Purification device and purification method for polycrystalline silicon powder particles
By setting up premix cavity, mixture, and cone -shaped disk in the purification device of polycrystalline silicon powder particles, the full mixing of raw materials is achieved, and the problem of not sufficient mixing the material in the existing device in the existing device has improved the purification efficiency and product utilization rate.
Patent Information
- Application Number
- CN202411485425.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-23
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2044-10-23
AI Technical Summary
The existing polycrystalline silicon powder particle purification device fails to fully mix the raw materials in the buffer zone, resulting in some raw materials not participating in the reaction, reducing the utilization rate of raw materials.
A purified device for polycrystalline silicon powder particles, including premix cavity, mixture, cone dish, and raw tube. By setting up premix cavity and cone dishes under the reactive cavity, using a mixture for raw materials mixed with raw materials mixing , And through the pores on the cone plate, the gas evenly enters the reaction cavity evenly, and promote the full mixing between the materials.
By fully mixing the raw materials, the efficiency of the chemical reaction is improved, the utilization rate of polycrystalline silicon powder particles is increased, and the efficiency of the purification process and product quality are ensured.
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Figure CN119346002A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of silicon purification, and in particular to a purification device and a purification method for polycrystalline silicon powder particles. Background Art
[0002] Polysilicon is a key material in the production of solar panels and semiconductor devices. In order to meet the high purity requirements in these applications, polysilicon usually needs to be purified. The purification process involves removing impurities to ensure that the final product has the desired electronic properties.
[0003] Existing polysilicon powder particle purification devices use fluidized beds to purify silicon powder particles. However, when using this device, the reaction materials are not fully mixed in advance in the buffer zone, so that after entering the reaction zone, some raw materials are discharged with the airflow without contact and reaction, thereby reducing the utilization rate of the raw materials. Summary of the invention
[0004] The object of the present invention is to provide a polysilicon powder particle purification device and purification method, aiming to effectively promote the mixing between materials, make the chemical reaction more complete, and improve the utilization rate of raw materials.
[0005] To achieve the above-mentioned objectives, in a first aspect, the present invention provides a device for purifying polycrystalline silicon powder particles, comprising a support frame, an outer shell, a reaction chamber, a seed feed pipe and an exhaust gas exhaust pipe, wherein the outer shell is fixed on the support frame, the reaction chamber is arranged in the outer shell, the seed feed pipe and the exhaust gas exhaust pipe are arranged on the top of the outer shell, and also comprises a premixing chamber, a mixer, a conical disk and a discharge pipe, the conical disk having a plurality of air outlet holes, the conical disk being arranged below the reaction chamber, the premixing chamber being connected to the conical disk, the mixer being rotatably arranged in the premixing chamber, the discharge pipe being connected to the reaction chamber and being located at the center of the conical disk.
[0006] Wherein, the mixer includes a rotating ring, a stirring blade, a stirring motor, a gear and a ring gear. The rotating ring is rotatably arranged in the premixing chamber, the stirring blade is fixed on the rotating ring, the ring gear is fixed on the rotating ring, the gear is meshed with the ring gear, and the output end of the stirring motor is fixed to the gear.
[0007] Wherein, the discharge pipe includes a pipe body and a side pipe, and the side pipe is connected to the pipe body and is located on one side of the pipe body.
[0008] Wherein, the discharge pipe also includes a regulating valve and a boost pump, the regulating valve is connected to the side pipe and is located on one side of the side pipe, and the boost pump is connected to the regulating valve and is located on one side of the regulating valve.
[0009] Wherein, the polysilicon powder particle purification device also includes a heater, which includes a heating layer, a microwave reflecting layer and a heat insulating layer, the heat insulating layer is arranged in the outer shell, the microwave reflecting layer is arranged in the heat insulating layer, and the heating layer is arranged in the microwave reflecting layer.
[0010] Wherein, the polysilicon powder particle purification device further comprises a collecting structure, and the collecting structure is connected to the tube body and is located at the bottom of the tube body.
[0011] Among them, the collection structure includes a cooling pipe, a cooling cavity, a valve and a collection box, the cooling cavity is connected to the pipe body and is located on one side of the pipe body, the cooling pipe is arranged on the outside of the cooling cavity, the valve is arranged at the bottom of the cooling cavity, and the collection box is connected to the valve.
[0012] The collection structure further includes a feed controller, which is used to control the seed feed pipe to input seed material according to the weight of the material in the collection box.
[0013] In a second aspect, the present invention further provides a method for purifying polysilicon powder particles, comprising: introducing reaction raw materials into a premixing cavity;
[0014] Mixing the reaction materials by a mixer;
[0015] The gas enters the reaction chamber through the gas outlet holes on the conical disk, causing the polysilicon seed crystals to suspend;
[0016] The temperature of the polysilicon seed crystal is maintained at 1000-1100° C. The polysilicon produced by the reaction of the reaction raw materials is gathered on the polysilicon seed crystal and falls out from the discharge pipe after exceeding a preset weight.
[0017] In a polycrystalline silicon powder particle purification device and purification method of the present invention, the support frame not only provides the necessary stability, but also bears the weight of the entire device. A protective shell is placed above it, which is not only a part of the physical frame of the device, but also plays a role in isolating external environmental interference to ensure the purity of internal operations. The reaction chamber is a key area for chemical reactions and material conversions. In order to facilitate the introduction of materials and the discharge of exhaust gas, a seed feed pipe and an exhaust gas exhaust pipe are specially configured on the top of the shell. The seed enters the reaction chamber through the seed feed pipe, and the exhaust gas generated during the reaction is discharged through the exhaust gas exhaust pipe, ensuring the closedness and safety of the system. The premixing chamber is connected to a conical disk with multiple air outlets arranged below the reaction chamber. The conical disk is designed to evenly distribute the gas so that it can better contact with the polycrystalline silicon powder, thereby promoting the uniform reaction. A rotatable mixer is installed in the premixing chamber, which can effectively promote the mixing of materials and make the chemical reaction more sufficient. The purified polycrystalline silicon powder particles are discharged through a discharge pipe connected to the center of the conical disk. This design not only simplifies the discharging process, but also ensures the quality of the purified product. The design of the entire system takes into account various aspects such as material flow, reaction efficiency and operational safety, aiming to provide an efficient and reliable polysilicon powder particle purification solution. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 It is a structural diagram of a polysilicon powder particle purification device of the present invention.
[0020] Figure 2 This is a first cross-sectional structural diagram of a polysilicon powder particle purification device of the present invention.
[0021] Figure 3 yes Figure 2 A partial enlargement of detail A.
[0022] Figure 4 It is a structural diagram of the heater of the present invention.
[0023] Figure 5 It is a second cross-sectional structural diagram of a polysilicon powder particle purification device of the present invention.
[0024] Figure 6 The present invention is a flow chart of a method for purifying polysilicon powder particles.
[0025] Support frame 101, shell 102, reaction chamber 103, seed feed pipe 104, tail gas discharge pipe 105, premixing chamber 106, mixer 107, conical disk 108, discharge pipe 109, rotating ring 110, stirring blade 111, stirring motor 112, gear 113, gear ring 114, tube body 115, side pipe 116, regulating valve 117, booster pump 118, heater 119, heating layer 120, microwave reflection layer 121, insulation layer 122, collection structure 123, cooling pipe 124, cooling chamber 125, valve 126, collection box 127, feed controller 129, pressure sensor 130, calculation unit 131, control unit 132, support plate 133, spring 134, magnetic limit block 135, electromagnetic switch 136. DETAILED DESCRIPTION
[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.
[0027] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.
[0028] First embodiment
[0029] See also Figure 1 to Figure 5The present invention provides a purification device for polycrystalline silicon powder particles, comprising a support frame 101, an outer shell 102, a reaction chamber 103, a seed feed pipe 104 and an exhaust gas exhaust pipe 105, wherein the outer shell 102 is fixed on the support frame 101, the reaction chamber 103 is arranged in the outer shell 102, the seed feed pipe 104 and the exhaust gas exhaust pipe 105 are arranged at the top of the outer shell 102, and further comprises a premixing chamber 106, a mixer 107, a conical disk 108 and a discharge pipe 109, wherein the conical disk 108 has a plurality of air outlet holes, the conical disk 108 is arranged below the reaction chamber 103, the premixing chamber 106 is connected to the conical disk 108, the mixer 107 is rotatably arranged in the premixing chamber 106, the discharge pipe 109 is connected to the reaction chamber 103 and is located at the center of the conical disk 108.
[0030] In this embodiment, the present invention proposes a device system specifically for improving the purity of polysilicon powder particles. The system is designed with multiple key components to ensure an efficient purification process. First, the entire device is based on a stable support structure, a support frame 101, which not only provides the necessary stability, but also bears the weight of the entire device. Above it, a protective housing 102 is placed. This housing 102 is not only part of the physical frame of the device, but also serves to isolate external environmental interference and ensure the purity of internal operations.
[0031] Inside the shell 102, there is a reaction chamber 103, which is a key area for chemical reaction and material conversion. In order to facilitate the introduction of materials and the discharge of waste gas, a seed feed pipe 104 and an exhaust gas exhaust pipe 105 are specially configured on the top of the shell 102. The seed enters the reaction chamber 103 through the seed feed pipe 104, and the exhaust gas generated during the reaction is discharged through the exhaust gas exhaust pipe 105, ensuring the closedness and safety of the system.
[0032] In addition, in order to further improve the purification efficiency, the device is also equipped with a premixing chamber 106, which is connected to a conical disk 108 with multiple gas outlets arranged below the reaction chamber 103. The conical disk 108 is designed to evenly distribute the gas so that it can better contact the polysilicon powder, thereby promoting the uniform reaction. A rotatable mixer 107 is installed in the premixing chamber 106, which can effectively promote the mixing of materials and make the chemical reaction more complete.
[0033] Finally, the purified polysilicon powder particles are discharged through the discharge pipe 109 connected to the center of the conical disk 108. This design not only simplifies the discharge process, but also ensures the quality of the purified product. The design of the entire system takes into account various aspects such as material flow, reaction efficiency and operational safety, aiming to provide an efficient and reliable polysilicon powder particle purification solution.
[0034] The mixer 107 includes a rotating ring 110, a stirring blade 111, a stirring motor 112, a gear 113 and a ring gear 114. The rotating ring 110 is rotatably arranged in the premixing cavity 106, the stirring blade 111 is fixed on the rotating ring 110, the ring gear 114 is fixed on the rotating ring 110, the gear 113 is meshed with the ring gear 114, and the output end of the stirring motor 112 is fixed to the gear 113.
[0035] The mixer 107 in the present invention is one of the important components for achieving uniform mixing of materials. It is composed of several parts such as a rotating ring 110, a stirring blade 111, a stirring motor 112, a gear 113 and a ring gear 114. Specifically, the rotating ring 110 is a rotatable component installed in the premixing cavity 106, and the stirring blade 111 is fixed on the rotating ring 110. As the rotating ring 110 rotates, these blades can effectively stir the materials to ensure that the materials are mixed evenly. The ring gear 114 is fixed on the rotating ring 110 and meshes with the gear 113, and the gear 113 is driven by the output end of the stirring motor 112. In this way, when the stirring motor 112 is started, the power is transmitted to the rotating ring 110 through the gear 113, which then drives the stirring blade 111 to rotate, thereby achieving the stirring effect on the materials.
[0036] The discharge pipe 109 includes a pipe body 115 and a side pipe 116 . The side pipe 116 is connected to the pipe body 115 and is located at one side of the pipe body 115 .
[0037] In order to prevent the discharge of incompletely grown seed crystals due to lack of upward airflow at the discharge pipe 109 , the side pipe 116 is provided on the side of the tube body 115 so that the gas in the premixing chamber 106 can pass through the side pipe 116 and then be discharged upward.
[0038] The discharge pipe 109 further includes a regulating valve 117 and a boost pump 118 . The regulating valve 117 is communicated with the side pipe 116 and is located on one side of the side pipe 116 . The boost pump 118 is communicated with the regulating valve 117 and is located on one side of the regulating valve 117 .
[0039] In order to better adjust the flow rate of the upward airflow in the pipe body 115, the regulating valve 117 is provided on the side pipe 116, and the opening of the airflow can be adjusted by the regulating valve 117. In addition, in order to further increase the pressure, the booster pump 118 is also provided.
[0040] The polysilicon powder particle purification device also includes a heater 119, which includes a heating layer 120, a microwave reflection layer 121 and a heat insulation layer 122, the heat insulation layer 122 is arranged in the outer shell 102, the microwave reflection layer 121 is arranged in the heat insulation layer 122, and the heating layer 120 is arranged in the microwave reflection layer 121.
[0041] In order to ensure the temperature conditions during the reaction process, the present invention also specially designs a heater 119 to maintain the temperature required for the reaction. The heater 119 consists of three parts: a heating layer 120, a microwave reflection layer 121 and a heat insulation layer 122. Among them, the heat insulation layer 122 is arranged inside the shell 102 to prevent heat loss; the microwave reflection layer 121 is arranged inside the heat insulation layer 122, and its function is to evenly reflect the microwave energy to the heating layer 120 to make the heating more uniform; the heating layer 120 is arranged inside the microwave reflection layer 121 to directly provide the necessary heat energy for the reaction. Such a design not only ensures the heating effect, but also effectively avoids the loss of heat and improves the energy utilization efficiency. Overall, this design helps to improve the energy utilization rate and product quality in the process of polysilicon powder particle purification.
[0042] The polysilicon powder particle purification device further includes a collecting structure 123 , which is in communication with the tube body 115 and is located at the bottom of the tube body 115 .
[0043] The collection structure 123 is a key link in the collection of the final product, and its design is of great importance. The collection structure 123 is closely connected to the tube body 115 of the discharge tube 109 and is located at the bottom of the tube body 115 to collect the polysilicon powder particles after purification.
[0044] The collection structure 123 includes a cooling pipe 124, a cooling cavity 125, a valve 126 and a collection box 127. The cooling cavity 125 is connected to the tube body 115 and is located on one side of the tube body 115. The cooling pipe 124 is arranged on the outside of the cooling cavity 125. The valve 126 is arranged at the bottom of the cooling cavity 125. The collection box 127 is connected to the valve 126.
[0045] Specifically, the collection structure 123 mainly includes four parts: a cooling pipe 124, a cooling cavity 125, a valve 126, and a collection box 127. The cooling cavity 125 is connected to the tube body 115 of the discharge pipe 109 and is located on one side of the tube body 115. It is a container for receiving the polysilicon powder particles flowing out of the tube body 115. In order to ensure that the particles can be quickly cooled before collection and avoid subsequent processing problems that may be caused by high temperature, a cooling pipe 124 is provided on the outside of the cooling cavity 125, and the temperature of the polysilicon powder particles is reduced by the cooling medium (such as water or other coolants) in the cooling pipe 124.
[0046] A valve 126 is installed at the bottom of the cooling cavity 125 to control the outflow of materials in the cooling cavity 125. When the cooled polysilicon powder particles need to be discharged, this can be achieved by opening the valve 126. The design of the valve 126 ensures the safety of operation and facilitates the collection of materials.
[0047] The collecting box 127 is connected to the valve 126. When the valve 126 is opened, the cooled polysilicon powder particles flow into the collecting box 127. The design of the collecting box 127 should take into account the capacity and portability to ensure that a certain amount of product can be accommodated and facilitate subsequent processing or transportation.
[0048] This design not only ensures the rapid cooling of polysilicon powder particles after purification, but also effectively collects them for subsequent processing or storage. This whole process reflects the scientific and practical design of the equipment, aiming to improve production efficiency and product quality.
[0049] The collection structure 123 also includes a feed controller 129, which is used to control the seed feed pipe 104 to input seed material according to the weight of the material in the collection box 127. In order to realize automation and precise control of the purification process of polysilicon powder particles, the collection structure 123 is not only responsible for collecting the final product, but also integrates an advanced feed control system. This system can automatically adjust the input amount of the seed feed pipe 104 according to the weight of the material in the collection box 127, thereby ensuring the precise control of the entire process.
[0050] The feed controller 129 includes a pressure sensor 130, a calculation unit 131 and a control unit 132. The pressure sensor 130 is used to obtain the weight of the collection box 127. The calculation unit 131 is used to calculate the weight of the discharged seeds based on the weight of the collection box 127. The control unit 132 is used to control the seed feed pipe 104 to add a corresponding number of seeds into the reaction chamber 103 based on the weight of the discharged seeds.
[0051] The pressure sensor 130 is installed below the collection box 127 to monitor the weight change of the material in the collection box 127 in real time. When the polysilicon powder particles are collected, the pressure sensor 130 detects the weight change of the collection box 127 and transmits the data to the calculation unit 131.
[0052] The calculation unit 131 is responsible for receiving data from the pressure sensor 130 and calculating the weight of the discharged seed crystals according to the current weight of the collection box 127. Through continuous monitoring and calculation, the system can accurately know the weight of the product obtained after each reaction, thereby providing a basis for the next step of replenishing seed crystals.
[0053] The control unit 132 is the brain of the entire control system. Based on the seed weight information obtained by the calculation unit 131, it automatically adjusts the seed feed pipe 104 to add a corresponding amount of seed material to the reaction chamber 103. This means that every time a batch of polysilicon powder particles is successfully collected, the system will control the seed feed pipe 104 to add an equal amount of fresh seeds according to the actual weight of the consumed seeds, so as to ensure that the seed concentration in the reaction chamber 103 is always maintained within an ideal range.
[0054] This design not only improves production efficiency and reduces the need for manual intervention, but also enhances the stability and reliability of the production process, ensuring that each reaction is carried out under optimal conditions, thereby improving the purification quality and consistency of polysilicon powder particles.
[0055] The valve 126 includes a support plate 133, a spring 134, a magnetic limit block 135 and an electromagnetic switch 136. The support plate 133 is slidably arranged under the cooling cavity 125. The spring 134 is used to support the support plate 133. The magnetic limit block 135 is slidably arranged on one side of the support plate 133. The electromagnetic switch 136 is used to control the electromagnetic switch 136.
[0056] The support plate 133 is an important part of the structure of the valve 126, and is slidably disposed below the cooling chamber 125. The design of the support plate 133 allows it to move along a predetermined track to control the opening and closing state. In order to ensure that the support plate 133 can remain stable in the appropriate position, the spring 134 is designed to support the support plate 133. The elasticity of the spring 134 can provide sufficient force to offset the gravity of the material, and can also help the support plate 133 to cling to the sealing surface in the closed state to prevent leakage. During operation, the seed crystal contacts the support plate 133 under the action of gravity. As the seed crystals accumulate, the support plate 133 can be squeezed, so that a gap appears between the support plate 133 and the tube body 115. At this time, the magnetic limit block 135 slides downward under the action of gravity to limit the support plate 133, so that part of the seed crystal is discharged into the collection box 127. Then, the electromagnetic switch 136 is started to suck up the magnetic limit block 135 so that the support plate 133 can be reset, thereby allowing the seed crystal in the tube body 115 to start cooling again.
[0057] Second embodiment
[0058] See also Figure 6 Based on the first embodiment, the present invention further provides a method for purifying polycrystalline silicon powder particles, comprising:
[0059] S201: introducing the reaction raw materials into the premixing chamber 106;
[0060] First, the required reaction raw materials are introduced into the premixing chamber 106 through the feeding system. The purpose of this step is to premix the various raw materials before entering the reaction chamber 103 to ensure that they can be evenly contacted in the subsequent reaction process and improve the reaction efficiency. The design of the premixing chamber 106 allows the raw materials to be initially contacted at this stage to prepare for the subsequent chemical reaction.
[0061] S202 mixing the reaction raw materials through the mixer 107;
[0062] Next, in the premixing chamber 106, the mixer 107 starts to work to fully mix the reaction raw materials. The mixer 107 continuously stirs the raw materials through the stirring blades 111 on the rotating ring 110 to make them evenly dispersed. The operation of the mixer 107 not only helps to increase the contact area between the raw materials, but also promotes the occurrence of chemical reactions, ensuring that each portion of the raw materials can participate in the subsequent reaction.
[0063] The S203 gas enters the reaction chamber 103 through the gas outlet holes on the conical disk 108, so that the polysilicon seed crystals are suspended;
[0064] Subsequently, the gas enters the reaction chamber 103 uniformly through the multiple gas outlet holes on the conical disk 108 below the premixing chamber 106. The entry of these gases causes the polysilicon seeds to be suspended in the reaction chamber 103. In this way, the seeds can better contact with the reaction gas, increasing the effective area of the reaction, which is conducive to the formation of polysilicon particles.
[0065] S204 maintains the temperature of the polysilicon seed crystal at 1000-1100° C. The polysilicon produced by the reaction of the reaction raw materials is gathered on the polysilicon seed crystal and falls out from the discharge pipe 109 after exceeding a preset weight.
[0066] In this step, the temperature in the reaction chamber 103 is controlled between 1000 and 1100 degrees Celsius by the heater 119. In this temperature range, the reaction raw materials undergo a chemical reaction, and the generated polysilicon begins to gather on the seed crystal. As the reaction proceeds, the polysilicon particles gradually increase until their weight exceeds a preset value. At this time, due to the effect of gravity, the polysilicon particles will fall off the seed crystal and be discharged from the reaction chamber 103 through the discharge pipe 109, entering the cooling and collection stage.
[0067] What is disclosed above is only a preferred embodiment of the present invention, and it certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.
Claims
1. A polycrystalline silicon powder particle purification device, comprising a support frame, a shell, a reaction chamber, a seed crystal feed pipe and an exhaust gas exhaust pipe, wherein the shell is fixed on the support frame, the reaction chamber is arranged in the shell, the seed crystal feed pipe and the exhaust gas exhaust pipe are arranged on the top of the shell, characterized in that: It also includes a premixing cavity, a mixer, a conical disk and a discharge pipe, wherein the conical disk has a plurality of air outlet holes, the conical disk is arranged below the reaction cavity, the premixing cavity is connected with the conical disk, the mixer is rotatably arranged in the premixing cavity, the discharge pipe is connected with the reaction cavity and is located at the center of the conical disk.
2. A polycrystalline silicon powder particle purification device as claimed in claim 1, characterized in that: The mixer includes a rotating ring, a stirring blade, a stirring motor, a gear and a gear ring. The rotating ring is rotatably arranged in the premixing chamber, the stirring blade is fixed on the rotating ring, the gear ring is fixed on the rotating ring, the gear is meshed with the gear ring, and the output end of the stirring motor is fixed to the gear.
3. A polycrystalline silicon powder particle purification device as claimed in claim 2, characterized in that: The discharge pipe comprises a pipe body and a side pipe, wherein the side pipe is communicated with the pipe body and is located at one side of the pipe body.
4. A polycrystalline silicon powder particle purification device as claimed in claim 3, characterized in that: The discharge pipe also includes a regulating valve and a booster pump. The regulating valve is communicated with the side pipe and is located on one side of the side pipe. The booster pump is communicated with the regulating valve and is located on one side of the regulating valve.
5. The polycrystalline silicon powder particle purification device according to claim 4, characterized in that: The polysilicon powder particle purification device also includes a heater, which includes a heating layer, a microwave reflecting layer and a heat insulating layer. The heat insulating layer is arranged in the shell, the microwave reflecting layer is arranged in the heat insulating layer, and the heating layer is arranged in the microwave reflecting layer.
6. The polycrystalline silicon powder purification device according to claim 5, characterized in that: The polysilicon powder particle purification device further comprises a collecting structure, which is communicated with the tube body and is located at the bottom of the tube body.
7. A polycrystalline silicon powder particle purification device as claimed in claim 6, characterized in that: The collection structure includes a cooling pipe, a cooling cavity, a valve and a collection box. The cooling cavity is connected to the pipe body and is located on one side of the pipe body. The cooling pipe is arranged outside the cooling cavity. The valve is arranged at the bottom of the cooling cavity. The collection box is connected to the valve.
8. The polycrystalline silicon powder particle purification device according to claim 7, characterized in that: The collecting structure further comprises a feed controller, and the feed controller is used for controlling the seed feed pipe to input seed material according to the weight of the material in the collecting box.
9. A method for purifying polycrystalline silicon powder particles, using a polycrystalline silicon powder particle purification device according to any one of claims 1 to 8, characterized in that: include: Passing the reaction raw materials into the premixing chamber; Mixing the reaction materials by a mixer; The gas enters the reaction chamber through the gas outlet holes on the conical disk, causing the polysilicon seed crystals to suspend; The temperature of the polysilicon seed crystal is maintained at 1000-1100° C. The polysilicon produced by the reaction of the reaction raw materials is gathered on the polysilicon seed crystal and falls out from the discharge pipe after exceeding a preset weight.
Citation Information
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