Chip detecting and sorting equipment and method

Abstract

The invention discloses chip detecting and sorting equipment and method, and belongs to the technical field of chip detection. Chip detecting and sorting equipment comprises a workbench and further comprises a supporting plate fixedly connected to the top of the workbench, a first conveying belt and a second conveying belt are arranged on the supporting plate, a first detecting head and a second detecting head are fixedly connected to the supporting plate, and the detecting ends of the detecting heads face the tops of the conveying belts; the mounting box is fixedly connected to the side wall of the supporting plate, a mounting block is slidably connected to the mounting box, and a clamping turnover mechanism is arranged on the mounting block; the air spraying holes formed in the air spraying plate can be used for spraying air, flowing air walls can be formed on the two sides of the chip in the vertical state, the guide plate rotates, the air outlet direction of the air spraying plate can be adjusted and changed, water vapor or other impurities possibly existing on the two side faces of the chip can be conveniently taken away, and the service life of the chip is prolonged. Water vapor and impurities are prevented from affecting the accuracy of detection results, and the precision of subsequent detection heads is improved.

Description

Technical Field

[0001] The present invention relates to the field of chip detection technology, and in particular to a chip detection and sorting device and method. Background Art

[0002] With the rapid development of modern technology, the semiconductor industry has begun to make major technological breakthroughs. More and more semiconductor chips (CPUs) have entered the era of standardized, automated, and intelligent production, and more and more automated equipment has replaced the original production model.

[0003] During the chip inspection process, an optical inspection camera is needed to check the chip's appearance defects and determine whether the chip's quality meets the standards after manufacturing. During the inspection process, the front and back of the chip need to be inspected to check whether there are defects in the circuit pattern and lead frame on the front of the chip, and whether the circuit or specific structure on the back of the chip meets the requirements.

[0004] The current method is generally to turn the chip over by a robot or to uniformly detect the front side of the chip first and then the back side of the chip. In addition, the traditional detection head can only perform a single detection, which reduces the detection accuracy of the detection head. Summary of the invention

[0005] The purpose of the present invention is to solve the problem in the prior art that the appearance inspection efficiency of chips is low, thereby reducing the inspection accuracy of the inspection head, and to propose a chip inspection and sorting device and method.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A chip detection and sorting device comprises a workbench, and further comprises: a support plate fixedly connected to the top of the workbench, wherein a first conveyor belt and a second conveyor belt are respectively arranged on the support plate, a first detection head and a second detection head are respectively fixedly connected to the support plate, and the detection ends of the detection heads are both facing the top of the conveyor belt; a mounting box fixedly connected to the side wall of the support plate, wherein a mounting block is slidably connected to the mounting box, a clamping and flipping mechanism is arranged on the mounting block, a third detection head is lifted and lowered on the clamping and flipping mechanism, and the third detection head cooperates with the clamping and flipping mechanism; a rotating A conversion box, fixedly connected in the cavity of the installation box, wherein a switch switching mechanism is arranged in the conversion box, and the contact end of the switch switching structure extends to the outside of the installation box, and a press-rebound mechanism is arranged on the installation block, and when the press-rebound mechanism abuts against the contact end of the switch switching structure, the chip is flipped by the clamping flipping mechanism; a purification box with an opening on the top, fixedly connected between two groups of conveyor belts, wherein a jet plate is arranged in the purification box, and the jet end of the jet plate faces the opening end of the purification box, and an adjustment mechanism is arranged in the purification box for changing the direction of the jet end of the jet plate.

[0008] In order to facilitate the flipping of the chip after clamping, preferably, the clamping and flipping mechanism includes a clamping plate, the mounting block is fixedly connected to a first telescopic rod, the output end of the first telescopic rod is fixedly connected to an extension plate, a motor is arranged on the extension plate, the clamping plate is fixedly connected to the output end of the motor, the mounting block is fixedly connected to a connecting plate, a sensor is arranged at the bottom of the connecting plate, and the sensor is electrically coordinated with the first telescopic rod.

[0009] In order to facilitate the detection of both sides of the chip, further, a second telescopic rod is fixedly connected to the connecting plate, and the third detection head is fixedly connected to the output end of the second telescopic rod.

[0010] In order to facilitate the change of the position of the chip, preferably, the switch switching mechanism includes a switching plate, a through hole is opened on the mounting box, a connecting rod is fixedly connected in the conversion box, the switching plate is rotatably connected to the connecting rod, and the bottom of the switching plate is fixedly connected to the inner wall of the conversion box by a spring, the top of the switching plate extends into the through hole, a push switch is arranged in the conversion box, the push switch is electrically connected to the motor, and the switching plate cooperates with the pressing end of the push switch.

[0011] In order to facilitate resetting the switching plate after being pressed, the press-rebound mechanism further includes a press plate, a connecting shaft is fixedly connected to the mounting block, the press plate is rotatably connected to the connecting shaft, and the press plate is fixedly connected to the mounting block through a spring.

[0012] In order to facilitate the reciprocating movement of the movable block, preferably, a screw rod is rotatably connected in the installation box, the movable block is threadedly connected to the screw rod, and the movable block fits against the inner wall of the installation box, the installation block is fixedly connected to the top of the movable block, the installation box is fixedly connected to a driving machine, and the screw rod is fixedly connected to the output end of the driving machine.

[0013] In order to facilitate the change of the jet direction of the jet plate so that it can be sprayed with a paint gun toward both sides of the chip, preferably, the adjusting mechanism includes: a guide plate, a connecting block fixedly connected to the purification box, wherein the guide plate is rotatably connected to the connecting block, a guide cylinder is fixedly connected to the purification box, a guide rod is slidably connected to the guide cylinder, one end of the guide rod extends into the purification box and abuts against the outer wall of the guide plate, and the other end of the guide rod is provided with a piston, and the piston is in contact with the inner wall of the guide cylinder; a booster cylinder, fixedly connected in the conversion box, wherein a booster rod is slidably connected to the booster cylinder, a piston is provided at one end of the booster rod, and the piston is in contact with the inner wall of the booster cylinder, a spring is provided on the piston, and the connecting end of the spring is fixedly connected to the booster cylinder, the other end of the booster rod extends to the outside and abuts against the switching plate, and the booster cylinder is connected to the guide cylinder through a pipeline.

[0014] In order to facilitate the air supply to the jet plate, further, a protective plate is fixedly connected to the side wall of the support plate, a main gear is rotatably connected in the protective plate, the main gear is fixedly connected to the transmission shaft of the conveyor belt through an installation shaft, a rotating shaft is rotatably connected in the protective plate, an auxiliary gear is fixedly connected to the rotating shaft, the auxiliary gear is meshed with the main gear, a booster plate is fixedly connected to the protective plate, the rotating shaft extends to the booster plate and is fixedly connected to blades, the booster plate is respectively provided with an air inlet and an air outlet, and the air outlet is connected to the jet plate through a pipe.

[0015] In order to blow away the dust or impurities on the surface of the chip being initially inspected, preferably, an air outlet box is fixedly connected to the side wall of the support plate, the air outlet end of the air outlet box faces the conveyor belt, an air cylinder is fixedly connected to the support plate, an air cylinder is slidably connected to the air cylinder, a piston is provided at one end of the air cylinder, and the piston is in contact with the inner wall of the air cylinder, a spring is provided in the air cylinder, and both ends of the spring are fixedly connected to the piston and the air cylinder, the other end of the air rod can be abutted against the outside of the mounting block, an air inlet pipe and an air outlet pipe are respectively provided on the air cylinder, and both the air inlet pipe and the air outlet pipe are provided with a one-way valve, and the air outlet pipe is communicated with the air outlet box.

[0016] A chip detection and sorting method, the operation steps are as follows:

[0017] Step 1: Place the chip on the first conveyor belt, and the first detection head will first perform a preliminary detection on the surface of the chip;

[0018] Step 2: After the chip moves to the sensor position set at the bottom of the connecting plate, the chip is clamped and moved by the clamping plate, and the chip is flipped 90° at the same time;

[0019] Step 3: The air jet plate in the purification box sprays air upward to remove water vapor and impurities on both sides of the chip;

[0020] Step 4: The second telescopic rod drives the third detection head to move and perform secondary detection on the two sides of the chip;

[0021] Step 5: The clamping plate flips the chip 90 degrees again after the second inspection and places it on the second conveyor belt. The second inspection head performs three inspections on the flipped chip.

[0022] Compared with the prior art, the present invention provides a chip detection and sorting device and method, which has the following beneficial effects:

[0023] 1. The chip detection and sorting equipment makes the chip on the conveyor belt be in a vertical state by repeatedly detecting it three times, and then detects both sides of the chip in the vertical state, which can quickly detect the front and back of the chip and improve the detection accuracy of the detection head;

[0024] 2. The chip detection and sorting equipment uses the jet holes on the jet plate to spray air, forming flowing wind walls on both sides of the chip in a vertical state. The guide plate rotates to adjust the air outlet direction of the jet plate to take away water vapor or other impurities that may exist on both sides of the chip, thereby preventing water vapor and impurities from affecting the accuracy of the detection results and improving the accuracy of subsequent detection heads.

[0025] 3. The chip detection and sorting equipment uses a driving machine to drive the mounting block to reset and move. The inflation rod will be pressed into the inside of the inflation cylinder, the spring will be compressed, and the internal gas of the inflation cylinder will be transported to the outlet box through the outlet pipe. At this time, the outlet box sprays gas to perform an initial purge on the surface of the chip on the first conveyor belt to reduce the amount of impurities and water vapor.

[0026] The parts not involved in the device are the same as the prior art or can be implemented by the prior art. The present invention can use the jet holes opened on the jet plate to spray air, which will form flowing wind walls on both sides of the chip in a vertical state. The guide plate rotates to adjust the air outlet direction of the jet plate to take away water vapor or other impurities that may exist on both sides of the chip, avoid water vapor and impurities affecting the accuracy of the detection results, and improve the accuracy of the subsequent detection head. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic diagram of the structure of the axonometric view of a chip detection and sorting device proposed by the present invention Figure 1 ;

[0028] Figure 2 A schematic diagram of the structure of the axonometric view of a chip detection and sorting device proposed by the present invention Figure 2 ;

[0029] Figure 3 A schematic diagram of the partial structure of a chip detection and sorting device proposed by the present invention Figure 1 ;

[0030] Figure 4 A schematic diagram of the partial structure of a chip detection and sorting device proposed by the present invention Figure 2 ;

[0031] Figure 5 This is a schematic diagram of the structure inside a clean box of a chip detection and sorting device proposed by the present invention;

[0032] Figure 6 A schematic diagram of the structure of a chip detection and sorting device proposed by the present invention Figure 1 ;

[0033] Figure 7 A schematic diagram of the structure of a chip detection and sorting device proposed by the present invention Figure 2 ;

[0034] Figure 8 A schematic diagram of the structure of a chip detection and sorting device proposed by the present invention Figure 3 .

[0035] In the figure: 1, workbench; 2, support plate; 3, first conveyor belt; 4, second conveyor belt; 5, first detection head; 6, second detection head; 7, mounting box; 8, screw rod; 9, driving machine; 10, movable block; 11, mounting block; 12, connecting plate; 13, first telescopic rod; 14, extension plate; 15, motor; 16, clamping plate; 17, second telescopic rod; 18, third detection head; 19, connecting shaft; 20, pressing plate; 21, purification box; 22. Jet plate; 23. Jet hole; 24. Connecting block; 25. Guide plate; 26. Guide cylinder; 27. Guide rod; 28. Conversion box; 29. ​​Through hole; 30. Connecting rod; 31. Switching plate; 32. Push switch; 33. Boost cylinder; 34. Boost rod; 35. Inflator cylinder; 36. Inflator rod; 37. Air outlet box; 38. Protective plate; 39. Main gear; 40. Rotating shaft; 41. Auxiliary gear; 42. Boost disk; 43. Blade. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0037] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] Example:

[0039] Reference Figure 1-Figure 8 A chip detection and sorting device comprises a workbench 1, and further comprises: a support plate 2, fixedly connected to the top of the workbench 1, wherein a first conveyor belt 3 and a second conveyor belt 4 are respectively arranged on the support plate 2, and a first detection head 5 and a second detection head 6 are respectively fixedly connected to the support plate 2, and the detection ends of the detection heads are both facing the top of the conveyor belt; a mounting box 7, fixedly connected to the side wall of the support plate 2, wherein a mounting block 11 is slidably connected to the mounting box 7, and a clamping and flipping mechanism is arranged on the mounting block 11, and a third detection head 18 is lifted and lowered on the clamping and flipping mechanism, and the third detection head 18 cooperates with the clamping and flipping mechanism; A conversion box 28 is fixedly connected in the cavity of the mounting box 7, wherein a switch switching mechanism is arranged in the conversion box 28, and the contact end of the switch switching structure extends to the outside of the mounting box 7, and a press-rebound mechanism is arranged on the mounting block 11. When the press-rebound mechanism abuts against the contact end of the switch switching structure, the chip is flipped by the clamping flipping mechanism; a purification box 21 with an opening on the top is fixedly connected between two groups of conveyor belts, wherein a jet plate 22 is arranged in the purification box 21, and the jet end of the jet plate 22 faces the opening end of the purification box 21, and an adjustment mechanism is arranged in the purification box 21 for changing the direction of the jet end of the jet plate 22.

[0040] The first conveyor belt 3 and the second conveyor belt 4 are driven by driving devices respectively, and the conveying direction and speed are the same. The driving device can be a driving motor. The above-mentioned detection heads are all chip optical detection cameras. During the chip detection process, it is determined whether the quality of the chip after manufacturing meets the standards. In the detection process, it is necessary to detect the front and back of the chip to detect whether there are defects in the circuit pattern and lead frame on the front of the chip, and whether the circuit or specific structure on the back of the chip meets the requirements. The detection end of the first detection head 5 faces the surface of the first conveyor belt 3, and the placed chip can be detected for the first time. The detection end of the third detection head 18 faces the surface of the second conveyor belt 4, and the flipped chip can be detected for the third time.

[0041] The above-mentioned clamping and flipping mechanism includes a clamping plate 16, a first telescopic rod 13 is fixedly connected to the mounting block 11, an extension plate 14 is fixedly connected to the output end of the first telescopic rod 13, a motor 15 is arranged on the extension plate 14, the clamping plate 16 is fixedly connected to the output end of the motor 15, a connecting plate 12 is fixedly connected to the mounting block 11, a sensor is arranged at the bottom of the connecting plate 12, and the sensor is electrically coordinated with the first telescopic rod 13.

[0042] When the chip moves to the sensor position set at the bottom of the connecting plate 12, the sensor can be a photoelectric sensor, such as a reflective photoelectric sensor, which uses a light source to emit light and detects whether the light is reflected by an object to determine the existence of the object. For example, a transmissive photoelectric sensor is composed of a transmitter and a receiver, and the object blocks the light to detect whether it exists. When the sensor detects that the chip reaches the clamping range of the clamping and flipping mechanism, the clamping end of the clamping and flipping mechanism will be opened, and the mounting block 11 will drive the clamping and flipping mechanism to move. When it moves to the position of the opening end of the purification box 21, the pressing rebound mechanism and the contact end of the switch switching structure are against each other. At this time, the chip is flipped 90° and is in a vertical state. Then the third detection head 18 set on the clamping and flipping mechanism will automatically fall down to perform secondary detection on both sides of the chip in the vertical state.

[0043] When the sensor detects the chip, the switch of the first telescopic rod 13 is activated, so that the clamping plate 16 can quickly clamp the two sides of the chip, and then the chip is flipped by the motor 15. The motor 15 can be a stepper motor 15. The rotation angle can be accurately controlled by controlling the number of input pulses. By setting a suitable number of steps, the motor 15 can drive the chip to rotate 90°. It can also be a servo motor 15, which can achieve precise angle control. Through the controller command, the servo motor 15 can be rotated to a 90° position.

[0044] The connecting plate 12 is fixedly connected to a second telescopic rod 17 , and the third detection head 18 is fixedly connected to an output end of the second telescopic rod 17 .

[0045] The second telescopic rod 17 drives the third detection head 18 to move up and down.

[0046] By testing both sides of the chip in a vertical state, the front and back of the chip can be quickly tested, thereby improving the detection accuracy of the detection head.

[0047] Furthermore, in order to improve the detection accuracy of the detection head, a jet plate 22 is provided in the purification box 21, and the jet end of the jet plate 22 faces the opening end of the purification box 21. An adjustment mechanism is provided in the purification box 21 for changing the direction of the jet end of the jet plate 22.

[0048] In order to supply air to the jet plate 22, a protective plate 38 is fixedly connected to the side wall of the support plate 2, and a main gear 39 is rotatably connected to the protective plate 38. The main gear 39 is fixedly connected to the transmission shaft of the conveyor belt through an installation shaft. A rotating shaft 40 is rotatably connected to the protective plate 38, and an auxiliary gear 41 is fixedly connected to the rotating shaft 40. The auxiliary gear 41 is meshed with the main gear 39. A booster plate 42 is fixedly connected to the protective plate 38, and the rotating shaft 40 extends to the booster plate 42 and is fixedly connected to blades 43. The booster plate 42 is respectively provided with an air inlet and an air outlet, and the air outlet is connected to the jet plate 22 through a pipe.

[0049] When the second conveyor belt 4 rotates, the transmission shaft will drive the main gear 39 to rotate, and the main gear 39 will drive the auxiliary gear 41 to rotate, and the auxiliary gear 41 will drive the rotating shaft 40 to rotate, thereby causing the blades 43 to rotate in the boosting disk 42, so that air enters the boosting disk 42 through the air inlet, and a filter is provided on the air inlet to prevent impurities from entering the interior, and the pressurized gas is then transported to the jet plate 22 through the air outlet, and a jet hole 23 is opened on the jet plate 22 for ejecting the gas.

[0050] In order to improve the purging effect of the jet plate 22 on the chip surface, the above-mentioned switch switching mechanism includes a switching plate 31, a through hole 29 is opened on the mounting box 7, a connecting rod 30 is fixedly connected to the conversion box 28, the switching plate 31 is rotatably connected to the connecting rod 30, and the bottom of the switching plate 31 is fixedly connected to the inner wall of the conversion box 28 through a spring, the top of the switching plate 31 extends into the through hole 29, a press switch 32 is arranged in the conversion box 28, the press switch 32 is electrically connected to the motor 15, and the switching plate 31 cooperates with the pressing end of the press switch 32.

[0051] The press-rebound mechanism includes a press plate 20 . A connecting shaft 19 is fixedly connected to the mounting block 11 . The press plate 20 is rotatably connected to the connecting shaft 19 . The press plate 20 is fixedly connected to the mounting block 11 via a spring.

[0052] When the mounting block 11 moves, the pressing plate 20 will abut against the top of the switching plate 31, and the switching plate 31 will rotate around the connecting rod 30. During this process, the switching plate 31 will press the pressing end of the pressing switch 32, so that the pressing switch 32 starts the switch of the motor 15. It can be a mechanical pressing switch 32: usually including a spring and a pair of contact points. When the switch is pressed, the spring is compressed, the contact points are in contact, and the circuit is closed. After release, the spring returns to its original state, disconnecting the contact points and the circuit. This is the prior art, and the pressing switch 32 controls the switch of the motor 15, causing the motor 15 to rotate 90°.

[0053] During this process, the springs on the pressing plate 20 and the switching plate 31 will be compressed.

[0054] A screw rod 8 is rotatably connected in the installation box 7, a movable block 10 is threadedly connected to the screw rod 8, and the movable block 10 fits against the inner wall of the installation box 7, a mounting block 11 is fixedly connected to the top of the movable block 10, a driving machine 9 is fixedly connected to the installation box 7, the screw rod 8 is fixedly connected to the output end of the driving machine 9, and the screw rod 8 can be rotated by the driving machine 9.

[0055] And refer to Figure 1 and Figure 8 As shown in the figure, there are two groups of switching plates 31, and when passing through one group of switching plates 31, the driving machine 9 stops rotating, so that the mounting block 11 stays at the lateral position of the switching plate 31, and the motor 15 rotates 90°, and rotates in the same direction. When the third detection head 18 completes the detection, it will automatically reset, and the driving machine 9 will start, which will make the pressing plate 20 abut against the second group of switching plates 31, so that the second group of switching plates 31 will drive the chip to continue to flip 90°, so that it can flip to the back, so as to facilitate the third detection by the second detection head 6. When the driving machine 9 drives the mounting block 11 to reset and move, the pressing plate 20 will not press the switching plate 31 during the movement.

[0056] It needs to be explained that in order to improve the jet effect of the jet plate 22, the above-mentioned adjustment mechanism includes: a guide plate 25, a connecting block 24 is fixedly connected in the purification box 21, wherein the guide plate 25 is rotatably connected to the connecting block 24, a guide cylinder 26 is fixedly connected to the purification box 21, and a guide rod 27 is slidably connected to the guide cylinder 26, one end of the guide rod 27 extends into the purification box 21 and abuts against the outer wall of the guide plate 25, and a piston is provided at the other end of the guide rod 27, and the piston is in contact with the inner wall of the guide cylinder 26; a boost cylinder 33, fixedly connected in the conversion box 28, wherein a boost rod 34 is slidably connected to the boost cylinder 33, a piston is provided at one end of the boost rod 34, and the piston is in contact with the inner wall of the boost cylinder 33, a spring is provided on the piston, and the connecting end of the spring is fixedly connected to the boost cylinder 33, and the other end of the boost rod 34 extends to the outside and abuts against the switching plate 31, and the boost cylinder 33 is connected to the guide cylinder 26 through a pipeline.

[0057] When the switching plate 31 is pressed, the boost rod 34 will be pressed, and the gas in the boost cylinder 33 will be transported to the guide cylinder 26, and the guide rod 27 will move toward the direction of the guide plate 25 to rotate the guide plate 25, thereby adjusting the air outlet direction of the jet plate 22 so that the gas can be blown to the surface of the chip.

[0058] By jetting air through the jet holes 23 opened on the jet plate 22, flowing wind walls will be formed on both sides of the chip in a vertical state, and the guide plate 25 can rotate to adjust the air outlet direction of the jet plate 22 so as to take away water vapor or other impurities that may exist on both sides of the chip, thereby preventing water vapor and impurities from affecting the accuracy of the test results and improving the accuracy of the subsequent test head.

[0059] In addition, an air outlet box 37 is fixedly connected to the side wall of the support plate 2, and the air outlet end of the air outlet box 37 faces the conveyor belt. An air filling cylinder 35 is fixedly connected to the support plate 2, and an air filling rod 36 is slidably connected to the air filling cylinder 35. A piston is provided at one end of the air filling rod 36, and the piston fits against the inner wall of the air filling cylinder 35. A spring is provided in the air filling cylinder 35, and the two ends of the spring are respectively fixedly connected to the piston and the air filling cylinder 35. The other end of the air filling rod 36 can be abutted against the outside of the mounting block 11. An air inlet pipe and an air outlet pipe are respectively provided on the air filling cylinder 35, and both the air inlet pipe and the air outlet pipe are provided with a one-way valve, and the air outlet pipe is communicated with the air outlet box 37.

[0060] When the driving machine 9 drives the mounting block 11 to reset and move, the inflation rod 36 will be pressed into the interior of the inflation cylinder 35, the spring will be compressed, and the internal gas of the inflation cylinder 35 will be transported to the gas outlet box 37 through the gas outlet pipe. At this time, the gas outlet box 37 sprays gas to perform an initial purge on the chip surface on the first conveyor belt 3 to reduce the amount of impurities and water vapor.

[0061] When the driving machine 9 drives the mounting block 11 to move in the opposite direction of the inflation rod 36 , the spring will drive the inflation rod 36 to return to its original position, and the outside air will be re-delivered into the inflation cylinder 35 through the air inlet pipe.

[0062] A chip detection and sorting method, the operation steps are as follows:

[0063] Step 1: Place the chip on the first conveyor belt 3, and the first detection head 5 will first perform a preliminary detection on the surface of the chip;

[0064] Step 2: After the chip moves to the sensor position set at the bottom of the connecting plate 12, the chip is clamped and moved by the clamping plate 16, and the chip is flipped 90°;

[0065] Step 3: The air jet plate 22 in the purification box 21 sprays air upward to remove water vapor and impurities on both sides of the chip;

[0066] Step 4: The second telescopic rod 17 drives the third detection head 18 to move and perform secondary detection on the two sides of the chip;

[0067] Step 5: The clamping plate 16 flips the chip after the second inspection by 90 degrees again and places it on the second conveyor belt 4. The second inspection head 6 performs three inspections on the flipped chip.

[0068] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A chip detection and sorting device, comprising a workbench (1), characterized in that: Also includes: A support plate (2) is fixedly connected to the top of the workbench (1). Wherein, a first conveyor belt (3) and a second conveyor belt (4) are respectively arranged on the support plate (2), and a first detection head (5) and a second detection head (6) are respectively fixedly connected to the support plate (2), and the detection ends of the detection heads are both facing the top of the conveyor belt; The mounting box (7) is fixedly connected to the side wall of the support plate (2). The installation box (7) is slidably connected to a mounting block (11), the mounting block (11) is provided with a clamping and flipping mechanism, a third detection head (18) is lifted and lowered on the clamping and flipping mechanism, and the third detection head (18) cooperates with the clamping and flipping mechanism; The conversion box (28) is fixedly connected in the cavity of the installation box (7). The conversion box (28) is provided with a switch switching mechanism, and the contact end of the switch switching structure extends to the outside of the mounting box (7); the mounting block (11) is provided with a press-rebound mechanism, and when the press-rebound mechanism abuts against the contact end of the switch switching structure, the chip is flipped by the clamping flip mechanism; A purification box (21) with an opening on the top is fixedly connected between two sets of conveyor belts. The purification box (21) is provided with a jet plate (22), the jet end of the jet plate (22) faces the opening end of the purification box (21), and the purification box (21) is provided with an adjustment mechanism for changing the direction of the jet end of the jet plate (22).

2. A chip detection and sorting device according to claim 1, characterized in that: The clamping and flipping mechanism comprises a clamping plate (16), a first telescopic rod (13) is fixedly connected to the mounting block (11), an output end of the first telescopic rod (13) is fixedly connected to an extension plate (14), a motor (15) is arranged on the extension plate (14), the clamping plate (16) is fixedly connected to the output end of the motor (15), the mounting block (11) is fixedly connected to a connecting plate (12), a sensor is arranged at the bottom of the connecting plate (12), and the sensor is electrically matched with the first telescopic rod (13).

3. A chip detection and sorting device according to claim 2, characterized in that: A second telescopic rod (17) is fixedly connected to the connecting plate (12), and the third detection head (18) is fixedly connected to the output end of the second telescopic rod (17).

4. A chip detection and sorting device according to claim 2, characterized in that: The switch switching mechanism comprises a switching plate (31), a through hole (29) is provided on the installation box (7), a connecting rod (30) is fixedly connected inside the conversion box (28), the switching plate (31) is rotatably connected to the connecting rod (30), and the bottom of the switching plate (31) is fixedly connected to the inner wall of the conversion box (28) through a spring, and the top of the switching plate (31) extends into the through hole (29), a push switch (32) is provided in the conversion box (28), the push switch (32) is electrically connected to the motor (15), and the switching plate (31) cooperates with the pressing end of the push switch (32).

5. The chip detection and sorting equipment according to claim 4, characterized in that: The press-rebound mechanism comprises a press plate (20), a connecting shaft (19) is fixedly connected to the mounting block (11), the press plate (20) is rotatably connected to the connecting shaft (19), and the press plate (20) is fixedly connected to the mounting block (11) via a spring.

6. The chip detection and sorting equipment according to claim 5, characterized in that: A screw rod (8) is rotatably connected inside the installation box (7), a movable block (10) is threadedly connected to the screw rod (8), and the movable block (10) is in contact with the inner wall of the installation box (7), the installation block (11) is fixedly connected to the top of the movable block (10), the installation box (7) is fixedly connected to a driving machine (9), and the screw rod (8) is fixedly connected to the output end of the driving machine (9).

7. The chip detection and sorting equipment according to claim 5, characterized in that: The regulating mechanism comprises: A guide plate (25), a connecting block (24) is fixedly connected inside the purification box (21), The guide plate (25) is rotatably connected to the connecting block (24), the purification box (21) is fixedly connected to a guide cylinder (26), the guide cylinder (26) is slidably connected to a guide rod (27), one end of the guide rod (27) extends into the purification box (21) and abuts against the outer wall of the guide plate (25), and the other end of the guide rod (27) is provided with a piston, and the piston is in contact with the inner wall of the guide cylinder (26); The boost cylinder (33) is fixedly connected in the conversion box (28). The boosting cylinder (33) is slidably connected with a boosting rod (34), one end of the boosting rod (34) is provided with a piston, and the piston is in contact with the inner wall of the boosting cylinder (33), a spring is provided on the piston, and the connecting end of the spring is fixedly connected to the boosting cylinder (33), the other end of the boosting rod (34) extends to the outside and abuts against the switching plate (31), and the boosting cylinder (33) is connected to the guide cylinder (26) through a pipeline.

8. The chip detection and sorting equipment according to claim 1, characterized in that: A protective plate (38) is fixedly connected to the side wall of the support plate (2), a main gear (39) is rotatably connected inside the protective plate (38), the main gear (39) is fixedly connected to the transmission shaft of the conveyor belt through a mounting shaft, a rotating shaft (40) is rotatably connected inside the protective plate (38), an auxiliary gear (41) is fixedly connected to the rotating shaft (40), the auxiliary gear (41) is meshed with the main gear (39), a booster plate (42) is fixedly connected to the protective plate (38), the rotating shaft (40) extends to the booster plate (42) and is fixedly connected to blades (43), the booster plate (42) is respectively provided with an air inlet and an air outlet, and the air outlet is connected to the jet plate (22) through a pipeline.

9. The chip detection and sorting equipment according to claim 4, characterized in that: An air outlet box (37) is fixedly connected to the side wall of the support plate (2), and the air outlet end of the air outlet box (37) faces the conveyor belt. An air filling cylinder (35) is fixedly connected to the support plate (2), and an air filling rod (36) is slidably connected to the air filling cylinder (35). A piston is provided at one end of the air filling rod (36), and the piston is in contact with the inner wall of the air filling cylinder (35). A spring is provided in the air filling cylinder (35), and the two ends of the spring are respectively fixedly connected to the piston and the air filling cylinder (35). The other end of the air filling rod (36) can be abutted against the outside of the mounting block (11). An air inlet pipe and an air outlet pipe are respectively provided on the air filling cylinder (35), and both the air inlet pipe and the air outlet pipe are provided with a one-way valve. The air outlet pipe is connected to the air outlet box (37).

10. A chip detection and sorting method, using the chip detection and sorting device according to any one of claims 1 to 9, characterized in that: The steps are as follows: Step 1: placing the chip on the first conveyor belt (3), and the first detection head (5) first performs a preliminary detection on the surface of the chip; Step 2: After the chip moves to the sensor position set at the bottom of the connecting plate (12), the chip is clamped and moved by the clamping plate (16), and the chip is flipped 90 degrees at the same time; Step 3: The air jet plate (22) in the purification box (21) sprays air upward to remove water vapor and impurities within the range of both sides of the chip; Step 4: The second telescopic rod (17) drives the third detection head (18) to move and perform secondary detection on the two side surfaces of the chip; Step 5: The clamping plate (16) flips the chip after the second inspection by 90 degrees again and places it on the second conveyor belt (4). The second inspection head (6) performs three inspections on the flipped chip.

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