Vacuum arc target cathode cooling seat device

Abstract

The invention relates to the technical field of coating equipment, in particular to a vacuum arc target cathode cooling seat device which comprises a cooling seat, a target block is arranged at the axial end of the cooling seat, a heat dissipation cavity is formed in the end, away from the target block, of the cooling seat, a magnet is arranged at the end, away from the target block, of the heat dissipation cavity, and a partition plate is arranged in the middle of the cooling seat. A heat exchange groove is formed in the side, connected with the heat dissipation cavity, of the partition plate, and the heat dissipation cavity is filled with heat exchange media. The circulating heat exchange medium is cooled through the arranged cooling-water machine, the heat exchange medium flows through the heat dissipation cavity to take away heat generated when the target block works, the target block is cooled, the cooling base is in full contact with the heat exchange medium through the arranged heat exchange groove, and the heat exchange efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of film coating equipment, and in particular to a vacuum arc target cathode cooling seat device. Background Art

[0002] Cathodic arc ion plating has gradually developed into the main force in the field of hard films. It uses cold arc discharge, has a high deposition rate, and the particle ionization rate of the film layer can reach 60% to 80%, which is the highest among many PVD coating technologies. At present, cathodic arc ion plating technology has certain disadvantages. During deposition, fine droplets will splash out from the target surface and condense on the surface of the coating, causing the surface roughness to increase.

[0003] The conventional arc ion plating equipment uses a water cooling system with a cooling tower. The overall water temperature of the system is high. In addition, the arc target is used frequently, especially in summer when the room temperature is high and the cooling water temperature exceeds 45 degrees Celsius, the temperature in the target seat will be about 20 degrees Celsius higher. As a result, the target material cooling effect is very poor, affecting the bonding strength and finish of the coating. Secondly, a large amount of scale is generated in the target seat, which further affects the heat dissipation effect and forms a vicious circle, which will cause uneven temperature distribution on the entire target surface. Uneven temperature will cause greater thermal stress in the target material, which may cause warping and deformation of metal targets, and may directly break non-metallic targets such as ceramics. In particular, the target seat is a sealed space, and there is no way to clean the internal scale. It is very common for the scale to block the target seat after about two years. When the cooling water pipe bursts and water sprays are found, it is very likely to damage the power supply equipment of the machine. Therefore, the above cooling problem of the arc target cathode cooling seat is a key hidden danger that needs to be solved urgently. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a vacuum arc target cathode cooling seat device in response to the above-mentioned technical deficiencies. The target material is installed in the cooling seat, and a heat exchange groove is arranged in the partition of the cooling seat, so that the heat exchange medium in the heat dissipation cavity is fully in contact with the cooling seat to achieve a better heat exchange effect, which can reduce the emission problem of droplets or large particles to a certain extent.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a vacuum arc target cathode cooling seat device, including a cooling seat, a target block is provided at one axial end of the cooling seat, a heat dissipation cavity is provided at the end of the cooling seat away from the target block, a magnet is provided at the end of the heat dissipation cavity away from the target block, a partition is provided in the middle of the cooling seat, a heat exchange groove is provided on the side where the partition is connected to the heat dissipation cavity, and the heat dissipation cavity is filled with heat exchange medium.

[0006] To further optimize the technical solution, the heat exchange medium filled in the heat dissipation cavity exchanges heat with a chiller arranged outside through a pipeline.

[0007] To further optimize the technical solution, a heat exchange tube is provided in the heat dissipation cavity, and a liquid inlet pipe and a liquid outlet pipe are respectively provided at both ends of the heat exchange tube. The liquid inlet pipe and the liquid outlet pipe respectively pass through the outside of the heat dissipation cavity, and the ends of the liquid inlet pipe and the liquid outlet pipe away from the heat exchange tube are connected to a liquid circulation refrigerator through a pipeline, and the heat dissipation cavity is filled with thermal conductive silicone oil.

[0008] To further optimize the technical solution, the heat exchange tube is a planar vortex structure, and the liquid inlet pipe and the liquid outlet pipe are respectively arranged at the ends of the free end of the heat exchange tube.

[0009] To further optimize the technical solution, the cross section of the heat exchange tube is an elliptical tube, the middle part of the vortex of the heat exchange tube is clamped with one end of the limiting column, and the other end of the limiting column is connected to the partition.

[0010] To further optimize the technical solution, a memory alloy torsion portion is provided in the middle of the limiting column, a fixed seat is provided at one end of the memory alloy torsion portion, a slot is provided at the other end of the memory alloy torsion portion, the middle part of the vortex of the heat exchange tube is clamped in the slot, and the fixed seat is welded and fixed to the partition.

[0011] To further optimize the technical solution, the magnet is arranged in a columnar magnetic sleeve, a threaded cover is provided at the end of the magnetic sleeve, an adjustment rod is provided at one end of the magnet, and the adjustment rod is threadedly connected at the center of the threaded cover.

[0012] Compared with the prior art, the present invention has the following advantages: 1. The circulating heat exchange medium is cooled by the chiller. The heat exchange medium flows through the heat dissipation cavity to take away the heat of the target block during operation and cool the target block. The heat exchange slot is used to achieve full contact between the cooling seat and the heat exchange medium, thereby improving the heat exchange efficiency, ensuring the coating quality, and avoiding problems such as target material warping and deformation; 2. The heat exchange fluid circulating in the heat exchange tube does not directly contact the inner wall of the heat dissipation cavity, which can effectively prevent the heat exchange fluid from corroding the inner wall and partition of the heat dissipation cavity and improve the service life; 3. The heat exchange fluid circulating in the heat exchange tube does not directly contact the inner wall of the heat dissipation cavity. The fluctuation of the heat exchange fluid pressure in the heat exchange tube has low dependence on the structural strength of the heat dissipation cavity. The partition can be made thinner, further improving the heat conduction efficiency and the cooling speed. 4. The heat exchange between the heat exchange tube, the cooling seat and the target block is achieved through the internal filling of thermal conductive silicone oil. The heat dissipation efficiency of the target block is high, the overall safety and stability are long in service life; 5. The memory alloy torsion part twists after receiving the heat transferred by the target block, which can bring the vortex-shaped heat exchange tube toward the center, accelerate the reduction of the center temperature of the target block, achieve uniform cooling of the target block, and further effectively avoid deformation of the target block in the cooling seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1It is a cross-sectional view of a first embodiment of a vacuum arc target cathode cooling seat device; Figure 2 It is a structural schematic diagram of a second embodiment of a vacuum arc target cathode cooling seat device; Figure 3 It is a front view of the heat exchange tube in the second embodiment; Figure 4 It is an explosion diagram of a second embodiment of a vacuum arc target cathode cooling seat device; Figure 5 for Figure 4 A local enlarged schematic diagram of the middle A; Figure 6 It is a partial enlarged schematic diagram of the connection between the limiting column and the heat exchange tube in the second embodiment.

[0014] In the figure: 1. cooling seat; 11. partition; 12. cylinder; 13. heat exchange tank; 14. cylinder seat; 2. target block; 3. heat dissipation chamber; 4. magnet; 40. magnetic sleeve; 41. threaded cover; 42. adjusting rod; 5. heat exchange tube; 51. liquid inlet pipe; 52. liquid outlet pipe; 6. limiting column; 60. fixing seat; 61. memory alloy torsion part; 62. slot; 7. arc-starting mechanism; 71. arc-starting wire; 8. shielding sleeve; 81. ceramic insulating sleeve; 82. ionization source flange; 83. adjusting sleeve; 84. auxiliary electrode; 9. cylinder flange. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the reference drawings of specific embodiments. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0016] Unless otherwise defined, the technical or scientific terms used herein shall have the common meanings understood by persons having ordinary skills in the field to which the present invention belongs. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly. Embodiment 1

[0017] Combination Figure 1As shown, a vacuum arc target cathode cooling seat device comprises a cooling seat 1, a target block 2 is threadedly mounted on one axial end of the cooling seat 1, an arc-starting mechanism 7 is provided on one side of the target block 2, an arc-starting wire 71 is provided on one end of the arc-starting mechanism 7, a heat dissipation cavity 3 is provided on the end of the cooling seat 1 away from the target block 2, a heat-conducting partition 11 is provided in the middle of the cooling seat 1, a heat exchange groove 13 is provided on the side where the partition 11 is connected to the heat dissipation cavity 3, one end of the cooling seat 1 away from the target block 2 is threadedly connected to one end of a cylinder 12, and the other end of the cylinder 12 is threadedly connected to a cylinder seat 14, and the partition 11, the cylinder 12 and the cylinder seat 14 constitute the heat dissipation cavity 3. The heat dissipation cavity 3 is filled with a heat exchange medium, and in this embodiment, the heat exchange medium is distilled water, and a water nozzle is threadedly connected in the cylinder seat 14, and the heat dissipation cavity 3 is connected to a circulating refrigerator through the provided water nozzle, and the circulating refrigerator here can be a water chiller.

[0018] The outer side of the cooling seat 1 is provided with a shielding sleeve 8, which is arranged between the target block 2 and the arc striking mechanism 7. The outer side of the shielding sleeve 8 is connected to the ionization source flange 82 through a ceramic insulating sleeve 81, and the ionization source flange 82 is fixedly connected to the cylinder flange 9. An adjusting sleeve 83 is threadedly connected to one end of the inner side of the shielding sleeve 8, and an auxiliary electrode 84 is threadedly connected to the end of the adjusting sleeve 83 away from the shielding sleeve 8. A magnet 4 is provided at the end of the heat dissipation cavity 3 away from the target block 2. The magnet 4 is a strong magnet of neodymium iron boron. The magnet 4 is arranged in a columnar magnetic sleeve 40. A threaded cover 41 is provided at the end of the magnetic sleeve 40. An adjusting rod 42 is provided at one end of the magnet 4. The adjusting rod 42 is threadedly connected at the center of the threaded cover 41, and the magnetic sleeve 40 is penetrated in the middle of the cylinder seat 14.

[0019] When using, combine Figure 1 As shown, the heat exchange medium that circulates with the outside is filled in the heat dissipation cavity 3. The circulating heat exchange medium is cooled by the provided chiller. The heat exchange medium flows through the heat dissipation cavity 3 to take away the heat of the target block 2 during operation, and cools the target block 2. The provided heat exchange slot 13 enables the cooling seat 1 to fully contact with the heat exchange medium, thereby improving the heat exchange efficiency. Embodiment 2

[0020] Combination Figures 2 to 6As shown, a vacuum arc target cathode cooling seat device is different from the first embodiment in that a heat exchange tube 5 with a smooth inner wall is provided in the heat dissipation cavity 3 of the cooling seat 1, and a liquid inlet pipe 51 and a liquid outlet pipe 52 are respectively provided at both ends of the heat exchange tube 5. The heat exchange tube 5 is a planar vortex structure, and the liquid inlet pipe 51 and the liquid outlet pipe 52 are respectively arranged at the ends of the free end of the heat exchange tube 5. The liquid inlet pipe 51 and the liquid outlet pipe 52 are respectively passed through the outside of the heat dissipation cavity 3, and the heat dissipation cavity 3 is filled with heat-conducting silicone oil. The cross section of the heat exchange tube 5 is an elliptical tubular shape, the middle part of the vortex of the heat exchange tube 5 is clamped with one end of the limit column 6, and the other end of the limit column 6 is connected to the partition 11. The middle part of the limit column 6 is provided with a memory alloy torsion part 61, one end of the memory alloy torsion part 61 is provided with a fixed seat 60, and the other end of the memory alloy torsion part 61 is provided with a slot 62, the middle part of the vortex of the heat exchange tube 5 is clamped in the slot 62, and the fixed seat 60 is welded and fixed to the partition 11.

[0021] When in use, the ends of the liquid inlet pipe 51 and the liquid outlet pipe 52 away from the heat exchange tube 5 are connected to the liquid circulation refrigerator through a pipeline. The heat exchange liquid circulating in the heat exchange tube 5 does not directly contact the inner wall of the heat dissipation cavity 3, which can effectively prevent the heat exchange liquid from corroding the inner wall of the heat dissipation cavity 3 and the partition 11, thereby improving the service life. The heat exchange between the heat exchange tube 5 and the cooling seat 1 and the target block 2 is achieved through the internally filled thermal conductive silicone oil. The target block 2 has high heat dissipation efficiency, is safe and stable as a whole, and has a long service life. The memory alloy torsion portion 61 twists after receiving the heat transferred by the target block 2, and can gather the vortex-shaped heat exchange tube 5 toward the center, which can accelerate the reduction of the center temperature of the target block 2, achieve uniform cooling of the target block 2, and effectively avoid deformation of the target block 2.

[0022] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

Claims

1. A vacuum arc target cathode cooling seat device, characterized in that: The invention comprises a cooling seat (1), wherein a target block (2) is provided at one axial end of the cooling seat (1), a heat dissipation cavity (3) is provided at one end of the cooling seat (1) away from the target block (2), a magnet (4) is provided at one end of the heat dissipation cavity (3) away from the target block (2), a partition (11) is provided in the middle of the cooling seat (1), a heat exchange groove (13) is provided on one side of the partition (11) connected to the heat dissipation cavity (3), and the heat dissipation cavity (3) is filled with a heat exchange medium.

2. A vacuum arc target cathode cooling seat device according to claim 1, characterized in that: The heat exchange medium filled in the heat dissipation cavity (3) exchanges heat with a water chiller arranged outside through a pipeline.

3. A vacuum arc target cathode cooling seat device according to claim 1, characterized in that: A heat exchange tube (5) is provided in the heat dissipation cavity (3), and a liquid inlet tube (51) and a liquid outlet tube (52) are provided at both ends of the heat exchange tube (5), respectively. The liquid inlet tube (51) and the liquid outlet tube (52) are respectively passed through the outside of the heat dissipation cavity (3), and one end of the liquid inlet tube (51) and the liquid outlet tube (52) away from the heat exchange tube (5) is connected to a liquid circulation refrigerator through a pipeline, and the heat dissipation cavity (3) is filled with heat-conducting silicone oil.

4. A vacuum arc target cathode cooling seat device according to claim 3, characterized in that: The heat exchange tube (5) is a planar vortex structure, and the liquid inlet pipe (51) and the liquid outlet pipe (52) are respectively arranged at the ends of the free end of the heat exchange tube (5).

5. The vacuum arc target cathode cooling seat device according to claim 3, characterized in that: The cross section of the heat exchange tube (5) is an elliptical tube; the middle part of the vortex of the heat exchange tube (5) is clamped with one end of the limiting column (6); and the other end of the limiting column (6) is connected to the partition (11).

6. A vacuum arc target cathode cooling seat device according to claim 5, characterized in that: A memory alloy torsion portion (61) is provided in the middle of the limiting column (6), a fixing seat (60) is provided at one end of the memory alloy torsion portion (61), a clamping groove (62) is provided at the other end of the memory alloy torsion portion (61), the middle of the vortex of the heat exchange tube (5) is clamped in the clamping groove (62), and the fixing seat (60) is fixed to the partition plate (11) by welding.

7. A vacuum arc target cathode cooling seat device according to claim 1, characterized in that: The magnet (4) is arranged in a columnar magnetic sleeve (40), a threaded cover (41) is provided at the end of the magnetic sleeve (40), an adjustment rod (42) is provided at one end of the magnet (4), and the adjustment rod (42) is threadedly connected at the center of the threaded cover (41).

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