800G silicon optical coupling lens position and defect detection method and system

Abstract

The invention relates to a 800G silicon optical coupling lens position and defect detection method, which comprises the following steps: respectively aligning a light spot with a target lens in X-axis and Y-axis directions to carry out cyclic scanning, respectively collecting reflected light spots by a linear array CCD (Charge Coupled Device), and respectively extracting light spot data according to optical power distribution data; and fitting Gaussian curves through a Gaussian function according to the light spot data extracted in the X-axis direction and the Y-axis direction respectively, if the Gaussian curves cannot be fitted and the target lens cannot completely reflect the light spots, calculating effective optical power area sizes respectively, judging whether the target lens is damaged or not, and if the Gaussian curves can be fitted, judging whether the target lens is damaged or not. And if yes, determining the relative position information of the target lens in combination with the X-axis position corresponding to the maximum light spot point determined in the X-axis direction and the Y-axis direction, and judging whether the target lens exceeds the range in the coupling process. The method has the beneficial effects that the lens position can be judged and whether the lens is damaged can be identified to guide the lens to perform a coupling process, the coupling difficulty is reduced, and the yield is improved.

Description

Technical Field

[0001] The present invention relates to the field of lens coupling technology, and in particular to a method and system for detecting the position and defects of an 800G silicon optical coupling lens. Background Art

[0002] The lens currently used in 800G silicon photonic modules is a 0.5mmx0.5mm aspherical lens. Since the lens is very small and must not be damaged, and the spatial position of the lens must be accurately known during the coupling process to avoid damage due to contact with other components during the coupling process, the coupling of the lens becomes very difficult. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a method and system for detecting the position and defects of an 800G silicon optical coupling lens to overcome the deficiencies in the above-mentioned prior art.

[0004] The technical solution of the present invention to solve the above technical problem is as follows: A method for detecting the position and defects of an 800G silicon optical coupling lens comprises the following steps:

[0005] S1, respectively align the target lens with a light spot smaller than the target lens size in the X-axis direction and the Y-axis direction for cyclic scanning, then collect the reflected light spot on the target lens by the X-axis array CCD and the Y-axis array CCD, and extract the light spot data according to the optical power distribution data;

[0006] S2, fitting a Gaussian curve through a Gaussian function according to the light spot data extracted in the X-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the light spot, and enter S4;

[0007] S3, fitting a Gaussian curve through a Gaussian function according to the spot data extracted in the Y-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the spot and enter S4.

[0008] S4, combining the X-axis positions corresponding to the maximum points of the light spots determined twice, determining the relative position information of the target lens, and comparing whether the target lens exceeds the range during the coupling process according to the set range;

[0009] S5. If it is determined that the target lens cannot completely reflect the light spot, the effective light power area received by the X-axis array CCD and the Y-axis array CCD is calculated respectively, and the effective light power area is compared with the actual area respectively. Then, whether the target lens is damaged is judged based on whether it exceeds the range. If it is determined that the lens light spot is not returned, it means that the lens is out of the scanning range or there is no lens.

[0010] Based on the above technical solution, the present invention can also be improved as follows.

[0011] Furthermore, the spot diameter used in S1 is less than 5 μm.

[0012] Further, in S5, the defect area is determined by image binary analysis.

[0013] Based on the above technical solution, the present invention also provides an 800G silicon photocoupler lens position and defect detection system for executing the above-mentioned 800G silicon photocoupler lens position and defect detection method, including: a control end and an X-axis detection module and a Y-axis detection module electrically connected to the control end respectively, the X-axis detection module including: a first laser scanning device, a first lens and an X-axis line array CCD, the first lens is arranged on the light incident side of the X-axis line array CCD, the Y-axis detection module including: a second laser scanning device, a second lens and a Y-axis line array CCD, the second lens is arranged on the light incident side of the Y-axis line array CCD.

[0014] Furthermore, the first laser scanning device includes: a laser module and a precision rotating motor, and the laser module is fixed on the main shaft of the precision rotating motor.

[0015] Furthermore, the swing of the precision rotary motor is less than 10 seconds.

[0016] Furthermore, the structure of the second laser scanning device is the same as that of the first laser scanning device.

[0017] Furthermore, a computer is used as the control terminal.

[0018] The beneficial effect of the present invention is: by detecting the position distribution of the laser beam and judging the position of the lens and identifying whether it is damaged (defective) according to the reflection intensity distribution curve, the lens can be guided to perform the coupling process, thereby reducing the coupling difficulty and improving the yield rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a flow chart of the 800G silicon optical coupling lens position and defect detection method in the present invention;

[0020] Figure 2 The Gaussian curve is fitted by the Gaussian function based on the spot data when the lens in the X-axis direction is defect-free in the present invention;

[0021] Figure 3 The Gaussian curve is fitted by the Gaussian function based on the spot data when the lens in the Y-axis direction is defect-free in the present invention;

[0022] Figure 4 The defective lens in the present invention is fitted by a Gaussian function based on the spot data;

[0023] Figure 5 It is an X-axis position information diagram corresponding to the maximum point of the light spot on the X-axis array CCD calculated by the center of the Gaussian curve in the present invention;

[0024] Figure 6 The defect area map is calculated by image binary analysis in the present invention;

[0025] Figure 7 This is a diagram of the 800G silicon optical coupling lens position and defect detection system in the present invention.

[0026] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0027] 1. Control end, 2. X-axis detection module, 210. First laser scanning device, 220. First lens, 230. X-axis array CCD, 3. Y-axis detection module, 310. Second laser scanning device, 320. Second lens, 330. Y-axis array CCD. DETAILED DESCRIPTION

[0028] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0029] Example 1

[0030] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 As shown, a method for detecting the position and defects of an 800G silicon optical coupling lens comprises the following steps:

[0031] S1. Use a light spot smaller than the target lens size to align the target lens in the X-axis direction for cyclic scanning, then use the X-axis array CCD230 to collect the reflected light spot on the target lens, and extract the light spot data based on the optical power distribution data;

[0032] And in the Y-axis direction, a light spot smaller than the target lens size is used to align the target lens for cyclic scanning, and then the Y-axis line array CCD330 collects the reflected light spot on the target lens, and extracts the light spot data according to the optical power distribution data;

[0033] S2, fitting a Gaussian curve through a Gaussian function according to the light spot data extracted in the X-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the light spot, and enter S4;

[0034] S3, fitting a Gaussian curve through a Gaussian function according to the spot data extracted in the Y-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the spot and enter S4.

[0035] S3, by combining the X-axis position corresponding to the maximum point of the light spot determined in S2 and the X-axis position corresponding to the maximum point of the light spot determined in S3, the relative position information of the target lens (the position of the lens relative to the center of the CCD) is determined, and the target lens is compared with the set range to see whether it exceeds the range during the coupling process;

[0036] S6. If it is determined that the target lens cannot completely reflect the light spot, the effective light power area received by the X-axis array CCD230 and the Y-axis array CCD330 is calculated respectively, and the effective light power area is compared with the real area (that is, the real light power area of ​​the standard lens) respectively, and then it is judged whether the target lens is damaged based on whether it exceeds the range. If it is determined that the lens light spot is not returned, it means that the lens is out of the scanning range or there is no lens.

[0037] Example 2

[0038] like Figure 1 , Figure 6 As shown, this embodiment is a further improvement on the basis of embodiment 1, and the details are as follows:

[0039] Since the lens used in the 800G silicon photonics module is a 0.5mmx0.5mm aspherical mirror, the spot diameter used in S1 is less than 5μm. In addition, the defect area is determined by image binary analysis in S5, and the difference between the actual area and the effective optical power area is the defect area.

[0040] Example 3

[0041] like Figure 7 As shown, a 800G silicon optical coupling lens position and defect detection system is used to perform the 800G silicon optical coupling lens position and defect detection method described in Example 1 or 2, including: a control end 1, an X-axis detection module 2 and a Y-axis detection module 3, wherein the X-axis detection module 2 is electrically connected to the control end 1, and the Y-axis detection module 3 is also electrically connected to the control end 1;

[0042] The X-axis detection module 2 includes: a first laser scanning device 210, a first lens 220 and an X-axis array CCD230. The first lens 220 is arranged on the light incident side of the X-axis array CCD230. In the X-axis direction, the first laser scanning device 210 is used to emit a light spot smaller than the target lens size to align the target lens for cyclic scanning; the reflected light spot on the target lens is converged into the X-axis array CCD230 through the first lens 220, so that the X-axis array CCD230 can collect the reflected light spot on the target lens. The X-axis array CCD230 sends the optical power distribution data to the control terminal 1 through the serial port line, and the control terminal 1 extracts the light spot data through an algorithm (this technology is an existing mature technology);

[0043] The Y-axis detection module 3 includes: a second laser scanning device 310, a second lens 320 and a Y-axis array CCD330. The second lens 320 is arranged on the light incident side of the Y-axis array CCD330. In the Y-axis direction, the second laser scanning device 310 is used to emit a light spot smaller than the target lens size to align the target lens for cyclic scanning; the reflected light spot on the target lens is converged into the Y-axis array CCD330 through the second lens 320, so that the Y-axis array CCD330 can collect the reflected light spot on the target lens. The Y-axis array CCD330 sends the optical power distribution data to the control terminal 1 through the serial port line, and the control terminal 1 extracts the light spot data through an algorithm (this technology is an existing mature technology);

[0044] Then the control end 1 fits a Gaussian curve through a Gaussian function according to the light spot data extracted in the X-axis direction. If the Gaussian curve cannot be fitted and it is determined that the target lens cannot completely reflect the light spot, the light power area is calculated, and the light power area is compared with the real area. Then, it is determined whether the target lens is damaged based on whether it exceeds the range. If it is determined that the lens light spot does not return, it indicates that the lens is out of the scanning range or there is no lens. If the Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined;

[0045] And, the control end 1 fits a Gaussian curve through a Gaussian function according to the spot data extracted in the Y-axis direction. If the Gaussian curve cannot be fitted and it is determined that the target lens cannot completely reflect the spot, the optical power area is calculated, and the optical power area is compared with the real area. Then, whether the target lens is damaged is judged based on whether it exceeds the range, or if it is determined that the lens spot does not return, it indicates that the lens is out of the scanning range or there is no lens. If the Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the spot is determined;

[0046] Finally, the control end 1 determines the relative position information of the target lens by combining the X-axis position corresponding to the maximum point of the light spot determined in the X-axis direction and the X-axis position corresponding to the maximum point of the light spot determined in the Y-axis direction, and compares whether the target lens exceeds the range during the coupling process according to the set range.

[0047] Example 4

[0048] like Figure 7 As shown, this embodiment is a further improvement on the basis of embodiment 3, and the details are as follows:

[0049] The first laser scanning device 210 includes: a laser module and a precision rotating motor. The laser module is fixed on the main shaft of the precision rotating motor. The laser module is used to emit a light spot smaller than the target lens size. The precision rotating motor is used to drive the laser module to swing to achieve scanning. The precision rotating motor is electrically connected to the control terminal 1, that is, the control terminal 1 controls the movement of the precision rotating motor, and the swing of the precision rotating motor is less than 10 seconds.

[0050] Furthermore, the structure of the second laser scanning device 310 is the same as that of the first laser scanning device 210, and a computer is preferably used as the control terminal 1.

[0051] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A method for detecting the position and defects of an 800G silicon optical coupling lens, characterized in that: The steps include: S1, respectively aligning a light spot smaller than the size of the target lens with the target lens in the X-axis direction and the Y-axis direction for cyclic scanning, then respectively collecting the reflected light spot on the target lens by the X-axis array CCD (230) and the Y-axis array CCD (330), and extracting light spot data according to the optical power distribution data; S2, fitting a Gaussian curve through a Gaussian function according to the light spot data extracted in the X-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the light spot, and enter S4; S3, fitting a Gaussian curve through a Gaussian function according to the spot data extracted in the Y-axis direction. If the Gaussian curve cannot be fitted, then enter S5. If the Gaussian curve can be fitted, then determine the X-axis position corresponding to the maximum point of the spot and enter S4. S4, combining the X-axis positions corresponding to the maximum points of the light spots determined twice, determining the relative position information of the target lens, and comparing whether the target lens exceeds the range during the coupling process according to the set range; S5. If it is determined that the target lens cannot completely reflect the light spot, the effective light power area received by the X-axis array CCD (230) and the Y-axis array CCD (330) is calculated respectively, and the effective light power area is compared with the actual area respectively, and then it is judged whether the target lens is damaged based on whether it exceeds the range. If it is determined that the lens light spot is not returned, it means that the lens is out of the scanning range or there is no lens.

2. According to claim 1, a method for detecting position and defects of an 800G silicon optical coupling lens is characterized in that: The spot diameter used in S1 is less than 5 μm.

3. A 800G silicon optical coupling lens position and defect detection method according to claim 1 or 2, characterized in that: In S5, the defect area is determined by image binary analysis.

4. An 800G silicon optical coupling lens position and defect detection system, characterized in that: Used to execute the 800G silicon optical coupling lens position and defect detection method as described in any one of claims 1 to 3, comprising: a control end (1) and an X-axis detection module (2) and a Y-axis detection module (3) electrically connected to the control end (1) respectively, the X-axis detection module (2) comprising: a first laser scanning device (210), a first lens (220) and an X-axis array CCD (230), the first lens (220) being arranged on the light incident side of the X-axis array CCD (230), the Y-axis detection module (3) comprising: a second laser scanning device (310), a second lens (320) and a Y-axis array CCD (330), the second lens (320) being arranged on the light incident side of the Y-axis array CCD (330).

5. The 800G silicon optical coupling lens position and defect detection system according to claim 4, characterized in that: The first laser scanning device (210) comprises: a laser module and a precision rotating motor, wherein the laser module is fixed on the main shaft of the precision rotating motor.

6. The 800G silicon optical coupling lens position and defect detection system according to claim 4 or 5, characterized in that: The swing of the precision rotary motor is less than 10 seconds.

7. An 800G silicon optical coupling lens position and defect detection system according to claim 4, 5 or 6, characterized in that: The structure of the second laser scanning device (310) is the same as that of the first laser scanning device (210).

8. The 800G silicon optical coupling lens position and defect detection system according to claim 4, characterized in that: The control terminal (1) is a computer.

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