Plasma tail gas treatment device

Abstract

The invention discloses a plasma tail gas treatment device which comprises a combustion cylinder, a plasma generator, a plasma generator, a plasma generator and a plasma generator, and is characterized in that the combustion cylinder is provided with an upper flange and a lower flange; the upper end cover is mounted at the upper end of the combustion cylinder through an upper flange; the upper end cover is provided with an upper central hole; the tail gas inlet pipe is connected into the combustion cylinder through the upper center hole so as to guide tail gas downwards; the plasma flame nozzle assembly is provided with a disc-shaped porous mounting plate and at least ten plasma flame nozzles distributed on the lower surface of the mounting plate; wherein the mounting plate is located under the tail gas inlet pipe; the run-on plate is located under the mounting plate, a flame curtain wall area is formed between the run-on plate and the mounting plate, and the run-on plate is a net plate or a net piece. The plasma tail gas treatment device is relatively high in treatment efficiency and relatively compact in structure.

Description

Technical Field

[0001] The invention relates to a plasma tail gas treatment device, wherein the plasma is also called electric plasma. Background Art

[0002] Plasma exhaust gas treatment device is a common exhaust gas treatment device at present. Since its technology is relatively mature, the principle of plasma exhaust gas treatment device is briefly described below. The plasma exhaust gas treatment process is based on plasma technology. By applying a high-frequency or high-voltage electric field, the molecules or ions in the exhaust gas are ionized to form a stable plasma. In the plasma, high-energy electrons collide with exhaust gas molecules or ions, triggering a series of chemical reactions, degrading harmful substances into relatively stable and harmless compounds, or causing them to undergo oxidation, reduction and other reactions, and then converting them into harmless substances. The plasma exhaust gas treatment process mainly involves four aspects, namely ionization and excitation, reaction and degradation, purification and removal, and reuse and resource utilization.

[0003] Based on the above, the plasma tail gas treatment device needs to be carried out in a relatively closed environment, where tail gas is introduced and a plasma flame nozzle (also known as a plasma torch) is set. Furthermore, an exhaust pipe is set at the end of the closed environment, and the subsequent processing equipment is connected through the exhaust pipe. Although in some implementations, the emission requirements can be met only by plasma tail gas treatment, most of the subsequent processing equipment also needs to be configured to adapt different subsequent processing equipment according to different tail gas conditions.

[0004] The basic structure of the current plasma tail gas treatment device is that flanges are provided at both ends of a cylindrical combustion tube, one of which is arranged on the air intake side, which is recorded as the air intake flange. Then, an air intake device is adapted, and the air intake device and the air intake flange are connected by flanges to seal the air intake end of the combustion tube. The air intake device is provided with multiple air intake pipes in the circumferential direction so that the tail gas entering the air intake device is relatively uniform. The air intake device is roughly a barrel structure with a bottom, and a central hole is opened on the bottom plate of the barrel. A plasma flame nozzle is installed in the central hole. The spray direction of the plasma flame nozzle is the axial direction of the combustion tube, and the air outlet of the air intake pipe in the air intake device rushes towards the plasma flame nozzle. From a structural point of view, the axis of the air outlet is the radial line of the bottom structure of the barrel with a bottom. In this structure, since the spray direction of the flame nozzle is the axial direction of the combustion tube, although the air intake is homogenized at the air intake end of the combustion tube, the tail gas is roughly downward in a relatively uniform manner in the radial direction of the combustion tube. For this reason, the plasma sprayed by the plasma flame nozzle contacts the exhaust gas unevenly, thus affecting the efficiency of exhaust gas treatment.

[0005] In other implementations, the structure is basically similar to the previous implementation, and the difference lies in the configuration of the intake pipe, which is basically connected to the intake device in a tangential manner, and the number of intake pipes is generally two to four, so that the tail gas will generate vortex after entering the combustion tube, and the vortex will stir the plasma, so that the plasma and the tail gas are in relatively sufficient contact. However, the plasma flame nozzle also has the typical characteristics of the flame head, that is, the axial travel speed of the plasma in the combustion tube is relatively fast, so its utilization rate is relatively low.

[0006] Currently, there are applications with multiple plasma flame nozzles, but the number is usually less than four. The configuration method still adopts the method of configuring the plasma on the upper end cover of the combustion tube in the axial direction of the combustion tube, and the rest is basically the same as the above two methods. Relatively more plasma flame nozzles can make the plasma dispersed relatively evenly in the combustion tube to a certain extent, thereby improving the utilization rate of the plasma formed by the plasma flame nozzle, but it is still limited. The adaptability of the plasma flame nozzle to the intake pipe is relatively poor, which makes the exhaust gas treatment efficiency relatively low. Summary of the invention

[0007] The object of the present invention is to provide a plasma exhaust gas treatment device with relatively high treatment efficiency and relatively compact structure.

[0008] According to an embodiment of the present invention, a plasma tail gas treatment device is provided, comprising: A combustion tube having an upper flange and a lower flange; An upper end cover is installed on the upper end of the combustion tube through an upper flange and is used for sealing the upper end of the combustion tube; the upper end cover has an upper center hole; The exhaust gas inlet pipe is connected to the combustion tube through the upper center hole to introduce the exhaust gas downward; A plasma flame spray head assembly, the plasma flame spray head assembly having a disc-shaped porous mounting plate and no less than ten plasma flame spray heads distributed on the lower surface of the mounting plate; wherein the mounting plate is located directly below the exhaust gas intake pipe; and The arc-starting plate is located directly below the mounting plate, and a flame curtain wall area is formed between the arc-starting plate and the mounting plate, and the arc-starting plate is a mesh plate or a mesh sheet.

[0009] Optionally, a driving mechanism is provided for the arc-starting plate to drive the arc-starting plate to move axially in the combustion tube so as to adjust the arc-starting distance.

[0010] Optionally, a combustion tube is provided with a combustion-supporting gas pipe for introducing a combustion-supporting gas on the lower side of the wall enclosing the flame curtain area.

[0011] Optionally, there are multiple combustion-supporting gas pipes, which are evenly arranged in the circumferential direction of the wall.

[0012] Optionally, the angle between the axis of the combustion-supporting gas pipe and the radial line of the access point is 45° to 75°.

[0013] Optionally, the total flow cross-sectional area of ​​the holes on the mounting plate for air homogenization is 5 to 7 times the flow cross-sectional area of ​​the exhaust gas intake pipe.

[0014] Optionally, a conical fairing is provided above the mounting plate; The fairing is provided with a long through hole extending radially, dividing the fairing into a plurality of guide fins.

[0015] Optionally, the radially extending guide fins are provided with short through holes from the middle to the end.

[0016] Optionally, the fairing and the mounting plate are fixed in the following manner: The first method is to connect through a central tube, which passes through the fairing upward and the mounting plate downward to form a central channel; or The second method is to support the mounting plate through support columns.

[0017] Optionally, the combustion cylinder has a water jacket to water-cool the combustion cylinder; Correspondingly, the upper end cover is an upper water-cooled flange end cover; The combustion tube is further adapted with a lower water-cooled flange end cover.

[0018] In an embodiment of the present invention, the provided plasma tail gas treatment device adopts a single-tube air intake method, and a plasma flame nozzle assembly is provided in the combustion tube in the direction of the tail gas intake pipe. The plasma flame nozzle assembly has a disc-shaped porous mounting plate. When the tail gas flow hits the mounting plate, the tail gas is homogenized through the holes on the mounting plate, and then no less than ten plasma flame nozzles are provided on the lower surface of the mounting plate, which is equivalent to miniaturizing the plasma flame nozzle in the traditional plasma tail gas treatment device, and then dispersing it, so that the plasma can be fully in contact with the tail gas, and has a higher treatment efficiency. Compared with the traditional plasma tail gas treatment device, since the tail gas intake pipe adopts a single tube, rather than the traditional method of arranging several tail gas intake pipes around the combustion tube, the structure is relatively compact. In addition, by setting an arc-starting plate, the distance between the plasma flame nozzle and the arc-starting plate is set, so that a flame curtain wall area is formed between the arc-starting plate and the mounting plate, so that the plasma is dispersed more evenly in the flame curtain wall area, and has a better tail gas treatment capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the main cross-sectional structure of a plasma exhaust gas treatment device in one embodiment.

[0020] Figure 2 It is a schematic diagram of the structure of a plasma flame nozzle assembly in the first direction in one embodiment.

[0021] Figure 3 It is a schematic diagram of the structure of the plasma flame nozzle assembly in the second direction in one embodiment.

[0022] Figure 4 Schematic diagram of the mounting plate structure in one embodiment.

[0023] Figure 5 Schematic diagram of the fairing structure in one embodiment.

[0024] In the figure: 1. rear-stage exhaust gas treatment device, 2. exhaust pipe, 3. lower water-cooling flange, 4. water jacket, 5. exhaust gas treatment chamber, 6. arc-starting plate, 7. combustion-supporting pipe, 8. plasma flame nozzle assembly, 9. dispersion chamber, 10. exhaust gas inlet pipe, 11. flame curtain wall area, 12. water jacket joint, 13. water-cooling flange joint, 14. plasma flame nozzle, 15. multi-hole mounting plate, 16. guide cover, 17. center tube, 18. air vent, 19. long through hole, 20. guide fin, 21. mounting hole, 22. short through hole. DETAILED DESCRIPTION

[0025] The plasma exhaust gas treatment device generally takes in air from the top, that is, generally speaking, the combustion tube of the plasma exhaust gas treatment device is generally arranged vertically, and the exhaust gas intake pipe 10 is generally installed on the upper part of the combustion tube. The known plasma exhaust gas treatment device is generally equipped with multiple exhaust gas intake pipes 10, and the multiple exhaust gas intake pipes 10 are generally installed on the upper side wall or upper end cover of the combustion tube. Although in order to make the overall structure more compact, the exhaust gas intake pipe 10 includes a part transversely installed on the upper side wall of the combustion tube and a vertical pipe body. Although such a configuration can reduce the lateral size of the plasma exhaust gas treatment device, it is vertically equipped with multiple parallel pipes, and the interference between them also needs to be considered.

[0026] In addition, whether the current tail gas inlet pipe 10 is radially connected to the upper end of the combustion tube or tangentially connected, the inventor believes that there is a problem of uneven mixing of tail gas and plasma. For example, in the tangential connection method, the tail gas forms a vortex in the combustion tube, and the main body of the vortex is the mainstream on the centrifugal side of the combustion tube, and the airflow on the centripetal side is relatively small. However, this type of plasma tail gas treatment device is equipped with only one plasma flame nozzle 14 located in the center of the upper end cover of the combustion tube, and the injection direction is the axial direction of the combustion tube, and the mixing degree of the plasma flame and the tail gas in the reaction zone is relatively low.

[0027] In an embodiment of the present invention, a plasma exhaust gas treatment device is provided, which also includes a combustion tube, and the length-to-diameter ratio of the inner cavity of the combustion tube is generally about 2:3. And like a conventional combustion tube, the inner cavity is a cylindrical cavity, so the main body of the combustion tube is a cylinder, especially a known type of plasma exhaust gas treatment device that needs to generate vortex.

[0028] In the embodiment of the present invention, the combustion tube also adopts a cylindrical structure, with an upper flange at the upper end and a lower flange at the lower end.

[0029] In some implementations, the combustion tube adopts Figure 1 In the structure shown, the body of the combustion tube has a water jacket 4 for forced cooling through the water jacket 4. At the same time, the combustion tube is sealed at both ends by flange connection, and is correspondingly equipped with an upper flange and a lower flange, which are correspondingly defined as an upper end cover and a lower end cover.

[0030] It should be noted that in some implementations, there is no lower end cover, but the combustion cylinder is directly fixed to a chamber body, such as a top plate, through a lower flange. The chamber body has Figure 1 The rear-stage exhaust gas treatment device 1 shown in FIG.

[0031] The combustion tube is adapted to be equipped with an upper end cover. In the known plasma tail gas treatment device, the upper end cover is configured as an upper tube head, which has a certain axial length, so as to facilitate the installation of the tail gas intake pipe 10 from the side. In the embodiment of the present invention, the tail gas intake pipe 10 is no longer installed from the side, but directly installed in the center of the upper end cover, and its position is roughly equivalent to the position of the plasma flame nozzle 14 in the traditional plasma tail gas treatment device.

[0032] It can also be seen that for the upper end cover, since there is no need to consider installing the exhaust gas intake pipe 10 from the side, the radial size of the plasma exhaust gas treatment device is relatively compact, and the exhaust gas intake pipe 10 is connected in a single-tube manner, and the piping is also simpler.

[0033] In particular, as mentioned above, since the tail gas inlet pipes 10 of the known plasma tail gas treatment device are usually not less than three and are connected from the side of the upper tube head, although the tail gas inlet pipes 10 arranged axially in the combustion tube can be connected from the side through the bend, on the one hand, the bend will also occupy a certain radial space, and it will be relatively difficult to connect several tail gas inlet pipes 10 arranged in parallel in the axial direction. Different from the way of connecting a group of tail gas inlet pipes 10 arranged in a straight line through a connecting pipe, it will be more difficult to connect several tail gas inlet pipes 10 arranged circumferentially.

[0034] In the embodiment of the present invention, there is only one exhaust gas intake pipe 10, and there is no need to consider the connection problem, which greatly saves space.

[0035] Although the number of plasma flame spray heads 14 is relatively large in the embodiment of the present invention, their configuration is different from the tube configuration, but is a cable, which is a parallel connection problem and is relatively easy to implement.

[0036] In addition, the inner surface of the combustion tube and the inner surfaces of the upper and lower end covers have an anti-corrosion coating, which is generally a polytetrafluoroethylene coating.

[0037] Regarding the outer surface of the combustion tube, a heat-insulating layer may be provided to avoid accidents such as scalding.

[0038] In addition, in the embodiment of the present invention, an independent arc-starting plate 6 is used for arc-starting, so that the distance between the arc-starting plate 6 and the plasma flame nozzle assembly 8 can be adjusted according to the composition of the exhaust gas, etc., so as to achieve a better exhaust gas treatment effect.

[0039] The upper end cover, and when there is a lower end cover, the lower end cover and the combustion tube are connected by flanges, and are further adapted to be equipped with a sealing component, such as a rubber sealing ring.

[0040] The upper end cover is used for sealing the upper end of the combustion tube, and the upper end cover has an upper center hole. If a lower end cover is provided, the lower end cover has a lower center hole.

[0041] The upper center hole is used for the access and installation of a single tail gas intake pipe 10 on the upper end cover, while the lower center hole is used for Figure 1 The middle exhaust pipe 2 is penetrated and installed.

[0042] The tail gas intake pipe 10 still adopts the traditional method, penetrates the combustion cylinder from top to bottom, and introduces the tail gas from top to bottom.

[0043] The tail gas treated by the plasma tail gas treatment device is mostly semiconductor process waste gas, most of which are corrosive to a certain extent. Therefore, the inner surface of the combustion tube mentioned above needs to have a polytetrafluoroethylene anti-corrosion layer, for example.

[0044] Furthermore, regarding the configuration of the plasma flame nozzle 14, unlike the traditional configuration of one or no more than four plasma flame nozzles 14, in the embodiment of the present invention, the number of plasma flame nozzles 14 is not less than ten, so that relatively small plasma flame nozzles 14 are used, and the plasma flame is transformed into a number of small flame heads arranged in parallel, thereby expanding the dispersion range of the plasma flame.

[0045] In particular, the conventional plasma flame nozzle 14 is generally directly mounted on the upper end cover, and there is usually only one, and even if there are multiple, they are also mounted on the upper end cover, so as to avoid interference with the assembly position of the exhaust gas intake pipe 10 installed from the side.

[0046] In an embodiment of the present invention, a plasma flame nozzle 14 is mounted on a porous mounting plate 15, hereinafter referred to as a mounting plate, wherein the mounting plate is provided with air holes 18, the air holes 18 can be evenly distributed on the mounting plate, or can be arranged in a circular array, for example, and some of the air holes 18 can be converted into assembly holes for assembling the plasma flame nozzle 14.

[0047] The ratio of the number of the plasma flame spray heads 14 to the number of the air holes 18 is 1:3 to 1:6.

[0048] The air holes 18 are generally arranged around the plasma flame spray head 14 in a surrounding manner.

[0049] As mentioned above, the number of plasma flame nozzles 14 is not less than ten, but not too many, generally not more than thirty-six, and the optimal number is twenty-four. If there are too many plasma flame nozzles 14, the power of each plasma flame nozzle 14 will be too small, and the plasma flame generated will be too small. The tail gas has a certain flow rate when passing through the air holes 18 downward, and the flame generated by the plasma flame nozzle 14 should have a certain length, so that the plasma and the tail gas can be more fully mixed.

[0050] The plasma flame spray head 14 is integrated on the mounting plate, and the component including the mounting plate and the plasma flame spray head 14 as a whole is called the plasma flame spray head assembly 8 .

[0051] Among them, the mounting plate is a disc-shaped structure, and good coaxiality should be maintained between the mounting plate and the combustion tube.

[0052] The mounting plate is fixed on the upper cover plate by, for example, hanging, and can also be mounted on the inner wall of the combustion tube through a radial connector.

[0053] In some embodiments, a protrusion may be provided on the inner wall of the combustion cylinder for supporting the mounting plate.

[0054] In addition, from the positional point of view, the mounting plate is installed directly below the exhaust gas intake pipe 10; when the exhaust gas introduced from the exhaust gas intake pipe 10 hits the mounting plate, the exhaust gas will diffuse to the surroundings and further descend through the air holes 18, so that the exhaust gas is dispersed relatively evenly in the combustion tube.

[0055] Furthermore, an independent arc-starting plate 6 is provided in the combustion tube, which is used for igniting the plasma flame nozzle 14, thereby guiding the direction of the plasma flame, so as to Figure 1 In the illustrated structure, a flame curtain wall area 11 is formed between the arc-starting plate 6 and the mounting plate, so that the exhaust gas and the plasma flame can fully contact each other.

[0056] The arc-striking plate 6 is located directly below the mounting plate, and the arc-striking plate 6 is a mesh plate or a mesh sheet, and the total flow cross-sectional area of ​​the mesh holes on the arc-striking plate 6 is greater than or equal to the total flow cross-sectional area of ​​the air holes 18 on the mounting plate.

[0057] Furthermore, as mentioned above, the distance between the arc-striking plate 6 and the mounting plate has a certain correlation with the exhaust gas processing capacity. Therefore, in a more preferred embodiment, a driving mechanism is provided for the arc-striking plate 6 to drive the arc-striking plate 6 to move axially in the combustion tube to adjust the arc-striking distance.

[0058] It should be noted here that the plasma exhaust gas treatment device applied to a certain process may face the same technical conditions, but more often, even if the process it is applied to is the same production process, it will face different technical conditions due to changes in production conditions. Therefore, it is relatively necessary to adapt the driving mechanism for the axial adjustment of the arc starting plate 6 in the combustion tube.

[0059] In addition, with regard to the change in distance, the distance between the mounting plate and the upper cover plate in the plasma flame spray head assembly 8 can be determined, and the distance is generally one eighth to one seventh of the diameter of the combustion tube. The distance between the arc strike plate 6 and the mounting plate depends on the end of the flame extension of the plasma flame spray head 8, and the distance from the end is generally one tenth to one sixth of the diameter of the combustion tube.

[0060] The adjustment range of the arc-starting plate 6 in the axial direction of the combustion tube is one sixth of the diameter of the combustion tube.

[0061] In addition, the driving mechanism for driving the arc-starting plate 6 is preferably arranged outside the combustion tube, and is inserted into the combustion tube through the rod body. The rod body can be guided to the guide hole opened on the upper end cover.

[0062] In addition, the semiconductor exhaust contains combustible components, such as hydrogen. Therefore, a combustion-supporting gas pipe 7 for introducing combustion-supporting gas is provided on the lower side of the wall of the combustion tube enclosing the flame curtain area 11, so as to introduce, for example, air, so that the components in the exhaust that are not treated by plasma can be removed by oxidation.

[0063] exist Figure 1 As can be seen from the illustrated structure, there are two combustion-supporting gas pipes 7 in the figure, and the structure shown in the figure is a cross-sectional structure. There are two other symmetrical combustion-supporting gas pipes 7, totaling four. The number of combustion-supporting gas pipes 7 can be three to six, and they are evenly arranged in the circumference of the combustion tube.

[0064] Also from Figure 1It can be seen that the combustion-supporting gas pipe 7 is not connected to the combustion tube vertically, but is connected obliquely. More specifically, the angle between the axis of the combustion-supporting gas pipe 7 and the radial line of the connection point at the combustion tube is 45°~75°. Under this condition, the gas introduced by the combustion-supporting gas pipe 7 will form a vortex in the combustion tube, which is conducive to uniform mixing with the exhaust gas.

[0065] The flow capacity of the air holes 18 on the mounting plate for uniform air flow should not be too large, otherwise it will be detrimental to the diffusion of the exhaust gas through the mounting plate. If the flow capacity of the air holes 18 is too large, more exhaust gas will be discharged through the air holes 18 on the centripetal side, while the exhaust gas discharged from the air holes 18 on the centrifugal side will be relatively less, which is not conducive to the diffusion of the exhaust gas.

[0066] At the same time, the flow capacity of the air hole 18 should not be too small, otherwise it will cause the gas passing through the installation hole to produce an overly strong jet state, which is not conducive to the mixing of the exhaust gas and the plasma.

[0067] Therefore, the total flow cross-sectional area of ​​the air holes 18 on the mounting plate for uniform air flow is 5 to 7 times the flow cross-sectional area of ​​the exhaust gas intake pipe 10 .

[0068] Furthermore, in order to facilitate the dispersion of the exhaust gas in the combustion tube, a conical fairing 15 is provided above the mounting plate to combust the exhaust gas introduced from above so that it can be dispersed to the surroundings.

[0069] exist Figure 5 In the illustrated structure, the conical fairing 5 has two types of holes, which are actually U-shaped holes and V-shaped holes. The U-shaped holes are relatively long (radially) and the V-shaped holes are relatively short. Based on the length relationship between them, the U-shaped holes are recorded as long through holes 19 and the V-shaped holes 19 are recorded as short through holes 22.

[0070] The portion where the long through holes 19 and the short through holes 22 are determined is the guide fin 20 shown in the figure, which is used to comb the airflow and disperse it around, while the long through holes 19 and the short through holes 22 disperse the exhaust gas downward in different areas.

[0071] exist Figure 4 In the illustrated structure, a central tube 17 is installed at the center of the porous mounting plate 15 . The central tube 17 is used for direct downward movement of a portion of the exhaust gas. The central tube 17 is also used as a mounting base for the fairing 15 .

[0072] In addition, without providing the central tube 17 , the fairing 15 can be supported by using columns fixed on the porous mounting plate 15 .

[0073] In addition, the fairing 15 has a mounting hole 21 at the center, and can be fixed to the center tube 17 by, for example, welding.

[0074] In some embodiments, the central tube 17 is provided with a convex ring, the diameter of which is greater than Figure 5 Under this condition, the fairing 15 can be directly supported on the convex ring after being sleeved on the central tube 17 without adding other fixing methods.

[0075] Regarding the distribution of the long through holes 19 and the short through holes 22, both are evenly arranged in the circumferential direction, wherein the long through holes 19 are as close to the mounting holes 21 as possible under the condition of satisfying the strength and rigidity of the fairing 15, thereby dividing the fairing 15 into a plurality of substantially identical large fins, and the short through holes 22 are opened on the large fins, thereby further dividing the fairing 15 into the following: Figure 5 The guide fin 20 is shown in FIG.

[0076] The radially extending guide fins 20 are provided with short through holes 22 from the middle to the end thereof so as to reasonably rectify the exhaust gas.

Claims

1. A plasma tail gas treatment device, characterized in that: include: A combustion tube having an upper flange and a lower flange; An upper end cover is installed on the upper end of the combustion tube through an upper flange and is used for sealing the upper end of the combustion tube; the upper end cover has an upper center hole; The exhaust gas inlet pipe is connected to the combustion tube through the upper center hole to introduce the exhaust gas downward; A plasma flame spray head assembly, the plasma flame spray head assembly having a disc-shaped porous mounting plate and no less than ten plasma flame spray heads distributed on the lower surface of the mounting plate; wherein the mounting plate is located directly below the exhaust gas intake pipe; and The arc-starting plate is located directly below the mounting plate, and a flame curtain wall area is formed between the arc-starting plate and the mounting plate, and the arc-starting plate is a mesh plate or a mesh sheet.

2. The plasma tail gas treatment device according to claim 1, characterized in that: It is adapted to the arc striking plate and provides a driving mechanism for driving the arc striking plate to move axially in the combustion tube to adjust the arc striking distance.

3. The plasma tail gas treatment device according to claim 1 or 2, characterized in that: A combustion-supporting gas pipe for introducing a combustion-supporting gas is provided on the lower side of the wall portion surrounding the flame curtain wall area of ​​the combustion tube.

4. The plasma tail gas treatment device according to claim 3, characterized in that: There are a plurality of combustion-supporting gas pipes, which are evenly arranged in the circumferential direction of the wall.

5. The plasma tail gas treatment device according to claim 3, characterized in that: The angle between the axis of the combustion-supporting gas pipe and the radial line of the access point is 45°~75°.

6. The plasma tail gas treatment device according to claim 1, characterized in that: The total flow cross-sectional area of ​​the holes on the mounting plate for uniform air flow is 5 to 7 times the flow cross-sectional area of ​​the exhaust gas intake pipe.

7. The plasma tail gas treatment device according to claim 1 or 6, characterized in that: A conical fairing is provided above the mounting plate; The fairing is provided with a long through hole extending radially, dividing the fairing into a plurality of guide fins.

8. The plasma tail gas treatment device according to claim 7, characterized in that: The radially extending guide fins are provided with short through holes from the middle to the end.

9. The plasma tail gas treatment device according to claim 7, characterized in that: The fixing method between the fairing and the mounting plate is: The first method is to connect through a central tube, which passes through the fairing upward and the mounting plate downward to form a central channel; or The second method is to support the mounting plate through support columns.

10. The plasma tail gas treatment device according to claim 1, characterized in that: The combustion cylinder has a water jacket to water-cool the combustion cylinder; Correspondingly, the upper end cover is an upper water-cooled flange end cover; The combustion tube is further adapted with a lower water-cooled flange end cover.

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