Apparatus for manufacturing glass particle deposits

Abstract

The invention provides a manufacturing device for a glass particle accumulation body, wherein the service life of a gas pipe is long. This glass fine particle deposition body is provided with: a rod-shaped burner for synthesizing glass fine particles; a burner table that supports the burner and is movable in a first direction in which the burner extends; a housing in which the burner and the burner base are disposed; and a plurality of gas pipes for supplying gas for synthesizing the glass particles from the frame body to the burner. The burner table has a first pipe fixing portion for fixing the gas pipes so as to be aligned in a second direction intersecting the first direction. The housing has a second pipe fixing portion for fixing the gas pipes so as to be aligned in the second direction. When viewed from a direction orthogonal to the first direction and the second direction, the gas pipes located between the first pipe fixing portion and the second pipe fixing portion do not intersect.

Description

Technical Field

[0001] The present disclosure relates to a device for producing a glass particle deposit. Background Art

[0002] Patent Document 1 discloses a method for producing a glass fine particle deposit.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2012-166992 Summary of the invention

[0006] Problem that the invention aims to solve

[0007] Patent Document 1 discloses that a plurality of burners are connected to gas pipes and a burner stand supporting the burners is moved in one direction. When glass particles ejected from the burners adhere to a target glass particle deposit, the diameter of the glass particle deposit increases, and therefore the burner stand needs to be appropriately moved so that the burners are separated from the glass particle deposit accordingly.

[0008] However, the movement of the burner station imposes a load on the gas piping, which can easily become one of the factors that accelerate the deterioration of the gas piping. The deteriorated gas piping needs to be replaced appropriately. Since the replacement of the gas piping requires several days of operation time and labor of the operator, in order to make the manufacturing equipment operate more efficiently, it is required to make the gas piping durable.

[0009] An object of the present disclosure is to provide an apparatus for producing a glass particle deposit having a long service life of a gas pipe.

[0010] Solutions for solving problems

[0011] A manufacturing apparatus for a glass particle deposit according to one embodiment of the present disclosure includes:

[0012] A rod-shaped burner synthesizes glass particles;

[0013] a burner table supporting the burner and being movable in a first direction in which the burner extends;

[0014] a frame in which the burner and the burner stage are arranged; and

[0015] A plurality of gas pipes for supplying gas for synthesizing glass particles from the frame to the burner,

[0016] The burner station includes a first pipe fixing portion for fixing the gas pipes so as to be arranged in a second direction intersecting the first direction.

[0017] The frame body includes a second pipe fixing portion for fixing the gas pipes so as to be aligned in the second direction.

[0018] When viewed from a direction perpendicular to the first direction and the second direction, the gas pipes located between the first pipe fixing portion and the second pipe fixing portion do not intersect.

[0019] Effects of the Invention

[0020] According to the configuration disclosed above, it is possible to provide a manufacturing apparatus for a glass particle deposit having a long service life of a gas pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of a device for producing a glass particle deposit.

[0022] Figure 2 yes Figure 1 Cross-sectional view of II-II.

[0023] Figure 3 It is a top view of a device for producing a glass particle deposit.

[0024] Figure 4 It is a schematic diagram of a manufacturing apparatus of a glass particle deposit according to a modification example.

[0025] Description of Reference Numerals

[0026] 1: manufacturing device, 10: frame, 11, 111: second piping fixing part, 20: reaction container, 21: exhaust port, 30: burner table, 30a: moving mechanism, 31: burner, 32, 132: gas piping, 32a: raw gas piping, 32b: external gas piping, 32c: internal gas piping, 33, 133: first piping fixing part, G: glass particle accumulation body, T: support rod. DETAILED DESCRIPTION

[0027] [Description of Embodiments of the Present Disclosure]

[0028] First, embodiments of the present disclosure are listed and described.

[0029] (1) A manufacturing apparatus for a glass particle deposit according to one embodiment of the present disclosure includes:

[0030] A rod-shaped burner synthesizes glass particles;

[0031] a burner table supporting the burner and being movable in a first direction in which the burner extends;

[0032] a frame in which the burner and the burner stage are arranged; and

[0033] A plurality of gas pipes for supplying gas for synthesizing glass particles from the frame to the burner,

[0034] The burner station includes a first pipe fixing portion for fixing the gas pipes so as to be arranged in a second direction intersecting the first direction.

[0035] The frame body includes a second pipe fixing portion for fixing the gas pipes so as to be aligned in the second direction.

[0036] When viewed from a direction perpendicular to the first direction and the second direction, the gas pipes located between the first pipe fixing portion and the second pipe fixing portion do not intersect.

[0037] According to the manufacturing device described above, since the gas pipe is fixed by the first pipe fixing portion and the second pipe fixing portion, the burner is prevented from being pulled by the gas pipe and being deviated in the direction in which the burner is facing. In addition, since the gas pipe between the first pipe fixing portion and the second pipe fixing portion does not cross, it is possible to prevent the gas pipes from contacting each other and rubbing and being damaged. As a result, since it is difficult to apply a load to the burner or the gas pipe, the period until the gas pipe is replaced is extended.

[0038] (2) In the apparatus for producing a glass fine particle deposit according to (1), it is preferred that

[0039] The burner is configured with multiple

[0040] The gas pipe connected to each of the burners is arranged so as not to come into contact with the gas pipe connected to other burners.

[0041] According to the above configuration, even when the manufacturing apparatus includes a plurality of burners, since the gas pipes connected to the respective burners do not contact each other, damage to the gas pipes due to contact can be suppressed.

[0042] (3) In the apparatus for producing a glass particle deposit according to (1) or (2), it is also possible that:

[0043] The gas piping is made of perfluoroalkoxyalkane (PFA).

[0044] Since PFA is light, it can prevent the burner from being pulled by the weight of the gas piping, and can also reduce equipment costs. In addition, PFA has excellent heat resistance and flexibility, so it is preferably used for gas piping that forms flames around the gas piping or needs to deform with the movement of the burner station.

[0045] (4) In any of the above-mentioned devices for producing a glass particle deposit, (1) to (3), it may be that:

[0046] A band heater is provided around the gas pipe for supplying the raw material gas to the burner in the gas pipe.

[0047] By providing a belt heater around the gas pipe for supplying the raw material gas, the raw material gas can be supplied to the burner at a more suitable temperature. At this time, although the belt heater may be disconnected when rubbed, in the manufacturing device disclosed in the present invention, since the gas pipes do not cross each other, the belt heater is not easy to rub, and the occurrence of disconnection of the belt heater can be suppressed.

[0048] (5) In any of the above-mentioned devices for producing a glass particle deposit, (1) to (4) above, it is also possible that:

[0049] The gas pipe between the first pipe fixing portion and the second pipe fixing portion extends from the first pipe fixing portion and the second pipe fixing portion toward the first direction and is arranged in a bent manner.

[0050] When the gas piping of the above-mentioned structure is observed from the vertical direction, the gas piping is arranged in a U-shape. At this time, even if the burner station moves in the first direction, the gas piping can easily follow the movement of the burner station, so it is not easy to apply a load to the gas piping. Since the gas piping is arranged in a U-shape even when the burner station moves, it is easy to maintain a state in which the gas piping is not easy to contact each other. In addition, the gas piping is not easy to contact the gas burner station, so it is not easy to be damaged.

[0051] (6) In the manufacturing device of the glass particle deposit according to (5), it is also possible that:

[0052] The position of the gas pipe on the inner peripheral side of the curved shape supported by the first pipe fixing portion is closer to the burner than the position of the gas pipe on the outer peripheral side of the curved shape supported by the first pipe fixing portion.

[0053] The lengths of the inner and outer gas pipes of the bent gas pipe may be different. In this case, the first pipe fixing portion supports the inner gas pipe of the bent shape at a position closer to the burner than the outer gas pipe of the bent shape, thereby reducing the difference in length between the inner gas pipe and the outer gas pipe between the first pipe fixing portion and the second pipe fixing portion, thereby suppressing the difference in deformation amount and shape of the inner gas pipe and the outer gas pipe caused by the movement of the burner station.

[0054] (7) In the device for producing a glass particle deposit according to (5) or (6), it may be that:

[0055] In the first direction, the position of the gas pipe on the inner peripheral side of the curved shape supported by the second pipe fixing portion is closer to the front end of the burner than the position of the gas pipe on the outer peripheral side of the curved shape supported by the second pipe fixing portion.

[0056] The lengths of the inner and outer gas pipes of the bent gas pipe may be different. In this case, the second pipe fixing portion supports the inner gas pipe of the bent shape at a position closer to the burner than the outer gas pipe of the bent shape, thereby reducing the difference in length between the inner gas pipe and the outer gas pipe between the first pipe fixing portion and the second pipe fixing portion, thereby suppressing the difference in deformation amount and shape of the inner gas pipe and the outer gas pipe caused by the movement of the burner station.

[0057] [Details of the embodiments of the present disclosure]

[0058] Hereinafter, an example of an embodiment of the manufacturing device of the glass particle deposit body involved in the present disclosure will be described with reference to the accompanying drawings. In the following description, even if there are different drawings, the same or equivalent elements are marked with the same reference numerals or names, and repeated descriptions are appropriately omitted. In addition, the dimensions of each component shown in each drawing are for the convenience of description and may be different from the actual dimensions of each component.

[0059] In addition, in the description of the present embodiment, for the sake of convenience, the "up-down direction", "left-right direction", and "front-back direction" are appropriately mentioned. Among them, the "up-down direction" refers to a direction including an "upward direction" and a "downward direction". The "left-right direction" refers to a direction including a "left direction" and a "right direction". The "front-back direction" refers to a direction including a "front direction" and a "rear direction". Reference symbol U shown in the figures described below indicates the upward direction. Reference symbol D indicates the downward direction. Reference symbol L indicates the left direction. Reference symbol R indicates the right direction. Reference symbol F indicates the front direction. Reference symbol B indicates the rear direction.

[0060] First, a manufacturing apparatus 1 of a glass particle deposit G according to the present embodiment will be described. Figure 1 1 is a schematic diagram of a manufacturing apparatus 1 for a glass particle deposit G. The manufacturing apparatus 1 is an apparatus for manufacturing a glass particle deposit G by depositing glass particles on a support rod T disposed inside the manufacturing apparatus 1. Figure 1 As shown, the production apparatus 1 includes a housing 10 , a reaction container 20 , and a burner stage 30 .

[0061] The housing 10 forms an outer shell of the production apparatus 1. The reaction container 20 and the burner stage 30 are arranged inside the housing 10.

[0062] The reaction container 20 is configured to be able to accommodate a support rod T therein. Glass particles are deposited on the support rod T inside the reaction container 20. The reaction container 20 is provided with an exhaust port 21 to exhaust the gas inside the reaction container 20 to the outside of the housing 10 when the glass particle deposit G is produced.

[0063] The burner stage 30 is configured to be able to arrange and hold a plurality of burners 31 in the vertical direction. In addition, a moving mechanism 30a capable of moving the burner stage 30 in the left-right direction (an example of the first direction) is provided at the lower portion of the burner stage 30. For example, the glass particle deposit G grows in the radial direction as the manufacturing proceeds, and therefore, the burner stage 30 moves in a direction away from the reaction container 20 (in the present embodiment, in the right direction). When the manufacturing of the glass particle deposit G is completed and the glass particle deposit G is taken out, the burner stage 30 returns to the original position, and thus moves in a direction close to the reaction container 20 (in the present embodiment, in the left direction).

[0064] In this embodiment, eight burners 31 are installed on the burner stage 30. The burner 31 is a hollow rod-shaped member and is installed on the burner stage 30 so that the tip of the burner 31 is arranged inside the reaction container 20.

[0065] The burner 31 generates glass particles by appropriately ejecting the raw material gas and the inert gas while generating flames. The raw material gas, the inert gas, the combustion gas, the combustion-supporting gas, and the like are supplied to the burner 31 .

[0066] The raw material gas is a gas containing silicon tetrachloride (SiCl4), germanium tetrachloride (GeCl4) as a dopant, etc. The raw material gas can be a mixed gas of various raw material gases such as SiCl4 and GeCl4 and other gases, or it can be only various raw material gases. The raw material gas of the mixed gas can also contain inert gas, combustion gas, combustion-supporting gas, etc. described later.

[0067] The inert gas is, for example, a gas containing argon (Ar), nitrogen (N2), etc. The combustion gas is, for example, a gas containing hydrogen (H2), and the combustion-supporting gas is a gas containing oxygen (O2), etc.

[0068] Next, use Figure 2 , Figure 3 The gas pipe 32 connected to the burner 31 will be described. Figure 2 yes Figure 1 Cross-sectional view of II-II. Figure 3 1 is a top view of a manufacturing apparatus 1 for a glass particle accumulation body G. Figure 2 The two-dot chain line in FIG. 1 shows in perspective a portion of the gas pipe 32 located on the front side compared to the cross-sectional view.

[0069] like Figure 2 , Figure 3 As shown, the burners 31 are connected to gas pipes 32. The gas pipes 32 are preferably made of perfluoroalkoxyalkane (PFA).

[0070] In this embodiment, one burner 31 is connected to at least three gas pipes 32. Raw gas, combustion gas, combustion-supporting gas, etc. for generating glass particles are supplied to the burner 31 through the gas pipes 32. A band heater for adjusting the temperature of the raw gas may be wound around the gas pipe 32 (raw gas pipe 32a) for supplying the raw gas.

[0071] like Figure 2 As shown, the gas piping 32 is connected to the burner 31 in a state of being arranged in the front-to-back direction (an example of the second direction). The gas piping 32 is further held by the first piping fixing portion 33 and the second piping fixing portion 11 while being kept in a state of being arranged in the front-to-back direction. The first piping fixing portion 33 and the second piping fixing portion 11 are components that support the gas piping 32 by sandwiching it from two directions (upward and downward in this embodiment) so that the gas piping 32 does not move. The first piping fixing portion 33 is provided on the burner stage 30. The second piping fixing portion 11 is provided on the frame 10.

[0072] At this time, the gas pipes 32 between the first pipe fixing portion 33 and the second pipe fixing portion 11 are kept not to cross. In addition, the gas pipes 32 not to cross means that when viewed from a direction (in this embodiment, the up-down direction) orthogonal to the first direction (in this embodiment, the left-right direction) and the second direction (in this embodiment, the front-back direction), the center lines of the gas pipes 32 in adjacent gas pipes 32 do not overlap each other.

[0073] In addition, if Figure 2 As shown, the gas pipe 32 connected to each of the plurality of burners 31 may be provided so as not to come into contact with the gas pipe 32 connected to the other burners 31 .

[0074] Moreover, if Figure 3 As shown, the gas pipe 32 between the first pipe fixing portion 33 and the second pipe fixing portion 11 preferably extends rightward from the first pipe fixing portion 33 and the second pipe fixing portion 11. In addition, the gas pipe 32 between the first pipe fixing portion 33 and the second pipe fixing portion 11 is preferably bent and arranged in a U-shape when viewed from above.

[0075] The first pipe fixing portion 33 may also be arranged to be inclined relative to the moving direction of the burner station 30. Figure 3As shown, in the bent gas pipe 32, the first pipe fixing portion 33 supports the inner gas pipe 32 (inner gas pipe 32c) at a position closer to the burner 31 than the position supporting the outer gas pipe 32 (outer gas pipe 32b).

[0076] Similarly, the second pipe fixing portion 11 may be arranged to be inclined with respect to the moving direction of the burner stage 30. For example, in the bent gas pipe 32, the second pipe fixing portion 11 supports the inner gas pipe 32c at a position closer to the front end of the burner 31 in the left-right direction than the outer gas pipe 32b.

[0077] In the case where the first pipe fixing portion and the second pipe fixing portion are not provided, the position of the gas pipe between the frame and the burner depends on the positional relationship between the opening of the gas pipe provided on the frame and the burner, so the burner stage and the gas pipe may come into contact with each other depending on the situation. In this state, when the burner stage attempts to move away from the reaction container, the gas pipe gets stuck at the contact portion with the burner stage, and thus the direction in which the burner is facing may be deviated.

[0078] In addition, the gas pipes are sometimes arranged in a cross state, such as when the gas pipes are arranged in a state of hanging downward. In this case, when the burner table moves in the left and right directions as the glass particle deposit is manufactured, the gas pipes come into contact with each other or the gas pipes come into contact with the burner table. In addition, when this operation is repeated, the gas pipes are sometimes damaged and need to be replaced.

[0079] In the manufacturing device 1 of the present embodiment, since the gas pipe 32 is fixed by the first pipe fixing portion 33 and the second pipe fixing portion 11, the burner 31 is prevented from being pulled by the gas pipe 32 and deviating in the direction in which the burner 31 is facing. In addition, since the gas pipe 32 between the first pipe fixing portion 33 and the second pipe fixing portion 11 does not cross, it is possible to prevent the gas pipes 32 from contacting each other and rubbing and being damaged. As a result, it is difficult to apply a load to the burner 31 and the gas pipe 32, so the period until the gas pipe 32 is replaced is prolonged.

[0080] Furthermore, in the present embodiment, even if a plurality of burners 31 are provided, since the gas pipes 32 connected to the respective burners 31 do not contact each other, damage to the gas pipes 32 due to contact can be suppressed.

[0081] The gas pipe 32 in this embodiment is made of perfluoroalkoxyalkane (PFA). Since PFA is a light material, it is possible to suppress the burner 31 from being pulled by the weight of the gas pipe 32, and the cost involved in the installation can be reduced. In addition, PFA has excellent heat resistance and flexibility, so it is suitable for forming a flame around the gas pipe 32 or for the gas pipe 32 that needs to be deformed as the burner station 30 moves.

[0082] In the present embodiment, a band heater is provided around the raw material gas pipe 32 a , so that the raw material gas can be supplied to the burner 31 at a more appropriate temperature.

[0083] When the band heaters repeatedly rub and contact each other, the frequency of the band heater disconnection increases. However, in this embodiment, since the gas pipes 32 do not cross each other, the band heaters are not easily rubbed, and the occurrence of the band heater disconnection is suppressed.

[0084] In the present embodiment, the gas pipe 32 is bent in a U-shape. At this time, even if the burner station 30 moves to the right, the gas pipe 32 can easily follow the movement of the burner station 30. In addition, by arranging the gas pipe 32 in a U-shape, not only the gas pipes 32 are unlikely to contact each other, but also the gas pipe 32 and the burner station 30 are unlikely to contact. Moreover, it is possible to suppress the bending radius of the gas pipe 32 from being locally reduced. As a result, the gas pipe 32 is less likely to be damaged.

[0085] In the present embodiment, the first pipe fixing portion 33 supports the curved inner gas pipe 32c at a position closer to the burner 31 than the curved outer gas pipe 32b. The outer gas pipe 32b and the inner gas pipe 32c of the curved gas pipe 32 are different in length. Since the inner gas pipe 32c is supported by the first pipe fixing portion 33 at a position closer to the burner 31 than the outer gas pipe 32b, the difference in the length of the gas pipe between the first pipe fixing portion 33 and the second pipe fixing portion 11 of the outer gas pipe 32b and the inner gas pipe 32c is reduced. Thus, the difference in the deformation amount and the deformed shape of the gas pipe on the inner and outer sides caused by the movement of the burner stage 30 can be suppressed.

[0086] In the present embodiment, the second pipe fixing portion 11 supports the curved inner gas pipe 32c at a position closer to the front end of the burner 31 in the left-right direction than the curved outer gas pipe 32b. In this case, the difference in the length of the gas pipes between the first pipe fixing portion 33 and the second pipe fixing portion 11 of the outer gas pipe 32b and the inner gas pipe 32c can be reduced, as in the first pipe fixing portion 33. Thus, the difference in the deformation amount and the deformed shape of the gas pipe 32 on the inner and outer sides caused by the movement of the burner stage 30 can be suppressed.

[0087] (Variation Example)

[0088] Next, use Figure 4 A manufacturing apparatus for a glass particle deposit according to a modified example will be described. In addition, descriptions of the same components as those of the present embodiment will be omitted.

[0089] Figure 4 FIG. 1 is a schematic diagram of a manufacturing apparatus for a glass particle deposit according to a modified example. Figure 4 As shown, the difference is that the gas pipe 132 of the modified example is connected to the burner 31 in a state of being arranged in the vertical direction. Therefore, the first pipe fixing portion 133 and the second pipe fixing portion 111 sandwich and support the gas pipe 132 from the front and rear directions.

[0090] In the modified example, since the gas pipes 132 are held so as not to intersect each other when viewed from the left and right direction, the same effects as those of the manufacturing apparatus according to the present embodiment can be obtained.

[0091] Next, a comparison between the present embodiment and a comparative example will be described.

[0092] (Manufacturing apparatus of comparative example)

[0093] In the manufacturing device of the comparative example, a metal flexible pipe is used for the gas piping. In addition, the gas piping is not supported by the first piping fixing part and the second piping fixing part. The metal flexible pipe is heavier than PFA and is not supported by the first piping fixing part and the second piping fixing part, so it hangs down, and the gas piping crosses each other and contacts the burner table.

[0094] [Table 1]

[0095]

[0096] (Comparison between Comparative Example and the Present Embodiment)

[0097] The results of comparing the manufacturing apparatus of the present embodiment with the manufacturing apparatus of the comparative example are shown in Table 1. As shown in Table 1, in the manufacturing apparatus according to the comparative example, unlike the manufacturing apparatus of the present embodiment, the gas pipes and the gas pipes and the burner stage are in contact with each other. In addition, in the comparative example, the bending radius is partially 50 mm, and compared with the present embodiment (200 mm), there is a portion where the bending radius is locally smaller in the manufacturing apparatus of the comparative example.

[0098] At this time, in the comparative example, sometimes the gas piping is stuck on the burner table and the direction of the burner is offset, and the accumulation position of the glass particles is sometimes offset by about 1 mm, but in the present embodiment, the accumulation position is not offset. In addition, in the manufacturing device of the comparative example, due to the damage caused by the contact of the gas piping, it is necessary to replace the gas piping at a rate of about once a year. However, in the manufacturing device of the present embodiment, the gas piping is replaced about once every three years, and the life of the gas piping is longer. Moreover, the cost involved in the replacement of the gas piping once can be suppressed to about half in the present embodiment relative to the comparative example. Regarding the raw materials used in the gas piping, the PFA used in the present embodiment is generally cheaper than the metal flexible pipe used in the comparative example, so the cost associated with the replacement can also be suppressed.

[0099] Thus, in the manufacturing apparatus according to the present embodiment, it was confirmed that the gas piping can be made more durable than in the comparative example. In addition, it was confirmed that the cost associated with replacement of the gas piping can be reduced.

[0100] The present invention has been described in detail with reference to specific embodiments, but it is obvious to those skilled in the art that various changes or modifications can be made without departing from the concept and scope of the present invention. In addition, the number, position, shape, etc. of the components described above are not limited to the above embodiments, and can be changed to the preferred number, position, shape, etc. in the implementation of the present invention. In addition, the elements included in the examples described above can be combined with each other.

[0101] For example, in the present embodiment, the gas piping is connected to the burner in the front-to-back direction, and in the modified example, the gas piping is connected to the burner in the up-down direction. However, the gas piping may be connected to the burner in a state of being arranged obliquely with respect to the front-to-back direction and the up-down direction.

Claims

1. A device for manufacturing a glass particle deposit, comprising: A rod-shaped burner synthesizes glass particles; a burner table supporting the burner and being movable in a first direction in which the burner extends; a frame in which the burner and the burner stage are arranged; and A plurality of gas pipes for supplying gas for synthesizing glass particles from the frame to the burner, The burner station includes a first pipe fixing portion for fixing the gas pipes so as to be arranged in a second direction intersecting the first direction. The frame body includes a second pipe fixing portion for fixing the gas pipes so as to be aligned in the second direction. When viewed from a direction perpendicular to the first direction and the second direction, the gas pipes located between the first pipe fixing portion and the second pipe fixing portion do not intersect.

2. The manufacturing device of the glass particle deposit according to claim 1, wherein: The burner is configured with multiple The gas pipe connected to each of the burners is arranged so as not to come into contact with the gas pipe connected to other burners.

3. The manufacturing device of the glass particle deposit according to claim 1 or 2, wherein: The gas piping is made of perfluoroalkoxyalkane (PFA).

4. The manufacturing device of the glass particle deposit according to claim 1 or 2, wherein: A band heater is provided around the gas pipe for supplying the raw material gas to the burner in the gas pipe.

5. The manufacturing device of the glass particle deposit according to claim 1 or 2, wherein: The gas pipe between the first pipe fixing portion and the second pipe fixing portion extends from the first pipe fixing portion and the second pipe fixing portion toward the first direction and is arranged in a bent manner.

6. The manufacturing device of the glass particle deposit according to claim 5, wherein: The position of the gas pipe on the inner peripheral side of the curved shape supported by the first pipe fixing portion is closer to the burner than the position of the gas pipe on the outer peripheral side of the curved shape supported by the first pipe fixing portion.

7. The manufacturing device of the glass particle deposit according to claim 5, wherein: In the first direction, the position of the gas pipe on the inner peripheral side of the curved shape supported by the second pipe fixing portion is closer to the front end of the burner than the position of the gas pipe on the outer peripheral side of the curved shape supported by the second pipe fixing portion.

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