Quartz glass crucible visual detection system and detection method based on binocular vision

Abstract

The invention discloses a quartz glass crucible visual detection system and detection method based on binocular vision, and belongs to the field of bubble visual detection of quartz glass crucibles. The visual inspection system for the quartz glass crucible comprises a first line laser, a second line laser and a binocular camera which are arranged on a connecting bracket. During visual detection, the first line laser, the second line laser and the binocular camera all point to the transparent layer of the crucible to be detected. The device has the beneficial effects that the first line laser and the second line laser can form the outer surface first line light spot and the outer surface second line light spot on the outer surface of the transparent layer of the crucible to be detected; and the inner surface first linear light spot and the inner surface second linear light spot are formed on the inner surface of the transparent layer of the crucible to be detected, and a reference surface is defined for the transparent layer of the crucible to be detected, so that the bubble depth, the thickness and the like of the transparent layer of the crucible to be detected can be calculated.

Description

Technical Field

[0001] The invention relates to a visual detection of bubbles in a quartz glass crucible, in particular to a visual detection system and a detection method for a quartz glass crucible based on binocular vision. Background Art

[0002] As a loading container for silicon materials, quartz glass crucible is an important auxiliary part in the production of single crystal silicon rods and has a large number of applications in photovoltaic and semiconductor single crystal silicon industries. The cross section of quartz glass crucible usually has a double-layer structure: the inner layer is colorless, called the transparent layer, characterized by transparency, less bubble content, spherical bubbles and uniform distribution; the outer layer is white, called the opaque layer, characterized by opacity and containing a large number of bubbles.

[0003] Chinese invention patent application CN104730087A "Device for observing bubbles in the transparent layer of a quartz glass crucible" (publication date: June 24, 2015) includes: a zoom lens is above the quartz glass crucible, and the transparent layer inside the quartz glass crucible is visually detected by the zoom lens, which can accurately measure the number and size of bubbles in the transparent layer of the quartz glass crucible. The disadvantage is that the depth of the bubbles cannot be measured. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the visual inspection device in the prior art cannot measure the depth of the bubble in the quartz glass crucible, and to provide a quartz glass crucible visual inspection system and inspection method based on binocular vision.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a technical solution: a quartz glass crucible visual inspection system based on binocular vision, comprising: a first line laser, a second line laser and a binocular camera installed on a connecting bracket. During visual inspection, the first line laser, the second line laser and the binocular camera are all pointed to the transparent layer of the crucible to be inspected, and the first line laser and the second line laser are configured as follows: the first line laser forms a first line light spot on the outer surface and a first line light spot on the inner surface of the transparent layer of the crucible to be inspected, respectively, and the second line laser forms a second line light spot on the outer surface and a second line light spot on the inner surface of the transparent layer of the crucible to be inspected, respectively. The binocular camera is configured as follows: the field of view of the binocular camera at least covers the transparent layer of the crucible to be inspected. The beneficial effect is at least that: the first line laser and the second line laser function to form the first line light spot on the outer surface and the second line light spot on the outer surface of the transparent layer of the crucible to be inspected, and to form the first line light spot on the inner surface and the second line light spot on the inner surface of the transparent layer of the crucible to be inspected. Then, the first line light spot on the outer surface and the second line light spot on the outer surface can determine the outer surface fitting surface of the transparent layer of the crucible to be inspected, and the first line light spot on the inner surface and the second line light spot on the inner surface can determine the inner surface fitting surface of the transparent layer of the crucible to be inspected, so as to define a reference surface for the transparent layer of the crucible to be inspected, and to help calculate the bubble depth and transparent layer thickness of the transparent layer of the crucible to be inspected.

[0006] As a preferred solution of the quartz glass crucible visual inspection system, it also includes: a camera light source installed on the connecting bracket, and the camera light source is used to illuminate the crucible to be inspected. The camera light source is a ring light source. The beneficial effect is at least that the camera light source is used to illuminate the crucible to be inspected, so that the binocular camera can obtain better imaging effect.

[0007] As a preferred solution of the quartz glass crucible visual inspection system, the first line laser and the second line laser are arranged in an inward-facing eight-shaped pattern, one in front of the other; the two camera units of the binocular camera are arranged in an inward-facing eight-shaped pattern, one on the left and one on the right. The beneficial effect is at least that the overall layout is reasonable.

[0008] As a preferred solution of the quartz glass crucible visual inspection system, both the first line laser and the second line laser are straight-line lasers.

[0009] As a preferred solution of the quartz glass crucible visual inspection system, the connecting bracket is fixed on a displacement mechanical arm. The beneficial effect is at least that the relative position of the quartz glass crucible visual inspection system and the crucible to be inspected can be adjusted by the displacement mechanical arm.

[0010] Another technical solution provided by the present invention is a quartz glass crucible visual inspection method based on binocular vision, which is implemented by the quartz glass crucible visual inspection system. The quartz glass crucible visual inspection method comprises: Step S1, forming a first line light spot on the outer surface of the transparent layer of the crucible to be inspected by the first line laser, forming a second line light spot on the outer surface of the transparent layer of the crucible to be inspected by the second line laser, and sampling the first line light spot on the outer surface, the second line light spot on the outer surface and the bubbles in the transparent layer of the crucible to be inspected by the binocular camera; Step S2, determining a transparent layer outer surface fitting surface about the transparent layer outer surface of the crucible to be inspected according to the outer surface first line light spot and the outer surface second line light spot.

[0011] Step S3, determining the depth of the bubbles in the transparent layer of the crucible to be inspected according to the positional relationship between the bubbles in the transparent layer of the crucible to be inspected and the fitting surface of the outer surface of the transparent layer.

[0012] Step S4, determining the number and size of the bubbles in the transparent layer of the crucible to be inspected according to the bubbles in the transparent layer of the crucible to be inspected.

[0013] The beneficial effect is that in addition to the number and size of the bubbles in the transparent layer of the crucible to be inspected, the depth of the bubbles in the transparent layer of the crucible to be inspected can also be determined.

[0014] Another technical solution provided by the present invention is a quartz glass crucible visual inspection method, which is implemented by the quartz glass crucible visual inspection system. The quartz glass crucible visual inspection method comprises: Step S1, the first line laser forms a first line light spot on the outer surface and a first line light spot on the inner surface of the transparent layer of the crucible to be inspected, respectively; the second line laser forms a second line light spot on the outer surface and a second line light spot on the inner surface of the transparent layer of the crucible to be inspected, respectively; the binocular camera samples the first line light spot on the outer surface, the second line light spot on the outer surface, the first line light spot on the inner surface, and the second line light spot on the inner surface.

[0015] Step S2, determining a transparent layer outer surface fitting surface about the outer surface of the transparent layer of the crucible to be inspected according to the first line light spot on the outer surface and the second line light spot on the outer surface, and determining a transparent layer inner surface fitting surface about the inner surface of the transparent layer of the crucible to be inspected according to the first line light spot on the inner surface and the second line light spot on the inner surface.

[0016] Step S3, determining the thickness of the transparent layer of the crucible to be inspected according to the positional relationship between the fitting surface of the outer surface of the transparent layer and the fitting surface of the inner surface of the transparent layer.

[0017] The beneficial effect is that the thickness of the transparent layer of the crucible to be inspected can be determined.

[0018] In addition to the technical problems solved by the present invention, the technical features that constitute the technical solution, and the beneficial effects brought about by the technical features of the technical solution described above, other technical problems that can be solved by the present invention, other technical features included in the technical solution, and the beneficial effects brought about by these technical features will be further described in detail in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is an application diagram of an embodiment of a quartz glass crucible visual inspection system of the present invention.

[0020] Figure 2 It is a structural front view of an embodiment of a quartz glass crucible visual inspection system of the present invention.

[0021] Figure 3 It is a structural side view of an embodiment of a quartz glass crucible visual inspection system of the present invention.

[0022] Figure 4 It is a top view of the structure of an embodiment of a quartz glass crucible visual inspection system of the present invention.

[0023] Figure 5 It is a flow chart of an embodiment of a method for visually inspecting a quartz glass crucible of the present invention.

[0024] Figure 6 It is a point cloud schematic diagram of an embodiment of a method for visually inspecting a quartz glass crucible of the present invention.

[0025] Figure 7 FIG. 4 is a flow chart of another embodiment of the method for visually inspecting a quartz glass crucible of the present invention.

[0026] Figure 8 It is a point cloud schematic diagram of another embodiment of the quartz glass crucible visual inspection method of the present invention. DETAILED DESCRIPTION

[0027] The present invention is further described in detail below by means of specific embodiments in combination with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each embodiment of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0028] See also Figures 1 to 4, the figure shows a quartz glass crucible visual inspection system based on binocular vision. The quartz glass crucible visual inspection system is above the crucible 100 to be inspected. The quartz glass crucible visual inspection system is used to detect the number, size, depth and thickness of bubbles in the transparent layer of the crucible 100 to be inspected.

[0029] In a specific implementation, a displacement mechanical arm 200 is provided beside the crucible to be inspected 100. The displacement mechanical arm 200 is provided with the quartz glass crucible visual inspection system. The connection end of the displacement mechanical arm 200 is fixedly connected to the connection bracket 1. The relative position of the quartz glass crucible visual inspection system and the crucible to be inspected 100 can be adjusted by the displacement mechanical arm 200. For example, the relative height of the quartz glass crucible visual inspection system and the crucible to be inspected 100 can be adjusted.

[0030] The quartz glass crucible visual inspection system includes: a connecting bracket 1, a binocular camera 2, a first line laser 3, a second line laser 4, etc. The connecting bracket 1 is equipped with the binocular camera 2, the first line laser 3 and the second line laser 4. During visual inspection, the binocular camera 2, the first line laser 3 and the second line laser 4 are all pointed to the transparent layer of the crucible 100 to be inspected. The first line laser 3 and the second line laser 4 are configured as follows: the first line laser 3 forms an outer surface first line spot and an inner surface first line spot at the outer surface and inner surface of the transparent layer of the crucible 100 to be inspected, respectively. The second line laser 4 forms an outer surface second line spot and an inner surface second line spot at the outer surface and inner surface of the transparent layer of the crucible 100 to be inspected, respectively. Among them, the outer surface first line spot is not collinear with the outer surface second line spot, and the inner surface first line spot is not collinear with the inner surface second line spot. The binocular camera 2 is configured such that the field of view of the binocular camera 2 at least covers the transparent layer of the crucible 100 to be inspected. Thus, the binocular camera 2 can sample the first line light spot on the outer surface, the second line light spot on the outer surface, the first line light spot on the inner surface, the second line light spot on the inner surface, and the bubbles in the transparent layer of the crucible 100 to be inspected.

[0031] In a specific implementation, the first line laser 3 and the second line laser 4 are arranged in an inner eight shape, one in front and one behind. The two camera units of the binocular camera 2 are arranged in an inner eight shape, one on the left and one on the right.

[0032] In a specific implementation, both the first line laser 3 and the second line laser 4 are straight-line lasers.

[0033] Preferably, the quartz glass crucible visual inspection system further comprises: a camera light source 5. The connecting bracket 1 is provided with the camera light source 5. The camera light source 5 is used to illuminate the crucible 100 to be inspected, so as to allow the binocular camera 2 to obtain a better imaging effect.

[0034] During specific implementation, the camera light source may be a ring light source.

[0035] Preferably, the positions and angles of the first line laser 3, the second line laser 4, the binocular camera 2 and the camera light source are all adjustable.

[0036] In a specific implementation, the first line laser 3 and the second line laser 4 are mounted on the connecting bracket 1 via a laser movable seat supporting rotation. The binocular camera 2 is mounted on the connecting bracket 1 via a camera movable seat supporting lateral displacement and rotation. The camera light source 5 is mounted on the connecting bracket 1 via a light source movable seat supporting up and down displacement.

[0037] Combination Figure 5 , the figure shows a quartz glass crucible visual inspection method. The quartz glass crucible visual inspection method is implemented by the quartz glass crucible visual inspection system. The quartz glass crucible visual inspection method can be used to detect the number, size and depth of bubbles in the transparent layer of the crucible to be inspected 100.

[0038] The quartz glass crucible visual inspection method comprises the following steps and is performed in sequence: Step S1, the first line laser 3 forms a first line spot on the outer surface of the transparent layer of the crucible 100 to be inspected. The second line laser 4 forms a second line spot on the outer surface of the transparent layer of the crucible 100 to be inspected. The binocular camera 2 samples the first line spot on the outer surface, the second line spot on the outer surface, and the bubbles in the transparent layer of the crucible 100 to be inspected.

[0039] Step S2, determining a transparent outer surface fitting surface of the transparent outer surface of the crucible 100 to be inspected according to the first outer surface line spot and the second outer surface line spot: Figure 6 In the point cloud diagram, the point cloud 300 of the first line spot of the outer surface and the point cloud 400 of the second line spot of the outer surface can be seen. The fitting surface 500 of the outer surface of the transparent layer is constructed by the point cloud 300 of the first line spot of the outer surface and the point cloud 400 of the second line spot of the outer surface.

[0040] Step S3, determining the depth of the bubbles in the transparent layer of the crucible 100 to be inspected according to the positional relationship between the bubbles in the transparent layer of the crucible 100 to be inspected and the fitting surface of the outer surface of the transparent layer: Figure 6In the point cloud diagram, the bubbles 600 in the transparent layer of the crucible 100 to be inspected can be seen. The depth of the bubbles in the transparent layer of the crucible 100 to be inspected is calculated. The depth of the bubbles in the transparent layer of the crucible 100 to be inspected is equal to the distance from the bubbles 600 in the transparent layer of the crucible 100 to be inspected to the fitting surface 500 of the outer surface of the transparent layer.

[0041] Step S4, determining the number and size of the bubbles in the transparent layer of the crucible 100 to be inspected according to the bubbles in the transparent layer of the crucible 100 to be inspected: using an existing algorithm for identification.

[0042] Preferably, in order to detect bubbles in the transparent layer of the crucible 100 to be inspected at various positions of the crucible 100 to be inspected, the positions and / or angles of the first line laser 3, the second line laser 4 and the binocular camera 2 can be adjusted to traverse the bottom wall position, side wall position, chamfer position and other positions of the crucible 100 to be inspected.

[0043] Combination Figure 7 , another quartz glass crucible visual inspection method is shown in the figure. The quartz glass crucible visual inspection method is also implemented by the quartz glass crucible visual inspection system. The quartz glass crucible visual inspection method can be used to detect the thickness of the transparent layer of the crucible 100 to be inspected.

[0044] The quartz glass crucible visual inspection method comprises the following steps and is performed in sequence: Step S1, the first line laser 3 forms a first line spot on the outer surface and a first line spot on the inner surface of the transparent layer of the crucible to be inspected 100, respectively. The second line laser 4 forms a second line spot on the outer surface and a second line spot on the inner surface, respectively, at the outer surface and the inner surface of the transparent layer of the crucible to be inspected 100. The binocular camera 2 samples the first line spot on the outer surface, the second line spot on the outer surface, the first line spot on the inner surface, and the second line spot on the inner surface.

[0045] Step S2, determining the outer surface fitting surface of the transparent layer of the transparent layer of the inspected crucible 100 according to the first line light spot on the outer surface and the second line light spot on the outer surface. Determining the inner surface fitting surface of the transparent layer of the inspected crucible 100 according to the first line light spot on the inner surface and the second line light spot on the inner surface: Figure 8In the point cloud schematic diagram, it can be seen that the point cloud 300 of the first line spot of the outer surface, the point cloud 400 of the second line spot of the outer surface, the point cloud 700 of the first line spot of the inner surface, and the point cloud 800 of the second line spot of the inner surface. The outer surface fitting surface 500 of the transparent layer is constructed by the point cloud 300 of the first line spot of the outer surface and the point cloud 400 of the second line spot of the outer surface. The outer surface fitting surface 900 of the transparent layer is constructed by the point cloud 700 of the first line spot of the inner surface and the point cloud 800 of the second line spot of the inner surface.

[0046] Step S3, determining the thickness of the transparent layer of the crucible 100 to be inspected according to the positional relationship between the fitting surface of the outer surface of the transparent layer and the fitting surface of the inner surface of the transparent layer: Figure 8 , calculate the thickness of the transparent layer of the crucible 100 to be inspected. The thickness of the transparent layer of the crucible 100 to be inspected is equal to the distance from the fitting surface 500 of the outer surface of the transparent layer to the fitting surface 900 of the inner surface of the transparent layer.

[0047] Preferably, in order to detect the thickness of the transparent layer of the crucible 100 to be inspected at various positions of the crucible 100 to be inspected, the positions and / or angles of the first line laser 3, the second line laser 4 and the binocular camera 2 can be adjusted to traverse the bottom wall position, side wall position, chamfer position and other positions of the crucible 100 to be inspected.

[0048] The above only expresses the implementation mode of the present invention, and its description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. The quartz glass crucible visual inspection system based on binocular vision is characterized by: include: A first-line laser, a second-line laser and a binocular camera are installed on the connecting bracket; During visual inspection, the first line laser, the second line laser and the binocular camera are all pointed to the transparent layer of the crucible to be inspected, and the first line laser and the second line laser are configured as follows: the first line laser forms an outer surface first line light spot and an inner surface first line light spot at the outer surface and inner surface of the transparent layer of the crucible to be inspected, respectively, and the second line laser forms an outer surface second line light spot and an inner surface second line light spot at the outer surface and inner surface of the transparent layer of the crucible to be inspected, respectively; the binocular camera is configured as follows: the field of view of the binocular camera at least covers the transparent layer of the crucible to be inspected.

2. The quartz glass crucible visual inspection system according to claim 1, characterized in that: Also includes: A camera light source is installed on the connecting bracket, and the camera light source is used to illuminate the crucible to be inspected.

3. The quartz glass crucible visual inspection system according to claim 2, characterized in that: The camera light source is a ring light source.

4. The quartz glass crucible visual inspection system according to claim 1, characterized in that: The first line laser and the second line laser are arranged in an inner eight shape, one in front and one behind; the two camera units of the binocular camera are arranged in an inner eight shape, one on the left and one on the right.

5. The quartz glass crucible visual inspection system according to claim 1, characterized in that: The first line laser and the second line laser are both straight-line lasers.

6. The quartz glass crucible visual inspection system based on binocular vision according to claim 1, characterized in that: The connecting bracket is fixed on the displacement mechanical arm.

7. A quartz glass crucible visual inspection method based on binocular vision, which is implemented by the quartz glass crucible visual inspection system according to any one of claims 1 to 6, characterized in that: include: Step S1, forming a first line light spot on the outer surface of the transparent layer of the crucible to be inspected by the first line laser, forming a second line light spot on the outer surface of the transparent layer of the crucible to be inspected by the second line laser, and sampling the first line light spot on the outer surface, the second line light spot on the outer surface and the bubbles in the transparent layer of the crucible to be inspected by the binocular camera; Step S2, determining a transparent layer outer surface fitting surface about the transparent layer outer surface of the crucible to be inspected according to the first outer surface line spot and the second outer surface line spot; and Step S3, determining the depth of the bubbles in the transparent layer of the crucible to be inspected according to the positional relationship between the bubbles in the transparent layer of the crucible to be inspected and the fitting surface of the outer surface of the transparent layer.

8. The quartz glass crucible visual inspection method according to claim 7, characterized in that: Also includes: Step S4, determining the number and size of the bubbles in the transparent layer of the crucible to be inspected according to the bubbles in the transparent layer of the crucible to be inspected.

9. A quartz glass crucible visual inspection method, which is implemented by the quartz glass crucible visual inspection system according to any one of claims 1 to 6, characterized in that: include: Step S1, the first line laser forms a first line light spot on the outer surface and a first line light spot on the inner surface of the transparent layer of the crucible to be inspected, respectively; the second line laser forms a second line light spot on the outer surface and a second line light spot on the inner surface, respectively; the binocular camera samples the first line light spot on the outer surface, the second line light spot on the outer surface, the first line light spot on the inner surface, and the second line light spot on the inner surface; Step S2, determining a transparent layer outer surface fitting surface about the outer surface of the transparent layer of the to-be-tested crucible according to the first line light spot on the outer surface and the second line light spot on the outer surface, and determining a transparent layer inner surface fitting surface about the inner surface of the transparent layer of the to-be-tested crucible according to the first line light spot on the inner surface and the second line light spot on the inner surface; and Step S3, determining the thickness of the transparent layer of the crucible to be inspected according to the positional relationship between the fitting surface of the outer surface of the transparent layer and the fitting surface of the inner surface of the transparent layer.

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