Motor control device

Abstract

A motor control device (300) is provided with: a feed-forward controller (7) that generates a motor torque command and a motor position command; an encoder (4) that outputs a motor position detection value; a machine end sensor (2) that detects an object and outputs a measurement value; a signal processor (11) that calculates the position of the moving body on the basis of the measured value and outputs a machine end position detection value; and a feedback torque command generation unit (50) that generates a feedback torque command on the basis of the machine end position detection value, the motor position detection value, and the motor position command, and that generates a feedback torque command when the machine end sensor cannot detect the positional relationship between the moving body and the target point. A feedback torque command is generated on the basis of the motor position detection value and the motor position command, and when the machine end sensor is capable of detecting the positional relationship between the moving body and the target point. A feedback torque command is generated on the basis of the motor position detection value, the machine end position detection value, the motor position command, and a signal in which a delay time has been applied to the motor position command.

Description

Technical Field

[0001] The present invention relates to a motor control device for positioning a moving object relative to a target point. Background Art

[0002] In the manufacturing equipment of electronic equipment and semiconductors, it is necessary to perform positioning in a short time and with high precision so that the moving body of the device is moved to the target point and stopped. For example, in devices such as a mounter and a chip bonding machine that mount electronic components and IC (Integrated Circuit) chips on the target mounting position on the substrate, the electronic components and IC chips grasped by the front end of the moving body are positioned at the target mounting position on the substrate with high precision and installed on the substrate. In this device, a mounting head having a suction nozzle for adsorbing the electronic components and IC chips is equivalent to the moving body, and the moving body is moved within a specified range in the device by a rotary motor and a direct-acting mechanism or a linear motor mechanism. The mounting head moves to the area where the electronic components and IC chips are supplied and adsorbs the electronic components and IC chips by the suction nozzle. Next, it moves to the target mounting position on the substrate, releases the electronic components and IC chips from the suction nozzle, and thus installs them on the substrate.

[0003] The positioning of the mounting head is performed by feedback control based on the value detected by an encoder that detects the rotational position of a motor used in movement or the position of a linear motor. In other words, feedback control is not performed by directly detecting the positional relationship between the suction nozzle of the mounting head or the electronic component sucked by the suction nozzle and the target mounting position on the substrate.

[0004] In recent years, the miniaturization of electronic components and IC chips has continued to develop, requiring high-precision positioning. However, due to the offset and deformation of the substrate setting position, the target mounting position on the substrate is sometimes different for each individual. Therefore, if positioning is performed based only on the design value of the substrate and the detection value signal of the encoder, there is a possibility that the mounting position of the electronic component or IC chip will deviate from the specified position on the substrate.

[0005] In addition, in order to improve productivity in chip mounters and chip bonding machines, not only positioning accuracy is required, but also the time until electronic components and IC chips are adsorbed and released is required to be shortened. For example, the control device described in Patent Document 1 analyzes the image obtained by shooting a range including the object and target point of positioning control, creates measurement data of the positional relationship between the control object and the target point, and performs positioning using the measurement data and the encoder value of the motor. In image processing for analyzing an image to obtain measurement data, a predetermined time is required from obtaining the image to obtaining the measurement data, and this time becomes useless time and hinders the realization of high-speed control. Therefore, the control device described in Patent Document 1 uses the data of the position deviation between the target point and the control object calculated in the past, the encoder value used in the calculation of the data, and the latest encoder value to calculate the latest position deviation between the target point and the control object when the measurement data and the encoder value cannot be obtained at the same time.

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-3388 Summary of the invention

[0007] The control device described in Patent Document 1 can realize high-speed and high-precision positioning control. However, when a disturbance with a period shorter than the dead time is added, an error occurs in the estimated value of the position deviation between the target point and the controlled object, and the feedback control system using the estimated value may become unstable.

[0008] In addition, the situation that the detectable range is limited in the detection of position deviation using image processing has become a problem. For example, regarding the camera used when acquiring the image, if 1 pixel is 1μm and it can capture a range of 100mm square, 10 billion pixels are required, which requires a very high-performance camera and image processing. In the control device described in Patent Document 1, the target point is photographed by a fixed camera, thereby limiting the necessary shooting range. However, in the placement machine, it is necessary to position multiple target points on the substrate, and it is difficult to deal with target points in multiple parts by a fixed camera. Therefore, it is considered to carry a camera on the moving body and move the camera together with the moving body, so that the target points in multiple parts are respectively collected in the shooting range. In the case of the above-mentioned structure, the target point will not enter the shooting range until the moving body approaches the target point, so it is impossible to realize the control using the detection result obtained by image processing. When the target point is outside the shooting range, the control using only the detection result obtained by the encoder is performed. Moreover, after the moving body approaches the target point, it is necessary to switch to the control using the detection result obtained by image processing. At the time of switching, the detection result obtained by the encoder and the detection result obtained by image processing may deviate greatly due to the influence of dead time, and the moving object may move suddenly due to the switching.

[0009] In addition, the same problem will occur when using sensors other than cameras to obtain the relative position relationship between the target point and the moving body for control. For example, in a linear scale that is installed at the front end of a machine and can detect the position, the scale installation position is sometimes limited, and it takes time to obtain position information depending on the equipment, which will cause the same problem. The same problem will also occur when using a laser displacement sensor.

[0010] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to obtain a motor control device capable of high-speed and high-precision positioning.

[0011] In order to solve the above-mentioned problems and achieve the purpose, the present invention is a motor control device, which drives a motor based on a position instruction to move a movable body to a target point specified by the position instruction, and the motor control device has: a feedforward controller, which generates a motor torque instruction and a motor position instruction based on the position instruction; an encoder, which detects the position of the motor and outputs a motor position detection value signal indicating the position; a mechanical end sensor, which detects an object existing within a certain range including the movable body and outputs a measurement value signal indicating the detection result; a signal processor, which calculates the position of the movable body based on the target point based on the measurement value signal, and outputs a mechanical end position detection value signal indicating the calculation result; a feedback torque instruction generating unit, which generates a feedback torque instruction for correcting the motor torque instruction based on the mechanical end position detection value signal, the motor position detection value signal and the motor position instruction; and a torque signal adder, which adds the motor torque instruction and the feedback torque instruction to generate a torque instruction for the motor. The feedback torque command generating unit generates a feedback torque command based on the motor position detection value signal and the motor position command when the mechanical end sensor is unable to detect the relative position relationship between the moving body and the target point, i.e., the first state. The feedback torque command generating unit generates a feedback torque command based on the motor position detection value signal, the mechanical end position detection value signal, the motor position command, and a signal with a delay time applied to the motor position command when the mechanical end sensor is able to detect the relative position relationship between the moving body and the target point, i.e., the second state.

[0012] Effects of the Invention

[0013] The motor control device according to the present invention has the effect of being able to perform high-speed and high-precision positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a block diagram showing a configuration example of the motor control device according to the first embodiment.

[0015] Figure 2 This is a diagram showing an example of the relationship between a moving object and a machine-end sensor of the motor control device according to the first embodiment.

[0016] Figure 3 This is a diagram showing a configuration example in which the mechanical end sensor of the motor control device according to the first embodiment is a laser displacement meter.

[0017] Figure 4 This is a diagram showing a configuration example in which the mechanical end sensor of the motor control device according to the first embodiment is used as a linear scale.

[0018] Figure 5This is a flowchart showing an example of the operation of the motor control device according to the first embodiment.

[0019] Figure 6 This is a diagram showing an example of a control circuit that can be applied when realizing the motor control device according to the first embodiment.

[0020] Figure 7 This is a block diagram showing a configuration example of a motor control device according to the second embodiment.

[0021] Figure 8 This is a block diagram showing a configuration example of a motor control device according to the third embodiment.

[0022] Fig. 9 This is a block diagram showing a configuration example of a motor control device according to a fourth embodiment. DETAILED DESCRIPTION

[0023] Hereinafter, a motor control device according to an embodiment of the present invention will be described in detail with reference to the drawings.

[0024] Implementation method 1.

[0025] Figure 1 This is a block diagram showing a configuration example of a motor control device 300 according to the first embodiment. Figure 1 The motor control device 300 shown is a device that performs positioning control by driving the motor 3 based on the position command to move the moving body 1 to the target point 100 , which is the position specified by the position command.

[0026] exist Figure 1In the motor control device 300 shown, the moving body 1 is mechanically connected to the motor 3, and the motor 3 is operated to move to the desired position, that is, to the target point 100. The mechanical end sensor 2 is set to be able to detect an object existing in a certain range including the moving body 1, and detect the target point 100 when the target point 100 is included in the certain range. The encoder 4 detects the position of the motor 3, generates a signal indicating the position of the motor 3, and outputs it as a motor position detection value signal. The motor position detection value signal output by the encoder 4 is input to the position signal subtractor 6 via the detection value signal switch 5. The FF (Feed Forward) controller 7 receives the position command for moving the moving body 1 to the target point 100, generates a motor position command and a motor torque command, and outputs them. The motor position command is input to the position signal subtractor 6 via the command value switch 8. The position signal subtractor 6 calculates the difference between the output value of the detection value signal switch 5 and the output value of the command value switch 8 to generate a position error signal, and inputs it to the FB (Feed Back) controller 9. The FB controller 9 calculates the FB torque command for correcting the position of the mobile body 1 based on the position error signal. The FB torque command is input to the torque signal adder 10. The torque signal adder 10 adds the FB torque command to the motor torque command to correct the motor torque command, and outputs the corrected motor torque command as a torque command to the motor 3. The motor 3 generates torque in accordance with the torque command output by the torque signal adder 10, so that the mobile body 1 moves.

[0027] The mechanical end sensor 2 outputs a signal including information on the relative positional relationship between the moving body 1 and the target point 100 to the signal processor 11. In addition, when the target point 100 is included in the range that the mechanical end sensor 2 can detect, that is, when the mechanical end sensor 2 can detect the target point 100, the signal output by the mechanical end sensor 2 includes information on the relative positional relationship between the moving body 1 and the target point 100. Based on the information on the relative positional relationship between the moving body 1 and the target point 100 included in the output signal of the mechanical end sensor 2, the signal processor 11 calculates the position of the moving body 1 based on the position of the target point 100, generates and outputs a mechanical end position detection value signal including information on the calculation result. When the signal output by the mechanical end sensor 2 does not include information on the relative positional relationship between the moving body 1 and the target point 100, the signal processor 11 may output a mechanical end position detection value signal not including the calculation result, or may not output a mechanical end position detection value signal. The mechanical end position detection value signal is input to the adder 14 via the first low-pass filter 12 through which a signal with a frequency less than or equal to a predetermined frequency passes. In addition, the motor position detection value signal output from the encoder 4 is input to the adder 14 via the first high-pass filter 13 through which a signal having a frequency greater than or equal to a predetermined frequency passes. The adder 14 as the first adder of the motor control device 300 adds the input signal from the first low-pass filter 12 and the input signal from the first high-pass filter 13, and outputs the addition result as a target point detection value signal. The target point detection value signal output from the adder 14 is input to the detection value signal switch 5.

[0028] The motor position command outputted by the FF controller 7 is inputted to the adder 18 via the second low-pass filter 16 through which a signal with a frequency less than or equal to a prescribed frequency passes, after a predetermined time delay is generated by the motor position command delay device 15, that is, after a delay time is added. In addition, the motor position command outputted by the FF controller 7 is inputted to the adder 18 via the second high-pass filter 17 through which a signal with a frequency greater than or equal to a prescribed frequency passes. The adder 18 as the second adder of the motor control device 300 adds the input signal from the second low-pass filter 16 and the input signal from the second high-pass filter 17, and outputs the addition result as a target point command. The target point command outputted by the adder 18 is inputted to the command value switch 8.

[0029] The switching determination unit 19 determines which of the two signals respectively input to the detection value signal switch 5 and the command value switch 8 is to be output, based on the motor position detection value signal output from the encoder 4 .

[0030] In addition, in the motor control device 300, the detection value signal switch 5, the position signal subtractor 6, the command value switch 8, the FB controller 9, the first low-pass filter 12, the first high-pass filter 13, the adders 14, 18, the motor position command delay 15, the second low-pass filter 16, the second high-pass filter 17 and the switching determiner 19 constitute the FB torque command generating unit 50.

[0031] Next, Figure 1 The operation of the motor control device 300 shown in FIG. Figure 2 As shown, a camera 200 is provided as the mechanical end sensor 2. Figure 2 1 is a diagram showing an example of a relationship between a moving object 1 and a machine end sensor 2 in a motor control device 300 according to Embodiment 1. Figure 2 In FIG. 1 , the arrow indicates the direction in which the moving body 1 moves. Figure 2 In the example shown, the camera 200 as the mechanical end sensor 2 is installed on the mobile body 1, and if the mobile body 1 approaches the target point 100, the target point 100 can be photographed. In addition, the mobile body 1 is equipped with a mounting nozzle 101 that can absorb the electronic component 102. Sometimes, a structure in which an inspector or the like is installed instead of the mounting nozzle 101 is installed. In addition, the motor control device 300 performs the following operations, namely, positioning the mobile body 1 relative to the target point 100, setting the sucked electronic component 102 relative to the target point 100 by releasing it, inspecting the target point 100 by bringing the mounted inspector into contact instead of the mounting nozzle 101, etc. In the above operations, high precision is required, and the electronic component 102 (or the inspector) sucked by the mounting nozzle 101 needs to be positioned with high precision relative to the target point 100, that is, the mobile body 1 needs to be positioned with high precision relative to the target point 100.

[0032] In addition, as another structure, Figure 3 and Figure 4 The motor control device 300. Figure 3 In the motor control device 300 of the illustrated configuration example, the laser displacement meter 201 is provided at a fixed position relative to the target point 100 so that the position of the moving body 1 relative to the target point 100 can be measured. Figure 3 In the example shown, the laser displacement meter 201 is equivalent to Figure 1 The mechanical end sensor 2 is shown. In addition, Figure 4 In the motor control device 300 of the illustrated configuration example, a linear scale reading unit 202 is mounted on the moving body 1, and a linear scale unit 203 is provided at a fixed position relative to the target point 100, so that the position of the moving body 1 relative to the target point 100 can be measured. Figure 4In the example shown, the linear scale reading unit 202 and the scale unit 203 correspond to Figure 1 The mechanical end sensor 2 is shown.

[0033] The driving source of the mobile body 1 is the motor 3, and the motor 3 generates torque in accordance with the motor torque command output by the FF controller 7, thereby the mobile body 1 moves. The FF controller 7 calculates the ideal torque to be output by the motor 3 by a calculation equivalent to the second-order differential for the command signal for moving the mobile body 1 to the target point 100, and outputs it as the motor torque command. That is, the mobile body 1 moves to the target point 100 based on the position command. However, even if the motor 3 generates torque in accordance with the motor torque command, the motor position, that is, the position of the mobile body 1, will have a tracking error with the position command due to friction and other interference. Therefore, the encoder 4 detects the position of the motor 3 and outputs it as a motor position detection value signal, and the FF controller 7 calculates the ideal position to which the motor 3 should move according to the position command and outputs it as a motor position command. Regarding the difference between the motor position detection value signal and the motor position command, the position error signal representing the error between the position of the mobile body 1 and the target point 100 is calculated by the position signal subtractor 6 and input to the FB controller 9. The FB controller 9 calculates the FB torque command in such a manner that the position error signal is set to 0, and the motor 3 generates a torque corresponding to the FB torque command. That is, the motor 3 generates a torque corresponding to the torque command generated by adding the motor torque command calculated by the FF controller 7 and the FB torque command calculated by the FB controller 9 by the torque signal adder 10, so that the moving body 1 moves in a manner that follows the position command.

[0034] Here, in the case where mechanical deformation or positional offset of the target point 100 occurs, the motor 3 generates torque only in accordance with the position command and the motor position detection value signal output by the encoder 4, and an error occurs between the moving body 1 and the target point 100. Therefore, in the motor control device 300, the mechanical end sensor 2 detects the relative positional relationship between the target point 100 and the moving body 1, and outputs the detection result as a measurement value signal. Based on the measurement value signal output by the mechanical end sensor 2, the signal processor 11 calculates the position of the moving body 1 with respect to the position of the target point 100, and outputs the calculation result as a mechanical end position detection value signal. The structure of the mechanical end sensor 2 included in the motor control device 300 is given as follows: Figure 2 , Figure 3 and Figure 4 This processing is described as follows.

[0035] At the mechanical end, the sensor 2 and the moving body 1 are Figure 2In the case of the structure shown, the target point 100 is photographed by the camera 200, and its image is sent to the signal processor 11 as a measurement value signal. The signal processor 11 detects the position of the target point 100 based on the image input as the measurement value signal, calculates the position of the electronic component 102 based on the target point 100, and outputs the calculation result as a mechanical end position detection value signal. In addition, the relationship between the electronic component 102 and the moving body 1 is fixed, so the signal processor 11 can generate and output a mechanical end position detection value signal representing the position of the moving body 1 based on the target point 100. In this case, the value of the position instruction input to the FF controller 7 becomes a value obtained by considering the positional relationship between the electronic component 102 adsorbed by the installation nozzle 101 set on the moving body 1 and the moving body 1. In the following description, for simplicity, it is assumed that the mechanical end position detection value signal represents the position of the moving body 1.

[0036] In addition, the mechanical end sensor 2 and the moving body 1 are Figure 3 In the case of the structure shown, the position of the moving body 1 is measured by the laser displacement meter 201 at a fixed position relative to the target point 100, and the signal of the measurement result is sent from the laser displacement meter 201 to the signal processor 11 as a measurement value signal. The signal processor 11 calculates the position of the moving body 1 based on the target point 100 based on the measured position of the moving body 1, and outputs the calculation result as a mechanical end position detection value signal.

[0037] In addition, the mechanical end sensor 2 and the moving body 1 are Figure 4 In the case of the structure shown, the scale portion 203 of the linear scale at a fixed position relative to the target point 100 is read by the reading portion 202 of the linear scale installed on the moving body 1, thereby measuring the position of the moving body 1, and the measurement result is sent to the signal processor 11 as a measurement value signal by the reading portion 202. The signal processor 11 calculates the position of the moving body 1 based on the target point 100 based on the measured position of the moving body 1, and outputs the calculation result as a mechanical end position detection value signal.

[0038] In addition, in this embodiment, the mechanical end sensor 2 and the signal processor 11 are set as separate structures, but they can also be integrated. For example, it can be configured that the signal processor 11 is included in the mechanical end sensor 2, that is, the mechanical end sensor 2 calculates the position of the moving body 1 based on the target point 100 and outputs a mechanical end position detection value signal.

[0039] If the motor is operated in such a manner as to suppress the error generated between the moving body 1 and the target point 100 using the mechanical end position detection value signal calculated as described above, the error generated between the moving body 1 and the target point 100 can be suppressed. However, the time required to forward the measurement result of the mechanical end sensor 2 to the signal processor 11 and the time required until the mechanical end position detection value signal is output after the signal processor 11 performs signal processing are long, that is, the dead time is large, so if the high-response FB control using only the mechanical end position detection value signal is performed, the FB control system becomes unstable.

[0040] In order to cope with the above situation, the motor control device 300 uses the first low-pass filter 12 that allows signals with a frequency less than or equal to a specified frequency to pass through, and extracts only the low-frequency component of the mechanical end position detection value signal. In addition, the first high-pass filter 13 that allows signals with a frequency greater than or equal to a specified frequency to pass through is used to extract only the high-frequency component from the motor position detection value signal for FB control. The low-frequency component of the mechanical end position detection value signal and the high-frequency component of the motor position detection value signal are added by the adder 14 and output as a target point detection value signal. When the error between the moving body 1 and the target point 100 changes without vibration, the error is represented by the low-frequency component, so the information is retained in the low-frequency component of the mechanical end position detection value signal. In addition, in FB control, the influence of the dead time of the low frequency is small, so the instability of the FB control is suppressed. Moreover, the high-frequency component of the motor position detection value signal is also used for FB control, so that high-response FB control can be achieved.

[0041] In addition, when the mechanical end sensor 2 is used as a sensor for positioning control, the range in which the relative positional relationship between the target point 100 and the moving body 1 can be measured is limited, which is a problem. When the target point 100 or the moving body 1 moves and enters the range in which the relative positional relationship can be measured, the mechanical end sensor 2 outputs a measurement value signal including information on the relative positional relationship between the target point 100 and the moving body 1, and the position of the moving body 1 based on the position of the target point 100 can be calculated by the signal processor 11. Therefore, until the mechanical end sensor 2 can measure the relative positional relationship between the target point 100 and the moving body 1, the motor position detection value signal is used for control, and when the relative positional relationship between the target point 100 and the moving body 1 is obtained, the control is switched to the target point detection value signal. Specifically, in the motor control device 300, the detection value signal switch 5 switches the signal used for FB control. The switching judgment unit 19 judges whether the mechanical end sensor 2 obtains the relative positional relationship between the target point 100 and the moving body 1 based on the motor position detection value signal, and instructs the detection value signal switch 5 to switch the signal according to the judgment result. That is, the switching judgment unit 19 calculates the position of the moving body 1 based on the motor position detection value signal, and in the case where it is judged that the moving body 1 is close to the target point 100 to the extent that the mechanical end sensor 2 can obtain the relative positional relationship between the target point 100 and the moving body 1, the detection value signal switch 5 is instructed to switch to the output of the target point detection value signal.

[0042] If the detection value signal switch 5 receives the instruction from the switching judgement device 19 that the moving body 1 and the target point 100 are close to the degree that the mechanical end sensor 2 can obtain the relative positional relationship between the target point 100 and the moving body 1, the signal input to the position signal subtractor 6 is switched from the motor position detection value signal to the target point detection value signal. At this time, the position error signal input to the FB controller 9 suddenly changes, and the FB torque command output by the FB controller 9 may change significantly. A large change in the FB torque command will cause an impact on the moving body 1, so it needs to be suppressed. Therefore, the motor control device 300 changes the other input of the position signal subtractor 6, that is, the motor position command, through the command value switch 8. This action is described below. The motor control device 300 adds a delay equivalent to the useless time from the measurement of the mechanical end sensor 2 to the output of the mechanical end position detection value signal by the signal processor 11 to the motor position command through the motor position command delay 15. In addition, the second low-pass filter 16 that allows a signal of a frequency less than or equal to a specified frequency to pass through is used to extract only the low-frequency component of the motor position command to which a delay is added. The frequency at this time is the same as that of the first low-pass filter 12, and the signal of the low-frequency component of the motor position command to which a delay is added through the motor position command delay device 15 is equivalent to the command signal for the low-frequency component of the mechanical end position detection value signal. In addition, the second high-pass filter 17 that allows a signal of a frequency greater than or equal to a specified frequency to pass through is used to extract only the high-frequency component of the motor position command. The frequency at this time is the same as that of the first high-pass filter 13, and the signal of the high-frequency component of the motor position command is equivalent to the command signal for the high-frequency component of the motor position detection value signal. In addition, the two signals outputted by the second low-pass filter 16 and the second high-pass filter 17 are added by the adder 18 and outputted to the command value switch 8 as a target point command. This signal is equivalent to the command signal for the target point detection value signal. Then, the command value switch 8 switches from the motor position command to the target point command and outputs the command simultaneously with the switching of the signal in the detection value signal switch 5 according to the determination of the switching determination device 19 .

[0043] That is, when the switching judgement device 19 judges that the moving body 1 and the target point 100 are close to the extent that the mechanical end sensor 2 can obtain the relative positional relationship between the target point 100 and the moving body 1, the switching judgement device 19 instructs the detection value signal switch 5 and the command value switch 8 to switch the output signals. The detection value signal switch 5 receiving the instruction from the switching judgement device 19 changes the internal setting in a manner to output the target point detection value signal input from the adder 14, and the command value switch 8 receiving the instruction from the switching judgement device 19 changes the internal setting in a manner to output the target point command input from the adder 18.

[0044] The switching determination unit 19 operates as described above, and switches the signal output by the detection value signal switch 5 and the signal output by the command value switch 8, whereby the position signal subtractor 6 calculates the error of the motor position detection value signal with respect to the motor position command when the relative position relationship between the target point 100 and the moving body 1 cannot be measured by the mechanical end sensor 2, that is, when the distance from the target point 100 to the moving body 1 is greater than a predetermined value, and inputs a position error signal as a calculation result to the FB controller 9. On the other hand, when the relative position relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the position signal subtractor 6 calculates the error of the target point detection value signal with respect to the target point command, and inputs a position error signal as a calculation result to the FB controller 9. The FB controller 9 calculates the FB torque command for correcting the position of the moving body 1 according to the position error signal input from the position signal subtractor 6.

[0045] If the above operation of the motor control device 300 is represented by a flowchart, it becomes Figure 5 .also, Figure 5 This is a flowchart showing an example of the operation of motor control device 300 according to the first embodiment.

[0046] The motor control device 300 first determines whether position detection can be performed by the mechanical end sensor 2, that is, whether the relative position relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2 (step S11). This determination is made by the switching determination unit 19 based on the motor position detection value signal indicating the position of the motor 3 detected by the encoder 4.

[0047] When the relative positional relationship between the moving body 1 and the target point 100 cannot be measured by the mechanical end sensor 2 (step S11: No), the motor control device 300 generates a position error signal indicating the error between the position of the moving body 1 and the target point 100 based on the motor position detection value signal (step S12). On the other hand, when the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2 (step S11: Yes), the motor control device 300 generates a position error signal based on the motor position detection value signal and the mechanical end position detection value signal indicating the position of the moving body 1 with respect to the target point 100 (step S13).

[0048] After executing step S12 or step S13 to generate a position error signal, the motor control device 300 corrects the motor torque command for the motor 3 based on the position error signal to generate a torque command and controls the motor 3 (step S14 ).

[0049] The motor control device 300 causes the moving object 1 to approach the target point 100 by repeating the processing of steps S11 to S14 .

[0050] As described above, in the motor control device 300 according to the present embodiment, before the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the motor position detection value signal indicating the position of the motor 3 detected by the encoder 4 to calculate the FB torque command for correcting the position of the moving body 1. After the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the mechanical end position detection value signal indicating the position of the moving body 1 with the target point 100 as a reference detected based on the measurement value signal indicating the measurement result obtained by the mechanical end sensor 2 and the target point detection value signal calculated using the motor position detection value signal to calculate the FB torque command. Thus, control can be performed so that the error between the moving body 1 and the target point 100 becomes 0. In addition, the motor position command and the target point command are switched and used for FB control in accordance with the switching of the motor position detection value signal and the target point detection value signal. Thus, it is possible to suppress abrupt changes in the input to the FB controller 9, and prevent a large change in the FB torque command when the signal is switched. According to the motor control device 300 involved in this embodiment, even when a sensor with a long useless time for position detection or a limited detection range is used as the mechanical end sensor 2 to detect the position deviation between the moving body 1 and the target point 100, high-speed and high-precision positioning can be performed.

[0051] In addition, in this embodiment, the switching judgement device 19 judges whether the relative position relationship between the target point 100 and the movable body 1 can be measured by the mechanical end sensor 2 based on the motor position detection value signal, but the judgment can also be made using the position instruction, the motor position instruction or the mechanical end position detection value signal.

[0052] In addition, the switching judgment unit 19 judges whether the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, and is set to switch the signals output by the detection value signal switch 5 and the command value switch 8. However, if the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the switching can be performed at any timing. For example, the switching judgment unit 19 can compare the motor position detection value signal, the position command, the motor position command, or the mechanical end position detection value signal with a preset threshold value, and judge the switching when the distance from the moving body 1 to the target point 100 reaches a predetermined value.

[0053] In addition, the frequencies of the signals to be passed are preferably set to be the same in the first low-pass filter 12 and the second low-pass filter 16, but they may be different frequencies. Similarly, the frequencies of the signals to be passed are preferably set to be the same in the first high-pass filter 13 and the second high-pass filter 17, but they may be different frequencies.

[0054] Next, the hardware structure of the motor control device 300 is described. As described above, the motor control device 300 is constructed by appropriately combining arithmetic circuits such as adders and subtractors, filter circuits such as high-pass filters and low-pass filters, switches, delay devices, encoders, cameras, laser displacement meters, and the like. In addition, the FF controller 7, the FB controller 9, the signal processor 11, and the switching determiner 19 are composed of a dedicated processing circuit or a general-purpose processor that executes a program. Examples of dedicated processing circuits are ASIC (Application Specific Integrated Circuit), FPGA (Field Programmable Gate Array), or a circuit composed of a combination of these. In addition, in the case where the FF controller 7, the FB controller 9, the signal processor 11, and the switching determiner 19 are constructed by a general-purpose processor, for example, a general-purpose processor is used. Figure 6 The processor 91 and memory 92 shown in the figure constitute a control circuit. Figure 61 is a diagram showing an example of a control circuit that can be applied when realizing the motor control device 300 involved in Embodiment 1. The processor 91 is a CPU (also called Central Processing Unit, central processing unit, processing unit, computing unit, microprocessor, microcomputer, DSP (Digital Signal Processor)), system LSI (Large Scale Integration), etc. The memory 92 is a RAM (Random Access Memory), ROM (Read Only Memory), EPROM (Erasable Programmable Read Only Memory), EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory), etc. In the memory 92, programs that describe the functions of the FF controller 7, FB controller 9, signal processor 11 and switching judge 19 are stored. The processor 91 executes the program stored in the memory 92, thereby operating as the FF controller 7, FB controller 9, signal processor 11 and switching judge 19. In addition, part of the FF controller 7, FB controller 9, signal processor 11 and switching judge 19 can be configured by a dedicated processing circuit such as ASIC, and the remaining part can be configured by a dedicated processing circuit such as ASIC. Figure 6 The control circuit shown.

[0055] Implementation method 2.

[0056] Figure 7 This is a block diagram showing a configuration example of a motor control device 300 a according to the second embodiment.

[0057] Figure 7 The motor control device 300a shown is Figure 1 Compared with the motor control device 300 involved in the embodiment 1 shown in the figure, the structure of the processing module that generates the position error signal that becomes the input signal to the FB controller 9 is different. Specifically, the motor control device 300a is a structure in which the detection value signal switch 5, the position signal subtractor 6, the command value switch 8, the first low-pass filter 12, the first high-pass filter 13, the adder 14, the second low-pass filter 16, the second high-pass filter 17, the adder 18 and the switching determination device 19 of the motor control device 300 are replaced by the position signal subtractor 6a, the first low-pass filter 12a, the first high-pass filter 13a, the adder 14a, the second low-pass filter 16a, the second high-pass filter 17a, the adder 18a, the switching determination device 19a, the first switch 20 and the second switch 21. Regarding other structural elements with the same reference numerals, since they are the same as those in the embodiment 1, Figure 1 The same, therefore the description is omitted.

[0058] In addition, in the motor control device 300a, the position signal subtractor 6a, the FB controller 9, the first low-pass filter 12a, the first high-pass filter 13a, the adders 14a, 18a, the motor position command delay 15, the second low-pass filter 16a, the second high-pass filter 17a, the switching determiner 19a, the first switch 20 and the second switch 21 constitute the FB torque command generating unit 50a.

[0059] Next, Figure 7 The operation of the motor control device 300a shown in the figure is explained. The motor position detection value signal and the mechanical end position detection value signal are input to the first switch 20. The first switch 20 outputs one of the two input signals. The first low-pass filter 12a allows a signal less than or equal to a specified frequency to pass through the output of the first switch 20, and inputs it to the adder 14a. The first high-pass filter 13a allows a signal greater than or equal to a specified frequency to pass through the motor position detection value signal, and inputs it to the adder 14a. The adder 14a adds the two input signals to generate an FB position detection value signal and outputs it. The switching determiner 19a determines which of the motor position detection value signal and the mechanical end position detection value signal is output from the first switch 20 based on the motor position detection value signal. Here, when the motor position detection value signal is outputted from the first switch 20, the first low-pass filter 12a and the first high-pass filter 13a are set so that the result obtained by adding the motor position detection value signal after passing through the first low-pass filter 12a and the motor position detection value signal after passing through the first high-pass filter 13a is the same as the motor position detection value signal just outputted from the encoder 4. By setting it as the above, the adder 14a outputs the motor position detection value signal as the FB position detection value signal when the relative position relationship between the target point 100 and the moving body 1 cannot be measured by the mechanical end sensor 2, and when the relative position relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, a signal equivalent to the target point detection value signal described in the first embodiment can be outputted as the FB position detection value signal.

[0060] The second switch 21 is input with a motor position command and a motor position command with a delay added thereto outputted by the motor position command delay device 15. The second switch 21 outputs one of the two input signals. The second low-pass filter 16a allows a signal less than or equal to a prescribed frequency to pass through the output of the second switch 21 and input it to the adder 18a. The second high-pass filter 17a allows a signal greater than or equal to a prescribed frequency to pass through the output of the motor position command and input it to the adder 18a. The adder 18a adds the two input signals to generate an FF position command and outputs it. The switching determiner 19a controls the switching of the signal outputted by the second switch 21 at the same timing as the timing of switching the signal outputted by the above-mentioned first switch 20 based on the motor position detection value signal. Specifically, the switching determination device 19a controls the first switch 20 and the second switch 21 in such a manner that the output of the first switch 20 is switched from the motor position detection value signal to the mechanical end position detection value signal, and the output of the second switch 21 is switched from the motor position command to the motor position command with a delay added. Here, when the motor position command is output by the second switch 21, the second low-pass filter 16a and the second high-pass filter 17a are set in such a manner that the result obtained by adding the motor position detection value signal after passing through the second low-pass filter 16a and the motor position command after passing through the second high-pass filter 17a becomes the same as the motor position command just output from the FF controller 7. By setting it to the above-mentioned manner, the adder 18a outputs the motor position command as the FF position command when the relative position relationship between the target point 100 and the moving body 1 cannot be measured by the mechanical end sensor 2. If the relative position relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, a signal equivalent to the target point command described in Implementation Example 1 can be output as the FF position command.

[0061] The position signal subtractor 6a calculates the difference between the FB position detection value signal and the FF position command to generate a position error signal, and inputs it to the FB controller 9. The FB controller 9 calculates the FB torque command for correcting the position of the moving body 1 based on the position error signal.

[0062] As described above, in the motor control device 300a according to the present embodiment, before the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the FB position detection value signal equivalent to the motor position detection value signal indicating the position of the motor 3 detected by the encoder 4 to calculate the FB torque command for correcting the position of the moving body 1, and after the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the FB position detection value signal equivalent to the target point detection value signal described in Embodiment 1 that can be calculated based on the mechanical end position detection value signal and the motor position detection value signal to calculate the FB torque command. Thus, control can be performed so that the error between the moving body 1 and the target point 100 becomes 0. In addition, the timing of switching the signal output by the adder 14a as the FB position detection value signal and the timing of switching the signal output by the adder 18a as the FF position command are the same, and the switching judgment device 19a controls the first switch 20 and the second switch 21. As a result, it is possible to suppress the rapid change of the input to the FB controller 9, prevent a large change in the FB torque command when the signal is switched, and achieve stable positioning control. In addition, the output of the first switch 20 passes through the first low-pass filter 12a, and the output of the second switch 21 passes through the second low-pass filter 16a, thereby suppressing the sudden change of the value that may occur during switching, and achieving stable positioning control.

[0063] In addition, in this embodiment, the switching judgement device 19a judges whether the relative position relationship between the target point 100 and the movable body 1 can be measured by the mechanical end sensor 2 based on the motor position detection value signal, but the judgment can also be made using the position instruction, the motor position instruction or the mechanical end position detection value signal.

[0064] In addition, the switching judgment unit 19a judges whether the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, and switches the signals output by the first switch 20 and the second switch 21. However, if the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the switching can be performed at any timing. For example, the switching judgment unit 19a can compare the motor position detection value signal, the position command, the motor position command, or the mechanical end position detection value signal with a preset threshold value, and judge the switching when the distance from the moving body 1 to the target point 100 reaches a predetermined value.

[0065] In addition, it is preferred that the frequencies of the signals to be passed set in the first low-pass filter 12a and the second low-pass filter 16a are the same, but they may be different frequencies. Similarly, it is preferred that the frequencies of the signals to be passed set in the first high-pass filter 13a and the second high-pass filter 17a are the same, but they may be different frequencies.

[0066] Implementation method 3.

[0067] Figure 8 This is a block diagram showing a configuration example of a motor control device 300 b according to the third embodiment.

[0068] Figure 8 The motor control device 300b shown is Figure 7 Compared with the motor control device 300a involved in the second embodiment shown in FIG. 1 , the structure of the processing module that generates the position error signal that becomes the input signal to the FB controller 9 is different. Specifically, the motor control device 300b is a structure in which the second low-pass filter 16a, the switching determination device 19a, and the first switch 20 of the motor control device 300a are replaced with the second low-pass filter 16b, the switching determination device 19b, and the switch 20b, and the motor position detection value delay device 22 is added, and the second switch 21 is omitted. Regarding other structural elements with the same reference numerals, Figure 7 The same, therefore the description is omitted.

[0069] In addition, in the motor control device 300b, the position signal subtractor 6a, the FB controller 9, the first low-pass filter 12a, the first high-pass filter 13a, the adders 14a, 18a, the motor position command delay 15, the second low-pass filter 16b, the second high-pass filter 17a, the switching determiner 19b, the switch 20b and the motor position detection value delay 22 constitute the FB torque command generating unit 50b.

[0070] Next, Figure 8The operation of the motor control device 300b shown in FIG. 2 is described. The motor position detection value delay device 22 adds a predetermined time delay to the motor position detection value signal input from the encoder 4 and outputs it to the switch 20b. The motor position detection value delay device 22 adds a time delay based on a dead time equivalent to the time required from the measurement by the mechanical end sensor 2 to the output of the mechanical end position detection value signal by the signal processor 11 to the motor position detection value signal, thereby being able to have the same dead time as the mechanical end position detection value signal. The first low-pass filter 12a passes a signal less than or equal to a prescribed frequency to the output of the switch 20b, and inputs it to the adder 14a. The first high-pass filter 13a passes a signal greater than or equal to a prescribed frequency to the motor position detection value signal, and inputs it to the adder 14a. The adder 14a adds the two input signals to generate an FB position detection value signal and outputs it. The switching determination unit 19b determines which of the motor position detection value signal to which a time delay is added by the motor position detection value delay unit 22 and the machine end position detection value signal to be output from the switch 20b based on the motor position detection value signal.

[0071] The second low-pass filter 16b passes a signal having a frequency less than or equal to a predetermined frequency to the motor position command to which a time delay is added by the motor position command delay device 15, and inputs the signal to the adder 18a. The second high-pass filter 17a passes a signal having a frequency greater than or equal to a predetermined frequency to the motor position command, and inputs the signal to the adder 18a. The adder 18a adds the two input signals to generate an FF position command and outputs the FF position command.

[0072] The position signal subtractor 6a calculates the difference between the FB position detection value signal and the FF position command to generate a position error signal, and inputs it to the FB controller 9. The FB controller 9 calculates the FB torque command for correcting the position of the moving body 1 based on the position error signal.

[0073] Here, the value after passing through the first low-pass filter 12a and the value after passing through the second low-pass filter 16b have a dead time or a time delay of the same length as the dead time. Therefore, it is possible to control so that the high frequency component of the motor position detection value signal follows the high frequency component of the FF position command, and the low frequency component of the motor position detection value signal or the mechanical end position detection value signal with a delay follows the low frequency component of the FF position command. The switching determination unit 19b outputs the value calculated only from the motor position detection value signal as the FB position detection value signal from the adder 14a when the relative positional relationship between the target point 100 and the moving body 1 cannot be measured by the mechanical end sensor 2, and switches the setting of the switch 20b so that the value calculated from the motor position detection value signal and the mechanical end position detection value signal is output from the adder 14a as the FB position detection value signal when the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2. Thus, the motor control device 300 b can perform control so that the error between the moving object 1 and the target point 100 becomes zero.

[0074] As described above, in the motor control device 300b involved in this embodiment, before the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the motor position detection value signal indicating the position of the motor 3 detected by the encoder 4 to calculate the FB torque command for correcting the position of the moving body 1, and after the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the FB controller 9 uses the FB position detection value signal calculated from the mechanical end position detection value signal and the motor position detection value signal to calculate the FB torque command. Thus, control can be performed so that the error between the moving body 1 and the target point 100 becomes 0. In addition, by eliminating the switching of the FF position command regardless of the FB position detection value signal, the control system can be simplified. In addition, a time delay equal to the useless time of the mechanical end position detection value signal is given to the motor position detection value signal input to the switch 20b, and the output of the switch 20b passes through the first low-pass filter 12a, thereby suppressing the sudden change in value that may occur when the output signal is switched by the switch 20b, thereby achieving stable positioning control.

[0075] In addition, in this embodiment, the switching judgement device 19b judges whether the relative position relationship between the target point 100 and the movable body 1 can be measured by the mechanical end sensor 2 based on the motor position detection value signal, but the judgment can also be made using the position instruction, the motor position instruction or the mechanical end position detection value signal.

[0076] In addition, the switching judgment unit 19b judges whether the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, and switches the signal output by the switch 20b. However, if the relative positional relationship between the target point 100 and the moving body 1 can be measured by the mechanical end sensor 2, the switching can be performed at any timing. For example, the switching judgment unit 19b can compare the motor position detection value signal, the position command, the motor position command, or the mechanical end position detection value signal with a preset threshold value, and judge the switching when the distance from the moving body 1 to the target point 100 reaches a predetermined value.

[0077] In addition, it is preferred that the frequencies of the signals to be passed set in the first low-pass filter 12a and the second low-pass filter 16b are the same, but they may be different frequencies. Similarly, it is preferred that the frequencies of the signals to be passed set in the first high-pass filter 13a and the second high-pass filter 17a are the same, but they may be different frequencies.

[0078] Implementation method 4.

[0079] Fig. 9 This is a block diagram showing a configuration example of a motor control device 300 c according to the fourth embodiment.

[0080] Fig. 9 The motor control device 300c shown is Figure 8 Compared with the motor control device 300b involved in the third embodiment shown in FIG. 1 , the structure of the processing module that generates the position error signal that becomes the input signal to the FB controller 9 is different. Specifically, the motor control device 300c is a structure in which the position signal subtractor 6a, the first low-pass filter 12a, the adder 14a, and the adder 18a of the motor control device 300b are replaced with the position signal subtractor 6c, the first low-pass filter 12c, the adder 14c, and the adder 18c, and the switch 20b, the switching determination device 19b, and the motor position detection value delay device 22 are omitted. Regarding other structural elements with the same reference numerals, the same as those in FIG. 1 and FIG. 1 are different from those in FIG. Figure 8 The same, therefore the description is omitted.

[0081] In addition, in the motor control device 300c, the position signal subtractor 6c, the FB controller 9, the first low-pass filter 12c, the first high-pass filter 13a, the adders 14c, 18c, the motor position command delay 15, the second low-pass filter 16b and the second high-pass filter 17a constitute the FB torque command generating unit 50c.

[0082] Next, Fig. 9The operation of the motor control device 300c shown in FIG. 1 is described. The first low-pass filter 12c allows a signal with a frequency less than or equal to a predetermined frequency to pass through the mechanical end position detection value signal, and inputs it to the adder 14c. The first high-pass filter 13a allows a signal with a frequency greater than or equal to a predetermined frequency to pass through the motor position detection value signal, and inputs it to the adder 14c. The adder 14c adds the two input signals to generate a target point detection value signal and outputs it.

[0083] The second low-pass filter 16b passes a signal having a frequency less than or equal to a predetermined frequency to the motor position command to which a time delay is added by the motor position command delay device 15, and inputs the signal to the adder 18c. The second high-pass filter 17a passes a signal having a frequency greater than or equal to a predetermined frequency to the motor position command, and inputs the signal to the adder 18c. The adder 18c adds the two input signals to generate a target point command and outputs the result.

[0084] The position signal subtractor 6c calculates the difference between the target point detection value signal and the target point command to generate a position error signal, and inputs it to the FB controller 9. The FB controller 9 calculates the FB torque command for correcting the position of the moving body 1 based on the position error signal.

[0085] Here, the mechanical end position detection value signal after passing through the first low-pass filter 12c has a dead time, and in addition, a time delay of the same length as the dead time of the mechanical end position detection value signal is added to the motor position command after passing through the second low-pass filter 16b. Therefore, the FB controller 9 calculates the FB torque command in such a way that the high frequency component of the motor position detection value signal follows the high frequency component of the target point command and the low frequency component of the mechanical end position detection value signal follows the low frequency component of the target point command, thereby enabling control to be performed so that the error between the moving body 1 and the target point 100 becomes 0.

[0086] As described above, in the motor control device 300c involved in this embodiment, the FB controller 9 uses the mechanical end position detection value signal indicating the position of the mobile body 1 based on the target point 100 based on the measurement value signal output by the mechanical end sensor 2, and the target point detection value signal calculated based on the motor position detection value signal to calculate the FB torque command. As a result, it is possible to control so that the error between the mobile body 1 and the target point 100 becomes 0. This structure is a useful structure when the relative position relationship between the target point 100 and the mobile body 1 can be measured by the mechanical end sensor 2. By eliminating the switching of the values ​​used in the calculation of the signal used for FB control and the signal used for FF control, the control system can be simplified. In addition, since the value used for calculation is not switched, the sudden change of the value that may occur when the signal is switched can be suppressed, and stable positioning control can be achieved.

[0087] In addition, the frequencies of the signals to be passed through the first low-pass filter 12 c and the second low-pass filter 16 b are preferably the same, but they may be different frequencies.

[0088] The configuration described in the above embodiment is merely an example, and may be combined with other known technologies, the embodiments may be combined with each other, and part of the configuration may be omitted or changed without departing from the gist.

[0089] Description of the label

[0090] 1 moving body, 2 mechanical end sensor, 3 motor, 4 encoder, 5 detection value signal switch, 6, 6a, 6c position signal subtractor, 7FF controller, 8 command value switch, 9FB controller, 10 torque signal adder, 11 signal processor, 12, 12a, 12c first low-pass filter, 13, 13a first high-pass filter, 14, 14a, 14c, 18, 18a, 18c adder, 15 motor position command delay, 16, 16a, 16b second low-pass filter wave filter, 17, 17a second high pass filter, 19, 19a, 19b switching judgement device, 20 first switch, 20b switch, 21 second switch, 22 motor position detection value delay device, 50, 50a, 50b, 50cFB torque instruction generating unit, 100 target point, 101 installation nozzle, 102 electronic component, 200 camera, 201 laser displacement meter, 202 reading unit, 203 scale unit, 300, 300a, 300b, 300c motor control device.

Claims

1. A motor control device that drives a motor based on a position command to move a moving body to a target point specified by the position command. The motor control device is characterized by having: a feedforward controller that generates a motor torque command and a motor position command based on the position command; An encoder detects the position of the motor and outputs a motor position detection value signal representing the position; A mechanical end sensor that detects an object existing within a certain range including the moving body and outputs a measurement value signal representing the detection result; a signal processor that calculates the position of the moving body with respect to the target point based on the measurement value signal and outputs a mechanical end position detection value signal indicating the calculation result; a feedback torque command generating unit that generates a feedback torque command for correcting the motor torque command based on the machine end position detection value signal, the motor position detection value signal, and the motor position command; and a torque signal adder for adding the motor torque command and the feedback torque command to generate a torque command for the motor, The feedback torque command generating unit generates the feedback torque command based on the motor position detection value signal and the motor position command when the mechanical end sensor is unable to detect the relative positional relationship between the moving body and the target point, i.e., in the first state. The feedback torque command generating unit generates the feedback torque command based on the motor position detection value signal, the mechanical end position detection value signal, the motor position command, and a signal with a delay time applied to the motor position command when the mechanical end sensor is able to detect the relative positional relationship between the moving body and the target point, i.e., in the second state.

2. The motor control device according to claim 1, characterized in that: The feedback torque command generating unit includes: a first low-pass filter that allows a signal component of the mechanical end position detection value signal that has a frequency less than or equal to a predetermined frequency to pass therethrough; a first high-pass filter that allows a signal component of the motor position detection value signal having a frequency greater than or equal to a predetermined frequency to pass therethrough; a first adder for adding an output of the first low-pass filter and an output of the first high-pass filter; a motor position command delayer which adds the delay time to the motor position command and outputs the result; a second low-pass filter that passes a signal component having a frequency less than or equal to a predetermined frequency of the signal output by the motor position command delay device; a second high-pass filter that allows a signal component of the motor position command having a frequency greater than or equal to a predetermined frequency to pass therethrough; a second adder for adding the output of the second low-pass filter and the output of the second high-pass filter; a detection value signal switcher to which the motor position detection value signal and the output signal of the first adder are input, and which outputs the motor position detection value signal in the case of the first state, and outputs the signal input from the first adder in the case of the second state; a command value switcher which receives the motor position command and the output signal of the second adder, outputs the motor position command in the first state, and outputs the signal input from the second adder in the second state; as well as A feedback controller calculates the feedback torque command based on a difference between an output of the detection value signal switch and an output of the command value switch.

3. The motor control device according to claim 2, characterized in that: A switching judgement device is provided, which judges which of the first state and the second state is based on the motor position detection value signal, the mechanical end position detection value signal, the position instruction or the motor position instruction, and controls the detection value signal switcher and the instruction value switcher based on the judgment result.

4. The motor control device according to claim 1, characterized in that: The feedback torque command generating unit includes: a first switcher to which the motor position detection value signal and the machine end position detection value signal are input, and which outputs the motor position detection value signal in the case of the first state and outputs the machine end position detection value signal in the case of the second state; a first low-pass filter that allows a signal component of the signal output by the first switch to pass therethrough, the signal component having a frequency less than or equal to a predetermined frequency; a first high-pass filter that allows a signal component of the motor position detection value signal having a frequency greater than or equal to a predetermined frequency to pass therethrough; a first adder for adding an output of the first low-pass filter and an output of the first high-pass filter; a motor position command delayer which adds the delay time to the motor position command and outputs the result; a second switcher to which the motor position command and the output signal of the motor position command delay device are input, and outputs the motor position command in the case of the first state, and outputs the signal input from the motor position command delay device in the case of the second state; a second low-pass filter that allows a signal component of the signal output by the second switch to pass therethrough, the signal component having a frequency less than or equal to a predetermined frequency; a second high-pass filter that allows a signal component of the motor position command having a frequency greater than or equal to a predetermined frequency to pass therethrough; a second adder for adding the output of the second low-pass filter and the output of the second high-pass filter; as well as A feedback controller calculates the feedback torque command based on a difference between an output of the first adder and an output of the second adder.

5. The motor control device according to claim 4, characterized in that: A switching judgement device is provided, which judges which of the first state and the second state is based on the motor position detection value signal, the mechanical end position detection value signal, the position instruction or the motor position instruction, and controls the first switch and the second switch based on the judgment result.

6. The motor control device according to claim 1, characterized in that: The feedback torque command generating unit includes: a motor position detection value delayer which adds a delay time to the motor position detection value signal and outputs the signal; a switch to which the output signal of the motor position detection value delay device and the mechanical end position detection value signal are input, and which outputs the signal input from the motor position detection value delay device in the case of the first state, and outputs the mechanical end position detection value signal in the case of the second state; a first low-pass filter that allows a signal component of a frequency less than or equal to a predetermined frequency of the signal output by the switch to pass therethrough; a first high-pass filter that allows a signal component of the motor position detection value signal having a frequency greater than or equal to a predetermined frequency to pass therethrough; a first adder for adding an output of the first low-pass filter and an output of the first high-pass filter; a motor position command delayer which adds the delay time to the motor position command and outputs the result; a second low-pass filter that passes a signal component having a frequency less than or equal to a predetermined frequency of the signal output by the motor position command delay device; a second high-pass filter that allows a signal component of the motor position command having a frequency greater than or equal to a predetermined frequency to pass therethrough; a second adder for adding the output of the second low-pass filter and the output of the second high-pass filter; as well as A feedback controller calculates the feedback torque command based on a difference between an output of the first adder and an output of the second adder.

7. The motor control device according to claim 6, characterized in that: A switching determiner is provided, which determines which of the first state and the second state is based on the motor position detection value signal, the mechanical end position detection value signal, the position command or the motor position command, and controls the switch based on the determination result.

8. The motor control device according to claim 1, characterized in that: The feedback torque command generating unit includes: a first low-pass filter that allows a signal component of the mechanical end position detection value signal that has a frequency less than or equal to a predetermined frequency to pass therethrough; a first high-pass filter that allows a signal component of the motor position detection value signal having a frequency greater than or equal to a predetermined frequency to pass therethrough; a first adder for adding an output of the first low-pass filter and an output of the first high-pass filter; a motor position command delayer which adds the delay time to the motor position command and outputs the result; a second low-pass filter that passes a signal component having a frequency less than or equal to a predetermined frequency of the signal output by the motor position command delay device; a second high-pass filter that allows a signal component of the motor position command having a frequency greater than or equal to a predetermined frequency to pass therethrough; a second adder for adding the output of the second low-pass filter and the output of the second high-pass filter; as well as A feedback controller calculates the feedback torque command based on a difference between an output of the first adder and an output of the second adder.

9. The motor control device according to claim 6 or 7, characterized in that: The delay time applied to the motor position detection value signal by the motor position detection value delay device is set to a time equivalent to useless time, which is the total time of the time from the mechanical end sensor detecting the object existing in the certain range to the output of the measurement value signal, and the time from the measurement value signal being input to the signal processor to the output of the mechanical end position detection value signal.

10. The motor control device according to any one of claims 2 to 9, characterized in that: The delay time applied to the motor position command by the motor position command delay device is set to a time equivalent to useless time, which is the total time of the time from the mechanical end sensor detecting the object existing in the certain range to the output of the measurement value signal, and the time from the measurement value signal being input to the signal processor to the output of the mechanical end position detection value signal.

Images