Clean room microseismic structure

Abstract

The application relates to the technical field of building structures, and discloses a microseismic structure of a clean workshop, which comprises a structural frame, a device body and a base plate fixedly installed at the bottom of the structural frame, the inner bottom surface of the base plate is paved with a rubber damping pad, the top of the rubber damping pad is fixedly installed with a lower plate, the top of the lower plate is fixedly connected with a mounting plate through a connecting rod, and the top of the mounting plate is fixedly installed with a mounting frame through a stand column, the top of the mounting frame is fixedly connected with a top frame, the inside of the mounting plate is provided with a protection assembly, and the inside of the mounting frame is provided with a mounting assembly; the protection assembly comprises a square groove formed in the inside of the mounting plate, and the inside of the square groove is slidably connected with a fixed plate; when the main body of the workshop is subjected to vibration or the equipment resonance generates vibration, the vibration may cause the displacement of the working equipment to be unstable, thereby affecting the production and processing progress of the working equipment and reducing the qualified rate of products.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of building structures, in particular to a microseismic structure of a clean workshop. BACKGROUND

[0002] Due to the particularity of electronic products, high-tech electronic industrial workshops have high requirements for micro-vibration. Microseismic design is an important part of electronic high-tech clean workshops. When the main structure of the workshop is subjected to vibration, it may affect the equipment working inside the workshop, and even reduce the product qualification rate and affect the production process.

[0003] For example, the anti-microseismic structure of a semiconductor workshop disclosed in CN116065870A includes a foundation layer and a structural frame arranged on the foundation layer. A support plate is arranged on the foundation layer, and a limiting block is arranged on the side wall of the foundation layer close to the support plate. A limiting groove is arranged on the foundation layer for cooperating with the limiting block. A sand layer is arranged between the support plate and the foundation layer. A support assembly for supporting equipment is arranged on the support plate. This device reduces the impact of vibration in the workshop on semiconductor production. However, the device does not limit the working equipment. When the main structure of the workshop is subjected to vibration or the equipment resonates, the working equipment may be displaced and unstable, affecting the production and processing process of the working equipment and reducing the product qualification rate. Therefore, there is a certain defect.

[0004] Therefore, a microseismic structure of a clean workshop is proposed to solve the above problems. SUMMARY

[0005] The present application aims to provide a microseismic structure of a clean workshop to solve the problem of unstable displacement of working equipment when the main structure of the workshop is subjected to vibration or the equipment resonates, affecting the production and processing process of the working equipment and reducing the product qualification rate.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical scheme: a microseismic structure of a clean workshop, comprising a structural frame, a device body and a base plate fixedly installed at the bottom of the structural frame, the inner bottom surface of the base plate being paved with a rubber shock-absorbing pad, the top of the rubber shock-absorbing pad being fixedly installed with a lower plate, the top of the lower plate being fixedly connected with a mounting plate through a connecting rod;

[0007] Further comprising:

[0008] The top of the mounting plate is fixedly installed with a mounting frame through a stand column, the top of the mounting frame is fixedly connected with a top frame, the inside of the mounting plate is provided with a protection assembly, and the inside of the mounting frame is provided with a mounting assembly.

[0009] The protection assembly includes a square groove opened in the inside of the mounting plate, the square groove is not less than four, the inside of the square groove is slidably connected with a fixed plate, the top of the fixed plate is fixedly connected with a buffer pad layer, the device body is installed on the top of the buffer pad layer, the bottom of the fixed plate is fixedly connected with a damping plate, the bottom of the damping plate is symmetrically fixedly connected with a mounting sleeve, the inner wall of the mounting sleeve and the damping plate are fixedly installed with a damping spring one;

[0010] The mounting sleeve is provided with four, the center of the four mounting sleeves is fixedly connected with a same middle plate, the bottom of the middle plate is fixedly connected with a horizontal plate, the horizontal plate is slidably connected with the lower plate, the two sides of the horizontal plate are symmetrically fixedly installed with a damping spring two, the side away from the middle plate of the mounting sleeve is fixedly connected with a side plate, the top of the side plate is fixedly connected with a sleeve;

[0011] The inside of the sleeve is slidably connected with a sliding rod, the sliding rod is slidably connected with the mounting plate, the inner bottom surface of the sleeve is fixedly installed with a damping spring three, the top end of the sliding rod is fixedly connected with an extrusion block, the top of the mounting plate is symmetrically fixedly connected with an L-shaped rod, one side of the L-shaped rod is slidably connected with a sliding sleeve, the inside of the sliding sleeve is fixedly installed with a damping spring four, one end of the sliding sleeve is fixedly connected with a positioning plate;

[0012] The side close to the sliding sleeve of the positioning plate is fixedly connected with a concave block at the lower part, the inclined surface of the extrusion block and the concave block abuts, the bottom of the fixed plate is fixedly connected with a lower rod in the middle, the bottom end of the lower rod is fixedly connected with a pressure plate, the top of the middle plate is fixedly installed with a damping spring five.

[0013] Preferably, the damping spring one is uniformly arranged, the damping spring one is not less than four, the damping plate can only move horizontally in the inside of the mounting sleeve, the fixed plate is fixedly connected with the damping plate through a connecting rod, the connecting rod is fixedly connected with the sliding rod, the number of the connecting rod is the same as that of the sliding rod.

[0014] By adopting the above technical scheme, when the lower plate and the mounting plate are subjected to vertical vibration, the two positioning plates better position and clamp the device body, reducing the sliding of the device body, and the damping spring five further weakens the vertical vibration of the lower plate and the mounting plate.

[0015] Preferably, the top of the lower plate is provided with a lower groove, the number of the lower groove is the same as that of the square groove, the bottom surface of the middle plate is attached to the top surface of the lower plate, the horizontal plate is slidably connected with the lower groove, the damping spring two is not less than four, one end of the damping spring two away from the horizontal plate is fixedly connected with the inner wall of the lower groove.

[0016] When the lower plate and the mounting plate are subjected to horizontal longitudinal vibration, the fixed plate and the middle plate vibrate, the middle plate drives the horizontal plate to vibrate inside the lower groove, and the horizontal plate acts on the two damping springs II to assist in weakening the vibration.

[0017] Preferably, the side plate is symmetrically provided with two, the sleeve is not less than two, and the top end of the damping spring III is fixedly connected with the bottom end of the sliding rod.

[0018] By adopting the above technical scheme, when the lower plate and the mounting plate are subjected to vertical vibration, the fixed plate drives the sliding rod to slide up and down, the sliding rod compresses or stretches the damping spring III, and the damping spring III reduces the influence of the vibration.

[0019] Preferably, one end of the damping spring IV is fixedly connected with the L-shaped rod, the sliding sleeve is located above the concave block, and the positioning plate is not less than two.

[0020] By adopting the above technical scheme, the sliding rod drives the extrusion block to rise and fall, and the extrusion block rises and falls to extrude the inclined surface of the concave block, the concave block drives the positioning plate to approach the equipment body, and the positioning of the equipment body is facilitated.

[0021] Preferably, the top end of the damping spring V is fixedly connected with the pressure plate, the top of the middle plate is symmetrically fixedly connected with the side rod, the inner side of the two side rods is fixedly connected with the connecting sleeve, and the connecting sleeve is slidingly connected with the lower rod.

[0022] By adopting the above technical scheme, when the fixed plate vibrates, the lower rod and the pressure plate also act on the damping spring V, so that the damping spring V further weakens the vertical vibration of the lower plate and the mounting plate.

[0023] Preferably, the mounting assembly comprises a horizontal rod and a vertical rod, a rotating sleeve is rotatably installed in the middle of the horizontal rod, a double-head screw rod is fixedly connected inside the rotating sleeve in the transverse direction, the double-head screw rod is located inside the horizontal rod, clamping sleeves are sleeved on the outer sides of the two sides of the double-head screw rod, and insertion grooves are symmetrically formed in the inner side of the mounting frame.

[0024] By adopting the above technical scheme, the bottom of the vertical rod and the top of the horizontal rod are inserted and fixed, and the positions of the clamping sleeves and the insertion grooves are kept corresponding, so that the positioning of the clamping sleeves is facilitated.

[0025] Preferably, the clamping sleeve is in clamping connection with the insertion groove, limit grooves are symmetrically formed in the inside of the horizontal rod in the up-down direction, limit blocks are symmetrically fixedly connected on the outer sides of the two sides of the double-head screw rod in the up-down direction, and the limit grooves and the limit blocks are in sliding connection.

[0026] By adopting the technical scheme, the rotating rotating sleeve drives the double-end screw rod to rotate, the limiting block slides in the limiting groove to limit the clamping sleeve, and the double-end screw rod rotates to drive the clamping sleeve to slide out of the horizontal rod, so that the clamping sleeve is clamped into the insertion slot.

[0027] Preferably, the interior of the clamping sleeve is slidably installed with an elastic clamping block, the elastic clamping block is in clamping connection with the insertion slot, the bottom of the horizontal rod is symmetrically and fixedly installed with a positioning bolt, and the top end of the vertical rod is inserted with the inner top surface of the top frame.

[0028] By adopting the technical scheme, when the clamping sleeve is completely clamped into the insertion slot, the elastic clamping block is popped out to assist in limiting, finally the horizontal rod is fixed on the mounting frame through the positioning bolt, and the horizontal rod and the vertical rod are convenient to replace.

[0029] Compared with the prior art, the device has the beneficial effects that: the protection assembly is arranged, the damping spring one reduces the horizontal transverse vibration of the damping plate, the damping spring two reduces the horizontal longitudinal vibration of the damping plate, thereby reducing the influence of vibration on the equipment body; when the lower plate and the mounting plate are subjected to vertical vibration, the two positioning plates better position and clamp the equipment body, thereby reducing the sliding of the equipment body, the damping spring five further reduces the vertical vibration of the lower plate and the mounting plate, thereby enabling all-round damping of the factory building and improving product production quality.

[0030] 1. The protection assembly is arranged, when the base plate is subjected to vibration, the vibration is transmitted to the rubber damping pad, the rubber damping pad reduces the influence of vibration on the mounting plate and the equipment body, when the lower plate and the mounting plate are subjected to horizontal transverse vibration, the fixed plate drives the damping plate to move transversely, the damping plate acts on the two damping springs one, the damping spring one assists in reducing the vibration of the damping plate, when the lower plate and the mounting plate are subjected to horizontal longitudinal vibration, the fixed plate and the middle plate vibrate, the middle plate drives the horizontal plate to vibrate in the lower groove, the horizontal plate acts on the two damping springs two, the damping spring two assists in reducing the vibration, thereby reducing the influence of vibration on the equipment body; when the lower plate and the mounting plate are subjected to vertical vibration, the fixed plate drives the sliding rod to slide up and down, the sliding rod compresses or stretches the damping spring three, the sliding rod drives the extrusion block to ascend and descend, the ascent and descent of the extrusion block extrude the inclined surface of the concave block, the concave block drives the positioning plate to approach the equipment body, the positioning plate drives the sliding sleeve to move, the sliding sleeve stretches the damping spring four, thereby the two positioning plates better position and clamp the equipment body, thereby reducing the sliding of the equipment body, when the fixed plate vibrates, the lower rod and the pressure plate also act on the damping spring five, the damping spring five further reduces the vertical vibration of the lower plate and the mounting plate, thereby enabling all-round damping of the factory building and improving product production quality, and solving the problem that when the factory building body is subjected to vibration or the equipment resonance generates vibration, the working equipment may be displaced and unstable, thereby affecting the production and processing process of the working equipment and reducing the qualified rate of products.

[0031] 2、Set up has the installation assembly, through the top of the vertical rod is inserted in the inner top surface of the top frame, again the bottom of the vertical rod is inserted with the top of the cross rod fixed, while keeping the position of the clamping sleeve and the slot corresponds, through the rotation of the rotating sleeve, the rotating sleeve drives the double head screw rod to rotate, the limiting block slides in the inside of the limiting slot, for clamping sleeve limiting, the double head screw rod rotation makes the clamping sleeve slide out from the inside of the cross rod, so that the clamping sleeve is clamped into the slot, and when the clamping sleeve is completely clamped into the slot, the elastic clamping block will pop out auxiliary limiting, finally through the positioning bolt, the cross rod is fixed on the installation frame, it is convenient for the damage replacement of the cross rod and the vertical rod, and the installation is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is first three-dimensional whole structure schematic view of the application;

[0033] Figure 2 It is second three-dimensional whole structure schematic view of the application;

[0034] Figure 3 It is the application Figure 2 In the enlarged structure schematic view of A;

[0035] Figure 4 It is the application cushion layer installation structure schematic view;

[0036] Figure 5 It is the application Figure 4 In the enlarged structure schematic view of B;

[0037] Figure 6 It is the application Figure 4 In the enlarged structure schematic view of C;

[0038] Figure 7 It is the application Figure 4 In the enlarged structure schematic view of D;

[0039] Figure 8 It is the application sleeve section view structure schematic view;

[0040] Figure 9 It is the application horizontal plate installation structure schematic view;

[0041] Figure 10 It is the application top frame section view structure schematic view;

[0042] Figure 11 It is the application Figure 10 In the enlarged structure schematic view of E.

[0043] In the figure: 1, structure frame; 2, base plate; 3, rubber shock pad; 4, lower plate; 5, mounting plate; 6, protection assembly; 61, square groove; 62, fixed plate; 63, buffer pad layer; 64, shock absorbing plate; 65, mounting sleeve; 66, damping spring one; 67, middle plate; 68, lower groove; 69, cross plate; 610, damping spring two; 611, side plate; 612, sleeve; 613, sliding rod; 614, damping spring three; 615, extrusion block; 616, L-shaped rod; 617, sliding sleeve; 618, damping spring four; 619, positioning plate; 620, concave block; 621, lower rod; 622, pressure plate; 623, damping spring five; 624, side rod; 625, connecting sleeve; 7, mounting frame; 8, top frame; 9, mounting assembly; 91, cross rod; 92, rotating sleeve; 93, double-headed screw; 94, clamping sleeve; 95, limiting groove; 96, limiting block; 97, insertion groove; 98, elastic clamping block; 99, vertical rod; 910, positioning bolt; 10, equipment body. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0045] Please refer to Figures 1-11 The present application provides a technical solution: a microseismic structure of a clean workshop, comprising a structure frame 1, an equipment body 10 and a base plate 2 fixedly installed at the bottom of the structure frame 1, the inner bottom surface of the base plate 2 being paved with a rubber shock pad 3, the top of the rubber shock pad 3 being fixedly installed with a lower plate 4, and the top of the lower plate 4 being fixedly connected with a mounting plate 5 through a connecting rod.

[0046] The top of the mounting plate 5 is fixedly installed with a mounting frame 7 through a stand, and the top of the mounting frame 7 is fixedly connected with a top frame 8.

[0047] The inside of the mounting plate 5 is provided with a protection assembly 6, the protection assembly 6 comprising square grooves 61 opened in the inside of the mounting plate 5, the number of the square grooves 61 being not less than four, the inside of the square grooves 61 being slidably connected with fixed plates 62, the top of the fixed plates 62 being fixedly connected with a buffer pad layer 63, the equipment body 10 being installed at the top of the buffer pad layer 63, the bottom of the fixed plates 62 being fixedly connected with shock absorbing plates 64 in a symmetrical manner, the bottom of the shock absorbing plates 64 being fixedly installed with mounting sleeves 65 in a symmetrical manner at the two sides, and the inner wall of the mounting sleeves 65 and the shock absorbing plates 64 being fixedly installed with damping springs one 66.

[0048] The four mounting sleeves 65 are fixedly connected with the same middle plate 67 at the centers, the bottom of the middle plate 67 is fixedly connected with a horizontal plate 69, the horizontal plate 69 is slidably connected with the lower plate 4, the two sides of the horizontal plate 69 are symmetrically fixedly installed with the second damping springs 610, the mounting sleeve 65 is fixedly connected with a side plate 611 away from the middle plate 67, and the top of the side plate 611 is fixedly connected with a sleeve 612.

[0049] The top of the lower plate 4 is provided with lower grooves 68, the number of the lower grooves 68 is same as that of the square grooves 61, the bottom surface of the middle plate 67 is attached to the top surface of the lower plate 4, the horizontal plate 69 is slidably connected with the lower grooves 68, the number of the second damping springs 610 is not less than four, and one end of the second damping spring 610 away from the horizontal plate 69 is fixedly connected with the inner wall of the lower groove 68.

[0050] The inside of the sleeve 612 is slidably connected with a sliding rod 613, the sliding rod 613 is slidably connected with the mounting plate 5, the inner bottom surface of the sleeve 612 is fixedly installed with third damping springs 614, the top end of the sliding rod 613 is fixedly connected with a pressing block 615, the top of the mounting plate 5 is symmetrically fixedly connected with L-shaped rods 616, one side of the L-shaped rod 616 is slidably connected with a sliding sleeve 617 in the transverse direction, the inside of the sliding sleeve 617 is fixedly installed with fourth damping springs 618 in the transverse direction, and one end of the sliding sleeve 617 is fixedly connected with a positioning plate 619.

[0051] The first damping springs 66 are uniformly arranged, the number of the first damping springs 66 is not less than four, the damping plate 64 can only move horizontally and transversely in the inside of the mounting sleeve 65, the fixed plate 62 is fixedly connected with the damping plate 64 through connecting rods, the connecting rods are fixedly connected with the sliding rod 613, and the number of the connecting rods is same as that of the sliding rod 613.

[0052] The two side plates 611 are symmetrically arranged, the number of the sleeves 612 is not less than two, and the top end of the third damping spring 614 is fixedly connected with the bottom end of the sliding rod 613.

[0053] The positioning plate 619 is fixedly connected with a concave block 620 at the side, the lower part of the concave block 620 is close to the sliding sleeve 617, the pressing block 615 is in abutment with the inclined surface of the concave block 620, the bottom of the fixed plate 62 is fixedly connected with a lower rod 621 in the middle, the bottom end of the lower rod 621 is fixedly connected with a pressure plate 622, and the top of the middle plate 67 is fixedly installed with fifth damping springs 623.

[0054] One end of the fourth damping spring 618 is fixedly connected with the L-shaped rod 616, the sliding sleeve 617 is located above the concave block 620, and the number of the positioning plate 619 is not less than two.

[0055] The top end of the fifth damping spring 623 is fixedly connected with the pressure plate 622, the top of the middle plate 67 is symmetrically fixedly connected with side rods 624, the inner sides of the two side rods 624 are fixedly connected with connecting sleeves 625, and the connecting sleeves 625 are slidably connected with the lower rod 621.

[0056] Example 1: Figures 1-9 As shown, when the base plate 2 is vibrated, the vibration is transmitted to the rubber shock-absorbing pad 3, and the rubber shock-absorbing pad 3 reduces the impact of the vibration on the mounting plate 5 and the equipment body 10. When the lower plate 4 and the mounting plate 5 are subjected to horizontal lateral vibration, the fixed plate 62 drives the shock-absorbing plate 64 to move laterally, and the shock-absorbing plate 64 acts on the damping springs 66 on both sides, and the damping springs 66 assist in reducing the vibration of the shock-absorbing plate 64.

[0057] When the lower plate 4 and the mounting plate 5 are subjected to horizontal longitudinal vibration, the fixed plate 62 and the middle plate 67 will vibrate, and the middle plate 67 drives the transverse plate 69 to vibrate inside the lower groove 68. The transverse plate 69 acts on the damping springs 2 610 on both sides, and the damping springs 2 610 assist in reducing the vibration, thereby reducing the impact of the vibration on the equipment body 10.

[0058] When the lower plate 4 and the mounting plate 5 are subjected to vertical vibration, the fixed plate 62 drives the slide bar 613 to slide up and down, the slide bar 613 compresses or stretches the damping spring three 614, and the slide bar 613 drives the extrusion block 615 to rise and fall, and the extrusion block 615 rises and falls, which squeezes the inclined surface of the concave block 620. The concave block 620 drives the positioning plate 619 to approach the equipment body 10, and the positioning plate 619 drives the sliding sleeve 617 to move, and the sliding sleeve 617 stretches the damping spring four 618, so that the two positioning plates 619 can better position and clamp the equipment body 10, thereby reducing the slippage of the equipment body 10.

[0059] When the fixed plate 62 vibrates, it will also drive the lower rod 621 and the pressure plate 622 to act on the damping spring five 623, so that the damping spring five 623 further weakens the vertical vibration of the lower plate 4 and the mounting plate 5, thereby being able to all-roundly reduce the shock of the factory building and improve the quality of product production. It solves the problem that when the main body of the factory building is vibrated or the equipment resonates and vibrates, it may cause the working equipment to shift unsteadily, thereby affecting the production and processing process of the working equipment and reducing the qualified rate of the product.

[0060] An installation component 9 is provided inside the installation frame 7. The installation component 9 includes a horizontal rod 91 and a vertical rod 99. A rotating sleeve 92 is rotatably installed in the middle of the horizontal rod 91. A double-headed screw rod 93 is fixedly connected to the inside of the rotating sleeve 92 in a horizontal direction. The double-headed screw rod 93 is located inside the horizontal rod 91. Clamping sleeves 94 are sleeved on the outside of both sides of the double-headed screw rod 93. Slots 97 are symmetrically opened on the inner side of the installation frame 7.

[0061] The clamping sleeve 94 is engaged with the slot 97, and a limiting groove 95 is symmetrically opened inside the cross bar 91. The clamping sleeve 94 is fixedly connected to a limiting block 96 symmetrically on the outside of the side close to the double-headed screw rod 93, and the limiting groove 95 is slidably connected to the limiting block 96.

[0062] An elastic block 98 is slidably installed inside the clamping sleeve 94, and the elastic block 98 is engaged with the slot 97. Positioning bolts 910 are symmetrically fixed on the bottom of the cross bar 91, and the top of the vertical bar 99 is plugged into the inner top surface of the top frame 8.

[0063] Example 2: Figures 10-11 As shown, by inserting the top of the vertical rod 99 into the inner top surface of the top frame 8, and then inserting and fixing the bottom of the vertical rod 99 with the top of the cross rod 91, at the same time keeping the position of the clamping sleeve 94 corresponding to the slot 97, by rotating the rotating sleeve 92, the rotating sleeve 92 drives the double-headed screw rod 93 to rotate, and the limit block 96 slides inside the limit groove 95 to limit the clamping sleeve 94, and the double-headed screw rod 93 rotates to make the clamping sleeve 94 slide out from the inside of the cross rod 91, thereby clamping the clamping sleeve 94 into the slot 97, and when the clamping sleeve 94 is fully inserted into the slot 97, the elastic clamping block 98 will pop out to assist in limiting, and finally the cross rod 91 is fixed to the mounting frame 7 by the positioning bolt 910, which is convenient for the replacement of the damaged cross rod 91 and the vertical rod 99, and the installation is convenient.

[0064] Working principle: When using this device, first, Figures 1-11 As shown, when the base plate 2 is vibrated, the rubber shock-absorbing pad 3 reduces the impact of the vibration on the mounting plate 5 and the equipment body 10; when the lower plate 4 and the mounting plate 5 are subjected to horizontal lateral vibration, the damping spring 1 66 assists in reducing the vibration of the shock-absorbing plate 64; when the lower plate 4 and the mounting plate 5 are subjected to horizontal longitudinal vibration, the damping spring 2 610 assists in reducing the vibration, thereby reducing the impact of the vibration on the equipment body 10.

[0065] When the lower plate 4 and the mounting plate 5 are subjected to vertical vibration, the fixed plate 62 drives the slide bar 613 to slide up and down, and the slide bar 613 drives the extrusion block 615 to rise and fall. The rise and fall of the extrusion block 615 will squeeze the inclined surface of the concave block 620, and the concave block 620 drives the positioning plate 619 to approach the equipment body 10. The positioning plate 619 drives the sliding sleeve 617 to move, and the sliding sleeve 617 stretches the damping spring four 618, so that the two positioning plates 619 can better position and clamp the equipment body 10, reduce the slippage of the equipment body 10, and improve the production quality.

[0066] Insert the top of the vertical rod 99 into the inner top surface of the top frame 8, and then insert and fix the bottom of the vertical rod 99 into the top of the cross rod 91. By rotating the rotating sleeve 92, the rotating sleeve 92 drives the double-headed screw 93 to rotate. The rotation of the double-headed screw 93 causes the clamping sleeve 94 to slide out from the inside of the cross rod 91, thereby clamping the clamping sleeve 94 into the slot 97, and the elastic clamping block 98 pops out to assist in limiting. The cross rod 91 is fixed to the installation frame 7 through the positioning bolt 910, completing the installation of the cross rod 91 and the vertical rod 99.

[0067] The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0068] Although the present application has been described in detail with reference to the foregoing embodiments, the technical solutions recorded in the foregoing embodiments can be modified, or some of the technical features can be replaced by equivalent features, by those skilled in the art, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A clean room microseismic structure, comprising a structure frame (1), a device body (10) and a base plate (2) fixedly installed at the bottom of the structure frame (1), the inner bottom surface of the base plate (2) is paved with a rubber shock pad (3), the top of the rubber shock pad (3) is fixedly installed with a lower plate (4), and the top of the lower plate (4) is fixedly connected with a mounting plate (5) through a connecting rod; characterized in that Further comprising: the top of the mounting plate (5) is fixedly installed with a mounting frame (7) through a stand column, the top of the mounting frame (7) is fixedly connected with a top frame (8), the inside of the mounting plate (5) is provided with a protection assembly (6), and the inside of the mounting frame (7) is provided with a mounting assembly (9); the protection assembly (6) comprises square grooves (61) opened in the inside of the mounting plate (5), the number of the square grooves (61) is not less than four, the inside of the square groove (61) is slidably connected with a fixed plate (62), the top of the fixed plate (62) is fixedly connected with a buffer pad layer (63), the device body (10) is installed at the top of the buffer pad layer (63), the bottom of the fixed plate (62) is fixedly connected with a shock pad (64) in a symmetrical mode, the bottom of the shock pad (64) is symmetrically installed with a mounting sleeve (65) on both sides, and the inner wall of the mounting sleeve (65) and the shock pad (64) are fixedly installed with a damping spring I (66). The mounting sleeve (65) is provided with four, the center of the four mounting sleeves (65) is fixedly connected with a same middle plate (67), the bottom of the middle plate (67) is fixedly connected with a horizontal plate (69), the horizontal plate (69) is slidably connected with the lower plate (4), the two sides of the horizontal plate (69) are fixedly installed with a damping spring II (610) in a symmetrical mode, the side, away from the middle plate (67), of the mounting sleeve (65) is fixedly connected with a side plate (611), and the top of the side plate (611) is fixedly connected with a sleeve (612). The inside of the sleeve (612) is slidably connected with a sliding rod (613), the sliding rod (613) is slidably connected with the mounting plate (5), the inner bottom surface of the sleeve (612) is fixedly installed with a damping spring III (614), the top end of the sliding rod (613) is fixedly connected with a pressing block (615), the top of the mounting plate (5) is fixedly connected with an L-shaped rod (616) in a symmetrical mode, one side of the L-shaped rod (616) is slidably connected with a sliding sleeve (617), the inside of the sliding sleeve (617) is fixedly installed with a damping spring IV (618) in a horizontal mode, and one end of the sliding sleeve (617) is fixedly connected with a positioning plate (619). The side, close to the sliding sleeve (617), of the positioning plate (619) is fixedly connected with a concave block (620) at the lower part, the inclined surface of the pressing block (615) and the concave block (620) abut against each other, the bottom of the fixed plate (62) is fixedly connected with a lower rod (621) at the middle, the bottom end of the lower rod (621) is fixedly connected with a pressure plate (622), and the top of the middle plate (67) is fixedly installed with a damping spring V (623). The top end of the damping spring five (623) is fixedly connected with the pressing disc (622), the top of the middle plate (67) is fixedly connected with the side rod (624) in a symmetrical mode, the inner sides of the two side rods (624) are fixedly connected with the connecting sleeve (625), and the connecting sleeve (625) is in sliding connection with the lower rod (621).

2. A microseismic structure for a clean room according to claim 1, characterized in that: The damping spring one (66) is uniformly arranged, the damping spring one (66) is not less than four, the damping plate (64) can only move horizontally and transversely in the interior of the mounting sleeve (65), the fixed plate (62) is fixedly connected with the damping plate (64) through the connecting rod, the connecting rod is fixedly connected with the sliding rod (613), and the number of the connecting rod is same as that of the sliding rod (613).

3. A microseismic structure for a clean room according to claim 1, characterized in that: The top of the lower plate (4) is provided with the lower groove (68), the number of the lower groove (68) is same as that of the square groove (61), the bottom surface of the middle plate (67) is attached to the top surface of the lower plate (4), the horizontal plate (69) is in sliding connection with the lower groove (68), the damping spring two (610) is not less than four, and one end, away from the horizontal plate (69), of the damping spring two (610) is fixedly connected with the inner wall of the lower groove (68).

4. A microseismic structure for a clean room according to claim 1, characterized in that: The side plate (611) is provided with two in a symmetrical mode, the sleeve (612) is not less than two, and the top end of the damping spring three (614) is fixedly connected with the bottom end of the sliding rod (613).

5. A microseismic structure for a clean room according to claim 1, wherein: One end of the damping spring four (618) is fixedly connected with the L-shaped rod (616), the sliding sleeve (617) is located above the concave block (620), and the positioning plate (619) is not less than two.

6. A microseismic structure for a clean room according to claim 1, wherein: The mounting assembly (9) comprises a horizontal rod (91) and a vertical rod (99), a rotating sleeve (92) is rotatably installed at the middle portion of the horizontal rod (91), a double-head screw rod (93) is fixedly connected horizontally in the interior of the rotating sleeve (92), the double-head screw rod (93) is located in the interior of the horizontal rod (91), clamping sleeves (94) are sleeved on the outer sides of the double-head screw rod (93), and the inner side of the mounting frame (7) is provided with plug-in grooves (97) in a symmetrical mode.

7. A microseismic structure for a clean room according to claim 6, wherein: The clamping sleeves (94) are in clamping connection with the plug-in grooves (97), limit grooves (95) are symmetrically formed in the interior of the horizontal rod (91), limit blocks (96) are fixedly connected to the outer sides of the double-head screw rod (93) in a symmetrical mode, and the limit grooves (95) are in sliding connection with the limit blocks (96).

8. A microseismic structure for a clean room according to claim 7, characterized in that: Elastic clamping blocks (98) are slidably installed in the interiors of the clamping sleeves (94), the elastic clamping blocks (98) are in clamping connection with the plug-in grooves (97), positioning bolts (910) are fixedly installed on the bottom of the horizontal rod (91) in a symmetrical mode, and the top end of the vertical rod (99) is inserted into the inner top surface of the top frame (8).

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