Laser processing apparatus comprising laser sensor system and method of measuring beam characteristics

Abstract

An optical apparatus is disclosed. In one particular example, the device comprises: a light detector device having a light detector; a first optical assembly arranged to direct a first beam path along which a laser energy beam can propagate to a first string of optical elements configured to direct the first beam path to the light detector; and a second optical assembly arranged to direct a second beam path along which the laser energy beam can propagate to a second string of optical elements configured to direct the second beam path to the light detector. The first optical element string and the second optical element string include a partially transmissive mirror and a curved mirror configured to allow a first portion of the laser energy beam to propagate through the partially transmissive mirror and the curved mirror, thereby imaging an AOD pivot point at a location relative to the detector device. The light detector can be positioned in the detection port of the integrating sphere.

Description

[0001] CROSS REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of U.S. Provisional Application No. 63 / 348,165, filed on June 2, 2022, the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] Embodiments described herein relate generally to laser processing equipment and, more particularly, to laser sensor systems, components thereof, and techniques for operating the same to process a workpiece. Background Art

[0004] Laser processing systems or apparatus are used in a wide variety of applications, including printed circuit board (PCB) machining, build-up manufacturing, and the like. To process a PCB, it is necessary to precisely control the ablation of PCB material (e.g., metal, insulator, etc. used to form the vias) when, for example, laser processing is used to form holes or vias therein. Accurate and repeatable measurement of the power or energy of the processing laser beam is important for controlling the ablation process used to form such holes or vias. The laser sensor systems required for such precise measurements can be complex, expensive, and large. Thus, there is a need for a laser sensor system that provides consistent and accurate results with low system complexity and cost. The specific examples discussed herein were developed to recognize these and other problems discovered by the inventors.

[0005] FIG. 1 illustrates a laser sensor system 30. The laser sensor system 30 includes mirrors 32a, 32b, 34a, 34b and light detectors 36a and 36b, respectively. Mirrors 32a and 32b are provided to direct light propagating along beam paths 14a and 14b from the first positioner 106 to mirrors 34a and 34b. Mirrors 32a and 32b are provided as turning mirrors and mirrors 34a and 34b are provided as partially transmissive mirrors configured to reflect a majority of light in an incident laser energy beam and transmit a small amount of light to detector 36a. The portion of the laser energy beam that is not transmitted by partially transmissive mirrors 34a and 34b is directed to scan heads 120a and 120b, respectively. Detector 36a is arranged to receive light transmitted by partially transmissive mirror 34a and detector 36b is arranged to receive light transmitted by partially transmissive mirror 34b. The detectors 36a and 36b are configured to sense or measure the laser energy or power transmitted therethrough and generate sensor data based on the sensed or measured values. Summary of the invention

[0006] One embodiment of the present invention can be characterized as an apparatus comprising: a detector apparatus including a light detector; at least one first optical component arranged to direct a first beam path along which a laser energy beam can propagate to a first optical train configured to direct the first beam path to the detector apparatus; and at least one second optical component arranged to direct a second beam path along which the laser energy beam can propagate to a second optical train configured to direct the second beam path to the detector apparatus. The first optical train and the second optical train are configured to image an AOD pivot point at a position relative to the detector apparatus. The apparatus further comprises at least one laser source operable to generate the laser energy beam.

[0007] The first optical train and the second optical train may include a partially transmissive mirror and a curved mirror, wherein the partially transmissive mirror is arranged and configured to receive the laser energy beam, allow a first portion of the laser energy beam to propagate through the partially transmissive mirror, and reflect a second portion of the laser energy beam. The curved mirror is arranged to receive the first portion of the laser energy beam from the partially transmissive mirror and reflect the first portion of the laser energy beam to a detector device. In one embodiment, the detector device is an integrating sphere. The device may further include a switch configured to selectively propagate the laser energy beam to the first beam path or the second beam path. The switch may be an AOD system or a galvanometer system. The light detector device may include an integrating sphere having an integrating sphere body having a collection port and a detection port formed therein, wherein the light detector is positioned in the detection port.

[0008] Another embodiment of the invention can be characterized as an apparatus comprising: a detector apparatus including a light detector; a first laser source operable to generate a first laser energy beam; a second laser source operable to generate a second laser energy beam; at least one first optical component arranged to direct a first beam path along which the first laser energy beam or the second laser energy beam can propagate to a first optical train configured to direct the first beam path to the detector apparatus; and at least one second optical component arranged to direct a second beam path along which the first laser energy beam or the second laser energy beam can propagate to a second optical train configured to direct the second beam path to the detector apparatus. The first optical train and the second optical train are configured to image an AOD pivot point at a location relative to the detector apparatus. The first optical train and the second optical train may include a partially transmissive mirror and a curved mirror, wherein the partially transmissive mirror is arranged and configured to receive the first laser energy beam or the second laser energy beam; allow a first portion of the first laser energy beam or the first portion of the second laser energy beam to propagate through the partially transmissive mirror, and reflect the second portion of the first laser energy beam or the second portion of the second laser energy beam. The curved mirror is arranged to receive the first portion of the first laser energy beam or the first portion of the second laser energy beam from the partially transmissive mirror and reflect the first portion of the first laser energy beam or the first portion of the second laser energy beam to the detector device. The device may further include a switch configured to selectively propagate the first laser energy beam or the second laser energy beam to the first beam path or the second beam path. The switch may be an AOD system or a galvanometer system. The light detector device may include an integrating sphere having an integrating sphere body having a collection port and a detection port formed therein, wherein the light detector is positioned in the detection port. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] FIG. 1 schematically illustrates a laser sensor system for a laser processing apparatus.

[0010] Figure 2 A laser processing apparatus according to a specific example is schematically described.

[0011] Figure 3 A laser sensor system according to one embodiment is schematically illustrated.

[0012] Figure 4 A multi-source laser processing apparatus according to a specific example is schematically illustrated.

[0013] Figure 5 A multi-source laser processing apparatus according to another specific example is schematically described.

[0014] Figure 6 The location of the beam path entering the integrating sphere according to one specific example is schematically illustrated.

[0015] Figure 7 The position of the beam path entering the integrating sphere according to another specific example is schematically illustrated. DETAILED DESCRIPTION

[0016] Example embodiments are described herein with reference to the accompanying drawings. Unless otherwise expressly stated, in the drawings, the size, position, etc. of components, features, elements, etc., and any distances therebetween are not necessarily to scale, but are exaggerated for clarity. In the drawings, the same numbers refer to the same elements throughout. Therefore, the same or similar numbers may be described with reference to other drawings, even if these numbers are not mentioned or described in the corresponding drawings. Also, even elements not indicated by reference numbers may be described with reference to other drawings.

[0017] The terms used herein are for the purpose of describing specific examples only, and are not intended to be limiting. Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as generally understood by those skilled in the art. As used herein, unless the context clearly indicates otherwise, the singular forms "one" and "the" are intended to also include plural forms. It should be recognized that the term "comprises and / or comprising" when used in this specification specifies the presence of stated features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or groups thereof. Unless otherwise specified, when describing a value range, the value range includes the upper and lower limits of the range and any sub-ranges therebetween. Unless otherwise indicated, terms such as "first", "second" and the like are only used to distinguish one element from another. For example, a node may be referred to as a "first node", and similarly, another node may be referred to as a "second node", or vice versa.

[0018] Unless otherwise indicated, the terms "about", "approximately", and the like mean that amounts, sizes, formulations, parameters, and other quantities and characteristics are not and need not be exact, but may be approximate and / or larger or smaller as necessary, reflecting tolerances, conversion factors, rounding, measurement errors, and the like, as well as other factors known to those skilled in the art. Spatially relative terms such as "below", "below", "below", "above", and "above", and the like, may be used herein for ease of description to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It should be recognized that the spatially relative terms are intended to encompass different orientations in addition to the orientations depicted in the figures. For example, if the objects in the figures are flipped, an element described as "below" or "below" other elements or features will then be oriented "above" other elements or features. Thus, the exemplary term "below" may encompass orientations of above and below. Objects may be otherwise oriented (eg, rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0019] The section headings used herein are for organizational purposes only, and unless expressly stated otherwise, these section headings should not be construed as limiting the subject matter described. It will be appreciated that many different forms, embodiments, and combinations are possible without departing from the spirit and teachings of the invention, and therefore, the invention should not be considered limited to the example embodiments set forth herein. Rather, these examples and embodiments are provided so that the invention will be thorough and complete, and will convey the scope of the invention to one of ordinary skill in the art.

[0020] I. System Overview

[0021] Figure 2 A laser processing apparatus according to a specific example of the present invention is schematically illustrated.

[0022] refer to Figure 2 In the specific example shown in the figure, the laser processing device 100 (also referred to herein as the "device") for processing workpieces 102a and 102b (each generally referred to as "workpiece 102") can be characterized as including: a laser source 104, which is used to generate a laser energy beam; a first positioner 106; a plurality of second positioners (for example, second positioners 108a and 108b, each generally referred to as "second positioner 108"); a third positioner 110; and a plurality of scanning lenses (for example, scanning lenses 112a and 112b, each generally referred to as "scanning lens 112"). Although Figure 2The laser processing apparatus 100 is described as including an embodiment of two second positioners 108, but it will be appreciated that many of the embodiments disclosed herein may be applied to laser processing apparatuses including more than two second positioners 108. The laser processing apparatus 100 also includes a laser sensor system (such as the laser sensor system 130) configured to measure properties of the laser energy beam (e.g., power, energy, beam diameter, and the like) and provide measurement data representative of such properties to the controller 122.

[0023] Scan lens 112 and corresponding second locator 108 may be integrated into a common housing or "scan head" as appropriate. For example, scan lens 112a and corresponding second locator 108 (i.e., second locator 108a) may be integrated into a common scan head 120a. Similarly, scan lens 112b and corresponding second locator 108 (i.e., second locator 108b) may be integrated into a common scan head 120b. As used herein, each of scan head 120a and scan head 120b is also generally referred to herein as a "scan head 120".

[0024] although Figure 2 A single third positioner 110 is illustrated that generally supports a plurality of workpieces 102, but it will be appreciated that a plurality of third positioners 110 may be provided (e.g., to each support a different workpiece 102, to support a common workpiece 102, or the like or any combination thereof). However, in view of the following description, it should be appreciated that if the functionality provided by any second positioner 108 or third positioner 110 is not required, then the inclusion of any second positioner 108 or third positioner 110 is optional.

[0025] As discussed in more detail below, the first positioner 106 can be operated to diffract, reflect, refract, or otherwise deflect the laser energy beam so as to deflect the beam path 114 to any of the second positioners 108. As used herein, the term "beam path" refers to the path along which the laser energy in the laser energy beam travels as it propagates from the laser source 104 to the scan lens 112. When the beam path 114 is deflected to the second positioner 108a, the beam path 114 can be deflected by any angle within a first angular range (also referred to herein as the "first primary angular range 116a") (e.g., as measured relative to the beam path 114 incident on the first positioner 106). Similarly, when the beam path 114 is deflected to the second positioner 108b, the beam path 114 can be deflected by any angle within a second angular range (also referred to herein as the "second primary angular range 116b") (e.g., as measured relative to the beam path 114 incident on the first positioner 106). As used herein, each of the first primary angular range 116a and the second primary angular range 116b may also be collectively referred to herein as "primary angular range 116". Generally speaking, the first primary angular range 116a does not overlap and is not adjacent to the second primary angular range 116b. The first primary angular range 116a may be greater than, less than, or equal to the second primary angular range 116b. As used herein, the action of deflecting the beam path 114 within one or more of the primary angular ranges 116 is referred to herein as "beam branching".

[0026] Each second positioner 108 can be operated to diffract, reflect, refract, or the like, or any combination thereof, the laser energy beam generated by the laser source 104 and deflected (i.e., to "deflect") the laser energy beam by the first positioner 106 so as to deflect the beam path 114 to the corresponding scan lens 112. For example, the second positioner 108a can deflect the beam path 114 to the scan lens 112a. Similarly, the second positioner 108b can deflect the beam path 114 to the scan lens 112b. When deflecting the beam path 114 to the scan lens 112a, the second positioner 108a can deflect the beam path 114 by any angle (e.g., as measured relative to the optical axis of the scan lens 112a) within a first angular range (also referred to herein as the "first secondary angular range 118a"). Similarly, when deflecting the beam path 114 to the scan lens 112b, the second positioner 108b can deflect the beam path 114 by any angle within a second angular range (also referred to herein as the "second secondary angular range 118b") (e.g., as measured relative to the optical axis of the scan lens 112b). The first secondary angular range 118a can be greater than, less than, or equal to the second secondary angular range 118b.

[0027] The laser energy deflected to the scan lens 112 is typically focused by the scan lens 112 and transmitted to propagate along the beam axis for delivery to the workpiece 102. For example, the laser energy deflected to the scan lens 112a is delivered to the workpiece 102a, and the transmitted laser energy deflected to the scan lens 112b is delivered to the workpiece 102b. The laser energy delivered to the workpiece 102 can be characterized as having a Gaussian spatial intensity profile or a non-Gaussian (i.e., "shaped") spatial intensity profile (e.g., a "top hat" spatial intensity profile, a super Gaussian spatial intensity profile, etc.).

[0028] Although FIG1 illustrates a plurality of workpieces 102, each of which is arranged so as to intersect a different beam axis, it will be appreciated that a single larger workpiece 102 may be processed by laser energy that has been delivered from a plurality of scan lenses. Additionally, although FIG1 illustrates a plurality of scan lenses 112, each of which is arranged so as to transmit laser energy propagating along a beam path that has been deflected by a different second positioner 108, it will be appreciated that the apparatus 100 may be configured (e.g., utilizing mirrors, prisms, beam splitters, or the like, or any combination thereof) such that laser energy propagating along a beam path deflected by a plurality of second positioners 108 is transmitted by a common scan lens 112.

[0029] A. Laser Source

[0030] In one embodiment, the laser source 104 is operable to generate laser pulses. Thus, the laser source 104 may include a pulsed laser source, a CW laser source, a QCW laser source, a burst mode laser, or the like, or any combination thereof. In the case where the laser source 104 includes a QCW or CW laser source, the laser source 104 may be operated in a pulsed mode, or may be operated in a non-pulsed mode but further include a pulse gating unit (e.g., an acousto-optic (AO) modulator (AOM), a chopper, etc.) to temporally modulate the laser radiation beam output from the QCW or CW laser source. The laser source 104 may be operated in a "burst mode," wherein a plurality of individual pulses may be grouped within a burst envelope. Within the pulse envelope, the power of each pulse and the time between each pulse may be adapted according to specific laser processing requirements. Thus, the laser source 104 may be broadly characterized as being operable to generate a laser energy beam, which may be embodied as a series of laser pulses or a continuous or quasi-continuous laser beam, which may thereafter propagate along the beam path 114. Although some specific examples discussed herein refer to laser pulses, it should be appreciated that a continuous or quasi-continuous beam may alternatively or additionally be employed whenever appropriate or desired.

[0031] In addition to wavelength, average power, and, when the laser energy beam is embodied as a series of laser pulses, pulse duration and pulse repetition rate, the laser energy beam delivered to the workpiece 102 may be characterized by one or more other characteristics such as pulse energy, peak power, etc., which may be selected (e.g., optionally based on factors such as beam size, beam profile, polarization, beam parameter product (M), etc.) 2 ) spot size, pulse duration, average power, and pulse repetition rate) with an optical intensity (in W / cm2) sufficient to process the workpiece 102 (e.g., to form one or more features) 2 Measurement), flux (in J / cm 2 The workpiece 102 is irradiated at the processing light spot (measurement).

[0032] B. First locator

[0033] The first positioner 106 is arranged, positioned, or otherwise disposed in the beam path 114 and is operated to diffract, reflect, refract, or the like, or any combination thereof, the laser pulses generated by the laser source 104 so as to deflect or impart movement of the beam path 114 (e.g., relative to the scan lens 112) and thus deflect or impart movement of the beam path 114 relative to the workpiece 102. For example, in one embodiment, the first positioner 106 is provided as an AO deflector (AOD) system that is operable to deflect the beam path 114 by diffracting an incident laser beam. In general, the first positioner 106 is operable to impart movement of the beam axis relative to the workpiece 102 along the X-axis (or direction), the Y-axis (or direction), or a combination thereof (e.g., by deflecting the beam path 114 within a first primary angular range 116a, within a second primary angular range 116b, or a combination thereof). Although not illustrated, the Y axis (or Y direction) should be understood to refer to an axis (or direction) that is orthogonal to the illustrated X and Z axes (or directions).

[0034] In one specific example, the operation of the first positioner 106 can be controlled to deflect the beam path 114 to the second positioner 108a (e.g., during a first branching period) and then deflect the beam path 114 to the second positioner 108b (e.g., during a second branching period after the first branching period), or vice versa, or any combination thereof. In another example, the operation of the first positioner 106 can be controlled to deflect the beam path 114 to the second positioner 108a and the second positioner 108b at the same time.

[0035] C. Second locator

[0036] The second positioner 108 is arranged in the beam path 114 and is operated to diffract, reflect, refract, or the like, or any combination thereof, the laser pulses generated by the laser source 104 and transmitted by the first positioner 106 (i.e., to "diffract" the laser pulses) in order to deflect or impart movement to the beam path 114 (e.g., relative to the scan lens 112) and, therefore, relative to the workpiece 102. In general, the second positioner 108 is operable to impart movement of the beam axis relative to the workpiece 102 along the X-axis (or direction), the Y-axis (or direction), or a combination thereof (e.g., by deflecting the beam path 114 within a first principal angular range 118a or within a second principal angular range 118b).

[0037] In view of the above, it should be appreciated that the second positioner 108 may be provided as an AOD system, a galvanometer mirror scanning system, a rotating polygon mirror system, a deformable mirror, a micro electro-mechanical system (MEMS) reflector, or the like, or any combination thereof.

[0038] D. The third locator

[0039] The third positioner 110 is operable to impart movement to the workpiece 102 (eg, workpieces 102a and 102b ) relative to the scan heads 120a and 120b , and thus impart movement to the workpiece 102 relative to the beam path 114 .

[0040] In the illustrated embodiment, the third positioner 110 includes one or more linear stages (e.g., each capable of imparting translational movement to the workpiece 102 along the X, Y, and / or Z directions), one or more rotational stages (e.g., each capable of imparting rotational movement to the workpiece 102 about an axis parallel to the X, Y, and / or Z directions), or the like, or any combination thereof, arranged and configured to impart relative movement between the workpiece 102 and the scan lens 112, and thus between the workpiece 102 and the beam path 114. In the illustrated embodiment, the third positioner 110 is operable to move the workpiece 102. However, in another embodiment, the third positioner 110 is arranged and operable to move the scan head, and optionally, one or more components such as the first positioner 106 and the workpiece 102 may remain stationary.

[0041] E. Scanning lens

[0042] The scan lens 112 (eg, provided as a single lens or a compound lens) is generally configured to focus the laser energy beam directed along the beam path, typically so as to produce a beam waist that can be positioned at or near a desired processing spot.

[0043] F. Controller

[0044] Generally speaking, the apparatus 100 includes one or more controllers, such as the controller 122, to control or facilitate the operation of the apparatus 100. In one embodiment, the controller 122 is communicatively coupled to one or more components of the apparatus 100, such as the laser source 104, the first positioner 106, the second positioner 108, the third positioner 110, etc. (e.g., via one or more wired or wireless communication links, optical fiber links, and the like, or any combination thereof), and the one or more components thus operate in response to one or more control signals output by the controller 122.

[0045] G. Specific Examples of Laser Sensor Systems

[0046] i. Specific Example of Laser Sensor System Using Single Laser and Single Detector

[0047] In some embodiments, the apparatus 100 can be provided with a laser sensor system having a common detector operable to measure optical power directed to multiple workpieces, thereby reducing system complexity and cost compared to systems having multiple detectors. For example, in a processing system having multiple scan heads, during separate branching periods (e.g., by beam branching or pulse splitting as described above), the laser energy beam can be measured by the common detector using a first positioner to direct the beam path to a separate optical train. The separate optical train then directs a portion of the beam (e.g., by a partially transmissive mirror) to the common detector to measure the optical power, while the majority of the beam power is directed to the respective scan heads.

[0048] refer to Figure 3 , a laser sensor system such as laser system 130 includes optical components 132a, 132b, optical trains 140a and 140b, and a detector device 160. In this embodiment, the first optical train 140a includes a first mirror 142a and a first curved mirror 144a, and the second optical train 140b includes a second mirror 142b and a second curved mirror 144b. The detector device 160 includes an integrating sphere 162 having an integrating sphere body 164 having a collection port 166, an inner surface 168, a detection port 170, and a light detector 172 mounted in the detection port 170.

[0049] The optical components 132a and 132b are operable to direct light propagating along the beam paths 114a and 114b deflected by the first positioner 106 within the first main angular range 116a and the second main angular range 116b (e.g., during the first branching period and the second branching period, respectively) to the first optical element string 140a and the second optical element string 140b, respectively. The determination of the branching period during which the measurement beam is measured can be determined by establishing a relationship between the time when the control command is sent to the first positioner 106 by the controller 122 and the time when the laser measurement data is received from the common detector by the controller. Thus, the controller 122 can be configured to determine which beam path (e.g., the first branching period or the second branching period as described above) is to be measured by comparing the timing of a particular branching period (e.g., the first branching period or the second branching period as described above) with the measurement data received by the controller 122. Figure 3 The beam path 114a or the beam path 114b shown in FIG. 1 is directed to the laser sensor system 130 .

[0050] Optical components 132a and 132b may be provided, for example, as knife-edge mirrors (e.g., where specified surface characteristics such as flatness, roughness, and scratch / poke resistance extend all the way to at least one edge of the mirror) and mirrors 142a and 142b may be provided, for example, as partially transmissive mirrors configured to reflect a majority of light in an incident laser energy beam and transmit a small amount of light (e.g., 2% or so) to mirrors 144a and 144b arranged to receive light transmitted by corresponding partially transmissive mirrors and reflect that light to detector device 160. Light not transmitted by partially transmissive mirrors 142a and 142b is directed to scan heads 120a and 120b, respectively. In some embodiments, imaging optics (e.g., focusing or collimating optics operable to change the beam diameter and control the laser flux) may also be introduced into optical train 140a, 140b or elsewhere in laser sensor system 130. In other embodiments, optical components 132a and 132b may serve as steering mirrors.

[0051] In the illustrated embodiment, the detector device 160 includes a light detector 172 configured to sense or measure laser energy or power transmitted therethrough and to generate sensor data representative of the sensed or measured value. In other embodiments, the detector device 160 may include a light detector 172 configured to measure any number of beam characteristics (including, but not limited to, beam diameter, M, etc.). 2The sensor data may be output to the controller 122 by any suitable means, wherein the sensor data may thereafter be processed to support various functions of the apparatus 100, such as real-time pulse energy control (e.g., to compensate for changes in laser power), system calibration (e.g., to compensate for changes in transmittance of the AOD system of the first positioner 106 with respect to RF power and frequency, etc.), or the like, or any combination thereof.

[0052] Because the detector device 160 is optically positioned downstream of the first positioner 106, the readings obtained by the light detector 172 may vary depending on the position or angle of the beam of energy incident thereon. Thus, movement of the incident laser energy beam over the light detector 172 may cause reading errors, which may result in erroneous power control, system calibration, etc. In order to reduce or eliminate the spatial and directional sensitivities associated with the light detectors, each of the laser sensor systems may include a beam expander and / or diffuser (not shown) arranged to expand and / or diffuse the laser energy beam prior to impinging on the light detector 172. Thus, in Figure 3 In the specific example shown in , the laser sensor system 130 may be provided with an integrating sphere 162 optically arranged upstream of the light detector 172 to reduce the spatial and directional sensitivity associated with the light detector 172. The integrating sphere 162 may be provided as an alternative or supplement to the aforementioned use of a beam expander / diffuser. Generally speaking, and as is known in the art, the integrating sphere 162 is an optical component that includes a hollow spherical (or at least substantially spherical) body having a cavity, the inner surface of which is coated with a diffuse reflective coating. The integrating sphere 162 is arranged so that light propagating from a partially transmissive mirror (i.e., from mirror 142a or 142b) may enter the cavity of the integrating sphere 162 through a collection port 166 and impinge on an inner surface 168. At least a portion of the light incident on any point on the inner surface 168 of the cavity is scattered and ultimately exits the integrating sphere 162 at a detection port 170 so as to be incident on the light detector 172. Light that is not transmitted to the detector device 160 by the partially transmissive mirrors 142a and 142b is directed to the scan heads 120a and 120b, respectively.

[0053] In some embodiments, the first positioner 106 can function as a switch operable to select a beam path (ie, the first beam path 114a and / or the second beam path 114b) along which the laser energy propagates.

[0054] ii. Embodiment of a laser sensor system using a single detector with multiple laser sources

[0055] Some embodiments of the present invention provide an apparatus having multiple laser sources (also referred to herein as a "multi-source apparatus"). Each of the laser sources can direct laser energy to one of multiple workpieces, or both of the laser sources can direct laser energy to a single workpiece. The use of two laser sources can provide a laser processing apparatus with additional processing flexibility and / or higher throughput. The laser sources can be provided to operate at substantially the same wavelength and substantially the same spectral bandwidth. For example, in one embodiment, a first laser source and a second laser source can be operated to generate a laser energy beam having one or more wavelengths in the visible (e.g., green) range of the electromagnetic spectrum. In another embodiment, at least one of the wavelength and spectral bandwidth of the laser energy generated by the first laser source can be different from (e.g., greater than, less than, or any combination thereof) the laser energy generated by the second laser source.

[0056] Figure 4 Schematic diagram of a system configured with multiple laser sources and as described above Figure 3 A specific example of a multi-source device (such as device 200) of laser sensor system 130 is described. Figure 4 1 , the apparatus 200 includes a first laser source 204a and a second laser source 204b. Generally speaking, both the first laser source 204a and the second laser source 204b are operable to generate laser energy sufficient to process the workpieces 102a and 102b shown in FIG. 1 . Each of the first laser source 204a and the second laser source 204b may be provided as described above with respect to the laser source 104 illustratively. The laser energy from the first laser source 204a propagates along a first beam path 214a to the first primary locator 206a, and the laser energy from the second laser source 204b propagates along a second beam path 214b to the second primary locator 206b. The first primary locator 206a may be operable to diffract, reflect, refract, or otherwise deflect the laser energy beam so as to deflect the beam path 214a to the first scan head 120a or the second scan head 120b. Likewise, the second primary positioner 206b is also operable to diffract, reflect, refract, or otherwise deflect the laser energy beam so as to deflect the beam path 214b to the first scan head 120a or the second scan head 120b. The first primary positioner 206a and the second primary positioner 206b are each provided as an AOD system such as the first positioner 106 described above, but may be provided as any other desired or suitable type of positioner, such as a galvanometer mirror scanning system, a rotating polygon mirror system, a deformable mirror, a micro electro-mechanical system (MEMS) reflector, or the like, or any combination thereof.

[0057] When deflecting the beam path 214a to the first scan head 120a, the beam path 214a can be deflected by the first primary locator 206a to any angle within a first angular range (also referred to herein as "first primary angular range 216a") (e.g., as measured relative to the beam path 214a incident on the first primary locator 206a). In addition, the first primary locator 206a can deflect the beam path 214a to the second scan head 120b within an alternative first angular range (also referred to herein as "alternative first primary angular range 216c") (e.g., as measured relative to the beam path 214a incident on the second primary locator 206b).

[0058] Likewise, when beam path 214b is deflected to second scan head 120b, beam path 214b may be deflected by second primary positioner 206b to any angle within a second angular range (also referred to herein as "second primary angular range 216b") (e.g., as measured relative to beam path 214b incident on second primary positioner 206b). Additionally, second primary positioner 206b may deflect beam path 214b to first scan head 120a within an alternative second angular range (also referred to herein as "alternative second primary angular range 216d") (e.g., as measured relative to beam path 214b incident on second primary positioner 206b).

[0059] In this embodiment, the laser sensor system 130 (as described above with respect to Figure 3 ) is optically positioned downstream of the first main locator 206a and the second main locator 206b so that either of the beam paths 214a and 214b can be directed to the detector device 160 before the beam paths 214a and 214b reach the first scan head 120a and the second scan head 120b (for example, when the beam paths 214a and 214b are deflected throughout the angular range 216a, 216b, 216c or 216d during, for example, the first, second, third or fourth branch time period or slice time period, respectively).

[0060] The laser sensor system 130 is similar to the one described above. Figure 3The optical path 214a and 214b can be directed to the first optical train 140a or the second optical train 140b by the mirrors 132a and 132b, respectively. The portions of the light transmitted by the partially transmissive mirrors 142a and 142b are directed to the detector device 160 by the curved mirrors 144a and 144b, respectively, where they enter the collection port 166 of the integrating sphere 162 and exit the detection port 170 to be detected by the light detector 172. The portions of the light not transmitted by the partially transmissive mirrors 142a and 142b are directed to the scan heads 120a and 120b, respectively.

[0061] The determination of the branching period during which the measurement beam is to be measured can be determined by establishing a relationship between the time when the control command is sent to the first main positioner 206a or the second main positioner 206b by the controller 122 and the time when the laser measurement data is received by the controller from the detector device 160. Thus, the controller 122 can be configured to determine which beam path (e.g., the first branching period or the second branching period as described above) is to be measured by comparing the timing of a particular branching period (e.g., the first branching period or the second branching period as described above) with the measurement data received by the controller 122. Figure 4 214a or 214b) shown in the figure is measured by the laser sensor system 130.

[0062] Figure 5 Schematic diagram of a system configured with multiple laser sources and as described above Figure 3 A specific example of a multi-source device (such as device 300) of laser sensor system 130 is described. Figure 5 , apparatus 300 includes a first laser source 304a and a second laser source 304b. Generally speaking, both the first laser source 304a and the second laser source 304b are operable to generate laser energy sufficient to process the workpieces 102a and 102b shown in FIG. 1. Each of the first laser source 304a and the second laser source 304b may be provided as described above with respect to the laser sources 204a and 204b exemplarily. In other embodiments, more than two laser sources may be provided.

[0063] In this specific example, laser energy from the first laser source 304a propagates along a first beam path 314a and laser energy from the second laser source 304b propagates along a second beam path 314b. The laser energy propagating along the first beam path 314a and the second beam path 314b can be spatially combined in any suitable manner. For example, a folding mirror 380 can be provided to direct the first beam path 314a into a beam combiner 382, ​​which is also disposed in the second beam path 314b. After exiting the beam combiner 382, ​​the laser energy can propagate along a common beam path 314c (e.g., corresponding to the beam path 114 shown in FIG. 1) to the first positioner 306. The first positioner 306 is operable to diffract, reflect, refract, or otherwise deflect the beam of laser energy so as to deflect the common beam path 314c through the laser sensor system 130 to the first scan head 120a at any angle in a first primary angular range 316a (e.g., during a first branching period or slice period) (e.g., as measured relative to the common beam path 314c incident on the first positioner 306) and through the laser sensor system 130 to the second scan head 120b at any angle in a second primary angular range 316b (e.g., during a second branching period or slice period). The determination of the branching period during which the beam is measured can be determined by establishing a relationship between the time when the control command is sent to the first primary positioner 306 by the controller 122 and the time when the laser measurement data is received from the detector device 160 by the controller. Thus, the controller 122 may be configured to determine which angle range (eg, the first branch period or the second branch period as described above) is to be selected by comparing the timing of a specific branch period (eg, the first branch period or the second branch period as described above) with the measurement data received by the controller 122. Figure 5 316a or 316b) shown in the figure is measured by the laser sensor system 130.

[0064] The laser sensor system 130 is similar to the one described above. Figure 3 140a and 140b in a first main angular range 316a and a second main angular range 316b. The portions of light transmitted by partially transmissive mirrors 142a and 142b are directed to detector device 160 by curved mirrors 144a and 144b, respectively, where they enter collection port 166 of integrating sphere 162 and exit detection port 170 to be detected by light detector 172. The portions of light not transmitted by partially transmissive mirrors 142a and 142b are directed to scan heads 120a and 120b, respectively.

[0065] iii. Specific Example of Control of the Position of the Pivot Point Relative to the Collecting Port of the Integrating Sphere

[0066] In general, as described above, the use of an integrating sphere for optical power measurement can reduce the spatial and directional sensitivity associated with measurements made by optical detectors. However, in some embodiments using an integrating sphere, sensor data representing measured characteristics of a light beam entering the integrating sphere can vary depending on the location at which the light beam path enters the collecting port of the integrating sphere, or depending on the location on the inner surface of the integrating sphere at which the light beam is incident. In addition, sensor data representing measured characteristics of the light beam entering the integrating sphere (and scattered light exiting the detection port) can vary depending on the angle of the light beam path as it enters the collecting port of the integrating sphere (e.g., over the range of angles at which the light beam paths 114a, 114b, 214a, 214b, and 314c are deflected by their respective positioners 106, 206a, 206b, or 306). To control or reduce such variations, the beam path may be directed to the detector apparatus 160 (e.g., by the optical trains 140a and 140b) so that the image of the AOD pivot point (when the positioner is provided as the AOD) is consistently positioned relative to the integrating sphere 162 (e.g., the collection port 166 or the inner surface 168). Thus, positioning the AOD pivot point at a particular point (e.g., the center of the entrance port) ensures that the beam enters the sphere in a spatially consistent manner that can reduce detector signal sensitivity to scan position or angle.

[0067] Figure 6 and Figure 7 Embodiments of the detector device 160 are schematically illustrated in which the pivot point is positioned at different locations relative to the collection port 166 or the inner surface 168 of the integrating sphere 162. In these embodiments, the detector device 160 is as described above with respect to Figure 3 Provided as described.

[0068] like Figure 6 As shown in FIG. 1 , when the first beam path 114a is deflected within the first angle range 116a, depending on the first optical element string 140a ( Figure 3 140a) or the presence of other optical elements in the first optical train 140a (or optically positioned upstream thereof), the curved mirror 144a directs the beam path 114a to the integrating sphere 162 and images the AOD pivot point at the pivot point 134a on the inner surface 168 of the integrating sphere 162. In a similar manner, when the second beam path 114b is deflected within the second primary angular range 116b, depending on the second optical train 140b ( Figure 314b), or the presence of other optical elements in (or optically upstream of) the second optical element train 140b, the curved mirror 144b directs the beam path 114b to the integrating sphere 162 and images the AOD pivot point at the pivot point 134b on the inner surface 168 of the integrating sphere 162. In this case, the positioning of the pivot points 134a and 134b at or near the surface 168 of the integrating sphere 162 can reduce the position sensitivity of the optical power sensed by the optical detector 172. When so provided, the laser sensor system 130 and the detector device 160 can be used to provide consistent measurement of the optical beams propagating along the beam paths 114a and 114b. Although in Figure 6 , but for beam paths 214a and 214b (e.g., when they are Figure 4 The same is true for 314a (when deflected within their respective angular ranges 216a, 216c, 216b, and 216d, as shown in FIG. 2 ) and 314c (for example, when they are deflected within angular ranges 316a and 316b).

[0069] like Figure 7 As shown in FIG. 1 , when the first beam path 114a is deflected within the first angle range 116a, depending on the first optical element string 140a ( Figure 3 ), or the presence of other optical elements in the first optical element train 140a (or optically positioned upstream thereof), the curved mirror 144a directs the beam path 114a to the integrating sphere 162 and images the AOD pivot point at the pivot point 136 located at or near the center of the collection port 166 of the integrating sphere 162. The positioning of the pivot point 136 at or near the center of the collection port 166 can cause the beam path to be incident on the inner surface 168 of the integrating sphere 162 in a spatially uniform manner. In a similar manner, depending on the curved mirror 144b ( Figure 3 Due to the presence of a curvature (shown in FIG. 1 ) or other optical elements in the second optical element train 140b (or optically positioned upstream thereof), the curved mirror 144b directs the beam path 114b to the integrating sphere 162 and images the AOD pivot point at the same pivot point 136 located at or near the center of the collection port 166 of the integrating sphere 162. Thus, the positioning of the pivot point 136 at or near the center of the collection port 166 can reduce the position sensitivity of the optical power sensed by the optical detector 172. When so provided, the laser sensor system 130 and the detector device 160 can be used to provide consistent measurement of the optical beams propagating along the beam paths 114a and 114b. Although in Figure 7 Not shown in FIG. 1 , for beam paths 214a and 214b (eg, when they are Figure 4 ) and 314c (e.g., when it is deflected within its respective angular ranges 216a, 216c, 216b, and 216d as shown in Figure 5The same is true when deflected within the angle ranges 316a and 316b as shown in FIG.

[0070] II. Conclusion

[0071] The foregoing describes the embodiments and examples of the present invention and should not be construed as limiting them. Although several specific embodiments and examples have been described with reference to the drawings, it will be readily understood by those with ordinary knowledge in the art that many modifications to the disclosed embodiments and examples and other embodiments are possible without significantly departing from the novel teachings and advantages of the present invention. Accordingly, all such modifications are intended to be included within the scope of the present invention as defined in the claims. For example, it will be understood by those with ordinary knowledge in the art that the subject matter of any sentence, paragraph, example, or embodiment may be combined with some or all of the subject matter in other sentences, paragraphs, examples, or embodiments, unless such combinations are mutually exclusive. The scope of the present invention should therefore be determined by the following claims, and the equivalents of these technical solutions are included in the scope of the present invention.

Claims

1. A device comprising: a detector device comprising a light detector; at least one first optical component arranged to direct a first beam path along which the laser energy beam can propagate to a first optical train configured to direct the first beam path to the detector apparatus; and At least one second optical component is arranged to direct a second beam path along which the laser energy beam can propagate to a second optical train configured to direct the second beam path to the detector device.

2. The apparatus of claim 1, wherein the first optical train and the second optical train are configured to image an AOD pivot point at a position relative to the detector apparatus.

3. The apparatus of claim 1, further comprising at least one laser source operable to generate the laser energy beam.

4. The apparatus of claim 1 , wherein the first optical train and the second optical train comprise: A portion of a transmissive mirror; and A curved mirror.

5. The apparatus of claim 4, wherein the partially transmissive mirror is arranged to: receiving the laser energy beam; A first portion of the laser energy beam is allowed to propagate through the partially transmissive mirror, and a second portion of the laser energy beam is reflected.

6. The apparatus of claim 5, wherein the curved mirror is arranged to receive the first portion of the laser energy beam from the partially transmissive mirror and reflect the first portion of the laser energy beam to the detector apparatus.

7. The apparatus of claim 1, wherein the detector device is an integrating sphere.

8. The apparatus of claim 1, further comprising a switch configured to selectively propagate the laser energy beam to the first beam path or the second beam path.

9. The device of claim 8, wherein the switch is an AOD system.

10. The apparatus of claim 8, wherein the switch is a galvanometer system.

11. The apparatus of claim 1, wherein the detector device comprises: The integrating sphere comprises an integrating sphere body, wherein a collecting port and a detecting port are formed in the integrating sphere body, wherein the light detector is positioned in the detecting port.

12. An apparatus comprising: a detector device comprising a light detector; a first laser source operable to generate a first beam of laser energy; a second laser source operable to generate a second beam of laser energy; at least one first optical component arranged to direct a first beam path along which the first laser energy beam or the second laser energy beam can propagate to a first optical train configured to direct the first beam path to the detector device; and At least one second optical component is arranged to direct a second beam path along which the first laser energy beam or the second laser energy beam can propagate to a second optical element train configured to direct the second beam path to the detector device.

13. The apparatus of claim 12, wherein the first optical train and the second optical train are configured to image an AOD pivot point at a position relative to the detector apparatus.

14. The apparatus of claim 12, wherein the first optical train and the second optical train comprise: Partially transmissive mirror; and Curved mirror.

15. The apparatus of claim 14, wherein the partially transmissive mirror is arranged to: receiving the first laser energy beam or the second laser energy beam; allowing a first portion of the first laser energy beam or the second laser energy beam to propagate through the partially transmissive mirror; and A second portion of the first laser energy beam or the second laser energy beam is reflected.

16. The apparatus of claim 15, wherein the curved mirror is arranged to receive the first portion of the first laser energy beam or the second laser energy beam from the partially transmissive mirror and reflect the first portion of the first laser energy beam or the second laser energy beam to the detector apparatus.

17. The apparatus of claim 12, further comprising a switch configured to selectively propagate the first laser energy beam or the second laser energy beam to the first beam path or the second beam path.

18. The device of claim 17, wherein the switch is an AOD system.

19. The apparatus of claim 17, wherein the switch is a galvanometer system.

20. The apparatus of claim 12, wherein the detector device comprises: The integrating sphere comprises an integrating sphere body, wherein a collecting port and a detecting port are formed in the integrating sphere body. The light detector is positioned in the detection port.

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