Detection equipment and conductive ball detection method

Abstract

The detection equipment comprises a visual detection module, a first conveying line, a second conveying line, a control assembly and a position switching assembly, a substrate provided with conductive balls enters the first conveying line from the inlet end of the first conveying line, a plurality of hole grooves are formed in the substrate in a matrix mode, each hole groove is used for containing one conductive ball, and the position switching assembly is used for switching the positions of the conductive balls. The control assembly comprises a controller, the controller is electrically connected with a visual detection module, the visual detection module is used for carrying out visual detection on the substrate, and when the visual detection module detects that holes or conductive balls are adhered in hole grooves in the substrate, a first signal is sent to the controller; the position switching assembly is arranged at the junction of the first conveying line and the second conveying line, and the controller is further electrically connected with the position switching assembly and used for controlling the position switching assembly to be started after receiving the first signal so as to transfer unqualified substrates to the second conveying line. The equipment can be used for effectively detecting the 2.5-5mu m level conductive ball at a high speed.

Description

Technical Field

[0001] The present invention specifically relates to a detection device and a conductive ball detection method comprising the detection device. Background Art

[0002] The conductive balls are placed in the holes on the substrate during transportation. There are more than 1 billion holes on a substrate, and the diameter of each hole is 2.5-5μm. Each hole is used to hold a conductive ball. However, when the conductive balls are placed in the holes of the substrate, it is easy to have no conductive balls in the holes, multiple conductive balls stick together in one hole, and the conductive balls are outside the holes. In addition, the conductive balls are prone to dirt, scratches and other problems. Therefore, before the conductive balls are attached to the ACF film, they need to be tested.

[0003] With current technology, only larger conductive balls can be inspected, and it is not possible to inspect the surface implanted conductive balls of 2.5-5μm in the hundreds of millions of holes and grooves on the substrate. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a detection device and a conductive ball detection method including the detection device in view of the above-mentioned deficiencies in the prior art, wherein the detection device can effectively detect conductive balls at the 2.5-5μm level in hundreds of millions of holes and grooves on a substrate.

[0005] In order to solve the above problems, the present invention adopts the following technical solutions:

[0006] A detection device includes a visual detection module, a first conveyor line, a second conveyor line, a control component, and a position switching component. A substrate equipped with a conductive ball enters the first conveyor line from the entrance end of the first conveyor line. A matrix of holes is provided on the substrate, and each hole is used to accommodate a conductive ball. The control component includes a controller, and the controller is electrically connected to the visual detection module. The visual detection module is used to perform visual detection on the substrate. When the visual detection module detects that a hole appears in the hole on the substrate or the conductive ball is adhered, a first signal is sent to the controller. The position switching component is arranged at the junction of the first conveyor line and the second conveyor line. The controller is also electrically connected to the position switching component, and is used to control the position switching component to start after receiving the first signal, so as to transfer unqualified substrates to the second conveyor line.

[0007] Preferably, the visual inspection module includes a camera and a processor. The camera is located above the first conveyor line and is electrically connected to the processor for sending captured image information to the processor. The processor is electrically connected to the controller for receiving the image information sent by the camera and comparing it with a qualified substrate image stored internally. When the received image information is different from the qualified substrate image, a first signal is sent to the controller, and the controller position switching component is started.

[0008] Preferably, three cameras are provided, namely a first camera, a second camera, and a third camera. The substrate is divided into a first area, a second area, and a third area along a direction perpendicular to the movement direction of the first conveyor line. The first camera, the second camera, and the third camera respectively shoot the first area, the second area, and the third area.

[0009] Preferably, the first conveying line and the second conveying line are perpendicular to each other, and the second conveying line is higher than the first conveying line.

[0010] Preferably, the position switching assembly includes a first lifting electric cylinder and a first roller. The lifting electric cylinder is electrically connected to the controller and is used to drive the first roller to rise from under the first conveyor line so that the substrate and the second conveyor line are in the same horizontal plane. The first roller rolls toward the direction of the second conveyor line to convey unqualified substrates to the second conveyor line.

[0011] Preferably, the position switching assembly includes a support frame, a sliding plate, a second lifting cylinder, a clamping cylinder, and a clamping claw. The support frame is installed above the junction of the first conveyor line and the second conveyor line. The support frame is provided with a horizontal slide rail. The sliding plate is slid on the slide rail. The second lifting cylinder is fixedly installed on the sliding plate. The clamping claw cylinder is installed on the lifting cylinder. The second lifting cylinder is used to drive the clamping claw cylinder to move in the vertical direction. The clamping claw cylinder is used to control the opening and closing of the clamping claw, so as to clamp the substrate to the second conveyor line.

[0012] Preferably, the detection device further comprises a working platform and a shell, wherein the shell is sleeved on the working platform, and the first conveying line and the second conveying line are both arranged on the working platform and located inside the shell.

[0013] Preferably, a filter port is provided on the top of the shell.

[0014] The present invention also provides a conductive ball detection method, using the above detection device, the method is as follows:

[0015] The substrate carrying the conductive balls is placed on the first conveyor line, and the visual inspection module performs visual inspection on the substrate;

[0016] When the visual inspection module detects that a hole or conductive balls are stuck in the hole groove on the substrate, a first signal is sent to the controller;

[0017] The controller controls the position switching component to start up so as to transfer unqualified substrates to the second conveying line.

[0018] The detection equipment in the present invention can effectively detect the 2.5-5μm level conductive balls in the hundreds of millions of holes and grooves on the substrate, so as to detect and screen the dirt and scratches on the surface of the conductive balls and whether there are holes or conductive balls sticking in the holes and grooves on the substrate, and transport the above unqualified substrates to the second conveyor line, so as to refill the conductive balls of the substrate so that there is only one conductive ball in each hole and groove on the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the internal structure of the detection device in Example 1 of the present invention;

[0020] Figure 2 is a schematic diagram of the external structure of the detection device in Example 1 of the present invention;

[0021] Figure 3 It is a schematic diagram of an implementation of the position switching component in Example 1 of the present invention.

[0022] In the figure: 100 - first conveyor line, 200 - second conveyor line, 300 - camera, 400 - support frame, 410 - sliding plate, 420 - second lifting cylinder, 430 - clamping cylinder, 440 - clamping claw, 500 - working platform, 600 - housing, 700 - filter port. DETAILED DESCRIPTION

[0023] The following will be combined with the accompanying drawings in the present invention to clearly and completely describe the technical solutions in the invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of the present invention.

[0024] In the description of the present invention, it should be noted that the term "upper" and the like to indicate orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In the description of the present invention, the terms “first” and “second” are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connect", "set", "install", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0027] The present invention provides a detection device, including a visual detection module, a first conveyor line, a second conveyor line, a control component, and a position switching component. A substrate equipped with a conductive ball enters the first conveyor line from the entrance end of the first conveyor line. A matrix is ​​provided with a plurality of holes and grooves on the substrate, and each hole and groove is used to accommodate a conductive ball. The control component includes a controller, and the controller is electrically connected to the visual detection module. The visual detection module is used to perform visual detection on the substrate. When the visual detection module detects that a hole appears in the hole and groove on the substrate or the conductive ball is adhered, a first signal is sent to the controller. The position switching component is arranged at the junction of the first conveyor line and the second conveyor line. The controller is also electrically connected to the position switching component, and is used to control the position switching component to start after receiving the first signal, so as to transfer the unqualified substrate to the second conveyor line.

[0028] The present invention also provides a conductive ball detection method, using the above detection device, the method is as follows:

[0029] The substrate carrying the conductive balls is placed on the first conveyor line, and the visual inspection module performs visual inspection on the substrate;

[0030] When the visual inspection module detects that a hole or conductive balls are stuck in the hole groove on the substrate, a first signal is sent to the controller;

[0031] The controller controls the position switching component to start up so as to transfer unqualified substrates to the second conveying line.

[0032] Example 1

[0033] like Figure 1 , 2As shown, the present embodiment discloses a detection device, including a visual inspection module, a first conveyor line 100, a second conveyor line 200, a control component, and a position switching component. The substrate equipped with the conductive ball enters the first conveyor line 100 from the entrance end of the first conveyor line 100. Among them, a plurality of holes and slots are opened in the matrix on the substrate (more than one billion holes and slots of 2.5-5μm are opened), and each hole and slot is used to accommodate a conductive ball. For normal qualified substrates, they are directly transported to the exit end of the first conveyor line 100, so as to be applied to the next process. For unqualified products (when holes appear in the holes and slots on the substrate or the conductive balls are adhered), they are returned to the previous process through the second conveyor line 200 for reprocessing (reloading the conductive balls) to ensure that there is and only one conductive ball in each hole and slot on the substrate.

[0034] In this embodiment, the control component includes a controller, which is electrically connected to the visual inspection module. The visual inspection module is used to perform visual inspection on the substrate. When the visual inspection module detects the presence of holes in the holes on the substrate or the adhesion of the conductive balls, it sends a first signal to the controller. The position switching component is arranged at the junction of the first conveyor line 100 and the second conveyor line 200. The controller is also electrically connected to the position switching component, and is used to control the position switching component to start after receiving the first signal to transfer the unqualified substrate to the second conveyor line 200.

[0035] In this embodiment, the visual inspection module includes a camera 300 and a processor. The camera 300 is located above the side of the first conveyor line 100 and is electrically connected to the processor. When the substrate passes under the camera 300, the camera 300 shoots the substrate and sends the captured image information to the processor. The processor is electrically connected to the controller to receive the image information sent by the camera 300 and compare it with the qualified substrate image stored inside (each hole groove has only one conductive ball and there is no hole). When the received image information is different from the qualified substrate image, a first signal is sent to the controller, and the controller position switching component is started to transfer the unqualified substrate to the second conveyor line 200. Specifically, the camera 300 adopts Dalsa-16K.

[0036] Specifically, three cameras 300 are provided, namely, the first camera, the second camera, and the third camera. The substrate is divided into the first area, the second area, and the third area along the direction perpendicular to the movement direction of the first conveyor line 100 (width direction). The first camera, the second camera, and the third camera respectively shoot the first area, the second area, and the third area. The use of three cameras to respectively capture images of the first area, the second area, and the third area of ​​the substrate can greatly improve the efficiency of visual recognition, control the detection time of a substrate within 20s, greatly save the detection time, and improve the accuracy of detection.

[0037] like Figure 1 As shown, the first conveyor line 100 and the second conveyor line 200 are perpendicular to each other, the inlet end of the second conveyor line 200 is close to the outlet end of the first conveyor line 100 , and the second conveyor line 200 is higher than the first conveyor line 100 .

[0038] In this embodiment, the position switching component includes a first lifting electric cylinder and a first roller. The lifting electric cylinder is electrically connected to the controller and is used to drive the first roller to rise from under the first conveyor line 100 and lift up the unqualified substrate so that the substrate and the second conveyor line 200 are in the same horizontal plane. The first roller rolls toward the direction of the second conveyor line 200 to transport the unqualified substrate to the second conveyor line 200.

[0039] like Figure 3 As shown, as another embodiment, the position switching assembly includes a support frame 400, a sliding plate 410, a second lifting cylinder 420, a clamping claw cylinder 430, and a clamping claw 440. The support frame 400 is installed above the junction of the first conveyor line 100 and the second conveyor line 200. The support frame 400 is provided with a horizontal slide rail (along the length direction of the second conveyor line 200). The sliding plate 410 is slidably arranged on the slide rail. The second lifting cylinder 420 is fixedly installed on the sliding plate 410 and can slide on the slide rail as the sliding plate 410, thereby adjusting the horizontal position. The clamping claw cylinder 430 is installed on the lifting cylinder. The second lifting cylinder 420 is used to drive the clamping claw cylinder 430 to move in the vertical direction. The clamping claw cylinder 430 is used to control the opening and closing of the clamping claw 440, thereby clamping the substrate to the second conveyor line 200. When the unqualified substrate product moves to the junction of the first conveyor line 100 and the second conveyor line 200, the second lifting cylinder 420 starts to drive the clamping cylinder 430 to move downward, the clamping cylinder 430 drives the clamping claw 440 to close and clamp, and the sliding plate 410 slides along the slide rail, thereby driving the unqualified substrate to be transferred to the second conveyor line 200.

[0040] The detection device further comprises a working platform 500 and a housing 600. The housing 600 is sleeved on the working platform 500. The first conveyor line 100 and the second conveyor line 200 are both arranged on the working platform 500 and located in the housing 600. A camera is also arranged in the housing 600.

[0041] like Figure 2 As shown, two filter ports 700 are provided on the top of the housing 600 and FFU filtering is adopted to prevent external dust particles from entering the housing 600 .

[0042] The detection device in this embodiment can effectively detect conductive balls at the 2.5-5μm level, can effectively detect holes on the substrate, conductive ball adhesion and other problems, as well as dirt and scratches on the surface of the conductive balls, and uses three cameras to simultaneously detect multiple areas on the substrate, which can greatly improve the efficiency of visual recognition and control the detection time of a substrate within 20s, greatly saving detection time and improving detection accuracy. In addition, the detection device in this embodiment can automatically return unqualified products to the second conveyor line 200 for return processing, and qualified products are conveyed to the next process by the first conveyor line 100.

[0043] Example 2

[0044] This embodiment discloses a conductive ball detection method, using the detection device in Embodiment 1, the method is as follows:

[0045] The substrate carrying the conductive balls is placed on the first conveyor line 100, and the visual inspection module performs visual inspection on the substrate;

[0046] When the visual inspection module detects that a hole or conductive balls are stuck in the hole groove on the substrate, a first signal is sent to the controller;

[0047] The controller controls the position switching assembly to start, so as to transfer the unqualified substrates to the second conveying line 200 .

[0048] In this embodiment, specifically, a substrate carrying conductive balls is placed on the first conveyor line 100. When the substrate reaches below the camera 300, the three cameras 300 respectively photograph the first area, the second area, and the third area of ​​the substrate, and transmit the image data to the processor;

[0049] The processor receives the image information sent by the camera 300 and compares it with the qualified substrate image stored therein, and sends a first signal to the controller when the received image information is different from the qualified substrate image;

[0050] The controller controls the position switching component to start, so as to transfer the unqualified substrate to the second conveying line 200;

[0051] For qualified substrates, the position switching component is not started, and the qualified substrates are conveyed to the next process along the first conveying line 100 .

[0052] The conductive ball detection method in this embodiment can effectively detect conductive balls at the 2.5-5μm level, and can effectively detect holes on the substrate, conductive ball adhesion and other problems, as well as dirt and scratches on the surface of the conductive balls. In addition, three cameras 300 are used to simultaneously detect multiple areas on the substrate, which can greatly improve the efficiency of visual recognition and control the detection time of a substrate within 20s, thereby greatly saving detection time and improving detection accuracy.

[0053] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A detection device, characterized in that: It comprises a visual inspection module, a first conveying line (100), a second conveying line (200), a control component, and a position switching component. A substrate equipped with conductive balls enters the first conveying line (100) from the inlet end of the first conveying line (100). A plurality of holes are provided in a matrix on the substrate, each hole being used to accommodate a conductive ball. The control component includes a controller, the controller is electrically connected to the visual inspection module, the visual inspection module is used to perform visual inspection on the substrate, when the visual inspection module detects that there are holes in the hole grooves on the substrate or the conductive balls are adhered, a first signal is sent to the controller, The position switching assembly is arranged at the junction of the first conveying line (100) and the second conveying line (200), The controller is also electrically connected to the position switching component and is used to control the position switching component to start after receiving the first signal, so as to transfer the unqualified substrate to the second conveying line (200).

2. The detection device according to claim 1, characterized in that: The visual inspection module comprises a camera (300) and a processor, wherein the camera (300) is located above the first conveyor line (100) and is electrically connected to the processor and is used to send captured image information to the processor. The processor is electrically connected to the controller and is used to receive image information sent by the camera (300) and compare it with a qualified substrate image stored therein. When the received image information is different from the qualified substrate image, a first signal is sent to the controller and the controller position switching component is started.

3. The detection device according to claim 2, characterized in that: The cameras (300) are provided with three units, namely a first camera, a second camera and a third camera. The substrate is divided into a first area, a second area, and a third area along a direction perpendicular to the moving direction of the first conveyor line (100), and the first camera, the second camera, and the third camera respectively photograph the first area, the second area, and the third area.

4. The detection device according to claim 1, characterized in that: The first conveying line (100) and the second conveying line (200) are perpendicular to each other, and the second conveying line (200) is higher than the first conveying line (100).

5. The detection device according to claim 4, characterized in that: The position switching assembly comprises a first lifting electric cylinder and a first roller, wherein the lifting electric cylinder is electrically connected to the controller and is used to drive the first roller to rise from below the first conveyor line (100) so that the substrate and the second conveyor line (200) are in the same horizontal plane, and the first roller rolls in the direction of the second conveyor line (200) to convey unqualified substrates to the second conveyor line (200).

6. The detection device according to claim 4, characterized in that: The position switching assembly comprises a support frame (400), a sliding plate (410), a second lifting cylinder (420), a clamping claw cylinder (430), and a clamping claw (440). The support frame (400) is installed above the junction of the first conveying line (100) and the second conveying line (200), and a horizontal slide rail is provided on the support frame (400), and the sliding plate (410) is slidably mounted on the slide rail. The second lifting cylinder (420) is fixedly mounted on the sliding plate (410), and the clamping cylinder (430) is mounted on the lifting cylinder. The second lifting cylinder (420) is used to drive the clamping cylinder (430) to move in a vertical direction, and the clamping cylinder (430) is used to control the opening and closing of the clamping cylinder (440), thereby clamping the substrate onto the second conveyor line (200).

7. The detection device according to any one of claims 1 to 6, characterized in that: It also includes a working platform (500) and a shell (600), wherein the shell (600) is sleeved on the working platform (500), and the first conveyor line (100) and the second conveyor line (200) are both arranged on the working platform (500) and located inside the shell (600).

8. The detection device according to claim 7, characterized in that: A filter port (700) is provided on the top of the housing (600).

9. A conductive ball detection method, characterized in that: Using the detection device according to any one of claims 1 to 8, the method is as follows: Placing the substrate carrying the conductive balls on a first conveyor line (100), and performing visual inspection on the substrate using a visual inspection module; When the visual inspection module detects that a hole or conductive balls are stuck in the hole groove on the substrate, a first signal is sent to the controller; The controller controls the position switching component to start up so as to transfer the unqualified substrate to the second conveying line (200).

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