Plasma cleaning equipment

Abstract

The invention discloses plasma cleaning equipment, and relates to the technical field of plasmas, the plasma cleaning equipment comprises a base, a circulating feeding device, an automatic loading and unloading device and a transition conveying device, the circulating feeding device comprises a feeding frame arranged on the base in a sliding mode and a supporting plate movably arranged on the feeding frame, and the supporting plate is provided with a material box for containing material pieces; the circulating feeding device can conduct circulating feeding in cooperation with a pushing and feeding mechanism in the automatic loading and unloading device to push material pieces to a conveying belt, then the conveying belt is matched with a pushing and discharging mechanism to push the material pieces to a bearing plate in the transition conveying device, and the bearing plate drives the material pieces to enter a cleaning cavity of the cleaning device to be cleaned. According to the technical scheme, the feeding efficiency is improved, meanwhile, automatic and efficient discharging is achieved, the feeding and discharging speed can be matched with the cleaning speed of the cleaning device, and therefore the overall working efficiency of the equipment is improved.

Description

Technical Field

[0001] The invention relates to the field of plasma technology, and in particular to plasma cleaning equipment. Background Art

[0002] The working principle of plasma cleaning equipment is based on the physical or chemical reaction between the active particles of plasma and the surface of the material, thereby removing surface contaminants. Plasma is the fourth state of matter, composed of electrons, ions, free radicals, etc. These active particles react with the surface of the material under the action of the electric field to achieve the cleaning effect. During the working process, the plasma cleaning equipment first generates plasma in the vacuum chamber, and then uses the active particles in the plasma to react with the surface of the material to remove the dirt and oxides on the surface through physical bombardment or chemical reaction. Physical bombardment mainly uses ions to hit the surface to remove contaminants; chemical reactions are through the reaction of active particles with contaminants to generate volatile substances, thereby achieving cleaning.

[0003] Plasma cleaning equipment generally includes a cleaning device and a conveying device. The automatic conveying device transfers the sheet to be cleaned to the cleaning device for plasma cleaning. In related technologies, the automatic conveying device generally adopts a conveyor belt for conveying. However, since the cleaning device can batch clean several sheets at a time, the feeding efficiency of the conveyor belt cannot match the cleaning rate. Summary of the invention

[0004] The main purpose of the present invention is to provide a plasma cleaning device, aiming to provide a plasma cleaning device with high feeding efficiency.

[0005] To achieve the above object, the plasma cleaning equipment proposed by the present invention comprises:

[0006] A base, wherein the base is provided with two first slide rails which are arranged in parallel and at intervals, and a conveyor belt which is arranged in parallel with the first slide rails, and a cleaning device is provided at one end of the conveyor belt which is away from the first slide rails, and the cleaning device is provided with a cleaning chamber;

[0007] A circulating feeding device, the circulating feeding device comprising two feeding racks and two supporting plates, each of the feeding racks being slidably arranged on one of the first slide rails, the feeding racks being provided with a first guide rail extending in a direction perpendicular to the base, each of the supporting plates being slidably arranged on one of the first guide rails, and the supporting plates being provided with a material box for containing material sheets;

[0008] An automated loading and unloading device, a loading component and an unloading component of the automated loading and unloading device, the loading component comprising a first track, a first beam and a material pushing mechanism, the first track being arranged on the base and arranged along the extension direction of the conveyor belt, the first beam being slidably arranged on the first track, the first beam being provided with a first driving mechanism facing the base, the material pushing mechanism being provided at a driving end of the first driving mechanism, the unloading component comprising a second track, a second beam and a material pushing mechanism, the second track being arranged on the base and arranged parallel to the first track, the second beam being slidably arranged on the second track, the second beam being provided with a second driving mechanism facing the base, the material pushing mechanism being provided at a driving end of the second driving mechanism; and

[0009] A transition conveying device, the transition conveying device includes a supporting plate movably arranged on the base, the supporting plate is provided with a receiving groove for accommodating the sheet, the supporting plate is arranged at one end of the conveyor belt away from the circulating feeding device, and the supporting plate can rotate between the conveyor belt and the cleaning chamber.

[0010] In one embodiment, the base is provided with a pedestal, the conveyor belt is provided on the pedestal, the pedestal is provided with a pressing mechanism, and the pressing mechanism comprises:

[0011] A material pressing driving member, the material pressing driving member is arranged on the base, a driving end of the material pressing driving member is provided with a transmission plate, and the transmission plate is arranged along the extending direction of the conveyor belt; and

[0012] Two seesaws are rotatably connected to the base and are arranged on both sides of the pressing drive member along the direction of the conveyor belt. The seesaw has a connecting end and a free end. The connecting end is connected to the transmission plate. The free end is provided with a pressing wheel, and the pressing wheel can approach or move away from the conveyor belt.

[0013] In one embodiment, the pressing mechanism further includes a fine-tuning bolt, the free end of which is provided with a through hole facing the base, the fine-tuning bolt is screwed into the through hole and can extend from the through hole to abut against the base.

[0014] In one embodiment, the base is provided with a placement rack, the placement rack is located at an end of the conveyor belt away from the circulating feeding device, and the placement rack is formed with a buffer groove, and the buffer groove is connected to the conveyor belt.

[0015] In one embodiment, the plasma cleaning device comprises a plurality of conveyor belts, one of every two adjacent conveyor belts is disposed on the base, and the other one of the conveyor belts is slidably disposed on a second guide rail on the base;

[0016] The base is provided with a width adjustment driving member, a driving end of the width adjustment driving member is provided with a fourth screw rod, the fourth screw rod is provided with a fifth slider, and the fifth slider is connected to the conveyor belt arranged on the second guide rail so that the distance between every two adjacent conveyor belts is adjustable.

[0017] In one embodiment, the base is provided with a longitudinal adjustment mechanism, and the longitudinal adjustment mechanism comprises:

[0018] A longitudinal adjustment driving member, the longitudinal adjustment driving member is arranged on the base, a driving end of the longitudinal adjustment driving member is provided with a fifth screw rod extending along the connecting direction of the material box and the cleaning device, the fifth screw rod is provided with a sliding seat, and the plurality of conveyor belts are all arranged on the sliding seat; and

[0019] The displacement detection mechanism comprises a detection end arranged on the base and a sensing end arranged on the sliding seat, and the detection end is electrically connected to the longitudinal adjustment driving member.

[0020] In one embodiment, the automatic loading and unloading device further comprises a pressure detection assembly, wherein the pressure detection assembly comprises a loading pressure sensor disposed on the first beam and a unloading pressure sensor disposed on the second beam;

[0021] The first track and the second track are respectively provided with a first motor for driving the first beam to move and a second motor for driving the second beam to move. The loading pressure sensor is electrically connected to the loading mechanism and the first motor, and the unloading pressure sensor is electrically connected to the unloading mechanism and the second motor.

[0022] In one embodiment, the feeding mechanism comprises a mounting plate and a plurality of feeding rods arranged on the mounting plate, the mounting plate is movably arranged on the first crossbeam, and the plurality of feeding rods are evenly spaced and arranged on the mounting plate;

[0023] A first guide rail is provided on one side of the mounting plate facing the base, and the push rod is slidably arranged on the first guide rail;

[0024] The push rod is provided with a first abutment block facing the mounting plate, and the mounting plate is provided with a second abutment block facing the push rod. An elastic member is provided between the first abutment block and the second abutment block, and the deformation direction of the elastic member is along the extension direction of the push rod.

[0025] In one embodiment, the transition conveying device comprises:

[0026] A conveyor belt, the conveyor belt is arranged parallel to the conveyor belt, the conveyor belt comprises an upper belt body and a lower belt body, the upper belt body and the lower belt body are respectively provided with a bearing plate, the bearing plate is provided with a mounting frame opening, and the mounting frame opening is provided with a movable plate;

[0027] A plurality of bearing parts, the plurality of bearing parts are arranged on the movable plate, each bearing part is arranged corresponding to one of the conveyor belts, the bearing part comprises two bearing members arranged at intervals, and the two bearing members are respectively provided with opposite placement grooves; and

[0028] A lifting mechanism is arranged on the base, and a movable end of the lifting mechanism is connected to the movable plate and is used to drive the movable plate to rise and fall.

[0029] In one embodiment, the movable plate is provided with a plurality of bearing parts stacked in a vertical direction, and a bracket is provided between every two adjacent bearing parts, and the bracket is used to support the bearing parts.

[0030] In the technical solution of the present invention, a plasma cleaning equipment is proposed, including a base, a circulating loading device, an automatic loading and unloading device and a transition conveying device. The base is provided with two first slide rails arranged in parallel and at intervals and a conveyor belt arranged in parallel with the first slide rails. The circulating loading device includes two loading racks and pallets respectively arranged on the two loading racks. The two loading racks are respectively slidably arranged on the first slide rails, and the pallets can be lifted and lowered on the loading racks. A plurality of material boxes are arranged on the pallets, and each material box can store a plurality of material sheets to be cleaned. The extension direction of the first slide rail is the loading direction. When loading, one of the loading racks moves to one end of the cleaning machine and then other automated equipment is used to push the material sheets in the material box into the cleaning machine until all the material sheets leave the material box. At this time, the pallet on the loading rack is lowered along the guide rail until the highest position of the material box on the pallet is lower than the other pallet, and the loading rack moves away from one end of the cleaning machine, and the other loading rack fully loaded with the material sheets to be cleaned moves toward one end of the cleaning machine. Since the pallets on the two loading racks are staggered in the vertical direction, no interference or collision occurs.

[0031] The sheet to be cleaned loaded by the aforementioned circulating loading device will enter the conveyor belt under the push of the loading mechanism in the loading component, and then be transported by the conveyor belt to the end away from the material box, pushed by the unloading component in the unloading component to the carrier plate on the transition conveying device, and enter the corresponding containing groove for fixed limit, and finally transported by the moving carrier plate to the cleaning chamber of the cleaning device for cleaning; in addition, the cleaned sheet can continue to be transported by the carrier plate to one end of the conveyor belt, and then the reverse-moving unloading mechanism will push the cleaned sheet into the material box to achieve unloading. This solution improves the loading efficiency while also achieving automated and efficient unloading so that the loading and unloading rates can match the cleaning rate of the cleaning device, thereby improving the overall working efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0033] Figure 1 A schematic structural diagram of an embodiment of a plasma cleaning device provided by the present invention;

[0034] Figure 2 This is a schematic diagram of the explosion structure of the plasma cleaning equipment;

[0035] Figure 3 It is a schematic diagram of the internal structure of the plasma cleaning equipment;

[0036] Figure 4 It is a structural schematic diagram of a circulating feeding device in a plasma cleaning device;

[0037] Figure 5 It is a schematic diagram of the structure of the circulating feeding device in the plasma cleaning equipment from another angle;

[0038] Figure 6 It is a structural schematic diagram of the base in the circulating feeding device;

[0039] Figure 7 It is a structural schematic diagram of a sliding seat in a circulating feeding device;

[0040] Figure 8 It is a structural schematic diagram of the spacing adjustment component;

[0041] Fig. 9 It is a structural schematic diagram of the material box;

[0042] Fig.10 It is a structural schematic diagram of a sheet product;

[0043] Fig.11 A schematic structural diagram of an embodiment of an automated loading and unloading device provided by the present invention;

[0044] Fig.12 for Fig.11 A partial enlarged view of the middle A;

[0045] Fig.13 It is a top view of the automated loading and unloading device;

[0046] Fig.14 for Figure 1 A schematic diagram of the structure of the loading component and the unloading component;

[0047] Fig.15A schematic diagram of the structure of the loading assembly provided by the present invention;

[0048] Fig.16 is a schematic diagram of the internal structure of the loading component;

[0049] Fig.17 It is a structural diagram of the push-feeding mechanism;

[0050] Fig.18 It is a schematic diagram of the structure of the uninstall component;

[0051] Fig.19 A schematic diagram of the structure of the conveying device provided by the present invention;

[0052] Fig. 20 It is a structural schematic diagram of the conveying device from another angle;

[0053] Fig.21 It is a schematic diagram of the structure of the base in the conveying device;

[0054] Fig. 22 It is a schematic diagram of the structure of the fine-tuning bolt in the transmission device;

[0055] Fig.23 It is a structural schematic diagram of the material pressing mechanism in the conveying device;

[0056] Fig.24 This is a schematic diagram of the structure of the transition conveying device provided by the present invention;

[0057] Fig.25 is a structural schematic diagram of the bearing part;

[0058] Fig.26 It is a structural schematic diagram of the jacking mechanism.

[0059] Description of Figure Numbers:

[0060] 1000. Plasma cleaning equipment; 1. Base; 1a. Loading and unloading station; 1b. Preparation station; 1c. Cleaning station; 2. Shell; 21. Upper frame; 22. Lower frame; 5-100. Cleaning device; 2000. Material sheet.

[0061] 1-100, circulating feeding device; 1-11, first track; 1-12, first driving assembly; 1-121, first motor; 1-122, first screw rod; 1-123, first slider; 1-2, feeding rack; 1-21, guide rail; 1-22, second driving assembly; 1-221, second motor; 1-222, second screw rod; 1-223, second slider; 1-3, support plate; 1-4, material box; 1-41, accommodating cavity; 1-42, limiting groove; 1-5, sliding seat; 1-51, second track; 1-511, fourth slider; 1-52, third driving assembly; 1-521, third motor; 1-522, third screw rod; 1-523, third slider; 1-6, spacing adjustment assembly; 1-61, first cylinder; 1-62, fourth slider; 1-63, third track; 1-64, mounting block.

[0062] 2-100, automated loading and unloading device; 2-1, base; 2-2, loading assembly; 2-21, third rail; 2-211, limit assembly; 2-212, fifth motor; 2-22, first beam; 2-221, sleeve; 2-23, feeding mechanism; 2-231, mounting plate; 2-232, feeding rod; 2-233, contour surface; 2-234, guide rod; 2-235, first guide rail; 2-236, second abutment Block; 2-237, elastic member; 2-238, first abutment block; 2-24, first drive mechanism; 2-25, loading pressure sensor; 2-3, unloading assembly; 2-31, fourth track; 2-311, sixth motor; 2-32, second beam; 2-33, unloading mechanism; 2-331, dual-purpose push head; 2-34, second drive mechanism; 2-35, unloading pressure sensor; 2-4, placement rack; 2-41, cache slot.

[0063] 3-100, conveying device; 3-1, conveyor belt; 3-11, pressing mechanism; 3-111, pressure drive member; 3-112, transmission plate; 3-113, seesaw; 3-114, pressure wheel; 3-115, fine-tuning bolt; 3-2, fourth motor; 3-3, width adjustment drive member; 3-31, width adjustment slider; 3-4, longitudinal adjustment drive member; 3-5; position detection component; 3-6, sliding seat; 3-61, base.

[0064] 4-100, transition conveying device; 4-1, workbench; 4-11, in-place monitoring assembly; 4-12, third guide rail; 4-121, load-bearing plate; 4-2, movable plate; 4-21, load-bearing member; 4-211, placement slot; 4-3, lifting mechanism; 4-31, lifting cylinder; 4-32, guide column; 4-33, transverse motor; 4-34, lifting plate.

[0065] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0066] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0067] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0068] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0069] The present invention proposes a plasma cleaning device 1000, aiming to provide a plasma cleaning device 1000 with high feeding efficiency. Figures 1 to 26 A schematic structural diagram of an embodiment of a plasma cleaning device 1000 provided by the present invention.

[0070] Please refer to Figures 1 to 26The present invention proposes a plasma cleaning device 1000, comprising a base 1, a circulating feeding device 1-100, an automatic loading and unloading device 2-100 and a transition conveying device 4-100, wherein the base 1 is provided with two first slide rails arranged in parallel and at intervals and a conveyor belt 3-1 arranged in parallel with the first slide rails, and a cleaning device 5-100 is provided at one end of the conveyor belt 3-1 facing away from the first slide rails, and the cleaning device 5-100 is provided with a cleaning cavity; the circulating feeding device 1-100 comprises two feeding racks 1-2 and two pallets 1 -3, each loading rack 1-2 is slidably arranged on a first slide rail, the loading rack 1-2 is provided with a first guide rail 2-235 extending in a direction perpendicular to the base 1, each support plate 1-3 is slidably arranged on a first guide rail 2-235, the support plate 1-3 is provided with a material box 1-4 for holding the sheet 2000; the loading assembly and unloading assembly of the automatic loading and unloading device 2-100, the loading assembly includes a third rail 2-21, a first beam 2-22 and a pushing mechanism 2-23, the first rail 1-11 is arranged on the base 1 and The first crossbeam 2-22 is arranged along the extension direction of the conveyor belt 3-1, and is slidably arranged on the first track 1-11. The first crossbeam 2-22 is provided with a first driving mechanism 2-24 facing the base 1, and the feeding mechanism 2-23 is arranged at the driving end of the first driving mechanism 2-24. The unloading assembly includes a second track 1-51, a second crossbeam 2-32 and a feeding mechanism 2-33. The second track 1-51 is arranged on the base 1 and is arranged parallel to the first track 1-11. The second crossbeam 2-32 is slidably arranged on the second track 1 -51, the second cross beam 2-32 is provided with a second driving mechanism 2-34 facing the base 1, and the pushing and unloading mechanism 2-33 is provided at the driving end of the second driving mechanism 2-34; the transition conveying device 4-100 includes a supporting plate 4-121 movably provided on the base 1, and the supporting plate 4-121 is provided with a receiving groove for accommodating the sheet 2000, and the supporting plate 4-121 is provided at one end of the conveyor belt 3-1 away from the circulating feeding device 1-100, and the supporting plate 4-121 can rotate between the conveyor belt 3-1 and the cleaning chamber.

[0071] Correspondingly, the present invention also proposes a method for cleaning a sheet 2000 using the above-mentioned plasma cleaning equipment 1000. The execution of the cleaning process requires the use of a circulating feeding device 1-100, an automatic loading and unloading device 2-100, a conveying device 3-100, a transition conveying device 4-100 and a cleaning device 5-100 in sequence. First, the sheet 2000 to be cleaned is loaded into a tray manually or mechanized, and a number of material boxes 1-4 loaded with sheets 2000 are fixedly placed in the circulating feeding device 1-100 in sequence to load the sheet 2000. A material box 1-4 for holding the sheet 2000 is provided on the support plate 1-3. The extension direction of the first slide rail is the loading direction. When loading, one of the loading racks 1-2 moves to one end of the cleaning machine and then uses other automated equipment to push the sheet 2000 in the material box 1-4 into the cleaning machine until all the sheets 2000 leave the material box 1-4. At this time The pallet 1-3 on the loading rack 1-2 is lowered along the second guide rail 1-21 until the highest position of the loading box 1-4 on the pallet 1-3 is lower than that of the other pallet 1-3, and the loading rack 1-2 moves away from one end of the cleaning machine, and the other loading rack 1-2 fully loaded with the sheets 2000 to be cleaned moves toward one end of the cleaning machine. Since the pallets 1-3 on the two loading racks 1-2 are staggered in the vertical direction, no interference or collision will occur. The two pallets 1-3 on the two loading racks 1-2 alternately flow between the loading position and the unloading position, thereby improving the loading efficiency and matching the cleaning rate of the cleaning device 5-100. Next, the first driving mechanism 2-24 drives the material pushing mechanism 2-23 to descend, and the first crossbeam 2-22 moves toward one end of the conveyor belt 3-1 to drive the material pushing mechanism 2-23 to push the material sheet 2000 to be cleaned from the material box 1-4 to the conveyor belt 3-1, and then the conveyor belt 3-1 transports it to the placement rack 2-4, and the material sheet 2000 to be cleaned is temporarily stored on the placement rack 2-4, and then the material sheet 2000 is pushed from the buffer slot 2-41 of the placement rack 2-4 to the carrier plate 4-121 in the transition conveying device 4-100 by the material pushing mechanism 2-33, and the carrier plate is controlled 4-121 rises so that the containing groove on the supporting plate 4-121 is aligned with the buffer groove 2-41, and under the push of the pushing mechanism 2-33, the material sheet 2000 to be cleaned will enter the containing groove, and the material sheet 2000 to be cleaned is driven by the movable supporting plate 4-121 to enter the cleaning chamber of the cleaning device 5-100 for cleaning; after cleaning, the supporting plate 4-121 moves in the reverse direction with the cleaned material sheet 2000 until it moves to one end of the conveyor belt 3-1, and the pushing device moves in the reverse direction to push the material sheet 2000 into the material box 1-4, thereby realizing unloading.

[0072] In the technical solution of the present invention, a plasma cleaning device 1000 is proposed, including a base 1, a circulating feeding device 1-100, an automatic loading and unloading device 2-100 and a transition conveying device 4-100, the base 1 is provided with two first slide rails arranged in parallel and spaced apart and a conveyor belt 3-1 arranged in parallel with the first slide rails, the circulating feeding device 1-100 includes two feeding racks 1-2 and pallets 1-3 respectively arranged on the two feeding racks 1-2, the two feeding racks 1-2 are respectively slidably arranged on the first slide rails, the pallets 1-3 are liftably arranged on the feeding racks 1-2, a plurality of material boxes 1-4 are arranged on the pallets 1-3, each material box 1-4 can store a plurality of material sheets 2000 to be cleaned, the first slide rails The extending direction is the loading direction. When loading, one of the loading racks 1-2 moves to one end of the cleaning machine and then uses other automated equipment to push the material sheets 2000 in the material box 1-4 into the cleaning machine until all the material sheets 2000 leave the material box 1-4. At this time, the pallet 1-3 on the loading rack 1-2 is lowered along the second guide rail 1-21 until the highest position of the pallet 1-3 loading box 1-4 is lower than the other pallet 1-3. The loading rack 1-2 moves away from one end of the cleaning machine, and the other loading rack 1-2 fully loaded with the material sheets 2000 to be cleaned moves toward one end of the cleaning machine. Since the pallets 1-3 on the two loading racks 1-2 are staggered in the vertical direction, no interference or collision will occur.

[0073] The material sheet 2000 to be cleaned loaded by the aforementioned circulating loading device 1-100 will enter the conveyor belt 3-1 under the push of the loading mechanism 2-23 in the loading component, and then be transported by the conveyor belt 3-1 to the end away from the material box 1-4, and pushed by the unloading component 2-3 in the unloading component to the carrier plate 4-121 on the transition conveying device 4-100, and enter the corresponding containing groove for fixed limit, and finally transported by the movable carrier plate 4-121 to the cleaning chamber of the cleaning device 5-100 for cleaning; in addition, the cleaned material sheet 2000 can continue to be transported by the carrier plate 4-121 to one end of the conveyor belt 3-1, and then the reverse-moving unloading mechanism 2-33 will push the cleaned material sheet 2000 into the material box 1-4 to achieve unloading. This solution improves the loading efficiency while also achieving automated and efficient unloading so that the loading and unloading rates can match the cleaning rate of the cleaning device 5-100, thereby improving the overall working efficiency of the equipment.

[0074] The plasma cleaning device 1000 discloses a conveying device 3-100. In the related art, when the conveying device 3-100 is conveying a sheet 2000, the track of the conveying device 3-100 cannot adapt to sheets 2000 of different thicknesses. When the user needs to clean sheets 2000 of different thicknesses, it is necessary to adjust the thickness of the track to achieve the conveying of sheets 2000 of different thicknesses. In view of this, the conveying device 3-100 is provided with a pressing mechanism 3-11. For details, please refer to Figure 21 to Figure 23 The base 1 is provided with a base 3-61, the pressing mechanism 3-11 and the conveyor belt 3-1 are both provided on the base 3-61, the pressing mechanism 3-11 includes a pressing driving member, the driving end of the pressing driving member is provided with a transmission plate 3-112, the conveyor plate is arranged along the extension direction of the conveyor belt 3-1, the two ends of the transmission plate 3-112 are respectively movably connected to two seesaws 3-113, the two seesaws 3-113 are rotatably connected to the base 3-61 and are respectively provided on both sides of the pressing driving member along the direction of the conveyor belt 3-1, the seesaw 3-113 has a connection end and a free The connecting end is connected to the mounting plate 2-231, and the free end is provided with a pressing wheel 3-114, which can be close to or away from the conveyor belt 3-1. The lifting drive plate 3-112 of the pressing drive member drives the seesaw 3-113 to rotate so that the pressing wheel 3-114 is pressed down and the distance between the conveyor belt 3-1 is further reduced, thereby adapting to the transportation of the thinner thickness of the sheet 2000; on the contrary, when the pressing drive member is recovered, the distance between the pressing wheel 3-114 and the conveyor belt 3-1 is expanded, thereby matching the thicker thickness of the sheet 2000. Ensure the stability of the sheet 2000 during the transportation process. By adjusting the action of the pressing drive member, the clamping force of the sheet 2000 can be easily controlled to prevent the sheet 2000 from sliding or falling off during the transportation process.

[0075] Furthermore, the outer periphery of the pressing wheel 3-114 is provided with a rubber tire, so that the pressing wheel 3-114 will not cause deformation and scratching of the surface of the material 2000 when it contacts the material 2000 during the pressing process. It should be noted that the pressing drive member can be a cylinder or a low-speed motor, a pressing rod is arranged at the driving end of the low-speed motor, and the pressing wheel 3-114 is arranged at the end of the pressing rod. In one embodiment of the present invention, the cylinder drives the seesaw 3-113 to drive the pressing wheel 3-114 to rise or fall. The setting of the seesaw 3-113 is like a lever, which can further reduce the thrust required by the pressing cylinder, thereby selecting a pressing cylinder with smaller size parameters.

[0076] In one embodiment, the conveyor belt 3-1 can be driven by a motor, a hydraulic pump, a cylinder or other forms of driving devices. In this case, the conveyor belt 3-1 is driven by the fourth motor 3-2. For details, please refer to Fig.19 and Fig. 22. The role of the fourth motor 3-2 in the conveying device 3-100 is to drive the conveyor belt 3-1 to achieve the transmission of the material sheet 2000. Specifically, the fourth motor 3-2 is directly connected to the transmission wheel, and the transmission wheel is driven by the rotation of the motor, thereby driving the conveyor belt 3-1. A variable frequency drive or a reducer can be used to control the speed of the fourth motor 3-2 to adjust the transmission speed of the conveyor belt 3-1. The transmission assembly is a key part in the material transmission device, and its role is to transfer power from the fourth motor 3-2 to the conveyor belt 3-1 to achieve continuous transportation of materials. The transmission assembly usually includes a transmission wheel and a conveyor belt 3-1. The transmission wheel is directly connected to the fourth motor 3-2, and its rotation is the direct source of the movement of the conveyor belt 3-1. The transmission wheel can be a single wheel or multiple wheels (such as double wheels or three wheels), and the specific design depends on the required torque and stability. The conveyor belt 3-1 is a flexible belt material that contacts and is driven by the transmission wheel, and is usually made of rubber, plastic, metal or other synthetic materials. The conveyor belt 3-1 is wrapped around the transmission wheel and other possible redirecting wheels, and transmits power through friction or meshing. In order to ensure effective contact of the conveyor belt 3-1 on the transmission wheel and reduce slippage, the conveyor belt 3-1 needs to maintain appropriate tension. The tensioning device can be a weight, spring, hydraulic pressure, etc., which is used to adjust the tension of the conveyor belt 3-1.

[0077] Furthermore, the pressing mechanism 3-11 also includes a fine-tuning bolt 3-115. For details, please refer to Fig. 22 The free end of the rocker 3-113 is provided with a through hole facing the base 3-61, and the fine-tuning bolt 3-115 is inserted into the through hole and its extension amount can be adjusted by twisting, so that the end of the fine-tuning bolt 3-115 close to the base 3-61 can be abutted against the base 3-61, thereby achieving fine-tuning of the distance between the pressure wheel 3-114 and the conveyor belt 3-1.

[0078] In addition, the plasma cleaning device 1000 is not only applicable to the cleaning of sheets 2000 of different thicknesses, but also applicable to the cleaning of sheets 2000 of different outer diameters. To match sheets 2000 of different outer diameters, the base 1 is provided with a width adjustment drive member 3-3. For details, please refer to Fig. 20 and Fig.21A fourth screw rod is provided at the driving end of the width-adjusting driving member 3-3, and a fifth slider is sleeved on the fourth screw rod. The fifth slider is slidably arranged on the fourth screw rod and connected to a sliding seat 3-6 arranged on the second guide rail 1-21. In this embodiment, the plasma cleaning equipment 1000 is provided with a total of eight parallel conveyor belts 3-1, and every two adjacent conveyor belts 3-1 form a conveying unit. Each conveying unit can convey a piece of material 2000 at a time, that is, the bottom of the material 2000 is respectively in contact with two conveyor belts 3-1 to achieve transmission. The eight conveyor belts 3-1 are from the first conveyor belt 3-1 to the eighth conveyor belt 3-1 from left to right (that is, the transmission direction of the vertical conveyor belt 3-1). Among the eight conveyor belts 3-1, the odd-numbered conveyor belts 3-1 (a total of four) are configured as movable conveyor belts 3-1, that is, all odd-numbered conveyor belts 3-1 are installed on the sliding seat 3-6, and the spacing between them and the adjacent even-numbered conveyor belts 3-1 can be adjusted by the width-adjusting drive member 3-3, so as to match the transportation of materials 2000 of different diameters.

[0079] Furthermore, since the conveyor belt 3-1 is suitable for receiving and conveying the material sheets 2000 from the material box 1-4, the conveyor belt 3-1 is not in close contact with the material box 1-4 due to its continuous operation characteristics, and a gap is left between the conveyor belt 3-1 and the material box 1-4. When it is suitable for materials 2000 of different diameters, part of the material sheets 2000 may be stuck. To solve this problem, the present solution movably arranges the conveyor device 3-100 on the base 1, and provides a longitudinal adjustment mechanism at the bottom of the conveyor device 3-100. For details, please refer to Fig.19 The longitudinal adjustment mechanism includes a longitudinal adjustment drive 3-4 and a displacement detection mechanism. The longitudinal adjustment drive 3-4 is arranged on the base 1. The driving end of the longitudinal adjustment drive 3-4 is provided with a fifth screw extending along the connecting direction of the material box 1-4 and the cleaning device 5-100. The fifth screw is provided with a sliding seat 1-5. Multiple conveyor belts 3-1 are all provided on the sliding seat 1-5. In order to accurately control the adjustment spacing, the base 1 is provided with a detection end, and the sliding seat 1-5 is provided with a sensing end. When the sliding seat 1-5 moves and drives the sensing end to move in front of the detection end, the detection end can form an electrical signal according to its moving position and feedback to the longitudinal adjustment drive 3-4, thereby accurately adjusting its adjustment spacing.

[0080] In one embodiment, the cleaning device can realize single-side loading and unloading, which is mainly realized by the automatic loading and unloading device 2-100. The single-side loading and unloading method uses the aforementioned automatic loading and unloading device 2-100 to load and unload the material sheet 2000. The single-side loading and unloading method includes the following steps: S1: obtain a plurality of material sheets 2000 and load the material sheets 2000 into the material box 1-4; S2: obtain the loading and unloading station 1a, and move the material box 1-4 containing the material sheets 2000 to the loading and unloading station 1a; S3: control the pushing mechanism 2-23 to load the material sheets 2000 from the material box 1-4 Push to conveyor belt 3-1; S4: Get the preparation station 1b at one end of conveyor belt 3-1, control conveyor belt 3-1 to move and drive sheet 2000 to enter the preparation station 1b; S5: Control the material pushing mechanism 2-33 to run forward to push sheet 2000 from the preparation station 1b to the cleaning device 5-100; S6: Control the material pushing mechanism 2-33 to run reversely to push the cleaned sheet 2000 from the cleaning device 5-100 to conveyor belt 3-1; S7: Control conveyor belt 3-1 to move and drive sheet 2000 to enter the loading and unloading station 1a. Through this one-sided loading and unloading method, one-sided loading and unloading can be achieved while ensuring the production efficiency of the equipment, that is, the sheet 2000 to be cleaned enters from the left side, and the cleaned sheet 2000 also leaves from the left side. Compared with the traditional "left-in and right-out" production method, the production area required for the equipment is reduced, and the degree of integration of the equipment is also improved.

[0081] The technical solution of the present invention proposes an automated loading and unloading device 2-100 and a single-sided loading and unloading method using the automated loading and unloading device 2-100, wherein the automated loading and unloading device 2-100 includes a base 1, a material box 1-4 and a conveyor belt 3-1 arranged on the base 1, a loading component and an unloading component, the material box 1-4 is used to hold the material sheet 2000, the conveyor belt 3-1 is used to transport the material sheet 2000 in the material box 1-4 to a cleaning device 5-100, and a placement rack 2-4 is provided at one end of the conveyor belt 3-1 away from the material box 1-4. The automatic loading and unloading device 2-100 has a loading state and a unloading state. In the loading state, the first driving mechanism 2-24 drives the pushing mechanism 2-23 to descend, and the first crossbeam 2-22 moves toward one end of the conveyor belt 3-1 to drive the pushing mechanism 2-23 to push the material 2000 to be cleaned from the material box 1-4 to the conveyor belt 3-1, and then the conveyor belt 3-1 is transported to the placement rack 2-4, and the material 2000 to be cleaned is temporarily stored on the placement rack 2-4, and the cleaning result of the material 2000 in the cleaning device 5-100 is After the material is unloaded, the pushing and unloading mechanism 2-33 is controlled to push the material sheet 2000 on the placement rack 2-4 into the cleaning device 5-100 for cleaning. During this process, the conveyor belt 3-1 will continue to run without affecting the production efficiency of the equipment; in the unloading state, the second driving mechanism 2-34 drives the pushing and unloading mechanism 2-33 to descend, and the second crossbeam 2-32 moves toward one end of the material box 1-4 to drive the pushing and unloading mechanism 2-33 to push the cleaned material sheet 2000 from the placement rack 2-4 via the conveyor belt 3-1 to the material box 1-4 to complete the unloading.

[0082] The automatic loading and unloading device 2-100 proposed in this case is mainly suitable for plasma cleaning machines, and of course it is not limited to use in other equipment that requires automatic loading and unloading of materials. The plasma cleaning machine greatly improves the cleaning efficiency of the sheet 2000 by loading the sheet 2000 to be cleaned and unloading the sheet 2000 after cleaning through the automatic loading and unloading device 2-100. It should be noted that the plasma cleaning machine equipped with the automatic loading and unloading device 2-100 can adjust its cleaning rate according to actual production needs, and provide deep cleaning and surface cleaning modes similar to washing machines. The time in each mode is different. The advantage of this design is that it provides flexibility and efficiency. By adjusting the plasma power, processing time and gas flow, the cleaning process can be optimized to adapt to different materials and pollutants, thereby improving production efficiency, reducing resource waste, and protecting materials from damage caused by excessive cleaning. This flexibility ensures that the equipment can adapt to various cleaning tasks, improve product quality, and provide rapid response to changes in the production process. The present automatic loading and unloading device 2-100 can also match the placement rack 2-4 of the corresponding storage space according to the cleaning efficiency of the plasma cleaning machine. If the speed of the cleaning machine is high, the preparation station 1b needs to cache fewer pieces 2000, and the distance of the placement rack 2-4 can be shortened accordingly; when the cleaning machine is in deep cleaning mode and runs slowly, the preparation station 1b can leave a longer area and appropriately extend the placement rack 2-4, thereby improving its caching capacity. The piece 2000 will first be transported from the conveyor belt 3-1 to the placement rack 2-4, wait for synchronization on the placement rack 2-4, and then be pushed to the cleaning device 5-100 by the pushing structure. In this way, there is no need for the conveyor belt 3-1 and the cleaning device 5-100 to maintain a high degree of consistency, allowing the two to run at different speeds. Each link can independently optimize the running speed, improve the overall production efficiency, and reduce the downtime caused by the mismatch between equipment.

[0083] In order to prevent the pushing mechanism from damaging the sheet 2000 when pushing the sheet 2000, or from causing the sheet 2000 to fly out due to excessive thrust, or from causing the sheet 2000 to fail to be pushed out due to insufficient thrust, the automatic loading and unloading device 2-100 also includes a pressure detection component, which includes a loading pressure sensor 2-25 provided on the first beam 2-22 and a unloading pressure sensor 2-35 provided on the second beam 2-32. For details, please refer to Figure 7 and Figure 8, a fifth motor 2-212 is provided on the third track 2-21, and the driving end of the fifth motor 2-212 can be connected to a transmission device such as a screw rod or a pulley to drive the first beam 2-22 to move along the third track 2-21; correspondingly, in order to drive the second beam 2-32 to move, a sixth motor 2-311 is provided on the second track 1-51, and the driving end of the sixth motor 2-311 is externally connected to a transmission device. The loading pressure sensor 2-25 is electrically connected to the fifth motor 2-212, and the moving speed of the first beam 2-22 can be adjusted by controlling the motor speed, thereby adjusting the thrust of the loading mechanism 2-23; the unloading pressure sensor 2-35 is electrically connected to the sixth motor 2-311, and the thrust of the unloading mechanism 2-33 can be adjusted by controlling the speed of the sixth motor 2-311. The pressure detection assembly integrated in the automated loading and unloading device 2-100 includes pressure sensors for loading and unloading, which can monitor in real time the thrust of the push rod 2-232 that pushes the sheet 2000 during loading and the thrust of the dual-purpose push head 2-331 that pushes the sheet 2000 during unloading, thereby ensuring that the thrust remains within the optimal range. This intelligent design helps prevent damage to the sheet 2000 during loading and unloading, and ensures that the thrust is not too small to affect efficiency. By precisely controlling the thrust, the stability and safety of the device are enhanced, while also reducing the possibility of human operating errors. This system can also adapt to sheets 2000 of different sizes and weights, providing a flexible loading and unloading solution, improving the level of automation and overall loading and unloading efficiency.

[0084] In actual production practice, the cyclic feeding device 1-100 feeds a total of four material boxes 1-4 each time. In order to further improve the pushing rate, the pushing feeding mechanism 2-23 includes a mounting plate 2-231 and a plurality of pushing rods 2-232 arranged on the mounting plate 2-231. For details, please refer to Figures 5 to 7 In this embodiment, there are four push rods 2-232, which are evenly spaced along the extension direction of the mounting plate 2-231. During the loading process, the four push rods 2-232 will be respectively inserted into the four material boxes 1-4 to push the four sheets 2000 in the four receiving slots from the material boxes 1-4 to the conveyor belt 3-1. Accordingly, the conveyor belt 3-1 is provided with four strips, which are arranged corresponding to the four material boxes 1-4 to carry the sheets 2000 to be cleaned transmitted from the material boxes 1-4. Since the contact area between the end of the push rod 2-232 and the sheet 2000 is small, in order to prevent the thinner sheet 2000 from warping and deforming during the transportation process, so that the pushing position of the push rod 2-232 deviates and causes damage to the sheet 2000, a contoured surface 2-233 is formed on the pushing end of each push rod 2-232. For details, please refer to Figure 6The contour surface 2-233 is designed according to the side wall of the material sheet 2000, and is a concave V-shaped structural surface, so that it can match the shape of the material sheet 2000 to position the material sheet 2000 and prevent the material sheet 2000 from deviating from the predetermined position under the action of the thrust. Furthermore, a buffer layer can be provided at the contact end of the push rod 2-232, and the buffer contact end can be made of a flexible material such as silicone, rubber, etc., so that the flexible material is in direct contact with the material sheet 2000, thereby avoiding scratches and damage to the surface of the material sheet 2000.

[0085] When the push rod 2-232 contacts the sheet 2000, since the sheet 2000 is in a stationary state and the push rod 2-232 is in motion, the push rod 2-232 will transfer the impulse to the sheet 2000 to generate an impact force on the sheet 2000. The impact force generated by the movement of the push rod 2-232 is instantaneous, resulting in stress concentration on the surface and inside of the sheet 2000, which may exceed the yield strength of the material and cause deformation or rupture. To alleviate this problem, install The plate 2-231 is provided with a second guide rail 1-21 on one side facing the base 1, and the push rod 2-232 is slidably arranged on the second guide rail 1-21. Further, the push rod 2-232 is provided with a first abutment block 2-238 facing the mounting plate 2-231, and the mounting plate 2-231 is provided with a second abutment block 2-236 facing the push rod 2-232. An elastic member 2-237 is provided between the first abutment block 2-238 and the second abutment block 2-236. For details, please refer to Figure 7 The deformation direction of the elastic member 2-237 is along the extension direction of the push rod. A section of the second abutment block 2-236 facing the first abutment block 2-238 is provided with a fixed column (not marked in the figure). The elastic member 2-237 is preferably a spring, and the spring is sleeved on the fixed column to achieve fixation. When one end of the push rod 2-232 contacts the sheet 2000, the push rod 2-232 itself will retreat on the second guide rail 1-21 due to the reaction force, and the spring is further compressed to be buffered. This design effectively absorbs the impact force, reduces the damage to the sheet 2000, and improves production efficiency and safety. Such a buffer mechanism not only protects the material from deformation and scratches, but also reduces the wear on the equipment, prolongs the service life of the equipment, and improves the stability of the overall operation.

[0086] In order to improve the moving accuracy of the feeding mechanism 2-23 relative to the first beam 2-22, the first beam 2-22 is provided with two sleeves 2-221. Figure 6Correspondingly, the feeding mechanism 2-23 is provided with two guide rods 2-234, each guide rod 2-234 is movably inserted into a sleeve 2-221, and the two sleeves 2-221 are arranged on both sides of the first driving mechanism 2-24. The first driving mechanism 2-24 is preferably a cylinder, but can also be a driving member such as a hydraulic cylinder. The present case does not impose any restrictions on this. The driving end of the cylinder is connected to the mounting plate 2-231 of the feeding mechanism 2-23. When the feeding mechanism 2-23 is driven to rise and fall, the guide rod 2-234 will be limited in the sleeve 2-221, thereby ensuring that the feeding mechanism 2-23 will not be offset during the movement. The precise guiding and limiting are also used to improve the working efficiency and reliability of the entire mechanism, and it is also convenient for maintenance and adjustment.

[0087] The automatic loading and unloading device 2-100 proposed in this solution can be used for both loading the sheet 2000 to be cleaned and unloading the sheet 2000 after cleaning. The specific loading and unloading positions can be referred to in Figure 3 First, the circulating loading device 1-100 moves the material box 1-4 to the loading and unloading station 1a. The material box 1-4 contains the material sheet 2000 to be cleaned. The material pushing mechanism 2-23 pushes the material sheet 2000 to the conveyor belt 3-1. The conveyor belt 3-1 transports it to the preparation station 1b, and then the material pushing mechanism 2-33 pushes it to the cleaning device 5-100 of the cleaning station 1c. After cleaning, the material pushing mechanism 2-33 can also run in reverse to push the cleaned material sheet 2000 into the material box 1-4, that is, the loading and unloading station 1a to complete the unloading. In view of this, the material pushing mechanism 2-33 is provided with a plurality of dual-purpose push heads 2-331. For details, please refer to Figure 8 The dual-purpose pusher head 2-331 is L-shaped as a whole, and both ends of its lower part are pushing ends. One end is used to push the sheet 2000 to be cleaned into the cleaning station 1c, and the other end is used to push the cleaned sheet 2000 to the loading and unloading station 1aa, so that the structure can achieve multi-functions.

[0088] In order to limit the movement of the first beam 2-22 and the second beam 2-32, the third track 2-21 and the second track 1-51 are both provided with a limit component 2-211. The limit component 2-211 cooperates and identifies with the matching parts on the first beam 2-22 and the second beam 2-32 to limit the movement of the first beam 2-22 and the second beam 2-32 so as not to overtravel. A mechanical limit component 2-211 can also be used to limit the first beam 2-22 and the second beam 2-32, but this case does not impose any restrictions on this.

[0089] In the technical solution of the present invention, the loading rack 1-2 can be driven by a motor, a cylinder or a magnetic force, and the present invention does not limit this. In one embodiment of the present invention, the base 1 is provided with a first driving assembly 1-12, including a fifth motor 2-212, a first screw rod 1-122 and a first slider 1-123. The first screw rod 1-122 is arranged along the extension direction of the first slide rail. The first screw rod 1-122 is arranged at the driving end of the fifth motor 2-212. The first screw rod 1-122 is driven to rotate by the fifth motor 2-212. The first slider 1-123 mounted on the first screw rod 1-122 is screwed to the first screw rod 1-122. When the first screw rod 1-122 rotates, the first slider 1-123 will move along the extension direction of the first screw rod 1-122. The first slider 1-123 is connected to the loading rack 1-2 above, thereby driving the loading rack 1-2 to slide on the first slide rail. Furthermore, the loading rack 1-2 is provided with a second driving assembly 1-22, including a sixth motor 2-311, a second screw rod 1-222 and a second slider 1-223. The second screw rod 1-222 is driven by the sixth motor 2-311 to rotate and drive the second slider 1-223 to move vertically, thereby driving the support plate 1-3 to rise or fall, so that the two support plates 1-3 are staggered to avoid collision and interference.

[0090] In order to adjust the distance between the two loading racks 1-2, a third driving assembly 1-52 is provided on the support plate 1-3. The third driving assembly 1-52 includes two third driving members respectively arranged on the two support plates 1-3. Each third driving member includes a third motor 1-521, a third screw rod 1-522 and a third slider 1-523. The third motor 1-521 drives the third screw rod 1-522 to rotate and drives the third slider 1-523 to move along the extension direction of the third screw rod 1-522 so that the two loading racks 1-2 can be closer or farther away, thereby achieving fine-tuning of the distance between the two loading racks 1-2.

[0091] In the scheme of the present invention, each pallet 1-3 is provided with a plurality of material boxes 1-4, and the number of the material boxes 1-4 is not limited in this scheme. In one embodiment, four material boxes 1-4 are arranged on each pallet 1-3, and a spacing adjustment component 1-6 is arranged on the pallet 1-3 to adjust the spacing between each material box 1-4. The driving principle is that the first cylinder 1-61 installed at the bottom of the pallet 1-3 pushes the fourth slider 1-621-511 inverted on the third track 1-63 to slide along the third track 1-63, and four mounting blocks 1-64 are correspondingly installed on the fourth slider 1-621-511. Each mounting block 1-64 is correspondingly connected to a material box 1-4, thereby driving each material box 1-4 to move and adjust its spacing.

[0092] It should be noted that the present invention does not limit the specific shape and structure of the material box 1-4. In one embodiment of the present invention, the material box 1-4 has a receiving cavity 1-41 with openings at both ends. For details, please refer to Figure 6 The two side walls of the accommodating cavity 1-41 are provided with a plurality of limiting grooves 1-42, and every two corresponding limiting grooves 1-42 together form an accommodating layer, and the sheet 2000 is inserted into the accommodating layer for accommodating. The two ends of the sheet 2000 are respectively limited in the limiting grooves 1-42. When unloading, the sheet 2000 is pushed into the cleaning machine from top to bottom in sequence through the pushing device.

[0093] In this case, the transition conveying device 4-100 can also realize alternating loading and unloading, and can move the sheet 2000 to be cleaned into the cleaning chamber, and can also transport the cleaned sheet 2000 out of the cleaning chamber, and so on. The transition conveying device 4-100 includes a conveyor belt, a plurality of bearing parts and a lifting mechanism 4-3. The conveyor belt is arranged parallel to the conveyor belt 3-1. The conveyor belt includes an upper belt body and a lower belt body. The upper belt body and the lower belt body are respectively provided with a bearing plate 4-121, and the bearing plate 4- 121 is provided with an installation frame opening, and the installation frame opening is provided with a movable plate 4-2. First, the movable plate 4-2 is lifted by the lifting mechanism 4-3 to separate it from the carrier plate 4-121 until it is flush with the conveyor belt 3-1. The material-pushing mechanism 2-33 pushes the material 2000 to be cleaned to the receiving groove on the movable plate 4-2. The lifting mechanism 4-3 then drives the movable plate 4-2 to descend so that the movable plate 4-2 falls on the carrier plate 4-121. The conveyor belt drives the carrier plate 4-121 to move into the cleaning chamber. In order to fix the material 2000, the movable plate 4-2 is provided with multiple bearing parts. For details, please refer to Fig.25 Each bearing part is arranged corresponding to a conveyor belt 3-1, and the bearing part includes two bearing members 4-21 arranged at intervals. The two bearing members 4-21 are respectively provided with relative placement grooves 4-211, and the sheet 2000 is inserted into the two placement grooves 4-211 to achieve limiting.

[0094] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A plasma cleaning device, characterized in that: include: A base, wherein the base is provided with two first slide rails which are arranged in parallel and at intervals, and a conveyor belt which is arranged in parallel with the first slide rails, and a cleaning device is provided at one end of the conveyor belt which is away from the first slide rails, and the cleaning device is provided with a cleaning chamber; A circulating feeding device, the circulating feeding device comprising two feeding racks and two supporting plates, each of the feeding racks being slidably arranged on one of the first slide rails, the feeding racks being provided with a first guide rail extending in a direction perpendicular to the base, each of the supporting plates being slidably arranged on one of the first guide rails, and the supporting plates being provided with a material box for containing material sheets; An automated loading and unloading device, a loading component and an unloading component of the automated loading and unloading device, the loading component comprising a first track, a first beam and a material pushing mechanism, the first track being arranged on the base and arranged along the extension direction of the conveyor belt, the first beam being slidably arranged on the first track, the first beam being provided with a first driving mechanism facing the base, the material pushing mechanism being provided at a driving end of the first driving mechanism, the unloading component comprising a second track, a second beam and a material pushing mechanism, the second track being arranged on the base and arranged parallel to the first track, the second beam being slidably arranged on the second track, the second beam being provided with a second driving mechanism facing the base, the material pushing mechanism being provided at a driving end of the second driving mechanism; and A transition conveying device, the transition conveying device includes a supporting plate movably arranged on the base, the supporting plate is provided with a receiving groove for accommodating the sheet, the supporting plate is arranged at one end of the conveyor belt away from the circulating feeding device, and the supporting plate can rotate between the conveyor belt and the cleaning chamber.

2. The plasma cleaning device according to claim 1, characterized in that: The base is provided with a pedestal, the conveyor belt is provided on the pedestal, the pedestal is provided with a material pressing mechanism, and the material pressing mechanism comprises: A material pressing driving member, the material pressing driving member is arranged on the base, a driving end of the material pressing driving member is provided with a transmission plate, and the transmission plate is arranged along the extending direction of the conveyor belt; and Two seesaws are rotatably connected to the base and are arranged on both sides of the pressing drive member along the direction of the conveyor belt. The seesaw has a connecting end and a free end. The connecting end is connected to the transmission plate. The free end is provided with a pressing wheel, and the pressing wheel can approach or move away from the conveyor belt.

3. The plasma cleaning device according to claim 2, characterized in that: The pressing mechanism further comprises a fine-tuning bolt, the free end of which is provided with a through hole facing the base, the fine-tuning bolt is screwed into the through hole and can extend from the through hole to abut against the base.

4. The plasma cleaning device according to claim 3, characterized in that: The base is provided with a placing rack, the placing rack is located at one end of the conveyor belt away from the circulating feeding device, and the placing rack is formed with a buffer groove, and the buffer groove is connected to the conveyor belt.

5. The plasma cleaning device according to claim 3, characterized in that: The plasma cleaning equipment includes a plurality of conveyor belts, one of every two adjacent conveyor belts is disposed on the base, and the other one of the conveyor belts is slidably disposed on a second guide rail on the base; The base is provided with a width adjustment driving member, a driving end of the width adjustment driving member is provided with a fourth screw rod, the fourth screw rod is provided with a fifth slider, and the fifth slider is connected to the conveyor belt arranged on the second guide rail so that the distance between every two adjacent conveyor belts is adjustable.

6. The plasma cleaning device according to claim 3, characterized in that: The base is provided with a longitudinal adjustment mechanism, and the longitudinal adjustment mechanism comprises: A longitudinal adjustment driving member, the longitudinal adjustment driving member is arranged on the base, a driving end of the longitudinal adjustment driving member is provided with a fifth screw rod extending along the connecting direction of the material box and the cleaning device, the fifth screw rod is provided with a sliding seat, and the plurality of conveyor belts are all arranged on the sliding seat; and The displacement detection mechanism comprises a detection end arranged on the base and a sensing end arranged on the sliding seat, and the detection end is electrically connected to the longitudinal adjustment driving member.

7. The plasma cleaning device according to any one of claims 1 to 6, characterized in that: The automatic loading and unloading device further comprises a pressure detection assembly, wherein the pressure detection assembly comprises a loading pressure sensor disposed on the first beam and a unloading pressure sensor disposed on the second beam; The first track and the second track are respectively provided with a first motor for driving the first beam to move and a second motor for driving the second beam to move. The loading pressure sensor is electrically connected to the loading mechanism and the first motor, and the unloading pressure sensor is electrically connected to the unloading mechanism and the second motor.

8. The plasma cleaning device according to claim 7, characterized in that: The material pushing mechanism comprises a mounting plate and a plurality of material pushing rods arranged on the mounting plate, the mounting plate is movably arranged on the first crossbeam, and the plurality of material pushing rods are evenly spaced and arranged on the mounting plate; A first guide rail is provided on one side of the mounting plate facing the base, and the push rod is slidably arranged on the first guide rail; The push rod is provided with a first abutment block facing the mounting plate, and the mounting plate is provided with a second abutment block facing the push rod. An elastic member is provided between the first abutment block and the second abutment block, and the deformation direction of the elastic member is along the extension direction of the push rod.

9. The plasma cleaning device according to any one of claims 1 to 6, characterized in that: The transition conveying device comprises: A conveyor belt, the conveyor belt is arranged parallel to the conveyor belt, the conveyor belt comprises an upper belt body and a lower belt body, the upper belt body and the lower belt body are respectively provided with a bearing plate, the bearing plate is provided with a mounting frame opening, and the mounting frame opening is provided with a movable plate; A plurality of bearing parts, the plurality of bearing parts are arranged on the movable plate, each bearing part is arranged corresponding to one of the conveyor belts, the bearing part comprises two bearing members arranged at intervals, and the two bearing members are respectively provided with opposite placement grooves; and A lifting mechanism is arranged on the base, and a movable end of the lifting mechanism is connected to the movable plate and is used to drive the movable plate to rise and fall.

10. The plasma cleaning device according to claim 9, characterized in that: The movable plate is provided with a plurality of bearing parts stacked in a vertical direction, and a bracket is provided between every two adjacent bearing parts, and the bracket is used for supporting the bearing parts.

Images