Gas inlet device for atomic layer deposition

Abstract

The present invention discloses an air inlet device for atomic layer deposition, which relates to the technical field of atomic layer deposition equipment. The present invention includes a first fixing frame and a second fixing frame. On one side of the first fixing frame, an air inlet isolation pipe, a docking isolation pipe, an air outlet isolation pipe, and an exhaust isolation pipe are sequentially arranged. The air outlet isolation pipe is rotatably installed at the bottom of the second fixing frame. A plurality of uniformly distributed blowing pipes are fixedly installed on the peripheral side of the air outlet isolation pipe. Two air inlet pipes are slidably sleeved at one end of the air inlet isolation pipe away from the docking isolation pipe, and a same control air valve is arranged on the two air inlet pipes. By setting a docking component, the two gases are respectively transmitted along different air inlet pipes, rotary hoses, air inlet outer sleeves, docking inner sleeves, and different air chambers, and are blown out from different blowing pipes. The two gases are always in a completely isolated state, and the situation of the gas transmission device being blocked due to the generation of reactants caused by gas retention will not occur.

Description

Technical Field

[0001] The present invention relates to the technical field of atomic layer deposition equipment, and particularly to an intake device for atomic layer deposition. Background Art

[0002] Principle of atomic layer thin film deposition technology: When the temperature and pressure in the reaction chamber are within a certain specific range, the gas reaction sources A and B (such as commonly used SiCl2H2 / dichlorosilane, NH3 / ammonia) are alternately introduced into the reaction chamber and reach the surface of the silicon wafer, and are cycled in turn to achieve the deposition of a thin film on the surface of the silicon wafer in a single atomic layer growth manner. Both gas reaction sources require an intake device for isolation and gas homogenization. If the two gas reaction sources meet at the intake end, a chemical reaction will occur immediately, and they need to enter the cavity alternately in the form of pulses to prevent the reaction before reaching the substrate.

[0003] The existing intake device can isolate the two gas reaction sources at the intake end to prevent the reaction. However, in order to ensure that the ejection positions of the two gas reaction sources are the same, the same blowpipe needs to be used, which easily leads to the retention of gas or its by-products in the blowpipe (such as the reaction between SiCl2H2 and NH3 in the blowpipe), resulting in incomplete isolation of the two gases. After multi-cycle accumulation, the two gas reaction sources will react in the blowpipe to form deposits, which not only reduces the quality of the gas reaction sources but also causes the deposits to accumulate and block the blowpipe. Therefore, an intake device for atomic layer deposition is proposed. Summary of the Invention

[0004] The purpose of the present invention is to solve the problem that the existing intake device can isolate the two gas reaction sources at the intake end to prevent the reaction. However, in order to ensure that the ejection positions of the two gas reaction sources are the same, the same blowpipe needs to be used, which easily leads to the retention of gas or its by-products in the blowpipe, resulting in incomplete isolation of the two gases. After multi-cycle accumulation, the two gas reaction sources will react in the blowpipe to form deposits, which not only reduces the quality of the gas reaction sources but also causes the deposits to accumulate and block the blowpipe. The present invention provides an intake device for atomic layer deposition.

[0005] In order to achieve the above purpose, the present invention specifically adopts the following technical solutions:

[0006] Intake device for atomic layer deposition, comprising a first fixing frame and a second fixing frame. On one side of the first fixing frame, an intake isolation pipe, a docking isolation pipe, an air outlet isolation pipe and an exhaust isolation pipe are sequentially arranged. The air outlet isolation pipe is rotatably installed at the bottom of the second fixing frame. A plurality of uniformly distributed blow pipes are fixedly installed on the peripheral side of the air outlet isolation pipe. One end of the intake isolation pipe far away from the docking isolation pipe is slidably sleeved with two intake pipes. A same control air valve is arranged on the two intake pipes. Isolation plates are fixedly installed inside the intake isolation pipe, the air outlet isolation pipe, the docking isolation pipe and the exhaust isolation pipe. The four isolation plates respectively divide the interiors of the intake isolation pipe, the air outlet isolation pipe, the docking isolation pipe and the exhaust isolation pipe into two air chambers. The positions of the two intake pipes correspond to those of the two air chambers respectively. A rotary motor is fixedly installed on the second fixing frame. The output end of the rotary motor is drivingly installed with a rotary shaft. One end of the rotary shaft is fixedly sleeved with a rotary gear. A driven toothed ring meshing with the rotary gear is fixedly sleeved on the air outlet isolation pipe. Two docking inner sleeves are fixedly installed at both ends of the air outlet isolation pipe. The positions of the four docking inner sleeves correspond to those of the two air chambers respectively. Two intake outer sleeves adapted to the docking inner sleeves are fixedly installed at one end of the docking isolation pipe close to the air outlet isolation pipe. The positions of the two intake outer sleeves correspond to those of the two air chambers respectively. A docking assembly is arranged on the intake isolation pipe and the docking isolation pipe;

[0007] The docking assembly is used to drive the intake isolation pipe and the docking isolation pipe to move forward, and enable the intake outer sleeve to be docked with the docking inner sleeve for gas transmission;

[0008] The docking assembly includes two rotary hoses fixedly installed between the intake isolation pipe and the docking isolation pipe. The positions of the two rotary hoses correspond to those of the two air chambers respectively. A stable sleeve frame is rotatably sleeved at one end of the docking isolation pipe. One end of the stable sleeve frame is slidably sleeved on the intake isolation pipe. The two rotary hoses are both located inside the stable sleeve frame. An intake electric push rod is fixedly installed on one side of the first fixing frame. The telescopic end of the intake electric push rod is fixedly installed with a traveling collar. The traveling collar is fixedly sleeved on the stable sleeve frame.

[0009] Furthermore, two surplus collars are sleeved on one end of the intake pipe located inside the intake isolation pipe. One of the surplus collars far away from the first fixing frame is fixedly sleeved on the intake pipe, and the other surplus collar is slidably sleeved on the intake pipe. A same surplus spring is fixedly installed between the two surplus collars. The surplus spring is sleeved on the intake pipe.

[0010] Furthermore, a first plug cover is sleeved at one end of the intake outer sleeve pipe located inside the docking isolation pipe. A first ejector rod is fixedly installed on one side of the first plug cover. A first sliding rack is fixedly installed inside the intake outer sleeve pipe. The first ejector rod is slidably installed on the first sliding rack. A first retaining ring is fixedly sleeved on the intake outer sleeve pipe. A same first return spring is fixedly installed between the first plug cover and the first retaining ring. The first return spring is sleeved on the intake outer sleeve pipe. A second plug cover is sleeved at one end of the docking inner sleeve pipe located inside the outlet isolation pipe. A second ejector rod corresponding to the position of the first ejector rod is fixedly installed on one side of the second plug cover. A second sliding rack is fixedly installed inside the docking inner sleeve pipe. The second ejector rod is slidably installed on the second sliding rack. A second retaining ring is fixedly sleeved on the docking inner sleeve pipe. A same second return spring is fixedly installed between the second plug cover and the second retaining ring. The second return spring is sleeved on the docking inner sleeve pipe.

[0011] Furthermore, a third fixing frame is arranged at one end of the exhaust isolation pipe far away from the outlet isolation pipe. Two exhaust pipes are slidably sleeved at one end of the exhaust isolation pipe close to the third fixing frame. The positions of the two exhaust pipes respectively correspond to the positions of the two air chambers. The two exhaust pipes are both fixedly installed on the third fixing frame. An exhaust electric push rod is fixedly installed on one side of the third fixing frame. The telescopic end of the exhaust electric push rod is fixedly connected with the exhaust isolation pipe. Two exhaust outer sleeves adapted to the docking inner sleeve pipe are fixedly installed at one end of the exhaust isolation pipe close to the outlet isolation pipe. A third plug cover is sleeved at one end of the exhaust outer sleeve pipe located inside the exhaust isolation pipe. A third ejector rod corresponding to the position of the second ejector rod is fixedly installed on one side of the third plug cover. A third sliding rack is fixedly installed inside the exhaust outer sleeve pipe. The third ejector rod is slidably installed on the third sliding rack. A third retaining ring is fixedly sleeved on the exhaust outer sleeve pipe. A same third return spring is fixedly installed between the third plug cover and the third retaining ring. The third return spring is sleeved on the exhaust outer sleeve pipe.

[0012] Furthermore, a plurality of pressure sensors evenly distributed along the axis of the docking isolation pipe are fixedly installed at one end of the docking isolation pipe close to the outlet isolation pipe. A pressure transmission spring rod is fixedly installed on one side of each pressure sensor. A positioning block is fixedly installed at the telescopic end of each pressure transmission spring rod. A plurality of positioning sockets adapted to the positioning blocks are fixedly installed at one end of the outlet isolation pipe close to the docking isolation pipe.

[0013] Furthermore, the plurality of positioning blocks are distributed on both sides along the partition board, and the plurality of positioning blocks on both sides respectively have different outer shapes.

[0014] Furthermore, a steering hose is fixedly installed at one end of each of the blow pipes, and a load-bearing ring is fixedly installed at one end of each of the steering hoses.

[0015] Furthermore, a corrugated sleeve is sleeved on each of the rotary hoses, and two ends of the corrugated sleeve are respectively fixedly connected to one end of the intake isolation pipe and one end of the docking isolation pipe.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. By providing a docking component in the present invention, during the gas transmission process, the two gases are respectively transmitted along different intake pipes, rotary hoses, intake outer sleeves, docking inner sleeves and different air chambers, and are blown out from different blow pipes. The two gases are always in a completely isolated state, and the situation of the gas transmission device being blocked due to the generation of reactants caused by gas retention will not occur.

[0018] 2. By providing a rotary hose in the present invention, the rotary motor can drive the air outlet isolation pipe to rotate back and forth, so that the gas can be blown more evenly on the substrate. When the air outlet isolation pipe rotates back and forth, the two rotary hoses can wind around each other with the air outlet isolation pipe, so as to provide a margin for the rotation of the air outlet isolation pipe, so that the docking isolation pipe can rotate with the air outlet isolation pipe while the intake isolation pipe remains different.

[0019] 3. By providing a margin spring in the present invention, when the two rotary hoses are wound, the actual distance between the intake isolation pipe and the docking isolation pipe will decrease, so that the margin spring is compressed. When the rotary hose returns to its original position, the margin spring will also drive the intake isolation pipe to return to its original position, so that the distance between the intake isolation pipe and the docking isolation pipe is restored, so that the rotary hose remains in a straight state, avoiding the rotary hose from being knotted during winding due to slack, which affects subsequent use.

[0020] 4. By providing a first plug cover and a second plug cover in the present invention, when the intake ends, the docking isolation pipe is separated from the air outlet isolation pipe, and the first plug cover and the second plug cover will return to their original positions under the elastic action of the first return spring and the second return spring, and re-close the intake outer sleeve and the docking inner sleeve, which can effectively prevent the leakage of residual gas inside the intake isolation pipe, the docking isolation pipe, etc.

[0021] 5. By providing an exhaust pipe in the present invention, when the intake of a single gas ends, the exhaust electric push rod controls the exhaust outer sleeve to be docked and communicated with the docking inner sleeve, so that air can be pumped along the exhaust pipe, and the gas in the intake isolation pipe, the docking isolation pipe, the air outlet isolation pipe and the cavity can be pumped out. This can not only discharge the residual gas in time to prepare for the input of the second gas in the next round, but also remove gaseous by-products to avoid affecting the deposition effect.

[0022] 6. In the present invention, by providing positioning blocks, when the docking isolation tube is docked with the air outlet isolation tube, the pressure sensors can transmit signals when the positioning blocks are pressed, so that the docking relationship between the current docking isolation tube and the air outlet isolation tube can be judged according to the pressure change of the pressure sensors, and the positioning blocks can be inserted into the positioning sockets, ensuring that the docking isolation tube and the air outlet isolation tube can be accurately docked;

[0023] 7. In the present invention, by setting the positioning blocks on both sides to different shapes, the positioning blocks can only be inserted into the corresponding-shaped positioning sockets. Combining with the signal change of the pressure sensors can ensure that the positional relationship between the air outlet isolation tube and the air inlet isolation tube remains consistent before and after, thus avoiding the situation where the same position of the air chamber is used for gas transmission by different gases before and after, and further ensuring complete isolation during gas transmission;

[0024] 8. In the present invention, by providing a steering hose, when the air outlet isolation tube rotates back and forth, each blowing tube will continuously change its position as the air outlet isolation tube rotates, and the steering hose will be perpendicular downward under the gravity of the load ring to overcome the pressure when the gas is blown out, thereby changing the gas blowing direction, so that the gas in each blowing tube always blows downward, thus blowing on the substrate and further improving the uniformity of blowing;

[0025] 9. In the present invention, by providing a corrugated sleeve, the corrugated sleeve can be sleeved outside the rotary hose to protect the rotary hose. It can not only share the pulling force of the air inlet isolation tube and the docking isolation tube on the rotary hose, improve the structural strength of the rotary hose, but also replace the rotary hose to make contact when the two rotary hoses are wound around each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a three-dimensional structural schematic diagram of the present invention;

[0027] Figure 2 is a three-dimensional structural schematic diagram of the interior of the air inlet isolation tube and the docking isolation tube of the present invention;

[0028] Figure 3 is the present invention Figure 2 structural schematic diagram at position A in;

[0029] Figure 4 is a three-dimensional structural schematic diagram of the interior of the air outlet isolation tube from the first perspective of the present invention;

[0030] Figure 5 is a three-dimensional structural schematic diagram of the interior of the air outlet isolation tube from the second perspective of the present invention;

[0031] Figure 6 is a three-dimensional structural schematic diagram of the interior of the exhaust isolation tube of the present invention;

[0032] Figure 7It is a schematic three-dimensional structure diagram of the blowing pipe of the present invention;

[0033] Figure 8 It is a schematic three-dimensional structure diagram of the interior of the intake outer sleeve pipe of the present invention;

[0034] Figure 9 It is a schematic three-dimensional structure diagram of the cooperation between the rotary hose and the corrugated sleeve of the present invention;

[0035] Figure 10 It is a schematic diagram of the gas inlet sequence of the present invention;

[0036] Reference numerals: 1, first fixing frame; 2, second fixing frame; 3, intake isolation pipe; 4, outlet isolation pipe; 5, docking isolation pipe; 6, exhaust isolation pipe; 7, intake pipe; 8, control air valve; 9, isolation plate; 10, blowing pipe; 11, rotary motor; 12, rotary shaft; 13, rotary gear; 14, driven toothed ring; 15, docking inner sleeve; 16, intake outer sleeve; 17, intake electric push rod; 18, rotary hose; 19, stable sleeve frame; 20, traveling collar; 21, surplus collar; 22, surplus spring; 23, first plug cover; 24, first ejector rod; 25, first retaining ring; 26, first return spring; 27, second plug cover; 28, second ejector rod; 29, second retaining ring; 30, second return spring; 31, pressure sensor; 32, pressure transmission spring rod; 33, positioning block; 34, positioning socket; 35, third fixing frame; 36, exhaust pipe; 37, exhaust electric push rod; 38, exhaust outer sleeve; 39, third plug cover; 40, third ejector rod; 41, third retaining ring; 42, third return spring; 43, steering hose; 44, load-bearing ring; 45, corrugated sleeve. Detailed implementation manners

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Generally, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In addition, terms such as "first", "second", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0040] In the description of the embodiments of the present invention, it should be noted that the orientation or positional relationship indicated by terms such as "inner", "outer", "upper", etc. is based on the orientation or positional relationship shown in the figures, or the orientation or positional relationship in which the inventive product is customarily placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0041] As Figure 1 shown, the gas inlet device for atomic layer deposition includes a first fixing frame 1 and a second fixing frame 2. On one side of the first fixing frame 1, an intake isolation pipe 3, a docking isolation pipe 5, an outlet isolation pipe 4, and an exhaust isolation pipe 6 are sequentially arranged. The outlet isolation pipe 4 is rotatably installed at the bottom of the second fixing frame 2. A plurality of uniformly distributed blow pipes 10 are fixedly installed on the peripheral side of the outlet isolation pipe 4. One end of the intake isolation pipe 3 away from the docking isolation pipe 5 is slidably sleeved with two intake pipes 7. A same control valve 8 is arranged on the two intake pipes 7. Among them, both the first fixing frame 1 and the second fixing frame 2 are fixedly installed on the reaction chamber, so as to keep different. The intake pipes 7 are respectively connected to the tanks or pipelines containing two gas reaction sources. Taking the two common gas reaction sources SiCl₂H₂ / dichlorosilane and NH₃ / ammonia as examples, the two will react in advance when mixed: SiCl₂H₂ = Si(s) + Cl₂(g) + H₂(g), 2NH₃ + 2Si(s) = 2SiN(s) + 3H₂(↑). Therefore, isolation is required;

[0042] The gas transmission device includes two intake pipes 7 (hereinafter referred to as intake pipe 7A and intake pipe 7B) dedicated to inputting two gas reaction sources (SiCl₂H₂ / dichlorosilane, NH₃ / ammonia). The gas pipeline for transporting N₂ / nitrogen (hereinafter referred to as nitrogen pipe A) is separately connected to the reaction chamber. The boiling point of NH₃ / ammonia is -33.5 °C and it is a gas under normal conditions, making it difficult to adhere in the gas transmission pipeline. The thermal decomposition reaction temperature of SiCl₂H₂ / dichlorosilane is 630 °C, while the normal temperature during the use of the gas inlet device is 180 °C. Therefore, the possibility of SiCl₂H₂ / dichlorosilane adhering in the gas transmission pipeline is also extremely small;

[0043] As Figure 10As shown, at the beginning of the process, first, SiCl₂H₂ / dichlorosilane is introduced into the reaction chamber through the inlet pipe 7A. The inside of the reaction chamber is a low-pressure and high-temperature environment. SiCl₂H₂ / dichlorosilane will quickly fill the chamber and undergo thermal decomposition to generate elemental Si / silicon. Then, N₂ / nitrogen is introduced into the reaction chamber through the nitrogen pipe A to clean and remove the residual mixed gases such as SiCl₂H₂ / dichlorosilane, Cl₂, and H₂ in the reaction chamber. Next, NH₃ / ammonia is introduced into the reaction chamber through the inlet pipe 7B to react with Si / silicon to form SiN for film coating. Finally, N₂ / nitrogen is introduced into the reaction chamber again through the nitrogen pipe A to clean the residual mixed gases, completing one cycle. After that, the above process is repeated to obtain a SiN film with a specified thickness;

[0044] The above reaction process includes the following steps:

[0045] 1. SiCl₂H₂ is introduced through the inlet pipe 7A and undergoes thermal decomposition: SiCl₂H₂ = Si(s) + Cl₂(g) + H₂(g);

[0046] 2. N₂ is introduced through the nitrogen pipe A to purge the residual gases;

[0047] 3. NH₃ is introduced through the inlet pipe 7B and reacts with the Si formed on the silicon wafer in step 1 to form SiN: 2NH₃ + 2Si(s) = 2SiN(s) + 3H₂(↑);

[0048] 4. N₂ is introduced through the nitrogen pipe A to purge the residual gases;

[0049] 5. The above four steps form one cycle, and the cycle is repeated multiple times until the SiN reaches the specified thickness;

[0050] Both the intake device and the existing intake equipment are connected to multiple external gas paths. After all processes are completed or the equipment has been used for a certain period, the inlet pipe 7A and the inlet pipe 7B (i.e., the intake device of the present application) are connected to another gas path that conveys N₂ / nitrogen (the following nitrogen pipe B), so that the nitrogen pipe B conveys N₂ / nitrogen to each pipeline in the intake device to clean the intake device and the reaction chamber separately, further eliminating the influence caused by the residual or attached gas reaction source on the inner wall of the pipeline to the intake device.

[0051] Such as Figure 2 、 Figure 4 、 Figure 6As shown, isolation plates 9 are fixedly installed inside the intake isolation pipe 3, the outlet isolation pipe 4, the docking isolation pipe 5, and the exhaust isolation pipe 6. The four isolation plates 9 divide the interiors of the intake isolation pipe 3, the outlet isolation pipe 4, the docking isolation pipe 5, and the exhaust isolation pipe 6 into two gas chambers respectively. Among them, the interiors of the intake isolation pipe 3, the outlet isolation pipe 4, the docking isolation pipe 5, and the exhaust isolation pipe 6 are each divided into two equal and mutually sealed gas chambers by their respective isolation plates 9. Except for the outlet isolation pipe 4, the positions of the two gas chambers inside the intake isolation pipe 3, the docking isolation pipe 5, and the exhaust isolation pipe 6 correspond to each other. When the outlet isolation pipe 4 is docked with the intake isolation pipe 3, the docking isolation pipe 5, and the exhaust isolation pipe 6, the positions of all the isolation plates 9 are consistent, and the positions of all the gas chambers on the same side correspond to each other. And a plurality of blow pipes 10 are evenly divided into two groups along the isolation plate 9 inside the outlet isolation pipe 4. The two groups of blow pipes 10 are respectively communicated with the two gas chambers inside the outlet isolation pipe 4 for blowing out two kinds of gases;

[0052] As Figure 2 shown, the two intake pipes 7 correspond to the positions of the two gas chambers respectively. As Figure 5 shown, a rotary motor 11 is fixedly installed on the second fixing frame 2. The output end of the rotary motor 11 is drivingly installed with a rotary shaft 12. One end of the rotary shaft 12 is fixedly sleeved with a rotary gear 13. A driven tooth ring 14 meshing with the rotary gear 13 is fixedly sleeved on the outlet isolation pipe 4. Two docking inner sleeves 15 are fixedly installed at both ends of the outlet isolation pipe 4. The four docking inner sleeves 15 correspond to the positions of the two gas chambers respectively. As Figure 3 shown, two intake outer sleeves 16 adapted to the docking inner sleeves 15 are fixedly installed at one end of the docking isolation pipe 5 close to the outlet isolation pipe 4. As Figure 3 shown, the two intake outer sleeves 16 correspond to the positions of the two gas chambers respectively. A docking assembly is provided on the intake isolation pipe 3 and the docking isolation pipe 5;

[0053] The docking assembly is used to drive the intake isolation pipe 3 and the docking isolation pipe 5 to move forward and make the intake outer sleeve 16 dock with the docking inner sleeve 15 for gas transmission;

[0054] As Figure 2As shown, the docking assembly includes two rotary hoses 18 fixedly installed between the intake isolation pipe 3 and the docking isolation pipe 5. The two rotary hoses 18 correspond to the positions of the two air chambers respectively. A stabilizing sleeve frame 19 is rotatably sleeved on one end of the docking isolation pipe 5, and one end of the stabilizing sleeve frame 19 is slidably sleeved on the intake isolation pipe 3. Both rotary hoses 18 are located inside the stabilizing sleeve frame 19. On one side of the first fixing frame 1, an intake electric push rod 17 is fixedly installed. The telescopic end of the intake electric push rod 17 is fixedly installed with a traveling collar 20, and the traveling collar 20 is fixedly sleeved on the stabilizing sleeve frame 19. Specifically, by setting the docking assembly in this atomic layer deposition intake device, before gas transmission, the intake electric push rod 17 can drive the traveling collar 20 and the stabilizing sleeve frame 19 to drive the intake isolation pipe 3 and the docking isolation pipe 5 to approach the outlet isolation pipe 4 until the docking inner sleeve 15 and the intake outer sleeve 16 are inserted into each other, so that the intake isolation pipe 3, the docking isolation pipe 5 and the outlet isolation pipe 4 are interconnected. At this time, different gases can be sequentially input into the outlet isolation pipe 4 through the intake pipe 7 respectively, so that the gases can be blown out from the blowing pipe 10. During the gas transmission process, the two gases are respectively transmitted along different intake pipes 7, rotary hoses 18, intake outer sleeves 16, docking inner sleeves 15 and different air chambers, and are blown out from different blowing pipes 10. The two gases are always in a completely isolated state, and there will be no situation where reactants are generated due to gas retention, resulting in the blockage of the gas transmission device. By setting the rotary hoses 18, when blowing air, the rotary motor 11 can drive the rotary gear 13 to rotate through the rotary shaft 12, and then drive the outlet isolation pipe 4 to rotate back and forth by using the driven tooth ring 14, so that the gas can be blown out along with the rotating blowing pipe 10, so that the gas can be blown more evenly on the substrate. When the outlet isolation pipe 4 rotates back and forth, the two rotary hoses 18 can wind around each other along with the outlet isolation pipe 4, so as to provide a margin for the rotation of the outlet isolation pipe 4, so that the docking isolation pipe 5 can rotate with the outlet isolation pipe 4 while the intake isolation pipe 3 remains different.

[0055] As Figure 2As shown in the figure, two surplus collar rings 21 are sleeved on one end of the intake pipe 7 located inside the intake isolation pipe 3. One of the surplus collar rings 21 away from the first fixing bracket 1 is fixedly sleeved on the intake pipe 7, and the other surplus collar ring 21 is slidably sleeved on the intake pipe 7. The same surplus spring 22 is fixedly installed between the two surplus collar rings 21, and the surplus spring 22 is sleeved on the intake pipe 7. Specifically, by setting the surplus spring 22, the intake electric push rod 17 will drive the intake isolation pipe 3 and the docking isolation pipe 5 to move forward. When the stable sleeve bracket 19 slides to the maximum stroke, it will drive the intake isolation pipe 3 to slide along the intake pipe 7 until one of the surplus collar rings 21 contacts the inner wall of the intake isolation pipe 3 and covers the connection between the intake pipe 7 and the intake isolation pipe 3, improving the sealing performance of the intake isolation pipe 3. At the same time, when the two rotary hoses 18 are wound, the actual distance between the intake isolation pipe 3 and the docking isolation pipe 5 will decrease, so that the intake isolation pipe 3 pushes the surplus collar ring 21 and compresses the surplus spring 22. When the rotary hose 18 is reset, the surplus spring 22 will also drive the intake isolation pipe 3 to reset, restoring the distance between the intake isolation pipe 3 and the docking isolation pipe 5, so that the rotary hose 18 remains in a straight state, avoiding knotting of the rotary hose 18 during winding due to slack, which affects subsequent use.

[0056] As Figure 3 shown in the figure, a first plug cover 23 is sleeved on one end of the intake outer sleeve 16 located inside the docking isolation pipe 5. A first ejector rod 24 is fixedly installed on one side of the first plug cover 23. A first sliding frame is fixedly installed inside the intake outer sleeve 16. The first ejector rod 24 is slidably installed on the first sliding frame. A first retaining ring 25 is fixedly sleeved on the intake outer sleeve 16. The same first return spring 26 is fixedly installed between the first plug cover 23 and the first retaining ring 25, and the first return spring 26 is sleeved on the intake outer sleeve 16. As Figure 4As shown in the figure, a second plug cover 27 is sleeved at one end of the docking inner sleeve 15 located inside the air outlet isolation pipe 4. A second ejector rod 28 corresponding to the position of the first ejector rod 24 is fixedly installed on one side of the second plug cover 27. A second sliding frame is fixedly installed inside the docking inner sleeve 15, and the second ejector rod 28 is slidably installed on the second sliding frame. A second retaining ring 29 is fixedly sleeved on the docking inner sleeve 15. The same second return spring 30 is fixedly installed between the second plug cover 27 and the second retaining ring 29, and the second return spring 30 is sleeved on the docking inner sleeve 15. Specifically, by setting the first plug cover 23 and the second plug cover 27, the first plug cover 23 and the second plug cover 27 can keep the air inlet outer sleeve 16 and the docking inner sleeve 15 closed. When the docking inner sleeve 15 and the air inlet outer sleeve 16 are docked, the docking inner sleeve 15 will be inserted into the air inlet outer sleeve 16, and then the second ejector rod 28 will contact the first ejector rod 24, thereby driving the second plug cover 27 and the first plug cover 23 away from the docking inner sleeve 15 and the air inlet outer sleeve 16 respectively, so that the docking inner sleeve 15 and the air inlet outer sleeve 16 are communicated, thus realizing the automatic connection between the docking isolation pipe 5 and the air outlet isolation pipe 4. When the air inlet ends, the docking isolation pipe 5 and the air outlet isolation pipe 4 are separated, and the first plug cover 23 and the second plug cover 27 will reset under the elastic action of the first return spring 26 and the second return spring 30, and re-close the air inlet outer sleeve 16 and the docking inner sleeve 15, which can effectively avoid the leakage of residual gas inside the air inlet isolation pipe 3, the docking isolation pipe 5, etc.

[0057] As Figure 6As shown in the figure, a third fixing bracket 35 is provided at one end of the exhaust isolation pipe 6 far from the air outlet isolation pipe 4. In this embodiment, the third fixing bracket 35 is fixedly installed on the reaction cavity to maintain the difference. At one end of the exhaust isolation pipe 6 close to the third fixing bracket 35, two exhaust pipes 36 are slidably sleeved. The positions of the two exhaust pipes 36 correspond to the positions of the two air chambers respectively. The two exhaust pipes 36 are both fixedly installed on the third fixing bracket 35. An exhaust electric push rod 37 is fixedly installed on one side of the third fixing bracket 35. The telescopic end of the exhaust electric push rod 37 is fixedly connected to the exhaust isolation pipe 6. At one end of the exhaust isolation pipe 6 close to the air outlet isolation pipe 4, two exhaust outer sleeves 38 adapted to the docking inner sleeve 15 are fixedly installed. One end of the exhaust outer sleeve 38 located inside the exhaust isolation pipe 6 is sleeved with a third plug 39. A third ejector rod 40 corresponding to the position of the second ejector rod 28 is fixedly installed on one side of the third plug 39. A third sliding bracket is fixedly installed inside the exhaust outer sleeve 38. The third ejector rod 40 is slidably installed on the third sliding bracket. A third retaining ring 41 is fixedly sleeved on the exhaust outer sleeve 38. The same third return spring 42 is fixedly installed between the third plug 39 and the third retaining ring 41. The third return spring 42 is sleeved on the exhaust outer sleeve 38. Specifically, by providing the exhaust pipe 36, when the single gas intake ends, the control valve 8 is controlled to close the intake pipe 7. The exhaust electric push rod 37 can be controlled to slide the exhaust isolation pipe 6 along the exhaust pipe 36 until the exhaust outer sleeve 38 is docked and communicated with the docking inner sleeve 15. Then, air can be extracted along the exhaust pipe 36, so that the intake isolation pipe 3, the docking isolation pipe 5, the air outlet isolation pipe 4 and the gas in the cavity are extracted. This can not only timely discharge the residual gas to prepare for the input of the second gas in the next round, but also remove the gaseous by-products to avoid affecting the deposition effect.

[0058] As Figure 3 shown, a plurality of pressure sensors 31 evenly distributed along the axis of the docking isolation pipe 5 are fixedly installed at one end of the docking isolation pipe 5 close to the air outlet isolation pipe 4. A pressure transmission spring rod 32 is fixedly installed on one side of each pressure sensor 31. A positioning block 33 is fixedly installed at the telescopic end of the pressure transmission spring rod 32. As Figure 4 shown, a plurality of positioning sockets 34 adapted to the positioning blocks 33 are fixedly installed at one end of the air outlet isolation pipe 4 close to the docking isolation pipe 5. Specifically, by providing the positioning blocks 33, when the docking isolation pipe 5 is docked with the air outlet isolation pipe 4, the positioning blocks 33 will gradually approach the positioning sockets 34 as the docking isolation pipe 5 advances. When the positioning blocks 33 are pressed, the pressure will be transmitted to the pressure sensors 31 through the pressure transmission spring rods 32, enabling the pressure sensors 31 to transmit signals. Thus, the docking relationship between the current docking isolation pipe 5 and the air outlet isolation pipe 4 can be judged according to the pressure change of the pressure sensors 31, so that the positioning blocks 33 can be inserted into the positioning sockets 34 to ensure the accurate docking of the docking isolation pipe 5 and the air outlet isolation pipe 4.

[0059] As Figure 3 shown, multiple positioning blocks 33 are distributed on both sides along the isolation plate 9, and the multiple positioning blocks 33 on both sides respectively have different outer shapes; specifically, by setting the positioning blocks 33 on both sides to different shapes, the positioning blocks 33 can only be inserted into the corresponding-shaped positioning sockets 34. Combining with the signal change of the pressure sensor 31 can ensure that the positional relationship between the air outlet isolation pipe 4 and the air inlet isolation pipe 3 remains consistent front and back, thus avoiding the situation where the same position of the air chamber is used for transmitting different gases before and after, and further ensuring complete isolation during gas transmission.

[0060] As Figure 7 shown, one end of each blow pipe 10 is fixedly installed with a steering hose 43, and one end of each steering hose 43 is fixedly installed with a load-bearing ring 44; specifically, by setting the steering hose 43, when the rotary motor 11 drives the air outlet isolation pipe 4 to rotate back and forth, each blow pipe 10 will continuously change its position as the air outlet isolation pipe 4 rotates, and the steering hose 43 at one end of the blow pipe 10 will be perpendicular downward under the gravity of the load-bearing ring 44 to overcome the pressure when the gas is blown out, thereby changing the gas blowing direction, so that the gas in each blow pipe 10 always blows downward, thus blowing on the substrate and further improving the uniformity of the blowing.

[0061] As Figure 9 shown, corrugated sleeve shells 45 are sleeved on the rotary hoses 18, and both ends of the corrugated sleeve shells 45 are fixedly connected to one end of the air inlet isolation pipe 3 and the docking isolation pipe 5 respectively; specifically, by setting the corrugated sleeve shells 45, the corrugated sleeve shells 45 can be sleeved outside the rotary hoses 18 to protect the rotary hoses 18. It can not only share the pulling force of the air inlet isolation pipe 3 and the docking isolation pipe 5 on the rotary hoses 18 and improve the structural strength of the rotary hoses 18, but also replace the rotary hoses 18 to make contact when the two rotary hoses 18 are wound around each other.

[0062] In summary: Before intake: The intake electric push rod 17 drives the traveling collar 20 and the stable sleeve frame 19 to drive the air inlet isolation pipe 3 and the docking isolation pipe 5 to approach the air outlet isolation pipe 4. When the positioning block 33 is pressed, the pressure sensor 31 can transmit a signal, thereby judging the docking relationship between the current docking isolation pipe 5 and the air outlet isolation pipe 4. The rotary motor 11 drives the air outlet isolation pipe 4 to rotate back and forth, changing the position of the positioning socket 34, so that the positioning block 33 can be inserted into the interior of the positioning socket 34, enabling the docking isolation pipe 5 and the air outlet isolation pipe 4 to be accurately docked. At the same time, the docking inner sleeve 15 and the intake outer sleeve 16 are communicated.

[0063] During intake: The two gases are respectively transmitted along different intake pipes 7, rotary hoses 18, intake outer sleeves 16, docking inner sleeves 15 and different air chambers, and blown out from different blow pipes 10. The rotary motor 11 drives the air outlet isolation pipe 4 and the blow pipes 10 to rotate back and forth, so that the gas is evenly blown on the substrate;

[0064] After intake: Control the air valve 8 to close the intake pipe 7. The exhaust electric push rod 37 controls the exhaust isolation pipe 6 to slide along the exhaust pipe 36 until the exhaust outer sleeve 38 is docked and communicated with the docking inner sleeve 15, and the intake isolation pipe 3, the docking isolation pipe 5, the air outlet isolation pipe 4 and the gas and gaseous by-products in the cavity are extracted along the exhaust pipe 36;

[0065] Docking relationships of each pipeline: Intake isolation pipe 3 and docking isolation pipe 5: The positions of the original air chambers of the intake isolation pipe 3 and the docking isolation pipe 5 are in the corresponding state. The first fixing frame 1 is fixedly installed on the reaction cavity, the intake pipe 7 is fixed on the first fixing frame 1, and the intake isolation pipe 3 is slidably connected to the intake pipe 7. When the intake isolation pipe 3 is driven by the intake electric push rod 17, the surplus spring 22 will be compressed and contracted, as Figure 2 shown. When the docking isolation pipe 5 rotates, it drives the two rotary hoses 18 ( Figure 2 in which the rotary hose 18 is wrapped inside the corrugated sleeve 45) to wind, thereby pulling the intake isolation pipe 3 and further compressing the surplus spring 22. Therefore, when the docking isolation pipe 5 stops rotating, the two rotary hoses 18 will be reset, straightened and tightened under the resilience of the surplus spring 22, so that the docking isolation pipe 5 rotates back to its original position, and the intake isolation pipe 3 and the docking isolation pipe 5 are re-aligned;

[0066] Docking isolation pipe 5 and air outlet isolation pipe 4: As Figure 4 shown, the docking isolation pipe 5 moves to one end of the air outlet isolation pipe 4 at the lower left corner (or Figure 5 one end of the air outlet isolation pipe 4 at the upper left corner in Figure 3 ), and then the relative position of the current docking isolation pipe 5 and the air outlet isolation pipe 4 is judged by the mutual insertion of the pressure sensor 31, the pressure transmission spring rod 32, the positioning block 33 and the positioning socket 34 and the pressure change. Then control the rotary motor 11 to rotate, drive the air outlet isolation pipe 4 to change its position, so that the intake outer sleeve 16 on the docking isolation pipe 5 as Figure 4 shown can be inserted into the docking inner sleeve 15 on the air outlet isolation pipe 4 at the lower left corner in

[0067] Outlet isolation tube 4 and exhaust isolation tube 6: The third fixing bracket 35 is fixedly installed on the reaction cavity in the same way as the first fixing bracket 1. The exhaust isolation tube 6 is slidably connected to the intake isolation tube 3 and the exhaust isolation tube 6. Since neither the intake isolation tube 3 nor the exhaust isolation tube 6 will rotate, the positions of the intake isolation tube 3 and the exhaust isolation tube 6 themselves correspond to each other. When the intake ends, the docking isolation tube 5 and the outlet isolation tube 4 are in a docking state, and the docking isolation tube 5 drives the outlet isolation tube 4 to reset under the resilience of the surplus spring 22. At this time, the intake isolation tube 3, the outlet isolation tube 4, and the docking isolation tube 5 all maintain a docking and alignment state. Therefore, the outlet isolation tube 4 and the exhaust isolation tube 6 are also in an aligned state. As Figure 6 shown, the exhaust electric push rod 37 drives the exhaust isolation tube 6 to approach Figure 4 the end of the outlet isolation tube 4 located in the upper right corner (or Figure 5 the end in the lower right corner) in Figure 6 so that the exhaust outer sleeve 38 on the exhaust isolation tube 6 in Figure 4 can be inserted into the docking inner sleeve 15 located in the upper right corner in

[0068] to complete the docking of the outlet isolation tube 4 and the exhaust isolation tube 6. Finally, the docking isolation tube 5 is separated from the outlet isolation tube 4 to disconnect the docking relationship, enabling the exhaust isolation tube 6 to start exhausting.

[0068] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification is only the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. Intake device for atomic layer deposition, characterized in that, It includes a first fixing frame (1) and a second fixing frame (2). On one side of the first fixing frame (1), an intake isolation pipe (3), a docking isolation pipe (5), an outlet isolation pipe (4) and an exhaust isolation pipe (6) are successively arranged. The outlet isolation pipe (4) is rotatably installed at the bottom of the second fixing frame (2). A plurality of uniformly distributed blowing pipes (10) are fixedly installed on the circumferential side of the outlet isolation pipe (4). One end of the intake isolation pipe (3) far from the docking isolation pipe (5) is slidably sleeved with two intake pipes (7). A same control air valve (8) is arranged on the two intake pipes (7). Partition plates (9) are fixedly installed inside the intake isolation pipe (3), the outlet isolation pipe (4), the docking isolation pipe (5) and the exhaust isolation pipe (6). The four partition plates (9) divide the interiors of the intake isolation pipe (3), the outlet isolation pipe (4), the docking isolation pipe (5) and the exhaust isolation pipe (6) into two air chambers respectively. The two intake pipes (7) correspond to the positions of the two air chambers respectively. A rotary motor (11) is fixedly installed on the second fixing frame (2). The output end of the rotary motor (11) is drivingly installed with a rotary shaft (12). One end of the rotary shaft (12) is fixedly sleeved with a rotary gear (13). A driven toothed ring (14) meshing with the rotary gear (13) is fixedly sleeved on the outlet isolation pipe (4). Two docking inner sleeves (15) are fixedly installed at both ends of the outlet isolation pipe (4). The four docking inner sleeves (15) correspond to the positions of the two air chambers respectively. Two intake outer sleeves (16) adapted to the docking inner sleeves (15) are fixedly installed at one end of the docking isolation pipe (5) close to the outlet isolation pipe (4). The two intake outer sleeves (16) correspond to the positions of the two air chambers respectively. A docking assembly is arranged on the intake isolation pipe (3) and the docking isolation pipe (5); The docking assembly is used to drive the intake isolation pipe (3) and the docking isolation pipe (5) to move forward, and to dock the intake outer sleeve (16) with the docking inner sleeve (15) for gas transmission; The docking assembly includes two rotary hoses (18) fixedly installed between the intake isolation pipe (3) and the docking isolation pipe (5). The two rotary hoses (18) correspond to the positions of the two air chambers respectively. A stable sleeve frame (19) is rotatably sleeved at one end of the docking isolation pipe (5). One end of the stable sleeve frame (19) is slidably sleeved on the intake isolation pipe (3). The two rotary hoses (18) are both located inside the stable sleeve frame (19). An intake electric push rod (17) is fixedly installed on one side of the first fixing frame (1). The telescopic end of the intake electric push rod (17) is fixedly installed with a traveling collar (20). The traveling collar (20) is fixedly sleeved on the stable sleeve frame (19).

2. The intake device for atomic layer deposition according to claim 1, characterized in that, Two surplus collars (21) are sleeved on one end of the intake pipe (7) located inside the intake isolation pipe (3). One of the surplus collars (21) away from the first fixing frame (1) is fixedly sleeved on the intake pipe (7), and the other surplus collar (21) is slidably sleeved on the intake pipe (7). The same surplus spring (22) is fixedly installed between the two surplus collars (21), and the surplus spring (22) is sleeved on the intake pipe (7).

3. The intake device for atomic layer deposition according to claim 1, wherein One end of the intake outer sleeve pipe (16) located inside the docking isolation pipe (5) is sleeved with a first plug cover (23). One side of the first plug cover (23) is fixedly installed with a first ejector rod (24). A first sliding frame is fixedly installed inside the intake outer sleeve pipe (16). The first ejector rod (24) is slidably installed on the first sliding frame. A first retaining ring (25) is fixedly sleeved on the intake outer sleeve pipe (16). The same first return spring (26) is fixedly installed between the first plug cover (23) and the first retaining ring (25), and the first return spring (26) is sleeved on the intake outer sleeve pipe (16). One end of the docking inner sleeve pipe (15) located inside the exhaust gas isolation pipe (4) is sleeved with a second plug cover (27). One side of the second plug cover (27) is fixedly installed with a second ejector rod (28) corresponding to the position of the first ejector rod (24). A second sliding frame is fixedly installed inside the docking inner sleeve pipe (15). The second ejector rod (28) is slidably installed on the second sliding frame. A second retaining ring (29) is fixedly sleeved on the docking inner sleeve pipe (15). The same second return spring (30) is fixedly installed between the second plug cover (27) and the second retaining ring (29), and the second return spring (30) is sleeved on the docking inner sleeve pipe (15).

4. The intake device for atomic layer deposition according to claim 3, characterized in that, One end of the exhaust isolation pipe (6) away from the air outlet isolation pipe (4) is provided with a third fixing bracket (35). Two exhaust pipes (36) are slidably sleeved on one end of the exhaust isolation pipe (6) close to the third fixing bracket (35). The positions of the two exhaust pipes (36) correspond to the positions of the two air chambers respectively. The two exhaust pipes (36) are both fixedly installed on the third fixing bracket (35). One side of the third fixing bracket (35) is fixedly installed with an exhaust electric push rod (37). The telescopic end of the exhaust electric push rod (37) is fixedly connected with the exhaust isolation pipe (6). Two exhaust outer sleeves (38) adapted to the docking inner sleeve (15) are fixedly installed on one end of the exhaust isolation pipe (6) close to the air outlet isolation pipe (4). One end of the exhaust outer sleeve (38) located inside the exhaust isolation pipe (6) is sleeved with a third plug cover (39). One side of the third plug cover (39) is fixedly installed with a third ejector rod (40) corresponding to the position of the second ejector rod (28). A third sliding bracket is fixedly installed inside the exhaust outer sleeve (38). The third ejector rod (40) is slidably installed on the third sliding bracket. A third retaining ring (41) is fixedly sleeved on the exhaust outer sleeve (38). The same third return spring (42) is fixedly installed between the third plug cover (39) and the third retaining ring (41). The third return spring (42) is sleeved on the exhaust outer sleeve (38).

5. The intake device for atomic layer deposition according to claim 1, characterized in that, A plurality of pressure sensors (31) evenly distributed along the axis of the docking isolation pipe (5) are fixedly installed on one end of the docking isolation pipe (5) close to the air outlet isolation pipe (4). A pressure transmission spring rod (32) is fixedly installed on one side of each pressure sensor (31). A positioning block (33) is fixedly installed at the telescopic end of each pressure transmission spring rod (32). A plurality of positioning sockets (34) adapted to the positioning blocks (33) are fixedly installed on one end of the air outlet isolation pipe (4) close to the docking isolation pipe (5).

6. The intake device for atomic layer deposition according to claim 5, characterized in that, The plurality of positioning blocks (33) are distributed on both sides along the partition plate (9). The plurality of positioning blocks (33) located on both sides have different outer shapes respectively.

7. The intake device for atomic layer deposition according to claim 1, characterized in that, One end of each air blowing pipe (10) is fixedly installed with a steering hose (43). A load-bearing ring (44) is fixedly installed at one end of each steering hose (43).

8. The intake device for atomic layer deposition according to claim 1, characterized in that, A corrugated sleeve (45) is sleeved on each rotary hose (18). Two ends of the corrugated sleeve (45) are respectively fixedly connected with one end of the air inlet isolation pipe (3) and the docking isolation pipe (5).

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