Quality inspection frame body cavity precision in-site detection and adjustment system

Abstract

The application provides a precision in-situ detection and adjustment system for an inner cavity of a quality frame, and belongs to the technical field of precision machining and measurement. The five-prism device comprises a five-prism, the five-prism comprises a first incident surface, a first exit surface adjacent to the first incident surface, a first shielding surface, and two side surfaces; the included angle between the first incident surface and the first exit surface is 90°, and the included angle between the adjacent side surfaces of the inner cavity of the quality frame to be detected is also 90°; the first shielding surface is provided with a first light shielding device. During the detection process, the five-prism device is arranged in the cavity of the quality frame, and is arranged on a first base together with the quality frame; the autocollimator is aligned with the first incident surface; the parallel light emitted by the autocollimator is transmitted from the first incident surface through the first side surface, is deflected by 90°, is emitted from the first exit surface, and acts on the second side surface in the form of a crosshair to determine the perpendicularity error between the first side surface and the second side surface.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of precision machining measurement, and more particularly to a precision in-situ detection and tuning system for the inner cavity of a test mass frame. BACKGROUND

[0002] The test mass frame is applied to high-precision measurement systems such as spacecraft navigation, precise orbit determination and orbit prediction, and is crucial to the research in the fields of earth science, fundamental physics and astrophysics. As a quality testing device for high-precision measurement systems, the test mass frame can serve as the capacitor plate frame of the inertial sensor in the gravitational wave detection system. The disturbance of the capacitor plate frame to the test mass directly affects the overall performance of the inertial sensor, and therefore very strict processing precision indicators and material performance requirements are imposed on the frame. At the same time, very strict requirements are imposed on the perpendicularity of the adjacent surfaces of the inner cavity of the frame and the relative degree of the opposite surfaces.

[0003] The detection means for the relative degree and perpendicularity of the inner cavity of the test mass frame is constantly iterated and optimized. Traditional surface geometric feature detection methods mainly include coordinate measurement method, electronic countermeasure measurement method and mechanical measurement method, etc. However, the traditional measurement methods cannot meet the in-situ detection of the surface geometric features of the inner cavity of the frame, and therefore cannot provide error feedback information of the surface for processing compensation. SUMMARY

[0004] In view of the defects of the prior art, the purpose of the present application is to provide a precision in-situ detection and tuning system for the inner cavity of a test mass frame, aiming to solve the problem that the traditional measurement methods cannot in-situ detect the surface geometric features of the inner cavity of the frame.

[0005] In a first aspect, the embodiments of the present application provide a precision in-situ detection and tuning system for the inner cavity of a test mass frame, comprising a collimator and a five-prism device.

[0006] The five-prism device comprises a five-prism and a first light shielding device, the five-prism comprises a first incident surface, a first exit surface adjacent to the first incident surface and a first shielding surface, and two side surfaces; the included angle between the first incident surface and the first exit surface is 90°, and the included angle between the adjacent side surfaces of the inner cavity of the test mass frame to be detected is also 90°, and the first shielding surface is provided with the first light shielding device.

[0007] In the detection process, the five-prism device is arranged in the cavity of the test mass frame and is arranged on the first base together with the test mass frame. When the first incident surface and the first exit surface are arranged to be opposite to the first side surface and the second side surface adjacent to the inner cavity of the test mass frame respectively, the collimator is aligned with the first incident surface, the parallel light emitted by the collimator is transmitted through the first side surface and enters the first incident surface, is deflected by 90° and is emitted from the first exit surface and acts on the second side surface in the form of a crosshair.

[0008] The position information of the crosshair is used to determine the perpendicularity error between the first side and the second side.

[0009] Optionally, when the first incident surface and the first exit surface are arranged opposite to the second side and the third side adjacent to the mass inspection inner cavity respectively, the autocollimator is aligned to the first incident surface, the parallel light emitted by the autocollimator passes through the second side to irradiate to the first incident surface, is deflected by 90° and is emitted from the first exit surface to act on the third side in the form of a crosshair;

[0010] The position information of the crosshair is used to determine the perpendicularity error between the second side and the third side and the parallelism error between the first side and the third side.

[0011] Optionally, the first light shielding device comprises an L surface, and the L surface is located in the same plane as the first incident surface.

[0012] At the beginning of detection, the parallel light emitted by the autocollimator irradiates to the L surface in the form of a crosshair, and the position information of the crosshair is used to determine the position information of the first incident surface.

[0013] Optionally, the pentagonal prism and the first light shielding device are movable relative to the first base along the vertical direction of the parallel light emitted by the autocollimator.

[0014] Optionally, the pentagonal prism device further comprises a pentagonal prism base, a first telescopic rod, a second base and a base rail, the pentagonal prism and the first light shielding device are fixedly arranged on the pentagonal prism base, the pentagonal prism base and the second base are connected through the first telescopic rod, the second base is arranged on the base rail, the base rail is provided with a sliding rail along the vertical direction of the parallel light emitted by the autocollimator, the base rail and the inspection mass frame body are fixedly arranged on the first base, and the pentagonal prism base is rotatable relative to the second base.

[0015] Optionally, the inner cavity precision in-place detection and tuning system of the inspection mass frame body further comprises a detachable quadrangular prism device, the quadrangular prism device comprises a quadrangular prism and a second light shielding device, the quadrangular prism comprises a second incident surface, a second exit surface opposite to the second incident surface, and two second shielding surfaces adjacent to the second incident surface, and the second shielding surface is provided with the second light shielding device.

[0016] When the quadrangular prism device is arranged on the first base, the autocollimator is aligned to the second incident surface, the parallel light emitted by the autocollimator changes after passing through the quadrangular prism and is emitted from the second exit surface to act on the L surface in the form of a crosshair, and the position information of the crosshair is used to determine the position information of the first incident surface.

[0017] Optionally, the four-prism device further comprises a four-prism seat, a second telescopic rod and a third base, the four-prism and the second light blocking device are fixedly arranged on the four-prism seat, the four-prism seat and the third base are connected through the second telescopic rod, the third base is detachably arranged on the first base, and the four-prism seat is rotatable relative to the third base.

[0018] Optionally, the in-situ detection and adjustment system for the inner cavity of the test mass frame further comprises a freezing clamp, during the detection process, the five-prism device and the test mass frame are arranged on the first base through the freezing clamp, the freezing clamp is a hollow structure to clamp the test mass frame, a liquid storage groove is arranged at the top, a first connecting part is arranged at the bottom, and a water inlet and a water outlet are arranged at the side.

[0019] Optionally, the freezing clamp is arranged on the first base through a fixing seat, the fixing seat comprises a second connecting part at the top, and the first connecting part is connected with the second connecting part to fix the freezing clamp and the test mass frame.

[0020] Optionally, the first base is arranged on a machine tool B-axis rotating platform, and the machine tool B-axis rotating platform rotates to drive the test mass frame on the first base to rotate.

[0021] The in-situ detection and adjustment system for the inner cavity of the test mass frame provided by the embodiment of the present application changes the light path of the parallel light emitted by the autocollimator through the prism device, so as to realize the in-situ detection of the perpendicularity error between the adjacent side surfaces and the parallelism error between the opposite side surfaces of the test mass frame to be detected, and to adjust the processing parameters of the test mass frame in time according to the detection result, so as to adapt to the high-precision and ultra-precision manufacturing requirement of the test mass frame and improve the processing precision and efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the present application or related art, the following will briefly introduce the drawings needed to be used in the embodiments or related art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creating any creative labor.

[0023] Figure 1 is a structural schematic diagram of the in-situ detection and adjustment system for the inner cavity of the test mass frame provided by the embodiment of the present application;

[0024] Figure 2 is a front view of the in-situ detection and adjustment system for the inner cavity of the test mass frame provided by the embodiment of the present application for instructing the test mass frame to detect the inner cavity of the test mass frame;

[0025] Figure 3 is a structural schematic diagram of the test mass frame provided by the embodiment of the present application;

[0026] Figure 4 is a structural schematic diagram of a five-prism device provided by an embodiment of the present application;

[0027] Figure 5 is a top view of the five-prism device provided by an embodiment of the present application;

[0028] Figure 6 is a structural schematic diagram of a four-prism device provided by an embodiment of the present application;

[0029] Figure 7 is a top view of the four-prism device provided by an embodiment of the present application;

[0030] Figure 8 is a structural schematic diagram of a freezing clamp provided by an embodiment of the present application;

[0031] Figure 9 is a structural schematic diagram of a fixing seat provided by an embodiment of the present application;

[0032] In all the drawings, the same reference signs are used to represent the same elements or structures, wherein:

[0033] 1—autocollimator, 2—test mass frame, 3—five-prism device, 4—four-prism device, 5—support plate, 6—leg, 11—first base, 12—B-axis rotating platform, S1~S4—different sides of the test mass frame, 31—five-prism, 32—first light blocking device, 33—five-prism seat, 34—first telescopic rod, 35—second base, 36—base rail, 41—four-prism, 42—four-prism seat, 43—second telescopic rod, 44—third base, 111—freezing clamp, 112—liquid storage tank, 113—inlet, 114—outlet, 115—first connecting part, 116—fixing seat, 117—second connecting part, 118—third connecting part. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0035] Figure 1 is a structural schematic diagram of a test mass frame cavity precision in-place detection and tuning system provided by an embodiment of the present application, Figure 2 is a front view of a test mass frame cavity precision in-place detection and tuning system for testing the cavity of the test mass frame provided by an embodiment of the present application, as shown in Figure 1 and Figure 2 The test mass frame cavity precision in-place detection and tuning system at least includes:

[0036] A collimator 1, a penta-prism device 3 and a computer (not shown in the figure).

[0037] Optionally, the collimator 1 emits parallel light, and the collimator 1 is installed on a support plate 5, and a support leg 6 is arranged below the support plate 5. The height of the support leg 6 is adjustable, and the height of the collimator 1 and the inspection quality frame 2 is adjusted to be consistent by adjusting the height of the support leg 6.

[0038] Optionally, the collimator 1 includes a parallel light tube and a telescope, and the parallel light tube is provided with a light source, a condenser, a reticle and the like, and can also directly irradiate the object to be measured.

[0039] Figure 3 is a structural schematic diagram of an inspection quality frame provided by the embodiment of the present application, as Figure 3 shown, the inspection quality frame 2 to be measured is a regular hexahedron, and the top and bottom are not filled, and can be used for placing and taking the object to be measured and the penta-prism device 3; the four side surfaces are hollow, so that the parallel light emitted by the collimator 1 can pass through the side surface of the inspection quality frame 2 and irradiate the penta-prism device 3 arranged in the cavity. The inner surface of the cavity is defined as an S surface, and the S1 to S4 surfaces are arranged clockwise.

[0040] As shown in Figure 1 , during the detection process, the inspection quality frame 2 is arranged on the first base 11, the first base 11 is arranged on the machine tool B-axis rotating platform 12, and the machine tool B-axis rotating platform 12 rotates to drive the first base 11, the inspection quality frame 2 and other workpieces arranged on the first base 11 to rotate.

[0041] As shown in Figure 1 , during the detection process, the penta-prism device 3 is arranged in the cavity of the inspection quality frame 2 to be measured, and the geometric center of the penta-prism device 3 and the inspection quality frame 2 and the light path center of the collimator 1 are located on a straight line.

[0042] Figure 4 is a structural schematic diagram of a penta-prism device provided by the embodiment of the present application, Figure 5 is a top view of the penta-prism device provided by the embodiment of the present application, as Figure 4 shown, the penta-prism device 3 at least includes a penta-prism 31 and a first light ray shielding device 32.

[0043] As shown in Figure 5As shown, the five-prism 31 includes a first incident surface, a first exit surface adjacent to the first incident surface and a first blocking surface, and two side surfaces; the first blocking surface is provided with a first light blocking device 32. The purpose of the first light blocking device 32 is to block light, ensuring that light only enters the five-prism from the first incident surface, so the first blocking surface adjacent to the first incident surface is provided with the first light blocking device. It is easy to think that the side surface adjacent to the first blocking surface, except for the first incident surface, can also be blocked by the first light blocking device to further ensure that light only enters from the first incident surface.

[0044] Optionally, the first light blocking device 32 includes an L surface, which is in the same plane as the first incident surface of the five-prism 31. When the parallel light emitted by the autocollimator 1 is in the form of a crosshair and irradiates on the L surface, the light is reflected back to the autocollimator 1, and the position information of the crosshair can be used to determine the position information of the plane where the first incident surface of the five-prism 31 is located.

[0045] Optionally, the included angle between the first incident surface and the first exit surface of the five-prism 31 is 90°, and the included angle between the adjacent side surfaces of the inner cavity of the test mass frame 2 is also 90°. It should be noted that the test mass frame 2 in the embodiment of the present application is a regular hexahedron, so the included angle between the adjacent side surfaces of the inner cavity of the test mass frame 2 should be 90°. Therefore, the included angle between the first incident surface and the first exit surface is set to 90°, and the degrees of the included angles of each surface of the five-prism and the refractive index of the five-prism are set correspondingly, so that the parallel light incident on the first incident surface can be deflected by 90° and then emitted from the first exit surface, thereby measuring the perpendicularity error between the adjacent side surfaces of the inner cavity of the test mass frame 2; other degrees can also be used instead of 90°.

[0046] Optionally, the five-prism 31 and the first light blocking device 32 are movable relative to the first base 11 along the vertical direction of the parallel light emitted by the autocollimator 1 through a sliding rail, so that the parallel light emitted by the autocollimator 1 can be aligned with the first incident surface of the five-prism 31 or the L surface of the first light blocking device 32.

[0047] Optionally, the five-prism device 3 further includes a five-prism seat 33, a first telescopic rod 34, a second base 35 and a base rail 36. The five-prism 31 and the first light blocking device 32 are fixedly arranged on the five-prism seat 33, and the first light blocking device 32 is optionally a part of the five-prism seat 33.

[0048] Optionally, the five-prism seat 33 and the second base 35 are connected through the first telescopic rod 34, and the first telescopic rod 34 can move in the vertical direction relative to the second base 35 to adjust the height of the five-prism 31 to be consistent with the height of the autocollimator 1.

[0049] Optionally, the second base 35 and the base rail 36 are slidingly connected, the second base 35 is arranged on the base rail 36, and the base rail 36 is arranged on the first base 11; the base rail 36 is provided with a sliding rail in the vertical direction of the parallel light emitted by the autocollimator 1, when the second base 35 moves linearly along the rail under the action of the electric drive, the pentaprism 31 and the first light shielding device 32 are driven to move in the vertical direction of the parallel light emitted by the autocollimator 1, so that the light is emitted from the first incident surface of the pentaprism 31 or the light is reflected on the first light shielding device 32.

[0050] Optionally, the pentaprism seat 33 is rotatable relative to the second base 35. Specifically, there are two cases, the first is that the pentaprism seat 33 is rotatably arranged at the top end of the first telescopic rod 34, and the second is that the connection between the first telescopic rod 34 and the pentaprism seat 33 is fixed, and the first telescopic rod 34 is rotatably connected with the second base 35, and the rotation of the first telescopic rod 34 drives the rotation of the pentaprism seat 33.

[0051] It should be noted that the rotation, extension and sliding in the embodiments of the application can be realized by electric drive, so that the height adjustment and horizontal position adjustment of the workpiece can be realized.

[0052] In the detection process, the first incident surface and the first exit surface of the pentaprism 31 are arranged opposite to the first side and the second side adjacent to the inner cavity of the test quality frame body 2 respectively, the autocollimator 1 is aligned with the first incident surface of the pentaprism 31 (at the same time, the autocollimator 1 is aligned with the hollow position of the first side of the test quality frame body 2), the autocollimator 1 emits the parallel light source passing through the reticle, the parallel light source is emitted from the first incident surface of the pentaprism 31 through the first side of the test quality frame body 2 to be detected, is deflected by 90° in the pentaprism 31, is emitted from the first exit surface, and then acts on the second side of the test quality frame body 2 in the form of a crosshair, the position information of the crosshair is used to determine the perpendicularity error between the first side and the second side of the test quality frame body 2. Figure 5

[0053] Further, through the rotary motion of the machine tool B-axis rotating platform and the rotation of the pentaprism seat 33, the first incident surface and the first exit surface of the pentaprism 31 are arranged opposite to the second side and the third side (the third side is opposite to the first side) adjacent to the inner cavity of the test quality frame body 2 respectively, the autocollimator 1 is aligned with the first incident surface of the pentaprism 31 (at the same time, the autocollimator 1 is aligned with the hollow position of the second side of the test quality frame body 2), the autocollimator 1 emits the parallel light source passing through the reticle, the parallel light source is emitted from the first incident surface of the pentaprism 31 through the second side of the test quality frame body 2 to be detected, is deflected by 90° in the pentaprism 31, is emitted from the first exit surface, and then acts on the second side of the test quality frame body 2 in the form of a crosshair, the position information of the crosshair is used to determine the perpendicularity error between the first side and the second side of the test quality frame body 2. Figure 5 ​) from the first exit surface, and then acts on the third side of the test quality frame body 2 in the form of a crosshair, at which time the position information of the crosshair is used to determine the perpendicularity error between the second side and the third side of the test quality frame body 2, and further determine the parallelism error between the first side and the third side of the test quality frame body 2.

[0054] Optionally, the position information of the crosshair is transmitted to a computer, which calculates the perpendicularity error between adjacent sides and the parallelism error between opposite sides of the test quality frame body 2 based on the position information of the crosshair, and feeds back to the trimming machining system, which adjusts the machining parameters of the test quality frame body according to the error calculation results.

[0055] Optionally, before the detection starts, the second base 35 in the five-prism device 3 is linearly moved on the base rail 36 by electric driving, so that the parallel light source emitted from the autocollimator 1 acts on the L surface of the first light blocking device 32 in the five-prism device 3 in the form of a crosshair, and the light is reflected back to the autocollimator 1. The position information of the crosshair is used to determine the position information of the L surface, that is, the position information of the first incident surface of the five-prism 31. When the position of the crosshair is located at the set position of the L surface, it indicates that the first incident surface of the five-prism 31 is strictly perpendicular to the parallel light emitted from the autocollimator 1, and the rotation of the five-prism base is not required. Even if the first incident surface of the five-prism 31 is not strictly perpendicular to the parallel light emitted from the autocollimator 1, the currently detected position information can be used as the reference information for subsequent perpendicularity error and parallelism error measurement.

[0056] Optionally, the in-situ detection and trimming system for the inner cavity of the test quality frame further comprises a detachable four-prism device.

[0057] As shown in Figure 1 and Figure 2 , the four-prism device 4 is detachably arranged on the first base 11, and in the detection process, the geometric center thereof is located on a straight line with the geometric centers of the test quality frame body 2 and the five-prism device 3, and the light path center of the autocollimator.

[0058] Figure 6 is a structural schematic view of the four-prism device provided by the embodiment of the present application, Figure 7 is a top view of the four-prism device provided by the embodiment of the present application, as shown in Figure 6 , the four-prism device 4 at least comprises a four-prism 41 and a second light blocking device Figure 6 , the second light blocking device in the four-prism seat 42 is part of the four-prism seat 42.

[0059] As shown in Figure 7As shown, the quadrangular prism 41 includes a second incident surface, a second exit surface opposite to the second incident surface, and two second shielding surfaces adjacent to the second incident surface, and the two second shielding surfaces are provided with second light shielding devices. The purpose of the second light shielding devices is to shield light and ensure that the light emitted by the autocollimator 1 is only incident from the second incident surface into the quadrangular prism, so the second light shielding devices are provided on the second shielding surfaces adjacent to the second incident surface to shield light. It is conceivable that the second light shielding devices can be provided only on one second shielding surface that can be incident by light.

[0060] In the detection process, when the quadrangular prism device 4 is arranged on the first base 11, the autocollimator 1 is aligned with the second incident surface of the quadrangular prism 41, and the parallel light emitted by the autocollimator 1 changes after passing through the quadrangular prism 4 and is emitted from the second exit surface of the quadrangular prism 4 and aligned with the L surface of the first light shielding device 32 in the pentagonal prism device 3, and the light is reflected from the L surface back to the autocollimator 1, and the computer determines the position information of the first incident surface of the pentagonal prism 31 based on the fourth included angle between the parallel light emitted by the autocollimator 1 and the received reflected light.

[0061] Optionally, the quadrangular prism device 4 further includes a quadrangular prism seat 42, a second telescopic rod 43 and a third base 44. The quadrangular prism 41 is fixedly arranged on the quadrangular prism seat 42 Figure 6 (the second light shielding device in the middle is part of the quadrangular prism seat 42), the quadrangular prism seat 42 and the third base 44 are connected through the second telescopic rod 43, and the third base 44 is detachably arranged on the first base 11. The second telescopic rod 43 can move in the vertical direction relative to the third base 44 to adjust the height of the quadrangular prism 41 to be consistent with the height of the autocollimator 1.

[0062] Optionally, the quadrangular prism seat 42 is rotatable relative to the third base 44. Specifically, there are two cases, the first is that the quadrangular prism seat 42 is rotatably arranged at the top end of the second telescopic rod 43, and the second is that the connection between the second telescopic rod 43 and the quadrangular prism seat 42 is fixed, and the second telescopic rod 43 and the third base 44 are rotationally connected, and the second telescopic rod 43 rotates to drive the quadrangular prism seat 42 to rotate.

[0063] Optionally, the in-situ precision detection and adjustment system for the inner cavity of the quality inspection frame further includes a refrigeration clamping device, specifically a refrigeration clamp.

[0064] Figure 8 is a structural schematic diagram of the refrigeration clamp provided by the embodiment of the present application, as Figure 8 shown, the refrigeration clamp 111 is a hollow structure to clamp the pentagonal prism device 3 and the quality inspection frame 2 to be detected, a plurality of liquid storage grooves 112 are arranged at the top to store low-temperature liquid, a water inlet 113 and a water outlet 114 are arranged on the side, and a first connecting part 115 is arranged at the bottom to fix the refrigeration clamp 111.

[0065] The test quality frame 2 and other workpieces to be detected are clamped by the frozen clamp 111 in the detection process, avoiding the stress and surface damage caused by the traditional clamp clamping and fixing mode, ensuring the high-precision ultra-precision manufacturing requirement of the test quality frame 2, and providing protection for subsequent accurate measurement and adjustment.

[0066] Optionally, in the detection process, the frozen clamp 111 is fixedly arranged on the first base 11 through the fixing seat.

[0067] Figure 9 is a structural schematic view of the fixing seat provided by the embodiment of the present application, as Figure 9 shown, the top of the fixing seat 116 is provided with a second connecting part 117, and the second connecting part 117 at the top of the fixing seat 116 is connected with the first connecting part 115 at the bottom of the frozen clamp 111 to achieve the purpose of fixing the frozen clamp 111 and the test quality frame 2 clamped thereby. The bottom of the fixing seat 116 is also provided with a third connecting part 118, so that the fixing seat 116 can be fixed on the first base 11.

[0068] Optionally, referring to Figure 8 and Figure 9 , the first connecting part 115 at the bottom of the frozen clamp 111 is a protruding column, the second connecting part 117 at the top of the fixing seat 116 is a fixing hole, the protruding column at the bottom of the frozen clamp 111 is fixed in the fixing hole at the top of the fixing seat 116 to fix the frozen clamp 111 and the test quality frame 2 clamped thereby; the third connecting part 118 at the bottom of the fixing seat 116 is a protruding column, and the top of the corresponding first base 11 is provided with a fixing hole to fix the fixing seat 116. It can be conceived that the first connecting part 115 is set as a recessed fixing hole, and the second connecting part 117 is set as a protruding column, which can also fix the frozen clamp 111 and the test quality frame 2 clamped thereby; the third connecting part 118 is set as a recessed fixing hole, and the top of the first base 11 is provided with a protruding column, which can also fix the fixing seat 116.

[0069] Referring to Figure 1 , the overall in-situ detection and adjustment process will be described below.

[0070] Step 1, set the autocollimator 1 and calibrate. Set the autocollimator 1 horizontally, adjust the height of the autocollimator 1, so that it is aligned with the corresponding outer surface of the first side surface of the inner cavity of the test quality frame 2 to be detected.

[0071] Step 2, set the five-prism device 3. The five-prism device 3 is arranged in the cavity of the test quality frame 2, and the position of the five-prism 31 is adjusted so that the autocollimator 1 is aligned with the outer surface of the test quality frame 2 at the same time as the first incident surface of the five-prism 31.

[0072] Step 3, calibrate the reference position information of the first incident surface of the pentaprism 31.

[0073] Method 1, use the four-prism device 4 to determine the position information of the first incident surface of the pentaprism 31.

[0074] Step 3-11, set the four-prism device 4. Set the four-prism device 4 on the first base 11, adjust the height of the four-prism 41 so that the autocollimator 1 is aligned with the second incident surface of the four-prism 41 at the same time, and can deflect the parallel light emitted by the autocollimator 1 to align with the L surface of the first light blocking device 32 in the pentaprism device 3.

[0075] Step 3-12, start the autocollimator 1, the autocollimator 1 emits parallel light source through the reticle, enters from the second incident surface of the four-prism 41, and exits from the second exit surface after deflection in the four-prism 41 as shown in Figure 7 , and then acts on the L surface of the first light blocking device 32 in the pentaprism device 3 in the form of a crosshair, and the light is reflected back to the autocollimator 1. The position information of the crosshair is used to determine the position information of the L surface, that is, the position information of the first incident surface of the pentaprism 31.

[0076] Step 3-13, remove the four-prism device 4.

[0077] Method 2, use the pentaprism device 3 to determine the position information of the first incident surface of the pentaprism 31.

[0078] Step 3-21, start the autocollimator 1, the autocollimator 1 emits parallel light source through the reticle.

[0079] Step 3-22, by electric drive, make the second base 35 in the pentaprism device 3 move linearly on the base rail 36, so that the parallel light source emitted by the autocollimator 1 acts on the L surface of the first light blocking device 32 in the pentaprism device 3 in the form of a crosshair, and the light is reflected back to the autocollimator 1. The position information of the crosshair is used to determine the position information of the L surface, that is, the position information of the first incident surface of the pentaprism 31.

[0080] The pentaprism seat 33 is rotatable relative to the second base 35, and by rotating the pentaprism seat 33, the crosshair can be displayed at the specified position of the L surface, at this time the first incident surface of the pentaprism 31 is strictly perpendicular to the parallel light emitted by the autocollimator 1, as the reference position of the plane where the first incident surface is located.

[0081] Considering that in the subsequent steps, the autocollimator 1 needs to be aligned with the first incident surface, and the electric drive to make the second base 35 in the pentaprism device 3 move linearly on the base rail 36 may cause the reference position of the plane where the first incident surface of the pentaprism 31 is located to rotate and deviate, therefore, method 1 is preferred.

[0082] Step 4, start the autocollimator 1, the autocollimator 1 emits parallel light source through the scale plate, through the first side of the test quality frame 2 to be measured from the first incident surface of the pentagonal prism 31, after the deflection in the pentagonal prism 31 as shown in the figure, the first exit surface is emitted, and then the crosshair is used to act on the second side of the test quality frame 2, the position information of the crosshair is used to determine the perpendicularity error between the first side and the second side of the test quality frame 2. Figure 5

[0083] Step 5, through the rotation of the machine tool B axis rotating platform and the rotation of the pentagonal prism seat 33, so that the autocollimator 1 is aligned with the corresponding outer surface of the second side of the inner cavity of the test quality frame 2 to be measured and the first incident surface of the pentagonal prism 31, repeat the foregoing steps, the parallel light emitted by the autocollimator 1 acts on the third side of the test quality frame 2 in the form of a crosshair, and the position information of the crosshair is used to determine the perpendicularity error between the second side and the third side of the test quality frame 2, and further determine the parallelism error between the first side and the third side of the test quality frame 2.

[0084] It should be understood that expressions such as "include" and "may include" used in the present application indicate the presence of disclosed functions, operations or constituent elements, and do not limit one or more additional functions, operations and constituent elements. In the present application, terms such as "include" and / or "have" can be interpreted to mean that specific features, numbers, operations, constituent elements, components or combinations thereof are present, but cannot be interpreted to exclude the presence or addition of one or more other features, numbers, operations, constituent elements, components or combinations thereof.

[0085] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be understood broadly, for example, "connection" can be detachable connection, or can be non-detachable connection; can be direct connection, or can be indirect connection through intermediate medium. Among them, "fixed connection" means that the relative position relationship after connection is unchanged. "Rotary connection" means that the relative rotation after connection is connected. "Sliding connection" means that the relative sliding after connection is connected. The orientation language mentioned in the embodiments of the present application, such as "top", "bottom", "inner", "outer" and the like, is only the direction of the drawing, therefore, the orientation language used is to better, more clearly illustrate and understand the embodiments of the present application, and is not indicative or implied that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, therefore, it cannot be understood as a limitation on the embodiments of the present application.

[0086] ​In addition, in the embodiments of the present application, the mathematical concepts of symmetry, equality, relative, perpendicular, etc. are mentioned. These definitions are for the current process level, not the absolute definition in the mathematical sense, and a small amount of deviation is allowed, such as approximately symmetrical, approximately equal, approximately relative, approximately perpendicular, etc. For example, A is relative to B, which means that A is relative to B or approximately relative to B. A is perpendicular to B, which means that A is perpendicular to B or approximately perpendicular to B.

[0087] The above merely provides specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A precision in-situ detection and adjustment system for the internal cavity of a quality inspection frame, characterized in that, Includes an autocollimator and a pentaprism device; The pentaprism device includes a pentaprism and a first light blocking device. The pentaprism includes a first incident surface, a first exit surface adjacent to the first incident surface, a first blocking surface, and two side surfaces. The angle between the first incident surface and the first exit surface and the angle between the adjacent side surfaces of the inner cavity of the test quality frame to be tested are both 90°. The first blocking surface is provided with the first light blocking device. The first light blocking device includes an L-face, which is located on the same plane as the first incident surface; At the start of the detection, the parallel light emitted by the autocollimator illuminates the L-surface in the form of a crosshair, and the position information of the crosshair is used to determine the position information of the first incident surface. During the testing process, the pentaprism device is set inside the cavity of the inspection quality frame and is set together with the inspection quality frame on the first base. When the first incident surface and the first exit surface are respectively set to face the first side and the second side adjacent to the cavity of the inspection quality frame, the autocollimator is aligned with the first incident surface. The parallel light emitted by the autocollimator passes through the first side and enters from the first incident surface. After being deflected by 90°, it exits from the first exit surface and acts on the second side in the form of a crosshair. The position information of the crosshair is used to determine the perpendicularity error between the first side and the second side.

2. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 1, characterized in that, When the first incident surface and the first exit surface are respectively set to face the second side and the third side adjacent to the quality inspection cavity, the autocollimator is aligned with the first incident surface. The parallel light emitted by the autocollimator passes through the second side and illuminates the first incident surface. After being deflected by 90°, it is emitted from the first exit surface and acts on the third side in the form of a crosshair. The position information of the crosshair is used to determine the perpendicularity error between the second side and the third side, as well as the parallelism error between the first side and the third side.

3. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 1, characterized in that, The pentaprism and the first light-blocking device are movable relative to the first base along the direction perpendicular to the parallel light emitted by the autocollimator via a sliding track.

4. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 3, characterized in that, The pentaprism device further includes a pentaprism base, a first telescopic rod, a second base, and a base track. The pentaprism and the first light blocking device are fixedly mounted on the pentaprism base. The pentaprism base and the second base are connected by the first telescopic rod. The second base is mounted on the base track, and the base track is provided with a sliding track perpendicular to the direction of the parallel light emitted by the autocollimator. The base track and the inspection quality frame are fixedly mounted on the first base, and the pentaprism base is rotatable relative to the second base.

5. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 1, characterized in that, The system also includes a detachable prism device, which includes a prism and a second light blocking device. The prism includes a second incident surface, a second exit surface opposite to the second incident surface, and two second blocking surfaces adjacent to the second incident surface. The second blocking surfaces are provided with the second light blocking device. When the prism device is set on the first base, the autocollimator is aligned with the second incident surface. The parallel light emitted by the autocollimator is changed by the prism and then emitted from the second exit surface, acting on the L surface in the form of a crosshair. The position information of the crosshair is used to determine the position information of the first incident surface.

6. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 5, characterized in that, The prism device further includes a prism base, a second telescopic rod, and a third base. The prism and the second light blocking device are fixedly mounted on the prism base. The prism base and the third base are connected by the second telescopic rod. The third base is detachably mounted on the first base. The prism base is rotatable relative to the third base.

7. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 1, characterized in that, The system also includes a freezing clamp. During the testing process, the pentaprism device and the inspection quality frame are mounted on the first base via the freezing clamp. The freezing clamp has a hollow structure to hold the inspection quality frame. It has a liquid storage tank at the top, a first connecting part at the bottom, and a water inlet and an outlet on the side.

8. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 7, characterized in that, The freezing clamp is mounted on the first base via a fixing seat. The fixing seat includes a second connecting part at the top, and the first connecting part is connected to the second connecting part to fix the freezing clamp and the inspection quality frame.

9. The precision in-situ detection and adjustment system for the internal cavity of the inspection quality frame according to claim 1, characterized in that, The first base is mounted on the B-axis rotating platform of the machine tool, and the rotation of the B-axis rotating platform of the machine tool drives the inspection quality frame on the first base to rotate.

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