A kind of integrated equipment for removing, plugging, washing and selecting

Abstract

The present invention provides an integrated degumming, inserting, washing and sorting device, which belongs to the field of silicon wafer processing. The integrated degumming, inserting and washing device includes a degumming machine, an inserting machine, a cleaning machine, a docking device, a sorting machine and a general controller. The general controller displays the sorting results of the sorting machine and feeds forward to the upstream degumming machine, inserting machine, cleaning machine and docking device to determine whether the corresponding work section should be shut down for maintenance. The degumming and inserting stages of this application both pre-detect the silicon wafers, and add a docking device that takes into account the screening of full silicon wafers in the downstream conveying basket and the detection of empty flower baskets in the upstream conveying, thereby improving the overall efficiency, ensuring the sorting yield of the terminal sorting machine, and having a high degree of automation, which is convenient for promotion and application in the field of silicon wafer production and manufacturing.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer processing, and in particular relates to an integrated device for stripping, plugging, washing and selecting. Background Art

[0002] During the silicon wafer preparation process, it needs to go through the steps of cutting, degumming, inserting, cleaning, drying, and sorting. In the existing technology, each step is set up independently, and there is a lack of pre-screening of silicon wafers in the process and quality inspection of flower baskets, which leads to low overall efficiency and high defect rate of end-sorting. Summary of the Invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides an all-in-one device for removing, inserting, washing and selecting, which can solve the above problems.

[0004] A device for stripping, inserting, washing and sorting comprising a degumming machine, a wafer inserting machine, a cleaning machine, a docking device, a sorting machine and a master controller; wherein the degumming machine adopts a spraying and immersion degumming method monitored by a chemical, and adopts a degumming detection component to detect the degumming treatment of the silicon wafers in the silicon wafer basket; the wafer inserting machine integrates the sections of slicing, extracting, pre-sorting of wafer inserting, wafer inserting and basket circulating supply, the basket circulating supply section receives the empty baskets that have been detected by the docking device and transports the full baskets filled with silicon wafers to the cleaning machine; the cleaning machine integrates immersion, different washing The detergent cleaning and drying section is used for cleaning and drying batches of full baskets; the docking device integrates a full basket detection and pre-selection section for silicon wafers and an empty basket detection and reflow section, which are used for pre-screening of full basket silicon wafers and appearance inspection and reflow of empty baskets; the sorting machine includes a comprehensive silicon wafer detection section and a silicon wafer sorting section, which realizes the sorting of silicon wafers with different defect types through top suction and slicing; the main controller displays the sorting results of the sorting machine and feeds forward to the upstream degumming machine, inserting machine, cleaning machine and docking device to determine whether the corresponding section should be shut down for maintenance.

[0005] Optionally, the degumming machine includes a spraying device, a degumming device, a rinsing device, a degumming workflow line, a degumming frame, a degumming transfer module, a loading trolley, a degumming transverse cover assembly and a degumming detection assembly; the spraying device is arranged at the upstream of the degumming workflow line for spray degumming, and the degumming detection assembly collects images of the glued areas of the silicon wafers in the silicon wafer basket through an optical assembly.

[0006] Optionally, the slice inserting machine includes a slice separating module, a slice extracting module, a pre-sorting slice inserting conveying module and a quick basket changing module arranged in sequence; an empty flower basket flipping module and a full flower basket flipping conveying module are arranged side by side downstream of the quick basket changing module, and a flower basket hoisting module is arranged above the empty flower basket flipping module and the full flower basket flipping conveying module; the quick basket changing module is used for the cyclic transportation of empty flower basket supply and full flower basket withdrawal.

[0007] Optionally, the cleaning machine includes a multi-stage water tank, a drying tank, a throwing mechanism, a slow-pulling mechanism, a basket return line, a hydraulically controlled cleaning system and a basket conveying mechanism. The multi-stage water tanks are arranged side by side and adjacent water tanks with the same type of cleaning liquid adopt a stepped overflow design from downstream to upstream of process cleaning. The drying tank is arranged downstream of the end water tank of the multi-stage water tank, the throwing mechanism and the slow-pulling mechanism are arranged at the water tank adjacent to the drying tank of the multi-stage water tank, the basket return line is arranged at the same side end of the multi-stage water tank and the drying tank, the hydraulically controlled cleaning system is connected to the multi-stage water tank and provides cleaning liquid, and the basket conveying mechanism is used to transfer the basket between the multi-stage water tank, the drying tank and the basket return line.

[0008] Optionally, the multi-stage water tank includes a soaking tank, multiple cleaning tanks and multiple washing tanks; the soaking tank is arranged at the upstream end of the cleaning process, and each water tank is provided with cleaning liquid with corresponding composition, proportion and guaranteed liquid level by the liquid-controlled cleaning system; each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are arranged as needed at multiple cleaning tanks and multiple washing tanks. The slow pulling mechanism is arranged in the last water tank adjacent to the drying tank, and the throwing mechanism is arranged in multiple water tanks adjacent to the upstream of the last water tank.

[0009] Optionally, the liquid-controlled cleaning system includes a clean water supply liquid circuit, a heating water tank, a cleaning liquid supply liquid circuit, a cleaning drainage flow circuit and a water tank self-circulation flow circuit; the clean water supply liquid circuit is arranged between the multi-stage water tank and the heating water tank, and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank; the cleaning liquid supply liquid circuit is used to provide cleaning liquids of different types and proportions to the multiple cleaning tanks and washing tanks; the cleaning drainage flow circuit is connected to each water tank of the multi-stage water tank in a controllable opening and closing manner; the water tank self-circulation flow circuit is connected to the corresponding washing tank, and is used for circulating and stirring the washing liquid in the washing tank.

[0010] Optionally, the docking device includes a silicon wafer feeding docking belt line, a full basket defect detection module, a full basket defect rejection module, a docking section flower basket transfer module, an empty basket basket tooth detection return flow line and an empty basket shape detection streamline; the full basket defect detection module and the full basket defect rejection module are arranged at the streamline ends of the silicon wafer feeding docking belt line; the full basket defect rejection module adopts a "U"-shaped material basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket flowing in and rising and falling; the docking section flower basket transfer module is used for the spatial transfer of silicon wafer flower baskets; the empty basket shape detection streamline is arranged downstream of the empty basket basket tooth detection return flow line; wherein, a line scan camera for empty basket basket tooth detection is arranged above the empty basket basket tooth detection return line, and a surface array camera for empty basket shape detection is arranged above the empty basket shape detection streamline.

[0011] Optionally, the sorting machine includes a sorting system including a sorting loading device, a silicon wafer comprehensive detection device and a non-contact top suction slice unloading and sorting device; a material type detection device and a sorting segment fragment removal device are arranged between the sorting loading device and the silicon wafer comprehensive detection device, for detecting the silicon wafer model and whether it is broken, and removing the broken silicon wafers to prevent the broken silicon wafers from flowing into the silicon wafer comprehensive detection device; the silicon wafer comprehensive detection device is used to perform detection on the silicon wafer including left and right edge chipping, chamfer chipping, thickness, upper and lower dirt, resistivity, hidden crack module, and upper and lower surface chipping, and determines whether it is an OK wafer or an NG wafer according to the comparison of corresponding item standards, providing a sorting basis for the unloading and sorting device.

[0012] Compared with the existing technology, the beneficial effects of the present invention are: the silicon wafers are pre-inspected in the degumming and inserting stages of the present application, and a docking device is added to take into account the screening of full silicon wafers in the downstream conveying basket and the detection of empty silicon wafers in the upstream conveying basket, thereby improving the overall efficiency, ensuring the sorting yield of the terminal sorting machine, and having a high degree of automation, which is convenient for promotion and application in the field of silicon wafer production and manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 Schematic diagram of the integrated device for removing, inserting, washing and selecting of the present invention;

[0014] Figure 2 and Figure 3 Schematic diagram of a degumming machine;

[0015] Figure 4 and Figure 5 This is a schematic diagram of the inserting machine;

[0016] Figure 6 This is a schematic diagram of the pre-sorting insert conveying module;

[0017] Figure 7 This is a schematic diagram of the quick basket change module;

[0018] Figure 8 Schematic diagram of the process of continuous insertion method;

[0019] Figure 9 and Figure 10 is a schematic diagram of a cleaning machine;

[0020] Figure 11 is a schematic diagram of the docking device;

[0021] Figure 12 This is a schematic diagram of the full basket defect removal module;

[0022] Figure 13 Schematic diagram of the empty basket tooth inspection flow line, empty basket shape inspection flow line, line scan camera and area array camera;

[0023] Figure 14This is a schematic diagram of the return line for empty basket tooth detection;

[0024] Figure 15 This is a schematic diagram of the empty basket handling in the empty basket tooth detection return line;

[0025] Figure 16 It is a schematic diagram of the streamline of the empty basket shape inspection;

[0026] Figure 17 Schematic diagram of the sorting machine.

[0027] In the figure,

[0028] 1000, degumming machine; 1100, spraying device; 1200, degumming device; 1210, degumming rehydration mechanism; 1300, rinsing device; 1400, degumming workflow; 1500, degumming rack; 1600, degumming transfer module; 1700, loading car; 1800, degumming transverse cover assembly; 1900, degumming detection assembly;

[0029] 2000, inserting machine; 2100, slicing module; 2200, extracting module; 2300, pre-sorting insert conveying module; 2310, segmented conveyor line; 2320, insert fragment detection module; 2330, insert thickness detection module; 2340, insert foreign material removal module; 2350, insert material receiving box; 2360, insert air blowing module; 2400, fast basket changing module; 2410, basket transfer mounting plate; 2420, basket transverse movement module; 2430, basket lifting module; 2440, basket clamping module; 2500, empty basket turning module; 2600, full basket turning and conveying module; 2700, basket hoisting module;

[0030] 3000, cleaning machine; 3100, multi-stage water tank; 3110, soaking tank; 3120, cleaning tank; 3130, washing tank; 3200, drying tank; 3300, throwing mechanism; 3400, slow-pull mechanism; 3500, basket return line; 3600, hydraulically controlled cleaning system; 3610, clean water supply line; 3620, heating water tank; 3630, cleaning liquid supply line; 3640, cleaning drainage line; 3650, water tank self-circulation line; 3660, preheating unit; 3670, circulation tank; 3680, heat exchanger; 3700, cleaning machine external frame; 3800, cleaning section basket hoisting module;

[0031] 4000, docking device; 4100, silicon wafer feeding docking belt line; 4200, full basket defect detection module; 4300, full basket defect rejection module; 4310, full basket output flow line; 4320, full basket rejection lifting flow line; 4330, full basket inflow flow line; 4340, full basket repair lifting flow line; 4350, full blue defect rejection rack; 4400, docking section flower basket transfer module; 4500, empty basket tooth detection return line; 4510, basket tooth detection rack; 4520, lifting and traversing assembly; 4521, lifting flat frame ;4522, lifting cylinder assembly; 4523, transverse carrier; 4524, transverse guide rail assembly; 4525, empty basket translation drive assembly; 4530, flower basket guide; 4540, flower basket sensor; 4600, empty basket shape detection streamline; 4610, empty basket shape detection frame; 4620, empty basket shape detection belt assembly; 4630, empty basket temporary storage conveyor belt assembly; 4640, shape detection section flower basket guide; 4700, line scan camera; 4800, area array camera; 4900, silicon wafer flower basket cooling module;

[0032] 5000, sorting machine; 5100, sorting and loading device; 5200, silicon wafer comprehensive detection device; 5300, unloading and sorting device; 5400, material type detection device; 5500, sorting section debris removal device. DETAILED DESCRIPTION

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0034] A kind of integrated equipment for removing, inserting, washing and selecting, see Figure 1 The integrated degumming, inserting, washing and sorting equipment includes a degumming machine 1000, an inserting machine 2000, a cleaning machine 3000, a docking device 4000, a sorting machine 5000 and a main controller.

[0035] Layout: Degumming machine 1000, inserting machine 2000, cleaning machine 3000, docking device 4000, and sorting machine 5000 are arranged in sequence. In the example shown, they are arranged in a straight line. Of course, they can also be arranged in a concave or circular shape according to the actual needs of the factory. They can be arranged in one group or in multiple groups side by side.

[0036] The degumming machine 1000 utilizes a spray and immersion degumming method with chemical monitoring, and employs a degumming detection assembly 1900 to monitor the degumming status of the wafers within the wafer baskets. The wafer inserting machine 2000 integrates wafer separation, extraction, pre-sorting of wafer inserts, wafer insertion, and a circulating supply of wafer baskets. The circulating supply section receives empty wafer baskets that have passed inspection by the docking device 4000 and delivers full wafer baskets to the cleaning machine 3000. The cleaning machine 3000 integrates soaking, cleaning with different detergents, and drying sections for batch cleaning and drying of full wafer baskets. The docking device 4000 integrates a full-wafer inspection and pre-selection section and an empty-wafer inspection and reflow section for pre-screening full wafer baskets and visual inspection and reflow of empty wafer baskets. The sorting machine 5000 includes a comprehensive wafer inspection section and a wafer sorting section, using top-suction sorting to sort wafers of different defect types.

[0037] The master controller displays the sorting results from the sorting machine 5000 and feeds them forward to the upstream degumming machine 1000, inserting machine 2000, cleaning machine 3000, and docking device 4000, determining whether the corresponding section should be shut down for maintenance. (Not shown in the figure, the master controller can be located at the sorting machine 5000 due to the lower temperature there, but it can also be located elsewhere, such as in a control room.) Each of the degumming machine 1000, inserting machine 2000, cleaning machine 3000, docking device 4000, and sorting machine 5000 has its own sub-controller.

[0038] Among them, see 2 and Figure 3 The degumming machine 1000 includes a spraying device 1100, a degumming device 1200, a rinsing device 1300, a degumming workflow 1400, a degumming rack 1500, a degumming transfer module 1600, a loading vehicle 1700, a degumming transverse cover assembly 1800, and a degumming detection assembly 1900. A degumming rehydration mechanism 1210 is also provided at the degumming device 1200 for replenishing degumming liquid into the degumming tank of the degumming device 1200. Alternatively, a spray degumming liquid may be provided to the spraying device 1100.

[0039] Specifically, the multiple degumming water tanks (generally two tanks) of the degumming device 1200 share a degumming transverse cover assembly 1800, the spraying device 1100 is arranged upstream of the degumming workflow 1400 for spray degumming, and the degumming detection assembly 1900 collects images of the glued areas of the silicon wafers in the silicon wafer basket through optical components.

[0040] Among them, the degumming and transferring module 1600 is a gripper module driven by a robot, a robotic arm or a driving beam, which is used for picking up and spatially transferring the silicon wafer basket. When the gripper module is used, it is installed on the ground around the degumming device 1200 and the rinsing device 1300. The gripper module drives the gripper to pick up the flower basket through the X-direction and Y-direction driving beam modules installed on the degumming rack 1500 and its own Z-direction driving module.

[0041] The loading car 1700 is arranged upstream of the degumming work line 1400, and the degumming device 1200 is arranged at the degumming station downstream of the loading car 1700. The loading car 1700 and the spraying device 1100 are arranged upstream of the degumming work line 1400.

[0042] The degumming detection component 1900 adopts a fixed and / or mobile image acquisition module, which is arranged on the degumming workflow 1400, the degumming transfer module 1600 and / or the degumming rack 1500.

[0043] The degumming steps are as follows.

[0044] S11, pre-spraying, the degumming and transferring module 1600 moves the silicon wafer basket delivered by the loading vehicle 1700 into the spraying device 1100 for spray cleaning.

[0045] S12, degumming: the silicon wafer basket is degummed in the degumming device 1200.

[0046] S13, post-cleaning step, moving the debonded silicon wafer basket into the rinsing device 1300 for vibration rinsing.

[0047] S14, degumming detection, the degumming detection component 1900 collects images of the degummed silicon wafer basket. If it meets the degumming standard, the degumming is terminated and the material is unloaded. If it does not meet the degumming standard, the degumming is repeated until it meets the standard.

[0048] The debonding detection component 1900 collects the side images, bottom images and top images of the silicon wafer and the wafer tray in the silicon wafer basket, and fits the outline image of the silicon wafer on the glued surface through image processing, and compares it with the standard image to identify whether there is a debonding defect.

[0049] Among them, see Figure 4 and Figure 5The inserting machine 2000 includes a slicing module 2100, a slicing module 2200, a pre-sorting inserting conveying module 2300 and a quick basket changing module 2400 arranged in sequence; an empty flower basket turning module 2500 and a full flower basket turning and conveying module 2600 are arranged side by side downstream of the quick basket changing module 2400, and a flower basket hoisting module 2700 is arranged above the empty flower basket turning module 2500 and the full flower basket turning and conveying module 2600; the quick basket changing module 2400 is used for the cyclic transportation of empty flower basket supply and full flower basket withdrawal.

[0050] See also Figure 6 The pre-sorting insert conveying module 2300 adopts a multi-stage conveying structure and speeds up step by step from front to back. The pre-sorting insert conveying module 2300 includes an insert fragment detection module 2320, an insert fragment thickness detection module 2330, an insert fragment foreign material rejection module 2340, an insert fragment splicing box 2350 and an insert fragment blowing module 2360 arranged along the segmented transmission line 2310; the insert fragment fragment detection module 2320 and the insert fragment thickness detection module 2330 are arranged upstream of the insert fragment foreign material rejection module 2340, and the insert fragment splicing box 2350 is arranged downstream of the insert fragment foreign material rejection module 2340; the insert fragment blowing module 2360 is arranged upstream and / or downstream of the insert fragment foreign material rejection module 2340.

[0051] See also Figure 7 The quick basket changing module 2400 includes two sets of relatively arranged basket changing and transporting mounting vertical plates 2410, a basket changing transverse movement module 2420, a basket changing lifting module 2430 and a clamping basket 2440; the clamping basket 2440 moves along a U-shaped path on the side of the basket changing and transporting mounting vertical plates 2410 under the control of the basket changing transverse movement module 2420 and the basket changing lifting module 2430, thereby realizing the circular transportation of empty flower basket supply and full flower basket exit.

[0052] The clamping basket 2440 of the quick basket changing module 2400 is installed on the basket changing lifting module 2430, the basket changing lifting module 2430 is installed on the basket changing transverse movement module 2420, and the basket changing transverse movement module 2420 is installed on the side of the basket changing transfer mounting vertical plate 2410; an end displacement sensor is respectively provided at both ends of the transverse movement path of the basket changing transverse movement module 2420, and a transverse movement in-situ sensor is provided on the inner side of the transverse movement end displacement sensor at the empty flower basket receiving position. The transverse movement in-situ sensor is used to enable the basket changing transverse movement module 2420 to quickly return to the original position at the empty flower basket receiving position after emergencies such as emergency stop, shutdown, power failure, etc.

[0053] See also Figure 8 , the continuous inserting method includes the following steps.

[0054] S21, slicing. The cut silicon wafers are transported to the slicing module 2100 through a flower basket. The upright silicon wafers in the horizontally placed flower basket are pushed forward in the slicing water tank of the slicing module 2100. As the silicon wafers move forward, water is sprayed on both sides to flush and disperse the silicon wafers at the end to achieve slicing.

[0055] S22, wafer extraction: the wafer extraction module 2200 absorbs the adjacent silicon wafers by absorbing water, and then lifts the absorbed silicon wafers, climbs the slope, and then transfers them to horizontal transportation;

[0056] S23, pre-sorting and horizontal conveying: the pre-sorting and wafer insertion conveying module 2300 performs defect detection and thickness detection on the horizontally conveyed silicon wafers and removes unqualified silicon wafers. The qualified silicon wafers are horizontally conveyed to the wafer insertion station;

[0057] S24, inserting wafers. The quick basket changing module 2400 circulates the supply of empty baskets and transfers full baskets. At the wafer inserting station, the quick basket changing module 2400 lifts the vertically arranged empty baskets layer by layer and receives the horizontally conveyed silicon wafers layer by layer. After the baskets are filled with silicon wafers, the quick basket changing module 2400 transfers the full baskets to the loading and unloading position.

[0058] S25: Empty baskets are supplied. The flower basket hoisting module 2700 hoists the prepared empty flower baskets in a horizontal position to the empty flower basket flipping module 2500. The empty flower basket flipping module 2500 then transports the horizontal flower baskets and flips them to a vertical position. Finally, the vertical empty flower baskets are transferred to the loading and unloading position of the quick basket changing module 2400.

[0059] S26, full basket transfer: the full flower basket located at the entry and exit position of the quick basket changing module 2400 is transferred in a vertical state to the full flower basket turning and conveying module 2600, and the full flower basket is turned over by the full flower basket turning and conveying module 2600 to a horizontal state, and the flower basket hoisting module 2700 transfers the full flower basket in a horizontal state to the subsequent work station.

[0060] Among them, see Figure 9 and Figure 10The cleaning machine 3000 includes a multi-stage water tank 3100, a drying tank 3200, a throwing mechanism 3300, a slow pulling mechanism 3400, a basket return line 3500, a hydraulically controlled cleaning system 3600 and a basket transport mechanism. The multi-stage water tanks 3100 are arranged side by side and the adjacent water tanks with the same cleaning liquid adopt a stepped overflow design from the downstream to the upstream of the process cleaning. The drying tank 3200 is arranged downstream of the terminal water tank of the multi-stage water tank 3100. The throwing mechanism 3300 is arranged at the bottom of the drying tank 3200. The driving mechanism 3300 and the slow pulling mechanism 3400 are arranged at the water tank of the multi-stage water tank 3100 adjacent to the drying tank 3200, and the material basket return line 3500 is arranged at the same side end of the multi-stage water tank 3100 and the drying tank 3200. The liquid-controlled cleaning system 3600 is connected to the multi-stage water tank 3100 and provides cleaning liquid. The material basket conveying mechanism is used for transporting the material basket between the multi-stage water tank 3100, the drying tank 3200 and the material basket return line 3500.

[0061] See also Figure 10 The multi-stage water tank 3100 includes a soaking tank 3110, multiple cleaning tanks 3120 and multiple washing tanks 3130; the soaking tank 3110 is arranged at the upstream end of the cleaning process, and each water tank is provided with a cleaning liquid with corresponding composition, proportion and guaranteed liquid level by the liquid control cleaning system 3600; each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are set as needed at the multiple cleaning tanks 3120 and the multiple washing tanks 3130. The slow pulling mechanism 3400 is set in the last water tank adjacent to the drying tank 3200, and the throwing mechanism 3300 is set in the multiple water tanks adjacent to the upstream of the last water tank.

[0062] Among them, the liquid-controlled cleaning system 3600 includes a clean water supply liquid circuit 3610, a heating water tank 3620, a cleaning liquid supply liquid circuit 3630, a cleaning drainage flow circuit 3640 and a water tank self-circulation flow circuit 3650; the clean water supply liquid circuit 3610 is arranged between the multi-stage water tank 3100 and the heating water tank 3620, and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank 3100; the cleaning liquid supply liquid circuit 3630 is used to provide cleaning liquids of different types and proportions to the multiple cleaning tanks 3120 and washing tanks 3130; the cleaning drainage flow circuit 3640 is connected to each water tank of the multi-stage water tank 3100 in a controllable opening and closing manner; the water tank self-circulation flow circuit 3650 is connected to the corresponding washing tank 3130, and is used for circulating and stirring the cleaning liquid in the washing tank 3130.

[0063] The fresh water supply path 3610 includes a fresh water supply main pipe, a hot water supply path and a cold water supply path connected to each water tank, and the heating water tank 3620 is provided upstream of the hot water supply path.

[0064] The cleaning liquid supply circuit 3630 includes a cleaning liquid supply station, multiple cleaning liquid pipes for conveying different types of cleaning liquids, and a refill control valve; the cleaning liquid supply station includes different types of cleaning liquid tanks, and the cleaning liquid pipes are controllably connected to the corresponding cleaning tank 3120 and the washing tank 3130 under the control of the refill control valve.

[0065] In a specific example, the cleaning liquid supply circuit 3630 can provide four cleaning liquid tanks for Class A cleaning liquid, Class B cleaning liquid, Class C agent, and Class D agent. Each cleaning liquid tank is connected to the corresponding cleaning tank 3120 and washing tank 3130 via a cleaning liquid pipe and a liquid replenishment control valve. The cleaning tank 3120 can be controllably connected to the cleaning liquid tank for Class A cleaning liquid or Class B cleaning liquid, and the washing tank 3130 can be controllably connected to the cleaning liquid tanks for Class C agent and Class D agent. For example, the cleaning liquids A, B, C, and D can be conventional cleaning liquids, but their matching methods and concentrations can be different. For example, the cleaning liquid A and the Class C agent are both alkaline solutions, but the concentration of the Class C agent is higher or lower than that of the Class A cleaning liquid. The cleaning liquid B and the Class D agent are both acidic solutions, but the acidity of the Class D agent is higher or lower than that of the Class B cleaning liquid.

[0066] The cleaning drainage flow path 3640 includes a drainage manifold and a drainage main pipe. A drainage manifold controlled by a drainage control valve is set at the lower part of each water tank end plate of the multi-stage water tank 3100, and all drainage manifolds are connected to the drainage main pipe.

[0067] The water tank self-circulation flow path 3650 includes a self-circulation pump and a self-circulation pipe valve. The circulation pipe of the self-circulation pipe valve is connected to the corresponding washing tank 3130. The self-circulation pipe valve includes a self-circulation water outlet valve and a self-circulation water inlet valve. One end of the washing tank 3130 is connected to the self-circulation water outlet valve, and the other end of the self-circulation water outlet valve is connected to the self-circulation pump. The water outlet of the self-circulation pump is connected to the water inlet of the self-circulation water inlet valve, which is connected to the other end of the washing tank 3130.

[0068] The liquid-controlled cleaning system 3600 also includes a preheating unit 3660 and multiple circulation tanks 3670. The circulation tanks 3670 are used to circulate the cleaning liquid in the immersion tank 3110 and the multiple cleaning tanks 3120 after defoaming. The circulation supply direction includes a water tank with the same properties of cleaning liquid, an inserting machine or a degumming machine at the upstream workstation.

[0069] Furthermore, the liquid-controlled cleaning system 3600 also includes a heat exchanger 3680, which is arranged between the circulation tank 3670 and a water tank that circulates and supplies cleaning liquid of the same properties, and is used to heat the branch direct supply liquid circuit of the clean water supply liquid circuit 3610.

[0070] Each slot is described below.

[0071] Sink No. 0 is a soaking tank 3110, sinks No. 1, 6, 9-13 are cleaning tanks 3120, and sinks No. 2-5, 7, and 8 are washing tanks 3130. The overflow pipe at the end of sink No. 0 is connected to the external circulation tank 3670, and the outlet pipe of the circulation tank 3670 is connected to other workstations to pump clean water there, such as the inserting machine or the degumming machine. Sinks No. 2-5 are each provided with the aforementioned self-circulating flow path 3650; sinks No. 6-9 are provided with a circulation tank 3670; and sinks No. 14-15 are drying tanks 3200, which provide hot air for drying. Temperature sensors are installed on sinks No. 1-13 and No. 14-15. The water temperature of sinks No. 0-13 is gradually or staged from 40° to about 90°.

[0072] Among them, the material basket transportation mechanism adopts the cleaning section flower basket hoisting module 3800 or a transportation robot; the cleaning section flower basket hoisting module 3800 is installed on the outer frame 3700 of the cleaning machine in a space-controlled and movable manner.

[0073] Among them, see Figures 11-16 The docking device 4000 is located between the cleaning machine 3000 and the sorting machine 5000. It performs both defect detection of full baskets and appearance inspection and reflow of empty baskets. Specifically, the docking device 4000 includes a wafer feeding and docking belt line 4100, a full basket defect detection module 4200, a full basket defect rejection module 4300, a docking section basket transfer module 4400, an empty basket tooth inspection and reflow line 4500, and an empty basket appearance inspection line 4600.

[0074] Layout relationship: the full basket defect detection module 4200 and the full basket defect rejection module 4300 are arranged at the streamline end of the silicon wafer feeding and docking belt line 4100; the full basket defect rejection module 4300 adopts a "U"-shaped material basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket flowing in and rising and falling; the docking section flower basket transfer module 4400 is used for the spatial transfer of silicon wafer flower baskets; the empty basket shape detection streamline 4600 is arranged downstream of the empty basket basket tooth detection return line 4500; wherein, a line scan camera 4700 for empty basket basket tooth detection is arranged above the empty basket basket tooth detection return line 4500, and a surface array camera 4800 for empty basket shape detection is arranged above the empty basket shape detection streamline 4600.

[0075] The docking device 4000 includes a silicon wafer basket cooling module 4900, which is arranged across the silicon wafer feeding and docking belt line 4100 to cool the full wafer basket below.

[0076] The full basket defect detection module 4200 includes an upper layer detection component of the flower basket and a lower layer detection component of the flower basket, both of which include a defect detection camera unit, a detection light source and a detection outer cover plate arranged on a detection frame, wherein the defect detection camera unit and the detection light source of the upper layer detection component of the flower basket are arranged downward, and the defect detection camera unit and the detection light source of the lower layer detection component of the flower basket are arranged upward.

[0077] See also Figure 12 The full basket defect removal module 4300 includes a full basket output streamline 4310, a full basket rejection lifting streamline 4320, a full basket inflow streamline 4330 and a full basket repair lifting streamline 4340 arranged on a full blue defect removal rack 4350; the full basket output streamline 4310 and the full basket inflow streamline 4330 are arranged on the full blue defect removal rack 4350 with intervals up and down, the full basket rejection lifting streamline 4320 is vertically arranged at the outer end of the full basket output streamline 4310, and the full basket repair lifting streamline 4340 is vertically arranged at the inner end of the full basket inflow streamline 4330.

[0078] The empty basket tooth detection return line 4500 includes a basket tooth detection frame 4510 and a lifting and transverse movement component 4520, wherein the basket tooth detection frame 4510 adopts a double-layer flat frame design, and the lifting and transverse movement component 4520 is arranged at the double-layer flat frame of the basket tooth detection frame 4510, and is used to lift and transversely move the flower basket.

[0079] The basket gear detection frame 4510 includes a basket gear detection outer frame, an upper support flat frame and a lower transverse support flat frame; the upper support flat frame is horizontally arranged on the top layer of the basket gear detection outer frame, and the lower transverse support flat frame is horizontally arranged below the upper support flat frame, and the height difference between the two is adapted to the height of the flower basket; multiple flower basket guides 4530 and flower basket sensors 4540 are arranged on the upper support flat frame for supporting and sensing the flower basket.

[0080] The lifting and transverse movement assembly 4520 includes a lifting flat frame 4521, a lifting cylinder assembly 4522, a transverse movement carrier plate 4523, a transverse movement guide rail assembly 4524 and an empty basket translation drive assembly 4525; the transverse movement carrier plate 4523 is slidably arranged on the lower transverse support flat frame of the basket gear detection frame 4510 through the transverse movement guide rail assembly 4524, the empty basket translation drive assembly 4525 is connected to the transverse movement carrier plate 4523, the lifting cylinder assembly 4522 is arranged between the lifting flat frame 4521 and the transverse movement carrier plate 4523, and the outer width of the lifting flat frame 4521 is smaller than the inner width of the upper support flat frame.

[0081] The lifting and transverse movement component 4520 moves in a "U"-shaped space as a whole, lifting, transversely moving, and lowering the flower basket on the flower basket cache position of the basket tooth detection frame 4510 to the line scan detection position. The line scan camera 4700 above the line scan detection position collects line scan images of the flower basket, and the processor performs image processing to determine whether the basket teeth of the flower basket are damaged.

[0082] The empty basket shape detection streamline 4600 includes an empty basket shape detection frame 4610, an empty basket shape detection belt assembly 4620, an empty basket temporary storage conveyor belt assembly 4630 and a shape detection section basket guide 4640; the empty basket shape detection belt assembly 4620 and the empty basket temporary storage conveyor belt assembly 4630 are arranged on the same horizontal plane as the empty basket shape detection frame 4610, and the shape detection section basket guide 4640 is arranged above the empty basket temporary storage conveyor belt assembly 4630; the area array camera 4800 is arranged above the empty basket shape detection belt assembly 4620.

[0083] Among them, see Figure 17 The sorting machine 5000 includes a sorting system including a sorting and loading device 5100, a silicon wafer comprehensive detection device 5200 and a non-contact top suction slice unloading and sorting device 5300; a material type detection device 5400 and a sorting segment fragment removal device 5500 are arranged between the sorting and loading device 5100 and the silicon wafer comprehensive detection device 5200, which are used to detect the type of silicon wafer and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the silicon wafer comprehensive detection device 5200; the silicon wafer comprehensive detection device 5200 is used to detect the left and right edge chipping, chamfer chipping, thickness, upper and lower dirt, resistivity, hidden crack module, and upper and lower surface chipping of the silicon wafers, and judges them as OK wafers or NG wafers according to the comparison of corresponding standards, providing a sorting basis for the unloading and sorting device 5300.

[0084] The steps for silicon wafer sorting are as follows.

[0085] S51, continuous flipping and loading, through the sorting and loading device 5100, continuous flipping and loading.

[0086] S52, debris removal: pre-detect the incoming silicon wafers from the sorting and loading device 5100 through the material type detection device 5400, and remove the broken silicon wafers through the sorting section debris removal device 5500, and transport the intact silicon wafers downstream to the silicon wafer comprehensive detection device 5200.

[0087] S53, defect detection, the silicon wafers passing through are inspected by the silicon wafer comprehensive inspection device 5200 for left and right chipping, chamfer chipping, thickness, upper and lower dirt, resistivity, hidden crack module, and upper and lower surface chipping to determine whether the silicon wafers meet the corresponding standards and determine whether they are OK or NG wafers.

[0088] S54, material unloading and sorting. The material unloading and sorting device 5300 performs top suction separation on the incoming materials according to the detection results of the silicon wafer comprehensive detection device 5200 and puts them into the corresponding NG material box, OK material box or tail material box.

[0089] The above-mentioned sorting machine 5000 can adopt our company's prior sorting machine related patents, such as CN220239307U, CN116274007A, CN116371751A, CN220111668U, CN219378063U, WO2023216737A1, WO2023216740A1, WO2023216738A1, WO2023216739A1, C All or part of the functional modules or components in N219238486U, CN114733795A, CN114733796A, CN217120941U, CN114873272A, CN114871127A, CN114871156A, CN114871157B, CN114871153B, CN114871154B, etc. will not be described in detail again.

[0090] The degumming machine 1000 and the inserting machine 2000 are both arranged in parallel with multiple streamlines, and the sorting machine 5000 is arranged in parallel with multiple sorting streamlines, thereby improving overall efficiency and production capacity.

[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A device for removing, inserting, washing and selecting, characterized by: The degumming, inserting, washing and sorting integrated equipment includes a degumming machine, an inserting machine, a cleaning machine, a docking device, a sorting machine and a main controller; The degumming machine adopts a spraying and immersion degumming method with chemical monitoring, and uses a degumming detection component to detect the degumming treatment of the silicon wafers in the silicon wafer basket; The wafer inserting machine integrates wafer separation, wafer extraction, wafer pre-sorting, wafer insertion and basket circulation supply sections. The basket circulation supply section receives empty baskets that have passed the docking device inspection and delivers full baskets filled with silicon wafers to the cleaning machine. The cleaning machine integrates soaking, cleaning with different detergents and drying sections, and is used for cleaning and drying batches of full flower baskets; The docking device integrates a full basket detection pre-selection section for silicon wafers and an empty basket detection reflow section for pre-screening full baskets of silicon wafers and appearance inspection and reflow of empty baskets; the docking device includes a silicon wafer feeding docking belt line, a full basket defect detection module, a full basket defect rejection module, a docking section basket transfer module, an empty basket tooth detection reflow line, and an empty basket appearance detection streamline; the full basket defect detection module and the full basket defect rejection module are arranged at the streamline ends of the silicon wafer feeding docking belt line; the full basket defect rejection module adopts a "U"-shaped basket supply method with the upper layer of the defect basket output and the lower layer of the repair basket inflow and lifting; the docking section basket transfer module is used for spatial transportation of silicon wafer baskets; the empty basket appearance detection streamline is arranged downstream of the empty basket tooth detection reflow line; The sorting machine includes a comprehensive silicon wafer inspection section and a silicon wafer sorting section, and can sort silicon wafers of different defect types by top suction sorting. The master controller displays the sorting results of the sorting machine and feeds them forward to the upstream degumming machine, inserting machine, cleaning machine and docking device to determine whether the corresponding section should be shut down for maintenance.

2. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The degumming machine includes a spraying device, a degumming device, a rinsing device, a degumming workflow line, a degumming frame, a degumming transfer module, a loading car, a degumming transverse cover assembly and a degumming detection assembly; the spraying device is arranged at the upstream of the degumming workflow line for spray degumming, and the degumming detection assembly collects images of the glued areas of the silicon wafers in the silicon wafer basket through an optical assembly.

3. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The inserting machine includes a slicing module, a slicing module, a pre-sorting inserting and conveying module, and a quick basket changing module, which are arranged in sequence. An empty basket turning module and a full basket turning and conveying module are arranged side by side downstream of the quick basket changing module, and a basket hoisting module is arranged above the empty basket turning module and the full basket turning and conveying module. The quick basket changing module is used for the cyclic transportation of empty basket supply and full basket withdrawal.

4. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The cleaning machine includes a multi-stage water tank, a drying tank, a throwing mechanism, a slow-pulling mechanism, a basket return line, a hydraulically controlled cleaning system, and a basket conveying mechanism. The multi-stage water tanks are arranged side by side, and adjacent water tanks with the same type of cleaning liquid adopt a stepped overflow design from the downstream to the upstream of the process cleaning. The drying tank is arranged downstream of the end water tank of the multi-stage water tank. The throwing mechanism and the slow-pulling mechanism are arranged at the water tank adjacent to the drying tank of the multi-stage water tank. The basket return line is arranged at the same side end of the multi-stage water tank and the drying tank. The hydraulically controlled cleaning system is connected to the multi-stage water tank and provides cleaning liquid. The basket conveying mechanism is used to transfer the basket between the multi-stage water tank, the drying tank, and the basket return line.

5. The integrated device for removing, inserting, washing and selecting according to claim 4, characterized in that: The multi-stage water tank includes a soaking tank, multiple cleaning tanks and multiple washing tanks; the soaking tank is arranged at the upstream end of the cleaning process, and each water tank is provided with a cleaning liquid with corresponding composition, proportion and guaranteed liquid level by a liquid-controlled cleaning system; each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are arranged as needed at multiple cleaning tanks and multiple washing tanks. The slow pulling mechanism is arranged in the last water tank adjacent to the drying tank, and the throwing mechanism is arranged in multiple water tanks adjacent to the upstream of the last water tank.

6. The integrated device for removing, inserting, washing and selecting according to claim 5, characterized in that: The liquid-controlled cleaning system includes a clean water supply circuit, a heating water tank, a cleaning liquid supply circuit, a cleaning drainage circuit and a water tank self-circulation circuit; the clean water supply circuit is arranged between the multi-stage water tank and the heating water tank, and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank; the cleaning liquid supply circuit is used to provide cleaning liquids of different types and proportions to the multiple cleaning tanks and washing tanks; the cleaning drainage circuit is connected to each water tank of the multi-stage water tank in a controllable manner; the water tank self-circulation circuit is connected to the corresponding washing tank, and is used to circulate and stir the cleaning liquid in the washing tank.

7. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: A line scan camera for detecting the teeth of the empty basket is arranged above the empty basket teeth detection return flow line, and an area array camera for detecting the shape of the empty basket is arranged above the empty basket shape detection streamline.

8. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The docking device comprises a silicon wafer basket cooling module, which is arranged across the silicon wafer feeding and docking belt line and is used for cooling the full wafer basket below.

9. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The sorting machine includes a sorting system including a sorting and loading device, a silicon wafer comprehensive detection device and a non-contact top suction wafer unloading and sorting device; A material type detection device and a sorting segment fragment removal device are arranged between the sorting and loading device and the silicon wafer comprehensive detection device, which are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the silicon wafer comprehensive detection device; the silicon wafer comprehensive detection device is used to detect the left and right edge chipping, chamfer chipping, thickness, upper and lower dirt, resistivity, hidden crack module, and upper and lower surface chipping of the silicon wafers, and determines whether it is an OK wafer or an NG wafer according to the comparison of the corresponding item standards, providing a sorting basis for the unloading and sorting device.

10. The integrated device for removing, inserting, washing and selecting according to claim 1, characterized in that: The degumming machine and the sheet inserting machine are both arranged in parallel with multiple streamlines, and the sorting machine is arranged in parallel with multiple sorting streamlines.

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