A shielding mold and positioning device for ceramic ring fusion

Abstract

This invention discloses a shielding mold and positioning device for ceramic ring spraying. The ceramic ring includes a ceramic ring body, which has an arc-shaped portion, a stepped portion, and an L-shaped portion arranged sequentially from the inside to the outside. The arc-shaped portion consists of a top surface portion and an arc-shaped surface portion, with the junction of the top surface portion and the arc-shaped surface portion forming the inner spraying boundary. The L-shaped portion consists of a horizontal portion and a vertical portion, with a concave annular groove at the top of the vertical portion. The side of the concave annular groove away from the arc-shaped portion, which connects with the top surface of the vertical portion, forms the outer spraying boundary. The shielding mold includes an annular inner boundary shielding mold and an outer boundary shielding mold. The outer side wall of the inner boundary shielding mold has a first step that matches the top surface portion and side wall within the inner spraying boundary of the arc-shaped portion. The inner side wall of the outer boundary shielding mold has a second step that matches the top surface and side wall outside the outer spraying boundary of the L-shaped portion. This invention ensures a clear and accurate spraying boundary for the ceramic ring, thus ensuring a high yield rate.

Description

Technical Field

[0001] This invention relates to the field of surface spraying technology for ceramic rings, and more specifically to a shielding mold and positioning device for ceramic ring melting and spraying. Background Technology

[0002] Melt spraying is a surface thermal spraying technology. After a series of pretreatments such as sandblasting and cleaning, molten melt spray coating droplets are sprayed onto the substrate surface through airflow. The mechanical bonding force of the coating cooling and spreading is used to cover the substrate surface with a relatively uniform and rough coating.

[0003] Semiconductor physical vapor deposition (SPV) processes adsorb a certain thickness of sputtered substances such as metals, oxides, and organic matter onto the surface of components. To increase the component's ability to adsorb these deposits and reduce defects such as peeling and particle abnormalities in later stages of the process, arc spraying is used during the component cleaning and regeneration process. Arc spraying, or ARC spraying, works by using two aluminum wires, one carrying positive and the other negative charges, to generate an electric arc upon contact. The high temperature of the arc instantly melts the wires, which are then atomized by compressed air and sprayed onto the substrate surface.

[0004] Ceramic rings are a commonly used material in semiconductor reaction chambers. The control of microparticles in semiconductor reaction chambers is very strict. Therefore, in addition to high-quality cleaning, ceramic rings must be coated with an aluminum coating layer by a molten lamination process before use to enhance the control of microparticles.

[0005] like Figure 1 As shown, the ceramic ring includes a ceramic ring body 1. The ceramic ring body 1 is provided with an arc-shaped part 11, a stepped part 12 and an L-shaped part 13 from the inside to the outside. The arc-shaped part 11 is composed of a top surface part and an arc surface part. The junction of the top surface part and the arc surface part is the inner boundary of the molten area. The L-shaped part 13 is composed of a horizontal part and a vertical part. The top of the vertical part is provided with a concave annular groove. The side of the concave annular groove away from the arc-shaped part 11 is connected to the top surface of the vertical part, which is the outer boundary of the molten area. The area between the inner boundary of the molten area and the outer boundary of the molten area is the molten area. The molten area of ​​the ceramic ring body 1 needs to be molten.

[0006] Therefore, ceramic rings do not require comprehensive aluminum spraying. To prevent unnecessary rework caused by spraying into areas that should not be sprayed during the process, and to ensure the quality of ceramic rings, areas that do not require spraying must be shielded.

[0007] Traditional masking methods involve using melt-applied adhesive tape, which is applied to areas of the ceramic ring that do not require melt-applied coating as a form of isolation. Melt-applied adhesive tape is characterized by low tack, impact resistance, and high temperature resistance, making it suitable for melt-applied coating operations. However, this method has the following drawbacks:

[0008] 1. Because the tape has low viscosity, it may be blown off during the melt spraying process, resulting in loss of shielding effect and contamination of the parts that do not need to be sprayed, leading to repeated work.

[0009] 2. All tape covering work is done manually. Due to the complex internal structure of the ceramic ring, manual covering work takes a lot of time and cannot be done in a short period of time, resulting in low efficiency of manpower.

[0010] 3. Although the melt-blown tape is low-tack, there will still be residue when the tape is removed. If the subsequent removal work is not complete, an electric arc effect can easily occur when using ceramic rings, which will cause the micro-dust particles to get out of control.

[0011] 4. The ceramic ring is made of ceramic, which is much weaker than metal. The spraying process uses high temperature and high pressure to spray aluminum powder onto the ceramic ring. Even if the shielded area is protected by spraying tape, the ceramic ring cannot withstand the high temperature and high pressure of the spraying process. Damage to the ceramic ring often occurs during the spraying process, and the safety of the ceramic ring during the spraying process cannot be guaranteed.

[0012] 5. Because the tape is easily blown open and deformed, once the tape is blown open during the melt spraying process, it can easily lead to unclear and inaccurate melt spraying boundaries of the ceramic ring, making it impossible to guarantee the yield rate of the ceramic ring.

[0013] 6. During the lamination process, numerous sharp grains, commonly known as burrs, will remain on the surface of the lamination layer. When these grains adhere to the film, the small contact area causes film molecules to easily accumulate at the tips. In severe cases, this can lead to excessive particle counts or abnormal arcing during equipment use, affecting the normal service life of the components. Therefore, deburring is performed on the surface of the lamination layer after ceramic ring lamination. If the lamination boundary is not clear and accurate, it will result in excessive burrs, requiring operators to spend a significant amount of time on deburring (including inspection and trimming), increasing their workload.

[0014] Furthermore, to prevent the ceramic ring from moving during the melting and spraying process, a positioning device is used to limit the ceramic ring. Traditional positioning devices directly contact the outer wall of the ceramic ring. Since the ceramic ring is made of ceramic, direct contact with the positioning device may cause wear on the surface of the ceramic ring and affect its service life.

[0015] Therefore, the applicant provides a shielding mold and positioning device for ceramic ring spraying to solve the above problems. The shielding mold shields the areas of the ceramic ring that do not need to be sprayed, ensuring the safety of the ceramic ring and the clarity and accuracy of the spraying boundary. The positioning device contacts the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, improving the service life of the ceramic ring and ensuring the yield rate of the ceramic ring. Summary of the Invention

[0016] In view of the shortcomings of the prior art, the purpose of this invention is to provide a shielding mold and positioning device for ceramic ring melting and spraying.

[0017] To achieve the above objectives, the present invention adopts the following technical solution:

[0018] A shielding mold for ceramic ring spraying, the ceramic ring comprising a ceramic ring body having an arc-shaped portion, a stepped portion, and an L-shaped portion arranged sequentially from the inside out. The arc-shaped portion consists of a top surface portion and an arc-shaped surface portion, the junction of which forms the inner spraying boundary. The L-shaped portion consists of a horizontal portion and a vertical portion, the top of which has a concave annular groove. The side of the concave annular groove away from the arc-shaped portion, which connects with the top surface of the vertical portion, forms the outer spraying boundary. The area between the inner and outer spraying boundaries is the spraying area. The shielding mold includes an annular inner boundary shielding mold and an outer boundary shielding mold. The outer side wall of the inner boundary shielding mold has a first step that matches the top surface portion and side wall within the inner spraying boundary of the arc-shaped portion. The inner side wall of the inner boundary shielding mold is a vertical surface. The inner side wall of the outer boundary shielding mold has a second step that matches the top surface and side wall outside the outer spraying boundary of the L-shaped portion. The outer side wall of the outer boundary shielding mold is a vertical surface.

[0019] The ceramic ring body has a number of upwardly protruding locking blocks evenly arranged along the circumferential direction on the arc-shaped part, and the inner boundary shielding mold has a number of locking grooves that match the locking blocks evenly arranged along the circumferential direction on the outer side wall.

[0020] Furthermore, the shielding mold is made of LG mold steel.

[0021] A positioning device for ceramic ring welding includes a shielding mold as described above. The positioning device includes a protective housing containing a motor. A rotating shaft is mounted on the output end of the motor, passing through the top of the protective housing and extending to the top of the housing, where it is rotatably connected to the bottom of a rotating disk. The rotating disk has a plurality of placement platforms evenly distributed circumferentially. Near the center of the rotating disk, a plurality of inner straight grooves are evenly distributed circumferentially, and away from the center, a plurality of outer straight grooves are evenly distributed circumferentially. The inner and outer linear slides are spaced apart from each other. An inner rotating component is installed below the rotating disk and outside the rotating shaft. An inner positioning component that slides and engages with the inner rotating component is slidably disposed in the inner linear slide. An outer rotating component is installed above the protective box and outside the rotating shaft. The outer rotating component is located below the inner rotating component. An outer positioning component that slides and engages with the outer rotating component is slidably disposed in the outer linear slide. Snap-fit ​​components that can engage with the inner and outer rotating components are installed on both sides of the rotating shaft. A connecting component that can connect with the rotating shaft is installed at the bottom of the rotating disk.

[0022] Furthermore, the inner rotating assembly includes an inner annular plate located outside the rotating shaft. The top of the inner annular plate is provided with a first sleeve, which is rotatably connected to the bottom of the rotating disk. A plurality of inner arc-shaped plates are uniformly provided along the circumferential direction on the outer side wall of the inner annular plate. An inner arc-shaped groove is provided on the inner arc-shaped plate, and inner limiting grooves communicating with the inner arc-shaped grooves are provided on both sides of the inner arc-shaped plate.

[0023] Furthermore, the inner positioning component includes an inner moving rod that is slidably disposed in an inner linear groove, an inner positioning plate is installed on the top of the inner moving rod, the bottom of the inner moving rod extends into an inner arc-shaped groove, and inner limiting blocks that slide in cooperation with the inner limiting groove are installed on both sides of the lower part of the inner moving rod.

[0024] Furthermore, the outer rotating assembly includes an outer annular plate located outside the rotating shaft. The bottom of the outer annular plate is provided with a second sleeve, and the second sleeve is rotatably connected to the top of the protective box. Several outer arc-shaped plates are evenly provided on the outer side wall of the outer annular plate along the circumference. An outer arc-shaped groove is provided on the outer arc-shaped plate, and outer limiting grooves communicating with the outer arc-shaped grooves are provided on both sides of the outer arc-shaped plate.

[0025] Wherein, the outer arc-shaped plate and the inner arc-shaped plate have opposite arc-shaped deflection directions;

[0026] The outer annular plate and the inner annular plate have several snap-fit ​​grooves evenly distributed circumferentially on their inner sidewalls.

[0027] Furthermore, the external positioning component includes an external moving rod that is slidably disposed in an external linear groove, an external positioning plate is installed on the top of the external moving rod, the bottom of the external moving rod extends into an external arc groove, and external limiting blocks that slide in cooperation with the external arc groove are installed on both sides of the lower part of the external moving rod.

[0028] Furthermore, the snap-fit ​​assembly includes mounting cylinders installed on both sides of the rotating shaft. The mounting cylinders are provided with movable grooves, and sliders are slidably provided in the movable grooves. A sliding rod is installed on one side of the slider, and a snap-fit ​​block that engages with the snap-fit ​​groove is installed on one end of the sliding rod extending to the outside of the mounting cylinder. A spring is connected between the other side of the slider and the inner wall of the mounting cylinder.

[0029] Furthermore, an annular groove is provided on the upper part of the rotating shaft, the connecting component is located inside the first sleeve, and the connecting component can clamp the rotating shaft through the annular groove.

[0030] Furthermore, the connecting assembly includes a connecting rod installed at the bottom of the rotating disk, a telescopic component is installed on the side of the connecting rod facing the rotating shaft, and an arc-shaped clamping block capable of extending into the annular groove is installed on the telescopic end of the telescopic component.

[0031] Compared with the prior art, the present invention provides a shielding mold and positioning device for ceramic ring melting and shooting, which has the following beneficial effects:

[0032] 1. This invention prevents the tape from being blown apart during the melting process, thus avoiding repetitive work. It also ensures that the melting boundary of the ceramic ring is clear and accurate, guaranteeing the yield rate of the ceramic ring. Because the melting boundary of the ceramic ring is clear and accurate, the time for subsequent deburring operations will be greatly reduced (from 20 minutes for a single ceramic ring to 5 minutes), significantly reducing the labor intensity of the operators.

[0033] 2. The shielding mold of the present invention can be directly assembled with the ceramic ring, without the need to apply the melt-blown adhesive tape one by one in the area for shielding, which greatly reduces the working time of the operators (from 1 hour for assembling a single ceramic ring to 5 minutes), improves the work efficiency of the operators, and increases the production efficiency.

[0034] 3. The present invention uses a hardware device to shield the device, which completely eliminates the concern that residual adhesive may not be completely removed, and greatly reduces the possibility of arcing during use, which is of great help in maintaining the stability of production equipment.

[0035] 4. This invention uses a hardware shielding method to protect the ceramic ring, reducing the damage caused to the ceramic ring by the high temperature and high pressure external forces during the melt spraying process, and ensuring the safety of the ceramic ring during the melt spraying operation.

[0036] 5. The shielding mold of the present invention adopts a hardware device, the shielding mold will not deform and can be reused;

[0037] 6. After the ceramic ring of the present invention is fitted with the shielding mold, the positioning device contacts the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, improving the service life of the ceramic ring and ensuring the yield rate of the ceramic ring. Attached Figure Description

[0038] Figure 1 This is a schematic cross-sectional view of the ceramic ring body of the present invention;

[0039] Figure 2 This is a schematic diagram of the structure of the ceramic ring body and the shielding mold of the present invention.

[0040] Figure 3 This is a schematic cross-sectional view of the ceramic ring body and the shielding mold of the present invention.

[0041] Figure 4 yes Figure 3 Enlarged structural diagram at point A;

[0042] Figure 5 This is a rendering schematic diagram of the ceramic ring body and the masking mold of the present invention.

[0043] Figure 6 This is a front view cross-sectional structural diagram of the positioning device of the present invention;

[0044] Figure 7 This is a front view schematic diagram of the positioning device of the present invention;

[0045] Figure 8 This is a top view of the rotating disk of the present invention.

[0046] Figure 9 This is a top view of the internal rotating component of the present invention.

[0047] Figure 10 yes Figure 9 Enlarged structural diagram at point B;

[0048] Figure 11 This is a top view of the external rotating component of the present invention;

[0049] Figure 12 This is a top view of the connecting component of the present invention;

[0050] Figure 13 This is a schematic diagram of the internal positioning component of the present invention;

[0051] Figure 14 This is a schematic diagram of the external positioning component of the present invention.

[0052] Markings in the diagram: 1. Ceramic ring body; 11. Arc-shaped part; 12. Stepped part; 13. L-shaped part; 14. Locking block; 2. Inner boundary shielding mold; 21. First step; 22. Locking groove; 3. Outer boundary shielding mold; 31. Second step; 4. Protective box; 5. Motor; 6. Rotating shaft; 7. Rotating disk; 8. Placement platform; 9. Inner straight slide groove; 10. Outer straight slide groove; 15. Inner rotating assembly; 151. Inner annular plate; 152. First sleeve; 153. Inner arc-shaped plate; 154. Inner arc-shaped groove; 155. Inner limiting groove; 16. Inner positioning assembly; 161. Inner moving rod; 16 2. Inner positioning plate; 163. Inner limiting block; 17. Outer rotating assembly; 171. Outer annular plate; 172. Second sleeve; 173. Outer arc plate; 174. Outer arc groove; 175. Outer limiting groove; 18. Outer positioning assembly; 181. Outer moving rod; 182. Outer positioning plate; 183. Outer limiting block; 19. Snap-fit ​​assembly; 191. Mounting cylinder; 192. Movable groove; 193. Slider; 194. Sliding rod; 195. Snap-fit ​​block; 196. Spring; 20. Connecting assembly; 201. Connecting rod; 202. Telescopic component; 203. Arc-shaped clamping block; 23. Snap-fit ​​groove; 24. Annular groove. Detailed Implementation

[0053] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0054] All standard parts used in this invention can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here.

[0055] It should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0056] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0057] In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0058] This invention provides a shielding mold for ceramic ring melting and spraying, see reference. Figures 1 to 5 The ceramic ring includes a ceramic ring body 1, which has an arc-shaped portion 11, a stepped portion 12, and an L-shaped portion 13 arranged sequentially from the inside to the outside. The arc-shaped portion 11 consists of a top surface portion and an arc surface portion, and the junction of the top surface portion and the arc surface portion is the inner boundary of the molten area. The L-shaped portion 13 consists of a horizontal portion and a vertical portion. The top of the vertical portion has a concave annular groove, and the junction of the side of the concave annular groove away from the arc-shaped portion 11 and the top surface of the vertical portion is the outer boundary of the molten area. The area between the inner boundary of the molten area and the outer boundary of the molten area is the molten area, and the molten area of ​​the ceramic ring body 1 needs to be molten. The shielding mold includes an annular inner boundary shielding mold 2 and an outer boundary shielding mold. Mold 3, the outer side wall of the inner boundary shielding mold 2 is provided with a first step 21 that matches the top surface and side wall of the arc-shaped part 11 within the inner boundary of the melt spraying, the inner side wall of the inner boundary shielding mold 2 is a vertical surface, the inner side wall of the outer boundary shielding mold 3 is provided with a second step 31 that matches the top surface and side wall of the L-shaped part 13 outside the outer boundary of the melt spraying, the outer side wall of the outer boundary shielding mold 3 is a vertical surface, the arc-shaped part 11 of the ceramic ring body 1 is provided with a plurality of upwardly protruding locking blocks 14 evenly arranged along the circumference, the outer side wall of the inner boundary shielding mold 2 is provided with a plurality of locking grooves 22 that match the locking blocks 14 evenly arranged along the circumference.

[0059] Specifically, the outer wall end of the inner boundary shielding mold 2 contacts the inner boundary of the melt spray; the inner wall end of the outer boundary shielding mold 3 contacts the outer boundary of the melt spray; the shape of the outer wall of the inner boundary shielding mold 2 and the inner wall of the outer boundary shielding mold 3 are matched according to the shape of the inner wall and the outer wall of the ceramic ring body 1; so that the inner boundary and the outer boundary of the melt spray are completely and smoothly shielded without damage or burrs, and the overall shape and position accuracy is ≤0.05mm; the installation gap of the installation reference of the inner boundary shielding mold 2 and the outer boundary shielding mold 3 is ≤0.05mm; in this embodiment, there are 5 locking blocks 14, and similarly, there are 5 locking slots 22, which are adjusted according to the actual ceramic ring body 1. Through the locking cooperation of the locking blocks 14 and the locking slots 22, the inner boundary shielding mold 2 is quickly positioned by utilizing the structural characteristics of the ceramic ring body 1 itself when assembling the inner boundary shielding mold 2.

[0060] Finally, the ceramic ring body 1 with the masking mold installed is placed on the positioning device. After being positioned, the spraying operation is carried out by the robot. During the spraying process, the positioning device rotates, thereby driving the ceramic ring body 1 to rotate, so as to uniformly spray the melting area of ​​the ceramic ring body 1 and ensure the spraying effect.

[0061] Reference Figures 1 to 5 In this embodiment, the shielding mold is made of LG mold steel.

[0062] Specifically, LG mold steel is a high-grade cold work mold steel. By replacing existing soft shielding (such as tape or other soft shielding materials) with hard metal shielding, it protects the ceramic ring, reduces the damage caused to the ceramic ring by the high temperature and high pressure external forces during the melt injection process, ensures the safety of the ceramic ring during the melt injection operation, and the shielding mold will not deform and can be reused.

[0063] Reference Figures 6 to 14A positioning device for ceramic ring welding includes a shielding mold as described above. The positioning device includes a protective box 4, a motor 5 installed inside the protective box 4, and a rotating shaft 6 mounted on the output end of the motor 5. The rotating shaft 6 passes through the top of the protective box 4 and extends to the top of the protective box 4, where it is rotatably connected to the bottom of a rotating disk 7. The rotating disk 7 has a plurality of placement platforms 8 evenly arranged circumferentially. Near the center of the rotating disk 7, a plurality of inner straight grooves 9 are evenly formed circumferentially. A plurality of outer straight grooves 10 are evenly formed circumferentially away from the center of the rotating disk 7. The inner straight grooves 9 and the outer straight grooves 10... The rotating disk 7 is arranged at intervals with the inner rotating component 15 installed below the rotating shaft 6. The inner linear slide groove 9 is provided with an inner positioning component 16 that slides and engages with the inner rotating component 15. The protective box 4 is installed above the rotating shaft 6 and outside the rotating shaft 6. The outer rotating component 17 is located below the inner rotating component 15. The outer linear slide groove 10 is provided with an outer positioning component 18 that slides and engages with the outer rotating component 17. The rotating shaft 6 is provided with snap-fit ​​components 19 on both sides that can snap into the inner rotating component 15 and the outer rotating component 17. The rotating disk 7 is provided with a connecting component 20 that can connect to the rotating shaft 6.

[0064] Specifically, the motor 5 is protected by the protective box 4 to prevent damage from the welding process; the motor 5 is preferably a servo motor, which is existing technology and will not be elaborated further here; the rotating shaft 6 is vertically arranged and rotatably connected to the protective box 4; the rotating shaft 6 is rotatably connected to the rotating disk 7; in this embodiment, the placement platform 8 is cuboid in shape, and there are 3 of them, which support the ceramic ring body 1; the inner straight groove 9 and the outer straight groove 10 are both rectangular in cross-section, and there are 3 of them in total, and the inner straight groove 9 and the outer straight groove 10 are mutually... The spacing is designed to prevent the inner positioning component 16 and the outer positioning component 18 from being on the same straight line, thus avoiding interference between the inner rotating component 15 and the outer positioning component 18. The inner rotating component 15 drives the inner positioning component 16 to slide in the inner straight groove 9, contacting and resisting the inner wall of the inner boundary shielding mold 2. This prevents the locking block 14 and the locking groove 22 from separating under external force during the melt spraying process, which would result in unclear and inaccurate inner boundaries during melt spraying, and also prevents the ceramic ring body 1 from moving during melt spraying. The outer rotating component 17 drives... The outer positioning component 18 slides in the outer linear groove 10, contacting and blocking the outer wall of the outer boundary shielding mold 3, thus limiting the ceramic ring body 1 and preventing it from moving during the melting process. It also prevents the outer boundary shielding mold 3 from moving under external force, which could result in an unclear and inaccurate melting boundary. By simultaneously positioning the inner boundary shielding mold 2 and the outer boundary shielding mold 3 using the inner positioning component 16 and the outer boundary shielding mold 18, the positioning effect is improved, ensuring the melting boundary of the ceramic ring body 1 (referring to the inner and outer boundaries of the melting process). The outer boundary is clear and accurate; the snap-fit ​​component 19 can be snapped into the inner rotating component 15 and the outer rotating component 17. When the rotating shaft 6 rotates, it can simultaneously drive the inner rotating component 15 and the outer rotating component 17 to rotate, thereby driving the inner positioning component 16 and the outer positioning component 18 to move and position the inner boundary masking mold 2 and the outer boundary masking mold 3; the connecting component 20 can be connected to the rotating shaft 6. When the rotating shaft 6 rotates, it can drive the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thus ensuring the spraying effect.

[0065] Reference Figure 9 In this embodiment, the inner rotating assembly 15 includes an inner annular plate 151 located outside the rotating shaft 6. The top of the inner annular plate 151 is provided with a first sleeve 152, and the first sleeve 152 is rotatably connected to the bottom of the rotating disk 7. A plurality of inner arc-shaped plates 153 are uniformly provided circumferentially on the outer side wall of the inner annular plate 151. An inner arc-shaped groove 154 is provided on the inner arc-shaped plate 153. Inner limiting grooves 155 communicating with the inner arc-shaped grooves 154 are provided on both sides of the inner arc-shaped plate 153.

[0066] Specifically, refer to Figure 9In this embodiment, there are 3 inner arc-shaped plates 153, which is the same as the number of inner straight grooves 9; similarly, there are also 3 inner arc-shaped grooves 154; the inner limiting groove 155 passes through both sides of the inner arc-shaped plate 153.

[0067] Reference Figure 9 and Figure 13 In this embodiment, the inner positioning component 16 includes an inner moving rod 161 slidably disposed in the inner linear groove 9. An inner positioning plate 162 is installed on the top of the inner moving rod 161, the bottom of the inner moving rod 161 extends into the inner arc groove 154, and inner limiting blocks 163 that slide in cooperation with the inner limiting groove 155 are installed on both sides of the lower part of the inner moving rod 161.

[0068] Specifically, the inner moving rod 161 is vertically arranged; the inner positioning assembly 16 is provided in 3 sets, namely, one set of inner positioning assembly 16 corresponds to an inner straight groove 9 and an inner arc plate 153; the bottom surface of the inner positioning plate 162 is flush with the top surface of the placement platform 8, and the inner positioning plate 162 contacts and abuts against the inner side wall of the inner boundary shielding mold 2. The side of the inner positioning plate 162 near the inner boundary shielding mold 2 is convex arc-shaped to reduce damage to the inner boundary shielding mold 2; the inner moving rod 161 is slidably arranged with the inner arc groove 154; through the sliding cooperation of the inner limiting block 163 and the inner limiting groove 155, the movement of the inner moving rod 161 is more stable.

[0069] Reference Figure 11 In this embodiment, the outer rotating assembly 17 includes an outer annular plate 171 located outside the rotating shaft 6. The bottom of the outer annular plate 171 is provided with a second sleeve 172, and the second sleeve 172 is rotatably connected to the top of the protective box 4. A plurality of outer arc plates 173 are uniformly provided along the circumference on the outer side wall of the outer annular plate 171. An outer arc groove 174 is provided on the outer arc plate 173. The outer limiting grooves 175 communicating with the outer arc grooves 174 are provided on both sides of the outer arc plate 173.

[0070] Specifically, refer to Figure 10 and Figure 11 In this embodiment, there are 3 outer arc plates 173, which is the same as the number of outer straight grooves 10; similarly, there are also 3 outer arc grooves 174; the outer limiting groove 175 passes through both sides of the outer arc plate 173.

[0071] Wherein, the outer arc plate 173 and the inner arc plate 153 have opposite arc deflection directions;

[0072] The outer annular plate 171 and the inner annular plate 151 are provided with a plurality of snap-fit ​​grooves 23 evenly distributed along the circumference on their inner sidewalls.

[0073] Specifically, the number of snap-fit ​​slots 23 is 4-8, corresponding to the snap-fit ​​assembly 19, and the number of snap-fit ​​slots 23 on the outer annular plate 171 and the inner annular plate 151 is 2-4 each.

[0074] Reference Figure 11 and Figure 14 In this embodiment, the external positioning component 18 includes an external moving rod 181 slidably disposed in the external linear groove 10. An external positioning plate 182 is installed on the top of the external moving rod 181, and the bottom of the external moving rod 181 extends into the external arc groove 174. External limiting blocks 183 that slide in cooperation with the external arc groove 174 are installed on both sides of the lower part of the external moving rod 181.

[0075] Specifically, the outer moving rod 181 is vertically arranged; there are three sets of outer positioning components 18, namely, one set of outer positioning components 18 corresponds to an outer straight groove 10 and an outer arc plate 173; the bottom surface of the outer positioning plate 182 is flush with the top surface of the placement platform 8, and the outer positioning plate 182 contacts and abuts against the outer side wall of the outer boundary shielding mold 3. The side of the outer positioning plate 182 near the outer boundary shielding mold 3 is concave arc-shaped to reduce damage to the outer boundary shielding mold 3; the outer moving rod 181 is slidably arranged with the outer arc groove 174; through the sliding cooperation between the outer limiting block 183 and the outer arc groove 174, the movement of the outer moving rod 181 is more stable.

[0076] Specifically, refer to Figure 9 and Figure 11 By setting the outer arc plate 173 and the inner arc plate 153 with opposite arc deflection directions, when the rotating shaft 6 rotates, the inner ring plate 151 and the outer ring plate 171 rotate in the same direction, thereby causing the inner arc plate 153 and the outer arc plate 173 to rotate in the same direction. This causes the inner moving rod 161 to move towards the inner boundary shielding mold 2 and the outer moving rod 181 to move towards the outer boundary shielding mold 3, thus clamping and positioning the inner boundary shielding mold 2 and the outer boundary shielding mold 3. Through reasonable design, collision interference between the outer moving rod 181 and the inner arc plate 153 can be avoided.

[0077] Reference Figure 10 In this embodiment, the snap-fit ​​assembly 19 includes mounting cylinders 191 mounted on both sides of the rotating shaft 6. The mounting cylinder 191 is provided with a movable groove 192. A slider 193 is slidably mounted in the movable groove 192. A sliding rod 194 is mounted on one side of the slider 193. A snap-fit ​​block 195 that engages with the snap-fit ​​groove 23 is mounted on one end of the sliding rod 194 that extends to the outside of the mounting cylinder 191. A spring 196 is connected between the other side of the slider 193 and the inner wall of the mounting cylinder 191.

[0078] Specifically, the snap-fit ​​assembly 19 has 4-8 sets, located on the upper and lower sides of the rotating shaft 6 respectively. The upper part corresponds to the snap-fit ​​groove 23 of the inner annular plate 151; the lower part corresponds to the snap-fit ​​groove 23 of the outer annular plate 171; the slide rod 194 passes through the mounting cylinder 191, and the slide rod 194 and the mounting cylinder 191 are in sliding fit; the snap-fit ​​groove 23 and the snap-fit ​​block 195 are matched in shape. Preferably, the snap-fit ​​groove 23 and the snap-fit ​​block 195 are both trapezoidal, and the angle between the inclined surfaces on both sides and the horizontal direction is 10°-15°; and the connection between the inclined surface and the short side is smoothly set to reduce the wear between the snap-fit ​​block 195, the inner annular plate 151 and the outer annular plate 171.

[0079] Initially, the locking groove 23 and the locking block 195 are engaged with each other. As the rotating shaft 6 rotates, the inner annular plate 151 and the outer annular plate 171 rotate in the same direction, ultimately moving the inner moving rod 161 and the outer moving rod 181. If either the inner positioning plate 162 or the outer positioning plate 182 contacts the shielding mold and is blocked, the rotating shaft 6 continues to rotate. The blocked moving rod cannot move, and the locking block 195 will disengage from the locking groove 23 due to the inclined surface, releasing the locking engagement. The spring 196 is compressed, while the other... The movable rod continues to move until another movable rod is blocked, at which point the rotating shaft 6 stops rotating. When it is necessary to release the positioning, the rotating shaft 6 rotates in the opposite direction. When the locking block 195 re-aligns with the locking groove 23, under the elastic force of the spring 196, the locking block 195 and the locking groove 23 re-engage, thereby driving the inner movable rod 161 and the outer movable rod 181 to release the positioning of the shielding mold. Through this structural design, the device can position ceramic ring bodies 1 of different diameters, which is convenient to use and improves practicality.

[0080] Reference Figure 12 In this embodiment, the upper part of the rotating shaft 6 is provided with an annular groove 24, the connecting component 20 is located inside the first sleeve 152, and the connecting component 20 can clamp the rotating shaft 6 through the annular groove 24.

[0081] Reference Figure 12 In this embodiment, the connecting component 20 includes a connecting rod 201 installed at the bottom of the rotating disk 7. A telescopic member 202 is installed on the side of the connecting rod 201 facing the rotating shaft 6. An arc-shaped clamping block 203 that can extend into the annular groove 24 is installed on the telescopic end of the telescopic member 202.

[0082] Specifically, the connecting assembly 20 has two sets located on both sides of the rotating shaft 6; the connecting rod 201 is located inside the first sleeve 152; the telescopic component 202 includes, but is not limited to, a small cylinder, a small electric push rod, etc.

[0083] After the inner positioning plate 162 and the outer positioning plate 182 are positioned, the rotating shaft 6 stops rotating, the telescopic component 202 extends out and enters the annular groove 24 through the arc-shaped clamping block 203 to clamp the rotating shaft 6. During the spraying process, the rotating shaft 6 rotates (in the same direction as the initial rotation), which drives the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thus ensuring the spraying effect. After the spraying is completed, the rotating shaft 6 stops rotating, the telescopic component 202 retracts, and drives the arc-shaped clamping block 203 to retract from the annular groove 24 and separate from the rotating shaft 6.

[0084] Working principle: The inner boundary shielding mold 2 is assembled onto the ceramic ring body 1 by the locking block 14 and the locking groove 22, and the outer side wall of the inner boundary shielding mold 2 is provided with a first step 21 that matches the top surface and side wall of the arc part 11 within the inner boundary of the melt spray. The outer boundary shielding mold 3 is assembled onto the ceramic ring body 1 by the second step 31 provided on the inner side wall of the outer boundary shielding mold 3 that matches the top surface and side wall of the L-shaped part 13 outside the outer boundary of the melt spray.

[0085] Then, the ceramic ring body 1 with the shielding mold installed is placed on the placement table 8. By starting the motor 5, the rotating shaft 6 is driven to rotate, causing the inner annular plate 151 and the outer annular plate 171 to rotate in the same direction. This causes the inner arc plate 153 and the outer arc plate 173 to rotate in the same direction, thereby causing the inner moving rod 161 to move towards the inner boundary shielding mold 2 and the outer moving rod 181 to move towards the outer boundary shielding mold 3. If either the inner positioning plate 162 or the outer positioning plate 182 contacts the shielding mold and is blocked, the rotating shaft 6 continues to rotate. The blocked moving rod cannot move, and the locking block 195 will disengage from the locking groove 23 due to the inclined surface, releasing the locking engagement. The spring 196 is compressed, and the other movable moving rod continues to move until the other moving rod is blocked. The rotating shaft 6 then stops rotating, thus completing the process of shielding the ceramic ring. The ceramic ring body 1 is positioned, and then the telescopic component 202 extends and enters the ring groove 24 through the arc-shaped clamping block 203 to clamp the rotating shaft 6. During the spraying process, the rotating shaft 6 rotates (in the same direction as the initial rotation), driving the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thus ensuring the spraying effect. After the spraying is completed, the rotating shaft 6 stops rotating, the telescopic component 202 retracts, and the arc-shaped clamping block 203 retracts from the ring groove 24 and separates from the rotating shaft 6. Then the rotating shaft 6 rotates in the opposite direction. When the locking block 195 is aligned with the locking groove 23 again, under the elastic force of the spring 196, the locking block 195 and the locking groove 23 re-engage, thereby driving the inner moving rod 161 and the outer moving rod 181 to release the positioning of the shielding mold, making it convenient for the operator to remove the ceramic ring body 1 with the shielding mold installed.

[0086] In summary, this invention prevents the tape from being blown apart during the melting process, thus avoiding repetitive work. It also ensures a clear and accurate melting boundary for the ceramic ring, guaranteeing a high yield rate. Because the melting boundary of the ceramic ring is clear and accurate, the subsequent deburring time is greatly reduced (from 20 minutes for a single ceramic ring to 5 minutes), significantly reducing the labor intensity of the workers.

[0087] The masking mold of the present invention can be directly assembled with the ceramic ring, eliminating the need to individually apply melt-blown adhesive tape to each ceramic ring in the area for masking. This greatly reduces the operator's working time (from 1 hour to 5 minutes for assembling a single ceramic ring), improves the operator's work efficiency, and increases production efficiency.

[0088] The present invention uses a hardware device to shield the device, which completely eliminates the concern that residual adhesive may not be completely removed, and greatly reduces the possibility of arcing during use, which is of great help in maintaining the stability of production equipment.

[0089] This invention uses a hardware shielding method to protect the ceramic ring, reducing the damage caused to the ceramic ring by the high temperature and high pressure external forces during the melt spraying process, and ensuring the safety of the ceramic ring during the melt spraying operation.

[0090] The shielding mold of the present invention adopts a hardware device, the shielding mold will not deform and can be reused;

[0091] After the ceramic ring of the present invention is fitted with the shielding mold, the positioning device contacts the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, improving the service life of the ceramic ring and ensuring the yield rate of the ceramic ring.

[0092] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0093] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of the present invention according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of the present invention. These technical solutions also fall within the scope of protection of the present invention.

Claims

1. A shielding mold for ceramic ring spraying, the ceramic ring comprising a ceramic ring body (1), the ceramic ring body (1) having an arc-shaped portion (11), a stepped portion (12), and an L-shaped portion (13) sequentially arranged from the inside to the outside, the arc-shaped portion (11) being composed of a top surface portion and an arc surface portion, the junction of the top surface portion and the arc surface portion being the inner boundary of the spraying process, the L-shaped portion (13) being composed of a horizontal portion and a vertical portion, the top of the vertical portion having a concave annular groove, the side of the concave annular groove away from the arc-shaped portion (11) being the junction of the side of the concave annular groove away from the top surface of the vertical portion being the outer boundary of the spraying process, the area between the inner boundary of the spraying process and the outer boundary of the spraying process being the spraying area, characterized in that, The shielding mold includes an inner boundary shielding mold (2) and an outer boundary shielding mold (3) in the shape of a ring. The outer side wall of the inner boundary shielding mold (2) is provided with a first step (21) that matches the top surface and side wall of the arc-shaped part (11) within the inner boundary of the melt spray. The inner side wall of the inner boundary shielding mold (2) is a vertical surface. The inner side wall of the outer boundary shielding mold (3) is provided with a second step (31) that matches the top surface and side wall of the L-shaped part (13) outside the outer boundary of the melt spray. The outer side wall of the outer boundary shielding mold (3) is a vertical surface. The ceramic ring body (1) has a number of upward protruding locking blocks (14) evenly arranged along the circumference of the arc-shaped part (11), and the inner boundary shielding mold (2) has a number of locking grooves (22) that match the locking blocks (14) evenly arranged along the circumference of the outer side wall. The shielding mold also includes a positioning device, which includes a protective box (4). A motor (5) is installed inside the protective box (4). A rotating shaft (6) is installed on the output end of the motor (5). The rotating shaft (6) passes through the top of the protective box (4) and extends to the top of the protective box (4) to be rotatably connected to the bottom of the rotating disk (7). Several placement platforms (8) are evenly arranged circumferentially on the rotating disk (7). Several inner straight grooves (9) are evenly opened circumferentially near the center of the rotating disk (7). Several outer straight grooves (10) are evenly opened circumferentially away from the center of the rotating disk (7). The inner straight grooves (9) and the outer straight grooves (10) are spaced apart from each other. The rotating disk (7) is located below and An inner rotating component (15) is installed outside the rotating shaft (6). An inner positioning component (16) that slides in the inner linear groove (9) and slides in cooperation with the inner rotating component (15) is installed. An outer rotating component (17) is installed above the protective box (4) and outside the rotating shaft (6). The outer rotating component (17) is located below the inner rotating component (15). An outer positioning component (18) that slides in the outer linear groove (10) and slides in cooperation with the outer rotating component (17) is installed. Snap-fit ​​components (19) that can snap into the inner rotating component (15) and the outer rotating component (17) are installed on both sides of the rotating shaft (6). A connecting component (20) that can connect to the rotating shaft (6) is installed at the bottom of the rotating disk (7). The inner rotating assembly (15) includes an inner annular plate (151) located outside the rotating shaft (6). The inner positioning component (16) includes an inner moving rod (161) that is slidably disposed in an inner linear slide groove (9), and an inner positioning plate (162) is installed on the top of the inner moving rod (161). The outer rotating assembly (17) includes an outer annular plate (171) located outside the rotating shaft (6); The outer annular plate (171) and the inner annular plate (151) have a number of snap-fit ​​grooves (23) evenly distributed along the circumference on their inner sidewalls. The external positioning component (18) includes an external moving rod (181) that is slidably disposed in an external linear slide groove (10), and an external positioning plate (182) is installed on the top of the external moving rod (181). The snap-fit ​​assembly (19) includes mounting cylinders (191) installed on both sides of the rotating shaft (6). The mounting cylinder (191) has a movable groove (192) inside. A slider (193) is slidably installed in the movable groove (192). A slide rod (194) is installed on one side of the slider (193). A snap-fit ​​block (195) that engages with the snap-fit ​​groove (23) is installed on one end of the slide rod (194) that extends to the outside of the mounting cylinder (191). A spring (196) is connected between the other side of the slider (193) and the inner wall of the mounting cylinder (191). The bottom surface of the inner positioning plate (162) is flush with the top surface of the placement platform (8), and the inner positioning plate (162) contacts and blocks the inner side wall of the inner boundary shielding mold (2). The side of the inner positioning plate (162) near the inner boundary shielding mold (2) is convex. The locking groove (23) and the locking block (195) engage with each other. As the rotating shaft (6) rotates, the inner annular plate (151) and the outer annular plate (171) rotate in the same direction, ultimately driving the inner moving rod (161) and the outer moving rod (181) to move. If either the inner positioning plate (162) or the outer positioning plate (182) first contacts the shielding mold and is blocked, the rotating shaft (6) continues to rotate, and the blocked moving rod cannot move. The locking block (195) will exit from the locking groove (23) due to the inclined surface. When the middle part is withdrawn, the locking engagement is released, the spring (196) is compressed, and the other movable rod continues to move until the other movable rod is blocked, and the rotating shaft (6) stops rotating. When it is necessary to release the positioning, the rotating shaft (6) rotates in the opposite direction. When the locking block (195) is aligned with the locking groove (23) again, under the elastic force of the spring (196), the locking block (195) and the locking groove (23) are re-engaged, thereby driving the inner moving rod (161) and the outer moving rod (181) to release the positioning of the shielding mold.

2. The shielding mold for ceramic ring melting and shooting according to claim 1, characterized in that, The shielding mold is made of LG mold steel.

3. The shielding mold for ceramic ring melting and shooting according to claim 1, characterized in that, The inner annular plate (151) is provided with a first sleeve (152) at the top, and the first sleeve (152) is rotatably connected to the bottom of the rotating disk (7). A number of inner arc plates (153) are uniformly provided on the outer side wall of the inner annular plate (151) along the circumferential direction. An inner arc groove (154) is provided on the inner arc plate (153). Inner limiting grooves (155) connected to the inner arc groove (154) are provided on both sides of the inner arc plate (153).

4. The shielding mold for ceramic ring melting and shooting according to claim 3, characterized in that, The bottom of the inner moving rod (161) extends into the inner arc groove (154), and inner limiting blocks (163) that slide in cooperation with the inner limiting groove (155) are installed on both sides of the lower part of the inner moving rod (161).

5. The shielding mold for ceramic ring melting and shooting according to claim 3, characterized in that, The bottom of the outer annular plate (171) is provided with a second sleeve (172), and the second sleeve (172) is rotatably connected to the top of the protective box (4). A number of outer arc plates (173) are evenly provided on the outer side wall of the outer annular plate (171) along the circumference. An outer arc groove (174) is provided on the outer arc plate (173). An outer limiting groove (175) connected to the outer arc groove (174) is provided on both sides of the outer arc plate (173).

6. The shielding mold for ceramic ring melting and shooting according to claim 5, characterized in that, The outer arc plate (173) and the inner arc plate (153) have opposite arc deflection directions.

7. The shielding mold for ceramic ring melting and shooting according to claim 6, characterized in that, The bottom of the outer moving rod (181) extends into the outer arc groove (174), and the lower sides of the outer moving rod (181) are equipped with outer limiting blocks (183) that slide in cooperation with the outer arc groove (174).

8. The shielding mold for ceramic ring melting and shooting according to claim 1, characterized in that, The upper part of the rotating shaft (6) is provided with an annular groove (24), the connecting component (20) is located inside the first sleeve (152), and the connecting component (20) can clamp the rotating shaft (6) through the annular groove (24).

9. The shielding mold for ceramic ring melting and shooting according to claim 8, characterized in that, The connecting assembly (20) includes a connecting rod (201) installed at the bottom of the rotating disk (7), and a telescopic member (202) is installed on the side of the connecting rod (201) facing the rotating shaft (6). An arc-shaped clamp (203) that can extend into the annular groove (24) is installed on the telescopic end of the telescopic member (202).

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