Bonding tool with decoupled motion axis

Abstract

A bonding tool with a decoupling mechanism includes: a shaft; a rotation module coupled with a first portion of the shaft; a rotary motion actuator operably connected to the rotary module and operably used for driving the rotary module and the shaft to rotate around a rotary shaft basically extending along the central axis of the shaft; a linear motion module coupled to a second portion of the shaft, the second portion being separate from the first portion; and a linear motion actuator operably connected to the linear motion module and operably driving the linear motion module and the shaft to move in a direction parallel to the rotation axis.

Description

Technical Field

[0001] The present invention generally relates to a bonding tool for picking up and placing electronic components (e.g., chips) and applying a bonding force to the electronic components during a bonding operation, and more particularly, to a bonding tool or a bonding arm having a decoupling mechanism for decoupling a rotational motion axis and a linear motion axis of the bonding arm. Background Art

[0002] In the epoxy resin chip bonding process, the bonding arm is one of the core modules of the bonding tool, which is configured to provide a force for picking up and placing chips and adjusting the rotation angle orientation of the picked chips. In order to achieve the above functions, the bonding arm is usually designed to have a rotation axis and a linear motion axis. In a traditional bonding arm, one of the two axes is set as a base axis, and the other axis is mounted on the base axis and moves on the top of the base axis. Coupling the two axes will not only increase the load of the driving system of the rotational motion and linear motion in the bonding arm, but also have an extremely adverse effect on the actuation and stopping characteristics and positioning accuracy of the bonding arm. In order to decouple the coupling between the two axes, different bonding arms have been proposed.

[0003] In one prior art bonding arm, a timing belt is used to drive the rotating shaft / rod to achieve decoupling. However, since the timing belt is an indirect drive mechanism, there is a delay before the output of the rotary motor drives the rotating shaft through the timing belt, which can cause inconsistent bonding force. In addition, since the bonding tool is designed to be asymmetrical around the linear motion axis, a bending moment is generated during the application of bonding force.

[0004] In another prior art bond arm, a set of gears is used to drive the rotating shaft for decoupling. However, the friction between the gear teeth may cause inconsistent bonding force. In addition, the gap between the gears may cause rotational gap in the rotating shaft of the bond arm. In addition, the friction caused by using a pneumatic cylinder to guide the linear motion shaft will also cause inconsistent bonding force applied to the chip.

[0005] Therefore, it would be beneficial to provide a new bond arm design with a decoupling mechanism that avoids at least one of the above-mentioned disadvantages of the prior art bond arms. Summary of the invention

[0006] Therefore, an object of the present invention seeks to provide an improved bonding tool or bonding arm having a decoupling mechanism for decoupling the coupling between the rotation axis and the linear motion axis of the bonding tool.

[0007] According to various embodiments of the present invention, a bonding tool with a novel decoupling mechanism is provided. The bonding tool includes: a shaft; a rotation module coupled to a first portion of the shaft; a rotational motion actuator operably connected to the rotational module and operable to drive the rotational module and the shaft to rotate around a rotation axis extending substantially along a central axis of the shaft; a linear motion module coupled to a second portion of the shaft, the second portion being separated from the first portion; and a linear motion actuator operably connected to the linear motion module and operable to drive the linear motion module and the shaft to move in a direction parallel to the rotational axis.

[0008] The bond arm proposed in various embodiments of the present invention includes: separate rotational and linear motion modules, which are respectively coupled to two separate parts of the shaft and driven by corresponding actuators or motors. Since the rotational motion and linear motion of the bond arm are actuated by respective direct drive mechanisms, the inconsistent bonding force caused by any indirect drive mechanism can be substantially avoided. According to the proposed design, the linear motion module and the rotational module will not move together, so the rotational motion and linear motion of the bond arm will be effectively decoupled, and the position control of the bond arm will be greatly improved.

[0009] In some embodiments, the first portion of the shaft may be an upper portion of the shaft, and the second portion may be a lower portion of the shaft separated from the upper portion. That is, the rotation module may be coupled to the upper portion of the shaft, and the linear motion module may be coupled to the lower portion of the shaft. Alternatively, the first portion may be the lower portion of the shaft, and the second portion may be the upper portion of the shaft. That is, the rotation module may be coupled to the lower portion of the shaft, and the linear motion motor may be coupled to the upper portion of the shaft.

[0010] Preferably, the shaft may pass through a central hole formed on the rotation module and a central hole formed on the linear motion module, so that a connection device that provides vacuum to the shaft to pick up and transfer electronic components can be releasably and conveniently connected to the shaft. Alternatively, the shaft may not pass through or only partially pass through a central hole formed on the rotation module or the linear motion module, which is coupled to an upper portion of the shaft.

[0011] In order to reduce friction between different components during the rotational movement of the bonding tool, the bonding tool also includes: a first rotation bearing, which is coupled to the rotation module to guide the rotation module to rotate around the rotation axis; and a second rotation bearing, which is coupled to the second part of the shaft to guide the shaft to rotate around the rotation axis.

[0012] In order to reduce friction between different components during the linear movement of the bonding tool, the bonding tool also includes: a first linear bearing coupled to the rotation module and the first portion of the shaft to guide the shaft to move in a direction parallel to the rotation axis; and a second linear bearing coupled to the linear motion module to guide the linear motion module to move in a direction parallel to the rotation axis.

[0013] In some embodiments, the first linear bearing may include a flexible member or a spherical ridge. The first linear bearing is configured to transmit rotational power from the rotary motion actuator to the shaft and guide the linear motion of the shaft. That is, a degree of freedom of motion is provided in a direction parallel to the rotation axis to enable the shaft to move up and down.

[0014] In some embodiments, the second linear bearing may include at least one flexible member, a linear bushing, a cage bearing or a spherical ridge, which is coupled to the linear motion module for guiding the linear motion module to move in a direction parallel to the rotation axis. Preferably, the second linear bearing may include two flexible members, one flexible member coupled to the top of the linear motion module and the other flexible member coupled to the bottom of the linear motion module. The second linear bearing is configured to guide the linear motion of the linear motion module. Since the flexible member acts as a non-contact linear bearing, no friction is generated between the flexible member and the linear motion module during the linear motion of the linear motion module, thereby avoiding inconsistent bonding force caused by friction between the linear motion module and the linear bearing.

[0015] In order to provide a more precise bonding force, the linear motion actuator is designed to include at least two linear motion motors, such as electromagnetic motors or piezoelectric motors, which are symmetrically arranged around the axis so that the total linear actuation force applied to the linear motion module is substantially collinear with the center of gravity of all linear motion components of the bonding tool and the functional point of the bonding tool. Through this collinear arrangement, the generation of bending moment during the linear motion of the bonding tool can be avoided.

[0016] The bonding tool may further include a housing, wherein the rotary motion actuator and the linear motion actuator are fixedly mounted in the housing. The housing is immovable relative to other components or assemblies of the bonding tool. The housing may be designed to include a first housing portion and a second housing portion connected to each other. The first housing portion is configured to accommodate the rotary motion actuator, the rotary module, and a first portion of the shaft. The second housing portion is configured to accommodate the linear motion actuator, the linear motion module, and a second portion of the shaft. Since the linear motion actuator is fixedly mounted in the housing, it will not move with the linear motion module. In this way, the moving mass of the linear motion shaft can be minimized, thereby making the minimum bonding force smaller than the bonding arm of the prior art, and allowing the positioning of the bonding arm to be more precise.

[0017] To monitor the linear motion of the shaft, the bonding tool may further include at least one linear encoder mounted on the housing of the bonding tool and coupled to the linear motion module, wherein a linear scale of the linear encoder may be linearly moved with the linear motion module to determine the linear position of the shaft. To avoid inconsistent bonding forces due to the center of gravity of all linear motion components being offset from the center of the shaft, the bonding tool may be designed to include two similar or identical linear encoders symmetrically arranged around the shaft.

[0018] The above and other features, aspects and advantages will be better understood from the following description, appended claims and accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Embodiments of the present invention will be described hereinafter by way of example only with reference to the accompanying drawings, in which:

[0020] Figure 1A is a schematic cross-sectional view of a bonding tool according to a first embodiment of the present invention;

[0021] Figures 1B to 1D The bonding tool is shown along Figure 1A Horizontal cross-sections of planes A-A', B-B' and CC' shown;

[0022] Figure 1E According to the first embodiment, when the axis of the bonding tool moves upward parallel to the rotation axis Figure 1A A schematic cross-sectional view of a bonding tool is shown;

[0023] Figure 2 is a schematic cross-sectional view of a bonding tool according to a second embodiment of the present invention;

[0024] Figure 3 is a schematic cross-sectional view of a bonding tool according to a third embodiment of the present invention;

[0025] Figure 4 is a schematic cross-sectional view of a bonding tool according to a fourth embodiment of the present invention;

[0026] Figure 5A is a schematic cross-sectional view of a bonding tool according to a fifth embodiment of the present invention; FIG. 5B to FIG. 5D They respectively show that Figure 5A A perspective view of the ball spine, cage bearing and linear bushing used in the bonding tool shown;

[0027] Fig. 6A is a schematic cross-sectional view of a bonding tool according to a sixth embodiment of the present invention; Figure 6B is a perspective view of a linear motion guide according to a sixth embodiment;

[0028] Figure 7 is a schematic cross-sectional view of a bonding tool according to a seventh embodiment of the present invention; and

[0029] Figure 8 is a schematic cross-sectional view of a bonding tool according to an eighth embodiment of the present invention.

[0030] In the drawings, the same components are denoted by the same reference numerals. DETAILED DESCRIPTION

[0031] Figure 1A is a schematic cross-sectional view of a bonding tool 100 according to a first embodiment of the present invention. Figures 1B to 1D The bonding tool 100 is shown along the Figure 1A Horizontal cross-sections of planes A-A', B-B' and CC' are shown. Figures 1A to 1D The bonding tool 100 includes a shaft 110 , a rotation module 121 , a rotation motion actuator 122 , a linear motion module 131 , and a linear motion actuator 132 .

[0032] The functional point or end-effector P of the bonding tool 100 is located at the bottom end of the shaft 110 and is used to handle electronic components, such as picking up and placing electronic components, adjusting the rotation angle of the picked components, and applying bonding force to the electronic components. Figure 1AAs shown, the shaft 110 is configured to pass through a central hole formed on the rotation module 121 and a central hole formed on the linear motion module 131, so that a connection device (not shown), such as a pneumatic tube, etc., can be releasably connected to the shaft 110 to provide a vacuum force for processing electronic components to the shaft 110 via a functional point P. The rotation module 121 is coupled to the upper portion of the shaft 110 so that the shaft 110 can rotate together with the rotation module 121. The rotational motion actuator 122 is operably connected to the rotation module 121, and is operably driven to rotate the rotation module 121 and the shaft 110 around a rotation axis 111 extending substantially along the central axis of the shaft 110. In this embodiment, the rotational motion actuator 122 is in the form of an electromagnetic-free rotation motor.

[0033] The linear motion module 131 is coupled to the lower portion of the shaft 110 so that the shaft 110 can move together with the linear motion module 131. The linear motion actuator 132 is operably connected to the linear motion module 131, and operably drives the linear motion module 131 and the shaft 110 to move in a direction parallel to the rotation axis 111, that is, to move up and down parallel to the rotation axis 111. In this embodiment, the linear motion actuator 132 includes two electromagnetic motors 132a, 132b, which are symmetrically arranged around the shaft 110.

[0034] The bonding tool 100 further includes a first rotation bearing 123 and a second rotation bearing 133. The first rotation bearing is coupled to the outer surface of the rotation module 121 to guide the rotation module 121 to rotate around the rotation axis 111. The second rotation shaft 133 is coupled to the lower portion of the shaft 110 to guide the shaft 110 to rotate around the rotation axis 111. The rotation bearings 123, 133 are used to reduce or avoid friction between different slidable parts during the rotational movement of the bonding tool 100.

[0035] The bonding tool 100 further includes a first linear bearing 124 and a second linear bearing 134 so as to reduce or avoid friction between different components during the linear motion of the bonding tool 100. The first linear bearing 124 is configured to couple the rotation module 121 to the upper portion of the shaft 110 so that the rotational power generated by the rotational motion actuator 122 is transmitted to the shaft 110, thereby driving the shaft 110 to rotate around the rotation axis 111 together with the rotation module 121. In this embodiment, the first linear bearing 124 is in the form of a flexible member. The second linear bearing 134 is coupled to the linear motion module 131 to guide the linear motion module 131 to move up and down parallel to the rotation axis 111. In this embodiment, the second linear bearing 134 includes a first flexible member 134a coupled to the top of the linear motion module 131 and a second flexible member 134b coupled to the bottom of the linear motion module 131. The second linear bearing 134 is configured to guide the linear motion of the linear motion module 131. The second flexible member 134b of the second linear bearing 134 is also configured to support the linear motion module 131.

[0036] The bonding tool 100 further includes a housing 101, wherein the rotary motion actuator 122 and the linear motion actuator 132 are fixedly mounted in the housing 101. The housing 101 is immovable relative to other components or assemblies of the bonding tool 100. The housing 101 is designed to include an upper housing portion 101a and a lower housing portion 101b connected to each other. The upper housing portion 101a is configured to accommodate the rotary motion actuator 122, the rotary module 121, and the upper portion of the shaft 110; and the lower housing portion 101b is configured to accommodate the linear motion actuator 132, the linear motion module 131, and the lower portion of the shaft 110.

[0037] Reference Figure 1A The bonding tool 100 further includes at least one encoder 135 for monitoring the linear motion of the shaft 110. The encoder 135 is mounted on the housing 101 of the bonding tool 100 and coupled to the linear motion module 131. The linear scale 135a of the linear encoder 135 can be linearly moved together with the linear motion module 131 to determine the linear position of the shaft 110.

[0038] Figure 1E1 is a schematic cross-sectional view of the bonding tool 100 when the shaft 110 moves upward in a direction parallel to the rotation axis 111 according to the first embodiment. The linear motion components of the bonding tool 100 include the shaft 110, the first linear bearing 124, the linear motion module 131, magnets of two electromagnetic linear motors 132a, 132b of the linear motion actuator 132, the second rotation bearing 133, the first and second flexible members 134a, 134b of the second linear bearing 134, and the scale 135a of the encoder 135. This substantially symmetrical design of the linear motion components of the bonding tool 100 can ensure that the center of gravity G of all the linear motion components is located at one point on the rotation axis 111. The symmetrical arrangement of the electromagnetic motors 132a, 132b ensures that similar forces in the same direction parallel to the rotation axis 111 can be applied to both sides of the linear motion module 131 by the two electromagnetic motors 132a, 132b. Therefore, when the shaft 110 moves upward or downward parallel to the axis of rotation, the shaft 110 will not bend due to any bending moment.

[0039] It should be noted that in this embodiment, the bonding tool 100 includes only one linear encoder 135. However, in order to avoid inconsistent bonding force due to the deviation of the center of gravity of all linear motion components from the central axis of the shaft 110, it is more preferred that the bonding tool 100 be designed to include two similar linear encoders, which are symmetrically arranged around the shaft 110.

[0040] Figure 2 2 is a schematic cross-sectional view of a bonding tool 200 according to a second embodiment of the present invention. Compared with the bonding tool 100 of the first embodiment, the main difference is that the shaft 110' of the bonding tool 200 is shorter and does not pass through the central hole formed on the rotating module 121. Figure 2 As shown, the top of the shaft 110' is coupled to the bottom of the rotating module 121 through the first linear bearing 124. It should be noted that the shapes and lengths of the shafts 110, 110' in the first and second embodiments are only for illustrative purposes and are not intended to limit the scope of the present invention. As long as a coupling is established between the shaft and the rotating module of the bonding tool so that the shaft can rotate with the rotating module and a connection device that can provide vacuum to the shaft is connected to the shaft, such a device belongs to the scope of the present invention.

[0041] Figure 3 is a schematic cross-sectional view of a bonding tool 300 according to a third embodiment of the present invention. Figure 1A Compared with the first embodiment shown, the main difference is that the rotary motion actuator 122' is in the form of a piezoelectric rotary motor. It should be noted that other types of rotary motors can also be used in various embodiments of the present invention.

[0042] Figure 4is a schematic cross-sectional view of a bonding tool 400 according to a fourth embodiment of the present invention. Figure 1A The main difference compared to the first embodiment shown is that the linear motion actuator 132' is in the form of two piezoelectric linear motors 132'a and 132'b symmetrically arranged around the axis 110. It should be noted that other types of linear motors may also be used in various embodiments of the present invention.

[0043] Figure 5A 1 is a schematic cross-sectional view of a bonding tool 500 according to a fifth embodiment of the present invention. In this embodiment, the first linear bearing 124' is in the form of a spherical ridge rather than a flexible member, and the second linear bearing 134' may include a spherical ridge 136, a cage bearing 138 or a linear bushing 140, respectively. Figures 5B to 5D shown.

[0044] Fig. 6A is a schematic cross-sectional view of a bonding tool 600 according to a sixth embodiment of the present invention. In this embodiment, the second linear bearing may include two linear motion guides 134'a, 134'b. Figure 6B is a perspective view of linear motion guides 134 ′ a , 134 ′ b according to the sixth embodiment.

[0045] Figure 7 FIG. 1 is a schematic cross-sectional view of a bonding tool 700 according to a seventh embodiment of the present invention. Figure 1A Compared to the first embodiment shown in FIG. 1 , in this embodiment, the rotation module 121 is coupled to the lower portion of the shaft 110, and the linear motion module 131 is coupled to the upper portion of the shaft 110. It should be noted that the shape and length of the shaft 110, the types of the first and second linear bearings 124, 134a, 134b used in the bonding tool 700, and the types of the rotation motion actuator 122 and the linear motors 132a, 132b may vary according to other embodiments of the present invention.

[0046] Figure 88 is a schematic cross-sectional view of a bonding tool 800 according to an eighth embodiment of the present invention. The bonding tool 800 includes a shaft 810, a rotation module 821, a rotation motion actuator 822, a linear motion module 831, and a linear motion actuator 832. In the first to seventh embodiments, the rotation module 121 and the linear motion module 131 are respectively arranged along the upper portion or the lower portion of the shaft 110. However, in the eighth embodiment, although the rotation module 821 and the linear motion module 831 are coupled to the shaft 810 at different positions or portions of the shaft 810, the rotation module 821 and the linear motion module 831 are both arranged along the upper portion and the middle portion of the shaft 810. The purpose of this arrangement is to leave more available space around the lower portion of the shaft 810 to accommodate other modules for the bonding process, thereby avoiding possible interference with the actual bonding process due to the space around the lower portion of the shaft 810 being occupied by some components of the bonding tool 800.

[0047] like Figure 8 As shown, the rotation module 821 includes a bottom coupling portion 821a, a tubular structure 821b, and a connecting portion 821c located between the bottom coupling portion 821a and the tubular structure 821a. The connecting portion 821c extends horizontally from one end of the tubular structure 821b, and the bottom coupling portion 821a is attached to the free end of the connecting portion 821c. The coupling portion 821a is coupled to the lower position R of the middle part of the shaft 810 so that the shaft 810 can rotate with the rotation module 821. The rotary motion actuator 822 is operably connected to the tubular structure 821b of the rotation module 821, and is operably driven to rotate the rotation module 821 and the shaft 810 around the rotation axis 811 extending substantially along the central axis of the shaft 810. In this embodiment, the rotary motion actuator 822 is in the form of an electromagnetic rotary motor. It should be noted that other types of rotary motors can be used in this embodiment instead of the electromagnetic rotary motor.

[0048] The linear motion module 831 includes a top coupling portion 831a and a frame portion 831b extending downward from the coupling portion 831a. The top coupling portion 831a is coupled to the upper portion of the shaft 810 so that the shaft 810 can move together with the linear motion module 831. The frame portion 831b is arranged around the upper and middle portions of the shaft 810. The bottom end of the linear motion module 831 is located above the connecting portion 821c of the rotating module 821. The linear motion actuator 832 includes two electromagnetic motors 832a, 832b, which are operably connected to the frame portion 831b of the linear motion module 831 and operably drive the linear motion module 831 and the shaft 810 to move in a direction parallel to the rotating shaft 811. The two electromagnetic motors 832a, 832b are symmetrically arranged around the shaft 810.

[0049] The bonding tool 800 further includes a first rotation bearing 823 and a second rotation bearing 833, the first rotation bearing being coupled to the outer surface of the tubular structure 821b of the rotation module 821 to guide the rotation assembly 821 to rotate around the rotation axis 811, and the second rotation axis 833 being coupled to the upper portion of the shaft 810 to guide the rotation of the shaft 810 around the rotation axis 811. The top coupling portion 831a is coupled to the upper portion of the shaft 810 through the second rotation bearing 833. The rotation bearings 823, 833 are used to reduce or avoid friction between different slidable parts during the rotational movement of the bonding tool 800.

[0050] The bonding tool 800 further includes a first linear bearing 824 and a second linear bearing 834 to reduce or avoid friction between different components during the linear motion of the bonding tool 800. The first linear bearing 824 is configured to couple the bottom coupling portion 821a of the rotation module 821 to the shaft 810 so that the rotational power generated by the rotational motion actuator 822 is transmitted to the shaft 810, thereby driving the shaft 810 to rotate around the rotation axis 811 together with the rotation module 821. The first linear bearing 824 may be in the form of a flexible member. The second linear bearing 834 is coupled to the frame portion 831b of the linear motion module 831 to guide the linear motion module 831 to move up and down parallel to the rotation axis 811. In this embodiment, the second linear bearing 834 includes a first flexible member 834a coupled to the upper portion of the frame portion 831b in the linear motion module 831 and a second flexible member 834b coupled to the bottom of the linear motion module 831. The second linear bearing 834 is configured to guide the linear motion of the linear motion module 831. The second flexible member 834 b of the second linear bearing 834 is also configured to support the linear motion module 831 .

[0051] The bonding tool 800 further includes a housing / frame 801 in which the rotary motion actuator 822 and the linear motion actuator 832 are fixedly mounted. The housing 801 is immovable relative to other parts or components of the bonding tool 800.

[0052] Reference Figure 8 As shown, the bonding tool 800 further includes at least one linear encoder 835 to monitor the linear motion of the shaft 810. The linear encoder 835 is mounted on the housing 801 and coupled to the linear motion module 831 via a linear scale 835a. The linear scale 835a of the linear encoder 835 can be linearly moved together with the linear motion module 831 to determine the linear position of the shaft 810.

[0053] The bonding tool 800 also includes at least one rotary encoder 825 to monitor the rotational movement of the shaft 810. The rotary encoder 825 is mounted on the housing 801. The rotary encoder disk 125a of the rotary encoder is attached to the tubular structure 821b, such as the top end of the tubular structure 821b, and rotates with the rotating module 821, so that the rotary encoder 825 can be used to record and determine the rotational position of the shaft 810.

[0054] In the first to eighth embodiments of the present invention, the linear motion actuator 132, 132', 832 includes two linear motors 132a, 132b; 132a', 132b'; 832a, 832b, which are symmetrically arranged around the axis 110, 810. It should be noted that in other embodiments, the linear motion actuator may include more than two linear motors, for example, three or four linear motors, which are symmetrically arranged around the axis, as long as the symmetrical arrangement of the multiple linear motors can ensure that the total linear actuation force applied to the linear motion module is substantially collinear with the center of gravity of all linear motion components of the bonding tool and the functional point of the bonding tool, thereby avoiding any bending moment during the linear motion of the bonding tool.

[0055] It can be understood from the above description that various embodiments of the present invention provide a bonding arm with a decoupling mechanism. This newly designed bonding arm includes independent rotation and linear motion modules, which are driven by direct drive motors respectively to effectively decouple and control the rotation and linear motion of the bonding arm. In addition, non-contact linear bearings, such as flexures, can be used in the bonding arm to guide the linear motion of the linear motion module and the shaft, thereby avoiding any friction between the flexure and other components. Therefore, a more accurate and consistent bonding force will be applied to the electronic components. In addition, since the linear motion actuator and the linear motion components of the bonding arm are arranged symmetrically around the axis, the axis of the bonding arm will not be subjected to bending stress due to any bending moment during its linear motion. Moreover, through the above design, it is possible to minimize the moving mass carried during the linear motion of the bonding arm, so that the bonding force generated by the bonding arm can be transmitted more accurately.

[0056] Although the present invention has been described in considerable detail with reference to certain embodiments, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.

Claims

1. A bonding tool, comprising: axis; a rotation module coupled to the first portion of the shaft; a rotary motion actuator operably connected to the rotary module and operable to drive the rotary module and the shaft to rotate about a rotary axis extending substantially along a central axis of the shaft; a linear motion module coupled to a second portion of the shaft, the second portion separate from the first portion; as well as A linear motion actuator is operably connected to the linear motion module and operably drives the linear motion module and the shaft to move in a direction parallel to the rotation axis.

2. The bonding tool according to claim 1, further comprising: a first rotation bearing coupled with the rotation module to guide the rotation module to rotate around the rotation axis; and a second rotation bearing coupled with the second portion of the shaft to guide the shaft to rotate around the rotation axis.

3. The bonding tool according to claim 1, further comprising: a first linear bearing coupled to the rotation module and the first portion of the shaft to guide the shaft to move in a direction parallel to the rotation axis; and a second linear bearing coupled to the linear motion module to guide the linear motion module to move in a direction parallel to the rotation axis.

4. The bonding tool according to claim 3, wherein: The second linear bearing includes a first flexure coupled to at least a first portion of the linear motion module and a second flexure coupled to a second portion of the linear motion module.

5. The bonding tool according to claim 4, wherein: The first flexure is coupled to the top or upper portion of the linear motion module, and the second flexure is coupled to the bottom portion of the linear motion module.

6. The bonding tool according to claim 3, wherein: The second linear bearing includes a linear bushing, a cage bearing or a ball ridge, which is coupled to the linear motion module to guide the linear motion module to move in a direction parallel to the rotation axis.

7. The bonding tool according to claim 3, wherein: The second linear bearing includes two linear motion guide rails respectively coupled to two opposite sides of the linear motion module to guide the linear motion module to move in a direction parallel to the rotation axis.

8. The bonding tool according to claim 1, wherein: The first linear bearing includes a flexure or spherical spine.

9. The bonding tool according to claim 1, wherein: The linear motion actuator includes at least two linear motors symmetrically arranged around the axis, so that the total linear actuation force applied to the linear motion module is basically collinear with the center of gravity of all linear motion components of the bonding tool and the functional point of the bonding tool.

10. The bonding tool according to claim 1, further comprising: A housing, wherein the rotary motion actuator and the linear motion actuator are fixedly mounted in the housing.

11. The bonding tool according to claim 9, wherein: The housing includes a first shell portion and a second shell portion connected to each other, wherein the first shell portion is configured to accommodate the rotary module, the rotary motion actuator and the first portion of the shaft, and the second shell portion is configured to accommodate the linear motion module, the linear motion actuator and the second portion of the shaft.

12. The bonding tool according to claim 9, further comprising: A linear encoder is mounted on the housing and coupled to the linear motion module, wherein a linear scale of the linear encoder can move linearly with the linear motion module to determine the linear position of the shaft.

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