A high-efficiency cleaning equipment for recycled wafers

Abstract

The application provides a high-efficiency wafer cleaning device, and relates to the technical field of wafer cleaning, which comprises a first bearing main body, a second bearing main body rotatably connected inside the first bearing main body, a plurality of wafer accommodating cassettes detachably connected to the second bearing main body, locking devices installed between the cassettes and the second bearing main body, two strip-shaped limiting protrusions fixed to the upper end of the second bearing main body, and strip-shaped limiting grooves formed in the inner side of the strip-shaped limiting protrusions. The cassette comprises two symmetrically arranged limiting main bodies, two limiting openings compatible with the two strip-shaped limiting protrusions are formed in the lower end of the limiting main body, and a telescopic hydraulic locking device is installed between the two limiting openings. The hydraulic locking device comprises two extendable hydraulic locking ends, and the ends of the hydraulic locking ends are compatible with the strip-shaped limiting grooves. The application simplifies the process of installing and dismounting the cassettes and improves the efficiency of wafer centralized cleaning.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer cleaning, in particular to a high-efficiency cleaning equipment for recycled wafers. BACKGROUND

[0002] Concentrating the recycled wafers in the cassette for centralized cleaning can improve the efficiency of wafer cleaning, and the position of the wafer as a whole during cleaning can be ensured by the turnover structure, so that the problem of cleaning dead angle in centralized cleaning can be solved.

[0003] In the traditional centralized cleaning process, the cassette containing wafers needs to be locked and fixed on the surface of the predetermined mounting platform, and the traditional cassette and the corresponding locking structure are relatively simple. In the early installation process, the cassette needs to be stably installed on the surface of the predetermined mounting platform, which consumes a long time. Similarly, in the disassembly process, the opposite steps need to be installed, which consumes a lot of time in the process of disassembling the cassette, and affects the efficiency of the centralized cleaning of the recycled wafers. SUMMARY

[0004] In view of the above problems, the present application provides a high-efficiency cleaning equipment for recycled wafers, which simplifies the process of installing and disassembling the cassette, and improves the efficiency of wafer centralized cleaning.

[0005] To solve the above problems, the technical scheme adopted by the present application is as follows:

[0006] A high-efficiency cleaning equipment for recycled wafers, comprising a first bearing main body, a second bearing main body rotatably connected inside the first bearing main body, a plurality of cassettes for containing wafers detachably connected to the second bearing main body, a locking device installed between the cassette and the second bearing main body, two strip-shaped limiting protrusions fixed to the upper end of the second bearing main body, and a strip-shaped limiting groove opened in the inner side of the strip-shaped limiting protrusion; the cassette comprises two symmetrically arranged limiting main bodies, two limiting openings adapted to the two strip-shaped limiting protrusions are opened at the lower end of the limiting main body, a telescopic hydraulic locking device is installed between the two limiting openings, the hydraulic locking device comprises two extendable hydraulic locking ends, the ends of the hydraulic locking ends are adapted to the strip-shaped limiting groove, an elastic element is installed between the two hydraulic locking ends, and the two hydraulic locking ends are controlled by the elastic element to be in the extended state; a hydraulic touch control device in communication with the hydraulic locking device is installed on the outer side of the limiting main body, and when the limiting main body is gripped, the hydraulic touch control device is squeezed to extrude the control oil in the hydraulic touch control device into the hydraulic locking device to control the contraction of the two hydraulic locking ends.

[0007] Preferably, the hydraulic locking device includes a hydraulic locking base, an installation chamber is formed inside the hydraulic locking base, two installation pistons are slidably connected to the inner wall of the installation chamber, the hydraulic locking end is installed on the outside of the corresponding installation piston, the end of the installation piston passes through the hydraulic locking base and is slidably connected to it, a control chamber is formed on the outside of the installation piston, and the hydraulic touch device communicates with the control chamber.

[0008] Preferably, the elastic element is installed between the two mounting pistons, and a limiting block is also installed on the inner wall of the mounting cavity. The limiting block is located on the movement path of the mounting piston and controls the extreme contraction position of the mounting piston through the limiting block.

[0009] Preferably, the hydraulic touch device includes a hydraulic touch base and a hydraulic touch terminal, and a receiving chamber for accommodating control oil is formed between the hydraulic touch base and the hydraulic touch terminal, and the receiving chamber is connected to the control chamber.

[0010] Preferably, a pumping pipe assembly for conveying control oil is installed between the control chamber and the hydraulic touch device. The pumping pipe assembly includes a first pumping pipe with a built-in check valve and a second pumping pipe with a built-in control valve.

[0011] Preferably, the control valve is a touch valve, and the control valve is installed on the outer wall of the limiting body near the hydraulic touch device.

[0012] Preferably, the two limiting bodies slide relative to each other, and a guide rod is installed between the two limiting bodies.

[0013] Preferably, a retractable limiting plate is fixed to the inner wall of the strip-shaped limiting groove. The limiting plate is staggered from the hydraulic locking end, wherein after the hydraulic locking end extends, the limiting plate is extended to press against the hydraulic locking end.

[0014] Preferably, a limiting component is installed on the upper end of the second supporting body. The limiting component includes a first hydraulic telescopic rod, and a second hydraulic telescopic rod is also installed on the inner wall of the strip-shaped limiting groove. The second hydraulic telescopic rod is connected to the first hydraulic telescopic rod.

[0015] The beneficial effects of this invention are as follows:

[0016] Compared with existing technologies, the above structural design allows for automatic extension of the hydraulic locking ends on both sides to lock and limit the material against the strip-shaped limiting protrusions during the locking process, eliminating the need for manual locking and improving locking effectiveness and efficiency. Simultaneously, during the clamping and loading process, the robotic arm automatically grips the hydraulic touch control device to adjust and control the flow of the hydraulic fluid, achieving automatic control during clamping. This works in conjunction with the hydraulic locking device to complete automatic locking control. Furthermore, this invention eliminates the need for built-in electrical locking components, preventing damage to the electrical structure from prolonged exposure to the cleaning liquid, and also eliminates the need for manual locking, significantly improving the efficiency of regenerated wafer cleaning. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0018] Figure 2 This is a three-dimensional structural diagram of the cassette of the present invention.

[0019] Figure 3 For the present invention Figure 2 A schematic diagram of the main structure.

[0020] Figure 4 For the present invention Figure 2 A side view structural diagram.

[0021] Figure 5 For the present invention Figure 2 A schematic diagram of the structure viewed from below.

[0022] Figure 6 For the present invention Figure 5 A magnified structural diagram at point A.

[0023] In the diagram: 100, First supporting body; 110, Rotation control motor; 200, Second supporting body; 210, Strip-shaped limiting protrusion; 211, Strip-shaped limiting groove; 300, Chip holder; 310, Receiving body; 320, Limiting body; 321, Limiting opening; 330, Guide rod; 400, Hydraulic touch device; 410, Hydraulic touch base; 420, Hydraulic touch end; 500, Hydraulic locking device; 510, Hydraulic locking base; 520, Mounting piston; 5201, Control chamber; 530, Hydraulic locking end; 540, Elastic element; 600, Control valve; 700, Limiting assembly; 710, First hydraulic telescopic rod; 720, Supporting rod; 800, Wafer. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0025] The surface of regenerated wafers contains a large number of metal impurities, which need to be cleaned before processing.

[0026] Concentrating recycled wafers in a wafer cassette for centralized cleaning can improve wafer cleaning efficiency. By setting up a flip structure, the overall position of the wafers can be adjusted during the cleaning process, which can solve the problem of cleaning dead spots in centralized cleaning.

[0027] In traditional centralized cleaning processes, wafer cassettes containing wafers need to be locked and fixed to the surface of a predetermined mounting platform. Traditional wafer cassettes and their corresponding locking structures are relatively simple. In the initial installation process, each wafer needs to be securely installed on the predetermined mounting platform surface, which takes a long time. Similarly, the disassembly process requires the reverse steps, which consumes a lot of time during wafer cassette disassembly and affects the efficiency of centralized cleaning of regenerated wafers.

[0028] To solve the above problems, please refer to the appendix. Figure 1 -Appendix Figure 6 A high-efficiency cleaning device for regenerated wafers includes a first support body 100, a second support body 200 rotatably connected inside the first support body 100, and a plurality of wafer cassettes 300 for accommodating wafers 800 detachably connected to the second support body 200. A locking device is installed between the wafer cassettes 300 and the second support body 200, and the locking device can fix the plurality of wafer cassettes 300 to the upper end of the second support body 200 to ensure the stability of the wafer cassettes 300 and the wafers 800 during the cleaning process.

[0029] Specifically, the upper end of the second supporting body 200 is fixed with two strip-shaped limiting protrusions 210, and the inner side of the strip-shaped limiting protrusions 210 has a strip-shaped limiting groove 211; the disc box 300 includes two symmetrically arranged limiting bodies 320, and the lower end of the limiting body 320 has two limiting openings 321 that are adapted to the two strip-shaped limiting protrusions 210. A retractable hydraulic locking device 500 is installed between the two limiting openings 321. The hydraulic locking device 500 includes two extendable hydraulic locking ends 530. The end of the tight end 530 is adapted to the strip-shaped limiting groove 211. An elastic element 540 is installed between the two hydraulic locking ends 530. The elastic element 540 controls the two hydraulic locking ends 530 to be in the extended state in normal condition. By pumping control oil into the hydraulic locking device 500, the hydraulic locking ends 530 on both sides can be controlled to be in the retracted state, so that the strip-shaped limiting protrusion 210 can pass through the limiting opening 321 normally, and control the hydraulic locking ends 530 to be opposite to the strip-shaped limiting groove 211.

[0030] During the discharge of control oil, the elastic element 540 can control the hydraulic locking ends 530 on both sides to extend themselves. The extended hydraulic locking ends 530 on both sides can enter the corresponding strip-shaped limiting groove 211 for limiting, which can ensure the stability of the overall structure.

[0031] A hydraulic touch device 400 connected to the hydraulic locking device 500 is installed on the outside of the limiting body 320. When the limiting body 320 is gripped, the hydraulic touch device 400 is squeezed to force the control oil inside the hydraulic touch device 400 into the hydraulic locking device 500, controlling the retraction of the two hydraulic locking ends 530. The entire cassette 300 can be clamped by the robotic arm from both sides by gripping the hydraulic touch device 400. During the clamping process of the robotic arm, the control oil inside the hydraulic touch device 400 can be forced into the hydraulic locking device 500 to control the retraction of the hydraulic locking ends 530 on both sides. After the robotic arm places the cassette 300 at a predetermined position on the upper end of the second supporting body 200, the robotic arm on both sides is released. Under the action of the elastic element 540, the control oil is forced into the hydraulic touch device 400. During this process, the hydraulic locking ends 530 automatically extend to complete the locking and limiting.

[0032] Through the above structural design, during the locking process, the elastic element 540 can control the hydraulic locking ends 530 on both sides to automatically extend and lock with the strip-shaped limiting protrusion 210, eliminating the need for manual locking operations and improving the locking effect and efficiency. At the same time, during the clamping and feeding process, the robot can automatically clamp the hydraulic touch control device 400 to adjust and control the flow of the hydraulic fluid, achieving automatic control during clamping. It can cooperate with the hydraulic locking device 500 to complete automatic locking control. This invention does not require built-in electrical locking elements, avoiding damage to the electrical structure caused by long-term exposure to cleaning liquid, and also eliminates the need for manual locking, greatly improving the efficiency of regenerated wafer cleaning.

[0033] Specifically, the hydraulic locking device 500 includes a hydraulic locking base 510, an installation chamber is formed inside the hydraulic locking base 510, two installation pistons 520 are slidably connected to the inner wall of the installation chamber, a hydraulic locking end 530 is installed on the outside of the corresponding installation piston 520, the end of the installation piston 520 passes through the hydraulic locking base 510 and is slidably connected to it, a control chamber 5201 is formed on the outside of the installation piston 520, and the hydraulic touch device 400 communicates with the control chamber 5201.

[0034] The two control chambers 5201 are located on the outer side. Pumping control oil from the outside can push the mounting pistons 520 on both sides to overcome the elasticity of the elastic element 540 and achieve automatic retraction. The hydraulic locking ends 530 on both sides can extend and enter the corresponding strip-shaped limiting grooves 211 to complete the locking and positioning.

[0035] The hydraulic locking end 530 here is set to four sets, which can ensure the stability of the overall limit of the wafer cassette 300 from four positions, avoid the overall structure from shaking during the flipping and cleaning process, ensure the quality of the wafers, and prevent damage during the cleaning of regenerated wafers.

[0036] The elastic element 540 is installed between the two mounting pistons 520. A limit block is also installed on the inner wall of the mounting chamber. The limit block is located on the moving path of the mounting piston 520 and controls the extreme contraction position of the mounting piston 520.

[0037] By setting a limit block, the extreme retraction position of the mounting piston 520 can be limited, preventing the control chamber 5201 on one side from retracting to the extreme under the action of hydraulic pressure, and preventing the hydraulic locking end 530 on one side from retracting completely to the inside, thus ensuring the normal operation of the overall structure.

[0038] Specifically, the hydraulic touch device 400 includes a hydraulic touch base 410 and a hydraulic touch terminal 420. A receiving chamber for accommodating control oil is formed between the hydraulic touch base 410 and the hydraulic touch terminal 420. The receiving chamber is connected to the control chamber 5201. The hydraulic touch base 410 and the hydraulic touch terminal 420 can be configured with reference to the structure of an elastic telescopic rod. The hydraulic touch base 410 and the hydraulic touch terminal 420 are in a sealed sliding connection state. During the process of squeezing the hydraulic touch terminal 420, the internal oil can be squeezed into the control chamber 5201.

[0039] The hydraulic touch base 410 and hydraulic touch end 420 here need to be flat to avoid the sides being too long and taking up too much volume. At the same time, during the extension and retraction process, the volume of the accommodating chamber here needs to be adapted to the volume of the two control chambers 5201 to ensure that the control oil can flow normally between the two and avoid accidents.

[0040] A pumping pipe assembly for conveying control oil is installed between the control chamber 5201 and the hydraulic touch device 400. The pumping pipe assembly includes a first pumping pipe with a built-in check valve and a second pumping pipe with a built-in control valve 600.

[0041] It should be noted that the one-way valve in the first pumping pipeline can only control the oil in the hydraulic touch device 400 to flow into the hydraulic locking device 500 in one direction. After the cassette 300 is stabilized at the limit position, the control valve 600 is adjusted to be in a closed state. During this process, the oil can be prevented from flowing back into the hydraulic touch device 400 and the hydraulic locking ends 530 on both sides can be prevented from contracting, thus further ensuring the stability of the cassette 300 in the limit position.

[0042] During the disassembly of the disc cartridge 300, the control valve 600 is adjusted to be in the open state. During this process, the control oil in the hydraulic touch device 400 is squeezed into the hydraulic locking device 500, which controls the hydraulic locking ends 530 on both sides to retract, thereby quickly removing the disc cartridge 300 as a whole.

[0043] The preferred control valve 600 is a touch valve. The control valve 600 is installed on the outer wall of the limiting body 320 near the hydraulic touch device 400. During the process of the robot holding the hydraulic touch device 400, the robot can squeeze the control valve 600 through its own telescopic structure to control it to be in the conducting state.

[0044] During the installation of the disc holder 300, the hydraulic touch device 400 is squeezed to pump control oil into the hydraulic locking device 500 in one direction, controlling the extension and retraction of the hydraulic locking end 530. After the disc holder 300 is installed and positioned, the control valve 600 remains open, allowing the hydraulic locking end 530 to extend into the strip-shaped limiting groove 211 to complete locking. After the hydraulic locking end 530 extends, the control valve 600 is closed, ensuring that control oil can only flow from the hydraulic touch device 400 into the hydraulic locking device 500 in one direction, preventing backflow and potential accidents.

[0045] During the disassembly of the tablet cassette 300, the control valve 600 is first squeezed to open, and then the hydraulic touch devices 400 on both sides are squeezed to control the hydraulic locking end 530 at the bottom to retract. After the hydraulic locking end 530 is misaligned with the strip-shaped limiting protrusion 210, the tablet cassette 300 is lifted as a whole and detached from the second supporting body 200, so as to achieve quick disassembly and removal.

[0046] Preferably, the two limiting bodies 320 slide relative to each other, and a guide rod 330 is installed between the two limiting bodies 320. The guide rod 330 can limit the limiting bodies 320 on both sides to ensure the stability of the limiting bodies 320. The receiving body 310 and the limiting body 320 can be fixed by a traditional bolt structure to ensure stability. By setting two relatively sliding limiting bodies 320, it is possible to accommodate film boxes 300 of different lengths and sizes, while also reducing the manufacturing precision of the film box 300 and avoiding the phenomenon of failure to lock and install.

[0047] A retractable limiting plate is fixed on the inner wall of the strip-shaped limiting groove 211. The limiting plate is staggered from the hydraulic locking end 530. After the hydraulic locking end 530 extends, the limiting plate is extended to press the hydraulic locking end 530 against it.

[0048] By controlling the extension of the limiting plate, the hydraulic locking end 530 can be pressed against, and friction can be applied to the hydraulic locking end 530 to further ensure its stability. The limiting plate and the cross-section of the hydraulic locking end 530 can be set as interlocking wedges, which can increase the friction between them after the limiting plate extends, ensuring the stability of the overall structure.

[0049] A limiting component 700 is installed on the upper end of the second supporting body 200. The limiting component 700 includes a first hydraulic telescopic rod 710, and a second hydraulic telescopic rod is also installed on the inner wall of the strip-shaped limiting groove 211. The second hydraulic telescopic rod is connected to the first hydraulic telescopic rod 710. Through the above structural design, the extension of the limiting plate can be controlled by the existing limiting component 700 structure, which simplifies the adjustment and arrangement of the internal structure.

[0050] During the retraction of the bearing rod 720 controlled by the first hydraulic telescopic rod 710, the oil at the bottom of the first hydraulic telescopic rod 710 can be squeezed into the second hydraulic telescopic rod to control the second hydraulic telescopic rod to drive the limit plate to extend. Finally, the limit plates on both sides improve the stability of the hydraulic locking ends 530 on both sides.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-efficiency cleaning device for regenerated wafers, comprising a first carrier body (100), a second carrier body (200) rotatably connected inside the first carrier body (100), a plurality of wafer cassettes (300) for accommodating wafers (800) detachably connected to the second carrier body (200), and a locking device installed between the wafer cassettes (300) and the second carrier body (200), characterized in that: The second supporting body (200) has two strip-shaped limiting protrusions (210) fixed at its upper end, and the inner side of the strip-shaped limiting protrusions (210) has a strip-shaped limiting groove (211); the cassette (300) includes two symmetrically arranged limiting bodies (320), and the lower end of the limiting body (320) has two limiting openings (321) adapted to the two strip-shaped limiting protrusions (210). A retractable hydraulic locking device (500) is installed between the two limiting openings (321). The hydraulic locking device (500) includes two extendable hydraulic locking ends (530). The ends of the hydraulic locking ends (530) are adapted to the strip-shaped limiting grooves (211). An elastic element (540) is installed between the two hydraulic locking ends (530). The elastic element (540) controls the two hydraulic locking ends (530) to be normally in the extended state. The limiting body (320) is equipped with a hydraulic touch device (400) connected to the hydraulic locking device (500) on the outside. When the limiting body (320) is gripped, the hydraulic touch device (400) is squeezed to squeeze the control oil in the hydraulic touch device (400) into the hydraulic locking device (500) to control the contraction of the two hydraulic locking ends (530). The hydraulic locking device (500) includes a hydraulic locking base (510), an installation chamber is formed inside the hydraulic locking base (510), two installation pistons (520) are slidably connected to the inner wall of the installation chamber, the hydraulic locking end (530) is installed on the outside of the corresponding installation piston (520), the end of the installation piston (520) passes through the hydraulic locking base (510) and is slidably connected to it, a control chamber (5201) is formed on the outside of the installation piston (520), and the hydraulic touch device (400) communicates with the control chamber (5201); The hydraulic touch device (400) includes a hydraulic touch base (410) and a hydraulic touch terminal (420). A receiving chamber for containing control oil is formed between the hydraulic touch base (410) and the hydraulic touch terminal (420), and the receiving chamber is connected to the control chamber (5201).

2. The high-efficiency cleaning equipment for regenerated wafers according to claim 1, characterized in that, The elastic element (540) is installed between the two mounting pistons (520). A limiting block is also installed on the inner wall of the mounting chamber. The limiting block is located on the moving path of the mounting piston (520) and controls the extreme contraction position of the mounting piston (520) through the limiting block.

3. The high-efficiency cleaning equipment for regenerated wafers according to claim 1, characterized in that, A pumping pipe assembly for conveying control oil is installed between the control chamber (5201) and the hydraulic touch device (400). The pumping pipe assembly includes a first pumping pipe with a built-in check valve and a second pumping pipe with a built-in control valve (600).

4. The high-efficiency cleaning equipment for regenerated wafers according to claim 3, characterized in that, The control valve (600) is a touch valve, and the control valve (600) is installed on the outer wall of the limiting body (320) near the hydraulic touch device (400).

5. The high-efficiency cleaning equipment for regenerated wafers according to claim 1, characterized in that, The two limiting bodies (320) slide relative to each other, and a guide rod (330) is installed between the two limiting bodies (320).

6. The high-efficiency cleaning equipment for regenerated wafers according to claim 1, characterized in that, The inner wall of the strip-shaped limiting groove (211) is fixed with a retractable limiting plate. The limiting plate is staggered from the hydraulic locking end (530). After the hydraulic locking end (530) extends, the limiting plate extends to press against the hydraulic locking end (530).

7. The high-efficiency cleaning equipment for regenerated wafers according to claim 6, characterized in that, The upper end of the second bearing body (200) is equipped with a limiting component (700), the limiting component (700) includes a first hydraulic telescopic rod (710), and a second hydraulic telescopic rod is also installed on the inner wall of the strip-shaped limiting groove (211). The second hydraulic telescopic rod is connected to the first hydraulic telescopic rod (710).

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