An empty basket detection and docking device

Abstract

The present invention provides an empty basket detection and docking device, belonging to the field of silicon wafer production and manufacturing, including an empty basket tooth detection return line and an empty basket outer shape detection streamline; the empty basket outer shape detection streamline is arranged downstream of the empty basket tooth detection return line; wherein, a line scan camera for detecting the empty basket teeth is arranged above the empty basket tooth detection return line, and a matrix camera for detecting the empty basket outer shape is arranged above the empty basket outer shape detection streamline. A docking section flower basket transfer module, the docking section flower basket transfer module uses a robot or a claw that moves in the overhead space arranged on the rack for the spatial transfer of the empty flower basket. The docking device of the present application can take into account the detection of the empty flower basket before it is transferred upstream in the subsequent process section, and the automation degree of the empty basket return is high. An empty basket quality detection process is added to ensure the appearance quality of the empty flower basket, which is convenient for popularization and application in the field of silicon wafer manufacturing and processing.

Description

Technical Field

[0001] The present invention belongs to the field of silicon wafer production and processing, and particularly relates to an empty basket detection and docking device. Background Art

[0002] After the existing silicon wafer degumming, wafer insertion, and cleaning processes, in order to improve efficiency, the subsequent process flow, such as a silicon wafer sorter, is docked at the end of the cleaning machine. The existing docking method only transports the full basket of silicon wafers to the downstream sorter, and cannot realize the recycling of the empty flower basket, which leads to a reduction in efficiency. Therefore, in order to improve the automation of the utilization of the empty flower basket, a docking section for the empty basket to return is needed to be designed. Summary of the Invention

[0003] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide an empty basket detection and docking device, which can solve the above problems.

[0004] An empty basket detection and docking device includes an empty basket tooth detection return line and an empty basket outer shape detection flow line; the empty basket outer shape detection flow line is arranged downstream of the empty basket tooth detection return line; wherein, a line scan camera for detecting the teeth of the empty basket is arranged above the empty basket tooth detection return line, and a area array camera for detecting the outer shape of the empty basket is arranged above the empty basket outer shape detection flow line.

[0005] Optionally, the empty basket tooth detection return line includes a tooth detection frame and a lifting and transverse movement component. Among them, the tooth detection frame adopts a double-layer flat frame design, and the lifting and transverse movement component is arranged at the double-layer flat frame of the tooth detection frame for lifting and horizontally moving the flower basket.

[0006] Optionally, the tooth detection frame includes a tooth detection outer vertical frame, an upper support flat frame, and a lower transverse movement support flat frame; the upper support flat frame is horizontally arranged on the top layer of the tooth detection outer vertical frame, and the lower transverse movement support flat frame is horizontally arranged below the upper support flat frame, and the height difference between them is adapted to the height of the flower basket; a plurality of flower basket guide members and flower basket sensors are arranged on the upper support flat frame for supporting and sensing the flower basket.

[0007] Optionally, the lifting and transverse movement component includes a lifting flat frame, a lifting cylinder component, a transverse movement carrier plate, a transverse movement guide rail component, and an empty basket translation drive component; the transverse movement carrier plate is slidably arranged on the lower transverse movement support flat frame of the tooth detection frame through the transverse movement guide rail component, the empty basket translation drive component is connected to the transverse movement carrier plate, the lifting cylinder component is arranged between the lifting flat frame and the transverse movement carrier plate, and the outer width of the lifting flat frame is smaller than the inner width of the upper support flat frame.

[0008] Optionally, the empty basket appearance detection streamline includes an empty basket appearance detection rack, an empty basket appearance detection belt assembly, an empty basket temporary storage and conveying belt assembly, and a flower basket guide member for the appearance detection section; the empty basket appearance detection belt assembly and the empty basket temporary storage and conveying belt assembly are arranged on the empty basket appearance detection rack at the same horizontal plane, the flower basket guide member for the appearance detection section is arranged above the empty basket temporary storage and conveying belt assembly; the area array camera is arranged above the empty basket appearance detection belt assembly.

[0009] Optionally, the empty basket detection and docking device further includes a flower basket transfer module for the docking section. The flower basket transfer module for the docking section uses a robot or a gripper that moves in the overhead space arranged on the rack for the spatial transfer of the empty flower basket.

[0010] Compared with the prior art, the beneficial effects of the present invention are as follows: The docking device of the present application can take into account the detection of the empty flower basket before it is transferred upstream in the subsequent process section, and the degree of automation of the empty basket return is high. An empty basket quality inspection process is added to ensure the appearance quality of the empty flower basket, which is convenient for popularization and application in the field of silicon wafer manufacturing and processing. Description of the Drawings

[0011] Figure 1 Schematic diagram of an example of the empty basket detection and docking device of the present invention;

[0012] Figure 2 Schematic diagram of the empty basket tooth detection return line;

[0013] Figure 3 Schematic diagram of the lifting and transverse movement assembly;

[0014] Figure 4 Schematic diagram of the flower basket transfer path of the empty basket tooth detection return line;

[0015] Figure 5 Schematic diagram of the empty basket appearance detection streamline;

[0016] Figure 6 Schematic diagram of the empty basket tooth detection return line and the empty basket appearance detection streamline arranged on the same straight line;

[0017] Figure 7 Schematic diagram of the empty basket detection and docking device provided with a flower basket transfer module for the docking section.

[0018] In the figure,

[0019] 400. Flower basket transfer module for the docking section;

[0020] 500. Empty basket tooth detection return line; 510. Basket tooth detection frame; 511. Outer vertical frame for basket tooth detection; 512. Upper support flat frame; 513. Lower horizontal moving support flat frame; 520. Lifting and horizontal moving assembly; 521. Lifting flat frame; 522. Lifting cylinder assembly; 523. Horizontal moving carrier plate; 524. Horizontal moving guide rail assembly; 525. Empty basket translation drive assembly; 526. Lifting and lowering guiding assembly for lifting; 530. Flower basket guide; 540. Flower basket inductor;

[0021] 600. Empty basket outer shape detection streamline; 610. Empty basket outer shape detection frame; 620. Empty basket outer shape detection belt assembly; 630. Empty basket temporary storage and conveying belt assembly; 640. Outer shape detection section flower basket guide;

[0022] 700. Line scan camera;

[0023] 800. Area array camera. Detailed implementation mode

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0025] An empty basket detection and docking device, see Figures 1-7 , the empty basket detection and docking device includes an empty basket tooth detection return line 500 and an empty basket outer shape detection streamline 600; the empty basket outer shape detection streamline 600 is arranged downstream of the empty basket tooth detection return line 500; wherein, a line scan camera 700 for detecting the teeth of the empty basket is arranged above the empty basket tooth detection return line 500, and an area array camera 800 for detecting the outer shape of the empty basket is arranged above the empty basket outer shape detection streamline 600.

[0026] Among them, see Figures 2-4 , the empty basket tooth detection return line 500 includes a basket tooth detection frame 510 and a lifting and horizontal moving assembly 520. Among them, the basket tooth detection frame 510 adopts a double-layer flat frame design, and the lifting and horizontal moving assembly 520 is arranged at the double-layer flat frame of the basket tooth detection frame 510 for lifting and horizontally moving the flower basket.

[0027] The basket tooth detection frame 510 includes a basket tooth detection outer frame 511, an upper support flat frame 512, and a lower transverse movement support flat frame 513; the upper support flat frame 512 is horizontally arranged on the top layer of the basket tooth detection outer frame 511, and the lower transverse movement support flat frame 513 is horizontally arranged below the upper support flat frame 512, and the height difference between them is adapted to the height of the flower basket; a plurality of flower basket guide members 530 and flower basket sensors 540 are arranged on the upper support flat frame 512 for supporting and sensing the flower basket.

[0028] In the illustrated example, the flower basket guide member 530 adopts an inclined support seat with a guide notch, and the flower basket sensor 540 adopts a photoelectric sensor arranged on the adapter plate.

[0029] Specifically, six pairs of flower basket guide members 530 and six flower basket sensors 540 are provided. The first four pairs of flower basket guide members 530 are flower basket buffer positions, and the fifth and sixth pairs of flower basket guide members 530 are line scan detection positions for detecting whether the basket teeth of the empty flower basket are damaged.

[0030] The lifting and transverse movement assembly 520 includes a lifting flat frame 521, a lifting cylinder assembly 522, a transverse movement carrier plate 523, a transverse movement guide rail assembly 524, and an empty basket translation drive assembly 525; the transverse movement carrier plate 523 is slidably arranged on the lower transverse movement support flat frame 513 of the basket tooth detection frame 510 through the transverse movement guide rail assembly 524, the empty basket translation drive assembly 525 is connected to the transverse movement carrier plate 523, the lifting cylinder assembly 522 is arranged between the lifting flat frame 521 and the transverse movement carrier plate 523, and the outer width of the lifting flat frame 521 is smaller than the inner width of the upper support flat frame 512.

[0031] Further, the bottom of the cylinder body of the lifting cylinder assembly 522 is fixed to the transverse movement carrier plate 523, and the piston rod of the lifting cylinder assembly 522 is connected to the bottom surface of the lifting flat frame 521 through a lifting plate member. In the illustrated example, a set of lifting cylinder assemblies 522 is adopted. Correspondingly, a plurality of lifting and guiding assemblies 526 are also arranged between the lifting flat frame 521 and the transverse movement carrier plate 523. The lifting and guiding assemblies 526 adopt a guide shaft and guide sleeve assembly, or a slide rail and slider assembly. In the illustrated example, four groups of lifting and guiding assemblies 526 are arranged in four directions of the transverse movement carrier plate 523.

[0032] Further, a plurality of flower basket guide members 530 are arranged on the two side beams of the lifting flat frame 521. In the illustrated example, a guide plate with a support notch is adopted.

[0033] The empty basket translation drive assembly 525 has various forms, such as a linear motor assembly, a motor slide rail assembly, a motor gear and rack assembly, or a motor belt assembly as shown in the figure.

[0034] During operation, refer to Figure 4, the lifting and horizontal translation component 520 as a whole moves in a "hui" - shaped space, lifting, horizontally translating, and lowering the flower baskets on the flower basket buffer positions of the flower basket detection frame 510 to the line - scan detection position. The line - scan camera 700 above the line - scan detection position performs line - scan image acquisition on the flower baskets, and the processor performs image processing to determine whether the teeth of the flower baskets are damaged.

[0035] Among them, referring to Figure 5 , the empty - basket outer - shape detection flow line 600 includes an empty - basket outer - shape detection frame 610, an empty - basket outer - shape detection belt assembly 620, an empty - basket temporary storage and conveying belt assembly 630, and a flower - basket guide member 640 for the outer - shape detection section; the empty - basket outer - shape detection belt assembly 620 and the empty - basket temporary storage and conveying belt assembly 630 are arranged on the empty - basket outer - shape detection frame 610 at the same horizontal plane, and the flower - basket guide member 640 for the outer - shape detection section is arranged above the empty - basket temporary storage and conveying belt assembly 630; the area - array camera 800 is arranged above the empty - basket outer - shape detection belt assembly 620.

[0036] The empty - basket outer - shape detection belt assembly 620 and the empty - basket temporary storage and conveying belt assembly 630 can be the same set of belt assemblies or two separate sets of belts. In the case of two sets of belts, they can be synchronously driven by one power source or independently driven by two power sources.

[0037] Of course, it is not limited to belt conveying. However, for better outer - shape detection, the belt - conveying mode is preferred, and generally white belts are used.

[0038] Referring to Figure 7 , the empty - basket detection and docking device further includes a flower - basket transfer module 400 for the docking section. The flower - basket transfer module 400 uses a robot or a gripper that moves in the overhead space on the rack for the spatial transfer of empty flower baskets.

[0039] Specifically, in the illustrated example, the flower - basket transfer module 400 for the docking section uses a gripper that moves in the overhead space on the rack to transport the empty flower baskets that have finished taking materials from the downstream sorting machine to the empty - basket tooth - detection return line 500, and transports the ones that pass the detection on the empty - basket outer - shape detection flow line 600 to the external empty - basket return line, and returns from the empty - basket return line to the upstream inserting section. The empty flower baskets with NG detection results are repaired manually.

[0040] Among them, the layout forms of the empty - basket tooth - detection return line 500 and the empty - basket outer - shape detection flow line 600 can be Figure 1 and Figure 7 vertically arranged, or can be Figure 6 arranged in the same straight line. The specific form is not limited, as long as it meets the requirements of upstream - downstream transfer and the rationality of the layout space with other mechanisms within the docking device.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. An empty basket detection docking device, characterized in that: The empty basket detection docking device comprises an empty basket tooth detection return flow line (500) and an empty basket shape detection streamline (600); the empty basket shape detection streamline (600) is arranged downstream of the empty basket tooth detection return flow line (500); wherein a line scan camera (700) for empty basket tooth detection is arranged above the empty basket tooth detection return flow line (500), and an area array camera (800) for empty basket shape detection is arranged above the empty basket shape detection streamline (600); The empty basket tooth detection return line (500) comprises a basket tooth detection frame (510) and a lifting and transverse movement assembly (520), wherein the basket tooth detection frame (510) adopts a double-layer flat frame design, and the lifting and transverse movement assembly (520) is arranged at the double-layer flat frame of the basket tooth detection frame (510) and is used to lift and transversely move the flower basket.

2. The empty basket detection docking device according to claim 1, characterized in that: The basket gear detection frame (510) comprises a basket gear detection external frame (511), an upper support flat frame (512) and a lower transverse support flat frame (513); the upper support flat frame (512) is horizontally arranged on the top layer of the basket gear detection external frame (511), and the lower transverse support flat frame (513) is horizontally arranged below the upper support flat frame (512), and the height difference between the two is adapted to the height of the flower basket; a plurality of flower basket guides (530) and flower basket sensors (540) are arranged on the upper support flat frame (512) for supporting and sensing the flower basket.

3. The empty basket detection docking device according to claim 2, characterized in that: The lifting and transverse movement assembly (520) comprises a lifting flat frame (521), a lifting cylinder assembly (522), a transverse movement carrier plate (523), a transverse movement guide rail assembly (524) and an empty basket translation drive assembly (525); the transverse movement carrier plate (523) is slidably arranged on the lower transverse movement support flat frame (513) of the basket gear detection frame (510) via the transverse movement guide rail assembly (524), the empty basket translation drive assembly (525) is connected to the transverse movement carrier plate (523), the lifting cylinder assembly (522) is arranged between the lifting flat frame (521) and the transverse movement carrier plate (523), and the outer width of the lifting flat frame (521) is smaller than the inner width of the upper support flat frame (512).

4. The empty basket detection docking device according to claim 1, characterized in that: The empty basket shape detection streamline (600) comprises an empty basket shape detection frame (610), an empty basket shape detection belt assembly (620), an empty basket temporary storage conveying belt assembly (630) and a shape detection section basket guide (640); the empty basket shape detection belt assembly (620) and the empty basket temporary storage conveying belt assembly (630) are arranged on the empty basket shape detection frame (610) in the same horizontal plane, and the shape detection section basket guide (640) is arranged above the empty basket temporary storage conveying belt assembly (630); and the area array camera (800) is arranged above the empty basket shape detection belt assembly (620).

5. The empty basket detection docking device according to claim 1, characterized in that: The empty basket detection docking device further comprises a docking section flower basket transfer module (400), wherein the docking section flower basket transfer module (400) adopts a robot or a clamping claw arranged on the top of a frame and moves in space, and is used for spatial transfer of the empty flower basket.

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