Capacitor film vacuum gauge

Abstract

The invention provides a capacitor film vacuum gauge. The capacitor film vacuum gauge comprises a main body and a temperature adjusting assembly, the temperature adjusting assembly comprises a flexible heating piece arranged on the outer side of the main body in an attached mode, the flexible heating piece is provided with a flexible attaching layer attached to the main body and a heating layer arranged on the side, away from the main body, of the flexible attaching layer, and the heating layer is used for heating the main body to the preset temperature. And the flexibility of the flexible fitting layer is higher, so that the flexible fitting layer can better adapt to various curved surface structures, and the whole flexible heating element can be better fitted on the main body. Therefore, the heating layer is in good contact with all parts of the main body, and the temperature of the heating layer can be better transmitted to the main body, so that the capacitance film vacuum gauge is at a more suitable temperature, and the stability and accuracy of measurement are ensured.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum measurement, and in particular to a capacitance film vacuum gauge. Background Art

[0002] As a vacuum pressure measuring device, the capacitance film vacuum gauge usually uses an alloy diaphragm as an electrode of the capacitor to form a plane capacitor with the metal coating on the ceramic. When the pressure on both sides of the alloy diaphragm changes, the distance between the diaphragm and the metal coating changes, thereby changing the capacitance value. The pressure in the measured space is measured by measuring the capacitance value.

[0003] However, the measurement accuracy of the capacitance film vacuum gauge is easily affected by the ambient temperature. In order to reduce the influence of the ambient temperature on the measurement results, some capacitance film vacuum gauges are equipped with heaters. However, the existing heaters have poor temperature compensation effect on the capacitance film vacuum gauge, which affects the detection accuracy of the capacitance film vacuum gauge. Summary of the invention

[0004] In order to at least partially solve the problems existing in the prior art, according to one aspect of the present invention, a capacitance film vacuum gauge is provided. The capacitance film vacuum gauge includes a main body and a temperature adjustment component, wherein the temperature adjustment component includes a flexible heating element attached to the outside of the main body, the flexible heating element has a flexible attachment layer attached to the main body and a heating layer disposed on a side of the flexible attachment layer away from the main body, and the heating layer is used to heat the main body to a predetermined temperature.

[0005] The capacitance film vacuum gauge provided by the present application has a higher softness of the flexible bonding layer, which can better adapt to various curved surface structures, so that the flexible heating element can be better bonded to the main body as a whole. In this way, there is good contact with all parts of the main body, and the temperature of the heating layer can be better transferred to the main body, so that the capacitance film vacuum gauge is at a more suitable temperature, ensuring the stability and accuracy of the measurement. Especially under the trend of the decreasing volume of the capacitance film vacuum gauge, the flexible heating element can be better applied to the main body with a smaller volume and its curved surface structure. Moreover, relative to the direct contact of the metal heating element with the main body, the flexible heating layer can also have a certain degree of heat preservation effect, so that the main body is better stabilized at a predetermined temperature, further ensuring the stability and accuracy of the capacitance film vacuum gauge measurement. The flexible bonding layer between the heating layer and the main body also has a certain degree of balancing effect, so that the heating of the main body is more uniform.

[0006] Exemplarily, the temperature adjustment component further includes a control component electrically connected to the heating layer, and the control component controls the heating layer to heat the main body to a predetermined temperature and then continue to heat the main body to maintain the predetermined temperature.

[0007] Exemplarily, the temperature regulating assembly further includes a temperature sensor, which is used to detect the working temperature of the main body. The control component is electrically connected to the temperature sensor and controls the heating temperature of the heating layer according to the working temperature.

[0008] Exemplarily, the temperature sensor is arranged on a side of the main body facing away from the flexible heating element.

[0009] Exemplarily, the temperature sensor comprises a thermistor temperature sensor.

[0010] Exemplarily, the temperature adjustment component further includes a fuse, which is used to detect the heating temperature of the heating layer and disconnect when the heating temperature is higher than a predetermined threshold value to cut off the power supply to the heating layer.

[0011] Exemplarily, the safety element is disposed on a side of the flexible heating element facing away from the main body and is in contact with the flexible heating element.

[0012] Exemplarily, the flexible heating element further includes a first insulating layer, which is disposed between the flexible conforming layer and the heating layer.

[0013] Exemplarily, the flexible heating element further includes a second insulating layer, which is disposed on a side of the heating layer facing away from the main body.

[0014] Exemplarily, the heating layer comprises a nickel-chromium alloy resistance wire.

[0015] A series of simplified concepts are introduced in the summary of the invention, which will be further described in detail in the detailed description. The summary of the invention is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0016] The advantages and features of the present invention are described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following drawings of the present invention are used as part of the present invention for understanding the present invention. The drawings show the embodiments of the present invention and their descriptions, and are used to explain the principles of the present invention. In the drawings,

[0018] Figure 1 A three-dimensional diagram of a capacitance film vacuum gauge according to an exemplary embodiment of the present invention;

[0019] Figure 2 A perspective view of a capacitance film vacuum gauge according to an exemplary embodiment of the present invention;

[0020] Figure 3 is a schematic structural diagram of a flexible heating element according to an exemplary embodiment of the present invention; and

[0021] Figure 4 It is a structural expansion diagram of a flexible heating element according to an exemplary embodiment of the present invention.

[0022] The above drawings include the following reference numerals:

[0023] 10. Capacitance film vacuum gauge; 110. Main body; 120. Temperature regulating component; 1210. Flexible heating element; 1211. Flexible bonding layer; 1212. Heating layer; 1220. Temperature sensor; 1230. Safety element. DETAILED DESCRIPTION

[0024] In the following description, a large amount of details are provided so that the present invention can be thoroughly understood. However, it will be appreciated by those skilled in the art that the following description only exemplarily illustrates a preferred embodiment of the present invention, and the present invention can be implemented without one or more such details. In addition, in order to avoid confusion with the present invention, some technical features well known in the art are not described in detail.

[0025] In order to fully understand the embodiments of the present invention, detailed structures will be presented in the following description. Obviously, the implementation of the embodiments of the present invention is not limited to the specific details familiar to those skilled in the art. The preferred embodiments of the present invention are described in detail below, but in addition to these detailed descriptions, the present invention may also have other embodiments.

[0026] The present invention provides a capacitance film vacuum gauge in an embodiment. Figure 1-Figure 4, the capacitance film vacuum gauge 10 may include a main body 110 and a temperature adjustment component 120. The main body 110 may be mainly used for measuring air pressure. The temperature adjustment component 120 may be used to adjust the temperature of the main body 110. Among them, the temperature adjustment component 120 may include a flexible heating element 1210 that is bonded to the outside of the main body 110, and the flexible heating element 1210 may have a flexible bonding layer 1211 and a heating layer 1212. The flexible heating element 1210 may be adapted to the shape of the main body 110. For example, when the main body 110 is a cylindrical structure, the flexible heating element 1210 may be bonded to the side and / or bottom surface and / or top surface of the cylindrical structure. Specifically, the flexible bonding layer 1211 may be bonded to the main body 110, and the heating layer 1212 may be arranged on the side of the flexible bonding layer 1211 away from the main body 110. The heating layer 1212 may be used to heat the main body 110 to a predetermined temperature. The heating layer 1212 is heated, and the heat is transferred to the main body 110 through the flexible bonding layer 1211. Among them, the predetermined temperature can be set according to actual needs. For example, the predetermined temperature can be a suitable working temperature of the capacitive film vacuum gauge 10, that is, the detection accuracy of the capacitive film vacuum gauge 10 is higher at this suitable working temperature. The flexible bonding layer 1211 can be made of any type of flexible material. Exemplarily, the flexible bonding layer 1211 can be made of silicone. The temperature heating layer 1212 may include a metal resistance wire. Specifically, the metal resistance wire can be arranged in a serpentine shape.

[0027] In the prior art, the heating element is generally a metal heating element, a planar heating element, and its composition includes carbon, which has poor flexibility. The main body is usually cylindrical, and such a metal heating element is wrapped around the outside of the main body, and the contact with various parts of the main body is poor. Especially under the trend of decreasing volume of the capacitance film vacuum gauge, the size of the main body is correspondingly reduced, and the metal heating element is difficult to be used.

[0028] The capacitive film vacuum gauge 10 provided by the present application has a higher softness of the flexible bonding layer 1211, which can better adapt to various curved surface structures, so that the flexible heating element 1210 can be better bonded to the main body 110 as a whole. In this way, there is good contact with all parts of the main body 110, and the temperature of the heating layer 1212 can be better transferred to the main body 110, so that the capacitive film vacuum gauge 10 is at a more suitable temperature, ensuring the stability and accuracy of the measurement. Especially under the trend of the decreasing volume of the capacitive film vacuum gauge 10, the flexible heating element 1210 can be better applied to the main body 110 with a smaller volume and its curved surface structure. In addition, compared with the direct contact of the metal heating element with the main body 110, the flexible heating layer 1212 can also have a certain degree of heat preservation effect, so that the main body 110 is better stabilized at a predetermined temperature, further ensuring the stability and accuracy of the measurement of the capacitive film vacuum gauge 10. The flexible bonding layer 1210 between the heating layer 1212 and the main body 110 also has a certain degree of balancing effect, so that the heating of the main body 110 is more uniform.

[0029] Exemplarily, the temperature regulating assembly 120 may also include a control member (not shown) electrically connected to the heating layer 1212, and the control member may control the heating layer 1212 to heat the main body 110 to a predetermined temperature and then continue to heat so that the main body 110 is maintained at a predetermined temperature. It can be understood that the continuously heated heating layer 1212 has a continuous internal current and voltage, and the temperature of the heating layer 1212 can be adjusted by changing the intensity of the current and voltage while continuously heating. When the heat transferred by the heating layer 1212 to the main body 110 is the same as the heat consumed by the main body 110, the main body 110 will remain at this temperature. In the prior art, the heating mode of the metal heating element is heating and heating. After reaching its target temperature, the metal heating element stops heating, that is, the metal heating element is no longer powered. This involves a drastic change in the current and voltage inside the metal heating element, causing a large fluctuation in the power supply current of the capacitor film vacuum, thereby affecting the detection accuracy of the capacitor film vacuum. In this embodiment, the control member controls the heating layer 1212 to heat continuously so that the current and voltage inside it are always continuous. In this way, the resistance value of the heating layer 1212 changes less, the current of the heating layer 1212 is more stable and has smaller fluctuations, which can reduce the impact of changes in current and voltage on the measurement accuracy of the capacitance film vacuum gauge 10, further ensuring the stability and accuracy of the measurement.

[0030] For example, in conjunction with reference Figure 1 , Figure 2 and Figure 4, the temperature regulating component 120 may also include a temperature sensor 1220, which may be used to detect the operating temperature of the main body 110. The control unit may be electrically connected to the temperature sensor 1220 and may control the heating temperature of the heating layer 1212 according to the operating temperature. The setting of the temperature sensor 1220 may obtain the operating temperature of the main body 110 more accurately and in real time, so that the control unit can control the heating layer 1212 more accurately. Exemplarily, when the detected operating temperature is close to the predetermined temperature that the main body 110 needs to reach (for example, when the difference between the operating temperature and the predetermined temperature is within 0.3°), the control unit may control the temperature of the heating layer 1212 to be appropriately lowered. At this time, the process of increasing the operating temperature is smoother, that is, the process of the heating layer 1212 from the initial temperature to the predetermined temperature is smoother, and the current and voltage of the corresponding capacitance film vacuum gauge 10 are smoother, and the measurement accuracy is better.

[0031] For example, in conjunction with reference Figure 1 and Figure 4 , the temperature sensor 1220 can be arranged on the side of the main body 110 away from the flexible heating element 1210. In other words, the temperature sensor 1220 can be arranged on the inner side of the main body 110. Specifically, the temperature sensor 1220 can be arranged close to the main body 110. The temperature sensor 1220 arranged on the side of the main body 110 away from the flexible heating element 1210 can obtain the working temperature of the main body 110 more directly and accurately. Exemplarily, in an embodiment in which the main body 110 is cylindrical, the temperature sensor 1220 can be arranged on the inner side of the bottom surface of the cylindrical structure.

[0032] Exemplarily, the temperature sensor 1220 may include a thermistor temperature sensor. In this way, the operating temperature of the main body 110 can be accurately detected in real time. Specifically, a highly sensitive thermocouple and a thermistor may be integrated inside the capacitance film vacuum gauge 10 to further accurately detect the operating temperature. In an embodiment not shown, the temperature sensor may be any other type of sensor, such as a semiconductor temperature sensor, an infrared temperature sensor, etc.

[0033] For example, in conjunction with reference Figure 1 and Figure 2, the temperature adjustment component 120 may also include a safety component 1230, which may be used to detect the heating temperature of the heating layer 1212 and disconnect when the heating temperature is higher than a predetermined threshold value to cut off the power to the heating layer 1212. In other words, the safety component 1230 may detect the heating temperature of the heating layer 1212. Specifically, the safety component 1230 may be a fuse. The temperature of the fuse itself may rise as the heating temperature of the heating layer 1212 rises, and the fuse itself may have a temperature of a predetermined threshold value due to its material. When the heating temperature is higher than the predetermined threshold value, the temperature of the fuse is correspondingly higher than the predetermined threshold value and may be melted, etc., resulting in power off of the heating layer 1212. The provision of the safety component 1230 may better ensure that the temperature of the heating layer 1212 is not too high, and avoid damage caused by overheating of the heating layer 1212.

[0034] For example, continue to combine with reference Figure 1 and Figure 2 , the safety member 1230 can be arranged on the side of the flexible heating member 1210 away from the main body 110 and fit with the flexible heating member 1210. That is to say, the safety member 1230 is arranged on the outside of the flexible heating member 1210. Specifically, the safety member 1230 can be located on the outside of the heating layer 1212. Further, in an embodiment in which a second isolation layer is provided, the safety member 1230 can be arranged on the outside of the second isolation layer. The safety member 1230 and the flexible fitting member fit with each other. In this way, the safety member 1230 can contact the flexible heating member 1210 more directly and obtain the heating temperature of the heating member more accurately.

[0035] Exemplarily, the flexible heating element 1210 may further include a first insulating layer (not shown), which may be disposed between the flexible conforming layer 1211 and the heating layer 1212. The provision of the first insulating layer may better prevent the heating layer 1212 from directly contacting the outside, thereby ensuring the normal operation of the heating layer 1212. Exemplarily, the first insulating layer may be made of glass fiber material.

[0036] Exemplarily, the flexible heating element 1210 may further include a second insulating layer (not shown), and the second insulating layer may be disposed on the side of the heating layer 1212 away from the main body 110. In other words, the second insulating layer may be disposed on the outside of the heating layer 1212. In this way, the second insulating layer may further prevent the heating layer 1212 from directly contacting the outside, and further ensure the normal operation of the heating layer 1212. Exemplarily, the second insulating layer may be made of fiberglass.

[0037] For example, refer to Figure 1 and Figure 4The heating layer 1212 may include a nickel-chromium alloy resistance wire. The nickel-chromium alloy resistance wire has a higher resistivity, a higher heating efficiency, and good ductility. It can be better arranged and better adapted to the shape of the main body 110, that is, it is better suitable for capacitor film vacuum gauges 10 of different sizes. The flexible heating element 1210 configured in this way can be smaller in size. For example, the nickel-chromium alloy resistance wire can be arranged in a serpentine shape. Figure 3 and Figure 4 As shown. This arrangement further ensures the uniformity of heating of the flexible heating element 1210. Exemplarily, the flexible heating element 1210 can be formed by pressing a first isolation layer, a second isolation layer, a heating layer 1211 sandwiched between the first isolation layer and the second isolation layer, and a flexible bonding layer 1212 located inside the first isolation layer.

[0038] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by directional words such as "front", "back", "up", "down", "left", "right", "lateral", "vertical", "vertical", "horizontal", "top", "bottom", etc. is usually based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention; the directional words "inside" and "outside" refer to the inside and outside relative to the contour of each component itself.

[0039] For ease of description, regional relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the regional positional relationship between one or more components or features shown in the figure and other components or features. It should be understood that regional relative terms include not only the orientation of the components as described in the figure, but also different orientations in use or operation. For example, if the components in the accompanying drawings are inverted as a whole, the components "above other components or features" or "above other components or features" will include the situation where the components are "below other components or structures" or "below other components or structures". Therefore, the exemplary term "above" may include both "above" and "below". In addition, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and this article is intended to include all of these situations.

[0040] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, parts, components and / or combinations thereof.

[0041] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0042] The present invention has been described by the above embodiments, but it should be understood that the above embodiments are only for the purpose of example and description, and are not intended to limit the present invention to the scope of the described embodiments. In addition, it can be understood by those skilled in the art that the present invention is not limited to the above embodiments, and more variations and modifications can be made according to the teachings of the present invention, and these variations and modifications all fall within the scope of the protection claimed by the present invention. The protection scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A capacitance film vacuum gauge, comprising a main body (110) and a temperature adjustment component (120), wherein: The temperature regulating component (120) comprises a flexible heating element (1210) arranged on the outside of the main body (110), wherein the flexible heating element (1210) comprises a flexible bonding layer (1211) bonded to the main body (110) and a heating layer (1212) arranged on a side of the flexible bonding layer (1211) facing away from the main body (110), and the heating layer (1212) is used to heat the main body (110) to a predetermined temperature.

2. The capacitance film vacuum gauge according to claim 1, characterized in that: The temperature adjustment component (120) further includes a control component electrically connected to the heating layer (1212), wherein the control component controls the heating layer (1212) to heat the main body (110) to the predetermined temperature and then continues to heat the main body (110) to maintain the predetermined temperature.

3. The capacitance film vacuum gauge according to claim 2, characterized in that: The temperature regulating component (120) further comprises a temperature sensor (1220) for detecting the working temperature of the main body (110); the control component is electrically connected to the temperature sensor (1220) and controls the heating temperature of the heating layer (1212) according to the working temperature.

4. The capacitance film vacuum gauge according to claim 3, characterized in that: The temperature sensor (1220) is arranged on a side of the main body (110) facing away from the flexible heating element (1210).

5. The capacitance film vacuum gauge according to claim 3, characterized in that: The temperature sensor (1220) comprises a thermal resistor temperature sensor.

6. The capacitance film vacuum gauge according to claim 1, characterized in that: The temperature adjustment component (120) further comprises a safety element (1230), wherein the safety element (1230) is used to detect the heating temperature of the heating layer (1212) and disconnect when the heating temperature is higher than a predetermined threshold value to cut off the power supply to the heating layer (1212).

7. The capacitance film vacuum gauge according to claim 6, characterized in that: The safety element (1230) is arranged on a side of the flexible heating element (1210) that is away from the main body (110) and is in contact with the flexible heating element (1210).

8. The capacitance film vacuum gauge according to claim 1, characterized in that: The flexible heating element (1210) further comprises a first isolation layer, wherein the first isolation layer is arranged between the flexible contact layer (1211) and the heating layer (1212).

9. The capacitance film vacuum gauge according to claim 1, characterized in that: The flexible heating element (1210) further comprises a second isolation layer, wherein the second isolation layer is arranged on a side of the heating layer (1212) facing away from the main body (110).

10. The capacitance film vacuum gauge according to claim 1, characterized in that: The heating layer (1212) comprises a nickel-chromium alloy resistance wire.

Images