pressure of the V-103 process tank is reduced to the set value, and the interlock triggers the opening of XV-107 to self-vaporize nitrogen; when the nitrogen recovery system recovers more than the nitrogen usage of the entire plant, the pressure of the V-102 purge gas buffer tank will increase, and the excess gas will be released by the self-supporting regulating valve above the buffer tank. When the pressure of the V-102 purge gas buffer tank is ≥1.0MpaG, the interlock triggers the opening of the XV-106 switch valve for release;

[0070] When the filter element 6 in the filter needs to be cleaned, the cylinder 2 is started to drive the two limit blocks 3 to move, so that a connecting member 4 moves. When the limit block 3 moves, the limit ball 722 moves downward, driving the second wire 720 into the placement cavity. At the same time, when the limit block 3 moves, it contacts the two push blocks 82, so that the two push blocks 82 move, driving the two ninth spring expansion members 81 to contract, and at the same time, the two driven racks 83 move, driving the two driven gears 84 to rotate, so that the two driven shafts 85 rotate, so that the four driven wires 86 are wound, driving the two first driven rings 87 to move, so that the several driven rods 88 move, and driving the two second driven rings 89 to move, so that the filter element 6 is no longer restricted;

[0071] After that, the limit block 3 continues to move, driving the clamping assembly 5 to move, so that the filter element 6 moves. When the limit block 3 moves and contacts the first gear condition 78, the first gear condition 78 moves, driving the second gear member 79 to rotate, so that the first helical gear member 710 rotates, driving the second helical gear member 711 to rotate, so that the transmission shaft 712 rotates, driving the third helical gear member 713 to rotate, so that the fourth helical gear member 714 rotates, driving the rotating shaft 715 to rotate, so that the two first wires 716 are wound up, so that the two clamping blocks 71 7 moves, causing the two semicircular holes 718 to move away from each other, so that the conical block 721 is no longer restricted, causing the torsion spring 76 to start to contract, driving the first gear member 77 to rotate, causing the ring gear 72 to rotate, driving the disc member 73 to rotate, causing the brush to rotate to clean the filter element 6, and at the same time, air is sent into the air pipe 71, so that the air is sent into the inside of the disc member 73, and then the particulate matter on the filter element 6 is removed through the multiple air outlet holes. At the same time, a filter cloth bag is placed in the blowing direction of the multiple air outlet holes to collect the particulate matter on the filter element 6;

[0072] After that, the cylinder 2 is started to reset and drive the two limit blocks 3 to move. When the limit block 3 moves, it contacts the pushing block 82, causing a connecting piece 4 to slide, driving the clamping assembly 5 to slide, causing the filter element 6 to move, causing the two pushing blocks 82 to move away from each other and driving the two second driven rings 89 to move away from each other, so that the movement of the filter element 6 will not be hindered. When one limit block 3 moves until it is no longer in contact with the two pushing blocks 82, the filter element 6 is located between the two second driven rings 89. Due to the presence of the filter element 6, the two second driven rings 89 will not reset. When the filter element 6 continues to move to the reset position, the filter element 6 is no longer in contact with the two second driven rings 89, causing the two second driven rings 89 to reset and limit the filter element 6. At this time, the filter element 6 is cleaned and can be used again.

[0073] When the filter element 6 needs to be replaced, the cylinder 2 is started to drive the two limit blocks 3 to move. When the limit block 3 moves, it contacts the pushing block 82. Through the movement of the pushing block 82, a connecting piece 4 slides, driving the clamping assembly 5 to move, and driving the filter element 6 to move. By setting a clamping block 717 on the mounting frame 1, a limit block 3 drives the connecting piece 4 to move until it can no longer move. At this time, the filter element 6 abuts against the clamping block 717, and at the same time, a limit block 3 abuts against the clamping block 717, so that the filter element 6 is clamped and limited by a clamping block 717 and a limit block 3. At this time, the other limit block 3 contacts the extrusion block 92, driving the extrusion block 92 to move, so that the second gear condition 93 moves, driving The third gear member 94 moves, causing the winding shaft 95 to rotate, driving the third wire 96 to be wound, causing the second inclined block 97 to move, so that the second inclined block 97 is no longer engaged with the third rack member 918, allowing the third rack member 918 to move, causing the spring member 921 to be released, driving the telescopic rod 919 to move, driving the third rack member 918 to move, causing the fourth gear member 917 to rotate, driving the rotating shaft 916 to rotate, causing the two turntable members 915 to rotate, causing the two rotating rods 914 to rotate, driving the two sliding rods 910 to slide back and forth, causing the crossbar 911 to move, driving the two sixth spring telescopic members 912 to move, and causing the two third inclined blocks 913 to move;

[0074] When the telescopic rod 919 moves, the seventh spring telescopic member 923 is driven to move by the fourth wire 922. The setting of the limiting column 925 allows the output end of the seventh spring telescopic member 923 to extend into the sliding cavity and move in the direction of the guide rail 99.

[0075] When the two sliding rods 910 move, the two second spring expansion members 928 are driven to move, so that the two fourth inclined blocks 929 are moved, so that the two guide posts 930 are moved in the two guide rails 931. The two fourth inclined blocks 929 are limited by the guide rails 931 so that they move along the limited direction of the guide rails 931. By setting the tenth spring expansion member 932 and the inclined surface of the fifth inclined block 933, the limiting post 925 is limited when it passes the turning position of the guide rails 931, preventing the limiting post 925 from failing to follow the guide rails 931 due to the setting of the second spring expansion member 928. 31 direction, the setting of the wire track enables the two fourth oblique blocks 929 to contact the two first oblique blocks 55 respectively when the two sliding rods 910 move toward the sliding cavity, so that the two first oblique blocks 55 move, so that the two connecting rods 54 move, and drive the two clamping members 53 to approach each other, so that the two clamping members 53 leave the two notches 62, so that the two clamping members 53 are no longer clamped with the second fixing block 61, so that the filter element 6 falls off, and then the two fourth oblique blocks 929 move so that the two fourth oblique blocks 929 no longer contact the two first oblique blocks 55, so that the two clamping members 53 are reset;

[0076] After that, the cross bar 911 continues to move, driving the new filter element 6 to move to its two notches 62, respectively corresponding to the two clamping members 53. By setting one side of the two clamping members 53 as an inclined surface, the two clamping members 53 are respectively inserted into the two notches 62, so that the two clamping members 53 are clamped with the second fixing block 61 on the new filter element 6. After that, when the two sliding blocks perform the reset movement, the two fourth inclined blocks 929 are driven to move. The setting of the guide rail 931 ensures that the two fourth inclined blocks 929 do not contact the two first inclined blocks 55 when the two sliding blocks perform the reset movement, so that the new filter element 6 is installed.

[0077] Afterwards, the cylinder 2 drives the new filter element 6 to perform a reset movement. When the cylinder 2 drives the limit block 3 to contact the output end of the seventh spring telescopic member 923 during movement, the seventh spring telescopic member 923 moves along the guide rail 99. Through the setting of the guide rail 99, the output end of the seventh spring telescopic member 923 leaves the guide rail 99. When moving, the seventh spring telescopic member 923 pulls the third rack to move through the fourth wire 922, so that the third rack is reset and drives the two sliding rods 910 to make another reciprocating motion. However, at this time, the new filter element 6 is no longer in the area to be replaced, which avoids the reciprocating motion of the sliding rod 910 affecting the movement of the filter element 6. Afterwards, the filter element 6 can be limited for use through the setting of the limit assembly 8.

[0078] The above description is merely illustrative of certain exemplary embodiments of the present invention. It goes without saying that those skilled in the art will be able to modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims.

Claims

1. A nitrogen recovery process suitable for silane distillation, characterized in that: S1, the respective discharge pipelines of the distillation tail nitrogen of the silane distillation tower are combined into a discharge main pipe; S2. Use an air-temperature heat exchanger to heat the discharged nitrogen on the main pipe to room temperature (20-30°C) and pass it into two air inlet buffer tanks to ensure stable nitrogen discharge and protect the rear nitrogen compressor; S3, pressurize the recovered nitrogen to 0.6-0.8MpaG through a nitrogen compressor, and let it enter the filter to remove moisture and particulate impurities in the recovered nitrogen; S4, after the dew point and oxygen content are tested online, the recovered nitrogen quality reaches the set value, enters the purge gas buffer tank, then enters the nitrogen tank, and is incorporated into the whole plant process nitrogen pipeline network; The filter is provided with a filtering structure, comprising a mounting frame (1), a cylinder (2) being provided on the mounting frame (1), a sliding cavity being further provided on the mounting frame (1), an output end of the cylinder (2) being slidably connected in the sliding cavity, two limit blocks (3) being provided on the output end of the cylinder (2), a connecting piece (4) being slidably connected on the output end of the cylinder (2), the connecting piece (4) being located at a position where the two limit blocks (3) are close to each other, and a lower portion of the connecting piece (4) is connected to a filter element (6) via a clamping assembly (5); The mounting frame (1) is also provided with a cleaning assembly (7), and when the output end of the cylinder (2) is extended, it can drive the filter element (6) to move into the area to be cleaned of the cleaning assembly (7), and the cleaning assembly (7) can clean the filter element (6); The mounting frame (1) is also provided with a limiting assembly (8), the limiting assembly (8) being capable of limiting the filter element (6), and the limiting assembly (8) being capable of releasing the limiting of the filter element (6) when the limiting block (3) moves; The mounting frame (1) is also provided with a replacement assembly (9), and when the output end of the cylinder (2) contracts, it can drive the filter element (6) to move to the area to be replaced of the replacement assembly (9), and the replacement assembly (9) can replace the filter element (6) connected to the clamping assembly (5).

2. A nitrogen recovery process suitable for silane distillation according to claim 1, characterized in that: The clamping assembly (5) comprises a first fixed block (51), two first spring telescopic members (52) are arranged inside the first fixed block (51), a clamping member (53) is arranged at each output end of the two first spring telescopic members (52), a connecting rod (54) is arranged on each of the two clamping members (53), a section of the two connecting rods (54) away from the clamping members (53) passes through the outside of the first fixed block (51), and a first inclined block (55) is arranged at each end of the two connecting rods (54) located outside the first fixed block (51), and a second fixed block (61) is arranged on the top of the filter element (6), two notches (62) are arranged on the second fixed block (61), the two notches (62) respectively correspond to the positions of the two clamping members (53), and two clamping grooves are arranged on the second fixed block (61).

3. A nitrogen recovery process suitable for silane distillation according to claim 2, characterized in that: The cleaning assembly (7) comprises an air pipe (71) having one end penetrating into the interior of the mounting frame (1); the output end of the air pipe (71) is rotatably connected to a gear ring (72); the gear ring (72) is connected to a disc member (73); the air pipe (71) is communicated with the interior of the disc member (73) through the gear ring (72); the disc member (73) is provided with a plurality of air outlet holes; the plurality of air outlet holes are all communicated with the interior of the disc member (73); the disc member (73) is provided with a plurality of brushes; a torsion spring (76) is provided in the mounting frame (1); a first gear member (77) is provided at the output end of the torsion spring (76); the first gear member (77) is meshed with the gear ring (72).

4. A nitrogen recovery process suitable for silane distillation according to claim 3, characterized in that: The cleaning assembly (7) further comprises a first gear member (78) slidably connected to the mounting frame (1), the first gear member (78) meshing with a second gear member (79), the second gear member (79) being rotatably connected to the mounting frame (1), a first helical gear member (710) being arranged on the second gear member (79), the first helical gear member (710) being meshing with a second helical gear, the second helical gear being arranged at one end of a transmission shaft (712), the transmission shaft (712) being rotatably connected to the mounting frame (1), a third helical gear member (713) being arranged at the other end of the transmission shaft (712), the third helical gear member (713) being meshed with a first helical gear member (713), and a second helical gear member (713) being meshed with a second helical gear member (710). Four helical gears (714) are meshed, the fourth helical gear is arranged on a rotating shaft (715), the rotating shaft (715) is rotatably connected to the mounting frame (1), one end of two first wires (716) is connected to the rotating shaft (715), the other ends of the two first wires (716) are respectively connected to two clamping blocks (717) in a one-to-one correspondence, a semicircular hole (718) is respectively opened on one side of the two clamping blocks (717) close to each other, the two semicircular holes (718) correspond to each other, the two clamping blocks (717) are respectively connected to the output ends of four third spring telescopic members (719), and the four third spring telescopic members (719) are all fixed to the mounting frame (1); The mounting frame (1) is provided with a placement cavity, the cleaning component (7) further comprises a second wire (720) having one end fixedly connected to one of the limit blocks (3), the other end of the second wire (720) being wound around the output end of the torsion spring (76), the second wire (720) passing through the placement cavity, the second wire (720) passing between the two clamping blocks (717), the second wire (720) corresponding to the positions of the two semicircular holes (718), a conical block (721) being fixedly provided on the second wire (720), the cleaning component (7) further comprising a limit ball (722) located in the placement cavity, the second wire (720) passing through the limit ball (722).

5. A nitrogen recovery process suitable for silane distillation according to claim 4, characterized in that: The limiting assembly (8) comprises four ninth spring telescopic members (81) arranged on the mounting frame (1), each of the output ends of the four ninth spring telescopic members (81) being provided with a push block (82), each of the output ends of the four push blocks (82) being provided with an inclined surface, each of the four push blocks (82) being partially located in the sliding cavity, each of the four push blocks (82) being provided with a driven rack (83), the four driven racks (83) being respectively and one-to-one meshed with four driven gears (84), and the four driven gears (84) being respectively and one-to-one fixed to two ends of two driven shafts (85). The two driven shafts (85) are respectively connected to one end of two driven wires (86), the other ends of the four driven wires (86) are respectively connected to two driven rings, the two first driven rings (87) are respectively provided with a plurality of driven rods (88), the other ends of the plurality of driven rods (88) are respectively connected to the two second driven rings (89), the two second driven rings (89) are provided with a plurality of driven spring telescopic parts (810), the plurality of driven spring telescopic parts (810) are respectively provided on two sleeve rings (811), and the two sleeve rings (811) are both provided on the mounting frame (1).

6. A nitrogen recovery process for silane distillation according to claim 5, characterized in that: The replacement component (9) comprises two fourth spring telescopic members (91) arranged on the mounting frame (1), an extrusion block (92) being arranged at the output end of the two fourth spring telescopic members (91), the extrusion block (92) sliding in the sliding cavity, a second gear condition (93) being arranged on the extrusion block (92), the second gear condition (93) being meshed with a third gear member (94), the third gear member (94) being connected to a winding shaft (95), a section of a third wire (96) being connected to the winding shaft (95), the other end of the third wire (96) being connected to a second inclined block (97), the second inclined block (97) being arranged at the output end of a fifth spring telescopic member (98), the fifth spring telescopic member (98) being arranged on the mounting frame (1).

7. A nitrogen recovery process for silane distillation according to claim 6, characterized in that: The replacement assembly (9) further comprises two guide rails (99), two sliding rods (910) are slidably connected in the two guide rails (99) in a one-to-one correspondence, the two sliding rods (910) are fixedly connected to two ends of a cross bar (911) in a one-to-one correspondence, the cross bar (911) is provided with two sixth spring telescopic members (912), the output ends of the two sixth spring telescopic members (912) are respectively provided with a third inclined block (913), the two third inclined blocks (913) respectively correspond to the positions of the two clamping grooves, the two sliding rods (910) are respectively rotatably connected to one end of two rotating rods (914), the other ends of the two rotating rods (914) are respectively rotatably connected to two rotating disk members (915), the two rotating disk members (915) are respectively connected to two ends of a rotating shaft (916), the rotating shaft (916) is rotatably connected to the mounting frame (1), a fourth gear member (917) is sleeved on the rotating shaft (916), the fourth gear member (917) is meshed with a third gear member (918), the third gear member (918) is slidably connected to the mounting frame (1), the third gear member (918) is provided with a card interface, the card interface corresponds to the position of the second inclined block (97), a telescopic rod (919) is provided at one end of the third gear member (918), the telescopic rod (919) is slidably connected in a telescopic sleeve (920), the telescopic sleeve (920) is fixedly connected to the mounting frame (1), one end of a spring member (921) is fixedly connected in the telescopic sleeve (920), and the other end of the spring member (921) is fixedly connected to the telescopic rod (919); A slot is provided on each of the two sliding rods (910), a second spring telescopic member (928) is provided in each of the two slots, a fourth inclined block (929) is provided at the output end of each of the two second spring telescopic members (928), the two fourth inclined blocks (929) correspond to the positions of the two first inclined blocks (55) in a one-to-one correspondence, a guide column (930) is provided on each of the two fourth inclined blocks (929), the two guide columns (930) are slidably connected in two guide rails (931) in a one-to-one correspondence, the two guide rails (931) are respectively provided in a one-to-one correspondence on the two guide rails (99), a tenth spring telescopic member (932) is provided in each of the two guide rails (931), and a fifth inclined block (933) is provided at the output end of each of the two tenth spring telescopic members (932).

8. A nitrogen recovery process for silane distillation according to claim 7, characterized in that: The replacement component (9) further comprises a fourth wire (922) having one end arranged on the third gear condition (918), the fourth wire (922) passing through the telescopic rod (919) and the telescopic sleeve (920), the other end of the fourth wire (922) being connected to a seventh spring telescopic member (923), the seventh spring telescopic member (923) being arranged at an output end of an eighth spring telescopic member (924), the eighth spring telescopic member (924) being arranged on the mounting frame (1), a limiting column (925) being arranged at the output end of the seventh spring telescopic member (923), the limiting column (925) being slidably connected to a limiting slide rail (926), the limiting slide rail (926) being arranged on the mounting frame (1), and the output end of the seventh spring telescopic member (923) slidingly sliding in the sliding cavity.

9. A nitrogen recovery process for silane distillation according to claim 8, characterized in that: It comprises a distillation tower, in which a plurality of condensers are arranged, and the plurality of condensers are collected into a main pipe through a plurality of pipelines, and the main pipe is connected to a heat exchanger, and the heat exchanger is connected with two air inlet buffer tanks.

10. A nitrogen recovery process for silane distillation according to claim 9, characterized in that: The two air intake buffer tanks are connected to a nitrogen compressor, the output end of the nitrogen compressor is connected to a filter element (6), the filter element (6) is located in a filter, and the output end of the filter is provided with a purge gas buffer tank, and the purge gas buffer tank is connected to a process nitrogen tank.

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