Image sensor and electronic device including same

Abstract

Disclosed are an image sensor and an electronic device including the same. The image sensor may include a pixel group arranged in a Bayer pattern and a color separation lens array that separates incident light by wavelength and converges the separated incident light on the pixels. The color separation lens array may include corresponding groups of pixels, each group having a region containing nanopillars in two layers. In each pixel corresponding group in each of the two layers, there are one central group and a plurality of peripheral groups. Displacement of arrangement centers of the nanopillars in the at least two peripheral groups has a change.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is based on and claims the benefit of priority from Korean Patent Application No. 10-2023-0086565, filed on July 4, 2023, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present disclosure relates to an image sensor and an electronic device including the image sensor. Background Art

[0004] Image sensors generally use color filters to sense the color of incident light. However, color filters may have a low light utilization rate because the color filters absorb light of colors other than the desired light color. For example, when a red-green-blue (RGB) color filter is used, only 1 / 3 of the incident light is transmitted, and another part of the incident light (i.e., 2 / 3 of the incident light) is absorbed. Therefore, the light utilization rate is only about 33%. Most of the light loss in the image sensor occurs in the color filter. Therefore, a method of separating colors by using each pixel in the image sensor without using a color filter has been tried. Summary of the invention

[0005] One or more example embodiments provide an image sensor including a color separation lens array capable of separating incident light according to wavelengths and condensing the separated light.

[0006] Furthermore, one or more example embodiments provide an image sensor including a color separation lens array having less performance variation with a chief ray angle.

[0007] Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the embodiments presented in the disclosure.

[0008] According to one aspect of the present disclosure, an image sensor may include: a sensor substrate including a plurality of unit pixel groups, each of the plurality of unit pixel groups including a first pixel, a second pixel, a third pixel, and a fourth pixel arranged in a Bayer pattern along two horizontal directions perpendicular to each other; and a color separation lens array spaced apart from the sensor substrate in a vertical direction perpendicular to the two horizontal directions and configured to separate incident light according to wavelengths and focus the incident light on each of first to fourth pixels, wherein the color separation lens array includes a plurality of pixel corresponding groups respectively corresponding to the plurality of unit pixel groups, each of the plurality of pixel corresponding groups including a first pixel corresponding to the first to fourth pixels. Corresponding first to fourth pixel corresponding areas, each of the first to fourth pixel corresponding areas includes a plurality of first nanocolumns arranged in a first layer and a plurality of second nanocolumns arranged in a second layer, and the second layer is stacked on the first layer in a vertical direction, a plurality of pixel corresponding groups include a central group located at the center of the color separation lens array and a plurality of peripheral groups away from the center, and a displacement of the arrangement center of the first nanocolumn and the arrangement center of the second nanocolumn included in each of the first to fourth pixel corresponding areas in a direction perpendicular to the vertical direction is a first displacement to a fourth displacement, and in each of the plurality of peripheral groups, at least two of the first to fourth displacements are different from each other.

[0009] The first to fourth pixels included in each of the plurality of unit pixel groups may each include four photosensitive units arranged in a 2×2 array.

[0010] The magnitude of the size of the channel difference generated in four photosensitive cells included in each of the first to fourth pixels facing the first to fourth pixel corresponding areas of the plurality of peripheral groups may be the same in two or more of the first to fourth pixels.

[0011] The relative positional relationship of the plurality of second nanorods in each of the first to fourth pixel corresponding regions in the peripheral group may be different from the relative positional relationship of the plurality of second nanorods in each of the first to fourth pixel corresponding regions in the central group.

[0012] The first pixel and the fourth pixel may be green pixels, the second pixel may be a blue pixel, and the third pixel may be a red pixel.

[0013] In each of the plurality of peripheral groups, the first to fourth displacements may each be expressed as a vector sum of a common main displacement and first to fourth small displacements, and for each of the plurality of peripheral groups, when CRA and φ respectively represent a chief ray angle CRA and an azimuth angle φ determined according to a relative position on the image sensor, a and b respectively represent unit vectors in two horizontal directions, and CRA_max represents a maximum value of CRA, the common main displacement is expressed as C M*(CRA / CRA_max)*(-a*cosφ-b*sinφ), where C M is a real number greater than 0.

[0014] At least two of the first to fourth small displacements may be different from each other.

[0015] The first small displacement and the fourth small displacement may be identical to each other, and a magnitude of the second small displacement and a magnitude of the third small displacement may be greater than a magnitude of the first small displacement.

[0016] The first small displacement and the fourth small displacement may be zero.

[0017] The second smallest displacement can be expressed as C 2 *(CRA / CRA_max)*(-a*cosφ-b*sinφ), the third smallest displacement can be expressed as C 3 *(CRA / CRA_max)*(-a*cosφ-b*sinφ), and C 2 and C 3 is a real number greater than 0.

[0018] C 2 and C 3 Can be different from each other.

[0019] The third smallest displacement can be 0, and the first smallest displacement can be expressed as D 1 *(CRA / CRA_max)*b*sinφ, the fourth smallest displacement can be expressed as D 4 *(CRA / CRA_max)*a*cosφ, the second smallest displacement can be expressed as D 3b *(CRA / CRA_max)*b*sinφ+D 3a *(CRA / CRA_max)*a*cosφ, and D 1 , D 4 , D 3b and D 3a Can be a real number greater than 0.

[0020] D 1 , D 4 , D 3b and D 3a At least two of may be different from each other.

[0021] When compared with the relative positions of the multiple second nanocolumns in the second pixel corresponding area included in the central group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area, the relative positions of the multiple second nanocolumns in the second pixel corresponding area included in the peripheral group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area can differ by a second small displacement.

[0022] When compared with the relative positions of the multiple second nanocolumns in the third pixel corresponding area included in the central group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area, the relative positions of the multiple second nanocolumns in the third pixel corresponding area included in the peripheral group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area can differ by a third small displacement.

[0023] In each of the multiple peripheral groups, the arrangement center of the first nanocolumn included in each of the first to fourth pixel corresponding areas can be staggered by a specific interval from the center of the first to fourth pixels facing the first to fourth pixel corresponding areas in a direction perpendicular to the vertical direction, and the specific interval can be proportional to the main optical angle CRA defined in each of the multiple peripheral groups.

[0024] The relative positional relationship of the plurality of first nanorods in each of the first to fourth pixel corresponding regions in the peripheral group may be different from the relative positional relationship of the plurality of first nanorods in each of the first to fourth pixel corresponding regions in the central group.

[0025] The image sensor may further include: an anti-reflection layer on the color separation lens array.

[0026] The anti-reflective layer may include a plurality of nanostructures.

[0027] The image sensor may further include: a color filter array disposed between the sensor substrate and the color separation lens array.

[0028] According to another aspect of the present disclosure, an electronic device includes: a lens assembly including one or more lenses and configured to form an optical image of an object; an image sensor configured to convert the optical image formed by the lens assembly into an electrical signal; and a processor configured to process the signal generated by the image sensor. The image sensor may include: a sensor substrate including a plurality of unit pixel groups, each of the plurality of unit pixel groups including a first pixel, a second pixel, a third pixel, and a fourth pixel arranged in a Bayer pattern along two horizontal directions perpendicular to each other; and a color separation lens array spaced apart from the sensor substrate in a vertical direction perpendicular to the two horizontal directions and configured to separate incident light according to wavelength and focus the incident light on each of the first to fourth pixels, wherein the color separation lens array includes a plurality of pixel corresponding groups corresponding to the plurality of unit pixel groups, respectively, each of the plurality of pixel corresponding groups including a first pixel corresponding to the first to fourth pixels. to the fourth pixel corresponding area, each of the first to fourth pixel corresponding areas includes a plurality of first nanocolumns arranged in the first layer and a plurality of second nanocolumns arranged in the second layer, and the second layer is stacked on the first layer in the vertical direction, the plurality of pixel corresponding groups include a central group located at the center of the color separation lens array and a plurality of peripheral groups away from the center, and the displacement of the arrangement center of the first nanocolumn and the arrangement center of the second nanocolumn included in each of the first to fourth pixel corresponding areas in a direction perpendicular to the vertical direction is a first displacement to a fourth displacement, and in each of the plurality of peripheral groups, at least two of the first to fourth displacements are different from each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other aspects, features and advantages of some embodiments of the present disclosure will become more apparent from the following description in conjunction with the accompanying drawings, in which:

[0030] Figure 1 is a block diagram of an image sensor according to an embodiment;

[0031] Figure 2A is a plan view showing a color arrangement of a pixel array in an image sensor according to an embodiment; Figure 2B and Figure 2C is a plan view showing a sensor substrate and a color separation lens array included in a pixel array of an image sensor according to an embodiment;

[0032] Figure 3A and Figure 3B are different cross-sectional views of a pixel array in an image sensor according to an embodiment;

[0033] Figure 4A and Figure 4Bis a plan view showing an example structure of a first layer and a second layer in a color separation lens array included in a pixel array of an image sensor according to an embodiment;

[0034] Figure 5 is a conceptual diagram illustrating a chief ray angle (CRA) incident on a pixel array of an image sensor according to an embodiment;

[0035] Figure 6 is a plan view for describing CRA and azimuth angles, in which a plurality of pixel corresponding groups of a color separation lens array included in a pixel array configuring an image sensor according to an embodiment are defined as a central group and a peripheral group according to their positions;

[0036] Fig. 7A and Figure 7B is a different cross-sectional view of a pixel array in an image sensor according to an embodiment, and is a conceptual diagram for describing an arrangement of nanopillars in a pixel corresponding group included in a peripheral group;

[0037] Figure 8 is a plan view for describing a small displacement of nanocolumns in a second layer in a pixel corresponding group included in a peripheral group at each azimuth position in a color separation lens array included in a pixel array of an image sensor according to an embodiment;

[0038] Fig. 9 and Fig.10 is a plan view for describing a relative positional relationship between second nanocolumns in a second layer in a pixel corresponding group as a peripheral group compared with a relative positional relationship between nanocolumns in a second layer in a pixel corresponding group as a central group in a color separation lens array included in a pixel array of an image sensor according to an embodiment;

[0039] Fig.11 and Fig.12 is a graph showing an example of channel differences occurring in image sensors according to a comparative example and according to an embodiment;

[0040] Fig.13 It shows Fig.11 and Fig.12 A plan view of the channel configuration shown in the graph;

[0041] Fig.14 and Fig.15 1 is a diagram showing a channel difference in a channel region, which occurs in the image sensor according to the comparative example and the embodiment;

[0042] Fig.16is a plan view for describing an example of small displacement of second nanocolumns in a second layer of a pixel corresponding group included in a peripheral group at each azimuth position in a color separation lens array included in a pixel array of an image sensor according to another embodiment;

[0043] Figures 17 to 19 is used to describe Fig.16 a plan view of a relative positional relationship of second nanocolumns in the second layer of a pixel corresponding group as a peripheral group compared to a relative positional relationship between nanocolumns in the second layer of a pixel corresponding group as a central group in a color separation lens array included in a pixel array of;

[0044] Figure 20 to Figure 23 is a cross-sectional view schematically illustrating an image sensor pixel array according to some embodiments;

[0045] Fig.24 is a block diagram of an electronic device including an image sensor according to some embodiments; and

[0046] Fig.25 yes Fig.24 Block diagram of a camera module included in an electronic device. DETAILED DESCRIPTION

[0047] Now with reference to the embodiment in detail, examples of the embodiments are shown in the accompanying drawings, wherein similar reference numerals throughout the drawings represent similar elements. In this regard, the embodiments presented may have different forms and should not be construed as being limited to the description set forth herein. Therefore, the embodiments are described below only by reference to the accompanying drawings to explain various aspects. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items. Statements such as "at least one of..." modify the entire element list when following the element list, rather than modifying the individual elements in the list.

[0048] The present disclosure will be described in detail below with reference to the accompanying drawings. The embodiments of the present disclosure can be modified in various ways and can be embodied in a variety of different forms. In the accompanying drawings, similar reference numerals represent similar components, and the sizes of the components in the accompanying drawings may be exaggerated for ease of explanation.

[0049] Hereinafter, it will be understood that when a layer, region or component is referred to as being “on” or “over” another layer, region or component, it may be in contact with and directly on the other layer, region or component, and intervening layers, regions or components may be present.

[0050] It should be understood that although the terms "first", "second", etc. may be used herein to describe various components, these components should not be limited by these terms. These components are only used to distinguish one component from another component. These terms do not limit the materials or structures of the components to be different from each other.

[0051] Expressions in the singular include plural expressions unless clearly different meanings are given in the context. It should also be understood that when a part is said to "include" another component, the part may not exclude the other component but may further include another component unless otherwise indicated in the context.

[0052] Also, the terms "... unit", "... module" used herein designate a unit for processing at least one function or operation, and this may be implemented by hardware or software, or a combination of hardware and software.

[0053] The use of the term "above" and similar indicative terms may correspond to both the singular and the plural.

[0054] Likewise, the steps of all methods described herein can be performed in any appropriate order, unless otherwise noted herein or the context clearly indicates otherwise. In addition, the use of all exemplary terms (such as, etc.) is only to describe the technical spirit in detail, and the scope of rights is not limited by these terms, unless the context is limited by the claims.

[0055] Reference Figure 1 , the image sensor 1000 may include a pixel array 1100, a timing controller (T / C) 1010, a row decoder 1020, and an output circuit 1030. The image sensor 1000 may include a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

[0056] The pixel array 1100 includes pixels arranged two-dimensionally along a plurality of rows and columns. The row decoder 1020 selects one of the rows in the pixel array 1100 in response to the row address signal output from the timing controller 1010. The output circuit 1030 outputs a photosensitive signal from a plurality of pixels arranged in the selected row in units of rows. To this end, the output circuit 1030 may include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 may include a plurality of ADCs respectively arranged for the columns between the column decoder and the pixel array 1100, or an ADC arranged at the output end of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented as one chip, or may be implemented in a separate chip. A processor for processing an image signal output from the output circuit 1030 may be implemented as one chip with the timing controller 1010, the row decoder 1020, and the output circuit 1030.

[0057] The pixel array 1100 may include a plurality of pixels PX sensing light of different wavelengths. The pixel arrangement may be implemented in various ways.

[0058] Figure 2A is a plan view showing a color arrangement of a pixel array 1100 in an image sensor 1000 according to an embodiment.

[0059] Figure 2A The color arrangement shown is the Bayer pattern arrangement used in image sensors. Figure 2A As shown, a unit pattern may include four quadrant areas, consisting of the first to fourth quadrant areas, indicating blue (B), green (G), red (R) and green (G), respectively. The unit pattern may be repeated and arranged two-dimensionally along a first direction (X direction) and a second direction (Y direction). For the above color arrangement, in a unit pattern of a 2×2 array, two green pixels are arranged along one diagonal direction, and one blue pixel and one red pixel are arranged along another diagonal direction. In other words, a first row in which a plurality of green pixels and a plurality of blue pixels are alternately arranged along a first direction and a second row in which a plurality of red pixels and a plurality of green pixels are alternately arranged along a first direction may be repeatedly arranged along a second direction.

[0060] Figure 2A The color arrangement of is an example, and one or more embodiments are not limited thereto. For example, a CYGM method in which magenta (M), cyan (C), yellow (Y), and green (G) are represented by one unit pattern, or an RGBW method in which green, red, blue, and white are represented by one unit pattern may be used. Similarly, the unit pattern may be implemented in a 3×3 array, and the pixels in the pixel array 1100 may be arranged in various ways according to the color characteristics of the image sensor 1000. Hereinafter, the pixel array 1100 of the image sensor 1000 will be described as having a Bayer pattern, but the operating principle may be applied to other pixel arrangement patterns other than the Bayer pattern.

[0061] The pixel array 1100 of the image sensor 1000 may include a color separation lens array aligned with the color arrangement in a vertical direction (eg, z-axis direction), that is, a color separation lens array that focuses light of a color corresponding to a specific pixel.

[0062] Figure 2B and Figure 2C 1 is a plan view showing a sensor substrate 110 and a color separation lens array 130 included in a pixel array of an image sensor according to an embodiment.

[0063] Reference Figure 2B, the sensor substrate 110 may include a plurality of pixels that sense incident light. The sensor substrate 110 may include a plurality of unit pixel groups 110G. The unit pixel group 110G may include a first pixel 111, a second pixel 112, a third pixel 113, and a fourth pixel 114 that generate an image signal by converting the incident light into an electrical signal. The unit pixel group 110G may include a Bayer pattern type pixel arrangement. The pixel arrangement in the sensor substrate 110 is provided for sensing the incident light after distinguishing the incident light according to a unit pattern such as a Bayer pattern. For example, the first pixel 111 and the fourth pixel 114 may be green pixels that sense green light, the second pixel 112 may be a blue pixel that senses blue light, and the third pixel 113 may be a red pixel that senses red light. In the following, the pixel arrangement of the image sensor may be used interchangeably with the pixel arrangement of the sensor substrate. In addition, in the following, the first pixel 111 and the fourth pixel 114 may be interchangeably referred to as the first green pixel and the second green pixel, the second pixel 112 may be interchangeably referred to as the blue pixel, and the third pixel 113 may be interchangeably referred to as the red pixel. However, one or more embodiments are not limited thereto.

[0064] Each of the first to fourth pixels 111, 112, 113, and 114 may include a plurality of photosensitive units that independently sense incident light. For example, each of the first to fourth pixels 111, 112, 113, and 114 may include first to fourth photosensitive units c1, c2, c3, and c4. The first to fourth photosensitive units c1, c2, c3, and c4 may be arranged two-dimensionally along a first direction (X direction) and a second direction (Y direction). For example, in each of the first to fourth pixels 111, 112, 113, and 114, the first to fourth photosensitive units c1, c2, c3, and c4 may be arranged in a 2×2 array.

[0065] Figure 2B An example is shown in which each of the first to fourth pixels 111, 112, 113, and 114 includes four photosensitive units, but four or more independent photosensitive units may be grouped and arranged in two dimensions. For example, each of the first to fourth pixels 111, 112, 113, and 114 may include a plurality of independent photosensitive units grouped and arranged in a 3×3 array or a 4×4 array. Hereinafter, for ease of description, an example will be described in which each of the first to fourth pixels 111, 112, 113, and 114 includes photosensitive units arranged in a 2×2 array.

[0066] According to an embodiment, some of a plurality of pixels (each pixel including a plurality of photosensitive cells sensing light of the same color) may be used as autofocus pixels. In the autofocus pixel, an autofocus signal may be obtained based on the difference between the output signals of adjacent photosensitive cells. For example, an autofocus signal in a first direction (X direction) may be generated based on the difference between the output signals from the first photosensitive cell c1 and the second photosensitive cell c2, the difference between the output signals from the third photosensitive cell c3 and the fourth photosensitive cell c4, or the difference between the sum of the output signals from the first photosensitive cell c1 and the third photosensitive cell c3 and the sum of the output signals from the second photosensitive cell c2 and the fourth photosensitive cell c4. Similarly, an autofocus signal in a second direction (Y direction) may be generated based on the difference between the output signals from the first photosensitive cell c1 and the third photosensitive cell c3, the difference between the output signals from the second photosensitive cell c2 and the fourth photosensitive cell c4, or the difference between the sum of the output signals from the first photosensitive cell c1 and the second photosensitive cell c2 and the sum of the output signals from the third photosensitive cell c3 and the fourth photosensitive cell c4.

[0067] In addition, a general image signal can be obtained by summing the output signals from the first to fourth photosensitive cells c1, c2, c3, and c4. For example, a first green image signal can be generated by summing the output signals from the first to fourth photosensitive cells c1, c2, c3, and c4 of the first pixel 111, a blue image signal can be generated by summing the output signals from the first to fourth photosensitive cells c1, c2, c3, and c4 of the second pixel 112, a red image signal can be generated by summing the output signals from the first to fourth photosensitive cells c1, c2, c3, and c4 of the third pixel 113, and a second green image signal can be generated by summing the output signals from the first to fourth photosensitive cells c1, c2, c3, and c4 of the fourth pixel 114.

[0068] Reference Figure 2C , the color separation lens array 130 may include a plurality of pixel corresponding areas. The color separation lens array 130 includes Figure 2B The sensor substrate 110 is shown with a plurality of pixel corresponding groups 130G corresponding to the plurality of unit pixel groups 110G. The pixel corresponding group 130G includes first to fourth pixel corresponding regions 131, 132, 133 and 134 corresponding to the first to fourth pixels 111, 112, 113 and 114.

[0069] That is, the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the color separation lens array 130 may be arranged to respectively face the first to fourth pixels 111, 112, 113, and 114 of the sensor substrate 110. The first to fourth pixel corresponding regions 131, 132, 133, and 134 may be arranged two-dimensionally along a first direction (X direction) and a second direction (Y direction) such that a first row in which the first pixel corresponding regions 131 and the second pixel corresponding regions 132 are alternately arranged overlaps a second row in which the third pixel corresponding regions 133 and the fourth pixel corresponding regions 134 are alternately arranged.

[0070] The first to fourth pixel corresponding regions 131, 132, 133 and 134 each include a plurality of nanorods. The plurality of nanorods are configured to separate incident light according to wavelength and converge the light to the corresponding first to fourth pixels 111, 112, 113 and 114 according to wavelength. Figure 2B As described, the first pixel 111 and the fourth pixel 114 may be the first green pixel and the second green pixel, respectively, the second pixel 112 may be the blue pixel, and the third pixel 113 may be the red pixel. In this case, the first pixel corresponding area 131 and the fourth pixel corresponding area 134 may be interchangeably referred to as the first green pixel corresponding area and the second green pixel corresponding area, the second pixel corresponding area 132 may be interchangeably referred to as the blue pixel corresponding area, and the third pixel corresponding area 133 may be interchangeably referred to as the red pixel corresponding area.

[0071] The shapes and arrangements of the multiple nanocolumns included in the color separation lens array 130 can be configured to form a phase distribution suitable for wavelength separation, and the specific shapes and arrangements of the nanocolumns can be adjusted according to the relative positions of the pixel corresponding groups 130G where the nanocolumns are located in the color separation lens array 130.

[0072] Figure 3A and Figure 3B Observed from different cross sections Figure 1 1 is a cross-sectional view of a pixel array 1100 in an image sensor.

[0073] Figure 3A is a cross-sectional view showing a phase distribution PPG1 of green light after passing through the color separation lens array 130 and a phase distribution PPB of blue light after passing through the color separation lens array 130, and Figure 3B 2 is a cross-sectional view showing a phase distribution PPR of red light after passing through the color separation lens array 130 and a phase distribution PPG2 of green light after passing through the color separation lens array 130 .

[0074] Reference Figure 3A and Figure 3B, a pixel array 1100 of the image sensor 1000 includes a sensor substrate 110 and a color separation lens array 130 arranged on the sensor substrate 110 .

[0075] The sensor substrate 110 may include the Figure 2B The first pixel 111, the second pixel 112, the third pixel 113, and the fourth pixel 114 that sense light are described, and each of the first pixel 111, the second pixel 112, the third pixel 113, and the fourth pixel 114 may include a plurality of photosensitive cells. Separators (e.g., walls) for separating cells may also be formed on the boundaries between the cells.

[0076] The transparent spacer layer 120 may be disposed between the sensor substrate 110 and the color separation lens array 130. A color filter array may also be disposed between the sensor substrate 110 and the spacer layer 120. For example, the color filter array may include a red filter, a green filter, and a blue filter, and the color filters may correspond to, for example, Figure 2A Since the color separation lens array 130 in this embodiment performs color separation, adding a color filter array can improve color purity by compensating for some errors that may occur during color separation of the color separation lens array 130.

[0077] The spacer layer 120 supports the color separation lens array 130 and may have a thickness ds that satisfies a regulation regarding a distance between the sensor substrate 110 and the color separation lens array 130, that is, a distance between an upper surface of the sensor substrate 110 and a lower surface of the color separation lens array 130. The thickness ds of the spacer layer 120 may vary depending on whether a color filter array is provided between the color separation lens array 130 and the sensor substrate 110.

[0078] The spacer layer 120 may include a material transparent to visible light, for example, a dielectric material having a refractive index lower than that of the nanorods NP and a low absorption coefficient in the visible light band, for example, SiO 2 , siloxane-based spin-on glass (SOG), etc. When the peripheral material layer filled between the nano-pillars NP has a higher refractive index than that of the nano-pillars NP, the spacer layer 120 may include a material having a lower refractive index than that of the peripheral material layer.

[0079] The thickness ds of the spacer layer 120 may be in the range of h t -p≤ds≤h t +p range. Here, h tRepresents the focal length of the light at the peak wavelength in the band separated by the color separation lens array 130, and p represents the pixel pitch. In an embodiment, the pixel pitch may be several μm or less, for example, 2 μm or less, 1.5 μm or less, 1 μm or less, or 0.7 μm or less. The pixel pitch may be in the range of about 0.5 μm to about 1.5 μm. The thickness of the spacer layer 120 may be determined based on, for example, the center wavelength of green light (i.e., 540 nm).

[0080] When the color filter array is disposed between the sensor substrate 110 and the color separation lens array 130, the thickness of the spacer layer 120 may be set to be smaller than the focal length of the color separation lens array 130 for light of a central wavelength in a wavelength band separated by the color separation lens array 130, taking into account the thickness of the color filter array. For example, the thickness of the color separation lens array 130 may be set to be smaller than the focal length of green light.

[0081] An etch stop layer may also be provided between the spacer layer 120 and the color separation lens array 130. The etch stop layer may be provided to protect the spacer layer 120, which is a structure below the color separation lens array 130, in a process of manufacturing the color separation lens array 130. For example, due to the etch stop layer, a condition regarding a distance between a lower surface of the color separation lens array 130 and an upper surface of the sensor substrate 110 may be maintained.

[0082] Likewise, a protection layer for protecting the color separation lens array 130 may also be provided on the color separation lens array 130. The protection layer may include a material used as an anti-reflection layer.

[0083] The first green pixel corresponding region 131 corresponds to the first green pixel 111 and may be located directly above the first green pixel 111. The blue pixel corresponding region 132 corresponds to the blue pixel 112 and may be located directly above the blue pixel 112. The red pixel corresponding region 133 corresponds to the red pixel 113 and may be located directly above the red pixel 113. The second green pixel corresponding region 134 corresponds to the second green pixel 114 and may be located directly above the second green pixel 114.

[0084] The color separation lens array 130 includes first nanopillars NP1 and second nanopillars NP2 arranged in a plurality of layers. A plurality of first nanopillars NP1 form a first layer LE1 of the color separation lens array 130, and a plurality of second nanopillars NP2 form a second layer LE2 of the color separation lens array 130. The first layer LE1 and the second layer LE2 are stacked along a third direction (Z direction), and the first layer LE1 is close to the sensor substrate 110. An etch stop layer may also be provided between the first layer LE1 and the second layer LE2. For example, an etch stop layer may be provided to prevent damage to the first layer LE1, which may occur during the manufacture of the second layer LE2 on the first layer LE1 after the first layer LE1 is formed. For example, due to the etch stop layer, the first nanopillar NP1 in the first layer LE1 may be formed to a desired height.

[0085] The first pixel corresponding area 131 includes a plurality of first nanopillars NP1 arranged in the first layer LE1 and a plurality of second nanopillars NP2 arranged in the second layer LE2. The second pixel corresponding area 132, the third pixel corresponding area 133, and the fourth pixel corresponding area 134 also include a plurality of first nanopillars NP1 arranged in the first layer LE1 and a plurality of second nanopillars NP2 arranged in the second layer LE2. The common characteristics of the first nanopillars NP1 and the second nanopillars NP2 are described by the name of nanopillars NP.

[0086] The size, shape, spacing and / or arrangement of the multiple nanocolumns NP included in the color separation lens array 130 can be determined so that green light is separated and converged on the first green pixel 111 and the second green pixel 114, blue light is separated and converged on the blue pixel 112, and red light is separated and converged on the red pixel 113.

[0087] The nanopillar NP may have a sub-wavelength shape size. Here, sub-wavelength refers to a wavelength smaller than the wavelength of the band of light to be separated. For example, the nanopillar NP may have a size smaller than the peak wavelength of the band of light to be separated. The nanopillar NP may have a cylindrical shape with a sub-wavelength cross-sectional diameter. However, the shape of the nanopillar NP is not limited thereto, that is, the nanopillar NP may have an elliptical column shape or a polygonal column shape. In addition, the nanopillar NP may have a column shape with a symmetrical or asymmetrical cross-sectional shape. The nanopillar NP is shown so that the width in the direction perpendicular to the height direction (Z direction) is constant, that is, the cross section parallel to the height direction has a rectangular shape, but the above shape is an example. Unlike the example, the width of the nanopillar NP in the direction perpendicular to the height direction may not be consistent, for example, the cross section parallel to the height direction may have a trapezoidal shape or an inverted trapezoidal shape. When the incident light is a visible ray, the cross-sectional diameter of the nanopillar NP may be less than, for example, 400nm, 300nm or 200nm.

[0088] In addition, the height of the nanocolumn NP can be about 500nm to about 1500nm, which is greater than the cross-sectional diameter of the nanocolumn. The height of the nanocolumn NP can be from sub-wavelength to several times of the wavelength. For example, the height of the nanocolumn NP can be five times, four times, or three times or less of the peak wavelength of the band separated by the color separation lens array 130. The nanocolumns NP included in the first layer LE1 and the second layer LE2 in the first to fourth pixel corresponding areas 131, 132, 133 and 134 are shown to have the same height, but are not limited to this. In addition, the arrangement type, width and number of the nanocolumns NP are examples. The width, height, number and arrangement type of the nanocolumns NP can be determined to be suitable for forming a phase distribution for color separation, or can be determined in consideration of detailed processing conditions.

[0089] A peripheral material having a refractive index different from that of the nanopillar NP may be filled or inserted between the nanopillar NPs so that the nanopillar NPs are surrounded or surrounded by the peripheral material. The nanopillar NPs may include a material having a refractive index higher than that of the peripheral material. For example, the nanopillar NPs may include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO 2 , SiN and / or a combination thereof. A nanopillar NP having a refractive index different from that of the peripheral material can change the phase of light passing through the nanopillar NP. This is caused by a phase delay that occurs due to the sub-wavelength shape size of the nanopillar NP, and the degree of phase delay can be determined by the detailed shape size and arrangement shape of the nanopillar NP. The peripheral material of the nanopillar NP may include a dielectric material having a refractive index lower than that of the nanopillar NP. For example, the peripheral material may include SiO 2 However, one or more embodiments are not limited thereto, that is, the materials of the nanorod NP and the peripheral material may be set such that the nanorod NP may have a refractive index lower than that of the peripheral material.

[0090] The first and second nanopillars NP1 and NP2 are not limited to the same material, that is, may have the same material or different materials from each other. The peripheral material between the first nanopillars NP1 in the first layer LE1 and the peripheral material between the second nanopillars NP2 in the second layer LE2 may be the same as or different from each other.

[0091] Because the refractive index of the material varies according to the wavelength of the light, the color separation lens array 130 can provide different phase distributions for different wavelengths. In other words, because the same material has different refractive indices according to the wavelength of the light interacting with the material, and the phase delay of the light passing through the material is different according to the wavelength, the phase distribution can vary according to the wavelength. For example, the refractive index of the first pixel corresponding area 131 for the light of the first wavelength and the refractive index of the first pixel corresponding area 131 for the light of the second wavelength can be different from each other, and the phase delay through which the light of the first wavelength passes through the first pixel corresponding area 131 and the phase delay through which the light of the second wavelength passes through the first pixel corresponding area 131 can be different from each other. When the color separation lens array 130 is designed in consideration of the characteristics of light, different phase distributions can be provided for light of different wavelengths.

[0092] The color separation lens array 130 may include nanorods NP arranged based on a specific rule, so that the incident light may have a shape such as Figure 3A and Figure 3B The first green light phase distribution PPG1, the blue light phase distribution PPB, the red light phase distribution PPR, and the second green light phase distribution PPG2 are shown. Here, the rule can be applied to parameters such as the shape, size (e.g., width and height) of the nanopillars NP, the distance between the nanopillars NP, the arrangement form thereof, and the number of stacks, and these parameters can be determined according to the phase distribution achieved by the color separation lens array 130.

[0093] The arrangement rules of the first nanocolumns NP1 and the second nanocolumns NP2 respectively included in the first to fourth pixel corresponding regions 131, 132, 133 and 134 may be different from each other. For example, the arrangement rule of the first nanocolumns NP1 in the first layer LE1 of the first pixel corresponding region 131 and the arrangement rule of the first nanocolumns NP1 in the first layer LE1 of the second pixel corresponding region 132 may be different from each other. The arrangement rule of the second nanocolumns NP2 in the second layer LE2 of the first pixel corresponding region 131 and the arrangement rule of the second nanocolumns NP2 in the second layer LE2 of the second pixel corresponding region 132 may be different from each other. In other words, the size, shape, interval and / or arrangement of the first nanocolumns NP1 and the second nanocolumns NP2 included in the first pixel corresponding region 131 may be different from the size, shape, interval and / or arrangement of the first nanocolumns NP1 and the second nanocolumns NP2 included in the second pixel corresponding region 132, and may also be different from the size, shape, interval and / or arrangement of the first nanocolumns NP1 and the second nanocolumns NP2 included in the third pixel corresponding region 133.

[0094] The regional classification of the color separation lens array 130 and the shapes and arrangements of the first nanorods NP1 and the second nanorods NP2 in the first layer LE1 and the second layer LE2 arranged in each region may be set to form a phase distribution in which incident light is separated according to wavelength and converged to the first to fourth pixels 111, 112, 113, and 114. Color separation according to wavelength may include color separation in a visible light band, but is not limited thereto, i.e., the band may be extended from visible light to infrared range, or other various ranges.

[0095] Reference Figure 3A , the green light having passed through the color separation lens array 130 may have a first green light phase distribution PPG1, which is maximum at the center of the first green pixel corresponding area 131, and decreases as it moves away from the center of the first green pixel corresponding area 131. Specifically, just after passing through the color separation lens array 130, that is, at the lower surface of the color separation lens array 130 or the upper surface of the spacer layer 120, the phase of the green light is maximum at the center of the first green pixel corresponding area 131, and decreases in a concentric circle as it moves away from the center of the first green pixel corresponding area 131. Therefore, the phase of the green light is minimum at the centers of the blue pixel corresponding area 132 and the red pixel corresponding area 133 in the X and Y directions, and is minimum at the contact point between the first green pixel corresponding area 131 and the second green pixel corresponding area 134 in the diagonal direction.

[0096] Likewise, the blue light having passed through the color separation lens array 130 may have a blue light phase distribution PPB, which is maximum at the center of the blue pixel corresponding region 132 and decreases as it moves away from the center of the blue pixel corresponding region 132. Specifically, just after passing through the color separation lens array 130, the phase of the blue light is maximum at the center of the blue pixel corresponding region 132 and decreases in a concentric circle as it moves away from the center of the blue pixel corresponding region 132, and the phase of the blue light is minimum at the center of the first green pixel corresponding region 131 and the second green pixel corresponding region 134 in the X direction and the Y direction, and is minimum at the center of the red pixel corresponding region 133 in the diagonal direction.

[0097] Reference Figure 3B , the red light having passed through the color separation lens array 130 may have a red light phase distribution PPR which is maximum at the center of the red pixel corresponding region 133 and decreases as it moves away from the center of the red pixel corresponding region 133. Figure 3B, the green light having passed through the color separation lens array 130 may have a second green light phase distribution PPG2, which is maximum at the center of the second green pixel corresponding area 134 and decreases as it moves away from the center of the second green pixel corresponding area 134. Figure 3A The first green light phase distribution PPG1 and Figure 3B When compared with the second green light phase distribution PPG2, the second green light phase distribution PPG2 is obtained by parallel shifting the first green light phase distribution PPG1 by one pixel pitch along the X direction and the Y direction, and the description about the first green light phase distribution PPG1 can be applied to others.

[0098] In addition, the area of ​​the color separation lens array 130 can be described as including a green light converging area for converging green light, a blue light converging area for converging blue light, and a red light converging area for converging red light. The green light converging area, the blue light converging area, and the red light converging area defined by the above-mentioned phase distribution can partially overlap each other. The green converging area can have an area larger than the area corresponding to the green pixel, the blue converging area can have an area larger than the area corresponding to the blue pixel, and the area of ​​the red converging area can have an area larger than the area corresponding to the red pixel.

[0099] Figure 4A and Figure 4B : is a plan view showing an example structure of a first layer and a second layer in the color separation lens array 130 included in the pixel array of the image sensor according to the embodiment.

[0100] Figure 3A and Figure 3B The cross-sectional view and Figure 4A and Figure 4B The arrangement of the first nanorods NP1 and the second nanorods NP2 in the color separation lens array 130 shown in the plan view corresponds to the pixel corresponding group of the center group. Figure 2C The plurality of pixel corresponding groups 130G forming the color separation lens array 130 described above can be divided into a central group and a peripheral group according to their relative positions relative to the center of the color separation lens array 130 when viewed from above, which is described below with reference to FIG. Figure 5 and Figure 6 In addition, refer to Figure 6 etc. describe in detail the arrangement of the first nano-pillars NP1 and the second nano-pillars NP2 in the pixel corresponding group as the peripheral group.

[0101] In the first to fourth pixel corresponding regions 131, 132, 133 and 134 of the center group, the first nanocolumn NP1 in the first layer LE1 can be aligned with the second nanocolumn NP2 in the second layer LE2 in the vertical direction (i.e., the z-axis direction). Here, alignment means that when viewed from the third direction (Z direction) in which the first layer LE1 and the second layer LE2 are stacked, the center of the arrangement of the first nanocolumn NP1 in the first to fourth pixel corresponding regions 131, 132, 133 and 134 and the center of the arrangement of the second nanocolumn NP2 are aligned to overlap each other. Figure 4A and Figure 4B In the embodiment, the first nanopillar NP1 is disposed at the lower portion of the corresponding second nanopillar NP2, and the second nanopillar NP2 and the first nanopillar NP1 at the positions facing each other in the upper layer and the lower layer have the same cross-sectional area and are arranged to be aligned with each other. However, the embodiment is not limited thereto. The cross-sectional areas of the second nanopillar NP2 and the first nanopillar NP1 at the positions facing each other in the upper layer and the lower layer may be different from each other. The second nanopillar NP2 and the first nanopillar NP1 at the positions facing each other in the upper layer and the lower layer may be arranged offset from each other.

[0102] In each of the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 , the center of the arrangement of the second nanorods NP2 and the center of the arrangement of the first nanorods NP1 may be aligned with each other.

[0103] The pixel arrangement characteristics of the Bayer pattern can be applied to Figure 4A and Figure 4BThe pixel corresponding regions 131, 132, 133 and 134 are shown to correspond to the arrangement of the nanopillars NP. In the Bayer pattern pixel arrangement, the pixels adjacent to the blue pixel 112 and the red pixel 113 in the first direction (X direction) and the second direction (Y direction) are both green pixels G, while the pixels adjacent to the first green pixel 111 in the first direction (X direction) are blue pixels 112, and the pixels adjacent to the first green pixel 111 in the second direction (Y direction) are red pixels R. In addition, the pixels adjacent to the second green pixel 114 in the first direction (X direction) are red pixels 113, and the pixels adjacent to the second green pixel 114 in the second direction (Y direction) are blue pixels 112. In addition, the pixels adjacent to the first green pixel 111 and the second green pixel 114 in the four diagonal directions are green pixels, the pixels adjacent to the blue pixel 112 in the four diagonal directions are red pixels 113, and the pixels adjacent to the red pixel 113 in the four diagonal directions are blue pixels 112. Therefore, in the blue pixel corresponding region 132 and the red pixel corresponding region 133 corresponding to the blue pixel 112 and the red pixel 113, respectively, the nanopillars NP may be arranged in a four-fold symmetric form, and in the first green pixel corresponding region 131 and the second green pixel corresponding region 134, the nanopillars NP may be arranged in a two-fold symmetric form. The arrangement of the nanopillars NP in the first green pixel corresponding region 131 and the second green pixel corresponding region 134 may be rotated 90° relative to each other.

[0104] 13 and 134 and the nanorods NP in the first green pixel corresponding region 131 and the second green pixel corresponding region 134 and the blue pixel corresponding region 132 and the red pixel corresponding region 133 have symmetrical cross sections having the same width in the first direction (X direction) and the second direction (Y direction) Figure 4A and Figure 4B Differently, the nanopillars NP in the first green pixel corresponding region 131 and the second green pixel corresponding region 134 may have asymmetric cross-sections having different widths in the first direction (X direction) and the second direction (Y direction). The arrangement rule of the nanopillars NP is an example for separating wavelengths corresponding to the pixel arrangement and is not limited to the example description or pattern shown in the drawings.

[0105] The above arrangement rule may be applied to each of the first nano-pillars NP1 in the first layer LE1 and the second nano-pillars NP2 in the second layer LE2 of each of the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 .

[0106] Figure 5 is a conceptual diagram illustrating a chief ray angle (CRA) incident on a pixel array of an image sensor according to an embodiment.

[0107] The pixel array 1100 of the image sensor may be used in a camera module together with the module lens ML, and light incident on the pixel array 1100 through the module lens ML may have different incident angles depending on the incident position on the pixel array 1100. The incident angle of the light incident on the pixel array 1100 is generally defined as CRA. The chief ray (CR) represents a ray that starts from a point of the object and is incident on the pixel array 1100 after passing through the center of the module lens ML. CRA represents an angle between CR and the optical axis OX, and in other words, represents an angle formed with a normal to the incident surface 130a of the color separation lens array 130.

[0108] The CRA of the light incident on the center C of the color separation lens array 130 is 0°, and the CRA of the incident light increases toward the edge of the color separation lens array 130. Likewise, the direction of the CR varies according to the azimuth of the edge. For example, in the color separation lens array 130, the CR incident on the peripheral group PG1 located in the left peripheral part and the peripheral group PG2 located in the right peripheral part, which are equal in distance from the center C, have the same CRA and incident directions opposite to each other with respect to the normal of the incident surface.

[0109] The pixel array 1100 of the image sensor according to the embodiment sets the detailed shapes and arrangement of the nano-pillars NP forming the color separation lens array 130 in consideration of the CRA and the direction.

[0110] The color separation lens array 130 operates efficiently for light incident on the color separation lens array 130 within a specific angle range, but when the incident angle is away from the specific angle range, the color separation performance of the color separation lens array 130 may be degraded. Therefore, for example, when the first to fourth pixel corresponding areas 131, 132, 133, and 134 are designed to be equal to each other in the entire area of ​​the image sensor 1000, the color separation efficiency may vary depending on the area of ​​the image sensor 1000, and a signal difference may occur between a plurality of photosensitive units corresponding to the same pixel, that is, the quality of the image provided by the image sensor 1000 may be degraded.

[0111] When the plurality of first to fourth pixels 111, 112, 113, and 114 each have a plurality of photosensitive units, a signal difference may exist between the plurality of photosensitive units corresponding to the same pixel, and is referred to as a channel difference. The channel difference may occur due to structural variations generated during the manufacturing process, and may also occur due to CRA. Similarly, light of different wavelengths has different focal lengths, and the channel difference due to CRA may also vary depending on the wavelength. The channel difference may degrade the image quality obtained from the image sensor 1000. The channel difference may cause an error when an autofocus signal is generated. As described above with reference to Figure 2BAs described above, when the first to fourth pixels 111, 112, 113, and 114 each include the first to fourth photosensitive units c1, c2, c3, and c4, for example, an autofocus signal can be obtained by using the difference between the sum of the output signals of the first photosensitive unit c1 and the third photosensitive unit c3 and the sum of the output signals of the second photosensitive unit c2 and the fourth photosensitive unit c4. When the difference is 0, it can be determined that the image sensor 1000 is properly located on the focal plane of the module lens in the imaging device including the image sensor 1000. When the difference is not 0, the module lens can be moved according to the difference and its sign so that the image sensor 1000 is located on the focal plane of the module lens. However, when there is a channel difference, the autofocus signal may not be symmetrical about 0°, and the accuracy of the autofocus signal may be degraded. Accordingly, it is necessary to consider the channel difference to generate the autofocus signal, and its operation may be complicated.

[0112] The image sensor 1000 according to the embodiment may be designed such that the arrangement type of the nanopillars NP of the color separation lens array 130 may vary in consideration of the CRA of the incident light, which varies according to the position on the image sensor 130. For example, the arrangement of the first nanopillars NP1 and the second nanopillars NP2 included in each of the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the color separation lens array 130 may be variously adjusted according to the relative positional relationship based on the center of the color separation lens array 130.

[0113] Figure 6 1 is a plan view for describing CRA and azimuth angles, in which a plurality of pixel corresponding groups of a color separation lens array included in a pixel array configuring an image sensor according to an embodiment are defined as a central group and a peripheral group according to their positions.

[0114] Reference Figure 6 , the pixel corresponding groups 130G in the color separation lens array 130 can be arranged two-dimensionally along the first direction (X direction) and the second direction (Y direction). The pixel corresponding groups 130G can be defined as a central group CG and a peripheral group PG according to their positions. The central group CG represents the pixel corresponding group located at the center of the color separation lens array 130, and the peripheral group PG represents the pixel corresponding groups spaced apart from the center, that is, other pixel corresponding groups except the central group CG. Figure 6 , the central group CG is shown as one central group CG located at the center C, but for design convenience, the central group CG may be defined as a plurality of groups located at the central portion.

[0115] The position of the peripheral group PG can be represented by a distance r from the center C of the color separation lens array 130 and an azimuth angle Φ. The azimuth angle Φ can be defined based on an axis parallel to the first direction (X axis) while passing through the center C of the color separation lens array 130. The distance r defining the position of the peripheral group PG is related to the CRA. When r is 0, that is, at the center C of the color separation lens array 130, the CRA is 0°, and as the distance r increases, the CRA also increases.

[0116] In About Figure 3A and Figure 3B In the description of the cross-sectional view of , in each of the first to fourth pixel corresponding areas 131, 132, 133 and 134 included in the center group CG, the second nanocolumn NP2 in the second layer LE2 is described as being aligned with the first nanocolumn NP1 of the first layer LE1. In the peripheral group PG, the second layer LE2 may not be aligned with the first layer LE1, and may be staggered with the first layer LE1. In other words, the arrangement center of the second nanocolumn NP2 in the second layer LE2 and the arrangement center of the first nanocolumn NP1 in the first layer LE1 are arranged offset from each other. Hereinafter, this may be referred to as the second layer LE2 and the first layer LE1 being arranged offset from each other. Here, the term "center of nanocolumn arrangement" or "arrangement center" of nanocolumns may refer to the center point of an area defined by connecting nanocolumns located on the outermost boundary. In the first to fourth pixel corresponding areas 131, 132, 133 and 134 of the peripheral group PG, the direction in which the second layer LE2 is offset relative to the first layer LE1 is toward the center C of the color separation lens array. Figure 6 The deviation degree or direction shown is an example and is not limited thereto. The deviation degree between the first layer LE1 and the second layer LE2 of each of the first to fourth pixel corresponding regions 131, 132, 133 and 134 may be different from each other in at least two of the first to fourth pixel corresponding regions 131, 132, 133 and 134. In one peripheral group PG, the displacement of the arrangement center of all the second nanopillars NP2 and the arrangement center of all the first nanopillars NP1 included in each of the first to fourth pixel corresponding regions 131, 132, 133 and 134 in a direction perpendicular to the third direction (Z direction) may be defined as the first to fourth displacements. At least two of the first to fourth displacements may be different from each other. This will be referred to later. Fig. 7A and Figure 7B This is described in detail.

[0117] Fig. 7A and Figure 7B 1 is a cross-sectional view of a pixel array in an image sensor according to an embodiment viewed from different cross sections, and is a conceptual diagram for describing an arrangement of nano-pillars in a pixel corresponding group included in a peripheral group.

[0118] exist Fig. 7A and Figure 7B In the cross-sectional view, the color separation lens array 130 is Figure 6 The peripheral group PG in the peripheral group PG shown is located at a position where the azimuth angle φ is greater than 90° and less than 270° (i.e., the peripheral group PG located on the left side of the center group CG) as an example, but the description provided below can be applied to peripheral groups having specific azimuth angles φ and CRA. Fig. 7A and Figure 7B In the figure, the details of the nanocolumns included in the first layer LE1 and the second layer LE2 of the color separation lens array 130 are omitted, and the relative arrangement between the first to fourth pixel corresponding areas 131, 132, 133 and 134 facing each other and the first to fourth pixels 111, 112, 113 and 114, as well as the relative arrangement relationship between the first layer LE1 and the second layer LE2 of the first to fourth pixel corresponding areas 131, 132, 133 and 134 are conceptually described.

[0119] All the first nanocolumns NP1 arranged in the first layer LE1 of the first pixel corresponding area 131 are called 131_NP1, all the second nanocolumns NP2 arranged in the second layer LE2 of the first pixel corresponding area 131 are called 131_NP2, all the first nanocolumns NP1 arranged in the first layer LE1 of the second pixel corresponding area 132 are called 132_NP1, all the second nanocolumns NP2 arranged in the second layer LE2 of the second pixel corresponding area 132 are called 132_NP2, all the first nanocolumns NP1 arranged in the first layer LE1 of the third pixel corresponding area 133 are called 133_NP1, all the second nanocolumns NP2 arranged in the second layer LE2 of the third pixel corresponding area 133 are called 133_NP2, all the first nanocolumns NP1 arranged in the first layer LE1 of the fourth pixel corresponding area 134 are called 134_NP1, and all the second nanocolumns NP2 arranged in the second layer LE2 of the fourth pixel corresponding area 134 are called 134_NP2.

[0120] The arrangement center of the nanocolumns of each of the first to fourth pixel corresponding areas 131, 132, 133 and 134 is not aligned with the center of the corresponding first to fourth pixels 111, 112, 113 and 114, and the degree of deviation can be represented by a displacement Q. Q can be represented as a vector having a direction and a magnitude. When determining Q, the distance ds between the above-mentioned color separation lens array 130 and the sensor substrate 110 and the refractive index of the material disposed between the color separation lens array 130 and the sensor substrate 110 can be considered. Q depends on the position of the peripheral group (i.e., the azimuth angle φ and CRA), and there is no difference according to the color of the pixel. For example, the positions of the first to fourth pixel corresponding areas 131, 132, 133 and 134 included in one peripheral group are defined by the azimuth angle φ and CRA at the center position of the corresponding peripheral group, and when determining Q, there is no difference in the size or direction of Q between the first to fourth pixel corresponding areas 131, 132, 133 and 134. When a and b are unit vectors of the first direction (X direction) and the second direction (Y direction), the direction of Q may be expressed as (-a*cosφ-b*sinφ). The size of Q may be proportional to (CRA / CRA_max). CRA_max represents the maximum value of the CRA of the CR incident on the color separation lens array 130. There is no difference in the proportional constant associated with the size of Q between the first to fourth pixel corresponding areas 131, 132, 133, and 134. The proportional constant associated with the size of Q may vary depending on the position of the peripheral group.

[0121] The center of the overall arrangement of the second nanorods NP2 in the second layer LE2 where the first to fourth pixel corresponding regions 131, 132, 133, and 134 are respectively located may be misaligned with the center of the overall arrangement of the first nanorods NP1 in the first layer LE1 where the first to fourth pixel corresponding regions 131, 132, 133, and 134 are respectively located. The degree of deviation may be represented as first to fourth displacements S1, S2, S3, and S4.

[0122] The center of the overall arrangement 131_NP2 of the second nanopillars NP2 arranged in the second layer LE2 of the first pixel corresponding area 131 is displaced relative to the center of the overall arrangement 131_NP1 of the first nanopillars NP1 arranged in the first layer LE1 of the first pixel corresponding area 131 by a first displacement S1.

[0123] The center of the overall arrangement 132_NP2 of the second nanopillars NP2 arranged in the second layer LE2 of the second pixel corresponding area 132 is displaced relative to the center of the overall arrangement 132_NP1 of the first nanopillars NP1 arranged in the first layer LE1 of the second pixel corresponding area 132 by a second displacement S2.

[0124] The center of the overall arrangement 133_NP2 of the second nanopillars NP2 arranged in the second layer LE2 of the third pixel corresponding area 133 is displaced relative to the center of the overall arrangement 133_NP1 of the first nanopillars NP1 arranged in the first layer LE1 of the third pixel corresponding area 133 by a third displacement S3.

[0125] The center of the overall arrangement 134_NP2 of second nanopillars NP2 arranged in the second layer LE2 of the fourth pixel corresponding area 134 is shifted relative to the center of the overall arrangement 134_NP1 of first nanopillars NP1 arranged in the first layer LE1 of the fourth pixel corresponding area 134 by a fourth shift S4.

[0126] The first to fourth displacements S1, S2, S3 and S4 may be represented as vectors having magnitude and direction. At least two of the first to fourth displacements S1, S2, S3 and S4 may be different from each other. For example, the first displacement S1 and the fourth displacement S4 may be equal to each other, and the third displacement S3 and the fourth displacement S4 may be different from the first displacement S1. The third displacement S3 and the fourth displacement S4 may be different from each other.

[0127] The first to fourth displacements S1, S2, S3 and S4 depend on the azimuth angle φ and CRA, and are each expressed as a vector sum of a common main displacement M and first to fourth small displacements ms1, ms2, ms3 and ms4, as shown below.

[0128] S1=M+ms1 (1)

[0129] S2=M+ms2 (2)

[0130] S3=M+ms3 (3)

[0131] S4=M+ms4 (4)

[0132] M denotes a vector and can be expressed by the following Equation 5.

[0133] M=C M *(CRA / CRA_max)*(-a*cosφ-b*sinφ) (5)

[0134] A major displacement may represent a primary or common movement vector in a particular direction, while a minor displacement is an additional vector added to the major or common movement vector to fine-tune or adjust the overall displacement in the same or different direction. A minor displacement may be a variation or adjustment to a major displacement to account for a specific factor or condition.

[0135] Here, a and b are unit vectors of the first direction (X direction) and the second direction (Y direction), respectively, and C M is a real number greater than 0.

[0136] M depends on the azimuth angle φ and CRA of the peripheral group PG, and the direction of M is toward the central axis of the color separation lens array 130. The central axis of the color separation lens array 130 refers to an axis passing through the center C of the color separation lens array 130 and parallel to the third direction (Z direction). The proportional constant C may be determined in consideration of the distance d between the first layer LE1 and the second layer LE2 and the refractive index of the material included in the distance. M .

[0137] As described above, Equations 1 to 5 are determined in consideration of the design convenience of setting the position of the second nanocolumn NP2 in the second layer LE2. After the position of the second nanocolumn NP2 of the second layer LE2 is set independently of the first to fourth pixel corresponding regions 131, 132, 133, and 134 based on the above Equation 5, the position of the second nanocolumn NP2 of each of the first to fourth pixel corresponding regions 131, 132, 133, and 134 can be individually adjusted using a design method.

[0138] As described above, at least two of the first to fourth displacements S1, S2, S3, and S4 may be different from each other, and therefore, at least two of the first to fourth small displacements ms1, ms2, ms3, and ms4 may be different from each other. Three of the first to fourth small displacements ms1, ms2, ms3, and ms4 may be different from each other, or all of the first to fourth small displacements ms1, ms2, ms3, and ms4 may be different from each other.

[0139] As described above, the first to fourth small displacements ms1, ms2, ms3, and ms4 are adjusted to reduce the channel difference that occurs in the pixels corresponding to the peripheral group as the CRA increases, as described above. In addition, the magnitude of the channel difference that occurs in the multiple channels (e.g., the red channel, the green channel, and the blue channel) of each of the first to fourth pixels 111, 112, 113, and 114 can be set to be similar by adjusting the first to fourth small displacements ms1, ms2, ms3, and ms4. As the channel difference decreases, the trend of the channel difference that occurs in the multiple channels of each of the first to fourth pixels 111, 112, 113, and 114 is formed to be similar for image processing.

[0140] Hereinafter, an example of adjustment details of the first to fourth small displacements ms1 , ms2 , ms3 , ms4 will be described.

[0141] Figure 8 1 is a plan view for describing an example of a small displacement of the second nanorods NP2 applied to the second layer LE2 in a pixel corresponding group as a peripheral group PG at each azimuth in a color separation lens array included in the pixel array 1100 of the image sensor according to an embodiment.

[0142] Figure 8 The directions of the second small displacement ms2 and the third small displacement ms3 of the peripheral group PG at respective azimuth positions are shown.

[0143] The second small displacement ms2 and the third small displacement ms3 can be expressed as follows.

[0144] ms2=C 2 *(CRA / CRA_max)*(-a*cosφ-b*sinφ) (6)

[0145] ms3=C 3 *(CRA / CRA_max)*(-a*cosφ-b*sinφ) (7)

[0146] Here, a and b are unit vectors of the first direction (X direction) and the second direction (Y direction), respectively, and C 2 and C 3 is a real number greater than 0. C 2 and C 3 Can be different from each other. 2 Can be greater than C 3 However, one or more embodiments are not limited thereto, and C 2 and C 3 Can be identical to each other.

[0147] According to the above equations 6 and 7, the magnitude and direction of the second small displacement ms2 and the third small displacement ms3 applied to the second pixel corresponding area 132 and the third pixel corresponding area 133 included in the peripheral group PG may vary according to the azimuth angle φ of the peripheral group PG. The directions of the second small displacement ms2 and the third small displacement ms3 are toward the central axis passing through the center C of the color separation lens array 130 and parallel to the third direction (Z direction). Figure 8 The directions of the second smallest displacement ms2 and the third smallest displacement ms3 are indicated at various azimuth angles.

[0148] In an embodiment, the magnitude of the second small displacement ms2 and the third small displacement ms3 may be greater than the magnitude of the first small displacement ms1 applied to the first pixel corresponding area 131 or the magnitude of the fourth small displacement ms4 applied to the fourth pixel corresponding area 134. The first small displacement ms1 may be equal to the fourth small displacement ms4. The first small displacement ms1 and the fourth small displacement ms4 may be 0.

[0149] Assuming that the first small displacement ms1 and the fourth small displacement ms4 are 0, the first small displacement ms1 and the fourth small displacement ms4 can be expressed by the following equations as vectors similar to the second small displacement ms2 and the third small displacement ms3 and having smaller sizes.

[0150] ms1=C1 *(CRA / CRA_max)*(-a*cosφ-b*sinφ) (8)

[0151] ms4=C 4 *(CRA / CRA_max)*(-a*cosφ-b*sinφ) (9)

[0152] In the above equations 4 and 5, for example, C may be satisfied. 1 =C 4 <<C 2 , C 3 .

[0153] The first to fourth small displacements ms1 , ms2 , ms3 , and ms4 are described as displacements of the center of the overall arrangement of the second nanorods NP2 in each of the first to fourth pixel corresponding regions 131 , 132 , 133 , and 134 relative to the center of the overall arrangement of the first nanorods NP1 .

[0154] The first to fourth small displacements ms1, ms2, ms3 and ms4 can be described as the following concept: the difference between the relative position relationship between the second nanocolumns NP2 in the second layer LE2 of each of the first to fourth pixel corresponding areas 131, 132, 133 and 134 included in the peripheral group PG and the relative position relationship between the second nanocolumns NP2 in the second layer LE2 of each of the first to fourth pixel corresponding areas 131, 132, 133 and 134 included in the central group CG.

[0155] The first to fourth small displacements ms1, ms2, ms3, and ms4 are applied only to the second nanopillars NP2 located in the second layer LE2 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the peripheral group PG, and may not be applied to the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the central group CG. Therefore, the relative positional relationship between the second nanopillars NP2 located in the second layer LE2 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the peripheral group PG is different from the relative positional relationship between the second nanopillars NP2 located in the second layer LE2 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the central group CG. In other words, the relative positional relationship between the first nanopillars NP1 in the first layer LE1 and the first to fourth pixel corresponding regions 131, 132, 133 and 134 in the peripheral group PG are respectively the same as the relative positional relationship between the first nanopillars NP1 in the first layer LE1 and the first to fourth pixel corresponding regions 131, 132, 133 and 134 in the central group CG. The first to fourth small displacements ms1, ms2, ms3 and ms4 depend on the azimuth angle φ and CRA of the peripheral group PG, and therefore, the difference in the relative positional relationship also depends on the azimuth angle φ and CRA of the peripheral group PG.

[0156] Fig. 9 and Fig.10 It is a plan view for describing the relative position relationship between second nanocolumns in the second layer of a pixel corresponding group as a peripheral group compared with the relative position relationship between nanocolumns in the second layer in a pixel corresponding group as a central group in a color separation lens array included in a pixel array of an image sensor according to an embodiment.

[0157] Fig. 9 The detailed position of the second nanorod NP2 shown in the second layer LE2 of the color separation lens array 130 is shown relative to the center group CG, and the directions of the second small displacement ms2 and the third small displacement ms3 indicated in the second pixel corresponding area 132 and the third pixel corresponding area 133 are Figure 8 An example of the peripheral group PG at a position where the azimuth angle in the peripheral group PG is 0° is shown. The relative positional relationship between the first to fourth pixel corresponding areas 131, 132, 133 and 134 in the second layer LE2 of the peripheral group PG is different from the relative positional relationship between the first to fourth pixel corresponding areas 131, 132, 133, 134 in the central group CG, and the degree of difference is the second small displacement ms2 and the third small displacement ms2 indicated by the arrows.

[0158] Compared with the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the peripheral group PG has a position difference with the second nanocolumn NP2 of the first pixel corresponding area 131 and the fourth pixel corresponding area 134, and the degree of difference is the second small displacement ms2. Compared with the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 in the peripheral group PG has a position difference with the second nanocolumn NP2 of the first pixel corresponding area 131 and the fourth pixel corresponding area 134, and the degree of difference is the third small displacement ms3.

[0159] When a small displacement is applied, an average value of two small displacements defined in two adjacent pixel corresponding regions may be applied to the second nano-pillar NP2 located at a boundary between the pixel corresponding regions.

[0160] Alternatively, Fig.10 As shown, the above-mentioned small displacement is not applied to the second nanocolumns NP2 located at the boundaries between the pixel corresponding regions, but may be applied only to some of the second nanocolumns NP2, including the second nanocolumns NP2 located at the centers of the second pixel corresponding regions 132 and the third pixel corresponding regions 133. The relative positional relationship of the second nanocolumns NP2 located at the boundaries of the second pixel corresponding regions 132 in the peripheral group PG relative to the second nanocolumns NP2 in the adjacent first pixel corresponding regions 131 and relative to the second nanocolumns NP2 in the adjacent fourth pixel corresponding regions 134 may be the same as the relative positional relationship of the second nanocolumns NP2 located at the boundaries of the second pixel corresponding regions 132 in the central group CG relative to the second nanocolumns NP2 in the adjacent first pixel corresponding regions 131 and relative to the second nanocolumns NP2 in the adjacent fourth pixel corresponding regions 134, respectively.

[0161] Except for the second nanocolumn NP2 located at the boundary of the second pixel corresponding area 132 in the peripheral group PG, the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the peripheral group PG has a relative position difference with the second nanocolumn NP2 in the first pixel corresponding area 131 and the fourth pixel corresponding area 134, compared with the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the central group CG, and the degree of difference is the second small displacement ms2. Except for the second nanocolumn NP2 located at the boundary of the third pixel corresponding area 133 in the peripheral group PG, the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 in the peripheral group PG has a relative position difference with the second nanocolumn NP2 in the first pixel corresponding area 131 and the fourth pixel corresponding area 134, compared with the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 in the central group CG, and the degree of difference is the third small displacement ms3.

[0162] The magnitudes of the second smallest displacement ms2 and the third smallest displacement ms3 in this case can be compared with the reference Fig. 9 The second small displacement ms2 and the third small displacement ms3 described are different in size. In other words, the second small displacement ms2 and the third small displacement ms3 are expressed as the above equations 6 and 7, and the proportional constant included in the equations can be Fig. 9 The proportionality constants are different.

[0163] The above description is exemplary, and while applying the rules as in Equations 6 to 9, for design convenience, the detailed position of the second nanocolumn NP2 in the second layer LE2 in the peripheral group PG can be changed by appropriately adjusting the proportional constant. For example, the constant included in the above equation can be set to represent the desired channel difference at the position where the CRA has a maximum value. In addition, the magnitude of the channel difference appearing in the multiple channels of each of the first to fourth pixels 111, 112, 113 and 114 can be set to be as similar as possible. The combination of the above constants is not limited to one example, but may have various combinations. The above equations are examples and may be changed. For example, the proposed small displacement is linearly proportional to the CRA, but is not limited to this, and may be proportional to another functional relationship (e.g., a nonlinear relationship).

[0164] Fig.11 and Fig.12 is a graph showing an example of channel difference occurring in image sensors according to a comparative example and an embodiment, Fig.13 It shows Fig.11 and Fig.12 A plan view of the channel arrangement represented in the graph of Fig.14 and Fig.15: is a graph showing the distribution of channel differences occurring in the channel area in the image sensors of the comparative example and the embodiment.

[0165] In the embodiment and the comparative example, the first pixel 111, the second pixel 112, the third pixel 113 and the fourth pixel 114 are respectively a green pixel Gb, a blue pixel B, a red pixel R and a green pixel Gr. The comparative example is an example in which small displacements are not applied, that is, the first to fourth small displacements ms1, ms2, ms3 and ms4 are all 0. The present embodiment is an example in which the second small displacement ms2 is 100 nm in the +X direction, the third small displacement ms3 is 80 nm in the +X direction, the first small displacement ms1 is 0, and the fourth small displacement ms4 is 0. That is, in the present embodiment, the arrangement center of the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 is offset by 100 nm in the +X direction relative to the arrangement center of the first nanocolumn NP1 in the first layer LE1, and the arrangement center of the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 is offset by 80 nm in the +X direction relative to the arrangement center of the first nanocolumn NP1 in the first layer LE1.

[0166] The value 1 indicated on the vertical axis is a reference value, which may be, for example, a signal value of one channel from pixels corresponding to the center group CG. Fig.11 and Fig.12 When , the maximum value of the channel difference decreases from about 19% to about 10%.

[0167] exist Fig.14 and Fig.15 In the distribution of , the channel difference is the difference based on the signal value 1, expressed in %. Fig.14 In the embodiment, the magnitudes of the channel differences occurring in the first to fourth pixels 111, 112, 113, and 114 are different from each other. In addition, the magnitude of the channel difference occurring in the first pixel 111 and the magnitude of the channel difference occurring in the fourth pixel 114 are significantly different from each other. Fig.15 , the magnitudes of the channel differences occurring in the first to fourth pixels 111, 112, 113, and 114 are similar to each other. The magnitudes of the channel differences occurring in the first pixel 111 and the fourth pixel 114 are identical to each other. In addition, in each of the first to fourth pixels 111, 112, 113, and 114, the channel difference values ​​in ch1 and ch3 are almost identical to each other, and the channel difference values ​​in ch2 and ch4 are almost identical to each other. In view of this, the magnitude of the channel difference is almost identical in each of the first to fourth pixels 111, 112, 113, and 114. Fig.11 and Fig.12The graph in is a graph of the peripheral group PG at a position with an azimuth angle of 0°. In addition, in the case of different azimuth angles (e.g., about 45°), the magnitude of the channel difference appearing in the first to fourth pixels 111, 112, 113, and 114 may not be exactly the same, but in at least two pixels, the magnitudes may be equal to each other. At least two pixels may include, for example, two green pixels Gr and Gb. However, one or more embodiments are not limited to the above examples.

[0168] As described above with reference to the comparative example and the embodiment, by applying a small displacement to the second nanorod NP2 in the second layer LE2, the maximum value of the channel difference is reduced, and the magnitudes of the channel differences appearing in the first to fourth pixels 111, 112, 113, and 114 are similar to each other. The magnitudes of the channel differences appearing in the first to fourth pixels 111, 112, 113, and 114 may be the same in at least two pixels, or a small displacement may be set so that the magnitudes in the first to fourth pixels 111, 112, 113, and 114 are the same. With the reduction of the channel difference as described above, the trends of the channel differences appearing in the plurality of channels of each of the first to fourth pixels 111, 112, 113, and 114 are formed to be similar, so as to facilitate image processing. Similarly, the same magnitudes of the channel differences in the first pixel 111 and the fourth pixel 114 corresponding to the two green pixels Gb and Gr are significantly different from the comparative example, thereby facilitating image processing.

[0169] Fig.16 is a plan view for describing an example of small displacement of a second nanocolumn in a second layer in a group corresponding to each pixel included in a peripheral group at each azimuth position in a color separation lens array included in a pixel array of an image sensor according to another embodiment.

[0170] In this embodiment, referring to Fig. 7A and Figure 7B The first to fourth displacements S1, S2, S3 and S4 defined in the description of satisfy the above equations 1 to 5, but the details of the first to fourth small displacements ms1, ms2, ms3 and ms4 are the same as those of reference Figures 8 to 10 The description of (ie, Equations 6 to 9 above) is different.

[0171] Fig.16 The directions of the first small displacement ms1 , the second small displacement ms2 , and the fourth small displacement ms4 of the peripheral group PG at respective azimuth positions are shown.

[0172] The first small displacement ms1, the second small displacement ms2, and the fourth small displacement ms4 can be expressed as follows.

[0173] ms1=D 1 *(CRA / CRA_max)*b*sinφ (10)

[0174] ms2=D 3b *(CRA / CRA_max)*b*sinφ+D 3a *(CRA / CRA_max)*a*cosφ (11)

[0175] ms4=D 4 *(CRA / CRA_max)*a*cosφ (12)

[0176] Here, a and b are unit vectors in the first direction (X direction) and the second direction (Y direction), respectively, and D 1 , D 4 , D 3b and D 3a is a real number greater than 0. 1 , D 4 , D 3b and D 3a At least two of may be different from each other.

[0177] In an embodiment, the third small shift ms3 may be zero.

[0178] According to the above equations 10, 11, and 12, the magnitudes and directions of the first, second, and fourth small displacements ms1, ms2, and ms4 applied to the first, second, and fourth pixel corresponding regions 131, 132, and 134 included in the peripheral group PG may vary according to the azimuth angle of the peripheral group PG. The second small displacement ms2 is a direction away from the central axis passing through the center C of the color separation lens array 130 and parallel to the third direction (Z direction), the first small displacement ms1 is a direction away from the axis passing through the center C of the color separation lens array 130 and parallel to the first direction (X direction), and the fourth small displacement ms4 is a direction away from the axis passing through the center C of the color separation lens array 130 and parallel to the second direction (Y direction). Fig.16 The directions of the first, second and fourth small displacements ms1, ms2 and ms4 are shown from various azimuth angles.

[0179] Figures 17 to 19 It is a plan view for describing the relative position relationship between the second nanocolumns in the second layer in the pixel corresponding group as the peripheral group compared with the relative position relationship between the two layers of nanocolumns in the pixel corresponding group as the central group in the color separation lens array included in the pixel array of the image sensor according to the embodiment.

[0180] Fig.17The detailed position of the second nanorod NP2 shown in the second layer LE2 of the color separation lens array 130 is shown relative to the center group CG, and the directions of the first, second and fourth small displacements ms1, ms2 and ms4 indicated in the first pixel corresponding area 131, the second pixel corresponding area 132 and the fourth pixel corresponding area 134 are Fig.16 An example of the peripheral group PG in the peripheral group PG at a position having an azimuth angle of 0° to 90° is shown. The relative positional relationship between the first to fourth pixel corresponding areas 131, 132, 133 and 134 in the second layer LE2 of the peripheral group PG is different from the relative positional relationship between the first to fourth pixel corresponding areas 131, 132, 133 and 134 in the central group CG, and the degree of difference is the first, second and fourth small displacements ms1, ms2 and ms4 indicated by the arrows.

[0181] Compared with the second nanocolumn NP2 in the second layer LE2 of the first pixel corresponding area 131 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the first pixel corresponding area 131 in the peripheral group PG may have a relative position difference with respect to the second nanocolumn NP2 in the third pixel corresponding area 133, and the degree of difference is the first small displacement ms1. Compared with the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the peripheral group PG may have a position difference with respect to the second nanocolumn NP2 in the third pixel corresponding area 133, and the degree of difference is the second small displacement ms2. Compared with the second nanocolumn NP2 in the second layer LE2 of the fourth pixel corresponding area 134 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the fourth pixel corresponding area 134 in the peripheral group PG may have a position difference with respect to the second nanocolumn NP2 in the third pixel corresponding area 133, and the degree of difference is the fourth small displacement ms4.

[0182] When a small displacement is applied, an average value of two small displacements defined in two adjacent pixel corresponding regions may be applied to the second nano-pillar NP2 located at a boundary between the pixel corresponding regions.

[0183] Alternatively, Fig.18 and Fig.19 As shown, the above-mentioned small displacement may be applied only to some of the second nano-pillars NP2 , including the second nano-pillars NP2 located at the centers of the first, second, and fourth pixel corresponding regions 131 , 132 , and 134 .

[0184] Fig.18It is shown that a small displacement may not be applied to the second nanocolumn NP2 located at the boundary between the pixel corresponding areas. The relative positional relationship of the second nanocolumn NP2 located at the boundary between the pixel corresponding areas in the peripheral group PG with respect to the second nanocolumn NP2 in the third pixel corresponding area 133 may be equal to the relative positional relationship of the second nanocolumn NP2 in the second layer LE2 located at the boundary between the pixel corresponding areas in the central group CG with respect to the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133.

[0185] Except for the second nanocolumn NP2 in the second layer LE2 located at the boundary of the first pixel corresponding area 131 in the peripheral group PG, the second nanocolumn NP2 in the second layer LE2 of the first pixel corresponding area 131 in the peripheral group PG and the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 have a relative position difference of a first small displacement ms1 compared to the second nanocolumn NP2 in the second layer LE2 of the first pixel corresponding area 131 in the central group CG. Except for the second nanocolumn NP2 located at the boundary of the second pixel corresponding area 132 in the peripheral group PG, the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the peripheral group PG and the second nanocolumn NP2 in the second layer LE2 of the third pixel corresponding area 133 have a relative position difference of a third small displacement ms3 compared to the second nanocolumn NP2 in the second layer LE2 of the second pixel corresponding area 132 in the central group CG. Except for the second nanocolumn NP2 located at the boundary of the fourth pixel corresponding area 134 in the peripheral group PG, compared with the second nanocolumn NP2 in the second layer LE2 of the fourth pixel corresponding area 134 in the central group CG, the second nanocolumn NP2 in the second layer LE2 of the fourth pixel corresponding area 134 in the peripheral group PG has a relative position difference with the second nanocolumn NP2 in the third pixel corresponding area 133, and the degree of difference is the fourth small displacement ms4.

[0186] In this case, the sizes of the first small displacement ms1, the second small displacement ms2 and the fourth small displacement ms4 can be the same as those mentioned above. Fig.17 The first small displacement ms1, the second small displacement ms2, and the fourth small displacement ms4 described are different in size. In other words, the first, second, and fourth small displacements ms1, ms2, and ms4 are expressed as the above equations 10 to 12, and the proportional constants included in the equations can be related to Fig.17 The proportionality constants are different.

[0187] Fig.19 and Fig.18The example is different in that the positions of the second nanopillars NP2 to which the first, second and fourth small displacements ms1, ms2 and ms4 are applied are limited to a small area at the center of the first pixel corresponding area 131, the second pixel corresponding area 132 and the fourth pixel corresponding area 134.

[0188] Refer to above FIG. 7A to FIG. 19 In the description of, when describing the first to fourth displacements S1, S2, S3 and S4 representing the degree of deviation between the arrangement center of the first nanopillar NP1 and the arrangement center of the second nanopillar NP2 of each of the first to fourth pixel corresponding areas 131, 132, 133 and 134, the first to fourth small displacements ms1, ms2, ms3 and ms4 included in the first to fourth displacements S1, S2, S3 and S4 are applied to the second nanopillar NP2 in the second layer LE2 of the peripheral group PG.

[0189] In another embodiment, a small displacement may be applied to the first nanocolumns NP1 in the first layer LE1 of the central group CG instead of to the second nanocolumns NP2 in the second layer LE2 of the peripheral group PG. In an embodiment, the relative positional relationship between the first nanocolumns NP1 in the first layer LE1 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the peripheral group PG may be different from the relative positional relationship between the first nanocolumns NP1 in the first layer LE1 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the central group CG. In this case, the relative positional relationship between the second nanocolumns NP2 in the second layer LE2 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the peripheral group PG may be the same as the relative positional relationship between the second nanocolumns NP2 in the second layer LE2 of the first to fourth pixel corresponding regions 131, 132, 133, and 134 in the central group CG.

[0190] Figure 20 to Figure 23 is a cross-sectional view schematically illustrating an image sensor pixel array according to some embodiments.

[0191] Reference Fig. 20 , the image sensor pixel array 1102 may further include a color filter array 150, which is arranged between the sensor substrate 110 and the color separation lens array 130 and includes a green filter GF, a blue filter BF, and a red filter. The color filters included in the color filter array 150 may be arranged, for example, as shown in FIG. Figure 2AThe color separation lens array 130 in the present embodiment performs color separation, so adding a color filter array can improve the color purity by compensating for some errors that may occur during the color separation of the color separation lens array 130. The planarization layer 125 covering the color filter array 150 can be disposed on the color filter array 150. The distance ds1 between the color separation lens array 130 and the sensor substrate 110 can be appropriately set according to the refractive index of the color filter array 150 and the planarization layer 125. The anti-reflection layer 140 can be disposed on the color separation lens array 130.

[0192] Fig.21 The pixel array 1103 and Fig. 20 The difference between the pixel array 1102 of FIG. 1 and FIG. 2 is that an encapsulation layer 160 is further provided between the planarization layer 125 and the color separation lens array 130. The refractive index of the encapsulation layer 160 may be different from the refractive index of the planarization layer 125. The distance ds2 between the color separation lens array 130 and the sensor substrate 110 may be appropriately set according to the refractive indices of the color filter array 150, the planarization layer 125, and the encapsulation layer 160.

[0193] Fig. 22 The pixel array 1104 and Fig. 20 The pixel array 1102 is different in that the anti-reflective layer 145 includes nanostructures.

[0194] Fig.23 The pixel array 1105 and Fig. 20 The difference between the pixel array 1102 of FIG. 1 and FIG. 2 is that the color filter array 155 includes an inorganic material. The distance ds3 between the color separation lens array 130 and the sensor substrate 110 can be set according to the refractive index of the color filter array 155 .

[0195] Fig.24 is a block diagram of an electronic device including an image sensor according to some embodiments. Fig.24In the network environment ED00, the electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (short-range wireless communication network, etc.), or can communicate with another electronic device ED04 and / or a server ED08 via a second network ED99 (long-range wireless communication network, etc.). The electronic device ED01 can communicate with the electronic device ED04 via the server ED08. The electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, a sound output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a tactile module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a subscriber identification module ED96 and / or an antenna module ED97. In the electronic device ED01, some elements (display device ED60, etc.) may be omitted, or another element may be added. Some elements may be configured as an integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illumination sensor, etc.) can be embedded and implemented in the display device ED60 (display, etc.).

[0196] The processor ED20 can control one or more elements (hardware, software elements, etc.) of the electronic device ED01 connected to the processor ED20 by executing software (program ED40, etc.), and can perform various data processing or operations. As part of the data processing or operation, the processor ED20 can load commands and / or data received from another element (sensor module ED76, communication module ED90, etc.) into the volatile memory ED32, can process the commands and / or data stored in the volatile memory ED32, and can store the resulting data in the non-volatile memory ED34. The processor ED20 may include a main processor ED21 (central processing unit, application processor, etc.), and an auxiliary processor ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of the main processor ED21 or operate together with the main processor ED21. The auxiliary processor ED23 can use less power than the main processor ED21 and can perform designated functions.

[0197] The auxiliary processor ED23 can control functions and / or states related to some components (display device ED60, sensor module ED76, communication module ED90, etc.) in the electronic device ED01 on behalf of the main processor ED21 when the main processor ED21 is in an inactive state (sleep state), or together with the main processor ED21 when the main processor ED21 is in an active state (application execution state). The auxiliary processor ED23 (image signal processor, communication processor, etc.) can be implemented as a part of another component (camera module ED80, communication module ED90, etc.) functionally related thereto.

[0198] The memory ED30 can store various data required by the components of the electronic device ED01 (processor ED20, sensor module ED76, etc.). The data may include, for example, input data and / or output data about software (program ED40, etc.) and commands related thereto. The memory ED30 may include a volatile memory ED32 and / or a non-volatile memory ED34.

[0199] The program ED40 may be stored as software in the memory ED30 , and may include an operating system ED42 , middleware ED44 , and / or applications ED46 .

[0200] The input device ED50 may receive commands and / or data to be used in elements (processor ED20, etc.) of the electronic device ED01 from outside (user, etc.) of the electronic device ED01. The input device ED50 may include a microphone, a mouse, a keyboard, and / or a digital pen (stylus).

[0201] The sound output device ED55 can output sound signals to the outside of the electronic device ED01. The sound output device ED55 may include a speaker and / or a receiver. The speaker may be used for general purposes (such as multimedia reproduction or recording playback), and the receiver may be used to receive calls. The receiver may be coupled as part of the speaker or may be implemented as an independent device.

[0202] The display device ED60 can provide visual information to the outside of the electronic device ED01. The display device ED60 may include a display, a holographic device or a projector, and a control circuit for controlling the corresponding device. The display device ED60 may include a touch circuit configured to sense a touch and / or a sensor circuit (pressure sensor, etc.) configured to measure the strength of the force generated by the touch.

[0203] The audio module ED70 can convert sound into an electrical signal and vice versa. The audio module ED70 can obtain sound through the input device ED50, or can output sound via the sound output device ED55 and / or a speaker and / or earphone of another electronic device (electronic device ED02, etc.) directly or wirelessly connected to the electronic device ED01.

[0204] The sensor module ED76 can sense the working state (power, temperature, etc.) of the electronic device ED01, or the external environment state (user state, etc.), and can generate an electrical signal and / or data value corresponding to the sensed state. The sensor module ED76 can include a gesture sensor, a gyroscope sensor, a pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an infrared (IR) sensor, a liveness sensor, a temperature sensor, a humidity sensor, and / or an illumination sensor.

[0205] Interface ED77 may support one or more specified protocols that may be used so that electronic device ED01 is directly or wirelessly connected to another electronic device (electronic device ED02, etc.). Interface ED77 may include a high-definition multimedia interface (HDMI), a universal serial bus (USB) interface, an SD card interface, and / or an audio interface.

[0206] The connection terminal ED78 may include a connector through which the electronic device ED01 can be physically connected to another electronic device (electronic device ED02, etc.) The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0207] The haptic module ED79 may convert the electrical signal into mechanical stimulation (vibration, motion, etc.) or electrical stimulation that the user may feel through tactile or kinesthetic sense. The haptic module ED79 may include a motor, a piezoelectric device, and / or an electrical stimulation device.

[0208] The camera module ED80 can capture still images and videos. The camera module ED80 may include a lens assembly including one or more lenses, the above-mentioned image sensor 1000, an image signal processor and / or a flash. The lens assembly included in the camera module ED80 can collect light emitted from an object to be captured.

[0209] The power management module ED88 may manage power supplied to the electronic device ED01. The power management module ED88 may be implemented as a part of a power management integrated circuit (PMIC).

[0210] The battery ED89 can supply power to the components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0211] The communication module ED90 can support the establishment of a direct (wired) communication channel and / or a wireless communication channel between the electronic device ED01 and another electronic device (electronic device ED02, electronic device ED04, server ED08, etc.), and communicate through the established communication channel. The communication module ED90 can operate independently of the processor ED20 (application processor, etc.), and can include one or more communication processors that support direct communication and / or wireless communication. The communication module ED90 can include a wireless communication module ED92 (cellular communication module, short-range wireless communication module, global navigation satellite system (GNSS) communication module) and / or a wired communication module ED94 (local area network (LAN) communication module, power line communication module, etc.). In the communication module, the corresponding communication module can communicate with another electronic device via a first network ED09 (a short-range communication network such as Bluetooth, WiFi Direct or Infrared Data Association (IrDA)) or a second network ED99 (a long-range communication network, such as a cellular network, the Internet or a computer network (LAN, WAN, etc.)). The various communication modules described above may be integrated into one component (a single chip, etc.), or may be implemented as multiple components (multiple chips) separated from each other. The wireless communication module ED92 may identify and authenticate the electronic device ED01 in a communication network such as the first network ED98 and / or the second network ED99 by using subscriber information (e.g., an International Mobile Subscriber Identifier (IMSI) etc.) stored in the subscriber identification module ED96.

[0212] The antenna module ED97 can send signals and / or power to the outside (another electronic device, etc.), or receive signals and / or power from the outside (another electronic device, etc.). The antenna may include a radiator formed as a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or more antennas. When the antenna module ED97 includes multiple antennas, among the multiple antennas, the communication module ED90 can select an antenna suitable for the communication type used in a communication network such as a first network ED98 and / or a second network ED99. Signals and / or power can be sent between the communication module ED90 and another electronic device via the selected antenna. Another component other than the antenna (RFIC, etc.) may be included as part of the antenna module ED97.

[0213] Some elements may be connected to each other via a communication method between peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industry processor interface (MIPI), etc.) and may exchange signals (commands, data, etc.).

[0214] Commands or data can be sent or received between the electronic device ED01 and the external electronic device ED04 via the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 can be devices of the same or different types as the electronic device ED01. All or some operations performed in the electronic device ED01 can be performed in one or more devices among the other electronic devices ED02, ED04 and ED08. For example, when the electronic device ED01 must perform a specific function or service, the electronic device ED01 can request one or more other electronic devices to perform part or all of the function or service instead of performing the function or service by itself. The one or more electronic devices that receive the request perform additional functions or services related to the request, and can transmit the results of the execution to the electronic device ED01. To this end, for example, cloud computing, distributed computing or client-server computing technology can be used.

[0215] Fig.25 It shows that the Fig.24 FIG. 1 is a block diagram of an example of a camera module ED80 in an electronic device ED01. Fig.25 The camera module ED80 may include a lens assembly 1170 , a flash 1120 , an image sensor 1100 , an image stabilizer 1140 , an AF controller 1130 , a memory 1150 (buffer memory, etc.), an actuator 1180 , and / or an image signal processor (ISP) 1160 .

[0216] The lens assembly 1170 can collect light emitted from the object to be captured. The lens assembly 1170 may include one or more optical lenses. The lens assembly 1170 may include a path switching element that switches the light path to the image sensor 1000. Depending on whether the path switching element is set and the arrangement type with the optical lens, the camera module ED80 may have a vertical type or a folding type. The camera module ED80 may include a plurality of lens assemblies 1170, and in this case, the camera module ED80 may include a dual camera module, a 360-degree camera, or a spherical camera. Some of the plurality of lens assemblies 1170 may have the same lens characteristics (viewing angle, focal length, autofocus, F number, optical zoom, etc.) or different lens characteristics. The lens assembly 1170 may include a wide-angle lens or a telephoto lens.

[0217] The actuator 1180 may drive the lens assembly 1170. At least some of the optical lenses and the path switching element included in the lens assembly 1170 may be moved by the actuator 1180. The optical lenses may be moved along the optical axis, and when the distance between adjacent lenses is adjusted by moving at least some of the optical lenses included in the lens assembly 1170, the optical zoom ratio may be adjusted.

[0218] The actuator 1180 may adjust the position of any one optical lens in the lens assembly 1170 so that the image sensor 1000 may be located at the focal length of the lens assembly 1170. The actuator 1180 may drive the lens assembly 1170 according to the AF driving signal transmitted from the AF controller 1130.

[0219] The flash 1120 may emit light for enhancing light emitted or reflected from an object. The flash 1120 may emit visible light or infrared light. The flash 1120 may include one or more light emitting diodes (red-green-blue (RGB)) LEDs, white light LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or xenon lamps. The image sensor 1000 may be the one described above with reference to FIG. Figure 1 The image sensor 1000 described above may include the above pixel array or a pixel array in a combination or modification thereof. The image sensor 1000 may obtain an image corresponding to an object by converting light emitted or reflected from the object and transmitted through the lens assembly 1170 into an electrical signal.

[0220] The image sensor 1000 includes the above-mentioned color separation lens array 130, and each pixel may include a plurality of photosensitive units forming a plurality of channels, for example, a plurality of photosensitive units arranged in a 2×2 array. Some pixels may be used as AF pixels, and the image sensor 1000 may generate an AF drive signal based on signals from a plurality of channels in the AF pixels. The nanocolumns of the color separation lens array included in the image sensor 1000 are arranged in two layers as described above, and the arrangement type of the second layer of nanocolumns is adjusted, the channel difference may be reduced, and the trend of the channel difference between pixels of different colors is similar. Therefore, the accuracy of AF drive may be improved.

[0221] The image stabilizer 1140 moves one or more lenses included in the lens assembly 1170 or the image sensor 1000 in a certain direction or controls the operating characteristics of the image sensor 1000 (adjustment of readout timing, etc.) in response to the movement of the camera module ED80 or the electronic device ED01 including the camera module ED80 to compensate for the negative effects of the movement. The image stabilizer 1140 can sense the movement of the camera module ED80 or the electronic device ED01 by using a gyro sensor or an acceleration sensor provided inside or outside the camera module ED80. The image stabilizer 1140 can be implemented as an optical type.

[0222] The AF controller 1130 may generate an AF driving signal according to a signal value sensed from the AF pixel in the image sensor 1000. The AF controller 1130 may control the actuator 1180 according to the AF driving signal.

[0223] The memory 1150 may store some or all of the data of the image obtained by the image sensor 1000 for subsequent image processing operations. For example, when a plurality of images are obtained at a high speed, the obtained raw data (Bayer pattern data, high-resolution data, etc.) is stored in the memory 1150, and only the low-resolution image is displayed. Then, the raw data of the selected image (user selection, etc.) may be transmitted to the image signal processor 1160. The memory 1150 may be integrated with the memory ED30 of the electronic device ED01, or may include an additional memory that operates independently.

[0224] The image signal processor (ISP) 1160 may perform image processing on an image obtained by the image sensor 1000 or image data stored in the memory 1150. Image processing may include depth map generation, three-dimensional modeling, panorama generation, feature extraction, image combination, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blur, sharpening, softening, etc.). The image signal processor 1160 may perform control (exposure time control, readout timing control, etc.) of the elements (image sensor 1000, etc.) included in the camera module ED80. The image processed by the image signal processor 1160 may be stored again in the memory 1150 for additional processing, or may be provided to an external element of the camera module ED80 (e.g., memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). The image signal processor 1160 may be integrated with the processor ED20, or may be configured as an additional processor that operates independently of the processor ED20. When the image signal processor 1160 is configured as an additional processor separate from the processor ED20 , an image processed by the image signal processor 1160 is subjected to additional image processing by the processor ED20 and may then be displayed on the display device ED60 .

[0225] The AF controller 1130 may be integrated with the image signal processor 1160. The image signal processor 1160 may generate an AF signal by processing a signal from an AF pixel of the image sensor 1000, and the AF controller 1130 may convert the AF signal into a driving signal of the actuator 1180 and transmit the signal to the actuator 1180.

[0226] The electronic device ED01 may also include one or more camera modules with different properties or functions. The camera module may include Fig.24 The elements of the camera module ED80 are similar to the elements of the camera module ED80, and the image sensor included in the camera module can be implemented as a charge coupled device (CCD) sensor and / or a complementary metal oxide semiconductor (CMOS) sensor, and can include one or more sensors selected from image sensors with different properties, such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor. In this case, one of the multiple camera modules ED80 may include a wide-angle camera, and another camera module ED80 may include a telephoto camera. Similarly, one of the multiple camera modules ED80 may include a front camera, and another camera module ED80 may include a rear camera.

[0227] The image sensor according to the embodiment may be applied to various electronic devices.

[0228] The image sensor 1000 according to the embodiment can be applied to a mobile phone or smart phone, a tablet computer or smart tablet computer, a digital camera or camera, a laptop computer, or a television or smart TV. For example, a smart phone or smart tablet computer may include multiple high-resolution cameras, each of which includes a high-resolution image sensor. Depth information of an object in an image may be extracted, the defocus of the image may be adjusted, or an object in an image may be automatically recognized using a high-resolution camera.

[0229] Similarly, the image sensor 1000 can be applied to smart refrigerators, surveillance cameras, robots, medical cameras, etc. For example, a smart refrigerator can use an image sensor to automatically identify the food in the refrigerator, and can notify the user through a smartphone of the presence of a certain food, the type of food put in or taken out, etc. In addition, the surveillance camera can provide ultra-high-resolution images, and can allow the user to identify objects or people in the image by using high sensitivity even in a dark environment. Robots can enter disaster or industrial sites that humans cannot directly enter to provide users with high-resolution images. Medical cameras can provide high-resolution images for diagnosis or surgery, and can dynamically adjust the field of view.

[0230] Likewise, the image sensor 1000 may be applied to a vehicle. The vehicle may include a plurality of vehicle-mounted cameras arranged at different positions, and each vehicle-mounted camera may include an image sensor according to an embodiment. The vehicle may provide the driver with various information about the interior of the vehicle or the periphery of the vehicle by using a plurality of vehicle-mounted cameras, and may also provide the driver with information required for autonomous driving by automatically identifying objects or people in the image.

[0231] Since the color separation lens array included in the above-mentioned image sensor can separate incident light by wavelength and condense the separated light without absorbing or blocking the incident light, the light utilization efficiency of the image sensor can be improved.

[0232] Also, the design of the nanorods of the color separation lens array takes into account light obliquely incident to the peripheral portion of the image sensor, and thus, performance degradation according to the incident angle can be reduced and the quality of an image obtained by the image sensor can be improved.

[0233] It should be understood that the embodiments described herein should be considered in a descriptive sense only and not for restrictive purposes. The description of features or aspects in each embodiment should generally be considered to be applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, it should be understood by those of ordinary skill in the art that various changes in form and details may be made without departing from the spirit and scope defined by the appended claims.

Claims

1. An image sensor, comprising: a sensor substrate including a plurality of unit pixel groups, each of the plurality of unit pixel groups including a first pixel, a second pixel, a third pixel, and a fourth pixel arranged in a Bayer pattern along two horizontal directions perpendicular to each other; as well as a color separation lens array spaced apart from the sensor substrate in a vertical direction perpendicular to the two horizontal directions and configured to separate incident light according to wavelengths and to focus the incident light on each of the first to fourth pixels, The color separation lens array includes a plurality of pixel corresponding groups respectively corresponding to the plurality of unit pixel groups, each of the plurality of pixel corresponding groups includes first to fourth pixel corresponding regions corresponding to the first to fourth pixels, each of the first to fourth pixel corresponding regions includes a plurality of first nanocolumns arranged in a first layer and a plurality of second nanocolumns arranged in a second layer, and the second layer is stacked on the first layer along the vertical direction, The plurality of pixel corresponding groups include a central group located at the center of the color separation lens array and a plurality of peripheral groups away from the center, and The displacements of the arrangement centers of the first nanocolumns and the second nanocolumns included in the first to fourth pixel corresponding areas, which are offset from each other in a direction perpendicular to the vertical direction, are first to fourth displacements, and in each of the multiple peripheral groups, at least two of the first to fourth displacements are different from each other.

2. The image sensor according to claim 1, wherein: The first to fourth pixels included in each of the plurality of unit pixel groups each include four photosensitive units arranged in a 2×2 array.

3. The image sensor according to claim 2, wherein: The magnitude of the channel difference generated in four photosensitive units included in each of the first to fourth pixels facing the first to fourth pixel corresponding areas of the plurality of peripheral groups is the same in two or more of the first to fourth pixels.

4. The image sensor according to claim 1, wherein: A relative positional relationship of the plurality of second nanorods in each of the first to fourth pixel corresponding regions in the peripheral group is different from a relative positional relationship of the plurality of second nanorods in each of the first to fourth pixel corresponding regions in the central group.

5. The image sensor according to claim 1, wherein: The first pixel and the fourth pixel are green pixels, the second pixel is a blue pixel, and the third pixel is a red pixel.

6. The image sensor according to claim 5, wherein: In each of the plurality of peripheral groups, the first to fourth displacements are each expressed as a vector sum of a common main displacement and first to fourth small displacements, For each of the plurality of peripheral groups, when CRA and φ respectively represent a chief ray angle CRA and an azimuth angle φ determined according to a relative position on the image sensor, a and b respectively represent unit vectors in the two horizontal directions, and CRA_max represents a maximum value of the CRA, The common principal displacement is denoted as C M *(CRA / CRA_max)*(-a*cosφ-b*sinφ), where C M is a real number greater than 0.

7. The image sensor according to claim 6, wherein: At least two of the first to fourth small displacements are different from each other.

8. The image sensor according to claim 6, wherein: The first small displacement and the fourth small displacement are identical to each other, and The magnitude of the second small displacement and the magnitude of the third small displacement are greater than the magnitude of the first small displacement.

9. The image sensor according to claim 6, wherein: The first and fourth minor displacements are zero.

10. The image sensor according to claim 6, wherein: The second smallest displacement is expressed as C2*(CRA / CRA_max)*(-a*c0sφ-b*sinφ), The third smallest displacement is expressed as C3*(CRA / CRA_max)*(-a*cosφ-b*sinφ), and C2 and C3 are real numbers greater than 0.

11. The image sensor according to claim 10, wherein: C2 and C3 are different from each other.

12. The image sensor according to claim 6, wherein: The third smallest displacement is 0, The first small displacement is expressed as D1*(CRA / CRA_max)*b*sinφ, The fourth smallest displacement is expressed as D4*(CRA / CRA_max)*a*cosφ, The second smallest displacement is denoted as D 3b *(CRA / CRA_max)*b*sinφ+D 3a *(CRA / CRA_max)*a*cosφ, and D1, D4, D 3b , and D 3a is a real number greater than 0.

13. The image sensor according to claim 12, wherein: D1, D4, D 3b , and D 3a At least two of them are different from each other.

14. The image sensor according to claim 6, wherein: When compared with the relative positions of the multiple second nanocolumns in the second pixel corresponding area included in the central group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area, the relative positions of the multiple second nanocolumns in the second pixel corresponding area included in the peripheral group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area differ by a second small displacement.

15. The image sensor according to claim 6, wherein: When compared with the relative positions of the multiple second nanocolumns in the third pixel corresponding area included in the central group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area, the relative positions of the multiple second nanocolumns in the third pixel corresponding area included in the peripheral group relative to the second nanocolumns in the adjacent first pixel corresponding area and the second nanocolumns in the adjacent fourth pixel corresponding area differ by a third small displacement.

16. The image sensor according to claim 1, wherein: In each of the multiple peripheral groups, an arrangement center of the first nanocolumns included in each of the first to fourth pixel corresponding regions is offset from the centers of the first to fourth pixels facing the first to fourth pixel corresponding regions by a specific interval in a direction perpendicular to the vertical direction, and the specific interval is proportional to a chief ray angle CRA defined in each of the multiple peripheral groups.

17. The image sensor according to claim 1, wherein: A relative positional relationship of the plurality of first nanorods in each of the first to fourth pixel corresponding regions in the peripheral group is different from a relative positional relationship of the plurality of first nanorods in each of the first to fourth pixel corresponding regions in the central group.

18. The image sensor according to claim 1, further comprising: An anti-reflection layer is arranged on the color separation lens array.

19. The image sensor according to claim 1, further comprising: A color filter array is between the sensor substrate and the color separation lens array.

20. An electronic device comprising: a lens assembly including one or more lenses and configured to form an optical image of a subject; an image sensor configured to convert the optical image formed by the lens assembly into an electrical signal; as well as a processor configured to process signals generated by the image sensor, Wherein, the image sensor comprises: a sensor substrate including a plurality of unit pixel groups, each of the plurality of unit pixel groups including first pixels, second pixels, third pixels, and fourth pixels arranged in a Bayer pattern along two horizontal directions perpendicular to each other; and a color separation lens array spaced apart from the sensor substrate in a vertical direction perpendicular to the two horizontal directions and configured to separate incident light according to wavelengths and to focus the incident light on each of the first to fourth pixels, The color separation lens array includes a plurality of pixel corresponding groups respectively corresponding to the plurality of unit pixel groups, each of the plurality of pixel corresponding groups includes first to fourth pixel corresponding regions corresponding to the first to fourth pixels, each of the first to fourth pixel corresponding regions includes a plurality of first nanocolumns arranged in a first layer and a plurality of second nanocolumns arranged in a second layer, and the second layer is stacked on the first layer along the vertical direction, The plurality of pixel corresponding groups include a central group located at the center of the color separation lens array and a plurality of peripheral groups away from the center, and The displacement of the arrangement center of the first nanocolumn and the arrangement center of the second nanocolumn respectively included in each of the first to fourth pixel corresponding areas in a direction perpendicular to the vertical direction is the first to fourth displacement, and in each of the multiple peripheral groups, at least two of the first to fourth displacements are different from each other.

Images