Production system control method, electronic device and storage medium

CN119234191APending Publication Date: 2024-12-31BOE TECHNOLOGY GROUP CO LTD +2
View PDF 0 Cites 1 Cited by

Patent Information

Application Number
CN202380008923.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-04-28
Publication Date
2024-12-31

AI Technical Summary

Technical Problem

In semiconductor packaging and testing systems, the service life of fixtures is difficult to monitor, leading to usage errors and low production efficiency. Moreover, fixtures with different specifications and product types have different service lives, making management complex.

Method used

By realizing real-time monitoring and updating of fixture usage information in the production system, we can decide whether to allow the fixture to enter the process site based on its remaining service life, expected life consumption, number of uses, and duration of use, and perform maintenance and specifications when necessary. Information management.

Benefits of technology

Effectively control the flow of fixtures between various process stations to avoid usage errors, improve fixture availability and production efficiency, and ensure production quality and safety.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119234191A_ABST
    Figure CN119234191A_ABST
Patent Text Reader

Abstract

The invention provides a control method of a production system, electronic equipment and a storage medium, and relates to the technical field of semiconductor sealing and testing systems. The production system comprises a plurality of process stations and jigs used in the process stations in sequence, and the control method of the production system comprises the steps that before the jigs enter the current process station, the remaining service life of the jigs is determined according to use information of the jigs, wherein the use information of the jig is generated according to the use behavior of the jig at each previous process site; if the remaining service life of the jig is longer than the predicted service life consumption of the jig by the current process station, allowing the jig to enter the current process station; and updating the use information of the jig according to the use behavior of the jig at the current process site.
Need to check novelty before this filing date? Find Prior Art

Description

Production system control method, electronic device, and storage medium Technical Field

[0001] The present disclosure relates to the technical field of semiconductor packaging and testing systems, and in particular to a control method, electronic equipment, storage medium, and computer program product for a production system. Background Art

[0002] Jigs are a common tool used in the semiconductor packaging and testing industry. These systems involve a wide variety of jigs, each with its own distinct uses. Jigs of different specifications have varying lifespans, and even jigs of the same specification have varying lifespans when processing different products. Furthermore, jigs frequently circulate between various sites, making them difficult to monitor and prone to misuse.

[0003] Summary of the Invention

[0004] The present disclosure provides a control method for a production system, an electronic device, a storage medium, and a computer program product.

[0005] According to one aspect of the present disclosure, a control method for a production system is provided. The production system includes multiple process sites and jigs for use sequentially at the multiple process sites. The control method includes: before the jig enters a current process site, determining the remaining service life of the jig based on jig usage information, wherein the jig usage information is generated based on the jig's usage behavior at each previous process site; if the remaining service life of the jig is greater than the estimated life consumption of the jig by the current process site, allowing the jig to enter the current process site; and updating the jig usage information based on the jig's usage behavior at the current process site.

[0006] According to an embodiment of the present disclosure, if the remaining service life of the jig is greater than the expected life consumption of the jig by the current process site, allowing the jig to enter the current process site includes: if the remaining number of uses of the jig is greater than the expected number of uses of the jig by the current process site, and / or the remaining usage time of the jig is greater than the expected usage time of the jig by the current process site, allowing the jig to enter the current process site.

[0007] According to an embodiment of the present disclosure, the jig has first status information, which is used to indicate whether the jig is in a detained state or a non-detained state. The method also includes: if the remaining number of uses of the jig is less than or equal to the expected number of uses of the jig by the current process site, the first status information is set to a detained state, and the jig is denied entry into the current process site.

[0008] According to an embodiment of the present disclosure, the jig has second status information, which is used to indicate whether the jig is in a clean state or an unclean state. The method also includes: if the remaining usage time of the jig is less than or equal to the expected usage time of the jig by the current process site, the second status information is set to an unclean state, and the jig is denied entry into the current process site.

[0009] According to an embodiment of the present disclosure, the jig has first status information and second status information, the first status information is used to indicate whether the jig is in a detained state or a non-detained state, and the second status information is used to indicate whether the jig is in a clean state or a non-clean state. The method also includes: determining whether the first status information of the jig is a non-detained state and the second status information is a clean state; if the first status information of the jig is a non-detained state and the second status information is a clean state, determining whether the remaining service life of the jig is greater than the expected life consumption of the jig by the current process site.

[0010] According to an embodiment of the present disclosure, the control method further includes: determining the expected number of times the current process site uses the jig based on the number of products in the product batch to be produced or the type of product batch; and / or determining the expected usage time of the jig by the current process site based on the time when a predetermined number of product batches enter and leave the current process site within a historical period.

[0011] According to an embodiment of the present disclosure, the usage information includes the number of times the fixture has been used and the total number of times it has been used, and determining the remaining service life of the fixture based on the usage information of the fixture includes: subtracting the number of times it has been used from the total number of times it has been used to obtain the remaining number of times it has been used; and / or the usage information includes the duration of time the fixture has been used and the total duration of time it has been used, and determining the remaining service life of the fixture based on the usage information of the fixture includes: subtracting the duration of time used from the total duration of time used to obtain the remaining duration of time used.

[0012] According to an embodiment of the present disclosure, updating the usage information of the jig according to the usage behavior of the jig at the current process site includes: obtaining the actual number of times the jig is used at the current process site; updating the number of times the jig has been used according to the actual number of times the jig has been used at the current process site; and updating the usage time according to the actual usage time of the jig at the current process site.

[0013] According to an embodiment of the present disclosure, the usage information further includes: at least one of the time when the fixture is put on the shelf, the time when it is taken off the shelf, the time when it is put on the machine, and the time when it is taken off the machine.

[0014] According to an embodiment of the present disclosure, the control method further includes: generating a plurality of maintenance tasks according to a preset maintenance plan, wherein in response to completion of a current maintenance task, generating a next maintenance task according to a maintenance cycle set in the maintenance plan.

[0015] According to an embodiment of the present disclosure, the control method further includes: before the jig enters the current process station, determining whether the current maintenance task is completed; if the current maintenance task is not completed, refusing the jig to enter the current process station.

[0016] According to an embodiment of the present disclosure, the control method further includes: in response to completion of the current maintenance task, clearing the number of times the fixture has been used and / or the length of time it has been used in the usage information of the fixture.

[0017] According to an embodiment of the present disclosure, the control method also includes: generating specification information of the jig before the jig enters the production system, the specification information including the specification name, specification version and specification editing status of the jig; in response to receiving a specification editing request for the jig, determining whether editing of the jig's specification information is allowed based on the specification editing status in the jig's specification information.

[0018] According to an embodiment of the present disclosure, the specification editing status includes a frozen state and a modified state. The frozen state is used to indicate whether the specification information is frozen, and the modified state is used to indicate whether the specification information is being modified. Determining whether the specification information is allowed to be edited based on the specification editing status in the specification information of the fixture includes: if the frozen state indicates that the specification information is not frozen and the modified state indicates that the specification information is not being modified, then editing of the specification information is allowed.

[0019] According to an embodiment of the present disclosure, the control method further includes: in response to completion of editing the specification information, setting the freeze status to indicate that the specification information is frozen.

[0020] According to an embodiment of the present disclosure, the specification information also includes a specification activation status, which is used to indicate whether the specification information is activated. The method also includes: after setting the freeze status to indicate that the specification information is frozen, in response to the user's activation operation, setting the specification activation status to indicate that the specification information is activated to allow the fixture to be applied to the production system.

[0021] According to an embodiment of the present disclosure, the control method also includes: after editing the specification information of the fixture, updating the specification version in the specification information, storing the specification information after the updated specification version as the new version of specification information, and storing the specification information before editing as the old version of specification information.

[0022] According to an embodiment of the present disclosure, the control method further includes: in response to the new version of the specification information being activated, setting the old version of the specification information to be inactivated.

[0023] According to an embodiment of the present disclosure, the control method also includes: before editing the specification information of the fixture, generating a copy of the specification information, and modifying the specification name in the copy to be different from the specification name in the specification information; wherein the specification information of the fixture is edited by editing the copy, thereby obtaining new specification information.

[0024] According to an embodiment of the present disclosure, the specification information also includes first restriction information and second restriction information, the first restriction information is used to indicate whether the number of times the jig is used is to be limited, and the second restriction information is used to indicate whether the usage time of the jig is to be limited. The method also includes: in response to the first restriction information indicating that the number of times the jig is used is to be limited, determining whether the remaining number of times the jig is used is greater than the expected number of times the jig is used by the current process site; in response to the second restriction information indicating that the usage time of the jig is to be limited, determining whether the remaining usage time of the jig is greater than the expected usage time of the jig by the current process site.

[0025] According to an embodiment of the present disclosure, the specification information further includes at least one of the type of jig, the measurement unit of the jig, and the supplier of the jig.

[0026] According to an embodiment of the present disclosure, the control method further includes: persistently storing usage information and specification information of the jig in a database.

[0027] According to an embodiment of the present disclosure, the production system is a production system for semiconductor packaging and testing.

[0028] According to another aspect of the present disclosure, an electronic device is provided, including a memory and a processor, wherein instructions executable by the processor are stored in the memory, and when the instructions are executed by the processor, the processor executes the method described above.

[0029] According to another aspect of the present disclosure, a non-transitory computer-readable storage medium storing computer instructions is provided, wherein the computer instructions are used to enable a computer to execute and implement the method described above.

[0030] According to another aspect of the present disclosure, a computer program product is provided, comprising a computer program, which implements the method described above when executed by a processor.

[0031] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The accompanying drawings are provided to facilitate a better understanding of the present invention and do not constitute a limitation of the present disclosure.

[0033] FIG1 is a flow chart of a control method for a production system according to an embodiment of the present disclosure;

[0034] FIG2 is a flow chart of a method for controlling a production system according to another embodiment of the present disclosure;

[0035] FIG3 is a flow chart of a fixture maintenance method according to an embodiment of the present disclosure;

[0036] FIG4 is a flow chart of a fixture maintenance method according to another embodiment of the present disclosure;

[0037] 5A to 5D are schematic diagrams of triggering rules for triggering a maintenance plan at different interval units according to an embodiment of the present disclosure;

[0038] 6 is a flowchart of a method for editing fixture specification information according to an embodiment of the present disclosure;

[0039] FIG7 is a flowchart of a method for activating fixture specifications according to an embodiment of the present disclosure;

[0040] FIG8 is a diagram of a modeling tool architecture for fixture modeling according to an embodiment of the present disclosure;

[0041] FIG9 is an architectural diagram of a user operation platform according to an embodiment of the present disclosure;

[0042] FIG10 is a diagram of a business function architecture of a production system according to an embodiment of the present disclosure;

[0043] FIG11 is a system technical architecture diagram of a production system according to an embodiment of the present disclosure;

[0044] 12A and 12B are application architecture diagrams of a production system according to an embodiment of the present disclosure; and

[0045] FIG13 is a block diagram of an electronic device suitable for implementing a control method for a production system according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of them. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure. It should be noted that throughout the drawings, the same elements are represented by the same or similar figure marks. In the following description, some specific embodiments are only for descriptive purposes and should not be understood as any limitation to the present disclosure, but are only examples of the embodiments of the present disclosure. Conventional structures or configurations will be omitted when they may cause confusion in the understanding of the present disclosure. It should be noted that the shapes and sizes of the components in the figures do not reflect the actual size and proportion, but only illustrate the contents of the embodiments of the present disclosure.

[0047] Unless otherwise defined, technical or scientific terms used in the embodiments of the present disclosure shall have the same general meaning as those skilled in the art. The terms "first," "second," and similar terms used in the embodiments of the present disclosure do not denote any order, quantity, or importance, but are merely used to distinguish different components.

[0048] FIG1 is a flowchart of a method for controlling a production system according to an embodiment of the present disclosure.

[0049] The production system may include a plurality of process stations and jigs for sequentially using the plurality of process stations. The control method of the production system may include operations S110 to S130 as shown in FIG1 .

[0050] In operation S110 , before the jig enters a current process station, the remaining service life of the jig is determined according to usage information of the jig, wherein the usage information of the jig is generated according to usage behavior of the jig in various previous process stations.

[0051] According to an embodiment of the present disclosure, the usage information of the fixture includes information related to the use behaviors of the fixture such as putting on the shelf, taking off the shelf, loading on the machine, unloading, cleaning, detaining, releasing, and scrapping. The usage information of the fixture includes, but is not limited to, the time of putting on the shelf, the time of taking off the shelf, the time of loading on the machine, the time of unloading from the machine, the length of time used, the total length of time used, the number of times used, the total number of times used, the actual number of times used at the current process site, the actual length of time used at the current process site, and the like. In some embodiments, the remaining service life of the fixture may include the remaining number of uses, which may be determined based on the total number of uses and the number of uses. In other embodiments, the service life of the fixture may also include the remaining usage time, which may be determined based on the total usage time and the usage time.

[0052] According to an embodiment of the present disclosure, the usage information of the jig can be obtained from the production system or obtained by user input. In some embodiments, the usage information of the jig can be directly obtained from the production system. For example, the production system records the number of times the jig has been used or the length of time it has been used at the current process site, and after the jig leaves the current site, the number of times the jig has been used or the length of time it has been used, and other data are automatically deducted to update the usage information of the jig. When the jig is used at the next process site, the usage information of the jig can be obtained directly from the production system.

[0053] In operation S120 , if the remaining service life of the jig is greater than the expected life consumption of the jig by the current process station, the jig is allowed to enter the current process station.

[0054] According to embodiments of the present disclosure, the estimated lifespan of a fixture may include the lifespan of the fixture required to complete a batch of tasks at the current process station. For example, the estimated lifespan of the fixture may include the estimated number of times the fixture is used, the estimated duration of use of the fixture, and the like. In some embodiments, the estimated number of times the fixture is used may be determined based on the number of batches of products processed at the current process station.

[0055] According to an embodiment of the present disclosure, by comparing the service life of the jig with the expected life consumption of the jig by the current process site, the jig is allowed to enter the current process site only when the service life of the jig can meet the expected life consumption of the jig by the current process site. This can reduce the situation where the jig needs to be replaced due to insufficient service life during the processing process, and thus help to improve the utilization rate (Activation) of the jig.

[0056] In operation S130 , the usage information of the jig is updated according to the usage behavior of the jig at the current process site.

[0057] According to an embodiment of the present disclosure, the usage information of the jig is maintained based on the usage behavior of the jig when it passes through each process station. Before the jig enters the current process station, the remaining service life of the jig is judged based on the jig usage information to determine whether it is sufficient for the current process station, and whether the jig is allowed to enter the current process station is determined accordingly. Therefore, the control method of the production system provided by the embodiment of the present disclosure maintains the usage information of the jig during its use and monitors its service life accordingly, thereby effectively controlling the flow of jigs between various process stations and avoiding negative impacts on the production process due to excessive use of jigs.

[0058] According to an embodiment of the present disclosure, the control method further includes: if the remaining service life of the jig is less than or equal to the expected life consumption of the jig by the current process site, refusing the jig to enter the current process site.

[0059] According to an embodiment of the present disclosure, if the remaining service life of the jig is greater than the expected life consumption of the jig by the current process site, allowing the jig to enter the current process site includes: if the remaining number of uses of the jig is greater than the expected number of uses of the jig by the current process site, and / or the remaining usage time of the jig is greater than the expected usage time of the jig by the current process site, allowing the jig to enter the current process site.

[0060] According to an embodiment of the present disclosure, if the remaining service life of the jig is less than or equal to the expected life consumption of the jig by the current process site, refusing the jig to enter the current process site includes: if the remaining number of uses of the jig is less than or equal to the expected number of uses of the jig by the current process site, and / or the remaining usage time of the jig is less than or equal to the expected usage time of the jig by the current process site, then allowing the jig to enter the current process site.

[0061] FIG2 is a flowchart of a method for controlling a production system according to another embodiment of the present disclosure.

[0062] As shown in FIG. 2 , the control method of the production system of this embodiment may include operations S201 to S211 .

[0063] In operation S201 , before a jig enters a current process station, usage information, first state information, second state information, and specification information of the jig are acquired.

[0064] According to an embodiment of the present disclosure, the first status information can be used to indicate whether the fixture is in a detained state or a non-detained state. The second status information can be used to indicate whether the fixture is in a clean state or an unclean state. The first and second status information can be directly uploaded to the production system server after maintenance at each previous process station. The next time the fixture is used, the first and second status information of the fixture can be directly obtained from the production system server.

[0065] According to embodiments of the present disclosure, specification information may include, for example, fixture attribute information, control information, and status information. For example, fixture attribute information may include fixture specification name, fixture specification version, fixture type, fixture measurement unit, and supplier. For example, fixture control information may include whether lifespan and usage time are controlled. For example, fixture status information may include modification status, frozen status, and activation status.

[0066] Table 1 is a table of fixture specifications according to an embodiment of the present disclosure.

[0067] Table 1

[0068] In operation S202, it is determined whether the jig is in a non-detained state according to the first state information. If it is determined that the jig is in a non-detained state, operation S203 is performed; if it is determined that the jig is in a detained state, operation S211 is performed.

[0069] In operation S203, it is determined whether the jig is in a clean state according to the second state information. If it is determined that the jig is in a clean state, operation S204 is performed; if it is determined that the jig is in an unclean state, operation S211 is performed.

[0070] In operation S204, it is determined whether the number of times the jig is used needs to be limited based on the specification information. If it is determined that the number of times the jig is used needs to be limited, operation S205 is performed; if it is determined that the number of times the jig is used does not need to be limited, operation S206 is performed.

[0071] According to an embodiment of the present disclosure, the specification information may include first restriction information, where the first restriction information is used to indicate whether to limit the number of times the tool is used.

[0072] In operation S205, a determination is made based on the usage information as to whether the remaining number of uses of the jig is greater than the estimated number of uses of the jig by the current site. If the remaining number of uses of the jig is greater than the estimated number of uses of the jig by the current site, operation S206 is performed; if the remaining number of uses of the jig is less than or equal to the estimated number of uses of the jig by the current site, operation S207 is performed.

[0073] In operation S206, it is determined whether the use time of the jig needs to be limited according to the specification information. If it is determined that the use time of the jig needs to be limited, operation S208 is performed; if it is determined that the use time of the jig does not need to be limited, operation S210 is performed.

[0074] According to an embodiment of the present disclosure, the specification information may further include second restriction information, where the second restriction information is used to indicate whether to limit the usage time of the tool.

[0075] In operation S207, the first status information is set to a withheld status.

[0076] According to an embodiment of the present disclosure, the detained state can be a state in which the jig is not allowed to enter the current process station. For example, if the remaining number of uses of the jig is less than or equal to the expected number of uses of the jig by the current process station, the jig is not allowed to enter the current station, a detention operation is performed on the jig, and the first state information of the jig is set to the detained state. For another example, if the jig is damaged and is not allowed to enter the current process station, a detention operation is performed on the jig, and the first state information of the jig is set to the detained state.

[0077] In operation S208, a determination is made based on the usage information as to whether the remaining usage time of the jig is greater than the estimated usage time of the jig by the current station. If the remaining usage time of the jig is greater than the estimated usage time of the jig by the current station, operation S210 is executed; if the remaining usage time of the jig is less than or equal to the estimated usage time of the jig by the current station, operation S209 is executed.

[0078] In operation S209, the second state information is set to a non-cleaning state.

[0079] In operation S210 , the jig is allowed to enter the current process station.

[0080] In operation S211 , the jig is denied entry into the current process station.

[0081] During the production process, it is necessary to control the number of times the fixture is used and the duration of use. However, when processing different product specifications, the number of times the fixture can be used is different, and the duration of use is different, that is, the total number of times used and the total duration are uncertain. Moreover, the traditional semiconductor packaging and testing business process is flexible and changeable, and the number of batches processed at the same site is not the same. Therefore, the number of times the fixture is used and the duration of use for different product batches consumed at the same site are uncertain, that is, the number of times each batch of products is consumed and the duration of use are uncertain. In view of this, according to an embodiment of the present disclosure, for the fixtures with CheckTimeUsedLimit (whether to control the number of uses) and CheckDurationUsedLimit (whether to control the duration of use) as Y in the fixture specification table of Table 1, the product specification and fixture specification association table can be used to define the total number of uses and the total duration of use for the production of products of different specifications and fixtures of different specifications. For example, as shown in Table 2.

[0082] Table 2 is a table showing the association between product specifications and fixture specifications according to an embodiment of the present disclosure.

[0083] Table 2

[0084] As shown in Table 2, you can determine whether a fixture has usage restrictions or usage limits based on the product specifications and product specification versions being processed at the current process site. If so, determine the total number of uses and total usage time for the fixture to determine the remaining number of uses and remaining usage time.

[0085] According to an embodiment of the present disclosure, usage information may include the number of times a fixture has been used and the total number of times it has been used. Determining the remaining service life of the fixture based on the fixture usage information includes: subtracting the number of times it has been used from the total number of times it has been used to obtain the remaining number of times it has been used. Usage information may also include the duration of time the fixture has been used and the total duration of time it has been used. Determining the remaining service life of the fixture based on the fixture usage information includes: subtracting the duration of time used from the total duration of time used to obtain the remaining duration of time used.

[0086] According to an embodiment of the present disclosure, the expected number of uses of a jig may be determined based on the number of product batches or the type of product batches in a product batch to be produced at a current process site.

[0087] According to an embodiment of the present disclosure, the expected number of uses can be calculated using the following formula (1).

[0088] Among them, T use The estimated number of times the fixture will be used at the current process site;

[0089] Q is the number of product batches to be processed at the current process site;

[0090] r is the calculation ratio of unit usage times;

[0091] TimeUsedBase is the basis for calculating the number of times used.

[0092] According to the embodiment of the present disclosure, as shown in formula (1), when the product is used as the basis for calculating the number of times used, the unit usage ratio r is 1, that is, the expected number of times the fixture is used by the previous process site T use This is equal to the number of product batches to be processed at the current process station. For example, for ejectors and nozzles, set product as the basis for calculating usage. Since r is 1, each product, for example, can have one ejection and suction of a core bead counted as one expected usage. Therefore, the number of times a batch of products requires ejector nozzles to be used during the DieBond process is the number of products in the batch.

[0093] Die Bonding refers to the process of cutting a small piece of "crystal" with circuits from the wafer and then using the gold layer on the back to the gold-plated surface in the center of the frame through instant high-temperature mechanical pressure welding or fixing it with epoxy resin. This process is called Die Bonding and is the first step in the traditional packaging and testing industry.

[0094] According to the embodiment of the present disclosure, as shown in formula (1), when Lot is used as the calculation basis for the number of times used, the expected number of times the current process site uses the fixture is T useThe ratio of unit usage is calculated by rounding up. For example, when the splitter is used for dicing, the expected number of uses is determined based on the size of the wafer being processed, and the wafer size is fixedly related to the product batch specifications. Therefore, in this case, Lot can be set as the basis for calculating the number of uses, and the number of times consumed per batch is a fixed value, that is, the ratio of unit usage. Specifically, for example, when the splitter is used for dicing, the size of the processed wafer A is a, and the size of the product B obtained after processing is b. The number of products B that can be processed by wafer A is a÷b, that is, the number of times this batch of products needs to be used is a÷b times. Then, the expected number of uses of the fixture at the current process site is a÷b rounded up, where a÷b is the ratio of unit usage.

[0095] According to an embodiment of the present disclosure, the expected usage time of the tool at the current process site can be determined based on the time when a predetermined number of product batches enter and leave the current process site within a historical period.

[0096] According to an embodiment of the present disclosure, at the initial stage of use, the expected usage time of the fixture at the current process site can be determined based on experience, and calculated using formula (2) after the equipment has been in operation for a period of time.

[0097] in,

[0098] InlineCT is the estimated usage time of the fixture at the current process site;

[0099] n is the number of product batches within a certain period of time;

[0100] t ii The date and time when the i-th product batch arrives at the station;

[0101] t io The date and time when the i-th product batch leaves the station.

[0102] According to the embodiments of the present disclosure, as production quality and efficiency are improved, the estimated usage time InlineCT of the current process site for the fixture will gradually shorten. Therefore, it is possible to set up a periodic execution update of the InlineCT of the process site to further accurately estimate whether the current fixture can cope with batch processing.

[0103] According to an embodiment of the present disclosure, updating the usage information of the jig according to the usage behavior of the jig at the current process site includes: obtaining the actual number of times the jig is used at the current process site; updating the number of times the jig has been used according to the actual number of times the jig has been used at the current process site; and updating the usage time according to the actual usage time of the jig at the current process site.

[0104] According to an embodiment of the present disclosure, if a fixture requires control over its usage count and usage duration, when the fixture leaves the station, the remaining usage count in the fixture's current usage information is subtracted from the actual usage count at the current process site to obtain the remaining usage count for the fixture, which is then updated in the fixture usage information. Simultaneously, the remaining usage duration in the fixture's current usage information is subtracted from the actual usage duration at the current process site to obtain the remaining usage duration for the fixture, which is then updated in the fixture usage information.

[0105] According to the embodiments of the present disclosure, if a fixture has been used for a period of time but has not yet reached its full usage limit, the fixture can be removed from the machine and returned to the production line for shelving. If, after a period of time, the fixture returned to the production line is removed from the production line again and restocked for use in processing a new product, the remaining life of the fixture can be calculated by multiplying the TimeUsedLimit and DurationUsedLimit of the new product.

[0106] FIG3 is a flow chart of a jig maintenance method according to an embodiment of the present disclosure.

[0107] As shown in FIG. 3 , the fixture maintenance method of this embodiment may include operations S301 to S305 .

[0108] In operation S301 , a plurality of maintenance tasks are generated according to a preset maintenance plan, wherein in response to completion of a current maintenance task, a next maintenance task is generated according to a maintenance cycle set in the maintenance plan.

[0109] According to an embodiment of the present disclosure, a maintenance plan defines the following: which fixture requires scheduled maintenance, the scheduled maintenance granularity (e.g., hour, day, week, month, etc.), and the triggering rules set for each granularity. After the maintenance plan is set, a maintenance task is generated based on the maintenance plan. This maintenance task records the scheduled start time that meets the rules and begins execution of the current maintenance task after the scheduled start time arrives. After the current maintenance task is completed, the next maintenance task is automatically generated until the maintenance plan is complete.

[0110] In operation S302, it is determined whether the current maintenance task is completed. If it is determined that the current maintenance task is completed, operation S303 is performed; if it is determined that the current maintenance task is not completed, operation S305 is performed.

[0111] In operation S303 , the number of times used and / or the duration of use in the fixture usage information is cleared.

[0112] According to the embodiments of the present disclosure, after the fixture maintenance plan is completed, the number of times the fixture has been used and the duration of use in the fixture usage information are reset to zero, that is, the number of times the fixture has been used and the duration of use are restarted. By performing regular maintenance on the fixture, the service life of the fixture is increased.

[0113] In operation S304 , the jig is allowed to enter the current process station.

[0114] In operation S305 , the jig is denied entry into the current process station.

[0115] FIG4 is a flow chart of a jig maintenance method according to another embodiment of the present disclosure.

[0116] As shown in Figure 4, the fixture maintenance method of this embodiment includes two stages: formulating a maintenance plan 410 and executing the maintenance plan 420. The formulating maintenance plan 410 stage includes creating a maintenance plan 411 and creating a maintenance work order 412. Creating a maintenance plan 411 defines maintenance plan information. This information may include, for example, the fixture name, maintenance plan name, interval unit, day of the month, day of the week, exact time, early start days, delayed start days, maintenance task mode, usage status, and so on. Creating a maintenance work order 412 is automatically generated by the production system and defines individual maintenance work order information. This information may include, for example, the maintenance work order name, maintenance plan name, equipment name, scheduled start time, start time, end time, maintenance results, and so on. The executing maintenance plan 420 stage includes starting maintenance 421, offline maintenance 422, completing maintenance 423, and updating usage time and duration 424. For the current maintenance work order, once the scheduled start time arrives, you can click Start Maintenance Work Order to execute the Start Maintenance 421 process for the fixture. After completing the maintenance process 423, the maintenance results are entered and the usage time and duration are updated 424, and then the current maintenance work order is completed. After completing the current maintenance work order, a new maintenance work order for the next time is generated according to the maintenance plan.

[0117] 5A to 5D are schematic diagrams of triggering rules for triggering a maintenance plan at different interval units according to an embodiment of the present disclosure.

[0118] As shown in Figure 5A, the triggering rules for triggering a maintenance plan are set in hourly intervals. These hourly triggering rules can define the following information: the interval (i.e., how many hours the trigger should occur, for example, every three hours); the precise time of the first trigger, for example, 8:00 AM; the hours at which a maintenance order can start earlier or later; and the execution mode for the next maintenance order, for example, fixed mode. It should be noted that after the current maintenance order is completed, the system automatically creates the next maintenance order based on the maintenance plan to which the current maintenance order belongs. When the "Next Mode" setting in the maintenance plan is "Fixed Mode," the scheduled start time of the next maintenance order is the scheduled start time of the previously completed maintenance order plus the interval time. When the "Next Mode" setting in the maintenance plan is "Delayed Mode," the scheduled start time of the next maintenance order is the actual start time of the previously completed maintenance order plus the interval time.

[0119] As shown in Figure 5B, a daily-interval trigger rule is set to trigger a maintenance plan. A daily-interval trigger rule can define the following information: the interval (how many days the trigger occurs), the precise time of each trigger, the number of days the maintenance work order can be started early or delayed, and the execution mode of the next maintenance work order. For example, a daily-interval trigger rule might be defined as: trigger every three days, with each trigger time set at 8:00 AM, no early or delayed start days, and a fixed "next mode."

[0120] As shown in Figure 5C, the triggering rules for triggering the maintenance plan are set with weekly intervals. A triggering rule with weekly intervals can define the following information: the interval, i.e., how many weeks the maintenance order should be triggered, the time and minute of each day of the week, and the number of days the maintenance order can be started earlier or later. For example, a triggering rule with weekly intervals can be defined as: triggering once every three weeks, each time at 8:00 AM on Sunday. It should be noted that since this triggering rule defines the day of the week when the maintenance order should be triggered, a conflict will occur if the "next mode" is defined. Therefore, this triggering rule does not support calculating the maintenance order start time based on the actual start time; all calculations are based on the planned start time.

[0121] As shown in Figure 5D, the triggering rules for triggering the maintenance plan are set with monthly intervals. The triggering rules with monthly intervals can define the following information: the interval time, that is, the trigger is triggered every few months, the time at which the trigger is triggered each time, and the number of days in advance and the number of days in advance that the maintenance work order can start. For example, a triggering rule with monthly intervals can be defined as: trigger once every three months, each time at 8:00 on the first day of the month. It should be noted that since this triggering rule defines the day of the month to trigger, a conflict will occur if the "next mode" is defined. Therefore, this triggering rule does not support calculating the start time of the maintenance work order based on the actual start time. All calculations are based on the planned start time.

[0122] According to an embodiment of the present disclosure, fixture maintenance can be implemented using Quartz's Cron expression. Quartz is an open source job scheduling framework written in Java. Cron is a scheduled task, a timed execution tool that can run jobs without human intervention.

[0123] According to the embodiments of the present disclosure, by formulating a maintenance plan for the fixture and performing regular automatic maintenance, it helps to increase the service life of the fixture and avoids the problem of reduced production efficiency and yield due to unclear expected maintenance time of the fixture.

[0124] According to an embodiment of the present disclosure, before a fixture enters the production system, it is necessary to create fixture specification information using a modeling tool. This fixture specification information may include, for example, the fixture specification name, fixture version name, fixture type, fixture supplier, fixture unit, fixture lifespan, and whether it is reusable. After the fixture specification information is edited, the fixture specification freeze can solidify the information, preventing further editing or deletion, thereby preventing the specification information from being tampered with.

[0125] According to an embodiment of the present disclosure, jig specification information can be created by batch importing jig specification information or manually creating it in a modeling tool. Before the jig specification information is frozen, the specification information can be edited based on a specification edit request.

[0126] FIG6 is a flowchart of a method for editing fixture specifications according to an embodiment of the present disclosure.

[0127] As shown in FIG6 , the method for editing fixture specification information according to an embodiment of the present disclosure includes operations S601 to S607 .

[0128] In operation S601 , in response to receiving a specification editing request for a fixture, a specification editing state in the specification information of the fixture is acquired, where the specification editing state includes a frozen state and a modified state.

[0129] According to an embodiment of the present disclosure, the specification editing status may include a frozen state and a modified state. The frozen state indicates whether the specification information is frozen, and the modified state indicates whether the specification information is being modified. Table 3 specifically describes the fixture specification information status according to an embodiment of the present disclosure.

[0130] Table 3 is a fixture specification information status table according to an embodiment of the present disclosure.

[0131] Table 3

[0132] In operation S602, it is determined whether the freezing state is an unfrozen state. If the freezing state indicates that the specification information is not frozen, operation S603 is performed; if the freezing state indicates that the specification information is frozen, operation S605 is performed.

[0133] In operation S603, it is determined whether the modification status is not being modified. If the modification status indicates that the specification information is not being modified, operation S606 is performed; if the modification status indicates that the specification information is being modified, operation S604 is performed.

[0134] In operation S604, it is determined whether the specification editing requester is the current operating user. If it is determined that the specification editing requester is the current operating user, operation S606 is executed; if it is determined that the specification editing requester is not the current operating user, operation S605 is executed.

[0135] In operation S605 , editing of the specification information of the jig is not allowed.

[0136] In operation S606 , the specification information of the jig is allowed to be edited.

[0137] In operation S607 , in response to completion of editing of the specification information, a freeze status is set to indicate that the specification information is frozen.

[0138] According to the embodiments of the present disclosure, the "Frozen Status" and "Modification Status" fields are used to manage the editing status of specification information. When the modification status is "In Progress," it indicates that a user is actively editing the information. If the editor's account and the current operator's account are inconsistent, the current information cannot be edited. This prevents multiple users from editing specification information simultaneously, preventing production safety issues caused by tampering with already published specification information.

[0139] According to an embodiment of the present disclosure, after the specification information is frozen, the specification information of the fixture can be released through an activation operation, so that operators can create and use the fixture of the specification in the production system.

[0140] FIG7 is a flowchart of a method for activating a fixture specification according to an embodiment of the present disclosure.

[0141] As shown in FIG. 7 , the method for activating a jig specification according to an embodiment of the present disclosure includes operations S710 to S760 .

[0142] In operation S710 , a user may create fixture specification information in a modeling tool by batch importing or manually.

[0143] In operation S720 , the created jig specification information is set to a frozen state.

[0144] In operation S730 , in response to a user's activation operation on the fixture specification information, an activation application is acquired.

[0145] In operation S740 , the reviewer signs and approves the activation application through the production operation platform.

[0146] In operation S750 , the activation application is approved.

[0147] In operation S760 , the jig specification information is activated to allow the jig to be applied to the production system.

[0148] According to embodiments of the present disclosure, fixture specification information also includes the specification activation status. This can only be changed through an activation operation when the frozen state is unfrozen. The activation status includes inactive and activated states. Changing from inactive to active requires a sign-off approval. Once approved, the inactive state is switched to active. The activated state allows the creation of fixture batches using the specification information of that version, allowing fixtures to be applied to the build system.

[0149] According to the embodiments of the present disclosure, by introducing a sign-off mechanism, confirmation by designated personnel is required for activation to be successful, ensuring that the specification information released to the production system is approved and the approval information is recorded, making online data more secure and reliable.

[0150] According to an embodiment of the present disclosure, when it is necessary to modify the specification information that has been published, the specification information may be edited using the following different editing methods according to business needs.

[0151] According to an embodiment of the present disclosure, one of the specification editing methods includes: after editing the specification information of the fixture, updating the specification version in the specification information, storing the specification information after the updated specification version as the new version of the specification information, and storing the specification information before the editing as the old version of the specification information; in response to the new version of the specification information being activated, setting the old version of the specification information to inactive. This editing method requires upgrading the original fixture specification information, and the upgraded specification information is consistent with the original specification information except for the version number. At this time, the new version of the specification information can be edited, and after the editing is completed, the new version of the specification information is frozen and then activated. After the new version is activated, the old version is automatically changed to an inactive state. At this time, the new fixture batch created online is created using the new version of the specification information.

[0152] According to an embodiment of the present disclosure, another specification editing method includes: before editing the specification information of the fixture, generating a copy of the specification information, and modifying the specification name in the copy to be different from the specification name in the specification information; wherein the fixture specification information is edited by editing the copy, thereby obtaining new specification information. This editing method creates a new fixture specification information based on the fixture specification information, that is, clones the fixture specification information, and the cloned specification information remains consistent with the original content except for the name. The user can edit, freeze, and activate the cloned specification information, and manage the cloned specification information as a new fixture specification after activation.

[0153] According to an embodiment of the present disclosure, the production system is a production system for semiconductor packaging and testing. The production system can adopt the MES manufacturing execution system. MES is the abbreviation of Manufacturing Execution System. MES is a production information management system for the execution layer of the workshop of a manufacturing enterprise.

[0154] According to the embodiments of the present disclosure, after creating jig specifications, users can use the corresponding jig specification version in the production operation platform to create jig batches, thereby corresponding one-to-one with the physical jigs on site and managing the entire jig lifecycle. The jig lifecycle includes the following key milestones: jig batch creation, jig batch loading, jig batch removal, jig loading, jig removal, jig scrapping and de-scrapping, jig detention and release, and jig cleaning.

[0155] Fixture batches can be created manually on the production operation platform or through an interface with the ERP system (Enterprise Resource Planning) to obtain data from the ERP system. When manually creating a fixture batch on the production operation platform, the activated fixture specification information will be displayed on the production operation platform. This fixture specification information includes the supplier, fixture unit, fixture batch quantity, warehouse, shelf, and storage location. When the fixture batch is created, a fixture batch number is generated, the fixture batch receipt time is recorded, and the fixture status is switched to the waiting state, the detained status is initialized to the non-detained state, and the clean status is set to clean.

[0156] Shelving fixture batches: Manually created fixture batches and fixture batches received from the ERP interface are shelved and their specific shelf locations are recorded. Additionally, the shelf location specified when receiving the fixture batch can be modified. After shelving is complete, the shelving time is recorded and the fixture status is switched from waiting to on-shelf.

[0157] When a fixture batch is removed from the shelf, the fixture needs to be removed from the shelf when it is used. During this process, the production system needs to assign a new fixture batch number to the removed fixture. Therefore, the number of fixtures to be removed from the shelf when splitting the batch from the original fixture batch cannot be more than the number of parent batches. After being removed from the shelf, the fixture status is switched from the on-shelf status to the off-shelf status, and the time of removal is recorded. The warehouse, shelves, and storage locations are cleared, and the parent batch quantity is deducted. When the parent batch quantity is 0, the parent batch status switches to Empty. If the fixtures in this batch are fixtures that have not used up their service life and have been returned to the line warehouse, a new fixture number will not be generated. The previous fixture number will be used and there is no need to enter the number of fixtures to be removed from the shelf.

[0158] The fixture is put on the machine. For fixtures whose status is off-shelf, whose retention status is non-retention, and whose clean status is clean, they can be bound to the equipment for the processing and production of subsequent products. After the fixture is successfully put on the machine, the fixture status will be switched to the on-machine status, and the on-machine time will be recorded. Before the product to be processed enters the process site, it is necessary to verify whether the required fixture is on the equipment according to the equipment BOM (Bill of Material), verify whether the clean status of the fixture is clean, verify whether the retention status of the fixture is non-retention, and verify whether the remaining number of uses or the remaining usage time of the fixture is sufficient. If the above verification results do not meet the preset requirements, it will not be able to enter the process site to prevent production accidents or the problem of replacing the fixture midway. Among them, the method of verifying the remaining number of uses or the remaining usage time of the fixture and determining the total number of uses based on the product are as described above.

[0159] Fixture removal: Fixtures already on the equipment that have insufficient remaining life or are not in a clean state need to be removed from the machine. Removed fixtures can be scrapped or cleaned and reused. After a fixture is successfully removed from the machine, its status switches from On to Off, and the time it was removed is recorded.

[0160] Fixture Scrap & Cancel Scrap: For fixtures whose remaining service life is insufficient for continued use, the Scrap function records the fixture status as scrapped and records the scrapping time and reason. It should be noted that only fixtures with a Detained status can be scrapped to prevent misuse. Additionally, the Cancel Scrap function can be used to switch a scrapped fixture from scrapped to removed from storage.

[0161] Fixture detention and fixture release allow fixtures with problems, such as damage, to be detained. Fixtures can only be detained if they are off the shelf or on the machine. Detained fixtures cannot be used on the machine, and detained fixtures cannot be used on the machine to process products, preventing production accidents. After the detention operation is completed, the fixture is switched to the detained state, and the detention time, reason, and detention personnel information are recorded for subsequent verification. Furthermore, the detention action can specify the department or section that can release the detention.

[0162] Fixture cleaning can be used to clean only reusable fixtures. Cleaning can be performed manually at irregular intervals through the production operation platform, or you can set a fixture maintenance plan and clean it regularly according to the maintenance plan.

[0163] According to the embodiments of the present disclosure, by managing the entire life cycle of the fixture, it is helpful to manage the fixture stably and effectively, avoiding production quality and production safety problems caused by tampering with specification information and insufficient remaining life of the fixture.

[0164] FIG8 is a diagram illustrating an architecture of a modeling tool for fixture modeling according to an embodiment of the present disclosure.

[0165] According to an embodiment of the present disclosure, fixture modeling is performed within a modeling tool. As shown in Figure 8, the modeling tool includes fixture modeling, version management, freeze activation, and edit rights control. Fixture modeling is used to model fixture specifications and match fixture lifespans. Furthermore, after fixture specification data is maintained within the modeling tool, it is sent to a database via the TCP / IP protocol for persistent storage. The database can store fixture information, fixture specification information, and fixture operation history. The database may be, for example, but not limited to, an Oracle database.

[0166] FIG9 is an architectural diagram of a user operation platform according to an embodiment of the present disclosure.

[0167] According to the embodiments of the present disclosure, the full lifecycle management of fixtures, such as fixture lifespan management and fixture regular maintenance management, is implemented on the user operation platform. As shown in Figure 9, the user operation platform includes a client interface, a server, and a database. The client interface is used for fixture batch creation, fixture information review, fixture batch loading and unloading, fixture loading and unloading, etc. The client interface is developed based on WinForms and the Infragistics framework. The server includes a unified query service (QRY service), a unified scheduling service (CNM service), and OIC (Operator Interface Client) and EAP (Equipment Automation Programming) processing services (CNX services). Specifically, the unified query service distributes client and other system interface messages first through the CNM service, and client query-type messages are uniformly distributed to the QRY service for processing. The unified scheduling service distributes client and other system interface messages first through the CNM service to the corresponding service for processing. In addition to message distribution load balancing, it also performs exception message processing and interception, message data statistics, and other gateway-like functions. The OIC and EAP processing services primarily perform lot-related operations on client and EAP messages. The system also has many services, such as TIMESrv for processing scheduled tasks and ERPSrv for processing ERP (Enterprise Resource Planning) system messages, which are all distributed uniformly by CNM.

[0168] The server is developed based on the Spring Boot and Spring MVC frameworks, and the business execution process uses BPEL. BPEL is an XML-based programming language used to describe business processes. Production information input and query operations performed by users on the client are sent to the backend server via the TIBCO Rendezvous middleware. After the backend server performs relevant logical processing, the results are persisted in an Oracle database. The above control method can be applied to a production system, such as the Manufacturing Execution System (ziSEMI MES). The MES is a system for managing the entire manufacturing process of semiconductor packaging and testing factories. It optimizes the management of the entire production process by tracking the real-time status of production orders, from product completion to equipment resources, from execution to completion. When real-time events occur in the factory, the MES can respond and report promptly, guiding and handling them with current and accurate data. By implementing information sharing and process automation within the factory, production efficiency and yield are maximized, thereby reducing production costs and improving production management. The MES system adopts a modular design to meet the production needs of different packaging and testing process technologies, thereby achieving the maximum input-output ratio and achieving the high flexibility and personalized production model required by Industry 4.0.

[0169] FIG10 is a diagram of a business functional architecture of a production system according to an embodiment of the present disclosure.

[0170] As shown in Figure 10, the production system 1000 according to an embodiment of the present disclosure includes a basic data module 1001, a process flow management module 1002, a production plan module 1003, a work-in-process management module 1004, a batch management module 1005, an engineering management module 1006, a process menu management module 1007, an equipment management module 1008, a machine limit management module 1009, a carrier management module 1010, a material management module 1011, a fixture management module 1012, and a packaging management module 1013.

[0171] The Basic Data Module 1001 provides basic system data modeling for the MES system, including plant modeling, equipment modeling, system status modeling, package modeling, user permission modeling, recipe basic data modeling, material basic data modeling, process step flow modeling, strategy modeling, data collection basic data modeling, and alarm basic data modeling. The Basic Data Module 1001 serves as a unified basic data model platform. As a standard framework, it provides essential common functionality required by customers and offers a range of customizable extensions, such as unified naming conventions, unified data enumeration types, and unified business management, facilitating the rapid development of applications. Furthermore, the Basic Data Module 1001 standardizes object definitions across multiple applications, supporting multiple languages ​​and units. With many elements customizable, the system becomes more flexible and scalable. Specifically, the plant modeling supports the maintenance of plant basic data, multi-plant models, and the creation of factory zones. The equipment modeling supports the creation of equipment master data and the maintenance of equipment port data. The system status modeling supports the maintenance of batch status, equipment status, material status, carrier status, and fixture status. Package modeling is used to maintain package-related attribute data and centrally manage different package types. User permission modeling supports the creation and maintenance of users, user groups, and user roles, as well as password verification for user menus and user interface interfaces. Recipe basic data modeling supports the creation and maintenance of process menu data and the maintenance of recipe-equipment data relationships. Material basic data modeling supports the creation and maintenance of material basic data. Process step flow modeling supports the creation and maintenance of basic data for steps, processes, sections, and procedures, as well as visual interface editing of procedures, the creation and maintenance of branch processes, and the creation and maintenance of rework processes. Strategy modeling supports product-level, process-level, and step-level flow modeling. Based on different policy configurations, the system selects different equipment and recipes for business operations during actual production. Data collection basic data modeling supports the creation and maintenance of data collection details and the maintenance of data collection rules. Alarm basic data modeling supports the maintenance of alarm system information, the management and maintenance of alarm trigger conditions, and the management and maintenance of subsequent actions triggered by alarms.

[0172] The process management module 1002 is a new set of process management specifications provided by the MES system. The process management module 1002 allows users to define products and their corresponding process flows, including each step type and related process control strategies.

[0173] In terms of version control, the MES system provides a comprehensive version control mechanism. All active in-progress processes within the MES system must strictly adhere to this version control system to prevent production accidents caused by errors in production process data. Regarding process definition, the process flow management module 1002 supports multiple path selection and, during on-site operations, automatically selects a path based on pre-set conditions. The process flow management module 1002 also supports the control of various product process rules, enabling different process controls based on different product and process conditions. Conditions can be broken down into various levels, such as work step, process, process, product, and batch.

[0174] Process step flow modeling supports the creation and maintenance of basic data of work steps, processes, sections, and flows, supports visual interface editing of flows, supports the creation and maintenance of branch flows, and supports the creation and maintenance of rework flows.

[0175] Product process configuration can configure different process flows according to different products. Different recipes and equipment can be selected according to different strategies for the same product and process.

[0176] The production planning management module 1003 manages the production plan orders and production work orders of the MES system. Users can create new production plan orders in the MES system and then create new work orders based on the plan orders. Users can also set the priority of corresponding plan orders and work orders in the MES system, as well as set related information such as the planned time for the corresponding plan orders and work orders, to facilitate tracking of order completion during the production and manufacturing process. Planned orders can create and maintain planned orders for different factories, and can control priority and final delivery time. Work orders can create different work orders based on different plan orders, and can specify special attributes on the work orders such as priority, owner, and process notes.

[0177] The product management module 1004 is used for product processing management, guiding operators to process products according to pre-set process requirements, and tracking and recording processing information in detail. Among them, the most important operation management function of the product management module 1004 is to allow multiple batches to be processed simultaneously and provide historical traceability of batches. In addition to the commonly used batch creation, entry and exit, other functions of the product management module 1004 include: batching, batch combination, pause, release, skipping, future actions, rework within the station, rework outside the station, batch scrapping, batch cancellation and scrapping, batch-specified carriers, special business batch exit, batch exit, multi-core bonding entry, integrated editing and testing entry and exit, etc.

[0178] The main functions of the batch management module 1005 include batch division, batch merging, batch scrapping, batch cancellation and scrapping, designated carriers, batch suspension, batch cancellation and suspension, etc.

[0179] The engineering management module 1006 manages engineering-related businesses within the MES system. The functions of this module include work permit management, QTime management, BOM management, process card management, and batch reservation. Among them, work permit management provides users with information to configure work permit related information and set the expiration time. It is used to control whether the system user has the corresponding authority when operating the OIC (Operator Interface Client) system. QTime management is used to set QTime rules and perform rule control when the batch passes the station. BOM management supports BOM maintenance and is used to control the material verification of equipment materials. Process card management supports the creation and maintenance of process cards within the system. Production can generate corresponding process card information based on different process cards for production circulation paper vouchers. Batch reservation supports batch reservation production function.

[0180] The process menu management module 1007 contains process menu information for all process flows and can create and update process menus. The setup and use of process menus are version-controlled, including functions such as creation, activation, freezing, and cancellation. The process menu management module 1007 supports the configuration of both logical and actual process menus, such as processing parameters. It can also automatically select process menus based on process conditions and previous-layer measurement results. The process menu management module 1007 also supports the maintenance of relationships between equipment and process menus.

[0181] The Equipment Management Module 1008 defines basic equipment information, provides the creation and tracking management of equipment status models, and supports equipment permission management, equipment inspection, maintenance, repair reporting, and repair process management. Equipment Basic Data Maintenance is used to maintain basic equipment data. Equipment Inspection supports the maintenance of equipment inspection items and supports regular equipment inspection control. Equipment Maintenance supports the setting of equipment maintenance and maintenance cycles and controls equipment maintenance. Equipment Repair Reporting supports equipment repair reporting. Equipment Repair supports tracking of equipment repair processes. The Equipment Ledger supports querying equipment-related archival data.

[0182] The machine limit management module 1009 provides the control function of the MES machine limit. The machine limit management module 1009 supports setting limit conditions in different scenarios to control whether the batch can support production.

[0183] According to the equipment settings: You can set the rules for a certain scenario according to the specific situation of the equipment. When a batch encounters this rule during production, it cannot be produced through the machine limit.

[0184] According to product settings: You can set rules for a certain scenario based on the specific situation of the product. When a batch encounters this rule during production, it cannot be produced through this machine limit.

[0185] Set according to the process flow: You can set the rules for the dish scene according to the specific circumstances of the process flow. When a batch encounters this rule during production, it cannot be produced through this machine limit.

[0186] Positive and negative item settings: You can set positive rules, for example, production is allowed only under this rule; negative rules, production is not allowed under this condition.

[0187] The vehicle management module 1010 supports the management of vehicle-related services, including vehicle creation, vehicle cleaning, vehicle binding, vehicle unbinding, vehicle pausing, and vehicle release. The vehicle management module 1010 also supports vehicle lifespan management, vehicle usage count management, and vehicle type management. Vehicle creation is used to create vehicle data. Vehicle cleaning is used to clean new vehicles and used vehicles. Vehicle binding supports binding vehicle data to batches. Vehicle unbinding supports unbinding vehicle data from batches. Vehicle pausing controls pauses a vehicle. Vehicle release resumes a paused vehicle.

[0188] The Materials Management Module 1011 manages raw materials, semi-finished products, and product data, as well as warehouse, storage, and shelf management. This module can be used independently or as an extension of the Warehouse Management Module within ERP, implementing interface functions or providing independent management and control. The Materials Management Module 1011 supports common warehouse management functions: material maintenance, material receipt, material loading and unloading, finished product warehousing, finished product shipment, returns, and transfers.

[0189] The fixture management module 1012 supports fixture management, including fixture creation, fixture cleaning, fixture loading, fixture unloading, fixture pause, fixture release, fixture storage, fixture removal, fixture transfer, fixture scrapping, fixture cancellation, and fixture withdrawal. The fixture management module 1012 also supports fixture lifespan management and usage count management, as well as fixture type management. Fixture creation is used to create fixture data. Fixture cleaning supports fixture cleaning operations. Fixture loading supports binding fixtures to equipment. Fixture unloading supports unbinding fixtures from equipment. Fixture pause supports pausing fixtures. Fixture release supports releasing fixtures. Fixture loading supports loading fixtures. Fixture removal supports removing fixtures from equipment. Fixture transfer supports changing fixture warehouses. Fixture scrapping supports fixture scrapping. Fixture cancellation supports restoring scrapped fixtures. The fixture return line and side warehouse support the fixture return line and side warehouse operation.

[0190] The packaging management module 1013 supports the management of packaging-related operations, including packaging warehousing, packaging outbound, box code generation and printing, packaging unpacking, packaging scrapping, and packaging cancellation and scrapping. Packaging warehousing is used for warehousing operations after batch packaging. Packaging outbound is used for shipping operations after batch packaging. Box code generation and printing supports box code generation and printing. Packaging unpacking is used to separate and pack already packaged batches. Packaging scrapping is used to scrap already packaged batches. Packaging cancellation and scrapping supports the restoration of scrapped packaging batches.

[0191] FIG11 is a system technical architecture diagram of a production system according to an embodiment of the present disclosure.

[0192] The technical architecture of the production system according to the embodiments of the present disclosure is based on a Client-Server (C / S) architecture. The server is responsible for data management, while the client is responsible for user interaction. The client module is divided into two parts: one for basic data modeling, named FactoryModeler (Modeler), and the other for the user interface, named Operator Interface Client (OIC).

[0193] As shown in Figure 11, the technical architecture of the production system according to an embodiment of the present disclosure includes a presentation layer, an access layer, an application layer, a CICD (continuous integration / continuous deployment) layer, and a resource layer. The presentation layer is based on WinForms and the Infragistics ziOIC development framework, developed in C#. The access layer's message middleware uses Tibco Rendezvous / RabbitMQ. The application layer includes communication, data, technical components, and languages / frameworks. Communication serialization uses XML / JSON, and protocols use REST API, TRDP / RVCM (Tibrv), and AMQP (RabbitMQ). Data connections use HikariCP / DBCP2, mapping uses Mybatis / ziORM, logging uses Log4j2, and relational uses Oracle / Gauss. Technical components use Tibrv / RabbitMQ for message queuing, and ziFlow Designer & Engine for business processes. The language / framework uses Spring Boot 2 for development, Java 8 for development, and Spring Scheduler / Quartz for timers. The CICD layer includes compilation, packaging, and release, monitoring, and application containers. Maven / Jenkins is used for compilation, packaging, and release; Zabbix is ​​used for monitoring; and the built-in Tomcat is used for application containers. The resource layer includes compute, storage, and operating systems. Compute uses physical machines or cloud virtual machines (VMs) such as RDS; storage uses physical disks or cloud VM storage; and the operating system uses HPUX, Linux, or Windows.

[0194] 12A and 12B are application architecture diagrams of a production system according to an embodiment of the present disclosure.

[0195] As shown in Figures 12A and 12B, the CS architecture is used for the application architecture of the production system according to the embodiment of the present disclosure. The OIC client engineering page is developed in C#, primarily implementing operations on user interaction page data and displaying query page data. The main business interface code is located in the mes-be-oic\MES.Module\Views file, and common components are located in the mes-be-oic\MES.Common file. The server-side engineering encapsulates the unified development framework ziFrame, which includes ORM, ESB (TibcoRV), BPEL Engine, Exception mechanism, log logging, internationalization, Common-Utils, transactions, JDBC pool, Message (XML parsing), etc., and supports XML message format for message communication with the front-end. Due to the characteristics of the semiconductor industry's production process, the server-side mes-core layer implements core business logic processing, and the mes-solution layer provides business entry and customer customization function implementation. The core layer function code modules on the server side are: zisemi-mes-be-boot (main system framework, SpringBoot), zisemi-mes-be-query (all query modules for directly obtaining data in the OIC system, unified request XML format on the front end, unified data response XML format on the back end, the only difference: different businesses have different request data), zisemi-mes-be-policy (module code for production strategy in the basic data configuration module of the system), zisemi-mes-be-schedule (timer function in the system), and the solution code module on the server side is: zisemi-mes-code (OIC business core code area, so All businesses need to enter this module for business processing), zisemi-mes-data (all data models in the OIC system, javabean objects), zisemi-mes-be-solution (the entry point of the OIC business code, so the XML requested by the front end is classified and processed according to the TibcoRV message middleware mechanism, and then corresponds to different sub-files under the module code, and enters the entry point of the corresponding business code in the back end), the mes-framework code modules are: zidm-dependencies (java project file corresponding to the dependency package configuration), zidm-flow (corresponding to the process flow module code in the basic data module of the system), zidm-frame, zidm-parent.

[0196] FIG13 is a block diagram of an electronic device suitable for implementing a control method for a production system according to an embodiment of the present disclosure.

[0197] As shown in Figure 13, the electronic device 1300 according to an embodiment of the present disclosure includes a processor 1301, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1302 or a program loaded from a storage part 1308 into a random access memory (RAM) 1303. The processor 1301 may include, for example, a general-purpose microprocessor (e.g., a CPU), an instruction set processor and / or a related chipset and / or a dedicated microprocessor (e.g., an application-specific integrated circuit (ASIC)), etc. The processor 1301 may also include an onboard memory for caching purposes. The processor 1301 may include a single processing unit or multiple processing units for performing different actions of the method flow according to an embodiment of the present disclosure.

[0198] RAM 1303 stores various programs and data required for the operation of electronic device 1300. Processor 1301, ROM 1302, and RAM 1303 are interconnected via bus 1304. Processor 1301 executes the various operations of the method flow according to the embodiments of the present disclosure by executing the programs in ROM 1302 and / or RAM 1303. It should be noted that the programs may also be stored in one or more memories other than ROM 1302 and RAM 1303. Processor 1301 may also execute the various operations of the method flow according to the embodiments of the present disclosure by executing the programs stored in one or more memories.

[0199] According to an embodiment of the present disclosure, electronic device 1300 may further include an input / output (I / O) interface 1305, which is also connected to bus 1304. Electronic device 1300 may further include one or more of the following components connected to I / O interface 1305: an input portion 1306 including a keyboard, mouse, etc.; an output portion 1307 including devices such as a cathode ray tube (CRT), liquid crystal display (LCD), and speakers; a storage portion 1308 including a hard disk; and a communication portion 1309 including a network interface card such as a LAN card or modem. Communication portion 1309 performs communication processing via a network such as the Internet. A drive 1310 is also connected to I / O interface 1305 as needed. Removable media 1311, such as a magnetic disk, optical disk, magneto-optical disk, semiconductor memory, etc., is installed in drive 1310 as needed, so that computer programs read from the removable media can be installed into storage portion 1308 as needed.

[0200] The present disclosure also provides a non-transitory computer-readable storage medium, which may be included in the device / apparatus / system described in the above embodiments, or may exist independently and not be incorporated into the device / apparatus / system. The computer-readable storage medium carries one or more programs, and when executed, implements the method according to the embodiments of the present disclosure.

[0201] According to an embodiment of the present disclosure, a computer-readable storage medium may be a non-volatile computer-readable storage medium, such as, but not limited to, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination thereof. In the present disclosure, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, apparatus, or device. For example, according to an embodiment of the present disclosure, a computer-readable storage medium may include the ROM 1302 and / or RAM 1303 described above and / or one or more memories other than ROM 1302 and RAM 1303.

[0202] Embodiments of the present disclosure also include a computer program product comprising a computer program containing program code for executing the method shown in the flowchart. When the computer program product is executed in a computer system, the program code is used to cause the computer system to implement the method for verifying process data of a product provided by the embodiments of the present disclosure.

[0203] The computer program executes the above functions defined in the system / device of the embodiment of the present disclosure when the computer program is executed by the processor 1301. According to the embodiment of the present disclosure, the system, device, module, unit, etc. described above can be implemented by a computer program module.

[0204] In one embodiment, the computer program may be stored on a tangible storage medium such as an optical storage device or a magnetic storage device. In another embodiment, the computer program may be transmitted and distributed in the form of a signal over a network medium, downloaded and installed via the communication portion 1309, and / or installed from removable media 1311. The program code contained in the computer program may be transmitted using any appropriate network medium, including but not limited to wireless, wired, or any suitable combination thereof.

[0205] In such an embodiment, the computer program can be downloaded and installed from a network via the communication section 1309 and / or installed from the removable medium 1311. When the computer program is executed by the processor 1301, the above-described functions defined in the system of the embodiment of the present disclosure are performed. According to the embodiment of the present disclosure, the systems, devices, means, modules, units, etc. described above can be implemented by computer program modules.

[0206] According to an embodiment of the present disclosure, the program code for executing the computer program provided by the embodiment of the present disclosure can be written in any combination of one or more programming languages. Specifically, these computer programs can be implemented using high-level procedural and / or object-oriented programming languages, and / or assembly / machine languages. Programming languages ​​include, but are not limited to, languages ​​such as Java, C++, python, "C" or similar programming languages. The program code can be executed entirely on the user computing device, partially on the user device, partially on a remote computing device, or entirely on a remote computing device or server. In cases involving a remote computing device, the remote computing device can be connected to the user computing device through any type of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computing device (for example, using an Internet service provider to connect via the Internet).

[0207] The flowcharts and block diagrams in the accompanying drawings illustrate the possible implementation architecture, functions and operations of the systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each box in the flowchart or block diagram can represent a module, program segment, or a part of code, and the above-mentioned module, program segment, or a part of code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in an order different from that marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram or flowchart, and the combination of boxes in the block diagram or flowchart, can be implemented with a dedicated hardware-based system that performs the specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0208] Those skilled in the art will appreciate that the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways, even if such combinations and / or couplings are not explicitly described in this disclosure. In particular, the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways without departing from the spirit and teachings of this disclosure. All such combinations and / or couplings are intended to fall within the scope of this disclosure.

[0209] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be used in combination to advantage. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A method for controlling a production system, the production system comprising a plurality of process stations and a jig for sequentially using the plurality of process stations, the method comprising: Before the jig enters a current process station, determining the remaining service life of the jig according to usage information of the jig, wherein the usage information of the jig is generated according to usage behavior of the jig at each previous process station; If the remaining service life of the jig is greater than the estimated life consumption of the jig by the current process station, the jig is allowed to enter the current process station; According to the usage behavior of the fixture at the current process site, the usage information of the fixture is updated.

2. The method according to claim 1, wherein: If the remaining service life of the tool is greater than the estimated service life consumption of the tool by the current process site, allowing the tool to enter the current process site includes: If the remaining number of uses of the tool is greater than the estimated number of uses of the tool by the current process site, and / or the remaining usage time of the tool is greater than the estimated usage time of the tool by the current process site, the tool is allowed to enter the current process site.

3. The method according to claim 2, wherein the fixture has first status information, and the first status information is used to indicate that the fixture is in a detained state or a non-detained state, and the method further comprises: If the remaining number of uses of the tool is less than or equal to the estimated number of uses of the tool by the current process site, the first status information is set to a detained state, and the tool is denied entry into the current process site.

4. The method according to claim 2, wherein the fixture has second state information, and the second state information is used to indicate that the fixture is in a cleaning state or a non-cleaning state, and the method further comprises: If the remaining usage time of the tool is less than or equal to the estimated usage time of the tool by the current process station, the second state information is set to a non-cleaning state, and the tool is denied entry into the current process station.

5. The method according to claim 2, wherein the fixture has first status information and second status information, the first status information is used to indicate that the fixture is in a detained state or a non-detained state, and the second status information is used to indicate that the fixture is in a cleaning state or a non-cleaning state, and the method further comprises: Determining whether the first state information of the fixture is a non-detained state and the second state information is a clean state; If the first state information of the tool is a non-detained state and the second state information is a clean state, it is determined whether the remaining service life of the tool is greater than the estimated life consumption of the tool by the current process station.

6. The method according to any one of claims 2 to 5, further comprising: Determine the current process site based on the number of products in the product batch or the type of product batch to be produced. The estimated number of times the site will use the fixture; and / or According to the time when a predetermined number of product batches enter and leave the current process station in a historical period, the estimated use time of the tool at the current process station is determined.

7. The method according to any one of claims 2 to 6, wherein: The usage information includes the number of times the fixture has been used and the total number of times it has been used, and determining the remaining service life of the fixture according to the usage information of the fixture includes: subtracting the number of times it has been used from the total number of times it has been used to obtain the remaining number of times it has been used; and / or The usage information includes the usage time and the total usage time of the fixture, and determining the remaining service life of the fixture according to the usage information of the fixture includes: subtracting the usage time from the total usage time to obtain the remaining usage time; Wherein, updating the usage information of the fixture according to the usage behavior of the fixture at the current process site includes: Obtain the actual number of times the fixture is used at the current process site; Updating the number of times the tool has been used according to the actual number of times the tool has been used at the current process site; The used time is updated according to the actual use time of the tool at the current process site.

8. The method according to any one of claims 1 to 7, further comprising: A plurality of maintenance tasks are generated according to a preset maintenance plan, wherein in response to completion of a current maintenance task, a next maintenance task is generated according to a maintenance cycle set in the maintenance plan.

9. The method according to claim 8, further comprising: Before the fixture enters the current process station, determining whether the current maintenance task is completed; If the current maintenance task is not completed, the fixture is denied access to the current process station.

10. The method according to claim 8 or 9, further comprising: In response to the completion of the current maintenance task, the number of times the tool has been used and / or the length of time it has been used in the usage information of the tool are cleared.

11. The method according to any one of claims 1 to 10, further comprising: Before the jig enters the production system, generating specification information of the jig, the specification information including the specification name, specification version and specification editing status of the jig; In response to receiving a specification editing request for the jig, determining whether to allow editing of the specification information of the jig according to a specification editing state in the specification information of the jig.

12. The method according to claim 11, wherein: The specification editing state includes a frozen state and a modified state, wherein the frozen state is used to indicate whether the specification information is frozen, and the modified state is used to indicate whether the specification information is being modified. The determining whether to allow editing of the specification information according to the specification editing state in the specification information of the fixture includes: If the freezing state indicates that the specification information is not frozen and the modifying state indicates that the specification information is not being modified, editing of the specification information is allowed.

13. The method according to claim 12, further comprising: In response to completing the editing of the specification information, setting the freeze state to indicate that the specification information is frozen; The specification information further includes a specification activation state, and the specification activation state is used to indicate whether the specification information is activated. The method further includes: After the freeze state is set to indicate that the specification information is frozen, in response to an activation operation by a user, the specification activation state is set to indicate that the specification information is activated to allow the jig to be applied to the production system.

14. The method according to any one of claims 11 to 13, further comprising: After editing the specification information of the fixture, updating the specification version in the specification information, storing the specification information after the updated specification version as the new version of specification information, and storing the specification information before the editing as the old version of specification information; In response to the new version of the specification information being activated, the old version of the specification information is set to be inactivated.

15. The method according to any one of claims 11 to 13, further comprising: Before editing the specification information of the fixture, generating a copy of the specification information, and modifying the specification name in the copy to be different from the specification name in the specification information; The editing of the specification information of the fixture is achieved by editing the copy, thereby obtaining new specification information.

16. The method according to any one of claims 11 to 15, wherein: The specification information further includes first restriction information and second restriction information, wherein the first restriction information is used to indicate whether to limit the number of times the fixture is used, and the second restriction information is used to indicate whether to limit the duration of use of the fixture, and the method further includes: In response to the first restriction information indicating that the number of times the tool is to be used is to be limited, determining whether the remaining number of times the tool is to be used is greater than the expected number of times the tool is to be used by the current process site; In response to the second restriction information indicating that the use time of the tool is to be limited, it is determined whether the remaining use time of the tool is greater than the estimated use time of the tool by the current process site.

17. The method according to any one of claims 11 to 16, wherein: The specification information further includes at least one of the type of fixture, the measurement unit of the fixture, and the supplier of the fixture; The method further comprises: storing the usage information and specification information of the fixture in a database permanently. middle. Wherein, the production system is a production system for semiconductor packaging and testing.

18. An electronic device comprising a memory and a processor, wherein the memory stores instructions executable by the processor, and when the instructions are executed by the processor, the processor executes the method according to any one of claims 1 to 17.

19. A non-transitory computer-readable storage medium storing computer instructions, wherein: The computer instructions are used to cause the computer to execute the method according to any one of claims 1 to 17.

20. A computer program product comprising a computer program which, when executed by a processor, implements the method according to any one of claims 1 to 17.

Citation Information

Cited By

  • Digital workshop multi-device cooperative control method and system based on Internet of Things

    CN120065962A