A non-contact, probe-free method for mass detection of Nano-LED / Micro-LEDs

Abstract

The present invention discloses a method for non-contact probe-free Nano-LED / Micro-LED mass detection, which is applicable to a mass detection device including a coil power supply module, a Tesla coil module and a light-emitting pixel array module to be detected; the method includes: placing the light-emitting pixel array module to be detected on the opposite side of the secondary side coil and making the pointed cone-shaped structure end of the light-emitting pixel point face the secondary side coil; controlling the coil power supply module to supply power so that the secondary side coil generates a high-frequency alternating electromagnetic field, and each light-emitting pixel point in the high-frequency alternating electromagnetic field generates an induced voltage and breaks through the air between the secondary side coil to generate a plasma jet, and the charge in the plasma jet is injected into the light-emitting pixel point to make the light-emitting pixel point electroluminescent; collecting the light-emitting image of the light-emitting pixel array module to be detected; according to the light-emitting image, determining whether each light-emitting pixel point is qualified. The present invention avoids damage to the pixel point during the detection process, while improving detection efficiency and saving detection energy consumption.

Description

Technical Field

[0001] The present invention relates to the field of LED detection technology, and in particular to a non-contact, probe-free method for mass detection of Nano-LEDs / Micro-LEDs. Background Art

[0002] Nano-LED / Micro-LED is a technology that miniaturizes, thins, and forms arrays of light-emitting diodes (LEDs). Compared to organic light-emitting diodes (OLEDs) and liquid crystal displays (LCDs), Nano-LED / Micro-LEDs offer higher brightness, better stability, longer lifespan, and higher photoelectric conversion efficiency, making them considered the most promising new display technology.

[0003] The preparation of Nano-LED / Micro-LED displays requires the transfer of a large number of Nano-LED / Micro-LED pixels from the substrate to the driver backplane. To ensure product yield, a large number of Nano-LED / Micro-LEDs need to be tested before the transfer. Common detection methods include electroluminescence (EL) detection and photoluminescence (PL) detection. Traditional probe contact EL detection is inefficient, and the probe may damage the pixels when moving, resulting in an increase in the number of bad pixels. PL detection can achieve contactless detection, but the accuracy of PL detection is low, and the detection data is quite different from the data obtained by EL detection.

[0004] In recent years, a method for contactless, non-injection EL detection using displacement current has been proposed. This method offers high efficiency and does not damage Nano-LED / Micro-LEDs. However, it requires high-frequency, high-voltage power supply, resulting in high energy consumption. To reduce detection costs, improve the efficiency and accuracy of mass detection, and further mature Nano-LED / Micro-LED display technology, a new mass detection method is urgently needed to address the challenges encountered in traditional detection. Summary of the Invention

[0005] In view of some of the above-mentioned defects in the prior art, the technical problem to be solved by the present invention is to provide a non-contact, probe-free method for mass detection of Nano-LED / Micro-LED, aiming to avoid damage to pixels during the detection process, while improving detection efficiency and saving detection energy consumption.

[0006] To achieve the above objectives, the present invention provides a non-contact, probe-free, mass detection method for Nano-LED / Micro-LEDs, which is applied to a mass detection device. The mass detection device includes a coil power supply module, a Tesla coil module, and a light-emitting pixel array module to be detected. The coil power supply module is electrically connected to the Tesla coil module to power the Tesla coil module. The Tesla coil module includes a primary side circuit and a secondary side coil. The secondary side coil is used to perform electromagnetic induction with the primary side circuit to generate a high-frequency alternating electromagnetic field. The light-emitting pixel array module to be detected includes multiple Nano-LED light-emitting pixels or multiple Micro-LED light-emitting pixels, and one end of the anode of each light-emitting pixel is provided with a conductive pointed cone structure end. The method includes:

[0007] Step S1, placing the light-emitting pixel array module to be detected on the opposite side of the secondary side coil and making the pointed cone-shaped structure end of the light-emitting pixel point face the secondary side coil;

[0008] Step S2: Controlling the coil power supply module to supply power so that the secondary-side coil generates a high-frequency alternating electromagnetic field. Each of the light-emitting pixels in the high-frequency alternating electromagnetic field generates an induced voltage and breaks down the air between the secondary-side coil to generate a plasma jet. Charges in the plasma jet are injected into the light-emitting pixel, causing the pixel to emit electroluminescence. The conical structure end on the anode of the light-emitting pixel loses electrons, generating a driving current that flows from the anode through the cathode, thereby lighting the pixel.

[0009] Step S3: collecting a luminous image of the luminous pixel array module to be inspected; and determining whether each luminous pixel is qualified based on the luminous image.

[0010] Optionally, the mass detection device also includes an image acquisition module, the electron microscope camera of the image acquisition module is arranged on the side facing the pointed cone structure end of the luminous pixel point, and the shooting direction of the acquisition module avoids the Tesla coil module to acquire images of the luminous pixel point array module to be detected.

[0011] Optionally, step S3 includes:

[0012] Continuously collecting a plurality of the luminous images of the luminous pixel array module to be detected;

[0013] Obtaining the same luminous position in each of the luminous images according to each of the luminous images;

[0014] Based on the same luminous position, the influence of arc brightness is eliminated to determine whether each luminous pixel point corresponding to each area is qualified; wherein, the arc is generated by the induced voltage generated by the luminous pixel point breaking through the air between the secondary side coil.

[0015] Optionally, after step S1, the method further includes:

[0016] The distance between the secondary side coil and the end of the conical structure is adjusted according to the model of the light-emitting pixel and the field strength of the high-frequency alternating electromagnetic field provided by the Tesla coil module.

[0017] Optionally, the pointed cone-shaped structure end of the light-emitting pixel is the light-emitting pixel body or an electrode; when the pointed cone-shaped structure end is an electrode, the pointed cone-shaped structure end is transparent.

[0018] Optionally, the coil power supply module and the Tesla coil module are integrated and packaged; the secondary side coil is a planar PCB coil, the radius range of the secondary side coil is 10cm-100cm, and the radius range of the secondary side coil is adjusted according to the corresponding diameter of the luminous pixel array module to be detected.

[0019] Optionally, the coil power supply module includes a rectifier and filter circuit, a boost and buck circuit, an inverter circuit and a frequency control circuit; the coil power supply module provides any alternating current with an amplitude of 0V-20V and a frequency of 10kHz-3MHz.

[0020] Optionally, the secondary side coil and the pointed cone-shaped structure end are parallel to each other, and the distance between the secondary side coil and the pointed cone-shaped structure end is between 0.1 mm and 10 mm.

[0021] Optionally, the to-be-detected luminous pixel array module further includes a substrate, and the substrate is used to place each of the luminous pixel points.

[0022] Optionally, when the light-emitting pixel array module to be detected is circular, the diameter range is 1 cm-20 cm, and the diameter range of a single light-emitting pixel is 20 nm-100 μm.

[0023] Beneficial effects of the present invention: The present invention uses a high-frequency electromagnetic field generated by a Tesla coil to induce discharge in Nano-LED / Micro-LED luminescent pixels. Under the action of the charge generated by the discharge and the induced voltage, the Nano-LED / Micro-LED generates electroluminescence. Compared to probe contact detection, which requires the probe to continuously contact the Nano-LED / Micro-LED and move, the present invention can illuminate the Nano-LED / Micro-LED by simply adjusting the distance between the Nano-LED / Micro-LED and the coil, and the intensity and frequency of the alternating electromagnetic field, significantly improving detection efficiency. Compared to non-contact and non-injection detection, the present invention also avoids contact between the Nano-LED / Micro-LED and the probe. Due to the high-frequency skin effect, the discharge current will not cause damage to the Nano-LED / Micro-LED, thus achieving non-destructive testing of the Nano-LED / Micro-LED. In addition, the detection method of the present invention has lower energy consumption and lower detection costs. On the other hand, the present invention collects multiple luminous pixel images and performs comprehensive processing to eliminate the influence of the arc brightness generated by the Tesla coil on the luminous brightness of the luminous pixel, making luminous detection more accurate.

[0024] In summary, the present invention avoids damage to pixels during the detection process, while improving detection efficiency and accuracy and saving detection energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 1 is a flow chart of a non-contact, probe-free, mass detection method for Nano-LED / Micro-LEDs provided by a specific embodiment of the present invention;

[0026] Figure 2 It is a structural schematic diagram of a mass detection device provided by a specific embodiment of the present invention;

[0027] Figure 3 This is a schematic structural diagram of a light-emitting pixel having a conical electrode structure provided by a specific embodiment of the present invention;

[0028] Figure 4 This is a structural diagram of a light-emitting pixel point having a pointed cone-shaped end provided by a specific embodiment of the present invention;

[0029] Figure 5 1 is a schematic structural diagram of a secondary side coil provided by a specific embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the equivalent principle of a Tesla coil provided by a specific embodiment of the present invention;

[0031] Figure 7It is a structural schematic diagram of a coil power supply module provided in a specific embodiment of the present invention. DETAILED DESCRIPTION

[0032] The present invention discloses a method for non-contact, probe-free, bulk detection of Nano-LED / Micro-LEDs. Those skilled in the art can refer to the contents of this article and appropriately improve the technical details. It should be noted in particular that all similar replacements and modifications are obvious to those skilled in the art and are considered to be included in the present invention. The methods and applications of the present invention have been described through preferred embodiments. Relevant personnel can obviously modify or appropriately change and combine the methods and applications described herein without departing from the content, spirit and scope of the present invention to implement and apply the technology of the present invention.

[0033] The applicant's research found that in recent years, a method for contactless and non-injection EL detection using displacement current has been proposed. This method has high detection efficiency and will not damage Nano-LED / Micro-LED, but it requires high-frequency and high-voltage power supply during detection, which consumes a lot of energy. In order to reduce the cost of the detection link, improve the efficiency and accuracy of mass detection, and promote the maturity of Nano-LED / Micro-LED display technology, it is urgent to propose a new mass detection method to solve the problems encountered in traditional detection. The applicant found that based on the principle of electroluminescence of Tesla coils breaking through air, contactless detection can be achieved and the above-mentioned problems can be solved. However, the brightness of the arc generated by the breakdown of air will affect the detection of the luminous conditions of the luminous pixels.

[0034] Therefore, an embodiment of the present invention provides a non-contact, probe-free method for mass detection of Nano-LED / Micro-LEDs, which is applied to a mass detection device. The mass detection device includes a coil power supply module, a Tesla coil module, and a light-emitting pixel array module to be detected. The coil power supply module is electrically connected to the Tesla coil module to power the Tesla coil module. The Tesla coil module includes a primary side circuit and a secondary side coil. The secondary side coil is used to perform electromagnetic induction with the primary side circuit to generate a high-frequency alternating electromagnetic field. The light-emitting pixel array module to be detected includes multiple Nano-LED light-emitting pixels or multiple Micro-LED light-emitting pixels, and one end of the light-emitting pixel is a pointed cone-shaped structure end. As shown in the figure, the method includes:

[0035] Step S1: Place the light-emitting pixel array module to be detected on the opposite side of the secondary coil and make the pointed cone-shaped structure end of the light-emitting pixel point face the secondary coil.

[0036] In this specific embodiment, the light-emitting pixel array module to be detected further includes a substrate, and the substrate is used to place each light-emitting pixel.

[0037] In this embodiment, the mass detection device can be as follows Figure 2 As shown, the luminescent pixel array module to be detected consists of a substrate 110, luminescent pixels 120, and a conical electrode 130. The Tesla coil module consists of a secondary coil 140 and a primary circuit 150. The luminescent pixel array module to be detected is placed above the secondary coil 140, with the conical electrode 130 facing upward. The coil power supply module 160 provides the Tesla coil module with an alternating voltage with adjustable amplitude and frequency. During operation, the coil power supply module 160 outputs an alternating voltage to drive the Tesla coil module. The primary circuit 150 and the secondary coil 140 transfer energy at a resonant frequency, generating a high-frequency alternating electromagnetic field. The conical electrode 130 generates an induced voltage in the alternating electromagnetic field, which breaks down the air to generate plasma. Under the action of the electromagnetic field, the plasma charge is injected into the luminescent pixels, causing them to produce electroluminescence. The luminescent pixels include Nano-LED luminescent pixels and Micro-LED luminescent pixels. Figure 2 In the figure, the dotted box means they are encapsulated together.

[0038] It is worth mentioning that the term "mass detection" in the embodiments of the present invention is an industry term.

[0039] In this embodiment, the pointed conical end of the light-emitting pixel is the light-emitting pixel body or the electrode. When the pointed conical end is the electrode, the pointed conical end is transparent. The transparency is to facilitate the detection of the light-emitting state of the light-emitting pixel and avoid obstruction.

[0040] It should be noted that the pointed cone-shaped structure end is adopted because the curvature radius of the pointed cone is large, which generates a large induced voltage in the high-frequency alternating electromagnetic field.

[0041] When the end of the pointed cone structure is an electrode, it can be Figure 3 As shown, the structure is Figure 2 The structures of the light-emitting pixels in the embodiments are consistent. The light-emitting pixel array module to be detected is composed of a substrate 210 , light-emitting pixels 220 and a conical structure electrode 230 . Figure 3 Where D1 is the diameter of the light-emitting pixel array module to be detected, and L is the diameter of the light-emitting pixel.

[0042] When the end of the pointed cone structure is the luminous pixel body, it can be Figure 4 As shown, the light-emitting pixel array module to be detected is composed of a substrate 310 and light-emitting pixel points 320 with a pointed cone structure.

[0043] In this specific embodiment, the diameter of the circular light-emitting pixel array module to be detected is in the range of 1 cm to 20 cm, and the diameter of a single light-emitting pixel is in the range of 20 nm to 100 μm.

[0044] In this specific embodiment, the coil power supply module and the Tesla coil module are integrated and packaged; the secondary side coil is a planar PCB coil, and the radius range of the secondary side coil is 10cm-100cm. The radius range of the secondary side coil is adjusted according to the corresponding diameter of the light-emitting pixel array module to be detected. The specific structure can be as follows Figure 5 As shown, Figure 5 D2 is the diameter of the secondary coil. Figure 3 D1 is the diameter of the light-emitting pixel array module to be detected.

[0045] In this specific embodiment, the equivalent circuit diagram of the Tesla coil module can be as follows: Figure 6 As shown in the figure, Uin represents the alternating voltage provided by the coil power module. Capacitor C1 and coil inductor L1 form the primary-side LC circuit. Inductor L2 represents the inductance of the secondary-side coil. Capacitor C2 represents the equivalent capacitance of the air gap between the secondary-side coil and the light-emitting pixel. Energy is transferred between coils L1 and L2. Adjusting the Uin frequency to achieve the highest energy transfer efficiency when the circuit reaches a resonant state achieves a more efficient and stable discharge effect, improving detection efficiency.

[0046] In this embodiment, Figure 7 As shown, the coil power supply module includes a rectifier and filter circuit, a boost and buck circuit, an inverter circuit, and a frequency control circuit; the coil power supply module provides any AC power with an amplitude of 0V-20V and a frequency of 10kHz-3MHz.

[0047] It should be noted that the coil power supply module provides AC power with adjustable amplitude and frequency for the entire device. The module converts the AC power into DC power through the rectifier and filter module. The size of the DC power can be adjusted through the boost and buck circuit. The inverter circuit converts the DC power into AC power. At the same time, the frequency control circuit can adjust the frequency of the output AC power.

[0048] In this embodiment, after step S1, the method further includes:

[0049] The distance between the secondary side coil and the end of the cone-shaped structure is adjusted according to the model of the luminous pixel and the field strength of the high-frequency alternating electromagnetic field provided by the Tesla coil module.

[0050] It should be noted that the field intensity felt by the light-emitting pixel can be controlled by adjusting the distance between the secondary side coil and the end of the cone-shaped structure, so that it can obtain sufficient voltage to break through the air electroluminescence.

[0051] In this specific embodiment, it can be Figure 2 As shown, the secondary side coil and the end of the pointed cone-shaped structure are parallel to each other, and the distance between the secondary side coil and the end of the pointed cone-shaped structure is between 0.1 mm and 10 mm.

[0052] Step S2: Control the coil power supply module to supply power, causing the secondary coil to generate a high-frequency alternating electromagnetic field. Each luminescent pixel within the high-frequency alternating electromagnetic field generates an induced voltage, which breaks down the air between the secondary coil and the pixel, generating a plasma jet. Charge in the plasma jet is injected into the luminescent pixel, causing the pixel to electroluminesce. The conical structure end on the anode of the luminescent pixel loses electrons, generating a driving current that flows from the anode through the cathode, thereby illuminating the pixel.

[0053] The principles underlying the present invention are: a Tesla coil module device generates a high-frequency alternating electromagnetic field. The device consists of a coil power supply module and a Tesla coil module. The coil power supply module, comprised of a rectifier and filter circuit, a step-up and step-down circuit, an inverter circuit, and a frequency control circuit, provides the Tesla coil module with alternating current (AC) with adjustable amplitude and frequency. The Tesla coil module, comprised of a primary circuit and a secondary coil, generates a high-frequency alternating electromagnetic field when driven by AC current. A Nano-LED / Micro-LED to be tested is placed above the Tesla coil module device. The Nano-LED / Micro-LED device, exposed to the high-frequency alternating magnetic field, generates an induced voltage that breaks down in the air, generating a plasma jet. This plasma jet illuminates the Nano-LED / Micro-LED, enabling electroluminescence detection. This embodiment of the present invention can simultaneously illuminate multiple Nano-LEDs / Micro-LEDs, significantly improving detection efficiency. The Nano-LED / Micro-LED to be tested has a pointed cone-shaped structure or the electrode has a pointed cone-shaped structure. Due to the large curvature radius of the pointed cone, the Nano-LED / Micro-LED generates a large induced voltage in the high-frequency alternating electromagnetic field. The induced voltage breaks down the air to generate a plasma jet. Under the action of the electromagnetic field, the plasma charge is injected into the Nano-LED / Micro-LED to drive it to light up. The detection method provided in the embodiment of the present invention does not require a probe, thereby avoiding mechanical damage to the Nano-LED / Micro-LED caused by probe displacement during detection. In the embodiment of the present invention, the induced discharge intensity can be adjusted by adjusting the distance between the Nano-LED / Micro-LED and the Tesla coil module. In addition, the amplitude and frequency of the driving alternating current can be adjusted to control the intensity and frequency of the induced discharge. The higher the discharge frequency, the more obvious the high-frequency skin effect. Therefore, induced discharge of a certain frequency and intensity will not damage the Nano-LED / Micro-LED, and non-destructive testing can be achieved.

[0054] Step S3: collecting a luminous image of the luminous pixel array module to be inspected; and determining whether each luminous pixel is qualified based on the luminous image.

[0055] In this specific embodiment, the luminescence conditions and brightness data of the luminous pixels can be observed through an electron microscope and a photodetector.

[0056] In this specific embodiment, the mass detection device also includes an image acquisition module, and the electron microscope camera of the image acquisition module is arranged on the side facing the pointed cone-shaped structure end of the luminous pixel point. The shooting direction of the acquisition module avoids the Tesla coil module to perform image acquisition on the luminous pixel array module to be detected.

[0057] It should be noted that the above structural setting prevents the Tesla coil module from appearing in the image, thereby affecting the detection accuracy.

[0058] In this specific embodiment, step S3 includes:

[0059] Continuously collecting multiple luminous images of the luminous pixel array module to be detected;

[0060] According to each luminous image, obtaining the same luminous position in each luminous image;

[0061] Based on the same luminous position, the influence of arc brightness is eliminated to determine whether each luminous pixel point corresponding to each area is qualified; wherein, the arc is generated by the induced voltage generated by the luminous pixel point breaking through the air between the secondary side coil.

[0062] It should be noted that because the arc generated by air breakdown is pulsating and not completely fixed, it can be determined that the light emitted at the same location in multiple light-emitting images is caused by the light emitted by the light-emitting pixel, rather than the arc. In this way, the embodiments of the present invention can effectively reduce the impact of arc light on detection, thereby improving detection accuracy.

[0063] In this embodiment, a Tesla coil generates a high-frequency electromagnetic field to induce discharge in nano-LED / micro-LED pixels. The resulting charge and induced voltage generate electroluminescence (EL) in the nano-LED / micro-LED. Compared to probe-based testing, which requires constant contact and displacement of the probe, this embodiment illuminates the nano-LED / micro-LED simply by adjusting the distance between the nano-LED / micro-LED and the coil, and the intensity and frequency of the alternating electromagnetic field, significantly improving detection efficiency. Compared to non-contact, non-injection testing, this embodiment also avoids contact between the nano-LED / micro-LED and the probe. Due to the high-frequency skin effect, the discharge current does not damage the nano-LED / micro-LED, achieving non-destructive testing of the nano-LED / micro-LED. Furthermore, this method offers lower energy consumption and lower testing costs. Furthermore, this embodiment collects and comprehensively processes luminescence images of multiple luminescent pixels to eliminate the influence of the arc brightness generated by the Tesla coil on the pixel brightness, resulting in more accurate luminescence detection.

[0064] In summary, the embodiments of the present invention avoid damage to pixels during the detection process while improving detection efficiency and accuracy and saving detection energy consumption.

[0065] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or device comprising the element.

[0066] Each embodiment in this specification is described in a related manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiment is generally similar to the method embodiment, so the description is relatively simple. For related parts, refer to the description of the method embodiment.

[0067] The above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention are included in the scope of protection of the present invention.

Claims

1. A non-contact, probe-free method for mass detection of Nano-LED / Micro-LEDs, applied to a mass detection device, characterized in that: The mass detection device includes a coil power supply module, a Tesla coil module, and a light-emitting pixel array module to be detected. The coil power supply module is electrically connected to the Tesla coil module to power the Tesla coil module. The Tesla coil module includes a primary side circuit and a secondary side coil. The secondary side coil is used to perform electromagnetic induction with the primary side circuit to generate a high-frequency alternating electromagnetic field. The light-emitting pixel array module to be detected includes a plurality of Nano-LED light-emitting pixels or a plurality of Micro-LED light-emitting pixels. One end of the anode of each light-emitting pixel is provided with a conductive pointed cone structure end. The method includes: Step S1, placing the light-emitting pixel array module to be detected on the opposite side of the secondary side coil and making the pointed cone-shaped structure end of the light-emitting pixel point face the secondary side coil; Step S2: Controlling the coil power supply module to supply power so that the secondary-side coil generates a high-frequency alternating electromagnetic field. Each of the light-emitting pixels in the high-frequency alternating electromagnetic field generates an induced voltage and breaks down the air between the secondary-side coil to generate a plasma jet. Charges in the plasma jet are injected into the light-emitting pixel, causing the pixel to emit electroluminescence. The conical structure end on the anode of the light-emitting pixel loses electrons, generating a driving current that flows from the anode through the cathode, thereby lighting the pixel. Step S3: collecting a luminous image of the luminous pixel array module to be inspected; and determining whether each luminous pixel is qualified based on the luminous image.

2. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The mass detection device also includes an image acquisition module, and the electron microscope camera of the image acquisition module is arranged on the side facing the pointed cone-shaped structure end of the luminous pixel point. The shooting direction of the acquisition module avoids the Tesla coil module to acquire images of the luminous pixel array module to be detected.

3. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The step S3 comprises: Continuously collecting a plurality of the luminous images of the luminous pixel array module to be detected; Obtaining the same luminous position in each of the luminous images according to each of the luminous images; Based on the same luminous position, the influence of arc brightness is eliminated to determine whether each luminous pixel point corresponding to each area is qualified; wherein, the arc is generated by the induced voltage generated by the luminous pixel point breaking through the air between the secondary side coil.

4. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: After step S1, the method further includes: The distance between the secondary side coil and the end of the conical structure is adjusted according to the model of the light-emitting pixel and the field strength of the high-frequency alternating electromagnetic field provided by the Tesla coil module.

5. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The pointed cone-shaped structure end of the light-emitting pixel is the light-emitting pixel body or an electrode; when the pointed cone-shaped structure end is an electrode, the pointed cone-shaped structure end is transparent.

6. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The coil power supply module and the Tesla coil module are integrated and packaged; the secondary side coil is a planar PCB coil, and the radius range of the secondary side coil is 10cm-100cm. The radius range of the secondary side coil is adjusted according to the corresponding diameter of the luminous pixel array module to be detected.

7. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The coil power supply module includes a rectifier and filter circuit, a boost and buck circuit, an inverter circuit and a frequency control circuit; the coil power supply module provides any alternating current with an amplitude of 0V-20V and a frequency of 10kHz-3MHz.

8. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The secondary side coil and the pointed cone-shaped structure end are parallel to each other, and the distance between the secondary side coil and the pointed cone-shaped structure end is between 0.1 mm and 10 mm.

9. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The to-be-detected luminous pixel array module further includes a substrate, and the substrate is used to place each of the luminous pixel points.

10. The non-contact, probe-free Nano-LED / Micro-LED mass detection method according to claim 1, characterized in that: The diameter of the circular luminous pixel array module to be detected is in the range of 1 cm to 20 cm, and the diameter of a single luminous pixel is in the range of 20 nm to 100 μm.

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