Filtration in steam delivery system

Abstract

The present disclosure relates to a filter assembly comprising: a fluid inlet; a fluid outlet; a conduit; and a filter. The conduit is fluidly connected to the fluid inlet and the filter. The filter is fluidly connected to the conduit and the fluid outlet. The filter assembly is configured to flow at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. The filter is configured to collect molybdenum residue, tungsten residue, or any combination thereof from the fluid to produce a filtered fluid.

Description

[0001] Priority claim

[0002] This disclosure claims priority to U.S. Provisional Patent No. 63 / 348,807, filed on June 3, 2022, which is incorporated herein by reference. Technical Field

[0003] The present disclosure relates generally to vapor delivery systems. More specifically, the present disclosure relates to filtration in vapor delivery systems, such as, but not limited to, vapor delivery systems configured to deliver molybdenum vapor. Background Art

[0004] Various materials are subject to undesirable corrosion when the materials are exposed to chemical vapors, such as molybdenum vapor. Undesirable corrosion can be enhanced by increased heat, pressure, or both. Summary of the invention

[0005] In some embodiments, a filter assembly comprises: a fluid inlet; a fluid outlet; a conduit; and a filter. In some embodiments, the conduit is fluidically connected to the fluid inlet and the filter. In some embodiments, the filter is fluidically connected to the conduit and the fluid outlet. In some embodiments, the filter assembly is configured to flow at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. In some embodiments, the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid, thereby producing a filtered fluid.

[0006] In some embodiments, the filter assembly includes a first end and a second end opposite the first end, wherein both the fluid inlet and the fluid outlet are positioned at the first end.

[0007] In some embodiments, the conduit is configured for fluid flow in a first direction and the filter is configured for fluid flow in a second direction. In some embodiments, the second direction is opposite to the first direction.

[0008] In some embodiments, the filter assembly includes a ballast component fluidly connected between the conduit and the filter.

[0009] In some embodiments, a system includes a manifold, the manifold includes a fluid inlet and a fluid outlet. In some embodiments, the fluid inlet is configured to receive steam. In some embodiments, the fluid outlet is configured to output the steam. In some embodiments, a conduit is fluidly connected to the fluid inlet and is configured to receive the steam. In some embodiments, a filter is fluidly connected to the conduit at the filter inlet and is configured to receive the steam from the conduit. In some embodiments, the filter is fluidly connected to the fluid outlet at the filter outlet and is configured to output filtered steam to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the steam, thereby producing the filtered steam. In some embodiments, the steam includes at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof.

[0010] In some embodiments, the system includes a ballast component. In some embodiments, the ballast component includes a ballast inlet and a ballast outlet. In some embodiments, the ballast inlet is configured to be fluidly connected to the conduit and the ballast outlet is configured to be fluidly connected to the filter. In some embodiments, the ballast component includes a housing configured to control a pressure gradient of the vapor from the conduit to the filter.

[0011] In some embodiments, the system comprises a coating covering at least a portion of the filter, covering at least a portion of the conduit, or a combination thereof. In some embodiments, the coating is configured to be exposed to the steam. In some embodiments, the coating comprises at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof. In some embodiments, the coating comprises a metal oxide.

[0012] In some embodiments, the manifold is configured to fluidly connect the fluid inlet and the conduit, fluidly connect the filter and the fluid outlet, and maintain separation between the fluid inlet and the fluid outlet.

[0013] In some embodiments, the molybdenum residue, the tungsten residue, or any combination thereof comprises solid particulate matter, wherein the filter is configured to remove the solid particulate matter from a fluid stream.

[0014] In some embodiments, the filter is configured to filter fluid at a temperature of 100° C. or higher.

[0015] In some embodiments, the filter is configured to filter the fluid at a temperature of 100°C to 250°C.

[0016] In some embodiments, the filter is configured to filter the fluid at a pressure of up to 1 MPa.

[0017] In some embodiments, the filter is a flow through filter. In some embodiments, the filter is a filter other than a flow through filter.

[0018] In some embodiments, a steam delivery system comprises the system.

[0019] In some embodiments, a method includes obtaining a system configured to filter steam. In some embodiments, the system includes: a component including a fluid inlet and a fluid outlet; the fluid inlet is configured to receive steam; the fluid outlet is configured to output the steam; a conduit, which is fluidly connected to the fluid inlet and configured to receive the steam; and a filter, which is fluidly connected to the conduit at the filter inlet and configured to receive the steam from the conduit, and the filter is fluidly connected to the fluid outlet at the filter outlet and configured to output the filtered steam to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered steam. In some embodiments, the steam includes at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. In some embodiments, the method includes installing the system to a steam delivery system. In some embodiments, the system is installed in a delivery manifold of the steam delivery system.

[0020] In some embodiments, the method includes obtaining a ballast component; and installing the ballast component between the conduit and the filter.

[0021] In some embodiments, installing the system into a steam delivery system includes retrofitting the system into a previously operational steam delivery system. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Reference is made to the accompanying drawings, which form a part of this disclosure and illustrate embodiments in which the systems and methods described in this specification may be practiced.

[0023] Figure 1 A filter assembly according to some embodiments is shown.

[0024] Figure 2 Demonstrating some embodiments Figure 1 A cross-sectional view of a filter assembly.

[0025] Figure 3A flow chart showing a method according to some embodiments is shown.

[0026] Figure 4 Shown is a cross-sectional view of a filter assembly according to some embodiments.

[0027] Figure 4 Shown is a cross-sectional view of a filter assembly according to some embodiments.

[0028] Figure 5 Shown is a cross-sectional view of a filter assembly according to some embodiments.

[0029] Figure 6 Shown is a cross-sectional view of a filter assembly according to some embodiments.

[0030] The same reference numbers refer to the same or like parts throughout. DETAILED DESCRIPTION

[0031] Figure 1 A filter assembly 100 is shown according to some embodiments. Figure 2 Demonstrating some embodiments Figure 1 Unless otherwise specifically referenced, the filter assembly 100 will be described together Figure 1 and 2 .

[0032] The filter assembly 100 is configured for use in a steam delivery system. For example, in some embodiments, the filter assembly 100 can be used in a steam delivery system configured to deliver at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. In some embodiments, the filter assembly 100 can be disposed in a hot fluid chamber of a steam delivery system. In some embodiments, the hot fluid chamber of a steam delivery system can be disposed upstream of an output valve at which fluid is delivered from the steam delivery system for use.

[0033] In the illustrated embodiment, the filter assembly 100 includes a fluid inlet 102, a fluid outlet 104, a conduit 106, a ballast component 108, and a filter 110 that are fluidically connected together and configured to receive unfiltered fluid and output filtered fluid. In some embodiments, the filter assembly 100 is configured to collect at least a portion of the molybdenum residue, tungsten residue, or any combination thereof from the unfiltered fluid, thereby producing a filtered fluid. In some embodiments, the molybdenum residue, tungsten residue, or any combination thereof may include solid particulate matter. In some embodiments, the filter 110 may remove solid particulate matter from the fluid stream. In some embodiments, the filter 110 may remove solid particulate matter other than the molybdenum residue, tungsten residue, or any combination thereof from the fluid stream.

[0034] The fluid inlet 102 and the fluid outlet 104 can be disposed in a manifold 112. The manifold 112 can receive a fluid (e.g., steam being delivered) and divert the fluid through the conduit 106, the ballast component 108, and the filter 110. In some embodiments, the fluid flow is configured to enter the fluid inlet 102 in a first direction and exit the fluid outlet 104 in a second direction. In some embodiments, the first direction is opposite to the second direction. In some embodiments, the manifold 112 is sealed between the fluid inlet 102 and the fluid outlet 104 so that unfiltered fluid cannot bypass the filter 110.

[0035] The conduit 106 is configured to have an inlet end 114 and an outlet end 116. The inlet end 114 is configured to receive fluid from the manifold 112. The outlet end 116 is configured to output the fluid to the ballast component 108.

[0036] The ballast 108 is configured to manage the pressure gradient of the fluid before the fluid flows through the filter 110. In some embodiments, the ballast 108 may be optional. In such embodiments, the filter 110 may have a longer length than shown in the illustrated embodiment in lieu of the ballast 108 not being included. In some embodiments, the ballast 108 may not be included. Figure 5 Such an embodiment is described in . In some embodiments, the ballast component 108 can be replaced by a conduit having a variety of diameters. Figure 6 Such an embodiment is described in .

[0037] In some embodiments, filter 110 is an inline filter. In some embodiments, the length L1 of filter 110 can be maximized to optimize filtering. In some embodiments, due to the placement of filter assembly 100 within the steam delivery system, the overall length of filter 110 and ballast component 108 can be limited. It should be understood that inline filter is an example filter of filter 110 and filter 110 may also include other types of filters in addition to inline filter. In some embodiments, the effectiveness of filter 110 can be measured based on the number of particles deposited on the wafer due to the use of filtered steam. In some embodiments, filter 110 is configured to provide a resulting filtered steam having less than 100 particles per wafer; less than 10 particles per wafer; less than 1 particle per wafer; 1 particle per wafer to 10 particles per wafer; 1 particle per wafer to 100 particles per wafer; or 1 particle per wafer to 1,000 particles per wafer. In some embodiments, filter 110 is configured to provide a resulting filtered vapor having less than 1 particle per 10 wafers at an average particle size of 1 nm to 100 nm, such as, for example and without limitation, an average particle size of 10 nm to 30 nm (eg, 20 nm).

[0038] In some embodiments, the filter 110 is configured for filtration in high temperature applications. In some embodiments, the high temperature applications may include temperatures up to 250°C. In some embodiments, the high temperature applications may include the following temperatures: 100°C to 250°C; 110°C to 250°C; 120°C to 250°C; 130°C to 250°C; 140°C to 250°C; 150°C to 250°C; 160°C to 250°C; 170°C to 250°C; 180°C to 250°C; 190°C to 250°C; 200°C to 250°C; 210°C to 250°C; 220°C to 250°C; 230°C to 250°C; or 240°C to 250°C. In some embodiments, the filter 110 may also be utilized at an operating temperature of 120°C to 150°C. In some embodiments, the filter 110 may utilize a fluoropolymer membrane, such as, but not limited to, a polytetrafluoroethylene (PTFE) membrane or the like. In some embodiments, the support for the membrane may utilize a fluoropolymer such as, but not limited to, perfluoroalkoxyalkane (PFA) or the like. In some embodiments, the filter 110 may include a housing formed of stainless steel or the like.

[0039] In some embodiments, the filter 110 is configured for filtering applications of fluids at the following pressures: up to 1 MPa; up to 0.9 MPa; up to 0.8 MPa; up to 0.7 MPa; up to 0.6 MPa; up to 0.5 MPa; up to 0.4 MPa; up to 0.3 MPa; up to 0.2 MPa; up to 0.1 MPa; 1Pa to 1 MPa; 10Pa to 1 MPa; 100Pa to 1 MPa; 1000Pa to 1 MPa; 0.01 MPa to 1 MPa; 0.1 MPa to 1 MPa; 0.2 to 1 MPa; 0.3 to 1 MPa; 0.4 to 1 MPa; 0.5 to 1 MPa; 0.6 to 1 MPa; 0.7 to 1 MPa; 0.8 to 1 MPa; or 0.9 to 1 MPa.

[0040] In some embodiments, the outlet pressure of the fluid from the steam delivery system may be important. Therefore, in some embodiments, the filter 110 may be selected to minimize the pressure drop in the fluid.

[0041] In some embodiments, filter 110 may be replaceable. That is, in some embodiments, filter 110 may be fixed within filter 110 using connection 118 and connection 120. In some embodiments, connection 118 and connection 120 include vacuum coupled radiation (VCR) connections. In some embodiments, filter 110 may have a corresponding connection on each end to be installed within filter assembly 100. For example, in some embodiments, filter assembly 100 may include a threaded nut configured to be fastened to a threaded post of filter 110.

[0042] In some embodiments, one or more components of the filter assembly 100 are configured to be exposed to chemical vapors, such as MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. In some embodiments, the surface of the components of the filter assembly 100 to be exposed to the chemical vapors is protected by surface treatment, added coating, or a combination thereof. Although such coatings may be understood to reduce or inhibit mass loss due to corrosion, it has been surprisingly determined that certain types of surface treatments, added coatings, or both may also beneficially reduce mass gain at the surface. In addition, certain types of surface treatments, added coatings, or both may also reduce and / or inhibit residue formation on the surface.

[0043] According to some embodiments, the coating may include at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof. In some embodiments, the coating includes a metal oxide, and the metal oxide may be at least one of aluminum oxide, silicon oxide, yttrium oxide, magnesium oxide, calcium oxide, zirconium oxide, hafnium oxide, boron oxide, or any combination thereof. In some embodiments, the coating includes a metal alloy, such as an alloy including molybdenum (Mo). In some exemplary embodiments, the coating includes at least one of aluminum (Al), silicon (Si), yttrium (Y), magnesium (Mg), calcium (Ca), zirconium (Zr), hafnium (Hf), boron (B), or any combination thereof. In some exemplary embodiments, the coating includes at least one of yttrium oxide, aluminum oxide, silicon dioxide, graphite, sputtered nickel, fluorinated metal alloys, polished stainless steel, borosilicate glass, or any combination thereof.

[0044] Thus, various embodiments of devices and methods include a coating on a device configured to be exposed to a chemical vapor such as WCl5 and / or MoO2Cl2. In some embodiments, the coating reduces or inhibits the amount of ions to be present by equal to or less than 1 x 10 -5 gmm -2 The change in mass per unit area (mass gain or mass loss).

[0045] In some embodiments, filter assembly 100 can be installed into a steam delivery system during manufacture of the steam delivery system. In some embodiments, filter assembly 100 can be installed into a steam delivery system after the steam delivery system has been used. That is, in some embodiments, filter assembly 100 can be retrofitted into a previously operated steam delivery system.

[0046] Figure 3 A flow chart of a method 150 is shown according to some embodiments. The method 150 may be used to filter an assembly (e.g., Figures 1 to 2In some embodiments, the method 150 can be used to install other embodiments of the filter assembly (e.g., the following Figures 4 to 6 ) is installed into the steam delivery system.

[0047] At frame 152, method 150 includes obtaining a system configured to filter steam. In some embodiments, the system includes components, which include a fluid inlet and a fluid outlet. In some embodiments, the fluid inlet is configured to receive steam. In some embodiments, the fluid outlet is configured to output steam. In some embodiments, a conduit is fluidically connected to the fluid inlet and is configured to receive steam. In some embodiments, a filter is fluidically connected to the conduit at the filter inlet and is configured to receive steam from the conduit. In some embodiments, a filter is fluidically connected to the fluid outlet at the filter outlet and is configured to output filtered steam to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered steam. In some embodiments, steam includes at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof.

[0048] At block 154, method 150 includes installing the system to the steam delivery system. In some embodiments, installing the system to the steam delivery system includes retrofitting the system to a previously operated steam delivery system.

[0049] In some embodiments, optionally at block 156 , method 150 includes obtaining a ballast component and installing the ballast component between the conduit and the filter.

[0050] Figure 4 A cross-sectional view of a filter assembly 200 is shown, according to some embodiments. For the sake of brevity of this specification, aspects of features already described will not be described in additional detail unless specifically mentioned otherwise.

[0051] In the illustrated embodiment, filter assembly 200 includes housing 202. Housing 202 includes inlet 204 and outlet 206. Inlet 204 is fluidly connected to filter 110. Unfiltered fluid can be received at inlet 204 and provided to filter 110. Filtered fluid can be output from outlet 206. Filter assembly 200 also includes a seal 208 configured to seal housing 202 so that filtered fluid can be output from outlet 206 without leaking out of housing 202.

[0052] It should be appreciated that any of aspects 1 to 5 may be combined with any of aspects 6 to 18, 19, or 20 to 22. Any of aspects 6 to 18 may be combined with any of aspect 19 or 20 to 22. Aspect 19 may be combined with any of aspects 20 to 22.

[0053] Aspect 1. A filter assembly comprising: a fluid inlet; a fluid outlet; a conduit; and a filter, wherein the conduit is fluidically connected to the fluid inlet and the filter, wherein the filter is fluidically connected to the conduit and the fluid outlet, wherein the filter assembly is configured to flow at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof; wherein the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid to produce a filtered fluid.

[0054] Aspect 2. The filter assembly according to aspect 1, comprising a first end and a second end opposite the first end, wherein both the fluid inlet and the fluid outlet are located at the first end.

[0055] Aspect 3. The filter assembly according to aspect 1 or 2, wherein the conduit is configured for fluid flow in a first direction, wherein the filter is configured for fluid flow in a second direction.

[0056] Aspect 4. The filter assembly of aspect 3, wherein the second direction is opposite to the first direction.

[0057] Aspect 5. The filter assembly according to any one of aspects 1 to 4, further comprising a ballast component fluidly connected between the conduit and the filter.

[0058] Aspect 6. A system comprising: a manifold comprising a fluid inlet and a fluid outlet; wherein the fluid inlet is configured to receive steam; wherein the fluid outlet is configured to output the steam; a conduit fluidly connected to the fluid inlet and configured to receive the steam; and a filter fluidly connected to the conduit at the filter inlet and configured to receive the steam from the conduit, the filter fluidly connected to the fluid outlet at the filter outlet and configured to output filtered steam to the fluid outlet; wherein the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the steam, thereby producing the filtered steam; wherein the steam comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof.

[0059] Aspect 7. The system according to aspect 6, further comprising a ballast component.

[0060] Aspect 8. A system according to Aspect 7, wherein the ballast component includes a ballast inlet and a ballast outlet, wherein the ballast inlet is configured to be fluidly connected to the conduit and the ballast outlet is configured to be fluidly connected to the filter, and wherein the ballast component includes a housing configured to control a pressure gradient of the vapor from the conduit to the filter.

[0061] Aspect 9. The system according to any one of aspects 6 to 8, comprising a coating covering at least a portion of the filter, covering at least a portion of the conduit, or a combination thereof.

[0062] Aspect 10. The system of aspect 9, wherein the coating is configured to be exposed to the vapor.

[0063] Aspect 11. The system according to aspect 10, wherein the coating comprises at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof.

[0064] Aspect 12. The system according to aspect 10, wherein the coating comprises a metal oxide.

[0065] Aspect 13. The system according to any one of aspects 6 to 12, wherein the manifold is configured to fluidly connect the fluid inlet and the conduit, fluidly connect the filter and the fluid outlet, and maintain separation between the fluid inlet and the fluid outlet.

[0066] Aspect 14. The system of aspect 13, wherein the molybdenum residue, the tungsten residue, or any combination thereof comprises solid particulate matter, wherein the filter is configured to remove the solid particulate matter from a fluid stream.

[0067] Aspect 15. The system according to any one of aspects 6 to 14, wherein the filter is configured to filter the fluid at a temperature of 100° C. or higher.

[0068] Aspect 16. The system according to aspect 15, wherein the filter is configured to filter the fluid at a temperature of 100°C to 250°C.

[0069] Aspect 17. The system according to any one of aspects 6 to 16, wherein the filter is configured to filter the fluid at a pressure of up to 1 MPa.

[0070] Aspect 18. The system according to any one of aspects 6 to 17, wherein the filter is a flow-through filter.

[0071] Aspect 19. A steam delivery system comprising the system according to any one of aspects 6 to 18.

[0072] Aspect 20. A method comprising: obtaining a system configured to filter steam, wherein the system comprises: a component comprising a fluid inlet and a fluid outlet; wherein the fluid inlet is configured to receive steam; wherein the fluid outlet is configured to output the steam; a conduit fluidly connected to the fluid inlet and configured to receive the steam; and a filter fluidly connected to the conduit at the filter inlet and configured to receive the steam from the conduit, the filter fluidly connected to the fluid outlet at the filter outlet and configured to output the filtered steam to the fluid outlet; wherein the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered steam; wherein the steam comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof; and installing the system to a steam delivery system, wherein the system is installed in a delivery manifold of the steam delivery system.

[0073] Aspect 21. The method according to aspect 20, comprising obtaining a ballast component; and installing the ballast component between the conduit and the filter.

[0074] Aspect 22. The method according to aspect 20 or 21, wherein installing the system into a steam delivery system comprises retrofitting the system into a previously operated steam delivery system.

[0075] The terms used herein are intended to describe embodiments and are not intended to be limiting. The terms "a", "an", and "the" also include plural forms unless otherwise clearly indicated. When used in this specification, the terms "comprises and / or comprising" specify the presence of the features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, and / or components.

[0076] It should be understood that changes may be made in detail, particularly in the materials of construction employed and the shape, size, and arrangement of parts, without departing from the scope of the present disclosure. The specification and described embodiments are examples, with the true scope and spirit of the present disclosure being indicated by the appended claims.

Claims

1. A filter assembly comprising: fluid inlet; Fluid outlet; catheter; and Filters, wherein the conduit is fluidically connected to the fluid inlet and the filter, wherein the filter is fluidically connected to the conduit and the fluid outlet, wherein the filter assembly is configured for flowing at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof; Wherein the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid, thereby producing a filtered fluid. 2 . The filter assembly of claim 1 , comprising a first end and a second end opposite the first end, wherein the fluid inlet and the fluid outlet are both positioned at the first end. 3 . The filter assembly of claim 1 , wherein the conduit is configured for fluid flow in a first direction, wherein the filter is configured for fluid flow in a second direction. The filter assembly of claim 3 , wherein the second direction is opposite to the first direction.

5. The filter assembly of claim 1, further comprising a ballast component fluidly connected between the conduit and the filter.

6. A system comprising: a manifold including a fluid inlet and a fluid outlet; wherein the fluid inlet is configured to receive steam; wherein the fluid outlet is configured to output the steam; a conduit fluidly connected to the fluid inlet and configured to receive the steam; and a filter fluidly connected to the conduit at a filter inlet and configured to receive the steam from the conduit, the filter fluidly connected to the fluid outlet at a filter outlet and configured to output filtered steam to the fluid outlet; wherein the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the steam, thereby producing the filtered steam; Wherein the steam comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2 or any combination thereof.

7. The system of claim 6, further comprising a ballast component.

8. The system of claim 7, wherein the ballast component comprises a ballast inlet and a ballast outlet, wherein the ballast inlet is configured to be fluidly connected to the conduit and the ballast outlet is configured to be fluidly connected to the filter, wherein the ballast component includes a housing configured to control a pressure gradient of the vapor from the conduit to the filter.

9. The system of claim 6, comprising a coating covering at least a portion of the filter, covering at least a portion of the conduit, or a combination thereof.

10. The system of claim 9, wherein the coating is configured to be exposed to the vapor.

11. The system of claim 10, wherein the coating comprises at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof.

12. The system of claim 10, wherein the coating comprises a metal oxide.

13. The system of claim 6, wherein the manifold is configured to fluidly connect the fluid inlet and the conduit, fluidly connect the filter and the fluid outlet, and maintain separation between the fluid inlet and the fluid outlet.

14. The system of claim 13, wherein the molybdenum residue, the tungsten residue, or any combination thereof comprises solid particulate matter, wherein the filter is configured to remove the solid particulate matter from a fluid flow.

15. The system of claim 6, wherein the filter is configured to filter fluid at a temperature of 100°C or higher.

16. The system of claim 15, wherein the filter is configured to filter the fluid at a temperature of 100°C to 250°C.

17. The system of claim 6, wherein the filter is configured to filter fluid at a pressure of up to 1 MPa.

18. The system of claim 6, wherein the filter is a flow-through filter.

19. A steam delivery system comprising the system of claim 6.

20. A method comprising: A system configured to filter steam is obtained, wherein the system comprises: A component including a fluid inlet and a fluid outlet; wherein the fluid inlet is configured to receive steam; wherein the fluid outlet is configured to output the steam; a conduit fluidly connected to the fluid inlet and configured to receive the steam; and a filter fluidly connected to the conduit at a filter inlet and configured to receive the steam from the conduit, the filter fluidly connected to the fluid outlet at a filter outlet and configured to output filtered steam to the fluid outlet; wherein the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered steam; wherein the steam comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof; and The system is installed to a steam delivery system, wherein the system is installed into a delivery manifold of the steam delivery system.

21. The method of claim 20, comprising obtaining a ballast component; and installing the ballast component between the conduit and the filter.

22. The method of claim 20, wherein said installing the system into a steam delivery system comprises retrofitting the system into a previously operational steam delivery system.

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