A kind of defocus beam expanding system magnification detection device and method

Abstract

The present application relates to a kind of off-focus beam expander system magnification detection device and method, belong to the field of precision optical measurement.The device is mainly by optical vibration isolation platform, multiple tooth indexing table, mirror adjustment seat, mirror, off-focus beam expander system, autocollimator, autocollimator adjustment platform is constituted.The present application is by controlling the precise corner motion of multiple tooth indexing table, and using autocollimator to measure the angle change after off-focus beam expander system, the magnification of off-focus beam expander system is obtained by calculating angle ratio.The present application measurement device structure simplification, can realize the precise measurement of off-focus beam expander system magnification.

Description

Technical Field

[0001] This invention belongs to the field of precision optical measurement, specifically relating to a magnification detection device and method for a defocused beam expander system. Background Technology

[0002] With the rapid development of optical technology, defocused beam expansion systems are being used more and more widely. Magnification, as a key core technical indicator, needs to be precisely measured to guide the installation and debugging of the entire optical system.

[0003] Currently, commonly used methods for detecting the magnification of optical systems mainly include: the standard aperture method, the collimator method, and the front mirror method.

[0004] The standard aperture method primarily utilizes the principle of transverse magnification measurement. The collimator and front mirror method mainly calculates magnification by measuring the viewing angle. The standard aperture method has the advantages of simple structure and convenient measurement, but its accuracy is relatively low due to aperture aberrations. The collimator and front mirror method offers high measurement accuracy, but its structure is complex and adjustment is difficult. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a device and method for detecting the magnification of a defocused beam expander system in order to meet the requirements of magnification detection.

[0006] The technical solution of this invention is as follows: By controlling the precise angular movement of the multi-tooth indexing stage and reading the rotation angle α of the multi-tooth indexing stage, the angle change β after passing through the defocus beam expander system is measured using an autocollimator. The magnification of the defocus beam expander system is obtained by calculating the angle ratio β / α. The detection device includes: an optical vibration isolation platform, a multi-tooth indexing stage, a mirror adjustment seat, a mirror, a defocus beam expander system, an autocollimator, and an autocollimator adjustment platform. Wherein:

[0007] An optical vibration isolation platform is used to mount the entire testing device and isolate it from external environmental vibrations.

[0008] The multi-tooth indexing table is used to fix the reflector adjustment seat and drive the reflector to rotate to generate angular rotation, thereby achieving precise angular motion.

[0009] The reflector adjustment seat, fixed to the multi-tooth indexing table, is used to adjust the attitude of the reflector and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0010] A reflector, fixed to a reflector adjustment mount, is used to reflect the measurement light of the autocollimator.

[0011] The defocusing beam expander system, which is part of the system under test, is installed on the optical vibration isolation platform.

[0012] The autocollimator, fixed to the autocollimator adjustment platform, is used to measure the angle change after passing through the defocusing and beam expanding system.

[0013] The autocollimator adjustment platform, fixed to the optical vibration isolation platform, is used to achieve autocollimator attitude adjustment and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] (1) The detection device has a simple structure and is easy to adjust;

[0016] (2) The detection method of the present invention has high accuracy by taking advantage of the precision rotation of the multi-tooth indexing table and the high measurement accuracy of the autocollimator. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a magnification detection device for a defocused beam expander system.

[0018] In the figure, the attached reference numerals are:

[0019] 1. Optical vibration isolation platform; 2. Multi-tooth indexing table; 3. Reflector adjustment seat; 4. Reflector; 5. Defocus beam expander system; 6. Autocollimator; 7. Autocollimator adjustment platform. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other. To achieve the above objectives, this invention adopts the following technical solution.

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] The present invention provides a magnification detection device for a defocused beam expander system, such as... Figure 1 As shown, it includes the following components: optical vibration isolation platform 1, multi-tooth indexing table 2, mirror adjustment seat 3, mirror 4, defocusing beam expander system 5, autocollimator 6, and autocollimator adjustment platform 7.

[0023] Optical vibration isolation platform 1 is used to mount the entire detection device and achieve vibration isolation from the external environment.

[0024] The multi-tooth indexing table 2 is used to fix the reflector adjustment seat 3 and drive the reflector 4 to rotate to produce an angular rotation.

[0025] The reflector adjustment seat 3 is fixed to the multi-tooth indexing table 2 and is used to adjust the attitude of the reflector 4. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0026] The reflector 4 is fixed to the reflector adjustment seat 3 and is used to reflect the measurement light of the autocollimator 6.

[0027] The defocusing beam expansion system 5, which is part of the system under test, is installed on the optical vibration isolation platform 1.

[0028] The autocollimator 6 is fixed to the autocollimator adjustment platform 7 and is used to measure the angle change after passing through the defocusing and beam expanding system 5.

[0029] The autocollimator adjustment platform 7 is fixed to the optical vibration isolation platform 1 and is used to realize the attitude adjustment of the autocollimator 6. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0030] This invention also proposes a detection method based on the above-mentioned device, with the following specific steps:

[0031] Step (1) Assembly and adjustment of the detection device;

[0032] Adjust the optical axes of the autocollimator 6 and the defocusing beam expander system 5 to be coaxial. By adjusting the reflector adjustment seat 3, the measuring light of the autocollimator 6, which has passed through the reflector 4, is reflected back to the autocollimator 6 through the defocusing beam expander system 5. In order to ensure that the autocollimator 6 has a large measurement range, the measuring light reflected back to the autocollimator 6 should be adjusted as close as possible to the center of the autocollimator 6.

[0033] Step (2) Measurement by the detection device;

[0034] By controlling the precise angular movement of the multi-tooth indexing stage 2 and reading the rotation angle α of the multi-tooth indexing stage, the angle change β after passing through the defocusing beam expander system 5 is measured using an autocollimator 6. The magnification of the defocusing beam expander system 5 is obtained by calculating the angle ratio β / α. The average value of multiple measurements is taken as the final result of the magnification of the defocusing beam expander system 5.

[0035] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any transformations or substitutions that can be conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A magnification detection device for a defocused beam expander system, characterized in that, include: Optical vibration isolation platform, multi-tooth indexing table, mirror adjustment mount, mirror, defocusing beam expander system, autocollimator, autocollimator adjustment platform; among which: An optical vibration isolation platform is used to mount the entire testing device and isolate it from external environmental vibrations. The multi-tooth indexing table is used to fix the reflector adjustment seat and drive the reflector to rotate to produce angular rotation, thereby achieving precise angular motion. The reflector adjustment seat, fixed to the multi-tooth indexing table, is used to adjust the attitude of the reflector and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ. A reflector, fixed to a reflector adjustment mount, is used to reflect the measurement light of the autocollimator; The defocusing beam expander system, which is part of the system under test, is installed on the optical vibration isolation platform; The autocollimator, fixed to the autocollimator adjustment platform, is used to measure the angular change after passing through the defocusing and beam expanding system; The autocollimator adjustment platform, fixed to the optical vibration isolation platform, is used to achieve autocollimator attitude adjustment and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

2. The magnification detection device for a defocused beam expander system according to claim 1, characterized in that: The reflector adjustment mount can achieve at least three-dimensional translation in X, Y, and Z directions, as well as θ. x θ z Two-dimensional tilt adjustment and three-dimensional translation have a resolution of less than 1μm and an adjustment range of ≥10mm; two-dimensional tilt adjustment has a resolution of 0.001° and an adjustment range of ≥3°.

3. A magnification detection device for a defocused beam expander system according to claim 1, characterized in that: The multi-tooth indexing table has a table size of not less than 100mm, an accuracy (peak-to-peak value) of not more than 0.3″, a repeatability accuracy of not more than 0.08″, and a load-bearing capacity of not less than 10kg.

4. A magnification detection device for a defocused beam expander system according to claim 1, characterized in that: The autocollimator adjustment platform can achieve at least three-dimensional translation in X, Y, and Z directions, as well as θ. x θ z Two-dimensional tilt adjustment and three-dimensional translation have a resolution of less than 1μm and an adjustment range of ≥10mm; two-dimensional tilt adjustment has a resolution of 0.001° and an adjustment range of ≥3°.

5. A magnification detection device for a defocused beam expander system according to claim 1, characterized in that: The autocollimator has a two-dimensional angle adjustment function and a two-dimensional angle measurement function. The measurement range is not less than 1000″×1000″, and the full-range measurement accuracy does not exceed 0.5″.

6. A detection method for the magnification detection device of the defocused beam expander system as described in any one of claims 1-5, characterized in that, The method includes the following: Step (1) Detection device assembly and adjustment; including: adjusting the optical axis of the autocollimator and the defocus beam expander system to be coaxial, adjusting the autocollimator measurement light that has passed through the reflector to be reflected back to the autocollimator through the defocus beam expander system by adjusting the reflector adjustment seat, and adjusting the reflected measurement light back to the center of the autocollimator; Step (2) Measurement by detection device: including: controlling the precision rotation of the multi-tooth indexing table and reading the rotation angle α of the multi-tooth indexing table, using an autocollimator to measure the angle change β after passing through the defocusing beam expansion system, calculating the angle ratio β / α to obtain the magnification of the defocusing beam expansion system, and taking the average value of multiple measurements as the final result of the magnification of the defocusing beam expansion system.

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