Silicon wafer full basket detection pre-selection docking device and pre-selection docking method

Abstract

The present invention provides a silicon wafer full basket detection pre-selection docking device and a pre-selection docking method, which belong to the field of silicon wafer production and processing. The detection pre-selection docking device includes a silicon wafer feeding docking belt line, a full basket defect detection module, a full basket defect rejection module and a docking section basket transfer module; the full basket defect rejection module adopts a "U"-shaped material basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket inflow and lifting; the docking section basket transfer module is used for the spatial transfer of silicon wafer baskets. The pre-selection docking method includes silicon wafer cooling, full basket upper layer detection, full basket lower layer detection, basket transfer, NG basket repair, and repair basket transfer. Compared with the existing technology, the beneficial effect of the present invention is that the docking device of the present application integrates the functions of silicon wafer cooling, optical detection, screening, repair, etc., ensures the quality of silicon wafers, saves the time of subsequent sorting, and is convenient for promotion and application in the field of silicon wafer processing and production.

Description

Technical Field

[0001] The present invention belongs to the field of silicon wafer production and processing, and in particular relates to a silicon wafer full basket detection pre-selection docking device and a pre-selection docking method. Background Art

[0002] After the existing silicon wafer debonding, wafer insertion, and cleaning processes, to improve efficiency, subsequent processes, such as a wafer sorter, are connected to the end of the cleaning machine. This existing connection method places the wafer sorter directly after the cleaning machine, using manual or robotic transport of the cleaned and dried wafers to the sorter for defect detection and sorting. This significantly increases the time spent in the subsequent sorting process, as a high probability of defective wafers will enter the sorter, increasing the workload of subsequent sorting to remove debris and other obvious defects.

[0003] In addition, there is a material basket that is obviously not a normal full basket entering the subsequent sorting section, which will also cause a waste of process time.

[0004] Therefore, in order to reduce subsequent time waste, it is necessary to design a pre-sorting docking section. Summary of the Invention

[0005] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a silicon wafer full basket detection pre-selection docking device and a pre-selection docking method, which can solve the above-mentioned problems.

[0006] A silicon wafer full basket detection and pre-selection docking device comprises a silicon wafer feeding docking belt line, a full basket defect detection module, a full basket defect rejection module and a docking section basket transfer module; the full basket defect detection module and the full basket defect rejection module are arranged at the streamline ends of the silicon wafer feeding docking belt line; the full basket defect rejection module adopts a "U"-shaped material basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket inflow and lifting; the docking section basket transfer module is used for the spatial transfer of the silicon wafer basket.

[0007] Optionally, the silicon wafer feeding docking belt line includes a docking belt frame, a belt drive assembly and a docking belt; and a plurality of belt basket sensors are arranged on the docking belt frame on both sides of the docking belt.

[0008] Optionally, the full basket defect detection module includes an upper layer detection component of the flower basket and a lower layer detection component of the flower basket, and the upper layer detection component and the lower layer detection component both include a defect detection camera unit, a detection light source and a detection outer cover plate arranged on a detection frame, wherein the defect detection camera unit and the detection light source of the upper layer detection component of the flower basket are arranged downward, and the defect detection camera unit and the detection light source of the lower layer detection component of the flower basket are arranged upward.

[0009] Optionally, the full basket defect rejection module includes a full basket output streamline, a full basket rejection lifting streamline, a full basket inflow streamline and a full basket repair lifting streamline arranged on the full blue defect rejection rack; the full basket output streamline and the full basket inflow streamline are arranged on the full blue defect rejection rack with upper and lower intervals, the full basket rejection lifting streamline is vertically arranged at the outer end of the full basket output streamline, and the full basket repair lifting streamline is vertically arranged at the inner end of the full basket inflow streamline.

[0010] Optionally, the full basket output streamline and the full basket inflow streamline both include a full basket streamline rack, a full basket streamline drive assembly, a full basket streamline blocking buffer block assembly and a full basket streamline in place sensor; the full basket streamline drive assembly is arranged on the full basket streamline rack, and the full basket streamline blocking buffer block assembly and the full basket streamline in place sensor are arranged on both sides of the transport direction of the full basket streamline rack; the full basket output streamline and / or the full basket inflow streamline also include side guide plates and side pushing modules for guiding the silicon wafer flower basket.

[0011] Optionally, the full basket rejection lifting streamline includes a flower basket lifting chain platform, a lifting upper side plate, a lifting lower side plate, a material removal lifting cylinder and a material removal lifting guide assembly; the side of the flower basket lifting chain platform is supported and arranged between the two lifting upper side plates, and the two material removal lifting cylinders are vertically arranged between the corresponding side lifting upper side plates and the lifting lower side plates. The top of the piston rod of the upper part of the material removal lifting cylinder is connected to the outer side of the top of the lifting upper side plate, and the outer side and bottom of the cylinder of the lower part of the material removal lifting cylinder are connected to the inner side of the lifting lower side plate. A material removal lifting guide assembly is arranged on both sides of the material removal lifting cylinder on each lifting lower side plate, and the top of the material removal lifting guide assembly is connected to the bottom of the lifting upper side plate through a guide side support plate.

[0012] Optionally, the full basket repair lifting streamline includes a flower basket lifting platform, an upper lifting mounting plate, a lower lifting mounting plate, a repair lifting assembly and a repair lifting guide assembly; one side of the repair lifting assembly is fixed to the outer side surfaces of the upper lifting mounting plate and the lower lifting mounting plate, the drive transmission section of the repair lifting assembly is connected to the flower basket lifting platform, and the repair lifting guide assembly is arranged on both sides of the repair lifting assembly and connected to the outer side surfaces of the upper lifting mounting plate and the lower lifting mounting plate.

[0013] Optionally, the silicon wafer full basket detection and pre-selection docking device further includes a silicon wafer basket cooling module, which is arranged across the silicon wafer feeding and docking belt line to cool the full wafer basket below.

[0014] Optionally, the docking section flower basket transfer module uses a robot or a gripper that moves in the overhead space set on the rack.

[0015] The present invention also provides a preselection docking method, which includes: S1, silicon wafer cooling, S2, full basket upper layer detection, S3, full basket lower layer detection, S4, flower basket transportation, S5, NG flower basket repair, and S6, repair basket transportation.

[0016] Compared with the existing technology, the beneficial effect of the present invention is that the docking device of the present application integrates the functions of silicon wafer cooling, optical detection, screening, repair, etc., which ensures the quality of silicon wafers, saves the time of subsequent sorting, and is convenient for promotion and application in the field of silicon wafer processing and production. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic structural diagram of the silicon wafer full basket detection and pre-selection docking device of the present invention;

[0018] Figure 2 A schematic diagram of a portion of the structure of a preselection docking device for full basket detection of silicon wafers;

[0019] Figure 3 This is a schematic diagram of the upper detection component of the flower basket;

[0020] Figure 4 This is a schematic diagram of the lower layer detection component of the flower basket;

[0021] Figure 5 This is a schematic diagram of the full basket defect removal module;

[0022] Figure 6 This is a schematic diagram of the output streamlines for a full basket;

[0023] Figure 7 It is a schematic diagram of the inflow streamline of a full basket;

[0024] Figure 8 This is a schematic diagram of the full basket with the lifting and lowering streamlines removed;

[0025] Figure 9 Schematic diagram of repairing the lifting and lowering flow lines for a full basket;

[0026] Figure 10 A schematic diagram of an example of a docking section flower basket transfer module.

[0027] In the figure,

[0028] 100. Silicon wafer feeding docking belt line; 110. Docking belt rack; 120. Belt drive assembly; 130. Docking belt; 140. Belt basket sensor;

[0029] 200, full basket defect detection module; 210, flower basket upper layer detection component; 220, flower basket lower layer detection component; 201, detection frame; 202, defect detection camera unit; 203, detection light source; 204, detection outer sealing plate;

[0030] 300, full basket defect rejection module; 310, full basket output flow line; 301, full basket flow line frame; 302, full basket flow line drive assembly; 303, full basket flow line blocking buffer block assembly; 304, full basket flow line in-position sensor; 305, side guide plate; 306, side push module; 320, full basket rejection lifting flow line; 321, flower basket lifting chain platform; 322, lifting upper side plate; 323, lifting lower side plate; 324, material removal lifting cylinder; 3 25. Material removal lift guide assembly; 326. Guide side support plate; 330. Full basket inflow flow line; 340. Full basket repair lift flow line; 341. Flower basket lifting platform; 342. Lift upper mounting plate; 343. Lift lower mounting plate; 344. Repair lift assembly; 345. Repair lift guide assembly; 346. Repair lift limiter; 347. Repair lift travel limiter; 348. Repair lift in-position sensor; 350. Full basket defect removal rack;

[0031] 400, docking section flower basket transfer module;

[0032] 500. Silicon wafer basket cooling module. DETAILED DESCRIPTION

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0034] Wafer full basket detection pre-selection docking device

[0035] A silicon wafer full basket detection preselection docking device, see Figures 1-10 The silicon wafer full basket detection and pre-selection docking device includes a silicon wafer feeding docking belt line 100, a full basket defect detection module 200, a full basket defect rejection module 300 and a docking section basket transfer module 400.

[0036] Specifically, the full basket defect detection module 200 and the full basket defect rejection module 300 are arranged at the streamline end of the silicon wafer feeding and docking belt line 100; the full basket defect rejection module 300 adopts a "U"-shaped material basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket flowing in and rising and falling; the docking section flower basket transfer module 400 is used for the spatial transfer of silicon wafer flower baskets.

[0037] See also Figure 2The silicon wafer feeding docking belt line 100 includes a docking belt frame 110, a belt driving assembly 120 and a docking belt 130; a plurality of belt basket sensors 140 are set on the docking belt frame 110 on both sides of the docking belt 130.

[0038] The belt drive assembly 120 includes a docking belt drive motor, a drive sprocket, a chain, a drive roller, and a transmission roller. The number of belt basket sensors 140 is related to the maximum number of wafer baskets that the docking belt 130 can support, as well as the corresponding positions of the infeed sensor, outfeed sensor, cooling station, and inspection station.

[0039] The full basket defect detection module 200 includes a basket upper layer detection component 210 and a basket lower layer detection component 220. Figure 3 and Figure 4 The upper layer detection component 210 and the lower layer detection component 220 of the flower basket both include a defect detection camera unit 202, a detection light source 203 and a detection outer sealing plate 204 arranged on the detection frame 201, wherein the defect detection camera unit 202 and the detection light source 203 of the upper layer detection component 210 of the flower basket are arranged downward, and the defect detection camera unit 202 and the detection light source 203 of the lower layer detection component 220 are arranged upward.

[0040] In this specific example, the inspection frame 201 is constructed of a box-frame structure constructed from profiles. Multiple defect detection camera units 202 are spaced side by side in the center of the upper portion of the inspection frame 201. Multiple inspection cover plates 204 are positioned around the upper portion of the inspection frame 201, near the cameras and light sources. For the upper layer inspection assembly 210, the inspection light source 203 is positioned above the defect detection camera units 202, illuminating downward. For the lower layer inspection assembly 220, the inspection light source 203 is positioned above the defect detection camera units 202, illuminating upward.

[0041] The detection light source 203 is a strip light, and the detection outer sealing plate 204 is a mirror-finished stainless steel plate.

[0042] See also Figure 5 The full basket defect rejection module 300 includes a full basket output flow line 310, a full basket rejection lifting flow line 320, a full basket inflow flow line 330, and a full basket repair lifting flow line 340, which are arranged on a full blue defect rejection rack 350. The full basket output flow line 310 and the full basket inflow flow line 330 are arranged on the full blue defect rejection rack 350 with an interval between them. The full basket rejection lifting flow line 320 is vertically arranged at the outer end of the full basket output flow line 310, and the full basket repair lifting flow line 340 is vertically arranged at the inner end of the full basket inflow flow line 330.

[0043] The full basket output flow line 310 is arranged downstream of the docking belt line 100, and the docking section flower basket transfer module 400 transfers the full flower basket detected with fragment defects from the previous station to the full basket output flow line 310. The full basket output flow line 310 is used to transfer the full flower basket detected with fragment defects to the manual repair position at the outer end; the full basket rejection lifting flow line 320 is arranged on the full blue defect rejection rack 350 at the outer end of the full basket output flow line 310, and is used to receive the manual repair position. The repaired full basket descends to the receiving position of the full basket inflow line 330; the full basket inflow line 330 is arranged below the full basket outflow line 310 and is used to transport the repaired full basket from the outside to the inside to the repair ascending position. The full basket repair lifting line 340 is arranged vertically opposite the full basket rejection lifting line 320 and is used to raise the repaired full basket from the full basket inflow line 330 to the repair transfer station aligned with the full basket outflow line 310. The docking section basket transfer module 400 transfers the repaired full basket from the full basket repair lifting line 340 to a downstream station, such as a sorting machine. As can be seen, the supply flow line of the full baskets that have been detected as defective forms a "U"-shaped supply line.

[0044] Among them, the arrangement of the full basket output streamline 310 and the full basket inflow streamline 330 can be horizontally parallel or inclined parallel. When arranged inclined parallel, the full basket output streamline 310 and the full basket inflow streamline 330 are both arranged obliquely downward from the inner end, that is, the end where the full basket repair lifting streamline 340 is located, to the outer end, that is, the full basket removal lifting streamline 320.

[0045] See also Figure 6 and Figure 7 The full basket output streamline 310 and the full basket inflow streamline 330 both include a full basket streamline rack 301, a full basket streamline drive assembly 302, a full basket streamline blocking buffer block assembly 303 and a full basket streamline in-position sensor 304; the full basket streamline drive assembly 302 is arranged on the full basket streamline rack 301, and the full basket streamline blocking buffer block assembly 303 and the full basket streamline in-position sensor 304 are arranged on both sides of the full basket streamline rack 301 in the transportation direction; the full basket output streamline 310 and / or the full basket inflow streamline 330 also include a side guide plate 305 and a side pushing module 306 for guiding the silicon wafer flower basket.

[0046] Among them, the full basket streamline frame 301 can be supported by profiles. The full basket streamline drive assembly 302 adopts a material strip conveying method, including a full basket drive motor, a drive main gear, a drive chain, a drive sub-gear, a drive main shaft, a driving wheel mounting plate, a flower basket transmission chain, a drive sub-shaft and a chain tensioning unit. Of course, other forms of transmission methods can also be used, as long as the stable transportation of the flower basket is achieved. The multiple full basket streamline blocking buffer block assemblies 303 adopt a buffer block structure driven by pneumatic, hydraulic or electric cylinder lifting and lowering. The style is not limited, as long as it plays the role of side stop and buffer limit. The full basket streamline in place sensor 304 adopts the form of a photoelectric sensor, etc., and can be arranged on one side of the full basket streamline frame 301. The two side guide plates 305 are arranged on both sides above the full basket streamline frame 301 for side guidance of the flower basket. The side pushing module 306 adopts a propulsion block structure driven horizontally by pneumatic, hydraulic or electric cylinder. In the illustrated example, the side guide plates 305 and the side pushing modules 306 are arranged at the full basket inflow streamline 330 .

[0047] Furthermore, a debris receiving box is provided below the conveying chain of the full basket flow line driving assembly 302 of the full basket output flow line 310 for receiving silicon wafer fragments or debris dropped from the flower basket.

[0048] See also Figure 8 The full basket rejection lifting streamline 320 includes a flower basket lifting chain platform 321, a lifting upper side plate 322, a lifting lower side plate 323, a material removal lifting cylinder 324 and a material removal lifting guide assembly 325; the side of the flower basket lifting chain platform 321 is supported and arranged between the two lifting upper side plates 322, and the two material removal lifting cylinders 324 are vertically arranged between the corresponding side lifting upper side plates 322 and the lifting lower side plates 323, the top of the piston rod of the upper part of the material removal lifting cylinder 324 is connected to the outer side of the top of the lifting upper side plate 322, and the outer side and bottom of the lower part of the material removal lifting cylinder 324 are connected to the inner side of the lifting lower side plate 323, and each lifting lower side plate 323 is provided with a material removal lifting guide assembly 325 on both sides of the material removal lifting cylinder 324, and the top of the material removal lifting guide assembly 325 is connected to the bottom of the lifting upper side plate 322 through a guide side support plate 326.

[0049] The basket lifting chain platform 321 utilizes a similar structure to the full basket output streamline 310, except that its transmission distance is reduced and it only accommodates one basket width. Its purpose is to receive defective full baskets from the full basket output streamline 310. Furthermore, guide and stop mechanisms, such as guide and stop plates with oblique outward openings, are installed on the sides and outer ends of the basket lifting chain platform 321. A pick-up sensor is installed on the upper lifting side plate 322.

[0050] See also Figure 9The full basket repair lifting streamline 340 includes a flower basket lifting platform 341, a lifting upper mounting plate 342, a lifting lower mounting plate 343, a repair lifting component 344 and a repair lifting guide component 345; one side of the repair lifting component 344 is fixed to the outer side of the lifting upper mounting plate 342 and the lifting lower mounting plate 343, and the drive transmission section of the repair lifting component 344 is connected to the flower basket lifting platform 341. The repair lifting guide component 345 is arranged on both sides of the repair lifting component 344 and is connected to the outer side of the lifting upper mounting plate 342 and the lifting lower mounting plate 343.

[0051] The basket lift platform 341 includes a platform flat plate, a platform rib, and a platform upright plate. The upper and lower lift mounting plates 342 and 343 can be separate or integrated, depending on installation space. The repair lift assembly 344 utilizes a linear motor, rack and pinion, or motor belt. In this example, a motor timing belt mechanism is used.

[0052] The structure of the repair lifting guide assembly 345 is the same as that of the pick material lifting guide assembly 325, and adopts the structure of guide shaft and guide sleeve. Of course, the slide rail and slider mechanism can also be adopted, as long as it plays the guiding role on both sides.

[0053] Furthermore, a repair lifting limit member 346 is set on the top end side of the flower basket lifting platform 341, and a repair lifting stroke limit member 347 is installed on the upper lifting mounting plate 342 and the lower lifting mounting plate 343. At the same time, a repair lifting position sensor 348 is set on the upper lifting mounting plate 342, the lower lifting mounting plate 343 and the carrier vertical plate of the flower basket lifting platform 341.

[0054] Among them, see Figure 10 The docking section flower basket transfer module 400 uses a robot or a gripper that moves in the overhead space set on the frame.

[0055] The full-wafer basket detection and pre-selection docking device also includes a wafer basket cooling module 500, which is installed across the wafer feeding and docking belt line 100 to cool the full wafer baskets below. In the illustrated example, the wafer basket cooling module 500 utilizes multiple sets of cross-flow air curtains to cool the full wafer baskets below.

[0056] Preselected docking method

[0057] A preselection docking method based on the aforementioned silicon wafer full basket detection preselection docking device, the preselection docking method includes the following steps.

[0058] S1, silicon wafer cooling, the full wafer basket moves to the cooling position on the silicon wafer feeding and docking belt line 100, and the silicon wafer basket cooling module 500 blows air to cool the full wafer basket below.

[0059] S2, full basket upper layer inspection, the full wafer flower basket after air cooling moves to the upper inspection position of the silicon wafer feeding and docking belt line 100, and the full basket defect detection module 200 performs upper layer defect detection on the full wafer flower basket below.

[0060] S3, full basket lower layer inspection: the full flower basket that has been inspected on the upper layer moves to the end transfer position, and the docking section flower basket transfer module 400 picks up the flower basket from above and transfers it to the lower layer inspection position, and the full basket defect detection module 200 performs a lower layer defect inspection on the full flower basket above.

[0061] S4, flower basket transfer. After the upper and lower layers are inspected, the full flower baskets that pass the inspection will be directly transferred to the sorting machine by the docking section flower basket transfer module 400. The full flower baskets that fail the inspection will be transferred to the full basket defect removal module 300 by the docking section flower basket transfer module 400 and proceed to the next step.

[0062] S5, NG flower basket repair, the full basket defect removal module 300 will transport the full flower basket that has been detected as NG to the manual repair position at the outer end, where the defective pieces will be removed manually to perform full basket repair.

[0063] S6. Repair basket transfer: The repaired flower basket is transferred from the lower layer to the inner end by the full basket defect removal module 300 and lifted to the transfer position, and then transferred to the sorting machine by the docking section flower basket transfer module 400.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A silicon wafer full basket detection and pre-selection docking device, characterized by: The silicon wafer full basket detection preselection docking device comprises a silicon wafer feeding docking belt line (100), a full basket defect detection module (200), a full basket defect rejection module (300) and a docking section basket transfer module (400); The full basket defect detection module (200) and the full basket defect rejection module (300) are arranged at the streamline end of the silicon wafer feeding and docking belt line (100); The full basket defect detection module (200) comprises a flower basket upper layer detection component (210) and a flower basket lower layer detection component (220), wherein the flower basket upper layer detection component (210) and the flower basket lower layer detection component (220) both comprise a defect detection camera unit (202), a detection light source (203), and a detection outer sealing plate (204) arranged on a detection frame (201), wherein a plurality of defect detection camera units (202) are arranged side by side and spaced apart on the detection frame (201), and the defect detection camera unit (202) and the detection light source (203) of the flower basket lower layer detection component (220) are arranged upward; The full basket defect rejection module (300) adopts a "U"-shaped material basket supply method with an upper layer of defective basket output and a lower layer of repair basket inflow and lifting; the full basket defect rejection module (300) comprises a full basket output streamline (310), a full basket rejection lifting streamline (320), a full basket inflow streamline (330), and a full basket repair lifting streamline (340) arranged on a full basket defect rejection rack (350); The docking section flower basket transport module (400) is used for spatial transport of silicon wafer flower baskets.

2. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The silicon wafer feeding docking belt line (100) comprises a docking belt frame (110), a belt drive assembly (120) and a docking belt (130); a plurality of belt basket sensors (140) are provided on the docking belt frame (110) on both sides of the docking belt (130).

3. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The defect detection camera unit (202) and the detection light source (203) of the flower basket upper layer detection component (210) are arranged downward.

4. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The full basket output streamline (310) and the full basket inflow streamline (330) are arranged on a full basket defective material removal rack (350) with an interval between the upper and lower parts, the full basket rejection lifting streamline (320) is vertically arranged at the outer end of the full basket output streamline (310), and the full basket repair lifting streamline (340) is vertically arranged at the inner end of the full basket inflow streamline (330).

5. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The full basket output streamline (310) and the full basket inflow streamline (330) both comprise a full basket streamline frame (301), a full basket streamline driving assembly (302), a full basket streamline blocking buffer block assembly (303), and a full basket streamline in-position sensor (304); the full basket streamline driving assembly (302) is arranged on the full basket streamline frame (301), and the full basket streamline blocking buffer block assembly (303) and the full basket streamline in-position sensor (304) are arranged on both sides of the full basket streamline frame (301) in a transport direction; the full basket output streamline (310) and / or the full basket inflow streamline (330) further comprise a side guide plate (305) and a side pushing module (306) for guiding the silicon wafer flower basket.

6. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The full basket rejection lifting streamline (320) comprises a basket lifting chain platform (321), a lifting upper side plate (322), a lifting lower side plate (323), a material rejection lifting cylinder (324), and a material rejection lifting guide assembly (325); The side of the flower basket lifting chain platform (321) is supported and arranged between two lifting upper side plates (322), and two material-picking lifting cylinders (324) are vertically arranged between the corresponding side lifting upper side plates (322) and the lifting lower side plates (323). The top of the piston rod of the upper part of the material-picking lifting cylinder (324) is connected to the outer side of the top of the lifting upper side plate (322), and the outer side and bottom of the cylinder of the lower part of the material-picking lifting cylinder (324) are connected to the inner side of the lifting lower side plate (323). A material-picking lifting guide assembly (325) is provided on both sides of the material-picking lifting cylinder (324) on each lifting lower side plate (323), and the top of the material-picking lifting guide assembly (325) is connected to the bottom of the lifting upper side plate (322) through a guide side support plate (326).

7. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The full basket repair lifting streamline (340) comprises a basket lifting platform (341), an upper lifting mounting plate (342), a lower lifting mounting plate (343), a repair lifting assembly (344), and a repair lifting guide assembly (345); One side of the repair lifting assembly (344) is fixed to the outer side surfaces of the upper lifting mounting plate (342) and the lower lifting mounting plate (343), the drive transmission section of the repair lifting assembly (344) is connected to the flower basket lifting platform (341), and the repair lifting guide assembly (345) is arranged on both sides of the repair lifting assembly (344) and connected to the outer side surfaces of the upper lifting mounting plate (342) and the lower lifting mounting plate (343).

8. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The silicon wafer full basket detection and pre-selection docking device further comprises a silicon wafer basket cooling module (500), which is arranged across the silicon wafer feeding and docking belt line (100) and is used to cool the full wafer basket below.

9. The silicon wafer full basket detection and pre-selection docking device according to claim 1, characterized in that: The docking section flower basket transfer module (400) adopts a robot or a clamping claw that moves in the overhead space provided on a frame.

10. A preselection docking method based on the silicon wafer full basket detection preselection docking device according to claim 8, characterized in that: The preselected docking method comprises: S1, cooling of silicon wafers, the full wafer basket moves to the cooling position on the silicon wafer feeding and docking belt line (100), and the silicon wafer basket cooling module (500) blows air to cool the full wafer basket below; S2, full basket upper layer inspection, the air-cooled full wafer flower basket moves to the upper inspection position of the silicon wafer feeding and docking belt line (100), and the full basket defect detection module (200) performs upper layer defect detection on the full wafer flower basket below; S3, full basket lower layer inspection, the full flower basket that has been inspected on the upper layer moves to the end transfer position, the docking section flower basket transfer module (400) picks up the flower basket from above and transfers it to the lower layer inspection position, and the full basket defect inspection module (200) performs a lower layer defect inspection on the full flower basket on the upper layer; S4, flower basket transfer, after the upper and lower layers are inspected, the full flower baskets that are tested OK will be directly transferred to the sorting machine by the docking section flower basket transfer module (400), and the full flower baskets that are tested NG will be transferred by the docking section flower basket transfer module (400) to the full basket defect removal module (300) and proceed to the next step; S5, NG flower basket repair, full basket defect removal module (300) transports the full flower basket detected as NG to the manual repair position at the outer end, where defective pieces are removed manually to perform full basket repair; S6. Repair basket transfer: the repaired flower basket is transferred from the lower layer to the inner end by the full basket defect removal module (300) and lifted to the transfer position, and then transferred to the sorting machine by the docking section flower basket transfer module (400).

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