An 800g silicon optical coupling lens position and defect detection method and system

Abstract

The application relates to a kind of 800G silicon light coupling lens position and defect detection method, respectively in X axis, Y axis direction using light spot alignment target lens is carried out cyclic scanning, and respectively by line array CCD collection reflected light spot, and respectively according to optical power distribution data extraction light spot data;According to the light spot data extracted in X axis, Y axis direction through Gaussian function fitting Gaussian curve, if Gaussian curve cannot be fitted, and target lens cannot completely reflect light spot, then respectively calculate effective optical power area size, and judge whether target lens is damaged, if Gaussian curve can be fitted, then respectively combine the X axis position corresponding to the maximum point of light spot determined in X axis, Y axis direction, determine the relative position information of target lens, and judge whether target lens is out of range in coupling process.The beneficial effect is: can judge lens position and identify whether damaged, to guide lens to carry out coupling process, reduce coupling difficulty, improve yield.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of lens coupling, and in particular to an 800G silicon light coupling lens position and defect detection method and system. BACKGROUND

[0002] At present, the lens used by an 800G silicon light optical module is a 0.5mmx0.5mm aspheric mirror. Since the lens is very small, the lens cannot be damaged, and the spatial position of the lens can be accurately known during the coupling process, so that the lens is not damaged due to contact with other components during the coupling process, and therefore the coupling work of the lens becomes very difficult. SUMMARY

[0003] The technical problem to be solved by the application is to provide an 800G silicon light coupling lens position and defect detection method and system to overcome the deficiencies in the prior art.

[0004] The technical scheme for solving the above technical problem is as follows: an 800G silicon light coupling lens position and defect detection method, comprising the following steps:

[0005] S1, a smaller light spot than the target lens size is used to align the target lens in the X-axis direction and the Y-axis direction for cyclic scanning, and then the reflected light spot on the target lens is collected by an X-axis linear array CCD and a Y-axis linear array CCD, and light spot data is extracted according to light power distribution data;

[0006] S2, a Gaussian curve is fitted according to the light spot data extracted in the X-axis direction by a Gaussian function, if the Gaussian curve cannot be fitted, S5 is entered, if the Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined, and S4 is entered;

[0007] S3, a Gaussian curve is fitted according to the light spot data extracted in the Y-axis direction by a Gaussian function, if the Gaussian curve cannot be fitted, S5 is entered, if the Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined, and S4 is entered;

[0008] S4, the relative position information of the target lens is determined by combining the X-axis positions corresponding to the maximum points of the light spots determined twice, and whether the target lens exceeds the range during the coupling process is compared according to the set range;

[0009] S5, if it is determined that the target lens cannot completely reflect the light spot, the effective light power area received by the X-axis linear array CCD and the Y-axis linear array CCD is calculated, the effective light power area is compared with the real area, and whether the target lens is damaged is determined according to whether the range is exceeded, if it is determined that the lens light spot is not returned, it is indicated that the lens exceeds the scanning range or there is no lens.

[0010] On the basis of the above technical solutions, the application can be further improved as follows.

[0011] Further, the spot diameter in S1 is less than 5 μm.

[0012] Further, the defect area is determined by image binary analysis in S5.

[0013] Based on the above technical solutions, the application further provides an 800G silicon light coupling lens position and defect detection system for executing the above 800G silicon light coupling lens position and defect detection method, comprising a control end and X-axis detection modules and Y-axis detection modules electrically connected to the control end, the X-axis detection modules comprising first laser scanning devices, first lenses and X-axis linear array CCDs, the first lenses being arranged on the light-in side of the X-axis linear array CCDs, and the Y-axis detection modules comprising second laser scanning devices, second lenses and Y-axis linear array CCDs, the second lenses being arranged on the light-in side of the Y-axis linear array CCDs.

[0014] Further, the first laser scanning devices comprise laser modules and precision rotary motors, and the laser modules are fixed on the main shafts of the precision rotary motors.

[0015] Further, the swing of the precision rotary motors is less than 10 seconds.

[0016] Further, the second laser scanning devices have the same structure as the first laser scanning devices.

[0017] Further, the control end adopts a computer.

[0018] The application has the beneficial effects that the laser beam position distribution is detected, the lens position is judged and whether the lens is damaged (defective) is identified according to the reflection intensity distribution curve, so as to guide the lens to perform the coupling process, thereby reducing the coupling difficulty and improving the yield. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a flowchart of the 800G silicon light coupling lens position and defect detection method in the application.

[0020] Figure 2 It is a Gaussian curve fitted by a Gaussian function according to the spot data of the lens without defects in the X-axis direction.

[0021] Figure 3 It is a Gaussian curve fitted by a Gaussian function according to the spot data of the lens without defects in the Y-axis direction.

[0022] Figure 4 It is a curve fitted by a Gaussian function according to the spot data of the lens with defects.

[0023] Figure 5 The X-axis position information map corresponding to the maximum point of the light spot on the X-axis linear array CCD calculated by the center of the Gaussian curve in the present application;

[0024] Figure 6 The defect area map calculated by image binary analysis in the present application;

[0025] Figure 7 The 800G silicon light coupling lens position and defect detection system map in the present application.

[0026] In the drawings, the components represented by each reference numeral are listed as follows:

[0027] 1, control end, 2, X-axis detection module, 210, first laser scanning device, 220, first lens, 230, X-axis linear array CCD, 3, Y-axis detection module, 310, second laser scanning device, 320, second lens, 330, Y-axis linear array CCD. DETAILED DESCRIPTION

[0028] The principles and characteristics of the present application are described below in conjunction with the drawings, and the examples are only used to explain the present application and are not used to limit the scope of the present application.

[0029] Example 1

[0030] As shown in Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 An 800G silicon light coupling lens position and defect detection method, comprising the following steps:

[0031] S1, in the X-axis direction, a light spot smaller than the target lens size is used to align the target lens for cyclic scanning, and the reflected light spot on the target lens is collected by the X-axis linear array CCD 230, and the light spot data is extracted according to the light power distribution data;

[0032] and in the Y-axis direction, a light spot smaller than the target lens size is used to align the target lens for cyclic scanning, and the reflected light spot on the target lens is collected by the Y-axis linear array CCD 330, and the light spot data is extracted according to the light power distribution data;

[0033] S2, according to the light spot data extracted in the X-axis direction, a Gaussian curve is fitted by a Gaussian function, if a Gaussian curve cannot be fitted, S5 is entered, if a Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined, and S4 is entered;

[0034] S3, fitting a Gaussian curve by a Gaussian function according to the spot data extracted in the Y-axis direction, if the Gaussian curve cannot be fitted, entering S5, if the Gaussian curve can be fitted, determining the X-axis position corresponding to the maximum point of the spot, and entering S4;

[0035] S3, determining the relative position information (lens relative to the center position of the CCD) of the target lens by combining the X-axis position corresponding to the maximum point of the spot determined in S2 and the X-axis position corresponding to the maximum point of the spot determined in S3, and comparing whether the target lens exceeds the range during the coupling process according to the set range;

[0036] S6, if it is determined that the target lens cannot completely reflect the spot, calculating the effective light power area size received by the X-axis linear array CCD 230 and the Y-axis linear array CCD 330 respectively, and comparing the effective light power area with the real area (i.e. the real light power area of the standard lens) respectively, and then judging whether the target lens is damaged according to whether it exceeds the range, if it is determined that the lens spot is not returned, it indicates that the lens exceeds the scanning range or there is no lens.

[0037] Embodiment 2

[0038] As shown in Figure 1 , Figure 6 , this embodiment is a further improvement based on embodiment 1, as follows:

[0039] Since the lens used by the 800G silicon light optical module is a 0.5mmx0.5mm aspheric mirror, the spot diameter used in S1 is less than 5μm, in addition, the difference between the real area and the effective light power area is the defect area determined by image binary analysis in S5.

[0040] Embodiment 3

[0041] As shown in Figure 7 , an 800G silicon light coupling lens position and defect detection system is used to perform the 800G silicon light coupling lens position and defect detection method described in embodiment 1 or 2, which includes a control end 1, an X-axis detection module 2 and a Y-axis detection module 3, wherein the X-axis detection module 2 is electrically connected with the control end 1, and the Y-axis detection module 3 is also electrically connected with the control end 1;

[0042] The X-axis detection module 2 comprises a first laser scanning device 210, a first lens 220 and an X-axis linear array CCD 230, the first lens 220 is arranged on the light-in side of the X-axis linear array CCD 230, in the X-axis direction, the first laser scanning device 210 is used to emit a light spot smaller than the size of the target lens to perform cyclic scanning on the target lens, the reflected light spot on the target lens is converged into the X-axis linear array CCD 230 through the first lens 220, thereby the reflected light spot on the target lens is collected by the X-axis linear array CCD 230, the X-axis linear array CCD 230 sends the light power distribution data to the control end 1 through a serial port line, and the control end 1 extracts the light spot data through an algorithm (this technology is a mature existing technology);

[0043] The Y-axis detection module 3 comprises a second laser scanning device 310, a second lens 320 and a Y-axis linear array CCD 330, the second lens 320 is arranged on the light-in side of the Y-axis linear array CCD 330, in the Y-axis direction, the second laser scanning device 310 is used to emit a light spot smaller than the size of the target lens to perform cyclic scanning on the target lens, the reflected light spot on the target lens is converged into the Y-axis linear array CCD 330 through the second lens 320, thereby the reflected light spot on the target lens is collected by the Y-axis linear array CCD 330, the Y-axis linear array CCD 330 sends the light power distribution data to the control end 1 through a serial port line, and the control end 1 extracts the light spot data through an algorithm (this technology is a mature existing technology);

[0044] Then the control end 1 fits a Gaussian curve through a Gaussian function according to the extracted light spot data in the X-axis direction, if a Gaussian curve cannot be fitted and it is determined that the target lens cannot completely reflect the light spot, the light power area size is calculated, the light power area is compared with the real area, and then whether the target lens is damaged is judged according to whether the range is exceeded, or it is determined that the lens light spot is not returned, which indicates that the lens exceeds the scanning range or there is no lens, if a Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined;

[0045] In addition, the control end 1 fits a Gaussian curve through a Gaussian function according to the extracted light spot data in the Y-axis direction, if a Gaussian curve cannot be fitted and it is determined that the target lens cannot completely reflect the light spot, the light power area size is calculated, the light power area is compared with the real area, and then whether the target lens is damaged is judged according to whether the range is exceeded, or it is determined that the lens light spot is not returned, which indicates that the lens exceeds the scanning range or there is no lens, if a Gaussian curve can be fitted, the X-axis position corresponding to the maximum point of the light spot is determined;

[0046] Finally, the control terminal 1 determines the relative position information of the target lens by combining the X-axis position corresponding to the maximum spot in the X-axis direction and the X-axis position corresponding to the maximum spot in the Y-axis direction, and determines whether the range is exceeded during the coupling of the target lens according to the set range.

[0047] Embodiment 4

[0048] As shown in the figure, the embodiment is a further improvement on the basis of embodiment 3, and the specific improvements are as follows: Figure 7

[0049] The first laser scanning device 210 comprises a laser module and a precision rotary motor, the laser module is fixed on the main shaft of the precision rotary motor, the laser module is used to emit a light spot smaller than the size of the target lens, the precision rotary motor is used to drive the laser module to swing to realize scanning, the precision rotary motor is electrically connected with the control terminal 1, that is, the control terminal 1 controls the action of the precision rotary motor, and the swing of the precision rotary motor is less than 10 seconds.

[0050] Further, the structure of the second laser scanning device 310 is the same as that of the first laser scanning device 210, and the control terminal 1 is preferably a computer.

[0051] Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and should not be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.​

Claims

1. A method for detecting the position and defects of an 800G silicon optically coupled lens, characterized in that, Includes the following steps: S1. A light spot smaller than the target lens size is used to scan the target lens in the X-axis and Y-axis directions respectively. Then, the reflected light spot on the target lens is collected by the X-axis CCD (230) and the Y-axis CCD (330) respectively, and the light spot data is extracted according to the light power distribution data. S2. Based on the spot data extracted in the X-axis direction, fit a Gaussian curve using a Gaussian function. If a Gaussian curve cannot be fitted, proceed to S5. If a Gaussian curve can be fitted, determine the X-axis position corresponding to the maximum spot point and proceed to S4. S3. Based on the spot data extracted in the Y-axis direction, fit a Gaussian curve using a Gaussian function. If a Gaussian curve cannot be fitted, proceed to S5. If a Gaussian curve can be fitted, determine the X-axis position corresponding to the maximum spot point and proceed to S4. S4. Combining the X-axis position corresponding to the maximum spot value determined twice, determine the relative position information of the target lens, and compare whether the target lens exceeds the range during coupling according to the set range. S5. If it is determined that the target lens cannot completely reflect the light spot, the effective light power area received by the X-axis CCD (230) and Y-axis CCD (330) is calculated respectively, and the effective light power area is compared with the real area. Then, it is determined whether the target lens is damaged based on whether it exceeds the range. If it is determined that the lens light spot does not return, it indicates that the lens is outside the scanning range or there is no lens.

2. The method for detecting the position and defects of an 800G silicon optical coupling lens according to claim 1, characterized in that, The spot diameter used in S1 is less than 5 μm.

3. The method for detecting the position and defects of an 800G silicon optical coupling lens according to claim 1 or 2, characterized in that, In S5, the defect area is determined by binary image analysis.

4. A system for detecting the position and defects of an 800G silicon optically coupled lens, characterized in that, The method for performing the 800G silicon photocoupled lens position and defect detection method as described in any one of claims 1 to 3 includes: a control terminal (1) and an X-axis detection module (2) and a Y-axis detection module (3) electrically connected to the control terminal (1), wherein the X-axis detection module (2) includes: a first laser scanning device (210), a first lens (220) and an X-axis linear array CCD (230), wherein the first lens (220) is arranged on the light-incident side of the X-axis linear array CCD (230), and the Y-axis detection module (3) includes: a second laser scanning device (310), a second lens (320) and a Y-axis linear array CCD (330), wherein the second lens (320) is arranged on the light-incident side of the Y-axis linear array CCD (330).

5. The 800G silicon optical coupling lens position and defect detection system according to claim 4, characterized in that, The first laser scanning device (210) includes a laser module and a precision rotary motor, wherein the laser module is fixed on the main shaft of the precision rotary motor.

6. The 800G silicon optical coupling lens position and defect detection system according to claim 5, characterized in that, The oscillation of the precision rotary motor is less than 10 seconds.

7. The 800G silicon optical coupling lens position and defect detection system according to claim 4, 5, or 6, characterized in that, The structure of the second laser scanning device (310) is the same as that of the first laser scanning device (210).

8. The 800G silicon optical coupling lens position and defect detection system according to claim 4, characterized in that, The control terminal (1) is a computer.

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