A large vacuum experimental system with a partitioned structure

Abstract

The present invention discloses a large-scale vacuum experiment system adopting a partitioned structure, comprising a test chamber, a vacuum chamber, and a plug-in valve; the test chamber is used to place test samples, and a connection port is provided on one side of the test chamber; the vacuum chamber is provided with a connection port for connecting to the connection port of the test chamber; the vacuum chamber is connected to a vacuum pump, which can evacuate the interior of the test chamber connected to the vacuum chamber to provide a vacuum test environment for the test samples; the plug-in valve is provided at the connection port between the test chamber and the vacuum chamber, and when the plug-in valve is closed, the test chamber and the vacuum chamber are divided into independent sealed spaces; when the plug-in valve is opened, the test chamber and the vacuum chamber can form a unified sealed space. The large-scale vacuum experiment system provided by the present invention adopts a partitioned structure, and the vacuum pump group operates in an independent space to avoid affecting the test space, thereby improving the stability and reliability of the experiment.

Description

Technical Field

[0001] The present invention relates to the field of vacuum technology, in particular to a large vacuum experiment system with a partitioned structure. Background Art

[0002] In vacuum technology research, it is necessary to simulate a vacuum environment on the ground to conduct vacuum environment experiments on related research topics.

[0003] For small vacuum systems, vacuum pumps are installed directly on the test chamber, and plug valves are installed one-to-one with the vacuum pumps. On the one hand, this is to minimize the time and frequency of the vacuum pumps being exposed to the atmospheric environment. On the other hand, the vacuum pumps cannot start working in the atmospheric environment and must reach a startable vacuum pressure before they can start working.

[0004] However, for large-scale vacuum systems, a large number of vacuum pumps are used, with dozens or even hundreds of them. If they are directly installed on the test chamber, the spatial layout of the entire pump group will be very chaotic. If a gate valve is installed in front of each vacuum pump, a large number of gate valves will be required. On the one hand, the number of communication interfaces for controlling the operation of the gate valves will increase. On the other hand, because the overall size of the gate valve is much larger than the diameter of the vacuum pump, this will also increase the difficulty of arranging the vacuum pump on the vacuum chamber. It may even be necessary to increase the size of the chamber to accommodate the installation of the gate valve, which greatly increases the construction cost of the vacuum system. In addition, the installation of the gate valve increases the flow resistance, thereby reducing the ability of the air flow to circulate within the vacuum system. Summary of the Invention

[0005] The purpose of the present invention is to provide a large vacuum experiment system with a partitioned structure, which is divided into a test chamber and a vacuum chamber, and uses a single large-diameter plug-in valve to achieve the connection and closure between the test chamber and the vacuum chamber, so as to solve the technical problems existing in the prior art.

[0006] In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

[0007] A large vacuum experiment system with a partitioned structure, comprising:

[0008] A test chamber for placing test samples, one side of the test chamber is provided with a door for taking or replacing the test samples, and the other side of the test chamber is provided with a connection port; a vacuum chamber, one side of which is provided with a connection port for connecting to the connection port of the test chamber; a vacuum pump is provided inside the vacuum chamber, which can evacuate the interior of the vacuum chamber; it can also evacuate the interior of the test chamber connected to the vacuum chamber to provide a vacuum test environment for the test samples; a plug-in valve is arranged between the test chamber and the vacuum chamber, and is respectively connected to the connection ports of the test chamber and the vacuum chamber, when the plug-in valve is closed, the test chamber and the vacuum chamber are divided into independent sealed spaces; when the plug-in valve is opened, the test chamber and the vacuum chamber can form a unified sealed space; wherein, the connection port of the test chamber and the connection port of the vacuum chamber are respectively provided in one group, and the plug-in valve is provided in one group.

[0009] Furthermore, a test platform is provided in the vacuum chamber, and the test platform is used to place test samples, and the test platform can overcome the airflow fluctuation caused by the opening and closing of the plug valve.

[0010] Furthermore, the test platform includes a storage table, a support column, a support platform and an air vibration isolator;

[0011] In which, the support column is vertically arranged between the storage table and the support platform, and there are four groups of support columns, which are respectively arranged at the corners of the storage table and the support platform, and there are four groups of air vibration isolators, which are respectively located at the four corners of the support platform; the storage table is located inside the test cabin, and the support platform is located outside the test cabin, the bottom of the air vibration isolator is fixed to the foundation, and the test cabin is provided with a connecting bellows at the position where the support column passes through, and the support column passes through the connecting bellows to ensure the sealing between the support column and the test cabin.

[0012] Furthermore, the vacuum pump group includes multiple groups of molecular pumps and multiple groups of cryogenic pumps, and the molecular pumps and the cryogenic pumps are evenly distributed on the outer wall of the vacuum chamber.

[0013] Furthermore, the plug-in valve includes a valve body, a valve plate and a driving mechanism; wherein: the valve body is a sealed cabin body, and interface flanges are provided on both sides of the valve body, which are respectively connected to the connecting port of the test cabin and the connecting port of the vacuum cabin; the valve plate is located inside the valve body and can move inside the valve body; and the valve plate can cover the connecting port of the test cabin and the connecting port of the vacuum cabin; the movable end of the driving mechanism is located inside the valve body and is connected to the valve plate, for driving the valve plate to move inside the valve body to realize the connection and closure between the connecting port of the test cabin and the connecting port of the vacuum cabin; and when the valve plate closes the connection port between the connecting port of the test cabin and the connecting port of the vacuum cabin, the valve plate can seal the interface flange on one side, or seal the interface flanges on both sides at the same time.

[0014] Furthermore, the plug valve also includes a movable frame; the valve plate is arranged on the movable frame, and the movable end of the driving mechanism is connected to the movable frame, which is used to drive the movable frame and the valve plate to move inside the valve body; and the movable frame can apply an extrusion force to the valve plate after the valve plate reaches the closed position, so that the valve plate and the inner side of the side wall of the valve body close to the valve plate are fitted together, and the valve body is provided with a sealing ring at the fitting position so that the valve plate can seal the interface flange on that side.

[0015] Furthermore, the valve plate includes a valve plate main body and a valve plate sub-body, the valve plate main body is used to fit with the valve body, and the valve sub-body is used to connect with the movable frame; the two ends of the side edges of the movable frame along its own moving direction are respectively connected to the valve plate sub-body through connecting rods, and the two ends of the connecting rod are respectively hinged to the movable frame and the valve plate sub-body; so that the movable frame can continue to move forward after the valve plate reaches the closed position. During the movement, the distance between the movable frame and the valve plate sub-body is expanded under the action of the connecting rod, so that the movable frame applies pressure to the valve plate main body.

[0016] Furthermore, a stop block is provided inside the valve body and is capable of contacting the edge of the valve plate when the valve plate reaches the closed position. The edge is located at the front end of the valve plate with reference to the moving direction of the valve plate; the valve plate is provided with a buffer block at the position of the edge corresponding to the stop block.

[0017] Furthermore, the edge of the valve plate sub-body is provided with a first roller that can roll along its own moving direction, and the first roller is in contact with the inner wall of the valve body; the rolling plane of the first roller is perpendicular to the valve plate main body; the inner wall of the valve body is provided with a positioning groove for limiting the first roller when the valve plate reaches the closed position.

[0018] Furthermore, a second roller capable of rolling along its own moving direction is provided on the side of the movable frame, and the second roller contacts the inner wall of the valve body; and a rolling plane of the second roller is parallel to a rolling plane of the first roller.

[0019] Furthermore, a third roller capable of rolling along its own moving direction is provided on the edge of the movable frame, and the third roller contacts the inner wall of the valve body; and the rolling plane of the third roller is perpendicular to the rolling plane of the first roller.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The large-scale vacuum experiment system with a partitioned structure provided by the present invention adopts a partitioned structure. The internal design of the system is two independent spaces, the test chamber and the vacuum chamber, which are separated by a large-diameter plug-in valve; the vacuum pump group operates in an independent space to avoid affecting the test space, thereby improving the stability and reliability of the experiment.

[0022] At the same time, when operating the test chamber, the sealing of the vacuum chamber can be maintained, the stability of its vacuum environment can be maintained, and the impact on the vacuum state of the vacuum chamber can be minimized, so as to reduce the waiting time of the vacuum environment of the test chamber, shorten the experimental preparation time, and improve the experimental efficiency.

[0023] Furthermore, an air-floating test platform is provided in the test chamber, and the entire test platform is reduced in vibration by air isolators at the bottom to overcome the vibration caused by changes in the external environment, so that the environment inside the test chamber meets the test requirements and ensures the accuracy of the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other implementation drawings based on the provided drawings without inventive effort.

[0025] Figure 1 This is a structural diagram of a large vacuum experimental system;

[0026] Figure 2 This is a schematic diagram of the test platform results in the test chamber;

[0027] Figure 3 Schematic diagram of the test platform results

[0028] Figure 4 Schematic diagram of the structure of the gate valve;

[0029] Figure 5 Schematic diagram of the internal structure of the gate valve;

[0030] Figure 6 It is a structural diagram of the gate valve when the valve plate inside is in the moving state;

[0031] Figure 7 It is a structural diagram of the gate valve when the valve plate inside is moving.

[0032] The numbers in the figure represent the following:

[0033] 1-test chamber, 2-vacuum chamber, 3-gate valve, 4-test platform, 5-vacuum pump group;

[0034] 11- hatch, 12- connection port;

[0035] 31-valve body, 32-valve plate, 33-driving mechanism, 34-moving frame;

[0036] 311 - interface flange, 312 - stop block, 313 - positioning groove; 321 - valve plate body, 322 - valve plate auxiliary body, 323 - buffer block, 324 - first roller; 341 - connecting rod, 342 - second roller, 343 - third roller;

[0037] 41 - storage table, 42 - support column, 43 - support platform, 44 - air vibration isolator, 45 - connecting bellows; 51 - molecular pump, 52 - cryogenic pump. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] like Figure 1 As shown, the present invention provides an implementation of a large vacuum experiment system with a partitioned structure, including a test chamber 1, a vacuum chamber 2 and a plug-in valve 3.

[0040] The test chamber 1 is used to place test samples. A door 11 is provided on one side of the test chamber 1 for taking or replacing test samples. A connection port 12 is provided on the test chamber 1 for connecting to an external vacuum pumping device to provide a vacuum experimental environment for the test chamber.

[0041] The vacuum chamber 2 is provided with a connection port 12 for connecting to the connection port 12 of the test chamber 1; the interior of the vacuum chamber 2 is connected to a vacuum pump group 5 composed of multiple vacuum pumps, which can evacuate the interior of the vacuum chamber 2; it can also evacuate the interior of the test chamber 1 connected to the vacuum chamber 2 to provide a vacuum test environment for the test sample.

[0042] In the prior art, the vacuum pump group 5 includes a fore-stage pump, a molecular pump, a cryogenic pump, and other types of pump bodies. Among them, the molecular pump and the cryogenic pump cannot be started directly in an atmospheric environment due to design principle limitations, and must reach a certain vacuum pressure level in advance before they can be started; this feature requires that specific measures must be taken in actual applications to ensure that the pump group can work safely and effectively in a suitable vacuum environment.

[0043] In this embodiment, by connecting the vacuum pump group 5 to the vacuum chamber 2 and combining effective vacuum isolation and regulation strategies, the molecular pump and the cryopump are smoothly started and efficiently operated under preset vacuum conditions.

[0044] Specifically, the vacuum pump group 5 includes multiple groups of molecular pumps 51 and multiple groups of cryogenic pumps 52. The molecular pumps 51 and cryogenic pumps 52 are evenly distributed on the outer wall of the vacuum chamber 2 to enhance the molecular pumps 51 and cryogenic pumps 52 to quickly and uniformly evacuate the vacuum chamber 2 and the test chamber 1.

[0045] The gate valve 3 is provided between the test chamber 1 and the vacuum chamber 2 and is connected to the connection ports 12 of the test chamber 1 and the vacuum chamber 2 respectively.

[0046] When the gate valve 3 is closed, the test chamber 1 and the vacuum chamber 2 are divided into independent sealed spaces; when the gate valve 3 is opened, the test chamber 1 and the vacuum chamber 2 can form a unified sealed space.

[0047] Furthermore, the shapes and specific positional relationships of the test chamber 1 , the vacuum chamber 2 and the gate valve 3 are not specifically limited. As long as they conform to the above connection relationships, they can be combined into a vacuum test system.

[0048] In order to ensure the best test effect and spatial layout, in this embodiment, it is preferred that the test chamber 1 and the vacuum chamber 2 are horizontally placed cylindrical chambers, both of which are arranged along the same straight line, and the gate valve 3 is arranged between them.

[0049] If there are multiple connecting channels between the test chamber 1 and the vacuum chamber 2, there will be a large flow resistance in the vacuum chamber 2, and the pressure gradient at the connecting channel will be obvious, causing the pressure in the test chamber 1 to be significantly higher than the pressure in the vacuum chamber 2, significantly reducing the vacuum pump group 5's vacuuming efficiency in and out of the test chamber 1.

[0050] Therefore, in this embodiment, a group of connection ports 12 of the test chamber 1 and a group of connection ports 12 of the vacuum chamber 2 are respectively provided, and a group of gate valves 3 are provided; only one group of connecting channels is established between the test chamber and the vacuum chamber, and the gate valves are used to control the connection and closing of the connecting channels.

[0051] In this embodiment, the connection port 12 of the test chamber 1 and the connection port 12 of the vacuum chamber 2 are large-diameter through holes, so that the gate valve 3 provided therebetween is a large-diameter gate valve 3 .

[0052] Specifically, in this embodiment, the conductance calculation method of free molecular flow is used to meet the design requirements of the vacuum system with a certain margin. The formula of the conductance of the free molecular flow circular hole is as follows:

[0053]

[0054] Where C or,mol is the conductance of the circular hole, d is the diameter of the circular hole, k is the Boltzmann constant, T is the gas temperature, and m is the gas molar mass. For air at 300K, the conductance is 5×10 5 l / s is the optimal value.

[0055] Therefore, in this embodiment, for the sake of economy and performance requirements, the opening diameters of the connecting port 12 of the test chamber 1 and the connecting port 12 of the vacuum chamber 2 are 2500mm, the cylinder diameter of the vacuum chamber is 3200mm, and the cylinder diameter of the test chamber is 2500mm; the gate valve 3 has a large diameter of 2500mm, which meets the high requirements for the size of the air flow channel under large vacuum systems or special working conditions, and effectively improves the processing capacity and application range of the system.

[0056] The operating steps of the vacuum experiment system are as follows:

[0057] Prepare the test chamber: Close the gate valve 3 to completely isolate the test chamber 1 from the vacuum chamber 2.

[0058] Initial vacuuming: Start the foreline pump to perform initial vacuum extraction on the vacuum chamber 2 until the vacuum degree in the chamber reaches the preset pressure value at which the molecular pump and cryogenic pump can be started.

[0059] Start the molecular pump and cryogenic pump: After the primary pump completes the initial extraction, start the molecular pump and cryogenic pump to further reduce the air pressure in the vacuum chamber 2 to the required vacuum level.

[0060] Connecting the test chamber 1: When the vacuum degree in the vacuum chamber 2 reaches the pressure required for the test, open the gate valve 3, connect the test chamber 1 with the vacuum chamber 2, and carry out subsequent experimental operations.

[0061] End of the test: Close the gate valve 3, the vacuum chamber 2 continues to maintain the vacuum, and the test chamber 1 is vented to atmospheric pressure to replace the experimental sample.

[0062] The entire vacuum experiment system is internally designed as two independent areas: the test chamber 1 and the vacuum chamber 2, which are separated by a plug valve 3. This design minimizes the impact on the vacuum state of the vacuum chamber 2 when operating the test chamber 1, thereby maintaining the stability of its vacuum environment.

[0063] The use of large-diameter gate valves 3 overcomes many problems caused by the large number of gate valves 3 in large-scale vacuum systems; and when the large gate valves 3 are closed, the vacuum chamber 2 can maintain its vacuum state, while the test chamber can be flexibly opened and closed, which is convenient for rapid replacement of experimental samples.

[0064] For the next experiment, thanks to the vacuum environment already maintained in vacuum chamber 2, there is no need to start the time-consuming vacuum extraction process from the beginning at standard atmospheric pressure, which reduces the waiting time for the vacuum environment in test chamber 1, thereby significantly shortening the preparation time for the experiment and improving experimental efficiency.

[0065] like Figure 2 and Figure 3 As shown, in this embodiment, a test platform 4 is provided in the vacuum chamber 2, and the test platform 4 is used to place the test sample. In this embodiment, the external vibration mainly comes from two aspects:

[0066] On the one hand, the opening of the large-diameter plug valve will cause a large pressure difference between the test chamber and the vacuum chamber, which will cause air flow fluctuations. The air flow fluctuations will cause large vibrations to the entire test platform in a short time.

[0067] On the other hand, the vacuum pump will generate high-frequency vibrations when working. Since the test chamber and the vacuum chamber are connected together, it will cause continuous high-frequency, small-amplitude vibrations to the test chamber and the test platform, which will greatly affect the overall test results.

[0068] Therefore, in this embodiment, the test platform 4 is provided with a vibration reduction component to overcome the influence of external vibration on the test platform 4 .

[0069] This embodiment provides an example of a test platform with a vibration reduction assembly, as shown in the figure:

[0070] The test platform includes a storage platform 41 , a support column 42 and a support platform 43 , and the vibration reduction component is an air vibration isolator 44 .

[0071] Among them, the support column 42 is vertically arranged between the storage table 41 and the support platform 43. There are four groups of support columns 42, which are respectively arranged at the corners of the storage table 41 and the support platform 43. There are four groups of air vibration isolators 44, which are respectively located at the four corners of the support platform 43.

[0072] The storage table 41 is located inside the test cabin, the support platform 43 is located outside the test cabin 1, the bottom of the air isolator 44 is fixed to the foundation, and the test cabin 1 is provided with a connecting bellows 45 at the position where the support column 42 passes through. The support column 42 passes through the connecting bellows 45. The support column 42 can slide relative to the connecting bellows 45, and the inner wall of the connecting bellows 45 can exert a restraining force on the outer wall of the support seat 42 to ensure the sealing between the support column 42 and the connecting bellows 45; the sealing between the connecting bellows 45 and the test cabin 1 is ensured by a sealing ring arranged on the outer wall of the connecting bellows 45.

[0073] Among them, the storage table 41 can be provided with multiple groups in parallel according to the test needs, such as Figure 2 and Figure 3 As shown, in this embodiment, two sets of storage platforms 41 are provided in parallel.

[0074] In this embodiment, the air vibration isolator is a high-damping version of the Gimbal Piston™ air vibration isolator manufactured by TMC.

[0075] Air isolators are primarily used to isolate vibrations from test platforms. They can effectively absorb and attenuate vibrations transmitted from the environment (such as the ground, mechanical equipment, wind, etc.). For some equipment that is very sensitive to vibration and precision operations, air isolators can significantly improve equipment stability and measurement accuracy.

[0076] This allows the air-floating test platform itself to effectively isolate external vibrations and environmental interference, keeping objects or workpieces on the platform free from external influences. This is particularly critical in precision measurements, optical experiments, and other occasions, as it can ensure the accuracy and consistency of the results, help further optimize experimental conditions, and improve the repeatability and verifiability of experimental results.

[0077] In this embodiment, the vacuum experiment system further includes a pressure stabilizing system. The gate valve 3 and the vacuum pressure stabilizing system work in coordination to achieve precise control of the environment of the test chamber 1 .

[0078] When the gate valve 3 is opened, the pressure stabilizing system responds quickly and adjusts the working state of the vacuum pump group 5 to maintain the pressure in the test chamber 1 stable; when the gate valve 3 is closed, the pressure stabilizing system continues to monitor and adjust the environmental parameters to ensure that the test chamber 1 can maintain a relatively stable state during the deflation process and ensure that it fluctuates within the set range.

[0079] The coordinated operation of the gate valve 3 and the pressure stabilization system effectively reduces the interference of external factors on the test chamber 1. For example, the vibration and noise of the vacuum pump group 5, gas flow, heat and other factors are effectively isolated or controlled, thereby improving the accuracy and reliability of the experiment.

[0080] In this embodiment, an embodiment of the gate valve 3 is also provided, such as Figure 4 and Figure 5 As shown:

[0081] The gate valve 3 includes a valve body 31 , a valve plate 32 and a driving mechanism 33 .

[0082] Among them, the valve body 31 is a sealed cabin body, and interface flanges 311 are provided on both sides of the valve body 31, which are respectively connected to the connection port 12 of the test cabin 1 and the connection port 12 of the vacuum cabin 2; the interface flange 311 is provided with a sealing ring to ensure the sealing between the interface flange 311 and the connection port 12.

[0083] The valve plate 32 is located inside the valve body 31 and can move inside the valve body 31; and the valve plate 32 can cover the connection port 12 of the test chamber 1 and the connection port 12 of the vacuum chamber 2 to separate the test chamber 1 and the vacuum chamber 2; for spatial layout considerations, the movement direction of the valve plate 32 is along the vertical direction.

[0084] The movable end of the driving mechanism 33 is located inside the valve body 31 and is connected to the valve plate 32. It is used to drive the valve plate 32 to move inside the valve body 31 to achieve communication and closure between the connection port 12 of the test chamber 1 and the connection port 12 of the vacuum chamber 2; and when the valve plate 32 closes the connection port 12 of the test chamber 1 and the connection port 12 of the vacuum chamber 2, the valve plate 32 can seal the interface flange 311 on one side, or seal the interface flanges 311 on both sides at the same time.

[0085] In this embodiment, the driving mechanism 33 is preferably an electric telescopic rod, which adopts an efficient and reliable electric drive method, which not only simplifies the operating process and improves the level of automation, but also ensures rapid response and precise control of valve opening and closing, further improving the overall operating efficiency and stability of the system.

[0086] In order to achieve the valve plate 32 can seal the flange interface, this embodiment provides the following examples, such as Figure 5 As shown:

[0087] The gate valve 3 also includes a movable frame 34; the valve plate 32 is arranged on the movable frame 34, and the movable end of the driving mechanism 33 is connected to the movable frame 34, which is used to drive the movable frame 34 and the valve plate 32 to move inside the valve body 31; and the movable frame 34 can apply an extrusion force to the valve plate 32 after the valve plate 32 reaches the closed position, so that the valve plate 32 and the inner side of the side wall of the valve body 31 close to the valve plate 32 are in contact with each other, and the valve body 31 is provided with a sealing ring at the contact position so that the valve plate 32 can seal the interface flange 311 on that side.

[0088] Furthermore, the valve plate 32 includes a valve plate main body 321 and a valve plate sub-body 322. The valve plate main body 321 is used to fit with the valve body 31, and the valve sub-body is used to connect with the movable frame 34; the movable frame 34 is connected to the valve plate 32 sub-body 322 at both ends of the side edges along its own moving direction through connecting rods 341, and the two ends of the connecting rod 341 are respectively hinged to the movable frame 34 and the valve plate 32 sub-body 322.

[0089] like Figure 6 and Figure 7 As shown, the movable frame 34 can continue to move forward after the valve plate 32 reaches the closed position. During the movement, the distance between the movable frame 34 and the valve plate 32 sub-body 322 is expanded under the action of the connecting rod 341, so that the movable frame 34 applies pressure to the valve plate main body 321 and presses the valve plate 32 to achieve sealing at the contact surface between the valve plate 32 and the valve body 31.

[0090] Therefore, the valve plate 32 in this embodiment is driven and sealed by mechanical means, while other plug-in valves 3 on the market use springs to press the valve plate 32 to achieve sealing, and their reliability and lifespan are far less than the plug-in valve 3 provided by the present invention.

[0091] Furthermore, in this embodiment, a stop block 312 is provided inside the valve body 31, which can contact the edge of the valve plate 32 when the valve plate 32 reaches the closed position. The edge is located at the front end of the valve plate 32 with reference to the moving direction of the valve plate 32; the valve plate 32 is provided with a buffer block 323 at the position of the edge corresponding to the stop block 312; to prevent the valve plate 32 from colliding with the bottom of the valve body 31 after reaching the sealing position.

[0092] Preferably, a buffer block 323 is provided on the edge of the valve plate body 321 corresponding to the stop block 312 , and the buffer block 323 is made of rubber.

[0093] Since the present embodiment adopts a large-diameter gate valve 3, in order to ensure the stability of the movement of the valve plate 32 in the valve body 31, the following embodiments are also provided:

[0094] A first roller 324 that can roll along its own moving direction is provided on the edge of the auxiliary body 322 of the valve plate 32 . The first roller 324 contacts the inner wall of the valve body 31 , and the rolling plane of the first roller 324 is perpendicular to the valve plate main body 321 .

[0095] A second roller 342 that can roll along its own moving direction is provided on the side of the movable frame 34 . The second roller 342 contacts the inner wall of the valve body 31 . The rolling plane of the second roller 342 is parallel to the rolling plane of the first roller 324 .

[0096] A third roller 343 capable of rolling along its own moving direction is provided on the edge of the movable frame 34 . The third roller 343 contacts the inner wall of the valve body 31 . The rolling plane of the third roller 343 is perpendicular to the rolling plane of the first roller 324 .

[0097] The first roller 324 , the second roller 342 and the third roller 343 not only facilitate the movement of the valve plate 32 in the valve body 31 , but also restrict the valve plate 32 to prevent the valve plate 32 from being displaced in other directions during the up and down movement.

[0098] Furthermore, the inner wall of the valve body 31 is provided with a positioning groove 313 for restricting the first roller 324 when the valve plate 32 reaches the closed position. The pressure exerted on the valve plate body 321 by the movable frame 34 is combined with the first roller 324 to be fixed in the positioning groove 313, thereby fixing the valve plate body 321 and preventing the valve plate body 321 from moving, thereby ensuring the sealing.

[0099] The large vacuum experiment system provided by the present invention uses a large-caliber plug-in valve to effectively isolate the vacuum pump group 5 of the high-altitude cabin from the air flotation platform of the test cabin 1.

[0100] This layout design solves the problem of vibration generated by the operation of the vacuum pump group 5 in the traditional layout interfering with the measurement accuracy of the test chamber 1; through the separate arrangement, the direct impact of the pump group vibration on the test environment is effectively isolated; and it provides a stable experimental environment for our high-precision micro-force measurement.

[0101] Separating the vacuum pump group 5 from the test chamber 1 by the large-diameter plug-in valve 3 also improves the overall operating stability of the equipment; the vacuum pump group 5 operates in an independent space, reducing the mutual influence between it and the test chamber 1, which is beneficial to the stable operation and life extension of the pump group itself; at the same time, this layout also facilitates the maintenance and overhaul of the pump group, improving the maintainability and reliability of the equipment.

[0102] For micro-force measurements on the air flotation platform of the test chamber 1, the vacuum pump group 5 is placed separately from the test chamber 1 through the large-diameter plug-in valve 3, which can better control the cleanliness, temperature, humidity and other parameters of the experimental environment, and reduce the impact of factors such as heat generated by the operation of the pump group and gas flow on the test chamber 1; this improvement in environmental control capabilities helps to further optimize experimental conditions and improve the repeatability and verifiability of experimental results.

[0103] The above embodiments are merely exemplary embodiments of the present application and are not intended to limit the scope of the present application. The scope of protection of the present application is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present application within the essence and scope of protection of the present application, and such modifications or equivalent substitutions shall also be deemed to fall within the scope of protection of the present application.

Claims

1. A large vacuum experiment system with a partitioned structure, characterized in that: include: A test chamber (1) is used to place test samples, and a chamber door (11) is provided on one side of the test chamber (1) for taking in or replacing the test samples; the test chamber (1) is also provided with a connection port (12), and the connection port (12) of the test chamber (1) is used to connect to an external vacuum pumping device; A vacuum chamber (2) is provided with a connection port (12) for connecting to the connection port (12) of the test chamber (1); the interior of the vacuum chamber (2) is connected to a vacuum pump group (5) composed of a plurality of vacuum pumps, so that the vacuum pump group (5) can evacuate the interior of the vacuum chamber (2); and can also evacuate the interior of the test chamber (1) connected to the vacuum chamber (2) to provide a vacuum test environment for the test sample; The plug valve (3) is arranged between the test chamber (1) and the vacuum chamber (2), and is respectively connected to the connection ports (12) of the test chamber (1) and the vacuum chamber (2); when the plug valve (3) is closed, the test chamber (1) and the vacuum chamber (2) are divided into independent sealed spaces; when the plug valve (3) is opened, the test chamber (1) and the vacuum chamber (2) can form a unified sealed space; wherein the connection port (12) of the test chamber (1) and the connection port (12) of the vacuum chamber (2) are respectively provided in a group, and the plug valve (3) is provided in a group; The plug valve (3) comprises a valve body (31), a valve plate (32) and a driving mechanism (33); wherein: the valve body (31) is a sealed cabin body, and interface flanges (311) are provided on both sides of the valve body (31), which are respectively connected to the connection port (12) of the test cabin (1) and the connection port (12) of the vacuum cabin (2); the valve plate (32) is located inside the valve body (31) and can move inside the valve body (31); and the valve plate (32) can cover the connection port (12) of the test cabin (1) and the connection port (12) of the vacuum cabin (2); the driving mechanism (33) The movable end is located inside the valve body (31) and is connected to the valve plate (32), and is used to drive the valve plate (32) to move inside the valve body (31) to achieve communication and closure between the connection port (12) of the test chamber (1) and the connection port (12) of the vacuum chamber (2); and when the valve plate (32) closes the connection port (12) of the test chamber (1) and the connection port (12) of the vacuum chamber (2), the valve plate (32) can seal the interface flange (311) on one side, or seal the interface flanges (311) on both sides at the same time; The gate valve (3) further includes a movable frame (34); the valve plate (32) is arranged on the movable frame (34); the movable end of the driving mechanism (33) is connected to the movable frame (34) and is used to drive the movable frame (34) and the valve plate (32) to move inside the valve body (31); The movable frame (34) can continue to move forward after the valve plate (32) reaches the closed position, exerting an extrusion force on the valve plate (32), so that the valve plate (32) and the inner side of the side wall of the valve body (31) close to the valve plate (32) are in contact with each other, and the valve body (31) is provided with a sealing ring at the contact position, so that the valve plate (32) can seal the interface flange (311) on this side; The valve plate (32) includes a valve plate main body (321) and a valve plate sub-body (322), wherein the valve plate main body (321) is used to fit with the valve body (31), and the valve plate sub-body (322) is used to connect with the movable frame (34); the movable frame (34) is connected to the valve plate sub-body (322) at both ends of the side edges along its own moving direction through connecting rods (341), and the two ends of the connecting rod (341) are hinged to the movable frame (34) and the valve plate sub-body (322), respectively; so that the movable frame (34) can continue to move forward after the valve plate (32) reaches the closed position, and during the movement, the distance between the movable frame (34) and the valve plate sub-body (322) is expanded under the action of the connecting rod (341), so that the movable frame (34) applies pressure to the valve plate main body (321); A stop block (312) is provided inside the valve body (31) and is capable of contacting the edge of the valve plate (32) when the valve plate (32) reaches the closed position. The edge is located at the front end of the valve plate (32) with reference to the moving direction of the valve plate (32); a buffer block (323) is provided on the edge of the valve plate (32) at a position corresponding to the stop block (312).

2. The large vacuum experiment system with a partitioned structure according to claim 1 is characterized in that: A test platform (4) is provided in the vacuum chamber (2), the test platform (4) is used to place a test sample, and the test platform (4) is provided with a vibration reduction component to overcome vibrations caused by changes in the external environment on the test platform (4).

3. The large vacuum experiment system with a partitioned structure according to claim 2 is characterized in that: The test platform comprises a storage platform (41), a support column (42) and a support platform (43), and the vibration reduction component is an air vibration isolator (44); The support columns (42) are vertically arranged between the storage table (41) and the support platform (43), and four groups of the support columns (42) are respectively arranged at the corners of the storage table (41) and the support platform (43); and four groups of the air vibration isolators (44) are respectively located at the four corners of the support platform (43); The storage platform (41) is located inside the test chamber, the support platform (43) is located outside the test chamber, the bottom of the air vibration isolator (44) is fixed to the foundation, and the test chamber is provided with a connecting bellows (45) at the position where the support column (42) passes through. The support column (42) passes through the connecting bellows (45) to ensure the sealing between the support column (42) and the test chamber (1).

4. The large vacuum experiment system with a partitioned structure according to claim 1 or 3, characterized in that: The vacuum pump group (5) comprises multiple groups of molecular pumps (51) and multiple groups of cryogenic pumps (52), and the molecular pumps (51) and the cryogenic pumps (52) are evenly distributed on the outer wall of the vacuum chamber (2).

5. The large vacuum experiment system with a partitioned structure according to claim 4 is characterized in that: A first roller (324) capable of rolling along its own moving direction is provided on an edge of the valve plate auxiliary body (322), and the first roller (324) is in contact with the inner wall of the valve body (31); The rolling plane of the first roller (324) is perpendicular to the valve plate body (321); The inner wall of the valve body (31) is provided with a positioning groove (313) for limiting the first roller (324) when the valve plate (32) reaches the closed position.

6. The large vacuum experiment system with a partitioned structure according to claim 5 is characterized in that: The side of the movable frame (34) is provided with a second roller (342) capable of rolling along its own moving direction, and the second roller (342) is in contact with the inner wall of the valve body (31); the rolling plane of the second roller (342) is parallel to the rolling plane of the first roller (324); The edge of the movable frame (34) is provided with a third roller (343) capable of rolling along its own moving direction, and the third roller (343) is in contact with the inner wall of the valve body (31); the rolling plane of the third roller (343) is perpendicular to the rolling plane of the first roller (324).

Images