Defect detection method and device, appearance machine and electronic equipment

Abstract

The embodiment of the invention relates to the technical field of semiconductor defect detection, and provides a defect detection method and device, an appearance machine and electronic equipment, and the method comprises the steps: sequentially placing each trough in a to-be-detected tray in a preset detection area below a laser sensor; wherein the trough is used for placing a to-be-detected device; a laser sensor is used for sequentially emitting laser light rays to all the material grooves in the preset detection area and receiving the light ray intensity reflected by all the material grooves; the light intensity reflected by each trough is converted into an actual measurement distance corresponding to each trough, and the actual measurement distance is used for representing the distance between the trough and the laser sensor; and determining the defect state of each trough according to the actually measured distance corresponding to each trough. According to the embodiment of the invention, the trough with defects can be timely and effectively found, and the outflow risk of defective products is effectively reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor defect detection, and in particular to a defect detection method and device, an appearance machine, and an electronic device. Background Art

[0002] When the traditional appearance machine operates on a tray, the defective products detected will be directly removed from the tray after replacement. This approach has the following shortcomings: First, when the appearance machine operates, the vacuum of the suction nozzle is too small or too large, which will cause the product to not fall into the slot or be blown away, and it is easy to cause stacking spaces or out of the slot. Secondly, some small foreign matter on the surface of the product has a certain stickiness after high-temperature baking. When a certain amount of such foreign matter accumulates on the surface of the suction nozzle, it will become sticky, resulting in the product not completely sticking to the suction nozzle, causing various abnormal phenomena. Thirdly, the incoming materials that have already produced stacking cannot be detected.

[0003] During the operation of the existing appearance machine tray, product abnormalities cannot be discovered in time, and the product appearance or packaging can only be controlled manually. However, it is still difficult to detect the stacking of small or thin products, resulting in a high risk of stacked products flowing out. Summary of the invention

[0004] The present disclosure aims to solve at least one of the problems existing in the prior art and to provide a defect detection method and device, an appearance machine, and an electronic device.

[0005] In one aspect of the present disclosure, a defect detection method is provided, the defect detection method comprising:

[0006] Sequentially place each material slot in the material tray to be tested in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested;

[0007] Using the laser sensor, sequentially emit laser light to each of the material slots in the preset detection area, and receive the intensity of light reflected by each of the material slots;

[0008] The light intensity reflected by each of the material slots is converted into a measured distance corresponding to each of the material slots, and the measured distance is used to represent the distance between the material slot and the laser sensor;

[0009] The defect status of each material trough is determined according to the measured distance corresponding to each material trough.

[0010] Optionally, determining the defect state of each of the material troughs according to the measured distance corresponding to each of the material troughs includes:

[0011] The actually measured distance corresponding to each of the material troughs is compared with the reference distance respectively, and the defect state of each of the material troughs is determined according to the comparison result.

[0012] Optionally, determining the defect state of each of the troughs according to the comparison result includes:

[0013] If the measured distance corresponding to the material trough is greater than the reference distance and does not meet the tolerance requirement, it is determined that the material trough has an empty material defect; and,

[0014] If the actually measured distance corresponding to the material slot is smaller than the reference distance and does not meet the tolerance requirement, it is determined that the device to be inspected in the material slot has a stacking defect or a slot-out defect.

[0015] Optionally, the reference distance is determined by:

[0016] Placing a reference trough containing standard components in the material tray to be tested in the preset detection area;

[0017] Using the laser sensor, emitting laser light to the reference material tank, and receiving the intensity of the light reflected by the reference material tank;

[0018] The intensity of light reflected by the reference trough is converted into the distance between the reference trough and the laser sensor to obtain the reference distance.

[0019] Optionally, determining the defect state of each of the material troughs according to the measured distance corresponding to each of the material troughs includes:

[0020] The measured distances corresponding to the two adjacent material troughs are compared respectively, and the defect states of the two adjacent material troughs are determined according to the comparison results.

[0021] Optionally, determining the defect states of the two adjacent troughs according to the comparison result includes:

[0022] If the measured distance difference between any one of the material troughs and its two adjacent material troughs is the same, it is determined that any one of the material troughs does not have a defect;

[0023] If the measured distance difference between any one of the material troughs and its two adjacent material troughs is different, it is determined that any one of the material troughs has a defect.

[0024] Optionally, the material slots in the material tray to be tested are arranged in an array; and the defect detection method further comprises:

[0025] When the distance between the centers of any two adjacent material slots is less than a preset interval threshold, the material slots in the material tray to be tested are tested side by side;

[0026] When the distance between the centers of any two adjacent material slots is greater than the preset interval threshold, cross-row detection is performed on each of the material slots in the material tray to be tested.

[0027] Another aspect of the present disclosure provides a defect detection device, the defect detection device comprising:

[0028] A moving module is used to sequentially place each material slot in the material tray to be tested in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested;

[0029] A detection module, used to use the laser sensor to sequentially emit laser light to each of the material slots in the preset detection area, and receive the intensity of light reflected by each of the material slots;

[0030] A conversion module, used for converting the light intensity reflected by each of the material slots into a measured distance corresponding to each of the material slots, wherein the measured distance is used to represent the distance between the material slot and the laser sensor;

[0031] The determination module is used to determine the defect status of each of the material troughs according to the measured distance corresponding to each of the material troughs.

[0032] Optionally, the determination module is used to determine the defect state of each of the material troughs according to the measured distance corresponding to each of the material troughs, including:

[0033] The determination module is used to:

[0034] The actually measured distance corresponding to each of the material troughs is compared with the reference distance respectively, and the defect state of each of the material troughs is determined according to the comparison result.

[0035] Optionally, the determination module is used to determine the defect state of each of the troughs according to the comparison result, including:

[0036] The determination module is used to:

[0037] If the measured distance corresponding to the material trough is greater than the reference distance and does not meet the tolerance requirement, it is determined that the material trough has an empty material defect; and,

[0038] If the actually measured distance corresponding to the material slot is smaller than the reference distance and does not meet the tolerance requirement, it is determined that the device to be inspected in the material slot has a stacking defect or a slot-out defect.

[0039] Optionally, the moving module is further used to place a reference trough containing standard devices in the material tray to be tested in the preset detection area;

[0040] The detection module is further used to use the laser sensor to emit laser light to the reference material tank and receive the intensity of the light reflected by the reference material tank;

[0041] The conversion module is further used to convert the intensity of the light reflected by the reference material trough into the distance between the reference material trough and the laser sensor to obtain the reference distance.

[0042] Optionally, the determination module is used to determine the defect state of each of the material troughs according to the measured distance corresponding to each of the material troughs, including:

[0043] The determination module is used to:

[0044] The measured distances corresponding to the two adjacent material troughs are compared respectively, and the defect states of the two adjacent material troughs are determined according to the comparison results.

[0045] Optionally, the determination module is used to determine the defect status of the two adjacent troughs according to the comparison result, including:

[0046] The determination module is used to:

[0047] If the measured distance difference between any one of the material troughs and its two adjacent material troughs is the same, it is determined that any one of the material troughs does not have a defect;

[0048] If the measured distance difference between any one of the material troughs and its two adjacent material troughs is different, it is determined that any one of the material troughs has a defect.

[0049] Optionally, the material slots in the material tray to be tested are arranged in an array; and the defect detection device is further used for:

[0050] When the distance between the centers of any two adjacent material slots is less than a preset interval threshold, the material slots in the material tray to be tested are tested side by side;

[0051] When the distance between the centers of any two adjacent material slots is greater than the preset interval threshold, cross-row detection is performed on each of the material slots in the material tray to be tested.

[0052] Another aspect of the present disclosure provides an appearance machine, comprising the defect detection device described above.

[0053] Another aspect of the present disclosure provides an electronic device, including:

[0054] at least one processor; and,

[0055] a memory communicatively connected to at least one processor; wherein,

[0056] The memory stores instructions that can be executed by at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the defect detection method described above.

[0057] Compared with the prior art, the present invention utilizes a laser sensor to emit laser light to each material slot in a material tray to be tested in a preset detection area and receive the light intensity reflected by each material slot, converting the light intensity reflected by each material slot into the actual measured distance corresponding to each material slot, and determining the defect status of each material slot according to the actual measured distance, so as to timely and effectively discover defective material slots and effectively reduce the risk of defective products flowing out. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplifications do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0059] Figure 1 A flowchart of a defect detection method provided in one embodiment of the present disclosure;

[0060] Figure 2 A schematic diagram of the arrangement of the material slots in the material tray to be tested provided in another embodiment of the present disclosure;

[0061] Figure 3 A schematic diagram of each material slot in a material tray to be measured and its corresponding measured distance provided in another embodiment of the present disclosure;

[0062] Figure 4 A schematic diagram of a defect detection method provided by another embodiment of the present disclosure;

[0063] Figure 5 A flow chart of a method for determining a reference distance provided in another embodiment of the present disclosure;

[0064] Figure 6 A schematic diagram of each material slot and its corresponding measured distance when the material tray to be tested is warped and deformed according to another embodiment of the present disclosure;

[0065] Figure 7 A schematic structural diagram of a defect detection device provided in another embodiment of the present disclosure;

[0066] Figure 8 A schematic structural diagram of an electronic device provided in another embodiment of the present disclosure. DETAILED DESCRIPTION

[0067] In order to make the purpose, technical scheme and advantages of the embodiments of the present disclosure clearer, the embodiments of the present disclosure will be described in detail below in conjunction with the accompanying drawings. However, it can be understood by those skilled in the art that in each embodiment of the present disclosure, many technical details are proposed in order to enable readers to better understand the present disclosure. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed for protection in the present disclosure can also be implemented. The division of the following embodiments is for the convenience of description and should not constitute any limitation on the specific implementation of the present disclosure. The various embodiments can be combined and referenced with each other without contradiction.

[0068] One embodiment of the present disclosure relates to a defect detection method, the process of which is as follows: Figure 1 As shown, including:

[0069] Step S110, placing each material slot in the material tray to be tested in turn in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested.

[0070] Specifically, the preset detection area refers to an area predetermined according to the detection distance of the laser sensor, so that the material trough in the area can receive the laser light emitted by the laser sensor, and the laser sensor can receive the laser light reflected by the material trough.

[0071] The laser sensor can be fixedly connected to the appearance machine or flexibly connected to the appearance machine, and this embodiment is not limited thereto. For example, the laser sensor can be fixedly or flexibly connected to the sorting (SORT) part of the appearance machine to perform defect detection on the material tray to be tested after the sorting operation is completed, and determine whether each material slot has a stacking defect, a slot discharge defect, or an empty material defect.

[0072] When the laser sensor is fixedly connected to the appearance machine, step S110 can move the material tray to be tested to place each material slot in the preset detection area below the laser sensor in turn. When the laser sensor is movably connected to the appearance machine, step S110 can move the laser sensor through a servo motor to place the laser sensor above each material slot in turn, thereby achieving that each material slot is in the preset detection area below the laser sensor in turn.

[0073] For example, Figure 2 As shown, the material slots in the material tray to be tested can be arranged in an array. At this time, the defect detection method further includes: when the distance between the centers of any two adjacent material slots is less than the preset interval threshold, the material slots in the material tray to be tested are tested side by side; when the distance between the centers of any two adjacent material slots is greater than the preset interval threshold, the material slots in the material tray to be tested are tested across rows.

[0074] Specifically, the preset interval threshold can be set according to the size of the trough. Side-by-side detection and cross-row detection can be achieved by two or more laser sensors.

[0075] For example, the preset interval threshold can be set to 12 mm. Figure 2 , when the distance between the center of each row of troughs and the center of the troughs adjacent to it above and below is less than 12mm, two or more laser sensors can be used to simultaneously detect defects in two or more adjacent rows of troughs, and each laser sensor corresponds to one row of troughs. When the distance between the center of each row of troughs and the center of the troughs adjacent to it above and below is greater than 12mm, two or more laser sensors can be used to simultaneously detect defects in two or more adjacent rows of troughs separated by one or more rows, and each laser sensor corresponds to one row of troughs. Similarly, when the distance between the center of each column of troughs and the center of the troughs adjacent to it on the left and right is less than 12mm, two or more laser sensors can be used to simultaneously detect defects in two or more adjacent columns of troughs, and each laser sensor corresponds to one column of troughs. When the distance between the center of each column of troughs and the center of the troughs adjacent to it on the left and right is greater than 12mm, two or more laser sensors can be used to simultaneously detect defects in two or more adjacent columns of troughs separated by one or more columns, and each laser sensor corresponds to one column of troughs.

[0076] By performing side-by-side or cross-row inspection on each slot when the slots in the material tray to be tested are arranged in an array, the defect detection speed can be further improved, and the unit per hour (UPH) can be guaranteed while ensuring quality.

[0077] In step S120, a laser sensor is used to sequentially emit laser light to each material slot in a preset detection area, and the intensity of light reflected by each material slot is received.

[0078] In step S130, the intensity of light reflected by each material slot is converted into the actual measured distance corresponding to each material slot. The actual measured distance is used to represent the distance between the material slot and the laser sensor.

[0079] It should be noted that this embodiment does not limit the specific method of converting the light intensity reflected by each material trough into the actual measured distance corresponding to each material trough in step S130, as long as the actual measured distance corresponding to each material trough can be determined according to the light intensity reflected by each material trough.

[0080] Step S140, determining the defect status of each material trough according to the measured distance corresponding to each material trough.

[0081] Specific, combined Figure 3, each material slot in the material tray to be tested may be a non-defective slot, an empty material slot, a stacked material slot, or an out-of-slot material slot (not shown in the figure). Among them, a non-defective slot refers to a slot that does not have defects such as empty material, stacked material, and out-of-slot. An empty material slot refers to a slot in which no device is placed, that is, a slot with an empty material defect. A stacked material slot refers to a slot in which the devices placed therein have stacking problems, that is, a slot with stacking defects. An out-of-slot material slot refers to a slot in which the devices placed therein have out-of-slot problems, that is, a slot with out-of-slot problems. The actual measured distance corresponding to a slot with defects will change compared to the actual measured distance corresponding to a slot without defects. For example Figure 3 As shown in the figure, when the measured distance corresponding to the non-defective slot is 10mm, the measured distance corresponding to the empty slot may be greater than 10mm, such as 11mm, the measured distance corresponding to the stacked slot may be less than 10mm, such as 9.0mm, and the measured distance corresponding to the out-of-slot slot may also be less than 10mm, such as 9.5mm (not shown in the figure). Therefore, according to the measured distance corresponding to each slot, the defect state of each slot can be determined, wherein the defect state can include non-defective, empty material defect, stacked material defect, and out-of-slot defect.

[0082] Exemplarily, step S140 includes: comparing the actually measured distance corresponding to each material trough with the reference distance, and determining the defect state of each material trough according to the comparison result.

[0083] Specifically, for example, combined with Figure 3 , when the reference distance is 10mm, and the measured distances corresponding to each trough are 10mm, 10mm, 10mm, 10mm, 10mm, 10mm, 10mm, 11mm, 10mm, 9.0mm, and 10mm respectively, the measured distances corresponding to each trough are compared with 10mm respectively, and the comparison results are: the measured distance corresponding to the eighth trough arranged from left to right is greater than the reference distance, the measured distance corresponding to the tenth trough arranged from left to right is less than the reference distance, and the measured distances corresponding to the remaining troughs are equal to the reference distance. Therefore, according to this comparison result, it can be determined that the eighth trough arranged from left to right has an empty material defect, the tenth trough arranged from left to right has a stacked material defect, and the remaining troughs have no defects, that is, the eighth and tenth troughs arranged from left to right have not passed the inspection (Fail), and the remaining troughs have passed the inspection (Pass).

[0084] Exemplarily, in step S140, the defect state of each material slot is determined based on the comparison result, including: if the actual measured distance corresponding to the material slot is greater than the reference distance and does not meet the tolerance requirement, it is determined that the material slot has an empty material defect; and if the actual measured distance corresponding to the material slot is less than the reference distance and does not meet the tolerance requirement, it is determined that the device to be inspected in the material slot has a stacking defect or a slot-out defect.

[0085] Specifically, in order to avoid the influence of the slight difference between the measured distance and the reference distance on the defect detection results, the tolerance can be set based on the thickness of the good device placed in the material tank, that is, the difference between the measured distance and the reference distance allowed, and the maximum deviation distance and the minimum deviation distance can be set according to the tolerance, and the tolerance size must be smaller than the thickness of the good device. Figure 4 , the maximum deviation distance refers to the sum of the reference distance and the tolerance, and the minimum deviation distance refers to the difference between the reference distance and the tolerance. In other words, the difference between the maximum deviation distance and the reference distance is equal to the tolerance, and the difference between the reference distance and the minimum deviation distance is also equal to the tolerance. Therefore, the tolerance requirements may include: when the measured distance corresponding to the trough is greater than the reference distance, the measured distance must be less than or equal to the maximum deviation distance, and when the measured distance corresponding to the trough is less than the reference distance, the measured distance must be greater than or equal to the minimum deviation distance.

[0086] For example, Figure 4 As shown, a laser sensor is used to emit laser light to each material slot in turn along the detection direction and receive the light intensity reflected by each material slot, and the actual measured distance corresponding to each material slot is determined according to the light intensity reflected by each material slot. The actual measured distance corresponding to each material slot is compared with the reference distance. It can be found that the comparison result is: the actual measured distance corresponding to the first material slot arranged along the detection direction is equal to the reference distance, the actual measured distance corresponding to the fourth material slot arranged along the detection direction is less than the reference distance and the actual measured distance is less than the minimum deviation distance, and the actual measured distance corresponding to the seventh material slot arranged along the detection direction is greater than the reference distance and the actual measured distance is greater than the maximum deviation distance. Comparing the comparison result with the contents included in the above tolerance requirements, it can be found that the measured distance corresponding to the first material trough arranged along the detection direction meets the tolerance requirements, the measured distance corresponding to the fourth material trough arranged along the detection direction is smaller than the reference distance and does not meet the tolerance requirements, and the measured distance corresponding to the seventh material trough arranged along the detection direction is larger than the reference distance and does not meet the tolerance requirements. Therefore, the first material trough arranged along the detection direction is judged to be a defect-free material trough, that is, there is no defect, the fourth material trough arranged along the detection direction is judged to be a stacking material trough, that is, there is a stacking defect or a discharging material trough, that is, there is a discharging defect (only the stacking material trough is shown in the figure), and the seventh material trough arranged along the detection direction is judged to be an empty material trough, that is, there is an empty material defect.

[0087] For example, Figure 5 As shown, the reference distance is determined by:

[0088] Step S510, placing a reference trough containing standard components in a material tray to be tested in a preset testing area.

[0089] In step S520, a laser sensor is used to emit laser light to the reference tank, and the intensity of the light reflected by the reference tank is received.

[0090] Step S530, converting the intensity of the light reflected by the reference slot into the distance between the reference slot and the laser sensor to obtain a reference distance.

[0091] Specifically, standard devices refer to good devices without defects such as stacking and slotting. Figure 4 Assuming that the first material trough arranged along the detection direction is the reference material trough, the reference material trough can be placed in the preset detection area under the laser sensor by moving the laser sensor or the material tray to be tested where the reference material trough is located. Then, the laser sensor is used to emit laser light to the reference material trough and receive the light intensity reflected by the reference material trough, and the light intensity reflected by the reference material trough is converted into a reference distance, that is, the distance between the reference material trough and the laser sensor.

[0092] It should be noted that this embodiment does not limit the specific method of converting the intensity of light reflected by the reference material tank into the distance between the reference material tank and the laser sensor in step S530, as long as the reference distance can be determined according to the intensity of light reflected by the reference material tank.

[0093] By converting the light intensity reflected by the reference trough in the preset detection area in the material tray to be tested into the reference distance, the method of determining the reference distance is made more scientific and reasonable, thereby improving the credibility and accuracy of the defect detection results.

[0094] Exemplarily, step S140 includes: comparing the measured distances corresponding to the two adjacent material slots respectively, and determining the defect states of the two adjacent material slots according to the comparison results.

[0095] Specifically, many trays will warp after being baked at high temperatures, and the height difference of the same row of defect-free products may even exceed the thickness of the products themselves. Figure 6 As shown, when the material tray to be tested is warped, assuming that the measured distances corresponding to the same discharge troughs arranged from left to right on the material trough to be tested and that are not defective are 10mm, 9.9mm, 9.8mm, 9.7mm, 9.6mm, 9.5mm, 9.6mm, 9.7mm, 9.8mm, 9.9mm, and 10mm respectively, at this time, if the defect state of each trough is still determined based on the comparison result of the measured distance corresponding to each trough and the same reference distance such as 10mm, then since the measured distances corresponding to the second to tenth troughs arranged from left to right are all less than the reference distance of 10mm, it will be determined that the second to tenth troughs have stacking defects or trough defects, resulting in misjudgment.

[0096] In order to avoid the influence of the warping deformation of the material tray to be tested where each material slot is located on the defect detection result and make the defect detection result more accurate, this embodiment compares the measured distances corresponding to two adjacent material slots, and determines the defect status of each material slot based on the difference in the measured distances corresponding to two adjacent material slots.

[0097] Exemplarily, in step S140, the defect status of the two adjacent material troughs is determined based on the comparison results, including: if the measured distance difference between any material trough and its two adjacent material troughs is the same, then it is determined that any material trough has no defects; if the measured distance difference between any material trough and its two adjacent material troughs is different, then it is determined that any material trough has defects.

[0098] Specifically, the difference in the actually measured distances between any one trough and its two adjacent troughs is the same, which means that the difference in the actually measured distances between any one trough and one of its adjacent troughs is equal to the difference in the actually measured distances between any one trough and another of its adjacent troughs.

[0099] For example, for Figure 6 For each material trough in the material tray to be tested, since the measured distance difference between the second to tenth material troughs arranged from left to right and their two adjacent material troughs is 0.1, the measured distance difference between the second to tenth material troughs and their two adjacent material troughs is the same. Therefore, it can be determined that the second to tenth material troughs do not have defects.

[0100] Assumptions Figure 6 In the material tray to be tested, the second material slot arranged from left to right has an empty material defect, then the measured distance corresponding to the second material slot will be greater than 9.9mm, resulting in the difference between the measured distances of the second material slot and the two adjacent material slots being different. Figure 6 In the material tray to be tested shown, if the second material slot arranged from left to right has a stacking defect or a slot-out defect, the measured distance corresponding to the second material slot will be less than 9.9 mm, which will also cause the measured distance difference between it and the two adjacent material slots to be no longer the same. Therefore, by judging whether the measured distance difference between any material slot and its two adjacent material slots is the same, it can be judged whether any material slot has a defect, thereby further avoiding the influence of the warping deformation of the material tray to be tested on the defect detection result and improving the accuracy of defect detection.

[0101] Compared with the prior art, the defect detection method provided by the disclosed embodiment uses a laser sensor to emit laser light to each material slot in the material tray to be tested in a preset detection area and receive the light intensity reflected by each material slot, and converts the light intensity reflected by each material slot into the actual measured distance corresponding to each material slot. The defect status of each material slot is determined according to the actual measured distance, which can timely and effectively discover defective material slots and effectively reduce the risk of defective products flowing out.

[0102] Another embodiment of the present disclosure relates to a defect detection device, such as Figure 7 As shown, including:

[0103] The moving module 710 is used to sequentially place each material slot in the material tray to be tested in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested.

[0104] The detection module 720 is used to use a laser sensor to sequentially emit laser light to each material slot in a preset detection area and receive the intensity of light reflected by each material slot.

[0105] The conversion module 730 is used to convert the light intensity reflected by each material slot into the actual measured distance corresponding to each material slot, and the actual measured distance is used to represent the distance between the material slot and the laser sensor.

[0106] The determination module 740 is used to determine the defect status of each material slot according to the measured distance corresponding to each material slot.

[0107] Exemplarily, the determination module 740 is used to determine the defect state of each material trough according to the measured distance corresponding to each material trough, including: the determination module 740 is used to compare the measured distance corresponding to each material trough with the reference distance, and determine the defect state of each material trough according to the comparison result.

[0108] Exemplarily, the determination module 740 is used to determine the defect status of each material slot based on the comparison result, including: the determination module 740 is used to: if the actual measured distance corresponding to the material slot is greater than the reference distance and does not meet the tolerance requirement, then determine that the material slot has an empty material defect; and if the actual measured distance corresponding to the material slot is less than the reference distance and does not meet the tolerance requirement, then determine that the device to be inspected in the material slot has a stacking defect or a slot-out defect.

[0109] Exemplarily, the moving module 710 is also used to place a reference trough containing standard devices in the material tray to be tested in a preset detection area.

[0110] The detection module 720 is also used to utilize a laser sensor to emit laser light to the reference material tank and receive the intensity of light reflected by the reference material tank.

[0111] The conversion module 730 is also used to convert the intensity of the light reflected by the reference slot into the distance between the reference slot and the laser sensor to obtain the reference distance.

[0112] Exemplarily, the determination module 740 is used to determine the defect state of each material trough according to the measured distance corresponding to each material trough, including: the determination module 740 is used to compare the measured distances corresponding to two adjacent material troughs, and determine the defect state of the two adjacent material troughs according to the comparison results.

[0113] Exemplarily, the determination module 740 is used to determine the defect status of the two adjacent material troughs based on the comparison results, including: the determination module 740 is used to: if the measured distance difference between any material trough and its two adjacent material troughs is the same, then determine that any material trough does not have defects; if the measured distance difference between any material trough and its two adjacent material troughs is different, then determine that any material trough has defects.

[0114] Exemplarily, the material slots in the material tray to be tested are arranged in an array. The defect detection device is also used to: when the distance between the centers of any two adjacent material slots is less than a preset interval threshold, perform a side-by-side detection on the material slots in the material tray to be tested; when the distance between the centers of any two adjacent material slots is greater than a preset interval threshold, perform a cross-row detection on the material slots in the material tray to be tested.

[0115] The specific implementation method of the defect detection device provided in the embodiment of the present disclosure can be found in the defect detection method provided in the embodiment of the present disclosure, and will not be repeated here.

[0116] Compared with the prior art, the defect detection device provided by the embodiment of the present disclosure can timely and effectively detect defective material troughs and reduce the risk of defective products flowing out.

[0117] Another embodiment of the present disclosure relates to an appearance machine, including the defect detection device provided by the above embodiment.

[0118] Another embodiment of the present disclosure relates to an electronic device, such as Figure 8 As shown, including:

[0119] at least one processor 801; and,

[0120] A memory 802 is communicatively connected to at least one processor 801; wherein,

[0121] The memory 802 stores instructions that can be executed by at least one processor 801 . The instructions are executed by at least one processor 801 so that the at least one processor 801 can execute the defect detection method described in the above embodiment.

[0122] Among them, the memory and the processor are connected in a bus manner, and the bus may include any number of interconnected buses and bridges, and the bus connects various circuits of one or more processors and memories together. The bus can also connect various other circuits such as peripherals, voltage regulators, and power management circuits, which are well known in the art and are therefore not further described herein. The bus interface provides an interface between the bus and the transceiver. The transceiver can be one element or multiple elements, such as multiple receivers and transmitters, providing a unit for communicating with various other devices on a transmission medium. The data processed by the processor is transmitted on a wireless medium via an antenna, and further, the antenna also receives data and transmits the data to the processor.

[0123] The processor is responsible for managing the bus and general processing, and can also provide various functions, including timing, peripheral interfaces, voltage regulation, power management, and other control functions. Memory can be used to store data used by the processor when performing operations.

[0124] Those skilled in the art will appreciate that the above-mentioned embodiments are specific embodiments for implementing the present disclosure, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present disclosure.

Claims

1. A defect detection method, characterized in that: The defect detection method comprises: Sequentially place each material slot in the material tray to be tested in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested; Using the laser sensor, sequentially emit laser light to each of the material slots in the preset detection area, and receive the intensity of light reflected by each of the material slots; The light intensity reflected by each of the material slots is converted into a measured distance corresponding to each of the material slots, and the measured distance is used to represent the distance between the material slot and the laser sensor; The defect status of each material trough is determined according to the measured distance corresponding to each material trough.

2. The defect detection method according to claim 1, characterized in that: The step of determining the defect state of each of the material troughs according to the measured distances corresponding to each of the material troughs comprises: The actually measured distance corresponding to each of the material troughs is compared with the reference distance respectively, and the defect state of each of the material troughs is determined according to the comparison result.

3. The defect detection method according to claim 2, characterized in that: Determining the defect state of each of the troughs according to the comparison result includes: If the measured distance corresponding to the material trough is greater than the reference distance and does not meet the tolerance requirement, it is determined that the material trough has an empty material defect; and, If the actually measured distance corresponding to the material slot is smaller than the reference distance and does not meet the tolerance requirement, it is determined that the device to be inspected in the material slot has a stacking defect or a slot-out defect.

4. The defect detection method according to claim 2, characterized in that: The method for determining the reference distance includes: Placing a reference trough containing standard components in the material tray to be tested in the preset detection area; Using the laser sensor, emitting laser light to the reference material tank, and receiving the intensity of the light reflected by the reference material tank; The intensity of light reflected by the reference trough is converted into the distance between the reference trough and the laser sensor to obtain the reference distance.

5. The defect detection method according to claim 1, characterized in that: The step of determining the defect state of each of the material troughs according to the measured distances corresponding to each of the material troughs comprises: The measured distances corresponding to the two adjacent material troughs are compared respectively, and the defect states of the two adjacent material troughs are determined according to the comparison results.

6. The defect detection method according to claim 5, characterized in that: Determining the defect states of the two adjacent material troughs according to the comparison results includes: If the measured distance difference between any one of the material troughs and its two adjacent material troughs is the same, it is determined that any one of the material troughs does not have a defect; If the measured distance difference between any one of the material troughs and its two adjacent material troughs is different, it is determined that any one of the material troughs has a defect.

7. The defect detection method according to any one of claims 1 to 6, characterized in that: The material slots in the material tray to be tested are arranged in an array; the defect detection method also includes: When the distance between the centers of any two adjacent material slots is less than a preset interval threshold, the material slots in the material tray to be tested are tested side by side; When the distance between the centers of any two adjacent material slots is greater than the preset interval threshold, cross-row detection is performed on each of the material slots in the material tray to be tested.

8. A defect detection device, characterized in that: The defect detection device comprises: A moving module is used to sequentially place each material slot in the material tray to be tested in a preset detection area below the laser sensor; wherein the material slot is used to place the device to be tested; A detection module, used to use the laser sensor to sequentially emit laser light to each of the material slots in the preset detection area, and receive the intensity of light reflected by each of the material slots; A conversion module, used for converting the light intensity reflected by each of the material slots into a measured distance corresponding to each of the material slots, wherein the measured distance is used to represent the distance between the material slot and the laser sensor; The determination module is used to determine the defect status of each of the material troughs according to the measured distance corresponding to each of the material troughs.

9. An appearance machine, characterized in that: Includes the defect detection device as described in claim 8.

10. An electronic device, characterized in that: include: at least one processor; as well as, a memory communicatively connected to the at least one processor; wherein, The memory stores instructions that can be executed by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can perform the defect detection method according to any one of claims 1 to 7.

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