Flash discharge lamp and flash irradiation device

Abstract

The invention provides a flash discharge lamp and a flash irradiation device, which can further improve light output during lighting and inhibit discoloration of a trigger tube for a long time. The flash discharge lamp includes: a light emitting tube extending in a first direction and exhibiting light transmissivity; a pair of electrodes arranged on the inner side of the light emitting tube and opposite to each other in the first direction; and a trigger tube disposed in proximity to the light-emitting tube, the trigger tube being provided with: a proximity conductor having a core material made of a conductive material extending in a first direction and having a relatively high melting point, and a protective layer formed on the outer surface of the core material and made of at least one element belonging to a platinum group element, the trigger tube being disposed in proximity to the light-emitting tube; the melting point is relatively low; and an insertion tube that extends in the first direction, accommodates at least a portion of the proximity conductor on the inside thereof, and exhibits light transmissivity.

Description

Technical Field

[0001] The present invention relates to a flash discharge lamp and a flash irradiation device. Background Art

[0002] Conventionally, flash irradiation devices have been used for heat treatment of semiconductor substrates and heat treatment in the manufacturing process of printed electronic products, etc. In recent years, in particular, with the miniaturization of semiconductor processes, instantaneous heat treatment methods using flash irradiation devices have attracted attention as a method of suppressing the diffusion of injected impurities due to long-term heating and activating the impurities.

[0003] A flash discharge lamp (also referred to as a "flash lamp") used in a heat treatment apparatus for semiconductor wafers is controlled to generate high-output light instantaneously for heating. For the purpose of achieving such control, a flash discharge lamp is known that includes electrodes (conductors) for applying a trigger voltage to the outer wall surface of a light-emitting tube while a voltage is applied between discharge electrodes (for example, see Patent Document 1 below).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2005-071942 Summary of the invention

[0007] Problems to be solved by the invention

[0008] In recent years, the semiconductor manufacturing process has been developing towards high density and precision. Due to the limitation of substrate area, research is being conducted on processes for three-dimensionally constructing circuits on substrates, and research is being conducted on reducing the thickness of each stacked layer. In such a semiconductor manufacturing process, it is required that in the annealing process, the layer to be processed can be fully heated and the non-processing layer can be affected as little as possible. In order to achieve such a process, a flash discharge lamp that can further reduce the heat input depth in the annealing process is desired.

[0009] As a method of further reducing the heat input depth when irradiating a flash for heat treatment, a technology for further shortening the lighting time of a flash discharge lamp without reducing the total amount of light energy irradiated to a workpiece in one lighting operation is being studied. In order to carry out this research, a flash discharge lamp that further shortens the lighting time and further improves the light output in one lighting operation is recently desired.

[0010] Therefore, the inventors of the present invention have conducted intensive research on a flash discharge lamp that further shortens the lighting time and further improves the light output, and have found that the following problems arise.

[0011] In many cases, a flash discharge lamp has a conductor (hereinafter sometimes referred to as a "proximity conductor") that functions as a trigger electrode for starting lighting, arranged on the outer wall surface of the light-emitting tube or near the light-emitting tube, as in the invention described in Patent Document 1. The proximity conductor applies a high voltage pulse for ionizing the light-emitting gas sealed in the light-emitting tube while applying a voltage required for lighting between the pair of electrodes in order to generate discharge between the pair of electrodes.

[0012] In addition, the proximity conductor may partially evaporate due to the heat generated during the flash, which may contaminate the lampshade or workpiece, or adhere to the outside of the light-emitting tube to promote the recrystallization of the quartz glass and cause the lamp to break. As a countermeasure against this phenomenon, a trigger tube made of a dielectric container such as glass (hereinafter sometimes referred to as a "through tube") containing the proximity conductor is sometimes used as a starting mechanism.

[0013] Therefore, based on the above background, the inventors of the present invention conducted research experiments to shorten the lighting time using a flash discharge lamp with a trigger tube, and found that the blackening of the inner wall surface of the insertion tube, which was previously sporadic after a certain period of time from the start of use, appears relatively early.

[0014] Since the blackening occurring in the trigger tube absorbs a part of the light radiated from the flash discharge lamp, there is a possibility that the light intensity on the irradiation surface of the semiconductor wafer is reduced and the uniformity of the illumination distribution is reduced.

[0015] The present invention has been made in view of the above problems, and an object of the present invention is to provide a flash discharge lamp and a flash irradiation device which can further improve the light output when lit and suppress the discoloration of the trigger tube for a long period of time.

[0016] Technical solutions to solve problems

[0017] The flash discharge lamp of the present invention is characterized by comprising:

[0018] A light-emitting tube extending in a first direction and showing transmittance to light;

[0019] a pair of electrodes disposed inside the light-emitting tube and facing each other in the first direction; and a trigger tube disposed close to the light-emitting tube,

[0020] The trigger tube has:

[0021] a close conductor having a core material and a protective layer, and arranged close to the light-emitting tube, wherein the core material is composed of a conductive material having a relatively high melting point and extending along the first direction, and the protective layer is formed on the outer surface of the core material and is composed of at least one element belonging to the platinum group and has a relatively low melting point; and

[0022] The insertion tube extends along the first direction, accommodates at least a portion of the proximity conductor inside, and is light-transmissive.

[0023] In the above-mentioned flash discharge lamp, it is also possible that

[0024] The protective layer is composed of at least one element selected from the group consisting of rhodium (Rh), ruthenium (Ru), platinum (Pt), and iridium (Ir).

[0025] In this specification, the term "exhibiting transmissivity" is intended to mean having a transmittance of at least 80% to visible light. In addition, if a portion of a light-emitting tube that has undergone color change is confirmed to be non-discolored and the portion is transmissive to light, the light-emitting tube is considered to be "transmissive to light".

[0026] In the present specification, the term “close to” is used to mean a state where the electrodes are in contact with each other or are arranged at a separation distance smaller than the average thickness of the tube wall of the arc tube.

[0027] In the present specification, the term “composed of” is used with the intention of including not only a case where the member is composed of a predetermined material but also a case where the content of the predetermined material in the target member is 80% or more.

[0028] The so-called platinum group elements are a general term for precious metal elements corresponding to the eighth group elements, ninth group elements, and tenth group elements in the fifth and sixth periods of the periodic table, specifically rhodium (Rh), ruthenium (Ru), platinum (Pt), iridium (Ir), palladium (Pd), and osmium (Os).

[0029] The inventors of the present invention have speculated the cause of the discoloration in the insertion tube as follows.

[0030] First, the following three conditions are required for the materials constituting the light emitting tube and the insertion tube: (1) a certain degree of light transmittance to the light (especially visible light) radiated from the light emitting tube in order not to reduce the light irradiation efficiency of the workpiece; (2) sufficient insulation to prevent the conduction of electricity with the surrounding metal parts where the trigger tube is configured; (3) a certain degree of heat resistance considering the temperature rise during the lighting operation, etc.

[0031] As materials that meet these conditions, for example, there can be cited glass (quartz, borosilicate) with oxides as the main component, ceramics such as translucent alumina, and sapphire. When the proximity conductor that absorbs part of the light radiated from the light-emitting tube and becomes a high-temperature state contacts the insertion tube, the temperature near the contact portion of the inner surface of the insertion tube rises locally. Oxygen is released from the insulating material of the insertion tube that is activated by the temperature rise. In the case where the surrounding oxygen of the high-temperature proximity conductor exists as a gas, the proximity conductor is easily oxidized prematurely. The inventor of the present invention speculates that the first main reason for the above-mentioned discoloration of the insertion tube is that the oxide generated by the reaction between the proximity conductor and oxygen adheres to the inner wall surface of the insertion tube.

[0032] In addition, the molecular structure of the inner wall of the insertion tube where oxygen is liberated changes from the original SiO2 to SiO or Si, causing discoloration or opacity. The inventors of the present invention have speculated through various analyses that this phenomenon is the second main cause of the blackening of the inner surface of the insertion tube. It is also speculated that the discoloration generated in this way gradually grows with the increase in the number of flashes, triggering the tube to discolor.

[0033] Furthermore, if the power input to the flash discharge lamp is increased to improve the light output, the operating temperatures of the arc tube and the insertion tube are likely to further increase with the increase in the power input.

[0034] Thus, shortening the lighting time and increasing the light output are related to the temperature rise of the close conductor and the insertion tube when lighting. From this point of view, the inventors of the present invention speculate that due to shortening the lighting time and increasing the light output, the temperature of the close conductor and the insertion tube becomes higher than before, which makes it easier for the above-mentioned reaction to occur, resulting in earlier discoloration.

[0035] Therefore, the inventors of the present invention have conducted intensive studies and have come up with the idea of ​​suppressing oxidation of the core material by coating the outer surface of the core material made of a relatively high melting point material that does not melt even at high temperatures with a platinum group element that is not easily oxidized.

[0036] Platinum group elements are precious metal elements that have a relatively high melting point (above 1700°C) among metal elements and are highly resistant to oxidation and corrosion. Therefore, platinum group elements are almost insoluble even at the temperature at which the arc tube and the insertion tube soften (for example, although it depends on the composition and impurity concentration, it is about 1000°C to 1700°C in the case of quartz glass). In order to more reliably prevent the core material from melting, a material with a relatively high melting point relative to the protective layer is used.

[0037] That is, even if the flash discharge lamp of the above structure shortens the lighting time and increases the light output, the core material can be protected from contact with oxygen released from the insertion tube by the protective layer composed of the platinum group element, so that discoloration is not likely to occur in the insertion tube. In addition, the core material will not melt at least within the temperature range in which the insertion tube can be used.

[0038] Here, the above six elements belong to the platinum group elements, but as a material showing relatively high adhesion to other metals that become the core material, and as a material for forming the protective layer, rhodium (Rh), ruthenium (Ru), platinum (Pt) and iridium (Ir) are preferred. In addition, since palladium (Pd) and osmium (Os) are particularly rare precious metal elements, even from the perspective of manufacturing cost, rhodium (Rh), ruthenium (Ru), platinum (Pt) and iridium (Ir) are preferred as materials for forming the protective layer.

[0039] Furthermore, in the above-mentioned flash discharge lamp, it is also possible that

[0040] The space of the trigger tube through which the proximity conductor is inserted is hermetically sealed in a substantially vacuum state or in a state filled with an inert gas.

[0041] In this specification, the term "substantially a vacuum state" refers to a state in which the gas pressure in a space is 1 Pa or less.

[0042] Providing the through-tube means that a dielectric or the like constituting the through-tube is arranged instead of the air existing in the space between the proximity conductor and the light-emitting tube, so that discharge is easily generated between the proximity conductor and the electrode in the light-emitting tube. In addition, in order to further enhance the effect, the space inside the trigger tube accommodating the proximity conductor is preferably vacuum or filled with an inert gas. Examples of the inert gas are xenon (Xe) gas, argon (Ar) gas, nitrogen (N) gas, and the like.

[0043] In the above-mentioned flash discharge lamp, it is also possible that

[0044] The thickness of the protective layer is less than 100 μm.

[0045] The flash irradiation device of the present invention is characterized in that:

[0046] The flash discharge lamp is provided.

[0047] The flash irradiation device of the present invention may be configured to include only one flash discharge lamp or may be configured to include a plurality of flash discharge lamps.

[0048] Effects of the Invention

[0049] According to the present invention, a flash discharge lamp is realized which can further improve the light output when lit and suppress the occurrence of discoloration for a long period of time. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 This is a schematic cross-sectional view of one embodiment of the flash irradiation device when viewed along the Y direction.

[0051] Figure 2It is only shown in the picture Figure 1 Diagram of a flash discharge lamp.

[0052] Figure 3 Yes Figure 2 The enlarged view of area A1.

[0053] Figure 4 This is a diagram showing the configuration of a lighting circuit used in a verification experiment.

[0054] Figure 5 This is a schematic cross-sectional view of a flash discharge lamp according to another embodiment when viewed along the Y direction. DETAILED DESCRIPTION

[0055] Hereinafter, the flash discharge lamp of the present invention will be described with reference to the accompanying drawings. Note that each of the following drawings is a schematic diagram, and the number of elements in the drawings does not necessarily correspond to the actual number of elements.

[0056] Figure 1 is a schematic cross-sectional view of one embodiment of the flash irradiation device 1 when viewed along the Y direction, Figure 2 It is only shown in the picture Figure 1 FIG. 10 is a diagram of a flash discharge lamp. Figure 1 and Figure 2 As shown in FIG. 1 , the flash irradiation device 1 of the present embodiment includes a flash discharge lamp 10, a reflective member 20, and a support table 30 for placing a workpiece W1. Figure 1 Although only one flash discharge lamp 10 is shown in the figure, flash irradiation device 1 may be equipped with a plurality of flash discharge lamps 10 .

[0057] In the following description, Figure 1 As shown, the description will be made with the direction along the tube axis of arc tube 11 as X direction, the direction in which flash discharge lamp 10 and workpiece W1 face each other as Z direction, and the direction orthogonal to the X direction and the Z direction as Y direction. The X direction corresponds to the first direction.

[0058] In addition, as described above, in this specification, when indicating a direction, when distinguishing between positive and negative directions, the positive and negative signs are marked and recorded, such as "+Z direction" and "-Z direction". In addition, when indicating a direction without distinguishing between positive and negative directions, it is simply recorded as "Z direction".

[0059] The reflective member 20 includes a reflective surface 21 for reflecting the light L1 emitted from the flash discharge lamp 10. Figure 1 As shown, the light L1 emitted from the flash discharge lamp 10 and traveling toward the +Z side is reflected toward the -Z side. Figure 1 and Figure 2 The size and shape of the reflective member 20 shown are just examples. The reflective member 20 is, for example, an aluminum (Al) plate.

[0060] The support table 30 is a base including a plurality of pins 30 a on which the workpiece W1 is placed. Figure 1 and Figure 2 The structure of the support table 30 supporting the workpiece W1 shown is only an example, and any structure that can make the workpiece W1 stationary or fixed at a predetermined position, for example, a structure that hooks and supports the outer edge of the workpiece W1 may be used. In addition, the separation distance between the flash discharge lamp 10 and the workpiece W1 in the Z direction is appropriately adjusted according to the type of the workpiece W1, the processing steps, etc., but is set to 30 mm in this embodiment.

[0061] Flash discharge lamp 10 includes arc tube 11 , a pair of electrodes ( 12 p , 12 n ), trigger tube 13 , proximity conductor 14 , first power supply lines ( 15 , 15 ), and second power supply lines 16 .

[0062] The light-emitting tube 11 is a tube body made of quartz glass that is filled with light-emitting gas and has a straight tube shape extending in the X direction and is transmissive to the light L1. The light-emitting tube 11 includes a pair of electrodes (12p, 12n) disposed apart in the X direction on the inside. The light-emitting tube 11 of the present embodiment has a length in the X direction of 550 mm, an outer diameter when viewed in the X direction of 25 mm, and an inner diameter of 20 mm.

[0063] A pair of electrodes (12p, 12n) are arranged with a separation distance of 500 mm in the X direction. Figure 1 and Figure 2 The shapes of the electrodes (12p, 12n) shown are just examples and are not limited to these shapes. The electrodes (12p, 12n) are connected to a lighting circuit (not shown) via first power supply lines (15, 15).

[0064] like Figure 1 and Figure 2 As shown, a trigger tube 13 having an insertion tube 13a inside is provided on the outer wall surface on the +Z side of the light emitting tube 11, and the insertion tube 13a accommodates a proximity conductor 14 extending in the X direction. The trigger tube 13 may be provided on the -Z side of the light emitting tube 11, but in consideration of the energy loss of the light L1 emitted from the light emitting tube 11 and directly traveling toward the workpiece W1, the trigger tube 13 is preferably provided on the +Z side of the light emitting tube 11.

[0065] The insertion tube 13a of this embodiment has an outer diameter of 4 mm, an inner diameter of 2 mm, and a total length of 530 mm when viewed in the X direction. The proximity conductor 14 has an outer diameter of 1 mm and a total length of 520 mm when viewed in the X direction. In addition, the insertion tube 13a accommodates the proximity conductor 14 with one end cut in the inner space, and is shrunk and sealed at a portion where a sealing molybdenum foil (not shown) is welded to the end to make the space substantially vacuum.

[0066] In addition, the space inside the insertion tube 13a may be filled with an inert gas and hermetically sealed. In addition, the space inside the insertion tube 13a may not be hermetically sealed as long as the lighting operation can be performed without any problem.

[0067] The second power supply line 16 connected to the proximity conductor 14 via the shrink seal portion is connected to a trigger circuit (not shown).

[0068] The insertion tube 13a in this embodiment is made of quartz glass like the light-emitting tube 11 and is welded to the light-emitting tube 11. However, the light-emitting tube 11 and the insertion tube 13a may be made of different materials and may be separated from each other as long as they are arranged close to each other. In addition, the light-emitting tube 11 and the insertion tube 13a may not be made of quartz glass.

[0069] Figure 3 Yes Figure 2 The enlarged image of area A1. Figure 3 As shown, the proximity conductor 14 of this embodiment includes a core 14a made of a conductive material and a protective layer 14b formed on the outer surface of the core 14a. The core 14a of the proximity conductor 14 of this embodiment is a wire made of tungsten (W).

[0070] The protective layer 14b of the proximity conductor 14 in this embodiment is made of platinum (Pt) and its thickness is adjusted to be in the range of 0.03 μm to 3.5 μm. From the viewpoint of preventing the core material 14a from being oxidized and not unnecessarily enlarging the proximity conductor 14, the thickness of the protective layer 14b is preferably 0.03 μm or more and 100 μm or less, and more preferably 0.05 μm or more and 50 μm or less.

[0071] In addition, as the material of the protective layer 14b, any one of the platinum group elements or a material containing multiple platinum group elements can be used, but from the perspective of close adhesion with the core material 14a and manufacturing cost, rhodium (Rh), ruthenium (Ru), platinum (Pt) and iridium (Ir) are preferred, and rhodium (Rh), ruthenium (Ru) and platinum (Pt) are particularly preferred.

[0072] Here, the material of the core material 14a is a material having a higher melting point than the material of the protective layer 14b. In the present embodiment, the melting point of tungsten (W) as the material of the core material 14a is 3422°C, and the melting point of platinum (Pt) as the material of the protective layer 14b is 1768°C. As for the melting point, as long as the above relationship is satisfied, the material of the core material 14a is not limited to tungsten (W), and for example, molybdenum (Mo) having a melting point of 2623°C may also be used.

[0073] The proximity conductor 14 is produced, for example, by the following method: preparing a core material 14a, generating a thin film of a platinum group element serving as a protective layer 14b on the outer surface of the core material 14a by metal evaporation or plating, or immersing the core material 14a having a higher melting point than the platinum group element in a material composed of the platinum group element melted in a crucible.

[0074] Next, a verification experiment was conducted to compare the occurrence of discoloration in trigger tube 13 between flash discharge lamp 10 equipped with proximity conductor 14 having core material 14a and protective layer 14b and a flash discharge lamp of a conventional structure, and the details will be described.

[0075] (Example 1)

[0076] Example 1 is flash discharge lamp 10 of the above-mentioned embodiment.

[0077] (Example 2)

[0078] Example 2 is the same as Example 1 except that the protective layer 14 b made of rhodium (Rh) is used instead of the protective layer 14 b made of platinum (Pt).

[0079] (Example 3)

[0080] Example 3 is the same as Example 1 except that the protective layer 14 b made of ruthenium (Ru) is used instead of the protective layer 14 b made of platinum (Pt).

[0081] (Comparative Example 1)

[0082] Comparative Example 1 is a flash discharge lamp of a conventional structure, and has the same structure as Example 1 except that it includes a proximity conductor 14 composed of a core material 14 a alone without a protective layer 14 b .

[0083] (Comparative Example 2)

[0084] Comparative Example 2 is the same as Comparative Example 1 except that the arc tube 11 and the insertion tube 13a are provided with the moisture (H2O) content in the arc tube 11 and the insertion tube 13a being reduced as much as possible by vacuum heating at 900°C for 3 hours.

[0085] (Comparative Example 3)

[0086] Comparative Example 3 is the same as Comparative Example 1 except that the proximity conductor 14 is formed of a core material 14 a obtained by surface polishing using sodium hydroxide (NaOH).

[0087] (condition)

[0088] Figure 4: is a diagram showing the structure of the lighting circuit used for the verification experiment. The lighting circuit used for the verification experiment comprises: a lighting circuit C1 connected to the electrodes (12p, 12n) of the flash discharge lamp 10; a trigger circuit C2 connected to the proximity conductor 14; and a control unit 5 for controlling the switch elements (4, 8) of each circuit (C1, C2). Figure 4 Although not shown in the figure, a DC power source is connected in parallel to each capacitor (2, 7).

[0089] When the operation starts, the control unit 5 keeps both the switch elements (4, 8) in the off state. At this time, each capacitor (2, 7) is charged by the DC power supply.

[0090] After the capacitors (2, 7) are charged, the control unit 5 switches the switching element 4 from the off state to the on state.

[0091] Then, the control unit 5 switches the switch element 8 from the off state to the on state to discharge the charge stored in the capacitor 7. The discharge of the charge stored in the capacitor 7 generates an electromotive force on the winding side of the transformer 6 connected to the proximity conductor 14. Then, a trigger voltage is applied to the proximity conductor 14.

[0092] When a trigger voltage is applied to the proximity conductor 14, discharge occurs in the arc tube 11, and discharge occurs between the electrodes (12p, 12n), and the charge stored in the capacitor 2 is discharged, thereby generating a flash of light.

[0093] Then, light emission of flash discharge lamp 10 stops, and a series of lighting operations are completed.

[0094] In this verification experiment, the above-mentioned lighting operation was repeated 20,000 times, and it was visually confirmed whether the light emitting tube 11 and the trigger tube 13 had changed color.

[0095] (result)

[0096] In Comparative Examples 1 to 3, after the lighting operation was repeated 20,000 times, color change was observed in the arc tube 11. In contrast, in Examples 1 to 3, even after the lighting operation was repeated 20,000 times, no color change was observed in the trigger tube 13.

[0097] It should be noted that, regarding Examples 1 to 3, similar verification experiments were conducted in four modes in which the thickness of the protective layer 14 b was 0.05 μm, 1.26 μm, 1.80 μm, and 56.2 μm, but no color change was observed in the trigger tube 13 .

[0098] As described above, even if the flash discharge lamp 10 of the above structure shortens the lighting time and increases the light output, the core material 14a is protected by the protective layer 14b from contact with the oxygen released from the insertion tube 13a, so that the insertion tube 13a is not easily discolored. Therefore, the flash discharge lamp 10 of this embodiment achieves a long life and high reliability.

[0099] [Other embodiments]

[0100] Other embodiments will be described below.

[0101] <1> Figure 5 FIG. 2 is a schematic cross-sectional view of another embodiment of a flash discharge lamp 10 when viewed along the Y direction. Figure 5 As shown, the flash discharge lamp 10 may also be equipped with proximity conductors (14p, 14n) separated in the X direction. The proximity conductors (14p, 14n) in this embodiment are arranged corresponding to a pair of electrodes (12p, 12n), but are connected to the same node in the lighting circuit and controlled to the same potential.

[0102] With the above structure, since the proximity conductors ( 14 p , 14 n ) are not arranged on the central portion side in the X direction which is the main light emitting region of the light emitting tube 11 , discoloration is less likely to occur around the region of the trigger tube 13 .

[0103] In addition, in Figure 1 In the flash irradiation device 1 equipped with the reflecting member 20 shown, the light L1 reflected by the reflecting member 20 and directed toward the workpiece W1 is not blocked by the proximity conductors ( 14 p , 14 n ).

[0104] Therefore, according to the above structure, the life of the flash discharge lamp 10 can be extended, and the shielding of the light L1 by the close conductor (14p, 14n) can be suppressed. In addition, even if discoloration occurs, the change in the illumination intensity of the light L1 irradiated to the workpiece W1 can be suppressed. That is, the flash discharge lamp 10 of the above structure improves the light output and further improves the reliability.

[0105] <2> The configurations of flash irradiation device 1 and flash discharge lamp 10 described above are merely examples, and the present invention is not limited to the configurations shown in the drawings.

[0106] Description of symbols

[0107] 1: Flash irradiation device,

[0108] 2: Capacitor,

[0109] 4: Switching element,

[0110] 5: Control Department,

[0111] 6: Transformer,

[0112] 7: Capacitor,

[0113] 8: Switching element,

[0114] 10: Flash discharge lamp,

[0115] 11: LED,

[0116] 12n, 12p: electrodes,

[0117] 13: Trigger tube,

[0118] 13a: Insert the tube,

[0119] 14, 14p, 14n: close to the conductor,

[0120] 15: First power supply line,

[0121] 16: Second power supply line,

[0122] 20: Reflection member,

[0123] 21: Reflective surface,

[0124] C1: Light up the circuit,

[0125] C2: trigger circuit,

[0126] L1: Light,

[0127] W1: workpiece,

[0128] W1a: Main surface.

Claims

1. A flash discharge lamp, characterized in that have: A light emitting tube extending in a first direction and showing transmittance to light; a pair of electrodes, disposed inside the light-emitting tube and facing each other in the first direction; and The trigger tube is arranged close to the light-emitting tube. The trigger tube has: a close conductor having a core material and a protective layer, and arranged close to the light-emitting tube, wherein the core material is composed of a conductive material having a relatively high melting point and extending along the first direction, and the protective layer is formed on the outer surface of the core material and is composed of at least one element belonging to the platinum group and has a relatively low melting point; and The insertion tube extends along the first direction, accommodates at least a portion of the proximity conductor inside, and is light-transmissive.

2. The flash discharge lamp according to claim 1, characterized in that The protective layer is composed of at least one element selected from the group consisting of rhodium, ruthenium, platinum, and iridium.

3. The flash discharge lamp according to claim 1, characterized in that The space of the trigger tube through which the proximity conductor is inserted is hermetically sealed in a substantially vacuum state or in a state filled with an inert gas.

4. The flash discharge lamp according to claim 1, characterized in that The thickness of the protective layer is less than 100 μm.

5. A flash irradiation device, characterized in that: A flash discharge lamp according to any one of claims 1 to 4.

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