Chip loading method and device, storage medium and electronic equipment

Abstract

The invention provides a film feeding method and device, a storage medium and electronic equipment, a photoetching machine material disc and a film mark are identified through an image processing technology, ordered taking and placing and angle correction of materials are achieved, full-automatic film feeding of a projection photoetching machine can be achieved in cooperation with an automatic clamping device, and the production efficiency of the projection photoetching machine is improved. The scratch to the surface of the diaphragm in the diaphragm loading process can be effectively avoided, the difference between the diaphragms is minimized, and the quality and the consistency of photoetching materials are ensured; according to the characteristics of the diaphragm, image processing algorithms such as edge strengthening and template matching are used for positioning and angle recognition of the diaphragm, it can be ensured that the diaphragm is correctly positioned and placed in the feeding process, and the accuracy and consistency of a final overlay pattern are improved.

Description

Technical Field

[0001] The present application belongs to the field of photolithography machines, and specifically relates to a wafer loading method, device, storage medium and electronic equipment. Background Art

[0002] A projection lithography machine is a device that uses optical projection technology to manufacture microchips. It achieves pattern transfer and manufacturing in the chip manufacturing process by focusing a laser beam or an electron beam and projecting it onto a silicon wafer. The loading of a projection lithography machine is a key link in the entire exposure process. The loading process of a projection lithography machine requires high professional quality from the operator. If there is a large alignment error in the diaphragm during loading, during projection lithography, the pattern of the on-chip components will not match the design, resulting in circuit connection errors and inability to achieve effective overlay. In addition, if manual loading is used, the diaphragm may be touched during the loading process, affecting the surface characteristics of the diaphragm and the final exposure results.

[0003] In the prior art, there are relatively few methods for loading films on projection photolithography machines. Existing methods for loading films on projection photolithography machines mainly use manual placement, and require special processing of the material tray, marking each hole in a uniform direction, and manually placing the diaphragm in the material tray holes in turn, and then adjusting its angle to align with the hole markings. Angle correction mainly relies on the human eye to align the diaphragm mark with the material tray mark. Since the diaphragm is small, it is very easy to have angle deviations and it is easy to scratch the surface of the diaphragm. If the diaphragm placement angle deviation is large, the angle of each diaphragm needs to be corrected and compensated during the exposure process, then the compensation time of the lithography machine is long or even cannot be fully compensated. Therefore, it is necessary to develop an automatic film loading method to overcome the technical problems in the manual film loading process. Summary of the invention

[0004] In order to solve the above-mentioned technical problems, the present application provides a loading method, a loading device, a storage medium and an electronic device, which use image processing technology to identify the material tray and membrane mark of the lithography machine, realize orderly placement and angle correction of materials, and cooperate with an automatic clamping device to realize fully automatic loading of the projection lithography machine.

[0005] In a first aspect, the present application provides a method for loading a wafer, the method comprising the following steps:

[0006] S1: Collecting images of a material tray, a hole position, and a membrane, wherein the membrane is placed in a first direction and the hole position is located on the material tray, and generating a template library according to the collected images;

[0007] S2: establishing a spatial coordinate system including the entire active area of ​​the active device, wherein the active device includes a clamping portion and an imaging portion, and randomly selecting a target point in the spatial coordinate system for photographing, and calculating a coordinate difference (Δx, Δy) between the clamping portion and the imaging portion in the spatial coordinate system according to the photographed image;

[0008] S3: The imaging unit takes images of the material tray and the hole positions again, and uses a template matching algorithm to obtain the coordinates of the imaging unit corresponding to the hole positions;

[0009] S4: The imaging unit captures an image of the film to be loaded, and performs image processing on the captured film image, using a template matching algorithm combined with a coordinate difference (Δx, Δy) to obtain the coordinates and rotation angle of the clamping unit corresponding to the film to be loaded, and the clamping unit moves to the coordinate point and grabs the film to be loaded;

[0010] S5: The imaging unit moves to the top of the hole position to capture images according to the coordinates corresponding to the hole position in step S3, and performs image processing on the image of the hole position after the capture, and uses a template matching algorithm combined with the coordinate difference (Δx, Δy) to obtain the coordinates of the clamping unit corresponding to the hole position;

[0011] S6: Control the movable device, according to the hole coordinates obtained in step S5, the clamping part moves to the top of the hole, and the membrane is rotated according to the rotation angle in step S4 and placed in the hole, completing the placement of a membrane;

[0012] S7: Repeat steps S4 to S6 until all the films to be loaded are loaded.

[0013] In a possible implementation of the present application, a mark is provided on the material tray in step S1.

[0014] Preferably, the identification includes a plurality of graphics, and the plurality of graphics are distributed on the material tray.

[0015] Furthermore, the multiple graphics are evenly distributed on the material tray.

[0016] In a possible implementation of the present application, the holes are arranged on the material tray in an array.

[0017] Preferably, the array is arranged in a rectangular array.

[0018] Furthermore, the rectangular array is a 10*10 array.

[0019] In a possible implementation of the present application, the first direction of the diaphragm is a direction in which the central symmetry axis of the diaphragm is horizontal.

[0020] In a possible implementation of the present application, before photographing the target, step S2 further includes a self-checking step of the clamping part to ensure that the clamping part is in an initial position.

[0021] In a possible implementation of the present application, in step S2, calculating the coordinate difference (Δx, Δy) includes the following steps:

[0022] S21: randomly selecting a target point in the spatial coordinate system for shooting, and calculating the actual coordinates (x1, y1) of the imaging unit in the spatial coordinate system according to the shot image;

[0023] S22: According to the actual position of the clamping part at this time, determine the actual coordinates (x2, y2) of the clamping part in the space coordinate system;

[0024] S23: Calculate the coordinate difference (Δx, Δy), (Δx, Δy) = (x1, y1) - (x2, y2).

[0025] In a possible implementation of the present application, the template matching algorithm is selected from one or more of an error algorithm, a quadratic matching error algorithm, and a standard correlation matching algorithm.

[0026] In a possible implementation of the present application, the image processing of the captured diaphragm image in step S4 includes the following steps:

[0027] S41: adjusting the contrast of the diaphragm image;

[0028] S42: performing edge detection and edge enhancement processing on the diaphragm image after adjusting the contrast.

[0029] In a possible implementation of the present application, the image processing of the hole position image after being imaged in step S5 includes the following steps: performing binarization processing on the hole position image.

[0030] In a second aspect, the present application provides a film loading device, the film loading device includes a controller and a movable device, the movable device includes a clamping part and an imaging part;

[0031] The clamping portion and the imaging portion are arranged on the same side of the movable device;

[0032] The controller is used to control the movement of the clamping part and the imaging part.

[0033] In a possible implementation of the present application, the loading device further includes a host computer, which is connected to the controller and can obtain the status of each component in the loading device in real time. The host computer is controlled by software.

[0034] In a possible implementation of the present application, the movable device is selected from one of a robotic arm, a robotic hand, and an automatic robot.

[0035] Preferably, the movable device is a robot.

[0036] In a possible embodiment of the present application, the clamping part is selected from one or more of an electromagnetic adsorption device, a vacuum suction cup, a pneumatic clamp, and a clamping claw. The clamping part can be a suction cup type clamping part, but the method of taking and placing the diaphragm with a suction cup has high requirements on the positioning accuracy of the diaphragm and the size of the suction cup. The diameter of the suction cup must be just within 0.5mm wider than the diameter of the diaphragm, otherwise the diaphragm cannot be sucked normally. If the diaphragm positioning and the actual position have a deviation of more than 0.5mm at this time, the diaphragm cannot be extracted normally.

[0037] Preferably, the clamping part is a clamping claw, which is the most common type of clamping part and has a wide range of applications.

[0038] In a possible implementation of the present application, the imaging unit is selected from a camera or a still camera.

[0039] In a third aspect, the present application provides a storage medium storing executable commands, wherein the executable commands are the method for loading a film as described in any of the above aspects of the present application.

[0040] In a fourth aspect, the present application further provides an electronic device, comprising a processor and a storage medium, wherein the storage medium stores executable commands, and when the executable commands are executed by the processor, the chip loading method described in any of the above aspects of the present application is implemented.

[0041] Advantages of this technical solution:

[0042] 1. The present application uses a clamping part to automatically pick up and place the film, which can effectively avoid scratching the film surface during the film loading process, minimize the difference between the films, and ensure the quality and consistency of the photolithography material;

[0043] 2. According to the characteristics of the film, it is proposed to use edge enhancement, template matching and other image processing algorithms to locate and identify the angle of the film, which can ensure the correct positioning and placement of the film during the film loading process, and improve the accuracy and consistency of the final engraved pattern;

[0044] 3. The angle deviation of the automatically placed diaphragm is small. Compared with the target diaphragm position, the deviation angle of the diaphragm can be controlled within 2 degrees, which can effectively reduce the time for the lithography machine to compensate for the angle and improve the exposure efficiency;

[0045] 4. Compared with the traditional manual film loading method, automatic film loading technology requires less professionalism from operators, can reduce the need for manual operation, help reduce labor demand and improve efficiency, and reduce the labor cost of the entire process;

[0046] 5. The wafer loading method provided by the present application solution can also improve the flexibility of the lithography process by allowing it to be used in different lithography processes without changing the design. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0048] Figure 1 A flowchart of a method for loading a wafer provided in one embodiment of the present application;

[0049] Figure 2 A schematic diagram of an activity area of ​​an activity device provided in one embodiment of the present application;

[0050] Figure 3 An original image of a diaphragm provided in one embodiment of the present application;

[0051] Figure 4 An original image of a diaphragm for adjusting contrast provided in one embodiment of the present application;

[0052] Figure 5 The original image of the film after edge processing provided in one embodiment of the present application;

[0053] Figure 6 A membrane identification result provided in one embodiment of the present application;

[0054] Figure 7 The original hole position image captured by the imaging unit in one embodiment of the present application;

[0055] Figure 8 A material tray hole position identification result provided in one embodiment of the present application;

[0056] Fig. 9 A schematic diagram of the position of a film to be loaded provided in one embodiment of the present application;

[0057] Fig.10 A schematic diagram of the position of a film to be loaded provided in one embodiment of the present application;

[0058] Fig.11A position diagram of a clamping portion and an imaging portion provided in one embodiment of the present application;

[0059] Fig.12 A position diagram of a clamping portion and an imaging portion provided in one embodiment of the present application;

[0060] Fig.13 A host computer software interface provided in one embodiment of the present application;

[0061] Fig.14 It is a host computer software interface provided in one embodiment of the present application.

[0062] In the figure: 1-movable device; 11-clamping part; 12-imaging part; 2-material tray; 3-diaphragm. DETAILED DESCRIPTION

[0063] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0064] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0065] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0066] In the description of this application, it should be noted that the terms "upper", "lower", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0067] It should be noted that, in the absence of conflict, different features in the embodiments of the present application may be combined with each other.

[0068] The specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings.

[0069] See also Figure 1 In one embodiment of the present application, a method for loading a film is provided, and the method for loading a film comprises the following steps:

[0070] S1: Collect images of the material tray 2, the hole positions, and the diaphragm 3, wherein the diaphragm 3 is placed in a first direction and the hole positions are located on the material tray 2, and generate a template library according to the collected images;

[0071] During the photolithography process, the film 3 needs to be placed on the material tray 2 at a specified position to complete the subsequent exposure step. The shape and material of the material tray 2 are various. For example, the shape can be rectangular, circular, or square; the material can be plastic, metal, etc. to meet the needs of different processing techniques.

[0072] In this embodiment, several holes are set on the material tray 2 according to design requirements for placing the diaphragm 3 later. The arrangement of the holes on the material tray 2 is determined according to actual needs. For example, they can be arranged in a circular pattern, a rectangular array pattern, an irregular pattern, etc. The shape of the holes is generally consistent with the shape of the diaphragm 3, such as a circular hole or a square hole. The diaphragm 3 is customized according to actual needs and can be circular or square. Different overlay marks can be set on the diaphragm 3 to distinguish different diaphragms 3. For example, the overlay marks can be letters, numbers, shapes, and are specifically designed according to actual processing needs.

[0073] In this embodiment, a typical process is as follows: use a suitable image acquisition device (such as a high-resolution camera, scanner, etc.) to acquire images of the material tray 2, the hole position and the diaphragm 3, collect the acquired images, and generate corresponding template images for each material tray 2, the hole position and the diaphragm 3. The template should contain sufficient information to describe the key features such as the shape, size, position, mark, and overlay mark of the material tray 2, the hole position and the diaphragm 3. The number of images acquired is based on the number of images that can be clearly described, and the specific number depends on the size of the material tray 2, the hole position and the diaphragm 3.

[0074] S2: Establishing a spatial coordinate system including the entire active area of ​​the active device 1, wherein the active device 1 includes a clamping portion 11 and an imaging portion 12, and randomly selecting a target point in the spatial coordinate system for shooting, and calculating a coordinate difference (Δx, Δy) between the clamping portion 11 and the imaging portion 12 in the spatial coordinate system according to the shot image;

[0075] In one embodiment of the present application, the movable device 1 is defined as a device that can move in a two-dimensional space plane, which may be a mechanical arm, a robot or other equipment that can move and operate. The movable device 1 has a certain range of activity in the two-dimensional plane. Theoretically, any point within the range of activity can be used as the coordinate origin. In actual operation, the boundary point of the range of activity is often selected as the coordinate origin, which is more convenient for subsequent conversion. For example, when the range of activity is a square, the four vertices of the square can be selected as the coordinate origin; when the range of activity is a circle, a point on the outer circumference of the circular trajectory can be selected as the coordinate origin.

[0076] See also Figure 2 , Figure 2 An exemplary method of establishing a coordinate system is given. The movable device 1 can move to the upper left, lower left, upper right, and lower right, and can also perform operations such as translation, left-right movement, and rotation. The dotted box diagram schematically shows the range of motion of the movable device 1. At this time, the coordinate origin of the coordinate system selects the lower left corner of the range of motion. The purpose of establishing a spatial coordinate system is to establish a reference frame for determining the coordinate positions of various parts on the movable device 1, so as to actually manipulate the clamping part 11 and the imaging part 12 to the specified position later.

[0077] In one embodiment of the present application, the movable device 1 includes two main parts: a clamping part 11 and an imaging part 12. The clamping part 11 is used to grasp, move or manipulate an object; the imaging part 12 is used to capture an image of a target point. The clamping part 11 needs to be able to move to the position where the imaging part 12 captures the target point in order to achieve the technical effect. Exemplarily, the clamping part 11 can be a bendable spring manipulator. In this case, the clamping part 11 and the imaging part 12 may not be arranged on the same side, and the purpose of clamping can be achieved by bending the spring; the clamping part 11 can also be an inflexible manipulator. In this case, the clamping part 11 and the imaging part 12 need to be arranged on the same side to achieve the purpose of clamping.

[0078] In one embodiment of the present application, one or more target points are randomly selected in the established spatial coordinate system, and the imaging unit 12 moves to the position of these target points and takes pictures, and obtains the image of the target points. At this time, the coordinates of the imaging unit 12 are (x1, y1), and the corresponding coordinates of the clamping unit 11 are (x2, y2). At this time, Δx = x2-x1, Δy = y2-y1. The difference between the two coordinates represents the relative position difference between the clamping unit 11 and the imaging unit 12 in the x and y directions, which is convenient for the subsequent coordinate conversion.

[0079] S3: the imaging unit 12 takes images of the material tray 2 and the hole positions again, and uses a template matching algorithm to obtain the coordinates of the hole positions corresponding to the imaging unit 12;

[0080] In one embodiment of the present application, the imaging unit 12 takes photos of the hole positions on the material tray 2, uses the standard image or features of the hole positions, and compares them with the template library obtained in step S1 to find the most matching image, and records the coordinate position of the imaging unit 12 at this time. By repeating this step, the position of the imaging unit 12 corresponding to each hole position in the coordinate system can be accurately obtained.

[0081] S4: the imaging unit 12 captures an image of the film 3 to be loaded, and performs image processing on the captured image of the film 3, using a template matching algorithm combined with a coordinate difference (Δx, Δy) to obtain the coordinates and rotation angle of the clamping unit 11 corresponding to the film 3 to be loaded, and the clamping unit 11 moves to the coordinate point and grabs the film 3 to be loaded;

[0082] In one embodiment of the present application, the imaging unit 12 captures the image of the diaphragm 3 to be mounted. For example, the image can be taken and transmitted back to the control system, or the image can be taken by directly scanning and uploading to the system. After the image of the diaphragm 3 is obtained, a series of image processing operations can be performed on it to more easily identify and analyze the characteristics of the diaphragm 3. For example, filtering, edge detection, binarization and other image processing methods can be used to process the photo of the diaphragm 3. After obtaining the photo of the diaphragm 3, the standard image or feature of the photo of the diaphragm 3 is compared with the template library obtained in step S1 to find the most matching image, and the coordinate position of the imaging unit 12 at this time is recorded. At this time, the coordinates of the imaging unit 12 are transformed into the coordinates of the clamping unit 11 in combination with the coordinate difference (Δx, Δy).

[0083] Exemplarily, in one embodiment of the present application, the film 3 to be loaded is first photographed, and after the photographed image of the film 3 is processed, a module matching algorithm is used to obtain the most matching image of the film 3. At this time, the coordinate position of the imaging portion 12 is assumed to be (1,2), and the coordinate difference in the exemplary embodiment is (2,3), then the coordinate of the clamping portion 11 is (3,5).

[0084] The diaphragm 3 needs to be adjusted according to the first direction of the diaphragm 3 in the template library, and finally the diaphragm 3 is adjusted to the same direction as the first direction. Exemplarily, the first direction is the direction in which the central axis of the diaphragm 3 is horizontal. Through template comparison, it is found that the angle between the central axis of the diaphragm 3 to be placed and the horizontal line is 45°, so the rotation angle of the diaphragm 3 is 45° in the clockwise direction. Through the above calculation process, the clamping part 11 is controlled to move to (3,5) in the coordinate system and clamp a diaphragm 3.

[0085] In this technical solution, the recognition of the image of the diaphragm 3 is the key link for the subsequent gripping and angle correction of the diaphragm 3 by the clamping part 11. Figure 3 shown.

[0086] When calculating the position and deflection angle of the diaphragm 3, it is usually identified by a typical mark on the diaphragm 3. In this embodiment, see Figure 3 As shown, the image recognition is performed on the mirrored "L" and "T" marks on the film 3. Since the fill color inside the film 3 mark is the same as the film 3 background color, and the noise such as dust is the same as the mark edge color, the conventional edge detection or template matching algorithm has a low accuracy rate in recognizing the film 3 mark. In this embodiment, the contrast of the film 3 image is adjusted to improve its pattern visibility. The image of the film 3 after contrast adjustment can be seen in FIG. Figure 4 shown.

[0087] In order to improve the accuracy of identifying the mark on the film 3, the edge of the film 3 pattern can be detected by an edge detection algorithm and then edge enhancement processing can be performed, which can effectively suppress the interference of yellow light and make the pattern outline clearer. Figure 5 As shown, the template matching algorithm is finally used to mark and identify the edge-processed membrane 3 image, and the result is as follows Figure 6 As shown, the features of the membrane 3 can be accurately identified by the characteristic markings.

[0088] After the above processing of the membrane 3 image, the recognition accuracy of the membrane 3 image can be effectively improved, the mark on the membrane 3 pattern can be effectively recognized, the current position coordinates of the membrane 3 and the angle deviation relative to the first direction can be output, and finally the membrane 3 can be grasped.

[0089] S5: the imaging unit 12 moves to the top of the hole position to capture images according to the coordinates corresponding to the hole position in step S3, and performs image processing on the image of the hole position after the capture, and adopts a template matching algorithm combined with the coordinate difference (Δx, Δy) to obtain the coordinates of the clamping unit 11 corresponding to the hole position;

[0090] In one embodiment of the present application, the imaging unit 12 controls the imaging unit 12 to move to the corresponding position to capture the hole position according to the hole position coordinates obtained in step S3. For example, the image can be taken and transmitted back to the control system, or the image can be taken by directly scanning and uploading to the system. After the image of the hole position is obtained, a series of image processing operations can be performed on it to more easily identify and analyze the characteristics of the hole position. For example, filtering, edge detection, binarization and other image processing methods can be used to process the photo of the hole position.

[0091] After obtaining the hole position photo, the standard image or feature of the hole position photo is compared with the template library obtained in step S1 to find the best matching image, and the coordinate position of the imaging part 12 at this time is recorded. At this time, combined with the coordinate difference (Δx, Δy), the coordinates of the imaging part 12 are transformed into the coordinates of the clamping part 11 corresponding to the hole position. The coordinate conversion method is the same as that described in step S4. After imaging each hole position in turn, the coordinates of the clamping part 11 corresponding to each hole position can be obtained.

[0092] During the process of placing the diaphragm 3, if the placement position is only determined by the marking of the material tray 2, the position of the material tray 2 will be offset to a certain extent during the long-term placement, resulting in the diaphragm 3 not being correctly placed in the material tray 2. Therefore, it is necessary to move the camera to the approximate position of the hole before placing the diaphragm 3 each time, and then place the diaphragm 3 after accurately locating the hole through image processing. In one embodiment of the present application, the original image and recognition result of the hole position recognition can be seen in Figure 7 , Figure 8 shown.

[0093] Figure 7 The original hole position image captured by the imaging unit 12 has a large halo. Due to factors such as the environment and light intensity, there will be certain errors in hole position recognition. Therefore, the hole position image is binarized and then the template matching algorithm is used to identify the hole position to obtain its center point position. For the recognition result, please refer to Figure 8 shown.

[0094] S6: Control the movable device 1, according to the hole coordinates obtained in step S5, the clamping part 11 moves to the top of the hole, and the membrane 3 is rotated according to the rotation angle in step S4 and placed in the hole, completing the placement of a membrane 3;

[0095] In one embodiment of the present application, the coordinates of the clamping part 11 corresponding to each hole position can be obtained from step S5. At this time, the clamping part 11 can be moved above the hole position according to the coordinate information. At this time, the clamping part 11 has clamped a piece of diaphragm 3. At this time, according to the rotation angle obtained in step S4, for example, it is necessary to rotate 45° clockwise. The clamping part 11 then performs a corresponding rotation operation on the diaphragm 3 and puts it into the corresponding hole position. At this time, the upper sheet of a piece of diaphragm 3 is completed.

[0096] S7: Repeat steps S4 to S6 until all the films 3 to be loaded are loaded.

[0097] Steps S4 to S6 are for placing a film 3, which needs to be repeated several times to complete the placement of all the films 3. Please refer to the placement position of the film 3 to be placed. Fig. 9 , Fig.10; The upper film 3 needs to be placed within the range of the movable device 1 before it can be imaged and clamped. Please refer to Fig. 9 , the membrane 33 to be loaded can be located on the material tray 2; see Fig.10 The membrane 33 to be loaded can also be located outside the material tray 2, as long as it is placed within the range of motion (within the dotted line frame) of the movable device 1. The number of membranes 3 to be loaded is flexible, but the number of membranes 3 to be loaded needs to match the number of holes.

[0098] In one embodiment of the present application, a mark is provided on the material tray 2 in step S1. Exemplarily, the mark can be in various shapes, and the mark is provided to further improve the recognition efficiency, and the corresponding image in the template library can be quickly recognized through a specific graphic.

[0099] Preferably, the identification includes a plurality of graphics, which may be circular, square, triangular, or irregular in shape, and the plurality of graphics may be distributed on the material tray 2, and may be evenly distributed or unevenly distributed, as long as they play an identification role.

[0100] Preferably, the plurality of graphics are evenly distributed on the material tray 2 .

[0101] In one embodiment of the present application, the holes are arranged on the material tray 2 in an array form. The holes are arranged on the material tray 2 in a regular pattern. The regular arrangement facilitates the identification and positioning of the hole coordinates in the later stage.

[0102] Preferably, the array is arranged in a rectangular array.

[0103] Furthermore, the rectangular array is a 10*10 array.

[0104] In one embodiment of the present application, the first direction of the diaphragm 3 is a direction in which the central symmetry axis of the diaphragm 3 is horizontal. The first direction can be selected in a variety of ways according to actual operational needs. For example, it can be a direction in which the central symmetry axis of the diaphragm 3 is horizontal, a direction in which the central symmetry axis of the diaphragm 3 is vertical, or a direction in which the central symmetry axis of the diaphragm 3 forms a certain angle with the horizontal. In this embodiment, the first direction selects a direction in which the central symmetry axis of the diaphragm 3 is horizontal. The first direction can be determined according to actual needs. In this embodiment, the horizontal direction is selected to facilitate the later determination of the relative rotation angle.

[0105] In one embodiment of the present application, before photographing the target, step S2 also includes a self-checking step of the clamping part 11 to ensure that the clamping part 11 is in an initial position. Self-checking is an automatic checking mechanism of a device or system to ensure that its components or functions are within a normal working range. In the self-checking step of the clamping part 11, the device checks the state of the clamping part 11, including its position, posture (posture) and other relevant parameters, and the initial posture is the predetermined position of the clamping part 11 before starting to perform a task.

[0106] Exemplarily, the initial posture can be represented by the coordinates of a coordinate system. For example, the initial posture is set to the position where the coordinates of the clamping part 11 are (0, 0). The self-check step can ensure that the clamping part 11 is in the correct initial posture before preparing to grasp or operate the object, which facilitates the subsequent operation of the clamping part 11 and the conversion of coordinates.

[0107] In one embodiment of the present application, in step S2, calculating the coordinate difference (Δx, Δy) includes the following steps:

[0108] S21: randomly selecting a target point in the spatial coordinate system for shooting, and calculating the actual coordinates (x1, y1) of the imaging unit 12 in the spatial coordinate system according to the shot image;

[0109] S22: According to the actual position of the clamping portion 11 at this time, determine the actual coordinates (x2, y2) of the clamping portion 11 in the space coordinate system;

[0110] S23: Calculate the coordinate difference (Δx, Δy), (Δx, Δy) = (x1, y1) - (x2, y2).

[0111] In the embodiment of the present application, the positions of the clamping portion 11 and the imaging portion 12 can be set according to actual needs. For example, see Fig.11 , Fig.12 ; Fig.11 The middle clamping portion 11 and the imaging portion 12 are located on the same straight line, and have the same y coordinate, so the coordinate difference Δy is 0; Fig.12 If the clamping portion 11 and the imaging portion 12 are not located on the same straight line, the coordinate difference (Δx, Δy) is the coordinate difference between the clamping portion 11 and the imaging portion 12 .

[0112] In one embodiment of the present application, the template matching algorithm is selected from one or more of an error algorithm, a quadratic matching error algorithm, and a standard correlation matching algorithm. A template matching algorithm is an algorithm that searches for the most similar part of a known template in input data (such as an image, text, or signal). Exemplarily, it can be selected from one or more of an error algorithm, a quadratic matching error algorithm, and a standard correlation matching algorithm. The selection of an algorithm depends on the specific application scenario, performance requirements, and characteristics of the input data. Some algorithms may perform better in the case of large noise or template deformation, while other algorithms may be more efficient when processing high-speed data streams, which needs to be determined according to actual conditions.

[0113] In one embodiment of the present application, the image processing of the captured image of the diaphragm 3 in step S4 includes the following steps:

[0114] S41: adjusting the contrast of the diaphragm 3 image; contrast adjustment is a commonly used technique in image processing, which is used to improve the visual effect of an image or highlight certain features in an image. In this embodiment, contrast adjustment can help to display the details and features of the diaphragm 3 more clearly.

[0115] Contrast adjustment is usually based on remapping of pixel values ​​to make the difference between bright and dark areas of the image more significant. Specific adjustment methods, for example, include linear contrast stretching, histogram equalization, etc. These methods can increase the dynamic range of the image, making the details that were originally difficult to distinguish become clearly visible in the adjusted image.

[0116] S42: edge detection and edge enhancement processing are performed on the diaphragm 3 image after the contrast is adjusted; edge detection is used to extract edge information in the image, that is, the area in the image where the brightness changes dramatically. Edge enhancement is to highlight the detected edge to make the edge more obvious. After edge detection and edge enhancement processing, the edge information in the diaphragm 3 image is highlighted, which is convenient for subsequent image recognition processing and film loading.

[0117] In one embodiment of the present application, the image processing of the hole position image after the image is taken in step S5 includes the following steps: binarization of the hole position image. In this embodiment, the main purpose of the binarization is to convert the original grayscale or color image into an image containing only two colors (usually black and white) to simplify the image information and facilitate subsequent analysis and processing. In the scenario of hole position image processing, binarization helps to clearly identify and locate the hole positions in the image.

[0118] In this embodiment, after the binarization process, the hole area in the hole image will appear black, and the background area will appear white. This makes the position and shape of the hole clearer, which is convenient for subsequent recognition, analysis, positioning and other operations. At the same time, the binarization process can also greatly reduce the amount of image data, saving storage and transmission costs.

[0119] In a second aspect, the present application provides a film loading device, the film loading device comprises a controller and a movable device 1, the movable device 1 comprises a clamping portion 11 and an imaging portion 12;

[0120] In one embodiment of the present application, the controller is responsible for controlling the operation and action of the entire loading device. Exemplarily, the controller is selected from one or more of a microprocessor, a programmable logic controller, or other intelligent control devices;

[0121] The movable device 1 is a part of the film loading device that can move freely within a certain range;

[0122] The clamping portion 11 and the imaging portion 12 are arranged on the same side of the movable device 1;

[0123] The clamping part 11 is a part of the film loading device used to clamp, fix or move an object, and can accurately clamp and place the film 3 according to the instructions of the controller;

[0124] The imaging unit 12 is an image acquisition device used to capture images. These images can be used to identify objects and determine their locations;

[0125] The controller is used to control the movement of the clamping part 11 and the imaging part 12;

[0126] The image data captured by the imaging unit 12 is transmitted to the controller, which may use an algorithm to analyze the data and adjust the actions of the imaging unit 12 and the clamping unit 11 accordingly.

[0127] In one embodiment of the present application, the loading device further includes a host computer, which is connected to the controller and can obtain the status of each component in the loading device in real time. The host computer is controlled by software.

[0128] The entire loading device can be controlled by the host computer software. Click the start button of the host computer software to start the system. The host computer operation interface is as follows: Fig.13 shown. Fig.13 This is the positioning result of the material tray 2. By identifying the marks on the three corners of the square material tray 2, the specific position of the material tray 2 is obtained, and the position information of all holes in the material tray 2 is deduced. Fig.14 In order to utilize the diaphragm 3 recognition algorithm to extract the position and angle information of the diaphragm 3, the recognition result is finally realized to grasp and place the diaphragm 3, and the angle deflection error is controlled within 2 degrees.

[0129] In one embodiment of the present application, the movable device 1 is selected from one of a robotic arm, a robotic hand, and an automatic robot.

[0130] Preferably, the movable device 1 is a robot, which has mature technology and many options.

[0131] In one embodiment of the present application, the clamping portion 11 is selected from one or more of an electromagnetic adsorption device, a vacuum suction cup, a pneumatic clamp, and a clamping claw. In one embodiment of the present application, the clamping portion 11 is a vacuum suction cup. When a vacuum suction cup is used, the method of taking and placing the membrane 3 by the suction cup has high requirements on the positioning accuracy of the membrane 3 and the size of the suction cup. The diameter of the suction cup must be just within 0.5mm wider than the diameter of the membrane 3, otherwise the membrane 3 cannot be normally sucked. If the positioning of the membrane 3 is more than 0.5mm away from the actual position, the membrane 3 cannot be extracted normally.

[0132] In one embodiment of the present application, the clamping portion 11 is a clamping claw, which has wider applicability and better stability.

[0133] In a possible implementation of the present application, the imaging unit 12 is selected from a camera or a still camera.

[0134] In the third aspect, the present application provides a storage medium, the storage medium stores executable commands, and the executable commands are the on-chip method described in any of the above aspects of the present application. If the on-chip method described in the present application is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor (processor) to perform all or part of the steps of each implementation method of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program code.

[0135] In a fourth aspect, the present application further provides an electronic device, comprising a processor and a storage medium, wherein the storage medium stores executable commands, and when the executable commands are executed by the processor, the chip loading method described in any of the above aspects of the present application is implemented.

Claims

1. A method for loading a sheet, characterized in that: The method for loading a sheet comprises the following steps: S1: Collecting images of a material tray, a hole position, and a membrane, wherein the membrane is placed in a first direction and the hole position is located on the material tray, and generating a template library according to the collected images; S2: establishing a spatial coordinate system including the entire active area of ​​the active device, wherein the active device includes a clamping portion and an imaging portion, and randomly selecting a target point in the spatial coordinate system for photographing, and calculating a coordinate difference (Δx, Δy) between the clamping portion and the imaging portion in the spatial coordinate system according to the photographed image; S3: The imaging unit takes images of the material tray and the hole positions again, and uses a template matching algorithm to obtain the coordinates of the imaging unit corresponding to the hole positions; S4: The imaging unit captures an image of the film to be loaded, and performs image processing on the captured film image, using a template matching algorithm combined with a coordinate difference (Δx, Δy) to obtain the coordinates and rotation angle of the clamping unit corresponding to the film to be loaded, and the clamping unit moves to the coordinate point and grabs the film to be loaded; S5: The imaging unit moves to the top of the hole position to capture images according to the coordinates corresponding to the hole position in step S3, and performs image processing on the image of the hole position after the capture, and uses a template matching algorithm combined with the coordinate difference (Δx, Δy) to obtain the coordinates of the clamping unit corresponding to the hole position; S6: Control the movable device, according to the hole coordinates obtained in step S5, the clamping part moves to the top of the hole, and the membrane is rotated according to the rotation angle in step S4 and placed in the hole, completing the placement of a membrane; S7: Repeat steps S4 to S6 until all the films to be loaded are loaded.

2. The method for loading a sheet according to claim 1, characterized in that: In the step S1, a mark is provided on the material tray.

3. The method for loading a sheet according to claim 2, characterized in that: The identification includes a plurality of graphics, and the plurality of graphics are distributed on the material tray.

4. The method for loading a sheet according to claim 1, characterized in that: The holes are arranged on the material tray in an array.

5. The method for loading a sheet according to claim 4, characterized in that: The array arrangement is a rectangular array.

6. The method for loading a sheet according to claim 1, characterized in that: The first direction of the diaphragm is a direction in which the central symmetry axis of the diaphragm is horizontal.

7. The method for loading a sheet according to claim 1, characterized in that: Before photographing the target, step S2 also includes a self-checking step of the clamping part to ensure that the clamping part is in an initial position.

8. The method for loading a sheet according to claim 1, characterized in that: In step S2, the calculation of the coordinate difference (Δx, Δy) includes the following steps: S21: randomly selecting a target point in the spatial coordinate system for shooting, and calculating the actual coordinates (x1, y1) of the imaging unit in the spatial coordinate system according to the shot image; S22: According to the actual position of the clamping part at this time, determine the actual coordinates (x2, y2) of the clamping part in the space coordinate system; S23: Calculate the coordinate difference (Δx, Δy), (Δx, Δy) = (x1, y1) - (x2, y2).

9. The method for loading a sheet according to claim 8, characterized in that: The image processing of the captured diaphragm image in step S4 includes the following steps: S41: adjusting the contrast of the diaphragm image; S42: performing edge detection and edge enhancement processing on the diaphragm image after adjusting the contrast.

10. The method for loading a sheet according to claim 1, characterized in that: The image processing of the hole position image after being imaged in step S5 includes the following steps: performing binarization processing on the hole position image.

11. A wafer loading device capable of executing the wafer loading method according to any one of claims 1 to 10, characterized in that: The film loading device includes a controller and a movable device, and the movable device includes a clamping part and an imaging part; The clamping portion and the imaging portion are arranged on the same side of the movable device; The controller is used to control the movement of the clamping part and the imaging part.

12. The sheet loading device according to claim 11, characterized in that: The loading device also includes a host computer, which is connected to the controller and can obtain the status of each component in the loading device in real time. The host computer is controlled by software.

13. The sheet loading device according to claim 11, characterized in that: The movable device is selected from one of a mechanical arm, a mechanical hand, and an automatic robot.

14. The sheet loading device according to claim 11, characterized in that: The clamping part is selected from one or more of an electromagnetic adsorption device, a vacuum suction cup, a pneumatic clamper, and a clamping claw.

15. A storage medium, characterized in that: The storage medium stores executable commands, and the executable commands are the method for loading a film according to any one of claims 1 to 10.

16. An electronic device, characterized in that: The electronic device comprises a processor and a storage medium, wherein the storage medium stores executable commands, and when the executable commands are executed by the processor, the method for loading a chip according to any one of claims 1 to 10 is implemented.

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