Temperature control method of base material not resistant to high temperature in vacuum chamber coating

Abstract

The invention discloses a temperature control method for a base material not resistant to high temperature in vacuum chamber coating, which comprises a heat exchange assembly arranged in a vacuum chamber and attached to the base material for heat exchange, and the heat exchange assembly is communicated with a cooling module and a heating module which are arranged outside the vacuum chamber and are arranged in parallel; the method comprises the following steps that S1, the temperature of heat exchange fluid is regulated and controlled; s2, vacuum coating and cooling; s3, heat preservation of the base material; the cooling module is arranged to cool the base material in the coating process, so that the temperature of the base material is taken away, the base material is coated at a low temperature, the base material which is not resistant to high temperature is protected in the coating process, the coating effect is prevented from being influenced by the high temperature, continuous operation can be achieved, meanwhile, the cooling time of the base material is shortened, and the production efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a temperature control method for coating a substrate that is not resistant to high temperatures in a vacuum chamber. Background Art

[0002] Vacuum coating is usually used for coating the surface of substrates and giving the surface of substrates a layer of target material properties. Since the principle of vacuum coating is to increase the energy value of the target material to form high-energy atomic groups or ion groups, a lot of heat will be generated in the process. If the temperature in the vacuum chamber is too high, it will affect the performance and appearance of the substrate that is not resistant to high temperatures. Vacuum coating usually ensures product quality through natural cooling, which is time-consuming and labor-intensive.

[0003] Vacuum coating refers to a type of coating that needs to be carried out under a high vacuum degree, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many other types. The substrate to be coated is called the substrate, and the raw material for coating is called the target. Vacuum coating is generally carried out by increasing the energy of the target material in a vacuum chamber to excite the target material into a high-energy state of atomic groups or ion groups, and finally depositing them on the surface of the substrate to form a film layer. The process of adding energy to the target material will generate a lot of heat. The longer the vacuum coating takes, the higher the temperature accumulated in the vacuum chamber, and the longer it takes to cool to room temperature.

[0004] Usually, the materials used for vacuum chamber coating are heat-resistant substrates or the coating time is relatively short, so there is no need to spend time considering the cooling problem of vacuum chamber coating. However, with the increasingly widespread application of vacuum chamber coating in the market, some products that are not resistant to high temperatures or require a long vacuum chamber coating time have been developed. Among them, non-high temperature resistant substrates refer to materials that will melt, deform or change performance within 1000°C. At present, vacuum chamber coating usually ensures product quality by reducing the single coating time and natural cooling. The cooling time is long, which affects production efficiency.

[0005] When the cooling temperature is low, condensation will occur on the surface due to the temperature difference between the substrate and the ambient temperature when the vacuum chamber door is opened, causing problems affecting the substrate. Summary of the invention

[0006] The object of the present invention is to provide a temperature control method for a high-temperature-sensitive substrate during coating in a vacuum chamber to solve the above-mentioned technical problems. A cooling module is provided to cool the substrate during the coating process, thereby taking away the temperature of the substrate and coating the substrate at a lower temperature, thereby protecting the high-temperature-sensitive substrate during the coating process and avoiding high temperatures that affect the coating effect. Therefore, continuous operation can be achieved and the cooling time of the substrate can be shortened, thereby improving production efficiency. A heating module is provided to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, thereby avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0007] In order to achieve the above-mentioned invention object, the technical solution adopted by the present invention is as follows:

[0008] A temperature control method for coating a substrate that is not resistant to high temperatures in a vacuum chamber, comprising a heat exchange component disposed in the vacuum chamber and in contact with the substrate for heat exchange, wherein the heat exchange component is connected to a cooling module and a heating module disposed outside the vacuum chamber and arranged in parallel;

[0009] The steps include:

[0010] S1, heat exchange fluid temperature control; the heat exchange fluid is cooled in the cooling module and heated in the heating module for standby;

[0011] S2, vacuum coating and cooling; attaching the substrate to the heat exchange component and coating the substrate in a vacuum state;

[0012] The heat exchange fluid in the cooling module is transported to the heat exchange component to continuously cool the substrate during coating;

[0013] S3, substrate insulation; after the vacuum coating is completed, the heat exchange component switches to the heat exchange fluid in the heating module to keep the temperature of the substrate and the temperature in the vacuum chamber at the same level as the ambient temperature to complete the coating. The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate during coating, thereby protecting the high-temperature-sensitive substrate during the coating process to avoid high temperatures affecting the coating effect, so that continuous operation can be achieved and the cooling time of the substrate is shortened, thereby improving production efficiency; after the coating is completed, the heat exchange fluid in the heating tank is switched to be transported to the heat exchange component to heat up or keep the substrate or vacuum chamber warm, and the temperature of the vacuum chamber and the temperature of the substrate are adjusted to the same level as the ambient temperature to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0014] The output end of the cooling module is connected to the output end of the heating module and output to the input end of the heat exchange component;

[0015] The input end of the cooling module is connected to the input end of the heating module and is connected to the output end of the heat exchange component;

[0016] The cooling module, the heating module, and the heat exchange component all have heat exchange fluid flowing inside. The cooling module is provided to cool the substrate during the coating process, thereby taking away the temperature of the substrate, so that the substrate is coated at a lower temperature, thereby protecting the substrate that is not resistant to high temperatures during the coating process, and avoiding the high temperature from affecting the coating effect, so that continuous operation can be achieved, and the cooling and cooling time of the substrate can be shortened, thereby improving production efficiency; the heating module is provided to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the substrate that has completed the coating, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets; the cooling module and the heating module provided in parallel are connected to the heat exchange component, and can be switched according to the need for heating or cooling adjustment, and have the same input end and the same output end, and use the same medium to adjust the heat exchange fluids of different temperatures, and switch according to the need after adjusting the temperature, and the switching speed is fast, the structure is compact, and the integration is high, and the output temperature is adjusted by refluxing the internal heat exchange fluid, and the adjustment speed is fast, which is conducive to quickly switching the output heat exchange fluid between the cooling module and the heating module according to the need for heating or cooling.

[0017] Preferably, the cooling module comprises a refrigeration section, a first control end connected to the refrigeration section and controlling whether a heat exchange fluid is input, and a second control end connected to the refrigeration section and controlling whether a heat exchange fluid is output;

[0018] The temperature increasing module comprises a temperature increasing section, a third control end connected to the temperature increasing section and controlling whether a heat exchange fluid is input or not, and a fourth control end connected to the temperature increasing section and controlling whether a heat exchange fluid is output or not;

[0019] The first control end is connected to the third control end and is connected to the output end of the heat exchange component;

[0020] The second control end is connected to the fourth control end and is connected to the input end of the heat exchange component. A first control end and a third control end with the same input port, and a second control end and a fourth control end with the same output port are provided; corresponding switching can be performed according to the need to heat up or cool down the substrate. If cooling is required, the heat exchange fluid flows back to the refrigeration section through the opened first control end to readjust the temperature, and is delivered to the heat exchange component through the opened second control end. At this time, the third control end and the fourth control end are both closed, and the temperature is readjusted by reflux and re-delivered to the heat exchange component in parallel, so that the substrate can be plated at a relatively low temperature to avoid high temperature affecting the effect of substrate coating, and cooling. The speed is fast, which is beneficial to improving production efficiency. Similarly, if heating or heat preservation is required, by closing the first control end and the second control end, opening the third control end and the fourth control end, the heat exchange fluid will flow back to the heating tank to adjust the temperature and then be delivered to the heat exchange component. This adjustment method can be switched according to needs, with high structural integration, and can quickly switch heat exchange fluids after different temperature controls. After coating, the switchable heat exchange fluid can adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the water molecules in the air condense into water droplets on the surface, which affects the substrate.

[0021] Preferably, the refrigeration section includes a refrigeration tank, a first conveying device, and a refrigeration controller which are connected to each other, and the output end of the refrigeration controller flows back into the refrigeration tank;

[0022] The second control end includes a first control valve connected to the output end of the refrigeration tank, and a second conveying device with two ends respectively connected to the first control valve and the heat exchange component;

[0023] The first control end includes a third control valve, and the third control valve is connected to the output end of the heat exchange component and the input end of the refrigeration tank. The first conveying device and the refrigeration controller are set, so that the heat exchange fluid in the refrigeration tank can flow back to the refrigeration tank under the temperature control of the refrigeration controller to adjust the temperature of the heat exchange fluid; the third control valve is used to control the input of the heat exchange fluid after the return, and the first control valve is used to control the output of the heat exchange fluid, and the corresponding output power is provided by the second conveying device. This input and output mode is conducive to fast switching. Under the conveyance of the second conveying device, the heat exchange fluid is transported to the heat exchange component to cool the substrate, improve the stability of the substrate during the coating process, shorten the cooling time, and improve production efficiency.

[0024] Preferably, the temperature rising section comprises a heating tank, and the heating tank is provided with a heating controller;

[0025] The fourth control end includes a second control valve connected to the output end of the heating tank, and a third conveying device whose two ends are respectively connected to the second control valve and the heat exchange component;

[0026] The third control end includes a fourth control valve, and the fourth control valve is connected to the output end of the heat exchange component and the input end of the heating tank. The third control valve and the fourth control valve are in a mutually connected state, and the output end of the heat exchange component is shunted to the third control valve and the fourth control valve in the same pipeline, so that it can be shunted to the refrigeration tank or the heating tank; the output end of the second conveying device and the output end of the third conveying device are connected to the same pipeline and output to the input end of the heat exchange component. A heating controller is set to control the temperature of the heat exchange fluid in the heating tank to a target temperature; a fourth control valve is used to control the input of the heat exchange fluid after reflux, and a second control valve is used to control the output of the heat exchange fluid, and a corresponding output power is provided by a third conveying device. Such input and output modes are conducive to rapid switching. The heat exchange fluid is conveyed to the heat exchange component by the third conveying device for heat exchange on the substrate, and a corresponding heating or heat preservation operation is performed. When the cooling temperature of the substrate is lower than the ambient temperature, the substrate is heated, and when the temperature is heated to the same level as the ambient temperature, the temperature is continuously kept warm until the vacuum door is opened to take out the substrate, so as to improve the substrate temperature to be kept at the same level as the ambient temperature after the coating is completed, and the temperature of the vacuum chamber to be kept at the same level as the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate is affected by the condensation of water molecules in the air into water droplets.

[0027] Preferably, the output end of the heat exchange component is connected to a return pipe, and the return pipe is connected to both the input end of the cooling module and the input end of the heating module;

[0028] The input end of the heat exchange component is connected to the delivery pipeline, and the output end of the cooling module and the output end of the heating module are both connected to the delivery pipeline. Specifically, the third control valve and the fourth control valve are interconnected, and the output end of the heat exchange component is diverted to the third control valve and the fourth control valve in the return pipeline, so that it can be diverted to the refrigeration tank or the heating tank; the output end of the second conveying device and the output end of the third conveying device are connected to the delivery pipeline and output to the input end of the heat exchange component. The heat exchange fluid after heat exchange through the heat exchange component is returned to the same input end of the third control valve and the fourth control valve through the refrigeration pipe. The third control valve or the fourth control valve is opened as needed to return the heat exchange fluid to the refrigeration tank or the heating tank. A delivery pipe is set and connected to the same output end of the first control valve and the second control valve. The first control valve or the second control valve is opened as needed to deliver the heat exchange fluid of the corresponding temperature to the heat exchange component. This switching method is simple and easy to implement. It is delivered through the same reflux pipe and the delivery pipe. The cycle heating state or cooling state is switched as needed. The overall structure is compact. After the coating is completed, the heat exchange fluid is output by switching to the heating tank. The output heat exchange fluid has a higher temperature and is delivered to the heat exchange component. The heat exchange fluid with a lower temperature that remains when the coating is completed is further pushed out and returned to the reflux pipe. The switching speed of the heat exchange fluid with a higher temperature and the heat exchange fluid with a lower temperature is fast, which is conducive to quickly entering the heating or insulation state and improving production efficiency.

[0029] Preferably, the heat exchange assembly includes a plurality of cold and heat exchange plates that are sequentially arranged and provided with internal spaces for heat exchange fluid circulation. The flow directions of the heat exchange fluids in the adjacent cold and heat exchange plates are oppositely arranged, and the outer surface of the cold and heat exchange plates arranged on the outermost side is in contact with the substrate. If the flow direction of the heat exchange fluid in the cold and heat exchange plates in contact with the substrate is vertically upward, then the flow direction of the heat exchange fluid in the sequentially arranged cold and heat exchange plates is downward, upward, downward, and so on; the interiors of the plurality of cold and heat exchange plates are connected; the cold and heat exchange plates in contact with the substrate receive the heat exchange fluids transported by the connected transport pipes, and the cold and heat exchange plates away from the substrate output the heat exchange fluids to the connected return pipes. The substrate is fitted with the heat exchange plate for heat exchange to complete the cooling of the substrate during the coating process or to perform heating and insulation operations after the coating is completed; the substrate is continuously cooled by the heat exchange plate during the coating process, thereby protecting the high-temperature-sensitive substrate during the coating process to avoid high temperatures affecting the coating effect, so continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; heating and insulation operations adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is consistent with the ambient temperature, avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface will be affected by the condensation of water molecules in the air into water droplets, and the substrate will be affected. Heat exchange is carried out by contact with the heat exchange plate, which is simple to implement and has good heat transfer effect, and can meet the temperature control requirements during and after coating.

[0030] Preferably, the bonding surface between the cold and hot exchange plate and the substrate is a plane or a curved surface. The cold and hot exchange plate and the substrate are tightly bonded, and the bonding surface of the cold and hot exchange plate is changed to a plane or a curved surface or a roller state according to the bonding surface of the substrate, in order to achieve a tight fit, increase the direct or indirect contact area between hot and cold, and improve the temperature control efficiency. If it is a flat metal block substrate, such as an aluminum profile, a hard plastic sheet, etc., the cold and hot exchange plate can be made into a plane state; if it is a flexible substrate, such as a plastic film, including but not limited to PP, PET, PI, etc., the cold and hot exchange plate can be made into a roller state and bonded to the film, in order to increase the direct contact area between hot and cold or the indirect contact area with the cold and hot exchange plate on the side away from the substrate, and improve the temperature control efficiency.

[0031] Preferably, the heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C.

[0032] Preferably, the refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be 20°C to minus 50°C.

[0033] Preferably, in step S1, before the film coating in the vacuum chamber begins, the first control valve, the third control valve and the second conveying device are opened; the heat exchange fluid prepared in the refrigeration tank is introduced into the heat exchange component in the vacuum chamber and the heat exchange fluid is returned to the refrigeration tank to form a circulation state, thereby reducing the temperature in the vacuum chamber;

[0034] In step S2, during the coating process, the heat exchange fluid prepared in the refrigeration tank is continuously passed into the heat exchange component in the vacuum chamber to cool the substrate, and the heat exchange fluid is returned to the refrigeration tank to form a circulation state;

[0035] In the step S3, after the vacuum coating is completed, the refrigeration tank continuously delivers the heat exchange fluid to cool down the coated substrate. When the temperature of the coated substrate is restored to the same level as the ambient temperature, the second conveying device, the first control valve and the third control valve are closed, and the second control valve, the fourth control valve and the third conveying device are opened. The heat exchange fluid in the heating tank is passed into the heat exchange component in the vacuum chamber to keep the substrate warm and the heat exchange fluid delivered by the refrigeration tank is discharged out of the vacuum chamber. The temperature in the vacuum chamber is restored to the same level as the ambient temperature, and the temperature of the substrate after coating is maintained at the same level as the ambient temperature to complete the coating.

[0036] This application has achieved beneficial technical effects:

[0037] The present invention is provided with a cooling module to cool the substrate during the coating process, thereby taking away the temperature of the substrate and coating the substrate at a lower temperature, thereby protecting the high-temperature-sensitive substrate during the coating process and avoiding the high temperature from affecting the coating effect, so that continuous operation can be achieved and the cooling time of the substrate can be shortened, thereby improving production efficiency; a heating module is provided to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, thereby avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 Shown is a schematic diagram of the structure of the temperature control system;

[0039] Figure 2 Shown is a schematic diagram of the layout structure of the heat exchange component.

[0040] Reference numerals

[0041] 1-substrate; 2-heat exchange component; 3-cooling module; 4-heating module; 5-reflux pipe; 6-delivery pipe; 31-refrigeration section; 32-first control end; 33-second control end; 41-heating section; 42-third control end; 43-fourth control end; 310-refrigeration tank; 311-first delivery equipment; 312-refrigeration controller; 331-first control valve; 332-second delivery equipment; 410-heating tank; 411-heating controller; 431-second control valve; 432-third delivery equipment; 21-cold and hot exchange plate. DETAILED DESCRIPTION

[0042] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0043] The technical solution of the present invention is described in detail below with specific embodiments.

[0044] Reference Figure 1 and 2 As shown, a temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber comprises a heat exchange component 2 disposed in the vacuum chamber and in contact with a substrate 1 for heat exchange, wherein the heat exchange component 2 is connected to a cooling module 3 and a heating module 4 disposed outside the vacuum chamber and in parallel;

[0045] The output end of the cooling module 3 is connected to the output end of the heating module 4 and output to the input end of the heat exchange component 2;

[0046] The input end of the cooling module 3 is connected to the input end of the heating module 4 and is connected to the output end of the heat exchange component 2;

[0047] The cooling module 3, the heating module 4 and the heat exchange assembly 2 all have heat exchange fluid flowing therein, wherein the medium of the heat exchange fluid uses ethylene glycol, propylene glycol and the like as the heat exchange medium. A cooling module 3 is provided to cool the substrate 1 during the coating process, thereby removing the temperature of the substrate 1 and coating the substrate 1 at a lower temperature, thereby protecting the substrate that is not resistant to high temperatures during the coating process and avoiding the coating effect caused by high temperatures, so that continuous operation can be achieved and the cooling time of the substrate can be shortened, thereby improving production efficiency; a heating module 4 is provided to adjust the temperature of the vacuum chamber and the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the substrate that has been coated, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets; the cooling module 3 and the heating module 4 provided in parallel are connected to the heat exchange component 2, and can be switched according to the need for heating or cooling adjustment, and have the same input end and the same output end, and use the same medium to adjust the heat exchange fluid of different temperatures, and switch according to the need after adjusting the temperature, and the switching speed is fast, the structure is compact, and the integration is high, and the output temperature is adjusted by refluxing the internal heat exchange fluid, and the adjustment speed is fast, which is conducive to quickly switching the output heat exchange fluid between the cooling module 3 and the heating module 4 according to the need for heating or cooling.

[0048] The cooling module 3 includes a cooling section 31, a first control end 32 connected to the cooling section 31 and controlling whether a heat exchange fluid is input, and a second control end 33 connected to the cooling section 31 and controlling whether a heat exchange fluid is output;

[0049] The temperature increasing module 4 includes a temperature increasing section 41, a third control terminal 42 connected to the temperature increasing section 41 and controlling whether the heat exchange fluid is input, and a fourth control terminal 43 connected to the temperature increasing section 42 and controlling whether the heat exchange fluid is output;

[0050] The first control end 32 is connected to the third control end 42 and is connected to the output end of the heat exchange component 2;

[0051] The second control end 33 is connected to the fourth control end 43 and is connected to the input end of the heat exchange component 2. A first control end 32 and a third control end 42 with the same input port, and a second control end 33 and a fourth control end 43 with the same output port are provided; corresponding switching can be performed according to the need to heat up or cool down the substrate 1. If cooling is required, the heat exchange fluid is refluxed to the refrigeration section 31 through the opened first control end 32 to readjust the temperature, and is delivered to the heat exchange component 2 through the opened second control end 33. At this time, the third control end 42 and the fourth control end 43 are both in the closed state, and the temperature is readjusted by reflux and re-delivered to the heat exchange component 2 in parallel, so that the substrate 1 can be plated at a relatively low temperature to avoid the influence of high temperature on the substrate plating. The film has an effect and a fast cooling speed, which is beneficial to improving production efficiency; similarly, if it is necessary to increase the temperature or keep warm, by closing the first control end 32 and the second control end 33, opening the third control end 42 and the fourth control end 43, the heat exchange fluid will flow back to the heating tank to adjust the temperature and then be transported to the heat exchange component; this adjustment method can be switched according to needs, with high structural integration, and can quickly switch the heat exchange fluid after different temperature controls. After the coating is completed, the switchable heat exchange fluid can adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0052] The refrigeration section 31 includes a refrigeration tank 310, a first conveying device 311, and a refrigeration controller 312, which are connected to each other. The output end of the refrigeration controller 312 flows back into the refrigeration tank 310.

[0053] The second control end 33 includes a first control valve 331 connected to the output end of the refrigeration tank 310, and a second conveying device 332 whose two ends are respectively connected to the first control valve 331 and the heat exchange component 2;

[0054] The first control end 32 includes a third control valve, which is connected to the output end of the heat exchange component 2 and the input end of the refrigeration tank 310. The first conveying device 311 and the refrigeration controller 312 are set, so that the heat exchange fluid in the refrigeration tank 310 can flow back to the refrigeration tank 310 under the temperature control of the refrigeration controller 312, and the temperature of the heat exchange fluid is adjusted; the third control valve is used to control the input of the heat exchange fluid after the return, and the first control valve 331 is used to control the output of the heat exchange fluid, and the corresponding output power is provided by the second conveying device 332. This input and output mode is conducive to fast switching. Under the conveyance of the second conveying device 332, the heat exchange fluid is transported to the heat exchange component 2 to cool the substrate 1, improve the stability of the substrate during the coating process, shorten the cooling time, and improve production efficiency.

[0055] The temperature rising section 41 includes a heating tank 410, and the heating tank 410 is provided with a heating controller 411;

[0056] The fourth control end 43 includes a second control valve 431 connected to the output end of the heating tank 410, and a third conveying device 432 whose two ends are respectively connected to the second control valve 431 and the heat exchange component 2;

[0057] The third control end 42 includes a fourth control valve, which is connected to the output end of the heat exchange component 2 and the input end of the heating tank 410. The third control valve and the fourth control valve are in a mutually connected state, and the output end of the heat exchange component 2 is shunted to the third control valve and the fourth control valve in the same pipeline, so that it can be shunted to the refrigeration tank 310 or the heating tank 410; the output end of the second conveying device 332 and the output end of the third conveying device 432 are connected to the same pipeline and output to the input end of the heat exchange component 2. A heating controller 411 is set to control the temperature of the heat exchange fluid in the heating tank 410 to a target temperature; a fourth control valve is used to control the input of the heat exchange fluid after reflux, and a second control valve 431 is used to control the output of the heat exchange fluid, and a corresponding output power is provided by a third conveying device 432. Such input and output modes are conducive to rapid switching. The heat exchange fluid is conveyed to the heat exchange component 2 by the third conveying device 432 to perform heat exchange on the substrate 1, and a corresponding heating or heat preservation operation is performed. When the cooling temperature of the substrate 1 is lower than the ambient temperature, it is heated, and when it is heated to the same temperature as the ambient temperature, it is kept warm until the vacuum door is opened to take out the substrate, so as to improve the substrate temperature to be kept equal to the ambient temperature after the coating is completed, and the temperature of the vacuum chamber to be kept equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0058] The output end of the heat exchange component 2 is connected to the return pipe 5, and the return pipe 5 is connected to the input end of the cooling module 3 and the input end of the heating module 4;

[0059] The input end of the heat exchange component 2 is connected to the delivery pipe 6, and the output end of the cooling module 3 and the output end of the heating module 4 are both connected to the delivery pipe 6. Specifically, the third control valve and the fourth control valve are in a state of mutual communication, and the output end of the heat exchange component 3 is diverted to the third control valve and the fourth control valve in the return pipe 5, so that it can be diverted to the refrigeration tank 310 or the heating tank 410; the output end of the second conveying device 332 and the output end of the third conveying device 432 are connected to the delivery pipe 6 and output to the input end of the heat exchange component 2. The heat exchange fluid after heat exchange through the heat exchange component 2 is returned to the same input end of the third control valve and the fourth control valve through the return pipe 5. The third control valve or the fourth control valve is opened as needed to return the heat exchange fluid to the refrigeration tank 310 or the heating tank 410; a delivery pipe 6 is provided and is connected to the same output end of the first control valve 331 and the second control valve 431. The first control valve 331 or the second control valve 431 is opened as needed to deliver the heat exchange fluid of the corresponding temperature to the heat exchange component 2. This switching method is simple and easy to implement. The heat exchange fluid is outputted through the heating tank 310 after the coating is completed. The outputted heat exchange fluid has a higher temperature and is transported to the heat exchange component 2. The heat exchange fluid with a lower temperature remaining when the coating is completed is further pushed out and refluxed to the return pipe 5. The switching speed of the heat exchange fluid with a higher temperature and the heat exchange fluid with a lower temperature is fast, which is conducive to quickly entering the heating or insulation state and improving production efficiency.

[0060] The heat exchange component 2 includes a plurality of cold and heat exchange plates 21 which are sequentially arranged and provided with internal spaces for heat exchange fluid circulation. The flow directions of the heat exchange fluids in the adjacent cold and heat exchange plates 21 are arranged in opposite directions, and the outer surface of the cold and heat exchange plate 21 arranged on the outermost side is in contact with the substrate 1. The heat exchange components 2 are arranged in a ring array in plurality. Specifically, the heat exchange components 2 are centered on the vacuum ion source 7, and are arranged in a ring array in plurality. If the flow direction of the heat exchange fluid in the cold and heat exchange plates 21 in contact with the substrate 1 is vertically upward, then the flow direction of the heat exchange fluid in the cold and heat exchange plates 21 arranged sequentially is downward, upward, downward, and so on; the plurality of cold and heat exchange plates 21 are internally connected; the cold and heat exchange plates 21 in contact with the substrate 1 receive the heat exchange fluid transported by the connected transport pipe 6, and the cold and heat exchange plates 21 away from the substrate 1 output the heat exchange fluid to the connected return pipe 5. The substrate 1 is fitted with the heat exchange plate 21 for heat exchange to complete the cooling of the substrate 1 during the coating process or to perform heating and insulation operations after the coating is completed; during the coating process, the substrate 1 is continuously cooled by the heat exchange plate 21, thereby protecting the high-temperature-sensitive substrate during the coating process to avoid high temperatures affecting the coating effect, so continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; heating and insulation operations adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is consistent with the ambient temperature, avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets, and heat exchange is performed by contacting the heat exchange plate 21, the implementation method is simple, the heat transfer effect is good, and the temperature control requirements during and after coating can be met.

[0061] The bonding surface between the cold and heat exchange plate 21 and the substrate 1 is a plane or a curved surface. The cold and heat exchange plate 21 and the substrate 1 are tightly fitted, and the bonding surface of the cold and heat exchange plate 21 is changed to a plane or a curved surface or a roller state according to the matching bonding surface of the substrate, in order to achieve a tight fit, increase the direct or indirect contact area between hot and cold, and improve the temperature control efficiency. If it is a flat metal block substrate, such as an aluminum profile, a hard plastic sheet, etc., the cold and heat exchange plate can be made into a flat state; if it is a flexible substrate, such as a plastic film, including but not limited to PP, PET, PI, etc., the cold and heat exchange plate can be made into a roller state and bonded to the film, in order to increase the direct contact area between hot and cold or the indirect contact area with the cold and heat exchange plate on the side away from the substrate, and improve the temperature control efficiency;

[0062] A temperature control method using any of the above temperature control systems comprises the following steps:

[0063] S1. Temperature control of heat exchange fluid; the heat exchange fluid is cooled in the refrigeration tank and heated in the heating tank for standby;

[0064] S2, vacuum coating and cooling; attaching the substrate to the heat exchange component and coating the substrate in a vacuum state;

[0065] The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate during coating;

[0066] S3, substrate insulation; after the vacuum coating is completed, the heat exchange component switches to the heat exchange fluid in the heating tank, so that the temperature of the substrate and the temperature in the vacuum chamber are kept at the same level as the ambient temperature, and the coating is completed. The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate during the coating process, thereby protecting the high-temperature-sensitive substrate during the coating process and avoiding high temperatures that affect the coating effect. Therefore, continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; after the coating is completed, the heat exchange fluid in the heating tank is switched to be transported to the heat exchange component to heat up or keep the substrate or vacuum chamber warm, and the temperature of the vacuum chamber and the temperature of the substrate are adjusted to the same level as the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0067] The heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C;

[0068] The refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be between 20°C and minus 50°C.

[0069] In the step S1, before the coating process starts in the vacuum chamber, the first control valve, the third control valve and the second conveying device are opened; the heat exchange fluid prepared by the refrigeration tank is introduced into the heat exchange assembly in the vacuum chamber and the heat exchange fluid is returned to the refrigeration tank to form a circulation state, thereby reducing the temperature in the vacuum chamber;

[0070] In step S2, during the coating process, the heat exchange fluid prepared in the refrigeration tank is continuously passed into the heat exchange component in the vacuum chamber to cool the substrate, and the heat exchange fluid is returned to the refrigeration tank to form a circulation state;

[0071] In the step S3, after the vacuum coating is completed, the refrigeration tank continuously delivers the heat exchange fluid to cool down the coated substrate. When the temperature of the coated substrate is restored to the same level as the ambient temperature, the second conveying device, the first control valve and the third control valve are closed, and the second control valve, the fourth control valve and the third conveying device are opened. The heat exchange fluid in the heating tank is passed into the heat exchange component in the vacuum chamber to keep the substrate warm and the heat exchange fluid delivered by the refrigeration tank is discharged out of the vacuum chamber. The temperature in the vacuum chamber is restored to the same level as the ambient temperature, and the temperature of the substrate after coating is maintained at the same level as the ambient temperature to complete the coating.

[0072] The present technical solution adopts a vacuum ion source to perform the coating operation; after the vacuum ion source is turned off, the vacuum coating is completed, and the heat exchange fluid is continuously delivered through the refrigeration tank to cool down the substrate after the coating is completed. The temperature of the vacuum chamber lacks a heat source because the ion source that has a heating effect is turned off, but the vacuum chamber is heated for a long time, and its internal temperature is at a high level, and the substrate after the coating is still at a high temperature level. Therefore, after the ion source is turned off, the heat exchange fluid output through the refrigeration tank is continued to be introduced to continuously cool the substrate after the coating is completed, so as to prevent the substrate after the coating from being heated to a temperature above its heat resistance level by the residual heat in the vacuum chamber, and at the same time cool down the temperature in the vacuum chamber;

[0073] When the temperature of the substrate to be coated is reduced to the same or close to the ambient temperature, the temperature in the vacuum chamber is at a relatively low level due to the long-term introduction of the heat exchange fluid transported from the refrigeration tank, and its temperature is lower than the ambient temperature. Even if the introduction of the cooled heat exchange fluid is stopped, the substrate after coating will be cooled by the temperature in the vacuum chamber, so that the temperature of the substrate after coating continues to drop. Therefore, the heat exchange fluid from the heating tank is switched to be introduced, and the temperature in the vacuum chamber is adjusted while the substrate after coating is kept warm, so that the temperature in the vacuum chamber is equal to or close to the ambient temperature. This avoids the problem of condensed water on the surface of the substrate due to the temperature of the substrate being equal to the ambient temperature and the temperature in the vacuum chamber being lower than the ambient temperature. At the same time, the substrate after coating is kept warm so that its temperature is equal to the ambient temperature, so as to avoid the problem of condensed water on the surface of the substrate due to the low temperature of the substrate when the vacuum chamber door is opened to take out the substrate after coating.

[0074] After the substrate temperature and the temperature inside the vacuum chamber are equal to the ambient temperature, the vacuum chamber door is opened to take out the substrate after coating; while achieving rapid cooling, the surface performance stability of the substrate after coating can be controlled; the heat of the substrate during the coating process is taken away by continuously introducing heat exchange fluid to cool the substrate.

[0075] The purpose of introducing low-temperature refrigerant is to protect the heat-sensitive substrate from being damaged by high temperature during the vacuum coating process. When the corresponding process coating is completed, the ion source with heating effect is turned off, and the heat exchange fluid from the refrigeration tank is continuously introduced to improve the cooling efficiency in the vacuum chamber so that the substrate that has been coated in the vacuum chamber tends to recover to the ambient temperature quickly. When the temperature in the vacuum chamber reaches the appropriate temperature, such as lower than the ambient temperature or close to the ambient temperature, the heat exchange fluid from the heating tank is switched to quickly discharge the low-temperature refrigerant from the vacuum chamber and quickly restore the vacuum chamber to the ambient temperature. This is to avoid affecting the performance of the substrate through process time control, and ensure the feasibility of coating the substrate that is not resistant to high temperature in the vacuum chamber on the basis of achieving vacuum chamber coating. If only the heat exchange fluid transported from the refrigeration tank is passed, a large amount of condensed water will be generated when the vacuum chamber door is opened, causing the substrate to be affected. The heat exchange fluid in the heating tank is introduced to discharge the heat exchange fluid transported from the refrigeration tank during the cooling process to ensure a dry environment in the vacuum chamber and protect the substrate from being affected; the high-temperature refrigerant is introduced to discharge the low-temperature refrigerant to ensure a dry environment in the vacuum chamber and protect the substrate from being affected; the ambient temperature is the ambient temperature outside the vacuum chamber.

[0076] During the heat exchange fluid standby process, the refrigeration controller and the first conveying device are turned on to provide the refrigeration tank with a heat exchange fluid at a lower temperature, or the heating controller is turned on to control the heating tank to heat the heat exchange fluid.

[0077] The first control valve, the second control valve, the third control valve and the fourth control valve are all electronic ball valves; the first conveying device, the second conveying device and the third conveying device are all pumps.

[0078] Table 1 is a temperature change record table of vacuum coating under this temperature control method, which records the temperature change process of cooling the substrate by passing the heat exchange fluid in the cooling module to the heat exchange component. This group of experimental data is at 20m 3 / h flow rate, 116521Kcal / Hr. In the actual process, the faster the flow rate, the more stable the temperature control value and the better the process control effect.

[0079] Table 1:

[0080]

[0081]

[0082] In this technical solution, the temperature in the vacuum chamber is controlled by cooling in a refrigeration tank, heating in a heating tank and correspondingly delivering a heat exchange fluid, thereby protecting the substrate and coating effect of the vacuum chamber coating;

[0083] The efficiency of temperature control is increased by increasing the direct contact area between the heat exchange plate in the vacuum chamber and the coated substrate or the indirect contact area with the heat exchange plate on the side away from the substrate. In addition, since the heat exchange fluid exchanges heat through the heat exchange component, thereby affecting the temperature in the vacuum chamber, the coating substrate can be heat exchanged through the overall temperature in the vacuum chamber, thereby controlling the temperature of the substrate.

[0084] For some heat-sensitive substrates, high temperature will cause the performance of the substrate to change, which is not conducive to the control of product quality. This technical solution makes the temperature in the vacuum chamber controllable, which can well protect the coated substrate and coating effect in the vacuum chamber.

[0085] At the same time, the cooling module provided in the technical solution can quickly take away the high temperature generated during the coating in the vacuum chamber, adjust the temperature inside the vacuum chamber, and improve the coating efficiency of the vacuum chamber.

[0086] After the vacuum chamber coating is completed, the present technical solution can also adjust the temperature inside the vacuum chamber through the heating module, thereby avoiding the situation where the temperature of the internal substrate is too low after the vacuum chamber door is opened. When the substrate temperature is too low, it will come into contact with the air, causing the water molecules in the air to condense into water droplets, thereby affecting the substrate. The present technical solution can effectively prevent the occurrence of this problem.

[0087] This technical solution is aimed at solving the problem of temperature control in the vacuum coating process, improving the efficiency of vacuum coating and stabilizing the coating effect.

[0088] This technical solution can help high-temperature-sensitive materials to be quickly cooled in a vacuum chamber, thereby improving vacuum coating efficiency and stabilizing the coating effect.

[0089] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0090] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

[0091] The above is a detailed description of an embodiment of a temperature control method for a non-high temperature resistant substrate in a vacuum chamber coating provided by the present invention. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the core idea of ​​the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, the present invention can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A temperature control method for high temperature resistant substrate in vacuum chamber coating, characterized in that: It comprises a heat exchange component (2) arranged in a vacuum chamber and in contact with a substrate (1) for heat exchange, wherein the heat exchange component (2) is connected to a cooling module (3) and a heating module (4) arranged in parallel outside the vacuum chamber; The steps include: S1, heat exchange fluid temperature control; the heat exchange fluid is cooled in the cooling module and heated in the heating module for standby; S2, vacuum coating and cooling; attaching the substrate to the heat exchange component and coating the substrate in a vacuum state; The heat exchange fluid in the cooling module is transported to the heat exchange component to continuously cool the substrate during coating; S3, substrate insulation; after the vacuum coating is completed, the heat exchange component switches the heat exchange fluid into the heating module to keep the temperature of the substrate and the temperature in the vacuum chamber equal to the ambient temperature, thus completing the coating.

2. The temperature control method according to claim 1, characterized in that: The cooling module (3) comprises a refrigeration section (31), a first control end (32) connected to the refrigeration section (31) and controlling whether a heat exchange fluid is input, and a second control end (33) connected to the refrigeration section (31) and controlling whether the heat exchange fluid is output; The temperature increasing module (4) comprises a temperature increasing section (41), a third control end (42) connected to the temperature increasing section (41) and controlling whether a heat exchange fluid is input, and a fourth control end (43) connected to the temperature increasing section (42) and controlling whether the heat exchange fluid is output; The first control end (32) is connected to the third control end (42) and is connected to the output end of the heat exchange component (2); The second control end (33) is connected to the fourth control end (43) and is connected to the input end of the heat exchange component (2).

3. The temperature control method according to claim 2, characterized in that: The refrigeration section (31) comprises a refrigeration tank (310), a first conveying device (311), and a refrigeration controller (312) which are connected to each other, and the output end of the refrigeration controller (312) flows back into the refrigeration tank (310); The second control end (33) comprises a first control valve (331) connected to the output end of the refrigeration tank (310), and a second conveying device (332) having two ends respectively connected to the first control valve (331) and the heat exchange component (2); The first control end (32) comprises a third control valve, and the third control valve is connected to the output end of the heat exchange component (2) and the input end of the refrigeration tank (310).

4. The temperature control method according to claim 2, characterized in that: The temperature rising section (41) comprises a heating tank (410), and the heating tank (410) is provided with a heating controller (411); The fourth control end (43) comprises a second control valve (431) connected to the output end of the heating tank (410), and a third conveying device (432) whose two ends are respectively connected to the second control valve (431) and the heat exchange component (2); The third control end (42) comprises a fourth control valve, and the fourth control valve is connected to the output end of the heat exchange component (2) and the input end of the heating tank (410).

5. The temperature control method according to claim 2, characterized in that: The output end of the heat exchange component (2) is connected to the return pipe (5), and the return pipe (5) is connected to the input end of the cooling module (3) and the input end of the heating module (4); The input end of the heat exchange component (2) is connected to the delivery pipeline (6), and the output end of the cooling module (3) and the output end of the heating module (4) are both connected to the delivery pipeline (6).

6. The temperature control method according to claim 1, characterized in that: The heat exchange component (2) comprises a plurality of cold and heat exchange plates (21) which are arranged in sequence and provided with spaces inside to provide circulation of heat exchange fluids. The flow directions of the heat exchange fluids inside the adjacent cold and heat exchange plates (21) are arranged in opposite directions. The outer surface of the cold and heat exchange plate (21) arranged on the outermost side is in contact with the substrate (1).

7. The temperature control method according to claim 6, characterized in that: The bonding surface between the cold and heat exchange plate (21) and the substrate (1) is a flat surface or a curved surface.

8. The temperature control method according to claim 4, characterized in that: The heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C.

9. The temperature control method according to claim 3, characterized in that: The refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be between 20°C and minus 50°C.

10. The temperature control method according to claim 4, characterized in that: In the step S1, before the coating process starts in the vacuum chamber, the first control valve, the third control valve and the second conveying device are opened; the heat exchange fluid prepared by the refrigeration tank is introduced into the heat exchange assembly in the vacuum chamber and the heat exchange fluid is returned to the refrigeration tank to form a circulation state, thereby reducing the temperature in the vacuum chamber; In step S2, during the coating process, the heat exchange fluid prepared in the refrigeration tank is continuously passed into the heat exchange component in the vacuum chamber to cool the substrate, and the heat exchange fluid is returned to the refrigeration tank to form a circulation state; In the step S3, after the vacuum coating is completed, the refrigeration tank continuously delivers the heat exchange fluid to cool down the coated substrate. When the temperature of the coated substrate is restored to the same level as the ambient temperature, the second conveying device, the first control valve and the third control valve are closed, and the second control valve, the fourth control valve and the third conveying device are opened. The heat exchange fluid in the heating tank is passed into the heat exchange component in the vacuum chamber to keep the substrate warm and the heat exchange fluid delivered by the refrigeration tank is discharged out of the vacuum chamber. The temperature in the vacuum chamber is restored to the same level as the ambient temperature, and the temperature of the substrate after coating is maintained at the same level as the ambient temperature to complete the coating.

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