Error calibration device, method, equipment and storage medium

Abstract

The embodiments of the present application provide an error calibration device, method, equipment and storage medium, which relate to the field of semiconductor technology, and solve the technical problem that the comprehensive error formed by the overlap of the coaxial error and the lifting offset error is difficult to detect and difficult to compensate for. The error calibration device of this scheme can be applied to test equipment that needs to use a coaxial camera. The test equipment can use an auxiliary camera and a coaxial camera to observe and identify the marking points on the two calibration plates, and use the auxiliary camera and the fixed marking points of the second calibration plate as a reference to observe the position coordinates of the calibration marking points of the coaxial camera and the first calibration plate before and after lifting, so as to compare the coordinates obtained before and after lifting to determine the comprehensive error in the target direction, which helps to reduce the cumulative impact of error variables, thereby quickly and effectively realizing the calibration of errors, so that the compensation of accuracy can be more accurate and simpler.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an error calibration method, device, equipment and storage medium. Background Art

[0002] In the field of semiconductor technology, problems such as poor upper and lower point alignment, cumbersome deviation measurement, and inconsistent deviation compensation encountered in various forms of bonding, patching, solder paste printing and other manufacturing processes can be solved by using coaxial cameras to complete point alignment, azimuth adjustment and deviation compensation before processing, and can achieve high precision, excellent quality and high yield in mass production.

[0003] However, the coaxial camera itself also has coaxial errors (generally refers to the coaxial error of the optical axis between the upper and lower cameras), which comes from the processing errors and shape tolerances of the assembled parts. In addition, during use, the coaxial camera has a certain height dimension, and it needs to be equipped with a lifting shaft to make up for this height. In addition, the lifting shaft also has a certain degree of lifting offset error during the lifting process. The combined error caused by the coaxial error caused by the coaxial camera and the lifting offset error is difficult to detect, which is not conducive to error compensation. Summary of the invention

[0004] The present application provides an error calibration device, method, equipment and storage medium, which solves the technical problem in the related art that the comprehensive error formed by the overlap of the coaxial error and the lifting offset error is difficult to detect and difficult to compensate for the error. The present solution can use the marking point as a reference to compare the coordinates obtained before and after the movement to determine the comprehensive error, thereby quickly and effectively realizing the calibration and compensation of the error.

[0005] In a first aspect, the present application also provides an error calibration device, which includes a first calibration plate, a second calibration plate, a multi-axis motion mechanism, an auxiliary camera and a coaxial camera.

[0006] Among them, a plurality of calibration marking points are arranged on the first calibration plate, and the plurality of calibration marking points are respectively located at different positions on the first calibration plate; a multi-axis motion mechanism is connected to the first calibration plate, and the multi-axis motion mechanism is used to drive the first calibration plate to move in three mutually perpendicular axial directions and a rotational axis; a plurality of fixed marking points are arranged on the second calibration plate, and the area on the second calibration plate where the fixed marking points are arranged is a transparent area, and the positions of the fixed marking points correspond one by one to the positions of the calibration marking points; the auxiliary camera is located outside the first side of the second calibration plate, and the first side of the second calibration plate is the side away from the first calibration plate; the coaxial camera includes a first camera and a second camera on the same axis, and the coaxial camera is located between the first calibration plate and the second calibration plate, the first camera is used to shoot the calibration marking points on the first calibration plate, and the second camera is used to shoot the fixed marking points on the second calibration plate.

[0007] In a second aspect, the present application further provides an error calibration method, which is applied to the error calibration device provided in the first aspect, and the error calibration method includes:

[0008] Controlling a preset distance between the first calibration plate and the second calibration plate, wherein the preset distance is greater than a thickness of the coaxial camera;

[0009] Using the coaxial camera to photograph the fixed marking points and the calibration marking points located in the same axial direction, and controlling the first calibration plate to move parallel to the second calibration plate through the multi-axis motion mechanism to align any two of the fixed marking points with the corresponding calibration marking points, and determining the first coordinates corresponding to the fixed marking points based on the auxiliary camera;

[0010] Move the coaxial camera away, and control the first calibration plate to move toward the second calibration plate in a direction perpendicular to the second calibration plate through the multi-axis motion mechanism, so that the first calibration plate is attached to the second calibration plate;

[0011] When the first calibration plate is attached to the second calibration plate, determining a second coordinate corresponding to the calibration mark point based on the auxiliary camera;

[0012] Determining whether the error calibration device has a comprehensive error according to the first coordinate and the second coordinate;

[0013] If it is determined that the comprehensive error exists, the comprehensive error is calibrated and compensated based on the first coordinate and the second coordinate.

[0014] In a third aspect, the present application further provides a testing device, which includes the error calibration device provided in the first aspect, and further includes:

[0015] one or more processors;

[0016] a storage device for storing one or more programs,

[0017] When one or more programs are executed by one or more processors, the one or more processors implement the error calibration method of the present application.

[0018] In a fourth aspect, the present application also provides a storage medium storing computer executable instructions, which are used to execute the error calibration method of the present application when executed by a processor.

[0019] The error calibration device of the present application is a device for calibrating the comprehensive error in the use scenario of the coaxial camera. It can be applied to the test equipment that needs to use the coaxial camera. Based on the error calibration device, the test equipment can use the auxiliary camera and the coaxial camera to observe and identify the marking points on the two calibration plates, and use the auxiliary camera and the fixed marking points of the second calibration plate as a reference to observe the position coordinates of the calibration marking points of the coaxial camera and the first calibration plate before and after lifting to compare the coordinates obtained before and after lifting to determine the comprehensive error, which helps to reduce the cumulative impact of the error variables, thereby quickly and effectively realizing the calibration of the error, so that the compensation for the accuracy can be more accurate and simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of an error calibration device provided in one embodiment of the present application.

[0021] Figure 2 A schematic diagram of the steps of an error calibration method provided in one embodiment of the present application.

[0022] Figure 3 Schematic diagram of the coaxial error in a coaxial camera.

[0023] Figure 4 A schematic diagram of the structure of a testing device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0024] The embodiments of the present application are further described in detail below in conjunction with the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are only used to explain the embodiments of the present application, rather than to limit the embodiments of the present application. It should also be noted that, for ease of description, only the parts related to the embodiments of the present application rather than all structures are shown in the accompanying drawings, and those skilled in the art should be able to think of it after reading the specification of this application that as long as the technical features do not contradict each other, any combination of the technical features can constitute an optional implementation method.

[0025] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable when appropriate, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally a class, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally represents that the objects associated before and after are in an "or" relationship. In the description of the present application, "multiple" means two or more, and "several" means one or more.

[0026] In the field of semiconductor technology, coaxial cameras are usually used to solve problems such as poor alignment of upper and lower points and cumbersome deviation measurement encountered in manufacturing processes such as patch and solder paste printing, so as to improve the accuracy, quality and yield rate of products in mass production. However, coaxial cameras themselves have coaxial errors, such as the coaxial error of the optical axis between the upper camera and the lower camera. This error originates from the processing error and shape tolerance of the assembled parts. In addition, during use, the coaxial camera has a certain height dimension and needs to be equipped with a lifting shaft to compensate for this height. Due to the assembly error of the lifting shaft, it will also have a certain degree of lifting offset during the lifting process. In this regard, the combined error formed by the overlap of the coaxial error caused by the coaxial camera and the lifting offset error is difficult to detect, which is not conducive to error compensation.

[0027] In this regard, the present application provides an error calibration device, which can be used to calibrate the error. The error calibration device includes a first calibration plate, a second calibration plate, a multi-axis motion mechanism, an auxiliary camera and a coaxial camera. Wherein, the first calibration plate and the second calibration plate are both provided with corresponding marking points for calibration. Specifically, the first calibration plate is provided with a plurality of calibration marking points located at different positions on the plate, and the second calibration plate is provided with a plurality of fixed marking points. On the second calibration plate, the area where the fixed marking points are located is a transparent area. It can be imagined that corresponding holes can be formed in the area and transparent materials can be embedded, such as acrylic plates, glass plates and other transparent materials to form a transparent area. In addition, the position of the fixed marking point corresponds to the position of the calibration marking point one by one. For example, the center points of the first calibration plate and the second calibration plate are aligned. If the calibration marking point on the first calibration plate is located at the center point of the plate surface, the fixed marking point on the second calibration plate is also located at the center point of the plate surface.

[0028] In addition, an auxiliary camera is provided on the first side of the second calibration plate to photograph the fixed marking points on the second calibration plate through the auxiliary camera. The first side of the second calibration plate is a side away from the first calibration plate, for example, if the second calibration plate is located above the first calibration plate, the auxiliary camera is located at the lower side of the second calibration plate.

[0029] The multi-axis motion mechanism is a mechanism that can move along three mutually perpendicular axial directions, and is connected to the first calibration plate. Optionally, the multi-axis motion mechanism is detachably connected to the first calibration plate, such as by vacuum adsorption. Based on this, the multi-axis motion mechanism can drive the first calibration plate to move in three mutually perpendicular axial directions (such as the X-axis, the Y-axis, and the Z-axis) to drive the first calibration plate to move in a rotation axis, thereby realizing the movement of the first calibration plate in space. It is conceivable that the multi-axis motion mechanism can be an XYZ multi-axis motion mechanism driven by a servo motor or a screw rod and a slider used in the relevant technology to achieve precise motion control in the three axial directions of the X-axis, the Y-axis, and the Z-axis.

[0030] The coaxial camera includes a first camera and a second camera on the same axis, the coaxial camera is located between the first calibration plate and the second calibration plate, the first camera is used to shoot the calibration mark points on the first calibration plate, and the second camera is used to shoot the fixed mark points on the second calibration plate. It can be imagined that the first camera can be an upper camera or a lower camera. In actual applications, although the coaxial camera is located between the first calibration plate and the second calibration plate, the orientation of the coaxial camera can be determined according to the actual usage. For example, if the upper camera is a camera for shooting the calibration mark points on the first calibration plate, the upper camera is the first camera and the lower camera is the second camera.

[0031] It should be noted that the number of fixed marking points and calibration marking points can be 2, 3, etc. Correspondingly, the position of each fixed marking point can correspond one-to-one with the position of a calibration marking point.

[0032] Figure 1 Schematic diagram of the structure of the error calibration device provided in one embodiment of the present application, such as Figure 1 As shown, in one embodiment, the error calibration device includes a first calibration plate 101 , a second calibration plate 102 , a multi-axis motion mechanism 103 , an auxiliary camera 104 and a coaxial camera 105 .

[0033] Specifically, the first calibration plate 101 is provided with four calibration marking points 201, which are respectively located at different positions on the first calibration plate 101, such as being arranged in an array on the first calibration plate 101. The second calibration plate 102 is also provided with four fixed marking points 202, and the area on the second calibration plate 102 where the fixed marking points 202 are provided is a transparent area, and the positions of the fixed marking points 202 correspond to the positions of the calibration marking points one by one. Therefore, the fixed marking points 202 are also arranged in an array on the second calibration plate 102. Figure 1 As shown, the first calibration plate 101 and the second calibration plate 102 are arranged at intervals, so that the first calibration plate 101 can be moved close to or away from the second calibration plate 102 under the drive of the multi-axis motion mechanism.

[0034] The multi-axis motion mechanism 103 is connected to the first calibration plate 101, and is used to drive the first calibration plate 101 to move in three mutually perpendicular axial directions and a rotation axis. The auxiliary camera 104 is located outside the first side of the second calibration plate 102, and the first side of the second calibration plate 102 is the side away from the first calibration plate 101, such as the upper side shown in the figure. There are two auxiliary cameras 104, and each auxiliary camera 104 corresponds to shooting different fixed marking points 202.

[0035] The coaxial camera 105 includes a first camera and a second camera (not shown in the figure) on the same axis. The coaxial camera 105 is located between the first calibration plate 101 and the second calibration plate 102. The first camera is used to photograph the calibration mark points on the first calibration plate 101, and the second camera is used to photograph the fixed mark points on the second calibration plate 102.

[0036] It should be noted that Figure 1 The direction shown in is used to exemplarily represent the positional relationship of the components in the error calibration device. In some embodiments, it can also be arranged from bottom to top, such as the second calibration plate is located below the first calibration plate; or from left to right, such as the second calibration plate is located on the left side of the first calibration plate.

[0037] It can be seen from the above scheme that the error calibration device, as a device for calibrating the comprehensive error in the use scenario of the coaxial camera, can be applied to the complete equipment that needs to use the coaxial camera, so as to utilize the auxiliary camera and the coaxial camera to observe and identify the marking points on the two calibration plates, and use the auxiliary camera and the fixed marking points of the second calibration plate as a reference, observe the position coordinates of the calibration marking points of the coaxial camera and the first calibration plate before and after lifting, and compare the coordinates obtained before and after lifting to determine the comprehensive error, which helps to reduce the cumulative impact of error variables and make the compensation for accuracy more accurate and simpler.

[0038] Figure 2 A schematic diagram of the steps of an error calibration method provided in an embodiment of the present application is shown in FIG. Figure 2 As shown, the method can be applied to the error calibration device provided in the above embodiment, so as to determine the comprehensive error by controlling the above error calibration device and obtaining the corresponding test parameters. It can be imagined that the method is executed by a processor, such as the above error calibration device also includes an electronic device, so as to control other devices through the electronic device, and the electronic device includes a processor and a memory, and the memory is a computer-readable storage medium, which can be used to store software programs, computer executable programs and modules, such as the program instructions / modules corresponding to the error calibration method in the embodiment of the present application. Therefore, when the processor executes the corresponding program instructions / modules, the error calibration method provided in the embodiment of the present application is implemented, and the specific steps include steps S110-S160:

[0039] Step S110: Control the first calibration plate and the second calibration plate to be spaced apart by a preset distance, wherein the preset distance is greater than the thickness of the coaxial camera.

[0040] Reference Figure 1The processor can drive the multi-axis motion mechanism to move the first calibration plate, for example, to move the first calibration plate downward, so that the spacing between the first calibration plate and the second calibration plate is a preset distance. The preset distance is greater than the thickness of the coaxial camera, such as the preset distance satisfies the thickness of the coaxial camera and the focal lengths of the first camera and the second camera thereon, so that when the coaxial camera is located between the first calibration plate and the second calibration plate, the first calibration plate can be located in the focal plane of the first camera, and the second calibration plate can be located in the focal plane of the second camera.

[0041] Step S120: Use a coaxial camera to shoot fixed marking points and calibration marking points located in the same axial direction, and control the first calibration plate to move parallel to the second calibration plate through a multi-axis motion mechanism to align any two fixed marking points with the corresponding calibration marking points, and determine the first coordinates of the corresponding fixed marking points based on the auxiliary camera.

[0042] After the coaxial camera is placed between the first calibration plate and the second calibration plate, the coaxial camera is used to shoot the fixed marking points and the calibration marking points located in the same axial direction. It is worth noting that the alignment of the fixed marking points and the corresponding calibration marking points is completed based on the coaxial camera. It can be imagined that during the shooting process, after the second camera completes the focus, the multi-axis motion mechanism can be controlled to move the first calibration plate so that the first camera also completes the focus, thereby aligning any two fixed marking points with the corresponding calibration marking points through the coaxial camera, that is, the center of the field of view of the first camera is aligned with the calibration marking point, and the center of the field of view of the second camera is aligned with the fixed marking point. Moreover, since the fixed marking point and the corresponding calibration marking point have the same position on their respective corresponding plates, that is, the two correspond one to one, after one fixed marking point is aligned with its corresponding calibration marking point, the other fixed marking point and its corresponding calibration marking point can also be aligned.

[0043] like Figure 3 As shown, Figure 3 This is a schematic diagram of the coaxial error in a coaxial camera. The dotted lines in the figure represent the optical axes corresponding to the two cameras. The distance between the two optical axes is the coaxial error. It is worth noting that Figure 3 The coaxial error shown in is only an exemplary representation and does not refer to the specific value of the coaxial error. It is understandable that the coaxial camera has a coaxial error. Therefore, in some embodiments, in the process of aligning any two fixed marking points with the corresponding calibration marking points, the center of the field of view of the second camera can be first aligned with the fixed marking point on the second calibration plate, and then the first calibration plate is moved in the X-axis and / or Y-axis direction by the multi-axis motion mechanism to align the center of the field of view of the first camera with the calibration marking point on the first calibration plate, so as to achieve alignment of the fixed marking point with the corresponding calibration marking point.

[0044] After the alignment is completed, the auxiliary camera can be used to determine the first coordinate of the corresponding fixed mark point. It can be understood that a camera coordinate system corresponding to the auxiliary camera is preset in the application, the center of the field of view of the auxiliary camera is aligned with the fixed mark point, the second calibration plate is located in the focal plane of the auxiliary camera, and the center of the field of view of the auxiliary camera is aligned with the fixed mark point. Therefore, the coordinates of the fixed mark point (i.e., the first coordinate) can be determined by the camera coordinate system corresponding to the auxiliary camera.

[0045] Step S130, move the coaxial camera away, and control the first calibration plate to move toward the second calibration plate along a direction perpendicular to the second calibration plate through the multi-axis motion mechanism, so that the first calibration plate fits the second calibration plate.

[0046] After the alignment of the fixed mark point and the calibration mark point and the acquisition of the first coordinate are completed, the coaxial camera can exit the space area between the first calibration plate and the second calibration plate, and the processor controls the multi-axis motion mechanism to move the first calibration plate, thereby re-adjusting the distance between the first calibration plate and the second calibration plate, for example, referring to Figure 1 , move the first calibration plate upward so that the first calibration plate fits the second calibration plate.

[0047] Step S140: when the first calibration plate is attached to the second calibration plate, determine the second coordinates of the corresponding calibration mark points based on the auxiliary camera.

[0048] In this regard, since the area on the second calibration plate corresponding to the fixed mark point is a transparent area, after the first calibration plate is attached to the second calibration plate, the first calibration plate is also located in the focal plane of the auxiliary camera. Therefore, the calibration mark point is the same as the fixed mark point, that is, when the first calibration plate is attached to the second calibration plate, the calibration mark point and the fixed mark point are also located in the focal plane of the auxiliary camera.

[0049] Similarly, the auxiliary camera can be used to determine the second coordinate corresponding to the calibration mark point. Optionally, in one embodiment, the auxiliary camera is used to capture an image containing the calibration mark point and the fixed mark point, and then the pixel spacing between the two points in the X-axis and Y-axis directions corresponding to the camera coordinate system is calculated, and according to the mapping relationship between the pixel and a unit length on the coordinate axis, the distance corresponding to the pixel spacing in the camera coordinate system is determined, thereby combining the first coordinate corresponding to the fixed mark point to determine the second coordinate corresponding to the calibration mark point. Optionally, in another embodiment, the position of the auxiliary camera can be re-moved so that the center of the field of view of the auxiliary camera is aligned with the calibration mark point, so as to obtain the second coordinate corresponding to the calibration mark point.

[0050] Step S150: Determine whether the error calibration device has a comprehensive error based on the first coordinate and the second coordinate.

[0051] After determining the first coordinate and the second coordinate, the processor may determine whether there is a comprehensive error by comparing the first coordinate and the second coordinate. For example, in one embodiment, when the first coordinate and the second coordinate coincide, that is, the two coordinates are equal, it can be determined that there is no comprehensive error, and when the first coordinate and the second coordinate do not coincide, that is, the two coordinates are not equal, it can be determined that there is a comprehensive error.

[0052] Step S160: If it is determined that a comprehensive error exists, calibrate and compensate the comprehensive error based on the first coordinate and the second coordinate.

[0053] In some embodiments, for the case where there is a comprehensive error, the processor can calculate the coordinate distance values ​​of the first coordinate and the second coordinate in different coordinate axis directions based on the first coordinate and the second coordinate. For example, corresponding to the X-axis direction, the difference between the coordinate values ​​of the first coordinate and the second coordinate corresponding to the X-axis is used as the coordinate distance value in the X-axis direction; corresponding to the Y-axis direction, similarly, the difference between the coordinate values ​​of the first coordinate and the second coordinate corresponding to the Y-axis can be used as the coordinate distance value in the Y-axis direction.

[0054] In this regard, after determining the coordinate distance values ​​in different coordinate axis directions, the processor can compensate for the comprehensive error according to the coordinate distance values. For example, when controlling the multi-axis motion mechanism to drive the first calibration plate to move, the corresponding coordinate axis direction is compensated according to the coordinate distance values ​​in different coordinate axis directions to compensate for the offset of the first calibration plate and the second calibration plate in the Z-axis direction due to the comprehensive error during the alignment process, thereby realizing the alignment of the fixed mark point and the calibration mark point in the coordinate system.

[0055] It should be noted that, in some embodiments, after determining the coordinate distance values ​​in different coordinate axis directions, the processor can further calculate the corresponding spacing for another set of marking points, that is, the coordinate spacing of another calibration marking point on the first calibration plate and the corresponding fixed marking point on the second calibration plate in the coordinate system, and determine another coordinate spacing based on the coordinate distance values ​​of the previous set of marking points in different coordinate axis directions, so as to determine that the obtained coordinate distance values ​​are used to compensate for the comprehensive error when the two spacings are equal.

[0056] It can be seen from the above scheme that based on the coaxial camera in the error calibration device, the alignment of the marking points on different calibration plates relative to the coaxial camera is completed, so that the coaxial error of the coaxial camera is calibrated based on the relative position of the marking points. Then, by using a set of marking points as a reference to compare the coordinates obtained before and after the movement, the comprehensive error is determined, thereby quickly and effectively calibrating the comprehensive error to facilitate error compensation.

[0057] In some embodiments, in the case where the error calibration device includes multiple auxiliary cameras, each auxiliary camera corresponds to a fixed mark point, that is, the center of the field of view of each auxiliary camera is aligned with a fixed mark point. In this regard, when judging whether there is a comprehensive error, the processor determines the first coordinate corresponding to the corresponding fixed mark point and the second coordinate corresponding to the calibration mark point through the auxiliary camera, and then determines whether there is a comprehensive error by comparing the first coordinate and the second coordinate. Specifically, when the first coordinate corresponding to each fixed mark point coincides with the second coordinate corresponding to the calibration mark point corresponding to the fixed mark point, it can be determined that there is no comprehensive error.

[0058] For example, there is a calibration mark point A on the first calibration plate. 1 and calibration mark point A 2 , there is a fixed mark point B on the second calibration plate 1 and fixed marker point B 2 , where the fixed mark point B 1 and calibration mark point A 1 Corresponding, fixed mark point B 2 and calibration mark point A 2 Then, the corresponding fixed mark point B is determined by the auxiliary camera. 1 The coordinates (X 1 , Y 1 ), corresponding to the fixed mark point B 2 The coordinates (X 2 , Y 2 ), corresponding to the calibration mark point A 1 The coordinates (X 3 , Y 3 ), corresponding to the calibration mark point A 2 The coordinates (X 4 , Y 4 ). Then at the coordinate (X 1 , Y 1 ) and coordinates (X 3 , Y 3 ) coincides with the coordinates (X 2 , Y 2 ) and coordinates (X 4 , Y 4 ) coincide with each other, the processor determines that there is no combined error.

[0059] In addition, in one embodiment, based on the above embodiment, the processor determines the corresponding fixed mark point B through the auxiliary camera. 1 The coordinates (X 1 , Y 1 ), corresponding to the fixed mark point B 2 The coordinates (X 2 , Y 2 ), corresponding to the calibration mark point A1 The coordinates (X 3 , Y 3 ), corresponding to the calibration mark point A 2 The coordinates (X 4 , Y 4 ); if the coordinate (X 1 , Y 1 ) and coordinates (X 3 , Y 3 ) and coordinates (X 2 , Y 2 ) and coordinates (X 4 , Y 4 ) do not overlap, the processor can determine that there is a combined error.

[0060] Therefore, the solution compares multiple sets of coordinates to determine whether each set of coordinates coincides, so as to more accurately determine whether there is a comprehensive error and improve the accuracy of error calibration.

[0061] Figure 4 The structural diagram of the test equipment provided by an embodiment of the present application, the test equipment includes the error calibration device provided by the above embodiment, and the test equipment is used to execute the error calibration method provided by the above embodiment, and has the functional modules and beneficial effects corresponding to the execution method. As shown in the figure, the test equipment includes a processor 401, a memory 402, an input device 403 and an output device 404. The number of processors 401 can be one or more, and one processor 401 is taken as an example in the figure; the processor 401, the memory 402, the input device 403 and the output device 404 can be connected by a bus or other means, and the figure takes the connection through the bus as an example. The memory 402, as a computer-readable storage medium, can be used to store software programs, computer executable programs and modules, such as program instructions / modules corresponding to the error calibration method in the embodiment of the present application. The processor 401 executes the corresponding various functional applications and data processing by running the software programs, instructions and modules stored in the memory 402, that is, the above-mentioned error calibration method is realized.

[0062] The memory 402 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating system and at least one application required for a function; the data storage area may store data recorded or created during use, etc. In addition, the memory 402 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 402 may further include a memory remotely arranged relative to the processor 401, and these remotely arranged memories may be connected to the device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0063] The input device 403 can be used to input corresponding digital or character information to the processor 401, and to generate key signal input related to the user settings and function control of the device; the output device 404 can be used to send or display key signal output related to the user settings and function control of the device.

[0064] An embodiment of the present application also provides a storage medium storing computer executable instructions, which, when executed by a processor, are used to perform relevant operations in the error calibration method provided in any embodiment of the present application.

[0065] Computer-readable storage media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device.

[0066] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0067] Note that the above are only preferred embodiments of the present application and the technical principles used. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. An error calibration device, characterized in that: include: A first calibration plate, wherein a plurality of calibration marking points are arranged on the first calibration plate, and the plurality of calibration marking points are respectively located at different positions on the first calibration plate; A multi-axis motion mechanism, the multi-axis motion mechanism is connected to the first calibration plate, and the multi-axis motion mechanism is used to drive the first calibration plate to move in three mutually perpendicular axial directions and a rotational axis; A second calibration plate, wherein a plurality of fixed marking points are arranged on the second calibration plate, and an area on the second calibration plate where the fixed marking points are arranged is a transparent area, and positions of the fixed marking points correspond one-to-one to positions of the calibration marking points; an auxiliary camera, wherein the auxiliary camera is located outside a first side of the second calibration plate, and the first side of the second calibration plate is a side away from the first calibration plate; A coaxial camera, wherein the coaxial camera comprises a first camera and a second camera on the same axis, the coaxial camera is located between the first calibration plate and the second calibration plate, the first camera is used to photograph calibration mark points on the first calibration plate, and the second camera is used to photograph fixed mark points on the second calibration plate; Among them, the error calibration device is applied to the whole machine equipment that needs to use the coaxial camera, so as to use the auxiliary camera and the coaxial camera to observe and identify the first calibration plate and the second calibration plate, take the fixed mark points of the auxiliary camera and the second calibration plate as the reference, observe the position coordinates of the calibration mark points of the coaxial camera and the first calibration plate before and after lifting, compare the coordinates obtained before and after lifting to determine the comprehensive error, and when controlling the multi-axis motion mechanism to drive the first calibration plate to move, according to the coordinate distance value in the direction of different coordinate axes, compensate the corresponding coordinate axis direction to compensate for the offset of the first calibration plate and the second calibration plate in the same coordinate axis direction due to the comprehensive error during the alignment process, so as to realize the alignment of the fixed mark points and the calibration mark points in the coordinate system.

2. The error calibration device according to claim 1, characterized in that: There are four fixed marking points and four calibration marking points, and the four calibration marking points are arranged in an array on the first calibration plate, and the four fixed marking points are arranged in an array on the second calibration plate.

3. The error calibration device according to claim 2, characterized in that: The error calibration device is provided with two auxiliary cameras, and each auxiliary camera is corresponding to photograph any fixed marking point.

4. An error calibration method, characterized in that: Applied to the error calibration device according to any one of claims 1 to 3, the error calibration method comprises: Controlling a preset distance between the first calibration plate and the second calibration plate, wherein the preset distance is greater than a thickness of the coaxial camera; Using the coaxial camera to photograph the fixed marking points and the calibration marking points located in the same axial direction, and controlling the first calibration plate to move parallel to the second calibration plate through the multi-axis motion mechanism to align any two of the fixed marking points with the corresponding calibration marking points, and determining the first coordinates corresponding to the fixed marking points based on the auxiliary camera; Move the coaxial camera away, and control the first calibration plate to move toward the second calibration plate in a direction perpendicular to the second calibration plate through the multi-axis motion mechanism, so that the first calibration plate is attached to the second calibration plate; When the first calibration plate is attached to the second calibration plate, determining a second coordinate corresponding to the calibration mark point based on the auxiliary camera; Determining whether the error calibration device has a comprehensive error according to the first coordinate and the second coordinate; If it is determined that the comprehensive error exists, the comprehensive error is calibrated and compensated based on the first coordinate and the second coordinate.

5. The error calibration method according to claim 4, characterized in that: The determining whether the error calibration device has a comprehensive error according to the first coordinate and the second coordinate includes: If the first coordinate coincides with the second coordinate, it is determined that the comprehensive error does not exist; If the first coordinate does not coincide with the second coordinate, it is determined that the comprehensive error exists.

6. The error calibration method according to claim 5, characterized in that: In the case where the error calibration device includes a plurality of the auxiliary cameras, if the first coordinate coincides with the second coordinate, determining that the comprehensive error does not exist comprises: Based on the plurality of auxiliary cameras, determining first coordinates of a plurality of fixed marking points corresponding to the number of cameras and second coordinates of a plurality of calibrated marking points; When the first coordinate of each corresponding fixed marking point coincides with the second coordinate of the corresponding calibration marking point, it is determined that the comprehensive error does not exist.

7. The error calibration method according to claim 6, characterized in that: If the first coordinate and the second coordinate do not coincide with each other, determining that the comprehensive error exists includes: In the case where the first coordinate of each fixed marking point does not coincide with the second coordinate of the corresponding calibration marking point, it is determined that the comprehensive error exists.

8. The error calibration method according to claim 4, characterized in that: If it is determined that the comprehensive error exists, calibrating and compensating the comprehensive error based on the first coordinate and the second coordinate includes: The coordinate distance values ​​between the first coordinate and the second coordinate in different coordinate axis directions are calculated to compensate the comprehensive error according to the coordinate distance values.

9. A testing device, characterized in that: The error calibration device according to any one of claims 1 to 3, wherein the test equipment further comprises: one or more processors; A storage device for storing one or more programs, when the one or more programs are executed by the one or more processors, enables the one or more processors to implement the error calibration method as described in any one of claims 4-8.

10. A storage medium storing computer executable instructions, characterized in that: The computer executable instructions are used to execute the error calibration method as described in any one of claims 4 to 8 when executed by a processor.

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