Vacuum magnetron sputtering coating method and equipment for automobile parts

Abstract

The invention discloses a vacuum magnetron sputtering coating method and equipment for automobile parts, and particularly relates to a coating technology, which comprises the following steps: S01, normalizing the automobile parts, and keeping the temperature at 650-700 DEG C to obtain a to-be-coated part; s02, the to-be-coated part is placed in low-temperature plasma treatment equipment, and low-temperature plasma surface modification treatment is carried out in the room temperature and oxygen gas environment; and S03, after modification treatment, film coating is conducted, titanium oxide is adopted as a target material for sputtering, the shielding gas is argon, the reaction gas is nitrogen, the film coating working air pressure ranges from 0.8 Pa to 1.4 Pa, the target material sputtering power ranges from 300 W to 400 W, and the sputtering temperature ranges from 400 DEG C to 500 DEG C. According to the vacuum magnetron sputtering coating method for the automobile parts, the film deposited through the vacuum coating technology has high adhesive force with the surfaces of the automobile parts, and the film is not prone to falling off or stripping.

Description

Technical Field

[0001] The invention relates to coating technology, and in particular to a vacuum magnetron sputtering coating method and equipment for automobile parts. Background Art

[0002] As a technology for producing specific film layers, vacuum coating technology has a wide range of applications in real production and life. Vacuum coating technology mainly includes three forms: evaporation coating, sputtering coating and ion plating. Magnetron sputtering coating refers to a coating technology that uses the coating material as a target cathode, bombards the target material with argon ions, produces cathode sputtering, and sputters the target atoms onto the workpiece to form a deposition layer. The coating material remains solid and does not form a molten pool.

[0003] Reference publication (announcement) number: CN112301320A, publication (announcement) date: 2021-02-02, a process method for treating polyester material automotive interior flame retardant using magnetron sputtering technology is disclosed, and the process method for treating polyester material automotive interior flame retardant using magnetron sputtering technology includes the following steps: target material selection, making the mixed flame retardant material to be deposited into a plate target, and setting a distance from the target; substrate cleaning, making the substrate coating surface clean and free of dirt for standby use; coating chamber pretreatment, first inflating the vacuum chamber for a period of time, then raising the bell jar, installing the substrate, and cleaning the coating chamber; gas preparation, filling with process gas; coating and optimization, applying voltage between the cathode and the anode, and generating glow discharge between the two electrodes for coating, optimizing the coating, wrapping it on the surface of a moving workpiece, and improving the deposition rate; ending and packaging, turning off the DC or RF power supply, closing the argon valve, and packaging and sealing the coated workpiece. The present application provides a process method with optimization function for coating flame retardant materials on polyester material automotive interior.

[0004] In the prior art including the above patents, vacuum magnetron sputtering coating is also used in the production of automotive glass, thereby improving functionality. If vacuum magnetron sputtering coating is applied to automotive parts, the corrosion resistance of automotive parts will be better than that of traditional sheet metal spraying! Summary of the invention

[0005] The purpose of the present invention is to provide a vacuum magnetron sputtering coating method and equipment for automobile parts to solve the above problems.

[0006] In order to achieve the above object, the present invention provides the following technical solution: a vacuum magnetron sputtering coating method for automobile parts, comprising the following steps:

[0007] S01, normalizing the automobile parts at a temperature of 650°C-700°C to obtain parts to be plated;

[0008] S02, placing the object to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment;

[0009] S03. After the modification treatment, coating is carried out, titanium oxide is used as the target for sputtering, the protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 0.8-1.4Pa, the target sputtering power is 300-400W, and the sputtering temperature is 400-500℃.

[0010] Preferably, in step S03, the argon flow rate is 25-40 mL / min, and the nitrogen flow rate is 3-5 mL / min.

[0011] Preferably, the target-substrate distance in the coating process of step S03 is 70-80 mm.

[0012] Preferably, the time for the coating treatment per unit area in step S03 is predetermined to be 30-50 minutes.

[0013] Preferably, in the coating process of 30-50 minutes, the sputtering time of titanium oxide is 25-40 minutes, and the sputtering time of carbon ions is 5-10 minutes.

[0014] Preferably, the ratio of the titanium oxide to the carbon ions per unit area is 2:0.4-0.6.

[0015] Preferably, the vacuum degree in the coating process of step S03 is 3×10 -3 Pa-7×10 -3 Pa.

[0016] Preferably, the magnetron sputtering coating treatment takes 30-60 minutes.

[0017] Preferably, the annealing temperature in step S01 is 350°C-450°C.

[0018] In the above technical solution, the vacuum magnetron sputtering coating method and equipment for automobile parts provided by the present invention have the following beneficial effects: the film deposited by the vacuum coating technology has strong adhesion to the surface of the automobile parts and is not easy to fall off or peel off. This helps to ensure that the film maintains stable performance during long-term use. Titanium oxide and carbon ions both have good chemical stability and excellent corrosion resistance. They can resist the erosion of acid, alkali and other chemical substances. When they are deposited on the surface of automobile parts, a dense protective film can be formed to effectively prevent the parts from being corroded.

[0019] Example Description

[0020] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with embodiments.

[0022] Embodiment 1

[0023] A vacuum magnetron sputtering coating method for automobile parts comprises the following steps:

[0024] S01, normalizing the automobile parts, maintaining the temperature at 650°C-700°C, and the annealing temperature at 350°C-450°C, to obtain the parts to be plated;

[0025] S02, placing the part to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment;

[0026] S03. After the modification treatment, coating is carried out, titanium oxide is used as the target for sputtering, the protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 0.8-1.4Pa, the target sputtering power is 300-400W, and the sputtering temperature is 400-500℃.

[0027] Furthermore, in step S03, the argon flow rate is 25-40 mL / min, and the nitrogen flow rate is 3-5 mL / min.

[0028] Secondly, the target-substrate distance in the coating process of step S03 is 70-80 mm.

[0029] Furthermore, the predetermined coating treatment time per unit area in step S03 is 30-50 minutes.

[0030] Secondly, the vacuum degree in step S03 coating is 3×10 -3 Pa-7×10 -3 Pa.

[0031] Furthermore, the magnetron sputtering coating process takes 30-60 minutes.

[0032] Embodiment 2

[0033] Based on Example 1, the steps provided in this implementation include:

[0034] S01, normalizing the automobile parts, maintaining the temperature at 650°C, and the annealing temperature at 350°C, to obtain the parts to be plated;

[0035] S02, placing the part to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment;

[0036] S03. After the modification treatment, coating is carried out, titanium oxide is used as the target for sputtering, the protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 0.8, the target sputtering power is 300W, and the sputtering temperature is 400°C.

[0037] Furthermore, in step S03, the argon flow rate is 25 mL / min, and the nitrogen flow rate is 3 mL / min.

[0038] Secondly, the target-substrate distance in the coating process of step S03 is 70 mm.

[0039] Furthermore, the time for the coating process per unit area in step S03 is predetermined to be 30 minutes.

[0040] Secondly, the vacuum degree in step S03 coating is 3×10 -3 Pa.

[0041] Furthermore, the magnetron sputtering coating process lasts for 30 minutes.

[0042] Embodiment 3

[0043] Based on Example 1, the steps provided in this implementation include:

[0044] S01, normalizing the automobile parts, maintaining the temperature at 675°C, and the annealing temperature at 375°C, to obtain the parts to be plated;

[0045] S02, placing the part to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment;

[0046] S03. After the modification treatment, coating is carried out, and titanium oxide is used as the target for sputtering. The protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 1.1 Pa, the target sputtering power is 350 W, and the sputtering temperature is 450°C.

[0047] Furthermore, in step S03, the argon flow rate is 32 mL / min, and the nitrogen flow rate is 4 mL / min.

[0048] Secondly, the target-substrate distance in the coating process of step S03 is 75 mm.

[0049] Furthermore, the predetermined coating treatment time per unit area in step S03 is 42 minutes.

[0050] Secondly, the vacuum degree in step S03 coating is 5×10 -3 Pa.

[0051] Furthermore, the magnetron sputtering coating process takes 40 minutes.

[0052] Embodiment 4

[0053] Based on Example 1, the steps provided in this implementation include:

[0054] S01, normalizing the automobile parts, maintaining the temperature at 700°C, and the annealing temperature at 450°C, to obtain the parts to be plated;

[0055] S02, placing the part to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment;

[0056] S03. After the modification treatment, coating is carried out, and titanium oxide is used as the target for sputtering. The protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 1.4 Pa, the target sputtering power is 400 W, and the sputtering temperature is 500°C.

[0057] Furthermore, in step S03, the argon flow rate is 40 mL / min, and the nitrogen flow rate is 5 mL / min.

[0058] Secondly, the target-substrate distance in the coating process of step S03 is 80 mm.

[0059] Furthermore, the predetermined coating treatment time per unit area in step S03 is 50 minutes.

[0060] Secondly, the vacuum degree in step S03 coating is 7×10 -3 Pa.

[0061] Furthermore, the magnetron sputtering coating process lasts for 60 minutes.

[0062] Embodiment 5

[0063] Based on the first embodiment, in the coating process of 30-50 minutes, the sputtering time of titanium oxide is 25-40 minutes, and the sputtering time of carbon ions is 5-10 minutes. The ratio of titanium oxide to carbon ions per unit area is 2:0.4-0.6.

[0064] Embodiment 6

[0065] Based on Example 5, compared with Example 2, in the coating process of 30 minutes, the sputtering time of titanium oxide is 25 minutes, and the sputtering time of carbon ions is 5 minutes. The ratio of titanium oxide to carbon ions per unit area is 2:0.4.

[0066] Embodiment 7

[0067] Based on Example 5, compared with Example 3, in the coating process of 42 minutes, the sputtering time of titanium oxide is 32 minutes, and the sputtering time of carbon ions is 10 minutes. The ratio of titanium oxide to carbon ions per unit area is 2:0.5.

[0068] Embodiment 8

[0069] Based on Example 5, compared with Example 4, in the coating process of 50 minutes, the sputtering time of titanium oxide is 40 minutes, and the sputtering time of carbon ions is 10 minutes. The ratio of titanium oxide to carbon ions per unit area is 2:0.6.

[0070] It should be noted that the carbon ions in the sixth, seventh and eighth embodiments described above are graphite.

[0071] Comparative Example 1

[0072] The above-mentioned Embodiment 2, Embodiment 3, Embodiment 4 and Embodiment 5, Embodiment 6 and Embodiment 7 are selected to carry out corrosion resistance monitoring between mixed carbon ions and unmixed carbon ions.

[0073] Experimental content: The materials in the above embodiments were sampled and placed in concentrated sulfuric acid with a ratio of sulfuric acid to water of 2:3. The monitoring time was 7 days, and the temperature and relative humidity of the environment were kept consistent. The obtained structure was made into the following table (Table 1):

[0074]

[0075] (Table 1)

[0076] In summary, it can be seen from Table 1 that no obvious signs of rust were observed in the first three days for the coating A formed by titanium oxide and the coating B formed by a mixture of titanium oxide and carbon ions. However, the rust area of ​​the coating A increased on the fourth, fifth and sixth days and could be directly observed with the naked eye. In contrast, the rust appeared on the fifth day for the coating B and the rust rate was slower. The ratios of carbon ions in the coating B provided in Examples 6 and 7 were 0.5 and 0.6, respectively, that is, when the ratio of titanium oxide to carbon ions was 2:0.5, superior acid resistance and corrosion resistance could be obtained.

[0077] Comparative Example 2

[0078] The above-mentioned Embodiment 2, Embodiment 3, Embodiment 4 and Embodiment 5, Embodiment 6 and Embodiment 7 are selected, that is, the corrosion resistance monitoring between mixed carbon ions and unmixed carbon ions.

[0079] Experimental content: The materials in the above embodiments were sampled and placed in a strong base with a ratio of sulfuric acid to water of 2:3. The monitoring time was 15 days and 30 days, and the temperature and relative humidity of the environment were kept consistent. The obtained structure was made into the following table (Table 2):

[0080]

[0081] (Table 2)

[0082] In summary, it can be seen from Table 2 that the titanium oxide formed coating A and the titanium oxide mixed with carbon ions formed coating B, coating A had obvious rust surface on the 15th day, and the rust surface area was different with different processes. No rust was found in coating B. After 30 days, the rust area of ​​coating A further expanded, while the rust area of ​​coating B decreased with the increase of carbon ion ratio, indicating that the alkali resistance was best when the carbon ion ratio was 0.6.

[0083] Based on the above comparative examples 1 and 2, the film deposited by vacuum coating technology has strong adhesion to the surface of automotive parts and is not easy to fall off or peel off. This helps to ensure that the film maintains stable performance during long-term use. Titanium oxide and carbon ions have good chemical stability and excellent corrosion resistance. They can resist the erosion of acid, alkali and other chemical substances. Depositing them on the surface of automotive parts can form a dense protective film to effectively prevent the parts from being corroded.

[0084] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum magnetron sputtering coating method for automobile parts, characterized in that: The following steps are involved: S01, normalizing the automobile parts at a temperature of 650°C-700°C to obtain parts to be plated; S02, placing the object to be coated in a low-temperature plasma treatment device, and performing a surface modification treatment with low-temperature plasma at room temperature and an oxygen gas environment; S03. After the modification treatment, coating is carried out, and titanium oxide is used as the target for sputtering. The protective gas is argon, the reaction gas is nitrogen, the coating working pressure is 0.8-1.4Pa, the target sputtering power is 300-400W, and the sputtering temperature is 400-500℃.

2. A vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: In step S03, the argon flow rate is 25-40 mL / min, and the nitrogen flow rate is 3-5 mL / min.

3. The vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: The target-substrate distance in the coating process of step S03 is 70-80 mm.

4. The vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: The time for the coating treatment per unit area in step S03 is predetermined to be 30-50 minutes.

5. The vacuum magnetron sputtering coating method for automobile parts according to claim 2, characterized in that: In the coating process of 30-50 minutes, the sputtering time of titanium oxide is 25-40 minutes, and the sputtering time of carbon ions is 5-10 minutes.

6. A vacuum magnetron sputtering coating method for automobile parts according to claim 2, characterized in that: The ratio of the titanium oxide to the carbon ions per unit area is predetermined to be 2:0.4-0.

6.

7. The vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: The vacuum degree in step S03 coating is 3×10 -3 Pa-7×10 -3 Pa.

8. The vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: The magnetron sputtering coating treatment time is 30-60 minutes.

9. The vacuum magnetron sputtering coating method for automobile parts according to claim 1, characterized in that: The annealing temperature in step S01 is 350°C-450°C.

10. A vacuum magnetron sputtering coating equipment for automobile parts, characterized in that: Used to implement the vacuum magnetron sputtering coating method for automobile parts as described in any one of claims 1 to 9.

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